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KR900701374A - 건조한 배출가스 처리장치 및 처리방법 - Google Patents

건조한 배출가스 처리장치 및 처리방법

Info

Publication number
KR900701374A
KR900701374A KR1019900700226A KR900700226A KR900701374A KR 900701374 A KR900701374 A KR 900701374A KR 1019900700226 A KR1019900700226 A KR 1019900700226A KR 900700226 A KR900700226 A KR 900700226A KR 900701374 A KR900701374 A KR 900701374A
Authority
KR
South Korea
Prior art keywords
silicon
gas
gas treatment
exhaust gas
calcium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019900700226A
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English (en)
Other versions
KR0125920B1 (ko
Inventor
로버트 제임스 스미스
Original Assignee
로버트 제임스 스미스
플라즈마 프로덕트 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 로버트 제임스 스미스, 플라즈마 프로덕트 리미티드 filed Critical 로버트 제임스 스미스
Publication of KR900701374A publication Critical patent/KR900701374A/ko
Application granted granted Critical
Publication of KR0125920B1 publication Critical patent/KR0125920B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)

Abstract

내용 없음

Description

건조한 배출가스 처리장치 및 처리방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 한 형태의 배출가스 조절장치 또는 반응기기등을 자른 개략단면도.
제2도는 제1도에서 반응기기등의 시약통장치를 후퇴시킨 단면도.
제3도는 제1도의 반응기기등을 포함한 파이프장치를 나타낸 도면.

Claims (16)

  1. 배출가스 처리장치로서, 상기 가스를 실리콘, 또는 실리콘이 풍부한 합금이나 물질에 노출시키는 수단, 및 그 다음으로 상기 가스를 산화칼슘, 또는 산화칼슘 화합물 또는 산화칼슘을 포함한 물질 또는 소다석회를 포함한 매체에 노출시키는 수단으로 구성된 배출가스 처리장치.
  2. 제1항에 있어서, 제1(실리콘)단계 및 연달아 배치된 제2(산화칼슘)단계로 구성된 배출 가스 처리장치.
  3. 제1또는 제2항에 있어서, 상기 산화칼슘이 석회의 형태로 나타난 배출가스 처리장치.
  4. 제3항에 있어서, 상기 석회가 100℃ 이상 바람직하게는 250℃와 550℃사이의 온도까지 가열되는 배출가스 처리장치.
  5. 상기 한항에 있어서, 상기 실리콘 또는 실리콘합금이나 물질이 200℃이상 바람직하게는 350℃와 500℃사이의 온도까지 가열되는 배출가스 처리장치.
  6. 상기 한 항에 상기 실리콘 또는 실리콘이 풍부한 합금이나 물질과 혼합된 구리 또는 구리가 풍부한 물질을 추가로 포함한 배출가스 처리장치.
  7. 상기 한 항에 있어서, 상기 가스가 연달아 통과하며 실리콘 및 산화칼슘이 들어가는 구역들이 있는 하나의 싱글 가스처리 챔버로 구성된 배출가스 처리장치.
  8. 상기 한 항에 있어서, 상기 가스를 산화구리 또는 산화구리가 풍부한 시약에 실질적으로 노출시키는 수단을 포함한 배출가스 처리장치.
  9. 제8항에 있어서, 상기 산화구리 시약이 산화구리와 석회의 혼합물인 배출가스 처리장치.
  10. 제1항에 따른 것으로, 제8 또는 9항에 있어서, 제1(실리콘)단계, 연달아 배치된 제2(산화칼슘)단계 및 제3(산화구리)단계로 구성된 배출가스 처리장치.
  11. 제10항에 있어서, 상기 단계들이 싱글 가스처리 챙버속에 포함되고 상기 가스가 연달아 상기 단계들을 통과하는 배출가스 터리장티.
  12. 배출가스 특히 PECVD 실행으로부터 나오는 것만이 아닌 배출가스 처리방법에 있어서, 상기 가스가 첫번째로 실리콘 또는 실리콘이 풍부한 합금이나 물질에 노출되고, 그 다음으로 산화칼슘 또는 산화칼슘을 함유한 화합물이나 물질 또는 소다석회를 함유한 매체에 노출되어 그 결과 상기 배출가스 속에 있는 염소 또는 염소화합물 첫번째로 4-할로겐화규소화합물들로 변환되고 그 다음으로 상기 4-할로겐화규소화합물이 비휘발성 칼슘 실리케이트들 및 할로겐화칼슘화합물들로 변화되어 상기 배출가스에는 염소 또는 다른 할로겐가스가 없게 되는 배출가스 처리방법.
  13. 제12항에 있어서, 상기 가스가 산화구리 또는 산화구리가 풍부한 시약을 뒤이어 통과하는 배출가스 처리방법.
  14. 제7항에 있어서, 상기 처리가 하나 또는 그 이상의 가스처리챔버나 구역들을 연속적으로 통과하는 과정으로서 실행되는 배출가스 처리방법.
  15. 첨부된 도면에 관하여 기술된 것과 실질적으로 같은 배출가스 처리장치.
  16. 첨부된 도면에 관하여 기술된 것과 실질적으로 같은 배출가스 처리방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900700226A 1988-06-04 1989-05-31 건조한 배출 가스 처리 장치 Expired - Fee Related KR0125920B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB888813270A GB8813270D0 (en) 1988-06-04 1988-06-04 Dry exhaust gas conditioning
GB8813270.9 1988-06-04
PCT/GB1989/000600 WO1989011905A1 (en) 1988-06-04 1989-05-31 Dry exhaust gas conditioning

Publications (2)

Publication Number Publication Date
KR900701374A true KR900701374A (ko) 1990-12-01
KR0125920B1 KR0125920B1 (ko) 1997-12-19

Family

ID=10638097

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900700226A Expired - Fee Related KR0125920B1 (ko) 1988-06-04 1989-05-31 건조한 배출 가스 처리 장치

Country Status (8)

Country Link
US (1) US5213767A (ko)
EP (1) EP0419507B1 (ko)
JP (1) JP2795504B2 (ko)
KR (1) KR0125920B1 (ko)
AT (1) ATE194780T1 (ko)
DE (1) DE68929232T2 (ko)
GB (1) GB8813270D0 (ko)
WO (1) WO1989011905A1 (ko)

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Also Published As

Publication number Publication date
JP2795504B2 (ja) 1998-09-10
KR0125920B1 (ko) 1997-12-19
EP0419507A1 (en) 1991-04-03
DE68929232D1 (de) 2000-08-24
JPH04502726A (ja) 1992-05-21
WO1989011905A1 (en) 1989-12-14
ATE194780T1 (de) 2000-08-15
US5213767A (en) 1993-05-25
GB8813270D0 (en) 1988-07-06
EP0419507B1 (en) 2000-07-19
DE68929232T2 (de) 2001-01-25

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