KR900011063A - Manufacturing method and device of Al thin film - Google Patents
Manufacturing method and device of Al thin filmInfo
- Publication number
- KR900011063A KR900011063A KR1019880017531A KR880017531A KR900011063A KR 900011063 A KR900011063 A KR 900011063A KR 1019880017531 A KR1019880017531 A KR 1019880017531A KR 880017531 A KR880017531 A KR 880017531A KR 900011063 A KR900011063 A KR 900011063A
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing
- thin film
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10P14/42—
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019880017531A KR950000855B1 (en) | 1988-12-26 | 1988-12-26 | Aluminum film depositing method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019880017531A KR950000855B1 (en) | 1988-12-26 | 1988-12-26 | Aluminum film depositing method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR900011063A true KR900011063A (en) | 1990-07-11 |
| KR950000855B1 KR950000855B1 (en) | 1995-02-02 |
Family
ID=19280710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019880017531A Expired - Fee Related KR950000855B1 (en) | 1988-12-26 | 1988-12-26 | Aluminum film depositing method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR950000855B1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100813564B1 (en) * | 2006-09-11 | 2008-03-17 | 배상열 | Voltage variable thin film deposition method and apparatus |
| CN101827953A (en) * | 2007-10-10 | 2010-09-08 | 艾细饰株式会社 | Voltage variable type thin film deposition method and apparatus therefor |
| KR20090052174A (en) * | 2007-11-20 | 2009-05-25 | 아이시스(주) | Diffusion thin film deposition method and apparatus |
-
1988
- 1988-12-26 KR KR1019880017531A patent/KR950000855B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR950000855B1 (en) | 1995-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR900005641A (en) | Thin film forming device and method | |
| EP0239958A3 (en) | Thin film semiconductor device and method of manufacturing the same | |
| KR900019215A (en) | Semiconductor device and manufacturing method thereof | |
| EP0196915A3 (en) | Thin film transistor array and method of manufacturing same | |
| KR890015366A (en) | Semiconductor thin film formation method | |
| KR910007164A (en) | Semiconductor device and its manufacturing method | |
| KR910003787A (en) | Semiconductor device and manufacturing method of semiconductor device | |
| KR900002485A (en) | Thin-film electronic device and its manufacturing method | |
| KR900702549A (en) | Electret material and manufacturing method of electret material | |
| EP0358842A3 (en) | Semiconductor laser device and method of manufacturing same | |
| KR880002268A (en) | Thin film forming device | |
| EP0229627A3 (en) | Thin film electroluminescent device and method of manufacturing the same | |
| KR910010637A (en) | Etching method and etching device | |
| KR910001409A (en) | Optical parts and manufacturing method | |
| DE69122030D1 (en) | Manufacturing method and structure of an electroluminescent thin film device | |
| FI894736A0 (en) | Biodegradable film and method of making the same | |
| FI922060L (en) | Thin film support structure and method for its manufacture | |
| EP0194748A3 (en) | Magnetic thin film and method of manufacturing the same | |
| KR860005526A (en) | Through-capacitor device and manufacturing method thereof | |
| KR890015360A (en) | Semiconductor device and its manufacturing method | |
| IT8620599A0 (en) | PROCEDURE AND DEVICE FOR PRODUCING A FILM OF ARTIFICIAL MATTER. | |
| EP0250764A3 (en) | Film thickness measuring method and device therefor | |
| KR890017559A (en) | Optical attenuator and manufacturing method | |
| KR880700738A (en) | Thin film forming device | |
| EP0457601A3 (en) | Thin film semi-conductor device and method of producing same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
St.27 status event code: A-0-1-A10-A12-nap-PA0109 |
|
| R17-X000 | Change to representative recorded |
St.27 status event code: A-3-3-R10-R17-oth-X000 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| G160 | Decision to publish patent application | ||
| PG1605 | Publication of application before grant of patent |
St.27 status event code: A-2-2-Q10-Q13-nap-PG1605 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U11-oth-PR1002 Fee payment year number: 1 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 5 |
|
| PN2301 | Change of applicant |
St.27 status event code: A-5-5-R10-R13-asn-PN2301 St.27 status event code: A-5-5-R10-R11-asn-PN2301 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 6 |
|
| PN2301 | Change of applicant |
St.27 status event code: A-5-5-R10-R13-asn-PN2301 St.27 status event code: A-5-5-R10-R11-asn-PN2301 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 7 |
|
| FPAY | Annual fee payment |
Payment date: 20020130 Year of fee payment: 8 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 8 |
|
| LAPS | Lapse due to unpaid annual fee | ||
| PC1903 | Unpaid annual fee |
St.27 status event code: A-4-4-U10-U13-oth-PC1903 Not in force date: 20030203 Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date: 20030203 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |