KR900003969B1 - Ultrasonic Spray Oscillator - Google Patents

Abstract

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Description

Ultrasonic Spray Oscillator

1 to 3 are partial front views showing various types of shapes of the ultrasonic spraying oscillator according to the first embodiment of the present invention.

4 and 5 are partial cross-sectional views showing still another form of the ultrasonic spraying oscillator according to the first embodiment of the present invention.

6 is a partial front view of an edge portion of a conventional vibrator.

Fig. 7 is a schematic cross-sectional view of an ultrasonic jet nozzle equipped with a conventional vibrator capable of using the ultrasonic jet vibrator according to the first embodiment of the present invention.

8 is a partial front view showing still another embodiment of the ultrasonic spraying vibrator according to the first embodiment of the present invention.

9 is a partial front view of a form of an ultrasonic jet oscillator according to a second embodiment of the present invention.

10 is a cross-sectional view of an embodiment of an ultrasonic spraying apparatus using the ultrasonic spraying vibrator according to the second embodiment of the present invention.

11 to 13 are partial cross-sectional views of another form of the ultrasonic spraying vibrator according to the second embodiment of the present invention.

14 is a cross-sectional view of still another embodiment of the ultrasonic jet device using the ultrasonic jet vibrator shown in FIG.

15 is a partial cross-sectional view of still another form of the ultrasonic spraying vibrator according to the second embodiment of the present invention.

* Explanation of symbols for main parts of the drawings

1, 1A to 1F, 10A to 10E: oscillator

2, 2A to 2F, 20A to 20E: Edge

4: liquid supply passage 6: center hole

8: nozzle casing 10, 110: injection nozzle

12: shoulder 14: vibrator pressing member

16, 18: fuel supply port 100: ultrasonic vibration generating means

1a: main body 1b: vibrator shaft

1c: transition part 1d: locking jaw

A to E: edge A 'D': groove

R1 to R4: curve (curved surface) R: curvature

d: diameter h ₁ , h ₂ : height

α: angle w: width of the edge portion

p: pitch

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to ultrasonic atomization devices, that is to say ultrasonic injection devices such as ultrasonic injection nozzles, and in particular, (1) automotive injection nozzles, for example electronically controlled gasoline injection nozzles or electronically controlled diesel. Injection nozzles, (2) fuel nozzles for gas turbines, (3) boilers for industrial, commercial and domestic use, furnaces for furnaces, heaters, and (4) industrial liquid sprayers, e.g. food, pharmaceuticals, pesticides, fertilizers, etc. Dryer atomizers for the purpose of drying liquid substances, sprays for temperature control, humidity control, atomizing sprayers (ceramic particles), spray coating equipment, reaction accelerators, and (5) liquids other than industrial use. Suitable for use in nebulizers, eg pesticide spreaders, disinfectant spreaders, etc., used in ultrasonic spray nozzles, ie ultrasonic spraying devices, for the intermittent or continuous atomization of liquids. The present invention relates to an ultrasonic spraying vibrator.

Conventionally, in various fields as described above, a liquid ("liquid" in this specification is referred to as including not only a general liquid but also a liquid substance such as a suspension solution). In order to do this, a pressure spray burner or a liquid sprayer is used.

The injection nozzle used for such a spray burner or a liquid atomizer is atomizing a liquid by the cutting action between the liquid sprayed from a nozzle and external air (atmosphere).

Therefore, in order to atomize the liquid to be supplied, it is necessary to increase the liquid supply pressure, and the liquid supply equipment, for example, the pump, the piping, etc., becomes complicated and enlarged.

In addition, the injection flow rate is adjusted by changing the pressure of the liquid to be supplied or by changing the area of the injection hole of the nozzle. However, in the former method, the fine particles are formed when the flow rate is low (when the pressure is low). As a result of the improvement, the medium and large sized boilers aim to fine-tune liquid fuel supplied by using air or steam together.

As a result, the device becomes more complicated and larger in size. On the other hand, in the latter method, the structure of the nozzle is very complicated, and its adjustment and maintenance are very difficult.

In order to improve the drawbacks of such conventional injection nozzles, attempts have been made to spray the substance in the liquid state pressurized from the injection port of the injection nozzle and to impart ultrasonic vibration to the substance in the liquid state.

However, the conventional liquid spray nozzles by ultrasonic waves have a very small spray amount and cannot be used for such spray nozzles requiring a large amount of fine particles.

The inventors of the present invention conducted a lot of research and experiments on the liquid atomization mechanism by ultrasonic waves and the shape of the ultrasonic vibrator in order to achieve the fine particle formation of a large amount of liquid. By supplying the liquid in the form of a thin film at the edge, finding a large amount of fine particles of liquid at the edge, and suggesting an ultrasonic spraying method and a spray nozzle (Japanese Patent Application No. 59-77572). See).

The present inventors conducted research experiments again on the shape of the vibrator of the ultrasonic injection nozzle. As a result, the shape of the vibrator is required to be used when the atomization amount (spray amount) of the liquid and, for example, the diesel injection nozzle are used. We found that it had a great influence on the break (short-term spray) of (spray).

The present invention is based on such novel matters, and relates to an ultrasonic jet nozzle according to the above-described invention of the source, in particular to an ultrasonic jet nozzle, that is, to an improvement of a vibrator used in various types of ultrasonic jet devices (ultrasound atomizers). It is characterized by the shape of the vibrator.

An object of the present invention is to provide an ultrasonic spraying (atomization) vibrator capable of supplying liquid intermittently or continuously.

Another object of the present invention is to provide a large amount of liquid compared to the conventional spray nozzle and ultrasonic spray nozzle, and to provide an ultrasonic spraying vibrator capable of stably spraying, ie spraying a large amount of liquid.

Still another object of the present invention is to provide an ultrasonic injection vibrator capable of improving the spray breakup phenomenon required for, for example, a diesel injection nozzle, which eliminates the liquid retention portion.

It is still another object of the present invention to provide a vibrator for ultrasonic spraying capable of achieving stable atomization, in which the state (flow rate, particle diameter) of the atomization does not vary depending on the nature and condition of the feed liquid, especially the viscosity. .

The above objects are achieved by the ultrasonic spraying oscillator according to the present invention. In summary, the present invention provides an outer edge portion or an inner edge portion formed at an end portion of the ultrasonic vibrator, and an edge portion having one or more stages of edges, and the liquid is supplied to the edge portion to atomize the liquid. In the ultrasonic spraying oscillator for forming, the ultrasonic spraying oscillator is formed by connecting a continuous curved surface of the edge portion of one or more stages or by forming a curved surface on a part of the recessed portion of the edge portion.

Still another aspect of the present invention is an ultrasonic spraying vibrator comprising a spiral screw thread formed in the same diameter form or in the form of fluctuation in the diameter of the edges of the liquid.

[First Embodiment]

First, an example of the conventional ultrasonic jet nozzle which can use the vibrator which concerns on this invention is demonstrated with reference to FIG.

Although the present invention can be suitably used for nozzles of various types as described above, the first embodiment of the present invention will be described with reference to the injection nozzle for an electronically controlled diesel engine.

Referring to FIG. 7, the injection nozzle, that is, the diesel engine injection nozzle 10 in this embodiment, has an elongated, substantially cylindrical nozzle casing 8 having a center hole 6 at its center. The vibrator 1 is disposed through the central hole 6 of the nozzle casing 8. The vibrator 1 has a transition portion 1c which connects the upper main body portion 1a with the elongated cylindrical oscillator shaft portion 1b having a smaller diameter than the main body portion 1a and the main body portion 1a. Has

The main body portion 1a is provided with a locking jaw 1d having a larger diameter, and the hooking jaw 1d is a ring installed by a bolt (not shown) on the upper end surface of the nozzle casing 8. It is attached to the nozzle casing 8 by the vibrator pressing member 14 of a shape. At the front end of the vibrator 1, that is, the front end of the shaft portion 1b, an edge portion 2 having a shape as shown in detail in FIG. 6 is formed.

In addition, one or several supply passages 4 for supplying fuel to the edge portion 2 are formed below the nozzle casing 8.

The fuel supply port 16 of this supply passage 4 is supplied with liquid fuel from a fuel supply source (not shown) through an external supply passage (not shown). The flow rate, supply and stop of the fuel are controlled by a supply valve (not shown) provided in the external supply line.

In the above configuration, the vibrator 1 is continuously vibrated by the ultrasonic vibration generating means 100 that is connected to the main body portion 1a. Therefore, when the liquid fuel is supplied to the edge portion 2 through the conduit, the supply valve and the supply passage 4, the liquid fuel is atomized and injected outward.

As shown in FIG. 6, the edge 2 of the conventional vibrator 1 has several edges A to E whose diameters are gradually reduced, that is, the edge 2 in FIG. Has a five-stage ring-shaped staircase.

In more detail, when liquid is supplied to the edge portion 2 having the above configuration, that is, in this embodiment, fuel is supplied, the respective edge portions are formed by longitudinal vibration applied to the vibrator 1. The fuel flow is in a state where the flow of the fuel is interrupted, and the supply fuel is atomized.

The fuel is first partially granulated at the edge A of the first stage of the edge portion, and the excess fuel which is not finished at the edge A of the first stage is the edge B of the second stage, the third stage. Edge (C) It is sent to and processed into particles at each edge.

For this reason, when the flow rate of the fuel is large, the effective area of the edge portion 2 required for the atomization becomes large, and several edges are required. However, when the flow rate is small, the edge of the edge portion 2 may be changed. Particulation is completed without using a stage.

Therefore, when such a vibrator 1 is used, when the flow rate changes, the number of edges required for atomization changes, and conditions such as the thickness of the film of the liquid at the position where the atomization is performed are determined for each of the edge portions 2. In this step, since they become substantially the same, the shape of the droplet dropletized particles becomes uniform.

In addition, according to the vibrator, since all the flow rates required for the atomization can be processed in general, the atomization of various liquid substances is achieved regardless of the intermittent atomization or the continuous atomization. In addition, the height h ₁ and the width w of the edge portion of the vibrator 1 shown in FIG. 6 are so large that the liquid can be thinned and the size of the dimension that can prevent the liquid from flowing down. It becomes.

That is, the height h ₁ and the width w of the edges are preferably in the following ranges.

h₁

λ/40.2 mm

h ₁

λ / 4

w

λ/4(λ: 초음파의 파장)0.2 mm

w

λ / 4 (λ: wavelength of the ultrasonic wave)

h, w

10으로 한다. 특히, 제 6 도에 도시한 바와같은 형상의 진동자에서의 높이(h₁)는 4㎜ 이하인 것이 바람직하다.In the preferred embodiment, the height h ₁ and the width w of each edge are 1

h, w

10. In particular, the height of the vibrator in the shape as shown in Figure 6 (h ₁₎ is preferably not more than 4㎜.

The wavelength λ of the ultrasonic wave varies depending on the material of the vibrator (Inconel, titanium, etc.) used, but is usually 5 cm to 50 cm.

Further, the output of the ultrasonic oscillator for vibrating the vibrator is about 10W, and the amplitude and frequency of the vibrator are 30 to 70 µm and 20 to 50 Hz, respectively. Incidentally, the diameter of the vibrator is λ / 10 to λ / 4, and the larger the amplitude and the diameter, the greater the amount of liquid processed.

However, according to the vibrator 1 of such a shape, since the edges A, B, C, D, and E are discontinuously connected, the edges of the stages are separated. Liquid, that is, fuel F, is retained in the recesses A ', B', C ', and D'.

The fuel F retained in the recesses A ', B', C ', and D' is subjected to one cycle of the engine (compression, expansion, exhaust, suction) during the vibration of the vibrator 1. The injection for atomization is not completed within a short period of time, and therefore the combustion time of the fuel liquid droplets until the exhaust process after the injection is shortened, which may cause the generation of soot due to incomplete combustion.

In addition, after the vibration of the vibrator 1 is stopped, the vibrator 1 stays at the tip of the vibrator 1 without becoming particulate, and as time passes, it becomes a liquid drop and falls from the vibrator 1 into the engine cylinder. . The so-called phenomenon that breakage of spray is bad occurs.

Such a phenomenon is a problem to be actively avoided in injection nozzles for diesel engines and the like.

The present inventors say that such a break of spraying is bad, and each stage (A), (B), (C), (D), and (E) of the vibrator is connected by a continuous curve, and each stage It has been found that the above-described grooves A ', (B'), (C ') and (D') in which the fuel F is held can be solved by

1, a first embodiment of an ultrasonic vibrator according to the present invention is illustrated.

The vibrator 1A of the present embodiment shown in FIG. 1 has an edge portion 2A having a plurality of stages of which the diameter of the edge portion 2A gradually decreases, that is, a five-stage ring-shaped step. It is the same as the edge portion 2 of the conventional vibrator 1 shown in FIG. 7 in that it has (), but the respective edges A, (B), (C), (D) of the edge portion 2 ) And (E) are very different in that they are connected by continuous curves (continuous curved surfaces) R1, R2, R3, and R4.

These continuous curves (continuous curved surfaces) R1, R2, R3, and R4 may all have the same curvature R, or may have different curvatures.

Of course, the edge portion 2A is not limited to five stages, but may be two, three, four, or six stages or more. The height of the edge portion 2A, the curvature of the continuous curved surface, and the diameter or angle of the tip portion of the vibrator 1A can be made into the above-described shape that can thin the liquid and prevent the liquid from falling.

That is, according to such a structure, the recessed part of the vibrator 1A of the edge part 2A does not form the conventional recessed part in which a liquid stays, and therefore the interruption of spraying becomes very good.

Moreover, according to the vibrator of this invention, since the edge part of several stages is formed by connecting a curved surface, there also exists an advantage that an oscillation surface increases and spraying amount increases.

The vibrator of the first embodiment of the present invention is not limited to the vibrator of the shape shown in FIG. 1, but may be, for example, the vibrator as illustrated in FIGS. 2 to 5.

At the front end of the vibrator 1B of FIG. 2, an edge portion 2B having one or more edges having the same diameter is formed. That is, in this embodiment, the annular edge portion 2B having five edges is formed. The cross-sectional shape of the edge portion 2B viewed in the X direction at the time of the arrow is not limited to a circular shape, but may also be a triangular, quadrangular, or other polygon.

FIG. 3 shows the vibrator 1C according to a variant of another embodiment of the present invention which is different from the vibrator 1A in FIG. 1 in that the edge of the edge portion 2C is formed to gradually widen.

4 and 5 show a vibrator according to still another modification of the first embodiment of the present invention in which the edges 2D and 2E are formed in the shape of one or more stages at the inner edge of the vibrator tip. (1D) and (1E) are shown.

Of course, in this modified embodiment, the liquid is supplied to the edge portions 2D and 2E through the liquid supply passage 4 formed through the vibrators 1D and 1E. In each embodiment of the first embodiment described above, the edges of the plurality of stages are formed by connecting a continuous curved surface. That is, in the embodiment of FIG. 1, for example, each of the continuous curved surfaces R1, R2, (R3) and (R4) need not be formed with a single curvature, and may be formed by connecting curves of a plurality of curvatures or by connecting a curve or a straight line (curve).

For example, as illustrated in the vibrator 1F of FIG. 8, the vibrator 1A of the embodiment of FIG. 1 is, for example, the recesses A ', (B'), ( C ') and (D'), each of the continuous curved surfaces (R1), (R2), (R3), (R4) is curved and straight It can be changed to consist of a continuous line of.

In other words, in the first embodiment of the present invention, an important point is that no end or groove portion holding the liquid is present on the edge surface in the passage of the liquid from the edge to the next edge.

Specific conditions and specifications of one of the ultrasonic injection apparatuses according to the first embodiment of the present invention described above are as follows.

This configuration makes it possible to form a very large amount of fine particles.

Power of the ultrasonic generator: 10 W

Oscillator Amplitude: 34㎛

Frequency: 38㎑

Shape dimensions of oscillator (oscillator of FIG. 1)

Edge diameter and surface (curvature R)

1st stage: Diameter (Do) 7㎜

Stage 2: Curvature (R) 0.5mm

3-stage: Curvature (R) 0.5㎜

4-stage: Curvature (R) 0.5㎜

5-stage: Curvature (R) 0.5㎜

Height of each stage (h ₁ ): 2mm

Fuel type: Diesel

Flow rate: 0 to 0.06 cm 3 / spray

Injection pressure: 1 ~ 70 ㎏ / ㎠

Temperature: Room temperature (normal room temperature 20 ℃ to 30 ℃

80 ℃, which is the operating temperature of the engine)

Material of Oscillator: Titanium

In the unit "cm3 / injection" of the above flow rate, "injection" means that the injection amount of fuel at the time of one injection is assumed to be injected once per stroke in the combustion process of an automobile engine (especially a diesel engine). It is displayed.

Second Embodiment

Next, the ultrasonic wave oscillator according to the second embodiment of the present invention will be described in detail with reference to the drawings.

An ultrasonic jet apparatus which can use the vibrator of this embodiment is illustrated in FIG.

The vibrator of this embodiment can be suitably used for ultrasonic injection apparatuses of various types as described above, but this embodiment will be described with reference to a fuel nozzle for a gas turbine.

The injector shown in FIG. 10, that is, the fuel injection nozzle 110 for the gas turbine in this embodiment, proposes the diesel engine injection nozzle 10 and the edge portion 2A in the first embodiment. In this case, the configuration is the same. Therefore, the same code | symbol was used about the same part.

9, there is shown a first form of ultrasonic vibration mast according to a second embodiment of the present invention.

At the tip of the vibrator 10A of the second embodiment of the present invention, a spiral groove of the same diameter, that is, a screw bone is formed, and forms an edge portion 20A.

The shape of the thread can be any shape as long as the edge can be formed, but usually a triangular screw or the like is used, and the angle of the thread is any angle between 10 and 150 degrees.

The pitch P is usually about 0.5 mm, but the present invention is not limited thereto. When the length or width h ₂ of the edge portion 20A is 1 mm to 3 cm, the number of threads is 2 to 60, Preferably, the pitch p becomes about 2-8 pieces. In addition, although this screw is a single-line screw in this 2nd Example, it can be set as a multi-line screw, for example, a 2-4 thread screw.

Importantly, the shape of the helical rope groove, i.e., the thread, shown in FIG. 9 has the above-described shape which can thin the liquid fuel and impart the vibration of the liquid.

In the edge portion 20A of the vibrator 10A according to the second embodiment of the present invention, since the edge with a spiral line is formed at the outer edge thereof, the liquid is supplied in the axial direction of the vibrator 10A. This is performed smoothly, and all the edges are effectively used, and the vibrating surface effective for atomization is increased, and the spray amount is remarkably increased. In addition, the generation state of the spray is also very stable.

When liquid is supplied to the edge portion 20A in the above-described configuration, that is, in this embodiment, the fuel flow is cut off at each edge by the longitudinal vibration applied to the vibrator 10A. In the same state as the above, the supply fuel is atomized. The fuel is first granulated in a part of the thread close to the fuel supply part, and the excess fuel, which is not finished, is processed and granulated in the lower thread which is continuously formed by flowing down the screw bone of the spiral string.

For this reason, when the fuel flow rate is large, the effective area of the edge portion 20A required for the atomization becomes large, and a longer distance spiral groove is required. Particulation ends. Therefore, in the vibrator 10A according to the second embodiment, when the flow rate changes, the length of the thread required for the atomization changes, and conditions such as the thickness of the liquid film at the position where the atomization is performed are determined at each position. In this case, the shape of the finely divided liquid droplet particles becomes uniform.

According to the vibrator of the second embodiment, since the flow rate normally required for the atomization can be all processed, the atomization of various liquid substances is achieved regardless of the intermittent and continuous atomization. Further, as described above, the supply of the liquid to the edge portion is performed continuously along the screw bone, so that the spraying operation is very stable.

The vibrator according to the second embodiment is not limited to the above-described shape, and as illustrated in FIG. 11, the outer diameter of the thread gradually decreases, or is not shown in the drawing, but the shape of FIG. Conversely, the outer diameter of the thread can be configured to increase gradually.

12 shows another embodiment of the second embodiment. In this embodiment, the edge portion 20C of the vibrator 10C has a conventional stepped shape, but a screw groove, that is, a thread is formed in the vertical side surface of each stage, and a large number of edges are formed.

FIG. 13 shows a vibrator 10D according to still another form of modification of the second embodiment. In the deformation | transformation of this form, the edge part 20D is formed only in the inner edge part of the vibrator 10D.

As shown in Fig. 14, in the injection nozzle using the vibrator 10D, the liquid is supplied to the edge portion 20D through the liquid supply passage 4 formed through the vibrator. At this time, the fuel supply port 18 is preferably provided in a place where the amplitude of the vibrator 10D is small, that is, a node. Thus, this fuel supply 18 will, in fact, be located significantly lower than what is shown in FIG.

FIG. 15 is a modified example of the vibrator shown in FIG. 13, and the edge portion 20E of the vibrator 10E is formed so that its diameter gradually widens.

The shape dimensions of the threads of the edge portions 20B to 20E of the vibrators 10B to 10E illustrated in FIGS. 11 to 15 described above are the same as those described with respect to the vibrator 10A of FIG. 9. It is formed.

Specific conditions and specifications of one of the ultrasonic spray nozzles using the vibrator according to the second embodiment described above are as follows.

Power of the ultrasonic generator: 10 W

Oscillator Amplitude: 30㎛

Frequency: 38㎑

Shape dimensions of the vibrator (embodiment of FIG. 9)

Outer diameter of thread: 7㎜

Shape: Triangle screw

(60 degree thread angle)

Number of: 5

Thread Length: 1cm

Fuel type: Kerosene

Flow rate: 10 cm 3 / sec

Injection pressure: 5㎏ / ㎠

Temperature: Room temperature (normal room temperature 20 ℃ ~ 30 ℃

Refers to 80 ℃, the operating temperature of the engine)

Material of Oscillator: Titanium (and iron)

As described above, the vibrator according to the present invention having a specific shape can be stably supplied with a large amount of liquid as compared with the vibrators used in the conventional injection nozzles and ultrasonic injection nozzles, The breakage is greatly improved, and the area of the vibrating surface is increased to enable large-capacity spraying, and the fine particles are stable because the state (flow rate, particle diameter) of the atomization does not change according to the nature and state of the feed liquid, especially the viscosity. The effect that it is possible to provide an ultrasonic jet nozzle (ultrasound atomizing device) which can achieve the combustion is obtained.

In addition, the vibrator according to the present invention can also obtain the effect that the finely divided state hardly changes even when the flow rate is small.

Claims (13)

To form an edge portion (2) consisting of one or more stages of edges at the outer edge portion or inner edge portion formed at the end portion of the ultrasonic vibrator, and supplying liquid to the edge portion (2) to fine particles the liquid. Ultrasonic injection vibrator for ultrasonic wave, characterized in that the edge portion (2) consisting of a plurality of edges of one or more stages connected to a continuous curved surface. According to claim 1, wherein the edge portion 2, which is composed of one or more edges, has curved surfaces (R ₁ ), (R ₂ ), (R ₃ ), ( Ultrasonic spraying vibrator, characterized in that the edge portion (2F) formed R ₄ ). 2. The edge portion 2A according to claim 1, wherein the edge portion 2 connected to each other by a continuous curved surface has edge portions 2A having a plurality of annular stepped shapes with gradually smaller diameters of edges formed on the outer edge portion. Ultrasonic spraying vibrator characterized in that. 2. The edge portion (2) according to claim 1, wherein the edge portion (2) connecting the edges with each other in a continuous curved surface is an edge portion (2B) in which the edges formed on the outer edge portion form a plurality of rings having a constant diameter. Ultrasonic spraying oscillator. 2. The edge portion 2C according to claim 1, wherein the edge portion 2 connected to each other by a continuous curved surface has an edge portion 2C having a plurality of annular staircases whose edges formed on the outer edge portion gradually increase in diameter. Ultrasonic spraying vibrator characterized in that. 2. The edge portion 2 according to claim 1, wherein the edge portion 2 connected to each other by a continuous curved surface is an edge portion 2D in which edges formed in the inner edge portion are formed in a plurality of annular stepped shapes having gradually wider diameters. Ultrasonic spraying vibrator, characterized in that. 2. The edge portion 2 according to claim 1, wherein the edge portion 2 connected to each other by a continuous curved surface is an edge portion 2E having an annular edge formed in a plurality of stages having a constant diameter. Ultrasonic spray vibrator. An edge portion (2) is formed in an outer edge portion or an inner edge portion, and the edge portion (2) is supplied with a liquid to supply the liquid, so that the ultrasonic wave oscillator for atomizing the liquid, wherein the edge Ultrasonic spraying vibrator, characterized in that the portion (2) is provided with a spiral thread. The ultrasonic wave oscillator according to claim 8, wherein the edge portion (2) formed with the spiral thread is an edge portion (20A) having the spiral thread formed in the same diameter as the outer edge portion. . 9. The edge portion (2) of claim 8, wherein the edge portion (2) formed with the spiral thread is an edge portion (20B) having the spiral thread formed in the form of a diameter whose diameter gradually decreases in the outer edge portion. Ultrasonic spray vibrator. 9. The edge portion (2) of claim 8, wherein the edge portion (2) formed with the spiral thread has a stepped annular shape in which the edge portion (2) formed in the diameter shape with the same diameter in the outer edge portion is gradually smaller in diameter. Ultrasonic spraying vibrator, characterized in that the edge portion (20C). 9. The ultrasonic wave oscillator according to claim 8, wherein the edge portion (2) formed with the spiral thread is an edge portion (20D) having the spiral thread formed in the same diameter as the inner edge portion. 10. The ultrasonic splitter according to claim 8, wherein the edge portion (2) formed with the spiral thread is an edge portion (20E) having a spiral thread formed in a diameter shape in which the diameter gradually increases in the inner edge portion. Use oscillator.

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