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KR850004806A - 양성 포토레지스트 박리조성물(positive photoresist stripping composition) - Google Patents

양성 포토레지스트 박리조성물(positive photoresist stripping composition) Download PDF

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Publication number
KR850004806A
KR850004806A KR1019840008148A KR840008148A KR850004806A KR 850004806 A KR850004806 A KR 850004806A KR 1019840008148 A KR1019840008148 A KR 1019840008148A KR 840008148 A KR840008148 A KR 840008148A KR 850004806 A KR850004806 A KR 850004806A
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KR
South Korea
Prior art keywords
pyrrolidone
composition
carbon atoms
cycloalkyl
photoresist
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KR1019840008148A
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KR860001841B1 (ko
Inventor
고우어 토마스(외2) 에반
Original Assignee
로이 에이취, 맷신길
알라이드 코오포레이션
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Publication of KR850004806A publication Critical patent/KR850004806A/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Detergent Compositions (AREA)
  • Paints Or Removers (AREA)
  • Saccharide Compounds (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)

Abstract

내용 없음

Description

양성 포토레지스트 박리조성물(positive photoresist stripping composition)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (6)

  1. 구조의 비스-하이드록시 알키피페라진을 구성하는 그룹중 최소한 하나 또한 상기식에서 1-6탄소원자의 가지사슬을 갖는 것 및 5-6탄소 사이크로알킬환된 화합물(여기서 시클로알킬은 -(CH2)n-으로 치환된)등과 같은 피페라진 유도체를 구성하는 그룹에서 선택된 최소한개의 피페라진 및
    (b) R이 1-6탄소원자의 알킬그룹 혹은 5 혹은 6원자고리시크로알킬인식의 알킬 혹은 시크로알킬-2-피보리돈(pyrvolidone) 및 아미노알킬 및 1-6탄소원자의 하이드록시알킬 혹은 약 90-0중량%의 량으로 (a)내에 혼합될 수 있는 극성의 유기화합물을 포함하는 것을 특징으로 하는 포토레지스트를 함유하는 기질표면으로부터 유기양성 포토레지스트조성물을 제거하기 위한 박리조성물.
  2. (a)가 N-아미노에칠피페라진 및 N-하이드록시에칠피페라진의 혼합물을 포함하는 것을 특징으로 하는 청구범위 1의 박리조성물.
  3. (b)는 R이 1-6탄소원자의 알킬그룹 : 알킬그룹이 1-6탄소원자를 포함하는 아미노알킬-N-피로리돈 및 하이드록시알킬-2-피로리돈 : 디에칠렌그리콜의 모노에칠에테르, 디에칠렌그리콜의 노모부틸에테르, 디에치렌그리콜모밀모포린의 모노핵실에테르 및 이들의 혼합물인식의 알킬 혹은 시크로알킬-2-피로리돈을 구성하는 그룹에서 선택된 것을 특징으로 하는 청구범위 1의 박리조성물.
  4. (b) 구성요소는 N-메칠-2-피로리돈을 포함하는 것을 특징으로 하는 청구범위 2의 박리조성물.
  5. (a)는 N-아미노에칠피페라진 및 N-하이드록시에칠피페라진혼합물을 각각 1 : 1-10 : 1 정량비율로 약 30중량%의 량으로 포함하며, (b)는 약70중량%의 량으로 N-메칠-2-피로리돈을 포함하는 것을 특징으로 하는 청구범위 2의 박리조성물.
  6. 상기 포토레지스트가 제거될 때까지 약 15℃-160℃의 온도로 청구범위 1의 조성물로써 포토레지스트층을 접촉하는 것을 포함하는, 상기 포토레지스트층을 가진 기질표면으로부터 양성포토레지스트를 박리하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019840008148A 1983-12-20 1984-12-20 양성 포토레지스트 박리조성물(positive photoresist stripping composition) Expired KR860001841B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56333683A 1983-12-20 1983-12-20
US563336 1983-12-20
US563,336 1983-12-20

Publications (2)

Publication Number Publication Date
KR850004806A true KR850004806A (ko) 1985-07-27
KR860001841B1 KR860001841B1 (ko) 1986-10-24

Family

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Application Number Title Priority Date Filing Date
KR1019840008148A Expired KR860001841B1 (ko) 1983-12-20 1984-12-20 양성 포토레지스트 박리조성물(positive photoresist stripping composition)

Country Status (6)

Country Link
EP (1) EP0145973B1 (ko)
JP (1) JPS60131535A (ko)
KR (1) KR860001841B1 (ko)
AT (1) ATE56546T1 (ko)
CA (1) CA1240907A (ko)
DE (1) DE3483201D1 (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250831A (ja) * 1985-08-30 1987-03-05 Japan Synthetic Rubber Co Ltd レジスト用剥離液組成物
DE3537441A1 (de) * 1985-10-22 1987-04-23 Hoechst Ag Loesemittel zum entfernen von photoresists
IE59971B1 (en) * 1986-11-10 1994-05-04 Baker J T Inc Stripping compositions and their use for stripping resists from substrates
US4824763A (en) * 1987-07-30 1989-04-25 Ekc Technology, Inc. Triamine positive photoresist stripping composition and prebaking process
JP2759462B2 (ja) * 1988-11-11 1998-05-28 ナガセ電子化学株式会社 水性剥離剤組成物
US6127101A (en) * 1999-10-12 2000-10-03 Air Products And Chemicals, Inc. Alkylated aminoalkylpiperazine surfactants and their use in photoresist developers
JP2002244310A (ja) * 2001-02-21 2002-08-30 Tosoh Corp レジスト剥離剤
KR101082018B1 (ko) * 2004-05-07 2011-11-10 주식회사 동진쎄미켐 레지스트 제거용 조성물
CN1950755B (zh) * 2004-05-07 2011-05-11 株式会社东进世美肯 用于去除光刻胶的组合物
KR101136026B1 (ko) 2004-09-24 2012-04-18 주식회사 동진쎄미켐 포토레지스트용 박리제 및 상기 박리제를 이용한 박막트랜지스터 표시판의 제조 방법
JP5279921B2 (ja) * 2009-11-26 2013-09-04 エルジー・ケム・リミテッド フォトレジストストリッパー組成物及びこれを利用したフォトレジストの剥離方法
TWI405053B (zh) * 2009-11-27 2013-08-11 Lg Chemical Ltd 光阻剝離組成物及剝離光阻之方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4090879A (en) * 1976-11-15 1978-05-23 Gaf Corporation Developing solutions for 2-component diazo-type materials
US4395479A (en) * 1981-09-23 1983-07-26 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
US4428871A (en) * 1981-09-23 1984-01-31 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists

Also Published As

Publication number Publication date
DE3483201D1 (de) 1990-10-18
EP0145973A2 (en) 1985-06-26
KR860001841B1 (ko) 1986-10-24
EP0145973A3 (en) 1986-09-17
JPH0413706B2 (ko) 1992-03-10
EP0145973B1 (en) 1990-09-12
JPS60131535A (ja) 1985-07-13
ATE56546T1 (de) 1990-09-15
CA1240907A (en) 1988-08-23

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