KR20210157931A - Laser device and lasaer processing device including the same - Google Patents

Abstract

Provided are a laser device capable of uniformizing a size of a spot on which a laser beam is focused on a display panel even when the display panel is processed using an inclined laser beam when forming a through hole in the display panel, and a laser processing apparatus including the same. The laser device according to one embodiment comprises: a laser beam generation unit generating and outputting the laser beam; a beam scanner for adjusting the output direction of the laser beam; a scan lens unit for focusing the laser beam output from the beam scanner at a predetermined position; and a tilt provision unit disposed between the beam scanner and the scan lens unit so that a vertical optical axis of the scan lens unit is inclined at a first angle with respect to a vertical optical axis of the beam scanner.

Description

LASER DEVICE AND LASAER PROCESSING DEVICE INCLUDING THE SAME

The present invention relates to a laser apparatus and a laser processing apparatus including the same.

As the information society develops, the demand for a display device for displaying an image is increasing in various forms. For example, the display device is applied to various electronic devices such as a smart phone, a digital camera, a notebook computer, a navigation system, and a smart television. The display device may include a display panel such as a liquid crystal display device, a field emission display device, and a light emitting display device.

As the display device is applied to various electronic devices, there is a demand for a display device having various functions and designs. For example, in order to widen the display area, a display device in which a through hole is disposed in a display area of a display panel and an optical sensor such as a camera sensor and an infrared sensor is disposed in the through hole has been released.

The through hole of the display panel may be formed by using a laser processing apparatus that outputs a laser beam. The laser beam of the laser processing apparatus may be affected by impurities generated from the display panel when the through hole of the display panel is formed.

An object of the present invention is to achieve a uniform size of a spot where a laser beam is focused on the display panel even when the display panel is processed using an inclined laser beam when forming a through hole in the display panel. It is intended to provide a laser device.

Another problem to be solved by the present invention is that the size of the spot where the laser beam is focused on the display panel can be uniform even when the display panel is processed using an inclined laser beam when the through hole is formed in the display panel. It is to provide a laser processing apparatus with

The problems of the present invention are not limited to the problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

In one embodiment for solving the above problems, a laser device includes a laser beam generator for generating and outputting a laser beam, a beam scanner for adjusting an output direction of the laser beam, and a laser beam output from the beam scanner to a predetermined position. A scanning lens unit for focusing, and a tilt providing unit disposed between the beam scanner and the scan lens unit so that the vertical optical axis of the scan lens unit is inclined at a first angle with respect to the vertical optical axis of the beam scanner.

A laser processing apparatus according to another embodiment for solving the above problems includes a chamber including a light transmitting unit for transmitting a laser beam, a workpiece disposed on a stage inside the chamber, and the laser beam through the light transmitting unit A laser device for irradiating the workpiece is provided. The laser device includes a laser beam generator that generates and outputs a laser beam, a beam scanner that adjusts an output direction of the laser beam, a scan lens that focuses the laser beam output from the beam scanner to a predetermined position, and the beam and a tilt providing unit disposed between the beam scanner and the scan lens unit so that a vertical optical axis of the scanner and a vertical optical axis of the scan lens unit are inclined at a first angle.

Details of other embodiments are included in the detailed description and drawings.

According to the laser apparatus and the laser processing apparatus including the same according to the embodiments, by arranging the inclination providing unit between the beam scanner and the scan lens unit, the vertical optical axis of the beam scanner is inclined at a first angle compared to the vertical line of the workpiece. , the scan lens unit may not be inclined at the first angle with respect to the vertical line of the workpiece. Accordingly, the focal plane formed by the lenses of the scan lens unit may be substantially the same as that of the workpiece. Therefore, since both the first position and the second position of the workpiece coincide with the focal plane FS, the laser beam can be focused at the first position and the second position. Accordingly, since the size of the spot of the laser beam at the first position and the second position can be uniform, the workpiece can be finely machined using the laser beam of the laser device at the first position and the second position. That is, even when the laser apparatus provides a laser beam obliquely to the workpiece at a predetermined incident angle, the workpiece can be finely machined.

Effects according to the embodiments are not limited by the contents exemplified above, and more various effects are included in the present specification.

1 is an exemplary view showing a laser processing apparatus according to an embodiment.
2 is an exemplary view showing a laser processing apparatus according to another embodiment.
3 is a graph showing the density of particles according to an incident angle of a laser beam incident on a workpiece according to an exemplary embodiment.
4 is an exemplary view showing a laser device and a workpiece according to an embodiment.
FIG. 5 is an exemplary view showing the beam scanner of FIG. 4 in detail.
6 is an exemplary view showing the size of a laser spot at a first position and a second position of the workpiece of FIG. 4 .
7 is an exemplary view showing a laser device and a workpiece according to another embodiment.
FIG. 8 is an exemplary view showing the scan lens unit of FIG. 6 in detail.
FIG. 9 is an exemplary view illustrating a size of a laser spot at a first position and a second position of the display panel of FIG. 6 .
10 is an exemplary view illustrating a position of a laser spot for forming a through-hole when a workpiece is a display panel.
11 is an exploded perspective view illustrating a display device including a display panel according to an exemplary embodiment.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

Reference to an element or layer "on" of another element or layer includes any intervening layer or other element directly on or in the middle of the other element or layer. Like reference numerals refer to like elements throughout. The shapes, sizes, proportions, angles, numbers, etc. disclosed in the drawings for explaining the embodiments are exemplary, and thus the present invention is not limited to the illustrated matters.

Although the first, second, etc. are used to describe various elements, these elements are not limited by these terms, of course. These terms are only used to distinguish one component from another. Accordingly, it goes without saying that the first component mentioned below may be the second component within the spirit of the present invention.

Each feature of the various embodiments of the present invention may be partially or wholly combined or combined with each other, technically various interlocking and driving are possible, and each of the embodiments may be independently implemented with respect to each other or implemented together in a related relationship. may be

Hereinafter, specific embodiments will be described with reference to the accompanying drawings.

1 is an exemplary view showing a laser processing apparatus according to an embodiment.

Referring to FIG. 1 , a laser processing apparatus 1000 according to an embodiment is an apparatus for processing a workpiece OB by using a laser beam LB. For example, the laser processing apparatus 1000 uses a laser beam LB to form a through-hole in the object OB, heat-treat the object OB, or cut the object OB. Alternatively, it may be an apparatus for processing the object OB, such as forming a groove in the object OB or forming a predetermined structure in the object OB.

The laser processing apparatus 1000 according to an embodiment includes a laser apparatus 1100 and a chamber 1200 .

The laser device 1100 generates a laser beam LB. The laser apparatus 1100 may irradiate the laser beam LB to the object OB through the light transmitting part 1210 of the chamber 1200 . The laser device 1100 may be disposed outside the chamber 1200 .

The laser apparatus 1100 may output the laser beam LB to be vertically incident on the processing area PA of the object OB. In this case, the laser device 1100 , the light transmitting part 1210 , and the processing area PA of the workpiece OB overlap each other in the third direction (Z-axis direction) that is the thickness direction of the workpiece OB. can do.

The chamber 1200 includes a light transmitting part 1210 , a stage 1220 , and a protection window 1230 . The chamber 1200 may provide an enclosed space, whereby the laser beam LB is outputted from the laser device 1100 to the workpiece OB in order to process the workpiece OB. 1200) may have a vacuum state.

The light transmitting part 1210 may be made of a transparent material that can transmit light. For example, the light transmitting part 1210 may be made of transparent glass or transparent plastic. Accordingly, the laser beam LB of the laser device 1100 may pass through the light transmitting unit 1210 .

The light transmitting part 1210 may be a part of one side of the chamber 1200 in which the laser device 1100 is disposed. For example, when the laser device 1100 is disposed below the chamber 1200 , the light transmitting part 1210 may be a part of the lower side of the chamber 1200 .

The stage 1220 may be disposed inside the chamber 1200 . The stage 1220 may be disposed adjacent to the upper side of the chamber 1200 . A workpiece OB may be seated on a lower surface of the stage 1220 . The stage 1220 may fix the object OB for a predetermined time.

The protection window 1230 may be disposed inside the chamber 100 . The protection window 1230 may be disposed between the light transmitting part 1210 and the stage 1220 or the object OB in the third direction (Z-axis direction). When the protective window 1230 processes the workpiece OB by the laser beam LB, particles PC from the workpiece OB may fall to the protective window 1230 . Therefore, it is possible to block the particles PC from falling into the light transmitting part 1210 by the protection window 1230 . The protection window 1230 may be moved from the inside of the chamber 100 to the outside to be cleaned, and thus, particles PC disposed or attached to the upper surface of the protection window 1230 may be removed.

The protective window 1230 may be made of a transparent material that can transmit light. For example, the protective window 1230 may be transparent glass or transparent plastic. Accordingly, the laser beam LB of the laser device 1100 may pass through the protection window 1230 .

Meanwhile, the object OB may be a display panel included in a display device to display an image. For example, the workpiece OB includes an organic light emitting display panel including organic light emitting devices, an inorganic light emitting display panel including inorganic light emitting devices, and micro light emitting diodes to display an image. It may be a miniature light emitting diode display panel. However, the to-be-processed object OB is not limited to the display panel, and any object that can be processed using the laser beam LB may be used.

2 is an exemplary view showing a laser processing apparatus according to another embodiment.

The embodiment of FIG. 2 is the same as the embodiment of FIG. 1 in that the laser beam LB of the laser device 1100 is inclined at a predetermined angle of incidence θi to the processing area PA of the object OB. There is a difference. In FIG. 2, differences from the embodiment of FIG. 1 will be mainly described.

Referring to FIG. 2 , the laser apparatus 1100 may output the laser beam LB to be inclined and incident on the processing area PA of the object OB at a predetermined incidence angle θi. The predetermined incident angle θi indicates an angle inclined with respect to the virtual vertical line VL drawn vertically in the processing area PA of the object OB. The processing area PA of the object OB to which the laser beam LB is irradiated may be a flat area of the object OB.

The laser device 1100 and the light transmitting part 1210 overlap each other in the third direction (Z-axis direction), but the laser device 1100 and the processing area PA of the object OB are formed in the third direction (Z-axis). direction) may not overlap each other. Also, the light transmitting part 1210 and the processing area PA of the object OB may not overlap each other in the third direction (Z-axis direction).

The protective window 1230 may overlap the light transmitting part 1210 in the third direction (Z-axis direction). The protection window 1230 may overlap the processing area PA of the object OB in the third direction (Z-axis direction).

3 is a graph showing the density of particles according to an incident angle of a laser beam incident on a workpiece according to an exemplary embodiment.

In FIG. 3 , the X-axis represents the incident angle θi of the laser beam LB incident on the processing area PA of the workpiece OB, and the Y-axis represents the laser beam LB from the workpiece OB. It represents the density of falling particles (PC).

Referring to FIG. 3 , as the incident angle θi of the laser beam LB increases, the density of particles PC falling from the object OB by the laser beam LB may increase. When the incident angle θi of the laser beam LB is 0 degrees, the density of particles PC falling from the workpiece OB by the laser beam LB may be the highest. The incident angle θi of the laser beam LB of 0 degrees indicates a case in which the laser beam LB is vertically incident on the processing area PA of the object OB.

When the incident angle θi of the laser beam LB is between 0 degrees and 20 degrees, the slope of the graph is greater than the slope of the graph between 20 degrees and 50 degrees. That is, the inflection point of the graph is when the incident angle θi of the laser beam LB is approximately 20 degrees. Therefore, in order to minimize the density of the particles PC falling from the workpiece OB by the laser beam LB, the incident angle θi of the laser beam LB is preferably greater than 20 degrees.

4 is an exemplary view showing a laser device and a workpiece according to an embodiment. FIG. 5 is an exemplary view showing the beam scanner of FIG. 4 in detail. FIG. 6 is an exemplary view illustrating a size of a laser spot at a first position and a second position of the display panel of FIG. 5 .

Referring to FIG. 4 , a laser device 1100 according to an embodiment may include a laser beam generator 1110 , a beam scanner 1120 , and a scan lens unit 1130 .

The laser beam generator 1110 generates the laser beam LB and outputs the laser beam LB to the scanner 200 . The laser beam LB may include a ruby laser, a glass laser, a solid-state laser such as a YAG laser and a YLF laser, or an excimer laser.

The beam scanner 1120 controls the output direction of the laser beam LB output from the laser beam generator 1110 . That is, the beam scanner 1120 controls a scanning field of the laser beam LB output from the laser beam generator 1110 . A position in a first direction (X-axis direction) and a position in a second direction (Y-axis direction) of the laser beam LB irradiated to the object OB by the beam scanner 1120 may be determined.

The beam scanner 1120 may be a galvano scanner including a reflection mirror array 1121 having a plurality of reflection mirrors, but is not limited thereto. For example, the beam scanner 1120 may include a first reflection mirror 1121a and a second reflection mirror 1121b as shown in FIG. 5 . In this case, the beam scanner 1120 controls the laser beam LB incident through the incident unit 1122 in the first direction (X-axis direction) using the first reflection mirror 1121a, and the second reflection mirror Control in the second direction (Y-axis direction) by using 1121b may be output to the emission unit 1123 . That is, the beam scanner 1120 uses the first reflection mirror 1121a and the second reflection mirror 1121b to generate the laser beam LB irradiated to the object OB through the scan lens unit 1130 . The position in the first direction (X-axis direction) and the position in the second direction (Y-axis direction) can be controlled.

The scan lens unit 1130 focuses the laser beam LB output from the beam scanner 1120 on the object OB. The number of lenses of the scan lens unit 1130 may vary according to a distance between the scan lens unit 1130 and the object OB. For example, as the distance between the scan lens unit 1130 and the object OB increases, the focal length of the laser beam LB by the lenses of the scan lens unit 1130 should become closer. The number of lenses in 1130 may increase.

4 , in order to provide the laser beam LB obliquely to the workpiece OBJ at a predetermined incident angle, the laser device 1100 is inclined at a first angle θ1 with respect to the workpiece OBJ. can get In this case, the vertical optical axis SLA of the beam scanner 1120 and the vertical optical axis LLA of the scan lens unit 1130 are at a first angle ( θ1). The vertical optical axis SLA of the beam scanner 1120 and the vertical optical axis LLA of the scan lens unit 1130 may be parallel to each other. Accordingly, the focal plane FS of the laser beam LB formed by the laser apparatus 1100 may be inclined at a first angle θ1 with respect to the object OB.

The laser beam LB of the laser device 1100 has a position in the first direction (X-axis direction) and a position in the second direction (Y-axis direction) that are irradiated to the workpiece OB by the beam scanner 1120 . can be decided. In FIG. 4 , it is exemplified that the position of the laser beam LB irradiated to the workpiece OB in the second direction (Y-axis direction) is controlled using the second reflection mirror 1121b of the beam scanner 1120 . . The laser beam LB may be irradiated to the first position P1 and the second position P2 of the object OB.

The first position P1 indicates a position of the workpiece OB at which the laser beam LB of the laser apparatus 1100 is incident at a first incident angle θI1 with respect to the virtual vertical line VL. The second position P2 indicates a position of the workpiece OB at which the laser beam LB of the laser device 1100 is incident at a second incident angle θi2 with respect to the virtual vertical line VL. The first position P1 may be a position of the workpiece OB coincident with the focal plane FS, but the second position P2 may be a position of the workpiece OB that does not coincide with the focal plane FS. It can be a location.

Since the first position P1 coincides with the focal plane FS, the laser beam LB may be focused at the first position P1 as shown in FIG. 6 . In contrast, since the second position P2 does not coincide with the focal plane FS, the laser beam LB may not be focused at the second position P2 as shown in FIG. 6 . Therefore, the size of the spot LS of the laser beam LB at the second position P2 may be greater than the size of the spot LS of the laser beam LB at the first position P1 . For this reason, it is difficult to finely process the object OB at the second position P2 using the laser beam LB of the laser device 1100 . That is, even when the laser device 1100 provides the laser beam LB obliquely to the object OBJ at a predetermined incident angle, in order to finely process the object OB, the first position P1 There is a need for a laser device 1100 capable of providing a spot LS of a laser beam LB having a uniform size at both the position P2 and the second position P2 .

7 is an exemplary view showing a laser device and a workpiece according to another embodiment. FIG. 8 is an exemplary view showing the scan lens unit of FIG. 6 in detail. FIG. 9 is an exemplary view illustrating a size of a laser spot at a first position and a second position of the display panel of FIG. 6 .

The embodiment of FIG. 7 is different from the embodiment of FIG. 4 in that it further includes a tilt providing unit 1140 disposed between the beam scanner 1120 and the scan lens unit 1130 of the laser device 1100 . In FIG. 7 , differences from the embodiment of FIG. 4 will be mainly described.

Referring to FIG. 7 , the tilt providing unit 1140 includes a first surface 1141 corresponding to the output unit 1123 of the beam scanner 1120 , a second surface 1142 corresponding to the scan lens unit 1130 , and a third surface 1143 connecting the first surface 1141 and the second surface 1142 . The angle between the first surface 1141 and the second surface 1142 of the inclination providing unit 1140 is a first angle θ1, and the angle between the second surface 1142 and the third surface 1143 is a right angle. can be Accordingly, the vertical optical axis LLA of the scan lens unit may be inclined at a first angle θ1 with respect to the vertical optical axis SLA of the beam scanner 1120 by the tilt providing unit 1140 .

The laser beam LB output from the beam scanner 1120 may be output at an angle of about 10 to 15 degrees with respect to the vertical optical axis SLA. Therefore, in order for the laser beam LB of the laser device 1100 to have an incident angle greater than 20 degrees compared to the virtual vertical line VL drawn vertically in the processing area PA of the object OB, the first The angle θ1 may be 10 degrees or more. In addition, when the laser beam LB of the laser device 1100 is incident at an incident angle greater than 60 degrees compared to an imaginary vertical line VL drawn vertically in the processing area PA of the object OB, It is difficult to process the workpiece OB. Therefore, in order for the laser beam LB of the laser device 1100 to be incident at an angle smaller than 60 degrees compared to the virtual vertical line VL drawn vertically in the processing area PA of the object OB, the first The angle θ1 may be 45 degrees or less.

In order to provide the laser beam LB obliquely to the workpiece OBJ at a predetermined incident angle, the laser beam generator 1110 and the beam scanner 1120 of the laser generator 1100 are connected to the workpiece OB. ) at the first angle θ1, but the scan lens unit 1130 is not inclined at the first angle θ1 with respect to the object OB. For this reason, the vertical optical axis SLA of the beam scanner 1120 may be inclined at a first angle θ1 with respect to the virtual vertical line VL drawn vertically by the workpiece OB. In contrast, the vertical optical axis LLA of the scan lens unit 1130 may form a right angle to the object OB. Accordingly, the horizontal optical axis LHA of the scan lens unit 1130 may be parallel to the object OB. Therefore, the focal plane FS formed by the lenses of the scan lens unit 1130 may be substantially the same as the object OB.

The scan lens unit 1130 may include a non-telecentric lens. That is, the laser beam LB incident on the scan lens unit 1130 by the beam scanner 1120 is the vertical optical axis LLA of the non-telecentric lens 1130 of the scan lens unit 1130 as shown in FIG. 8 . may not be in line with

The scan lens unit 1130 may include a plurality of lenses having a plurality of refractive powers. For example, as shown in FIG. 6 , the scan lens unit 1130 includes a first convex lens 1131 having a first positive refractive power, a concave lens 1132 having a negative refractive power, and a second convex lens having a second positive refractive power ( 1133), and a third convex lens 1134 having a third positive refractive power. In this case, the first positive refractive power, the second positive refractive power, and the third positive refractive power may be different.

The number of lenses of the scan lens unit 1130 may vary according to a distance between the scan lens unit 1130 and the object OB. For example, as the distance between the scan lens unit 1130 and the object OB increases, the focal length of the laser beam LB by the lenses of the scan lens unit 1130 should become closer. The number of lenses in 1130 may increase.

As shown in FIG. 7 , the laser beam generator 1110 and the beam scanner 1120 are inclined at a first angle θ1 with respect to the virtual vertical line VL of the object OB, but the scan lens unit 1130 . When the first angle θ1 with respect to the virtual vertical line VL of the workpiece OB is not inclined, the vertical optical axis LLA of the scan lens unit 1130 is perpendicular to the workpiece OB. can be achieved Accordingly, the focal plane FS formed by the lenses of the scan lens unit 1130 may be substantially the same as the object OB. Therefore, both the first position P1 and the second position P2 may be positions of the workpiece OB coincident with the focal plane FS.

Since both the first position P1 and the second position P2 coincide with the focal plane FS, the laser beam LB is to be focused at the first position P1 and the second position P2 as shown in FIG. 9 . can Accordingly, the size of the spot LS of the laser beam LB at the first position P1 and the second position P2 may be uniform. Accordingly, the workpiece OB may be finely machined using the laser beam LB of the laser device 1100 at the first position P1 and the second position P2 . That is, even when the laser device 1100 provides the laser beam LB obliquely to the object OBJ at a predetermined incident angle, the object OB may be finely machined.

FIG. 10 is an exemplary view illustrating a position of a spot of a laser beam for forming a through hole when a workpiece is a display panel.

Referring to FIG. 10 , when the object OB is a display panel that displays an image, the laser device 1100 may irradiate a laser beam LB multiple times to form a through hole in the display panel. . In this case, the plurality of spots LS may be provided on the display panel that is the object OB. The plurality of spots LS may be provided in a tornado shape on the display panel that is the object OB, but is not limited thereto.

7 to 9 , the laser device 1100 uniformly adjusts the size of the spot LS of the laser beam LB in the first direction (X-axis direction) and the second direction (Y-axis direction). 10, the size of the fine spots LS in the form of a tornado may be uniform as shown in FIG. Accordingly, a through hole may be formed in the display panel as the object OB by irradiating the laser beam LB a plurality of times using the laser device 1100 . The through hole of the display panel will be described later with reference to FIG. 11 .

11 is an exploded perspective view illustrating a display device including a display panel according to an exemplary embodiment.

Referring to FIG. 11 , the display device 10 according to an exemplary embodiment includes a mobile phone, a smart phone, a tablet personal computer (PC), a mobile communication terminal, an electronic notebook, an electronic book, and a PMP. It can be applied to portable electronic devices such as (portable multimedia player), navigation, UMPC (Ultra Mobile PC), and the like. Alternatively, the display device 10 according to an exemplary embodiment may be applied as a display unit of a television, a laptop computer, a monitor, a billboard, or the Internet of Things (IOT). Alternatively, the display device 10 according to an embodiment is a wearable device such as a smart watch, a watch phone, a glasses display, and a head mounted display (HMD). can be applied. Alternatively, the display device 10 according to an exemplary embodiment may include a dashboard of a vehicle, a center fascia of the vehicle, a center information display (CID) disposed on a dashboard of the vehicle, and a rearview mirror display instead of a side mirror of the vehicle. (room mirror display), or as entertainment for the rear seat of a car, may be applied to a display disposed on the back of the front seat.

The first direction (X-axis direction) may be a short side direction of the display device 10 , for example, a horizontal direction of the display device 10 . The second direction (the Y-axis direction) may be a long side direction of the display device 10 , for example, a vertical direction of the display device 10 . The third direction (Z-axis direction) may be a thickness direction of the display device 10 .

The display device 10 according to an exemplary embodiment includes a cover window 100 , a display panel 300 , a display circuit board 310 , a display driving circuit 320 , a bracket 600 , and a main circuit board 700 . , a light receiving sensor 740 , and a lower cover 900 .

The cover window 100 may be disposed on the display panel 300 to cover the front surface of the display panel 300 . Accordingly, the cover window 100 may function to protect the front surface of the display panel 300 .

The cover window 100 may include a transmissive part DA100 corresponding to the display panel 300 and a light blocking part NDA100 corresponding to an area other than the display panel 300 . The light blocking part NDA100 may be formed to be opaque.

The display panel 300 may be disposed under the cover window 100 . It may include a display area DA and a non-display area NDA. The display area DA is an area including pixels displaying an image, and the non-display area NDA is an area in which an image is not displayed and may be a peripheral area of the display area NDA. The non-display area NDA may not include pixels. The non-display area NDA may be disposed to surround the display area DA as shown in FIG. 11 , but is not limited thereto. The display area DA may occupy most of the area of the display panel 300 .

The display panel 300 may include a through hole TH. The through hole TH may be a hole passing through the display panel 300 . The through hole TH may be disposed to be surrounded by the display area DA.

The through hole TH may overlap the sensor hole SH of the pressure sensor 400 , the bracket hole BH of the bracket 600 , and the light receiving sensor 740 in the third direction (Z-axis direction). Therefore, the light passing through the through hole TH of the display panel 300 may be incident on the light receiving sensor 740 through the sensor hole SH and the bracket hole BH. Accordingly, even though the light receiving sensor 740 is disposed under the display panel 300 , it is possible to detect light incident from the front surface of the display device 10 .

Meanwhile, although FIG. 11 illustrates that the display panel 300 includes one through hole TH, the number of through holes TH is not limited thereto. When the display panel 300 includes a plurality of through-holes TH, any one of the plurality of through-holes TH has a sensor hole SH and a bracket hole BH in the third direction (Z-axis direction). , and the light receiving sensor 740 , and the other through hole TH may overlap another sensor hole, another bracket hole, and a sensor device other than the light receiving sensor 740 . For example, the other sensor device may be a proximity sensor, an illuminance sensor, or a front camera sensor.

The display panel 300 may be a light emitting display panel including a light emitting element. For example, the display panel 300 may include an organic light emitting display panel including an organic light emitting device including an organic light emitting layer, a micro light emitting diode display panel using a micro LED, and a quantum dot light emitting device including a quantum dot light emitting layer It may be a quantum dot light emitting display panel using (Quantum dot Light Emitting Diode) or an inorganic light emitting display panel including an inorganic light emitting device having an inorganic semiconductor. Hereinafter, the display panel 300 will be mainly described as an organic light emitting display panel.

Also, the display panel 300 may include a touch electrode layer having touch electrodes for sensing an object such as a human finger or a pen. In this case, the touch electrode layer may be disposed on the display layer in which pixels displaying an image are disposed.

A display circuit board 310 and a display driving circuit 320 may be attached to one side of the display panel 300 . The display circuit board 310 includes a flexible printed circuit board that can be bent, a rigid printed circuit board that is hard and not easily bent, or a rigid printed circuit board and a flexible printed circuit board. It may be an all-inclusive composite printed circuit board.

The display driving circuit 320 may receive control signals and power voltages through the display circuit board 310 , and generate and output signals and voltages for driving the display panel 300 . The display driving circuit 320 may be formed as an integrated circuit (IC) and may be attached to the display panel 300 by a chip on glass (COG) method, a chip on plastic (COP) method, or an ultrasonic method. not limited For example, the display driving circuit 320 may be attached on the display circuit board 310 .

A touch driving circuit 330 may be disposed on the display circuit board 310 . The touch driving circuit 330 may be formed as an integrated circuit and may be attached to the upper surface of the display circuit board 310 . Alternatively, the touch driving circuit 330 may be integrated into one integrated circuit in some cases.

The touch driving circuit 330 may be electrically connected to the touch electrodes of the touch electrode layer of the display panel 300 through the display circuit board 310 . The touch driving circuit 330 may output a touch driving signal to the touch electrodes and sense a voltage charged in capacitance of the touch electrodes.

The touch driving circuit 330 generates touch data according to a change in an electrical signal sensed by each of the touch electrodes and transmits the generated touch data to the main processor 710 , and the main processor 710 analyzes the touch data to generate a touch coordinates can be calculated. The touch may include a contact touch and a proximity touch. The contact touch refers to direct contact of an object such as a human finger or a pen with the cover window disposed on the touch electrode layer. Proximity touch refers to an object such as a person's finger or a pen being placed in close proximity on a cover window, such as by hovering.

A bracket 600 may be disposed under the display panel 300 . The bracket 600 may include plastic, metal, or both plastic and metal. The bracket 600 includes a first camera hole CMH1 into which the first camera sensor 720 is inserted, a battery hole BH in which a battery is disposed, and a cable hole through which a cable 314 connected to the display circuit board 310 passes. (CAH), and a bracket hole (BH) overlapping the light receiving sensor 740 in the third direction (Z-axis direction) may be formed. In this case, the light receiving sensor 740 may be disposed in the bracket hole (BH). Alternatively, the bracket 600 may not include the bracket hole BH, but may be formed so as not to overlap the through hole TH of the display panel 300 .

A main circuit board 700 and a battery 790 may be disposed under the bracket 600 . The main circuit board 700 may be a printed circuit board or a flexible printed circuit board.

The main circuit board 700 may include a main processor 710 , a first camera sensor 720 , a main connector 730 , and a light receiving sensor 740 . The first camera sensor 720 is disposed on both the top and bottom surfaces of the main circuit board 700 , the main processor 710 is disposed on the top surface of the main circuit board 700 , and the main connector 730 is the main circuit board It may be disposed on the lower surface of the 700 . The light receiving sensor 740 may be disposed on the upper surface of the main circuit board 700 .

The main processor 710 may control all functions of the display device 10 . For example, the main processor 710 may output digital video data to the display driving circuit 320 through the display circuit board 310 so that the display panel 300 displays an image. Also, the main processor 710 may receive touch data from the touch driving circuit 330 , determine the user's touch coordinates, and then execute an application indicated by an icon displayed on the user's touch coordinates. In addition, the main processor 710 converts the first image data input from the first camera sensor 720 into digital video data and outputs it to the display driving circuit 320 through the display circuit board 310 , so that the first camera An image captured by the sensor 720 may be displayed on the display panel 300 . Also, the main processor 710 may determine the user's blood pressure according to a sensor signal input from the light receiving sensor 740 .

The first camera sensor 720 processes an image frame such as a still image or a moving image obtained by the image sensor and outputs it to the main processor 710 . The first camera sensor 720 may be a CMOS image sensor or a CCD sensor. The first camera sensor 720 may be exposed to the lower surface of the lower cover 900 by the second camera hole CMH2 , and thus an object or background disposed under the display device 10 may be photographed.

The cable 314 passing through the cable hole CAH of the bracket 600 may be connected to the main connector 730 . Accordingly, the main circuit board 700 may be electrically connected to the display circuit board 310 .

The light receiving sensor 740 may include a light receiving element capable of detecting light incident through the through hole TH. In this case, the light receiving element may be a photodiode or a phototransistor. For example, the light receiving sensor 740 may be a CMOS image sensor or a CCD sensor capable of sensing light. The light receiving sensor 740 may output an optical signal to the main processor 710 according to the amount of light reflected by the object disposed on the through hole TH.

The battery 790 may be disposed so as not to overlap the main circuit board 700 in the third direction (Z-axis direction). The battery 790 may overlap the battery hole BH of the bracket 600 .

In addition, a mobile communication module capable of transmitting and receiving a wireless signal to and from at least one of a base station, an external terminal, and a server over a mobile communication network may be further mounted on the main circuit board 700 . The wireless signal may include various types of data according to transmission/reception of a voice signal, a video call signal, or a text/multimedia message.

The lower cover 900 may be disposed under the main circuit board 700 and the battery 790 . The lower cover 900 may be fixed by being fastened to the bracket 600 . The lower cover 900 may form a lower surface of the display device 10 . The lower cover 900 may include plastic, metal, or both plastic and metal. A second camera hole CMH2 through which a lower surface of the first camera sensor 720 is exposed may be formed in the lower cover 900 .

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those of ordinary skill in the art to which the present invention pertains may be embodied in other specific forms without changing the technical spirit or essential features of the present invention. you will be able to understand Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

1000: laser processing device 1100: laser device
1110: laser beam generator 1120: beam scanner
1121a: first reflective mirror 1121b: second reflective mirror
1130: scan lens unit 1131: first convex lens
1132: concave lens 1133: second convex lens
1134: third convex lens 1140: tilt providing unit
1141: first side 1142: second side
1143: third side 1200: chamber
1210: light transmitting unit 1220: stage
1230: protection window OB: workpiece

Claims (20)

a laser beam generator generating and outputting a laser beam;
a beam scanner for adjusting an output direction of the laser beam;
a scan lens unit for focusing the laser beam output from the beam scanner at a predetermined position; and
and a tilt providing unit disposed between the beam scanner and the scan lens unit so that the vertical optical axis of the scan lens unit is inclined at a first angle with respect to the vertical optical axis of the beam scanner. According to claim 1,
The slope providing unit,
a first surface corresponding to a beam output surface of the beam scanner from which the laser beam is output; and
and a second surface in contact with the first surface and corresponding to the beam incident surface of the scan lens unit through which the laser beam is incident to the scan lens unit;
The angle between the first surface and the second surface is the first angle. 3. The method of claim 2,
The slope providing unit,
The laser device further comprising a third surface connecting the first surface and the second surface. According to claim 1,
The first angle is a laser processing apparatus of 10 degrees or more and 45 degrees or less. According to claim 1,
The beam scanner,
a first reflection mirror for controlling an output direction of the laser beam in a first direction; and
and a second reflection mirror configured to control an output direction of the laser beam in a second direction crossing the first direction. According to claim 1,
The scan lens unit includes a plurality of non-telecentric lenses. 7. The method of claim 6,
The scan lens unit,
a first convex lens;
a concave lens disposed on one side of the first convex lens;
a second convex lens disposed on one side of the concave lens; and
A laser device including a third convex lens disposed on one side of the second convex lens. A chamber including a light transmitting portion for transmitting the laser beam;
a workpiece disposed on a stage inside the chamber; and
and a laser device that irradiates the laser beam to the workpiece through the light transmitting part,
The laser device is
a laser beam generator generating and outputting a laser beam;
a beam scanner for adjusting an output direction of the laser beam;
a scan lens unit for focusing the laser beam output from the beam scanner at a predetermined position; and
Laser processing apparatus including a tilt providing unit disposed between the beam scanner and the scan lens unit so that the vertical optical axis of the beam scanner and the vertical optical axis of the scan lens unit are inclined at a first angle 9. The method of claim 8,
A laser processing apparatus that does not overlap the processing region and the light transmitting portion of the workpiece to be processed by the laser beam in a thickness direction of the workpiece. 10. The method of claim 9,
A laser processing apparatus disposed between the workpiece and the light transmitting part, and further comprising a protection window for transmitting the laser beam. 11. The method of claim 10,
The protective window overlaps the processing region of the workpiece and the light transmitting portion in a thickness direction of the workpiece. 9. The method of claim 8,
A laser processing apparatus having a vacuum state inside the chamber while the laser beam of the laser apparatus is output to the workpiece. 9. The method of claim 8,
An incident angle at which the laser beam is incident on the workpiece is greater than 20 degrees. 9. The method of claim 8,
The object to be processed is a laser processing apparatus that is a display panel including an organic light emitting element or an inorganic light emitting element. 9. The method of claim 8,
A laser processing apparatus in which the laser beam is irradiated to a flat area of the workpiece. 9. The method of claim 8,
The slope providing unit,
a first surface corresponding to a beam output surface of the beam scanner from which the laser beam is output; and
and a second surface in contact with the first surface and corresponding to the beam incident surface of the scan lens unit through which the laser beam is incident to the scan lens unit;
The angle between the first surface and the second surface is the first angle. 17. The method of claim 16,
The slope providing unit,
The laser device further comprising a third surface in contact with the first surface and the second surface. 9. The method of claim 8,
The first angle is a laser processing apparatus of 10 degrees or more and 45 degrees or less. 9. The method of claim 8,
The beam scanner,
a first mirror for controlling an output direction of the laser beam in a first direction; and
and a second mirror configured to control an output direction of the laser beam in a second direction intersecting the first direction. 9. The method of claim 8,
The scan lens unit includes a plurality of non-telecentric lenses.

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