KR20190010525A - A magnetic levitation system, a carrier for a magnetic levitation system, and a method for operating a levitation system - Google Patents

Abstract

A magnetic levitation system is provided. The magnetic levitation system includes a base structure 110, a carrier 120 movable relative to the base structure 110, and at least one active magnetic bearing 112 configured to contactlessly hold the carrier 120 to the base structure 110. [ . The carrier 120 includes a first carrier portion 121 configured to magnetically interact with the base structure 110 and a second carrier portion 122 configured to carry the object 10, 121 and the second carrier portion 122 are connected to each other via the flexible connection portion 125. Also described is a method for operating a magnetic levitation system as well as a carrier for a levitated system.

Description

A magnetic levitation system, a carrier for a magnetic levitation system, and a method for operating a levitation system

[0001] Embodiments of the present disclosure relate to a magnetic levitation system configured to contactlessly hold, position, and / or transport a carrier. Additional embodiments are directed to carriers for magnetic levitation systems as well as methods of operating the levitation system. More specifically, a magnetic levitation system configured to transport a carrier in a non-contact manner through a vacuum system is described and the carrier can carry an object, such as a substrate, in an essentially vertical orientation in particular.

[0002] For example, magnetic levitation systems can be utilized for contactless transfer of carriers to a base structure under sub-atmospheric pressure. An object carried by the carrier, such as a substrate, can be transferred from a first position in the vacuum system, i.e., a loading position, to a second position in the vacuum system, e.g., a deposition position. Magnetic levitation systems can enable contactless contact and hence frictionless transfer of carriers, and can reduce the generation of small particles within a vacuum processing system.

[0003] Magnetic levitation systems typically include one or more actively controlled magnetic bearings configured to hold a carrier in a base structure at a predetermined distance through magnetic forces. Active control of the carrier position can be problematic when the carrier vibrates at one of the carrier's natural frequencies. In particular, under certain conditions, active control by active magnetic bearings of the magnetic levitation system can amplify the inherent vibrations of the carrier, which can lead to resonance excitation of the carrier.

[0004] To reduce carrier vibrations, complex control algorithms of active magnetic bearings can be used. However, reducing or avoiding the oscillations of the carrier of the magnetic levitation system may be dependent on the size, shape and material of the carrier, in particular the oscillatory behavior of the carrier, as well as the carrier Because, it can be tricky. The oscillations of the carrier may negatively impact the carrier's transport stability and positioning accuracy.

[0005] Accordingly, it would be beneficial to improve the accuracy of transfer and positioning of the carrier of the levitation system. It would also be advantageous to provide a carrier for a levitation system that is adapted to be precisely and accurately carried and held in the base structure of the levitation system.

[0006] In view of the above, a method for operating a magnetic levitation system as well as a carrier for a magnetic levitation system, a magnetic levitation system, is provided.

[0007] According to aspects of the present disclosure, a magnetic levitation system is provided. The magnetic levitation system includes a base structure, a movable carrier relative to the base structure, and at least one active magnetic bearing configured to non-contactly hold the carrier to the base structure, the carrier having a first carrier portion And a second carrier portion configured to carry the object, wherein the first carrier portion and the second carrier portion are connected to each other via a flexible connection.

[0008] According to another aspect of the present disclosure, a carrier for a levitated system is provided. The carrier includes a first carrier portion configured to interact with a base structure of a magnetic levitation system configured to non-contactly hold, position and / or transport the carrier, and a second carrier portion configured to carry the object, The carrier portion and the second carrier portion are connected to each other via a flexible connection.

[0009] According to yet another aspect of the present disclosure, a vacuum system is provided. The vacuum system includes a vacuum chamber, a deposition source arranged in a vacuum chamber, and a magnetic levitation system according to any of the embodiments described herein. The magnetic levitation system is configured to noncontactly transfer a carrier that conveys the object to be coated into the deposition area of the vacuum chamber.

[0010] According to another aspect described herein, a method of operating a magnetic levitation system is provided. The method includes providing a carrier including a first carrier portion and a second carrier portion interconnected via a flexible connection, arranging the object to be conveyed on a second carrier portion, and providing at least one active magnetic bearing Contacting the carrier with the base structure in a noncontact manner, wherein the first carrier portion magnetically interacts with the base structure.

[0011] Further aspects, advantages and features of the present disclosure are apparent from the detailed description and the accompanying drawings.

[0012] In the manner in which the recited features of the present disclosure can be understood in detail, a more particular description of the disclosure briefly summarized above may be made with reference to the embodiments. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings relate to embodiments of the present disclosure and are described below. Exemplary embodiments are shown in the drawings and are described in detail in the following detailed description.
[0013] FIG. 1 is a schematic cross-sectional view of a magnetic levitation system in accordance with embodiments described herein;
[0014] FIG. 2 is a schematic cross-sectional view of a magnetic levitation system in accordance with embodiments described herein;
[0015] FIG. 3 is a schematic cross-sectional view of a magnetic levitation system in accordance with embodiments described herein;
[0016] FIG. 4 is a schematic cross-sectional view of a levitation system in accordance with embodiments described herein;
[0017] FIG. 5A is a schematic front view of a carrier for a levitation system in accordance with embodiments described herein;
[0018] Figure 5b is a schematic perspective view of the upper portion of the carrier of Figure 5a;
[0019] FIG. 6 is a schematic cross-sectional view of an upper portion of a carrier for a levitation system in accordance with embodiments described herein; And
[0020] FIG. 7 is a flow chart illustrating a method of operating a levitated system in accordance with embodiments described herein.

[0021] Reference will now be made in detail to various embodiments, and examples of one or more of the various embodiments are illustrated in the drawings. Each example is provided as an illustration, and is not intended as a limitation. For example, features illustrated or described as part of an embodiment may be used in conjunction with any other embodiment or with any other embodiment to produce yet another additional embodiment. The present disclosure is intended to cover such modifications and variations.

[0022] In the following description of the drawings, the same reference numbers refer to the same or similar components. In general, only differences for the individual embodiments are described. Unless otherwise indicated, the description of portions or aspects of one embodiment also applies to corresponding portions or aspects of the other embodiments.

[0023] 1 is a schematic cross-sectional view of a magnetic levitation system 100 in accordance with embodiments described herein. The magnetic levitation system 100 includes a base structure 110 and a carrier 120 that is held in a non-contact manner with respect to the base structure 110 and movable relative to the base structure 110. The base structure 110 may include one or more stationary tracks or rails and the actively controlled magnetic units of the magnetic levitation system may be provided to the tracks or rails.

[0024] In the embodiment shown in FIG. 1, the base structure 110 includes a top rail arranged on the carrier 120, and the carrier 120 is held below the top rail. Alternatively or additionally, the base structure 110 may include a lowermost rail arranged below the carrier, and the carrier is held on the lowermost rail. Alternatively or additionally, the base structure 110 may include at least one side rail arranged on one side or two opposite sides of the carrier 120.

[0025] The magnetic levitation system 100 includes at least one active magnetic bearing 112 configured to non-contactly hold the carrier 120 to the base structure 110. A plurality of active magnetic bearings may be provided. The at least one active magnetic bearing 112 is configured to generate a magnetic force acting between the base structure 110 and the carrier 120 such that the carrier 120 is held in a noncontact manner at a predetermined distance from the base structure 110 Lt; / RTI > In some embodiments, at least one active magnetic bearing 112 has a distance between the top rail and the carrier in a first direction V (typically, the first direction V is essentially vertical) Is configured to generate a magnetic force acting in a first direction (V) so that it can remain essentially constant.

[0026] In some embodiments, at least one active magnetic bearing 112 includes an actuator 113 arranged in a base structure 110, and in particular, arranged on a top rail of a base structure 110. Actuator 113 may include a controllable magnet, such as an electromagnet. The actuator 113 may be actively controllable to maintain a predetermined distance between the base structure 110 and the carrier 120. A magnetic counterpart 118 may be arranged in the carrier 120, particularly in the head portion of the carrier. The magnetic counterpart 118 of the carrier can magnetically interact with the actuator 113 of the base structure.

[0027] For example, an output parameter, such as the current applied to the actuator 113, may be controlled according to an input parameter, such as the distance between the carrier and the base structure. In particular, the distance between the top rail of the base structure 110 and the carrier 120 may be measured by a distance sensor, and the magnetic field strength of the actuator 113 may be set in accordance with the measured distance. In particular, the magnetic field strength can be increased in the case of a distance exceeding a predetermined threshold value, and the magnetic field intensity can be reduced in the case of a distance less than a threshold value. Actuator 113 may be controlled by closed loop or feedback control.

[0028] Depending on the size, shape, and material of the carrier 120, so-called " eigenmodes " or natural vibrations of the carrier may hinder stable and robust control of the carrier position by the active magnetic bearings. Already very small excitation amplitudes at the carrier's eigenfrequencies can result in large resonance vibrations of the carrier. Depending on the frequency range of the natural frequencies, the vibrations can be further amplified by active magnetic bearings. To reduce the inherent vibrations of the carrier during magnetic levitation, complex control algorithms of active magnetic bearings and / or specially shaped carriers may be utilized.

[0029] However, the above measures may not be sufficient or adequate to enable accurate contactless positioning and stable transfer of the carrier. The embodiments described herein are intended to improve the transport stability and positioning accuracy of the carriers of the magnetic levitation systems.

[0030] The carrier 120 includes a first carrier portion 121 and a second carrier portion 122 that are mechanically interconnected via a flexible connection portion 125. In this embodiment, Thus, by using flexible connections with appropriate flexibility, elasticity, restoring force, mass, material properties and additional features, the oscillation characteristics of the carrier can be modified as appropriate.

[0031] The first carrier portion 121 may be configured to magnetically interact with the base structure 110. For example, at least one active magnetic bearing 112 may operate between the first carrier portion 121 and the base structure 110. In particular, a magnetically responsive portion 118 magnetically interacting with an actuator 113 of at least one active magnetic bearing 112 may be provided in the first carrier portion 121. Alternatively or additionally, the active magnetic units of the magnetic levitation system may be integrated into the first carrier portion.

[0032] The second carrier portion 122 is configured to carry the object 10. In particular, the second carrier portion 122 may include a holding portion 11 where the object 10 carried by the carrier is held. The second carrier portion 122 may further comprise a mounting device configured to hold the object 10 in the holding portion 11.

[0033] In particular, the first carrier portion 121 may comprise magnetic components of the magnetic levitation system, e.g., portions of active and / or passive magnetic units, and the second carrier portion 122 may include portions And can be configured as a holder. For example, the second carrier portion 122 may include a plate component having a holding surface for holding a substrate to be coated. Thus, the components for interacting with the base structure and the components for holding the object on the carrier can be functionally and spatially separated from each other by providing a first carrier portion 121 and a second carrier portion 122 have.

[0034] The first carrier portion 121 and the second carrier portion 122 are connected to each other by a flexible connection 125. The flexible connection 125 modifies the oscillating behavior of the carrier 120 and provides a damping effect with respect to the inherent vibrations of the carrier. The first carrier portion 121 and the second carrier portion 122 may oscillate with respect to each other through the flexible connection portion 125. Because the second carrier portion 122 can move with respect to the first carrier portion 121 through the flexible connection 125, the oscillation peaks of the carrier at the resonant frequencies are attenuated.

[0035] In some embodiments, which may be combined with other embodiments described herein, the flexible connection 125 includes a flexible material, in particular, an elastic material 126. The elasticity of the elastic material can be selected according to the eigenmodes and eigenfrequencies of the carrier, which are damped.

[0036] In some implementations, the resilient material 126 includes rubber, Viton, and / or other resilient sealing materials. In some embodiments, the elastic material 126 is an insulator material. The elastic material 126, including the Viton, is particularly suitable for vacuum applications. The materials are elastic and provide excellent dampening properties. Thus, vibrations of the carrier can be effectively dampened.

[0037] 1, an elastic material 126 is arranged between the first carrier portion 121 and the second carrier portion 122 such that the first carrier portion 121 and the second carrier portion 122 are in contact with each other, Can move or oscillate relative to each other in one direction (V). Here, the resilient material 126 may partially or wholly fill the gap between the first carrier portion 121 and the second carrier portion 122. The first direction V may correspond to a direction in which at least one active magnetic bearing 112 controls the distance between the carrier 120 and the base structure 110. In particular, the first direction V may be essentially vertical.

[0038] In particular, in some embodiments, the flexible connection 125 is resiliently deformable in a first direction V, wherein the first direction is essentially such that at least one active magnetic bearing 112 is coupled to the base structure 110 And the carrier 120. In this case, Thus, vibrations of the carrier, which can be stimulated by the at least one active magnetic bearing 112, are weakened in a particularly effective manner through the flexible connection 125.

[0039] In some implementations, the first carrier portion 121 and the second carrier portion 122 may be primarily metallic components, and the elastic material 126 may be a non-metallic material, particularly an insulator material. Thus, by connecting the first carrier portion 121 and the second carrier portion 122 through an elastic material, the first carrier portion 121 and the second carrier portion 122 can be thermally and / or electrically insulated from each other .

[0040] The flexible connection portion 125 may thermally and / or electrically isolate the first carrier portion 121 from the second carrier portion 122. [ In particular, the flexible connection may form an electrical insulation and / or a thermal barrier between the first carrier portion 121 and the second carrier portion 122. Thus, heat transfer from the components integrated in the first carrier portion 121 toward the object 10 held by the second carrier portion 122 can be reduced or avoided. In addition, heat transfer from the second carrier portion 122 to the first carrier portion 121 can be reduced or avoided. Thus, delicate electronic components and / or permanent magnets that may be incorporated into the first carrier portion 121 may be protected from heat that may be generated, for example, during deposition of the coating material on the object 10 .

[0041] In some embodiments, which may be combined with other embodiments described herein, the first carrier portion 121 may include a second carrier portion (not shown) when the carrier 120 is held in a noncontact manner with the base structure 110 122). ≪ / RTI > In particular, the first carrier portion 121 can be held in a non-contact manner below the uppermost rail of the base structure, the second carrier portion 122 is arranged below the first carrier portion 121, Lt; / RTI > to the first carrier portion.

[0042] The carrier 120 may extend essentially in a vertical direction and the first carrier portion 121 is arranged on the second carrier portion 122. The second carrier portion 122 may include an essentially vertically oriented holding portion 11 for holding the object 10, e.g., a substrate or mask, in an essentially vertical orientation.

[0043] As shown schematically in Figure 1, the carrier 120 may be a substrate carrier configured to hold the substrate in the holding portion 11 of the second carrier portion 122 in an essentially vertical orientation. Alternatively, the carrier 120 may be configured to carry a different object, such as a mask or shield.

[0044] A " substrate carrier " as used herein relates to a carrier configured to carry a substrate along a substrate transfer path in a vacuum chamber. The substrate carrier may hold the substrate while depositing the coating material on the substrate. In some embodiments, the substrate may be held on the substrate carrier in a non-horizontal orientation, for example, in an essentially vertical orientation, e.g. during transport and / or deposition.

[0045] The substrate can be held on the holding surface of the second carrier portion during transfer through the vacuum chamber, during the positioning of the substrate relative to the mask, for example, and / or during deposition of the coating material on the substrate, in a vacuum chamber . In particular, the substrate may be held in the second carrier portion by a mounting device comprising, for example, an electrostatic chuck or a magnetic chuck.

[0046] A " mask carrier " as used herein relates to a carrier configured to carry a mask for transfer of a mask along a mask transfer path in a vacuum chamber. The mask carrier may carry the mask during transport, during alignment with the substrate, and / or during deposition on the substrate. In some embodiments, the mask can be held in the mask carrier in a non-horizontal orientation, particularly an essentially vertical orientation, during transfer and / or deposition. The mask may be held in a second carrier portion of the mask carrier by a mounting device, e.g., a mechanic mount, such as a clamp, electrostatic chuck, or magnetic chuck. Other types of mounting devices that may be connected to or integrated with the carrier may be used.

[0047] The second portion of the mask carrier may include a plate body having an opening, and the mask may be held in the circumferential edge of the opening so that the mask covers the opening. Thus, the coating material may be directed through the mask toward the substrate. The mask may be an edge exclusion mask or a shadow mask. An edge exclusion mask is a mask configured to mask one or more edge zones of a substrate such that no material is deposited on one or more edge zones during coating of the substrate. A shadow mask is a mask configured to mask a plurality of features to be deposited on a substrate. For example, the shadow mask may comprise a plurality of small openings, e.g., a grid of small openings.

[0048] As used herein, "essentially vertical orientation" means that the angle between the gravitational vector and the holding surface of the second carrier portion 122 is 20 ° or less, specifically 10 ° or less, more specifically, Lt; / RTI > of the second carrier portion 122 that is less than 5 degrees or less. Thus, the substrate or other object may be held on the holding surface in an essentially vertical orientation.

[0049] It should be noted that the first direction V need not necessarily be essentially vertical. For example, in some embodiments, the first direction may be a non-vertical direction, e.g., essentially horizontal. In particular, the base structure may be configured to hold, position, and / or transport the carrier while the carrier is essentially horizontal oriented. The second carrier portion may include an essentially horizontal holding surface such that the object can be held in the second carrier portion in an essentially horizontal orientation. When the carrier is held in the base structure in an essentially horizontal orientation, the flexible connection can be resiliently deformable in the horizontal direction, and at least one active magnetic bearing can control the distance between the base structure and the carrier in the horizontal direction can do.

[0050] Figure 2 is a schematic cross-sectional view of a magnetic levitation system 200 in accordance with embodiments described herein. The magnetic levitation system 200 may include the features of the levitation system 100 shown in FIG. 1, so that the above description may be referred to, and they are not repeated here.

[0051] The magnetic levitation system 200 includes a base structure 110 that includes a stationary top rail and the stationary top rail is configured to noncontactly hold the carrier 120 below its top rail. At least one active magnetic bearing 112 having a controllable actuator 113 provides attractive magnetic force between the carrier 120 and the base structure 110.

[0052] The carrier 120 includes a first carrier portion 121 that can carry magnetic components of the levitation system and a second carrier portion 122 that can be configured as a holding device for carrying the object 10 . The first carrier portion 121 may be configured as a carrier head arranged over the second carrier portion 122. The first carrier portion 121 and the second carrier portion 122 are connected via a flexible connection.

[0053] The second carrier portion 122 may include a holding portion 11 and a mounting device 15 configured to hold the object 10 in the holding portion. The mounting device 15 may comprise a mechanical mount, such as a clamp, and / or an electrostatic chuck or a magnetic chuck. For example, the electrostatic chuck may be integrated into the body of the second carrier portion 122. The electrostatic chuck can hold the object 10 in the holding portion 11 by electrostatic forces that can be induced on the surface of the object and / or on the surface of the holding portion 11. A voltage source, such as a battery, may be arranged in the second carrier portion 122 to power the electrostatic chuck. For example, the voltage source may be housed in a second carrier portion 122 or in an atmospheric enclosure provided in the second carrier portion 122.

[0054] In some implementations, the magnetically responsive portion 118 of the at least one active magnetic bearing 112 may be secured to the first carrier portion 121. The magnetic counterpart 118 can magnetically interact with the actuator 113 arranged in the base structure 110 on the carrier 120. [

[0055] In some embodiments, which may be combined with other embodiments described herein, lateral stabilization of the carrier in a second direction S that is transverse to the first direction (V), particularly perpendicular to the first direction (V) at least one additional magnetic device 220 for providing side stabilization may be provided. The second direction S may correspond essentially to the horizontal direction, in particular the thickness direction of the carrier 120. At least one additional magnetic device 220 may include at least one magnetic component fixed to the first carrier portion 121. [

[0056] The at least one additional magnetic device 220 may be a passive magnetic stabilizing device. In particular, at least one additional magnetic device 220 may include a first plurality of permanent magnets 218 secured to the carrier and a second plurality of permanent magnets 219 secured to the base structure. The magnetic forces between the first plurality of permanent magnets 218 and the second plurality of permanent magnets 219 cause the carrier to move from a predetermined position in the second direction S to a predetermined position, Or to the center position between the two side guide rails.

[0057] 2, the additional magnetic device 220 includes permanent magnets fixed to the first carrier portion 121 and two side guide rails on both sides of the first carrier portion 121. In this embodiment, And provides a repulsive magnetic force. Thus, the first carrier portion 121 can be held in a non-contact manner with the center position between the side guide rails. Alternatively, lower and / or upper side stabilization devices may be provided on one side of the carrier, as schematically shown in Fig.

[0058] The second carrier portion 122 may be held under the first carrier portion 121 through the flexible connection 125. In particular, a gap 124 may be provided between the first carrier portion 121 and the second carrier portion 122, and the flexible connection bridges the gap 124 between the carrier portions, Lt; RTI ID = 0.0 > 121 < / RTI > The gap 124 may extend in a first direction V, i. E. In the direction of control of the at least one active magnetic bearing 112. The oscillation peaks of the carrier can be attenuated because the first and second carrier portions are resiliently movable relative to each other.

[0059] In some embodiments, which may be combined with other embodiments described herein, the flexible connection portion 125 bridges the gap 124 between the first carrier portion 121 and the second carrier portion 122 And a bridging component 130. The bridging component 130 may comprise a rigid material, particularly a non-elastic material, such as a metal. In particular, the bridging component 130 may be configured as a plate component, such as an adapter plate, connected to both the first carrier portion 121 and the second carrier portion 122.

[0060] The first resilient component 131 can operate between the bridging component 130 and the first carrier portion 121 and / or the second resilient component 132 can operate between the bridging component 130 and the second carrier portion 121 122, respectively. The first elastic component 131 and the second elastic component 132 may be made of an elastically deformable material, such as Viton.

[0061] The flexible connection portion 125 may enable elastic deformation of the carrier 120 in the first direction (V). In particular, the vibration of the carrier 120 in the first direction V may result in a shearing force acting on the first elastic component 131 and / or the second elastic component 132. The elasticity of the elastic components may enable the bridging component 130 to move slightly relative to the first carrier portion 121 and the second carrier portion 122. [ Vibration peaks can be attenuated in a particularly effective manner.

[0062] FIG. 3 is a schematic cross-sectional view of a magnetic levitation system 300 in accordance with the embodiments described herein. The magnetic levitation system 300 can include the features of the levitation system 100 shown in Figure 1 and / or the levitation system 200 shown in Figure 2, so that the above description can be referred to, It is not repeated here.

[0063] The magnetic levitation system 300 includes a base structure 110 that includes a top rail and the top rail is configured to hold the carrier 120 in a noncontact manner beneath its top rail. At least one active magnetic bearing 112 provides magnetic attraction between the carrier 120 and the base structure 110 and magnetic attraction can act in a first direction V, particularly an essentially vertical direction.

[0064] The carrier 120 includes a first carrier portion 121 capable of carrying magnetic components of a magnetic levitation system and a second carrier portion 122 configured as a holding device for carrying the object 10. The first carrier portion 121 may be configured as a carrier head arranged over the second carrier portion 122. The first carrier portion 121 and the second carrier portion 122 are connected via a flexible connection.

[0065] In some embodiments, which may be combined with other embodiments described herein, a third carrier portion 123, which may be connected to the second carrier portion via additional flexible connection 128, may be provided. In some implementations, the third carrier portion 123 is arranged below the second carrier portion 122. The additional flexible connection 128 may be configured in a similar or identical manner to any of the flexible connections described herein. In other embodiments, other carrier portions coupled to the second carrier portion through each flexible connection can be provided.

[0066] The third carrier portion 123 may carry magnetic components of the levitated system. For example, at least one active or passive magnetic component of the side stabilization device 320 may be secured to the third carrier portion 123.

[0067] Alternatively or additionally, at least one magnetic component of the drive unit 330 configured to transport the carrier in a non-contact manner along the carrier transport path may be secured to the third carrier portion 123. The drive unit 330 may include a linear motor.

[0068] In some embodiments, which may be combined with other embodiments described herein, the flexible connection 125 includes a first bridging component 133 and a second bridging component 134. The first bridging component 133 may connect the first carrier portion and the second carrier portion on the first side of the carrier portions and the second bridging component 134 may connect the second side of the carrier portions, Lt; RTI ID = 0.0 > a < / RTI > second carrier portion. In particular, the first bridging component 133 and the second bridging component 134 may be arranged on opposing sides of the gap 124 provided between the first carrier portion 121 and the second carrier portion 122 have.

[0069] The first resilient components 131 may operate between the first carrier portion 121 and the first bridging component and / or between the first carrier portion 121 and the second bridging component. The second resilient components may operate between the second carrier portion 122 and the first bridging component and / or between the second carrier portion 122 and the second bridging component. The first resilient components 131 and the second resilient components 132 may be made of an elastically deformable material, such as Viton.

[0070] The first and second resilient components may be configured as strips of elastic material attached to the first and second carrier portions.

[0071] The first and second bridging components may comprise a rigid material, in particular a nonelastic material, such as a metal. In particular, the first and second bridging components may be configured as inelastic adapter plates connected to both the first carrier portion 121 and the second carrier portion 122, respectively. When the first bridging component 133 and the second bridging component 134 are arranged on both sides of the carrier and overlap with both the first carrier portion and the second carrier portion in the first direction V respectively, The bending of the carrier 120 about the bending axis can be prevented or prevented. Thus, a stable carrier which is resistant to bending but at the same time flexible in the first direction (V) can be provided.

[0072] Vibrations of the carrier 120 in the first direction V may result in shearing strains for the first elastic components 131 and / or the second elastic components 132. The relative movement between the first carrier portion and the second carrier portion due to the elastic deflection of the elastic components can damp the oscillation peaks of the carrier and provide a stable carrier that is resistant to bending.

[0073] 4 is a schematic cross-sectional view of a magnetic levitation system 400 in accordance with embodiments described herein. Magnetic levitation system 400 may include features of any of the previously described magnetic levitation systems, so that the above description may be referred to, and they are not repeated herein.

[0074] The magnetic levitation system 400 includes a first carrier portion 121 and a second carrier portion 122 that are coupled to each other through a flexible connection 125 similar to the flexible connection of the magnetic levitation system 300 shown in FIG. Lt; RTI ID = 0.0 > 120 < / RTI >

[0075] In particular, a gap 124 is provided between the first carrier portion 121 and the second carrier portion 122 in a first direction (V). Bridging components that connect the first carrier portion 121 and the second carrier portion 122 to each other are provided on two opposite sides of the gap 124. The bridging components may each be adapter plates made of a rigid material. To provide flexibility of connection in the first direction V, elastic components may be provided between the bridging components and the carrier portions.

[0076] 4, a first bridging component 133 may be provided on the first side of the carrier portions and a second bridging component 134 may be provided on the first side of the carrier portions, 2 < / RTI > The first resilient components 131 can be arranged between the first carrier portion 121 and the first bridging component 133 and / or between the first carrier portion 121 and the second bridging component 134 . The second resilient components 132 may be arranged between the second carrier portion 122 and the first bridging component 133 and / or between the second carrier portion 122 and the second bridging component 134 . Thus, the bridging components move slightly relative to the first carrier portion 121 in the first direction V and / or slightly to the second carrier portion 122 when the elastic components are elastically deformed by the shear forces .

[0077] In some embodiments, which may be combined with other embodiments described herein, the flexible connection 125 may be a clamping connection. In particular, the first carrier portion 121 and the second carrier portion 122 are disposed between the first bridging component 133 and the second bridging component 134, which are arranged on opposing sides of the first and second carrier portions Can be clamped. By pressing the first bridging component 133 and the second bridging component 134 from opposite sides toward the first and second carrier portions, the second carrier portion 122 is provided by the first and second bridging components Lt; RTI ID = 0.0 > 121 < / RTI > by a clamping force.

[0078] In some implementations, connection elements may be provided for urging the first bridging component 133 and the second bridging component 134 from opposite sides toward the first carrier portion 121 and the second carrier portion 122 have. For example, the connecting elements may include at least one of screws, bolts, pins, rods, or similar elements.

[0079] In the exemplary embodiment shown in Figure 4, the connecting elements are connected to the second bridging component 134 from the first bridging component 133 through openings provided in the first carrier portion 121 and the second carrier portion 122, . Alternatively or additionally, as shown by the dashed lines in FIG. 4, at least one connecting element may extend through the gap 124 between the first carrier portion and the second carrier portion.

[0080] The first resilient components 131 and / or the second resilient components 132 may be constructed as resilient rings that are threaded by the connecting elements. The first resilient components 131 may be placed on the opposite side surfaces of the first carrier portion 121, such as to be aligned with openings provided in the first carrier portion 121. The second resilient components 132 may be placed on opposite side surfaces of the second carrier portion 122, such as to be aligned with the openings provided in the second carrier portion 122. Alternatively, the first elastic components 131 and the second elastic components 132 may be configured as strips of elastic material provided on the side surfaces of the first and second carrier portions.

[0081] When the first and second bridging components are arranged on both sides of the carrier portions and overlap with both the first carrier portion and the second carrier portion in a first direction (V), a carrier 120 can be prevented from bending. Thus, a stable carrier which is resistant to bending but at the same time flexible in the first direction (V) can be provided.

[0082] In some embodiments, which may be combined with other embodiments described herein, a drive unit 330 configured to move the carrier 120 in a noncontact manner along a carrier transport path may be provided. The drive unit 330 can be configured to transport the carrier in a non-contact manner, for example, in a third direction perpendicular to the paper plane of FIG. The drive unit 330 can transfer the carrier by the magnetic forces acting on the carrier. For example, the drive unit 330 may include a linear motor. The drive unit 330 can magnetically interact with the magnetic counterpart provided in the carrier. The magnetically responsive portion may comprise one or more arrays of permanent magnets.

[0083] In some embodiments, the drive unit 330 may be provided on the lowermost rail of the base structure 110 arranged below the carrier. 4, the uppermost rail of the base structure 110 includes an active magnetic bearing that provides at least a portion of a holding force for noncontactly holding the carrier in the base structure 110, 110 includes drive units 330 configured to transport a carrier. In other embodiments, the positions of the drive units 330 and / or the positions of the active magnetic bearings may be swapped or otherwise altered.

[0084] 5A is a schematic front view of a carrier 520 of a levitated system in accordance with the embodiments described herein. 5B is a schematic perspective view of the upper portion of the carrier 520 of FIG. 5A, also showing a partial cross-section of the carrier 520. FIG. Carrier 520 may include features of the previously described embodiments, which are not repeated here.

[0085] The carrier 520 may be held in a non-contact manner to the base structure of any of the embodiments described herein. For example, the carrier 520 includes a magnetically responsive portion 118 configured to magnetically interact with a controllable actuator of an active magnetic bearing such that the carrier 520 can be held and transported at a predetermined distance from the base structure do.

[0086] The carrier 520 includes a first carrier portion 121 and a second carrier portion 122 that are connected to each other via a flexible connection portion 125. Flexible connection 125 may include elastic components made of elastic material 126, e.g., Viton. The second carrier portion 122 includes a holding portion 11 configured to carry an object, such as a substrate.

[0087] A gap 124 extending in a first direction V may be provided between the first carrier portion 121 and the second carrier portion 122, as schematically illustrated in Figures 5A and 5B. The flexible connection portion 125 provides flexibility between the first carrier portion 121 and the second carrier portion 122 in a first direction (V).

[0088] In some embodiments, which may be combined with other embodiments described herein, the second carrier portion may have a size of greater than or equal to 1 m < 2 >, specifically greater than or equal to 5 m ≪ RTI ID = 0.0 > a < / RTI > For example, the second carrier portion 122 may be configured to carry a large area substrate for display manufacture. Thus, the second carrier portion may provide a holding surface having an area of 1 m < 2 > or greater, specifically 5 m < 2 > or greater, more specifically 10 m & Large carriers tend to have a number of important eigenmodes. Separating the carrier into two or more portions that are connected to each other through the flexible connection portions can significantly damp the oscillations of the carrier at the carrier's natural frequencies.

[0089] The flexible connection portion 125 may include a plurality of bridging components 130 connected to the first carrier portion 121 and the second carrier portion 122 respectively and the elastic material 126 may be connected to the bridging components 130) and the first and second carrier portions. The bridging components 130 may be configured as plates that extend essentially parallel to the first and second carrier portions, on both sides of the first and second carrier portions. Each plate may overlap both the first carrier portion 121 and the second carrier portion 122. Thus, bending of the carrier around the flexible connection 125 can be prevented, while relative movement between the first and second carrier portions in the first direction V may be possible. In some embodiments, the flexible connection 125 includes three, five, or more bridging components arranged on both sides of the first and second carrier portions. For example, the flexible connections may include three or more bridging components provided next to each other in the width direction of the carrier.

[0090] An elastic material is provided between the bridging components 130 and the first and second carrier portions, respectively. For example, a plurality of elastic rings or other resilient components can be provided between each bridging component 130 and the first carrier portion 121, and a plurality of resilient rings or other resilient components can be provided between each bridging component and the second carrier 121. [ The portion 122 may be provided. One of the bridging components is omitted in Figure 5A to illustrate a plurality of resilient components operable between the bridging components and the first and second carrier portions. The elastic components constructed as elastic rings are shown in cross-section in Figure 5b.

[0091] 6 is a schematic cross-sectional view of the upper portion of the carrier 620 in accordance with the embodiments described herein. Carrier 620 may include features of the previously described embodiments, which are not repeated here.

[0092] The carrier 620 includes a first carrier portion 121 and a second carrier portion 122 that are connected to each other via a flexible connection 125. A gap 124 may be provided between the first carrier portion and the second carrier portion in a first direction (V).

[0093] The flexible connection portion 125 allows the relative movement between the first carrier portion 121 and the second carrier portion 122 in the first direction V while permitting relative movement between the first carrier portion 121 and the second carrier portion 122, And a bridging component 130 that connects the portion 122 of the device. The first resilient components 131 may operate between the first carrier portion 121 and the bridging component 130 and the second resilient components 132 may operate between the second carrier portion 122 and the bridging component 130. [ Lt; RTI ID = 0.0 > 130 < / RTI > The first resilient components 131 and / or the second resilient components 132 may be configured as resilient rings 622 that include, for example, an elastic material, such as Viton.

[0094] In some embodiments, which may be combined with other embodiments described herein, the flexible connection 125 may be a positive fit connection. In particular, the bridging component 130 may engage the first aperture of the first carrier portion 121 and the second aperture of the second carrier portion 122. [ In some implementations, the bridging component includes a plurality of openings in the first carrier portion 121, which may be arranged in a vertical direction, such that one overlies the other and / or horizontally side by side, It can be interlocked. In addition, the bridging component 130 may engage a plurality of openings in the second carrier portion 122, which may be arranged in a vertical direction such that one overlies the other and / or horizontally.

[0095] In particular, the bridging component 130 may comprise an essentially vertically extending plate portion and a plurality of engagement pins extending from the plate portion through the first and second openings. The second carrier portion 122 can not be dropped from the first carrier portion 121 because the engagement pins of the bridging component are positioned between the first openings of the first carrier portion and the second openings of the second carrier portion And positively.

[0096] In some implementations, the first resilient component 131, particularly the resilient ring, is arranged in a first opening and the second resilient component 132 is arranged in a second opening. The engagement pin of the bridging component 130 may pass through the first resilient component 131 at the first opening and the additional engagement pin of the bridging component 130 may pass through the second resilient component 132 at the second opening. can do. As the second carrier portion 122 oscillates relative to the first carrier portion 121, the elastic rings 622 receive compressive forces and tensile forces acting in a vertical direction such that the high oscillation amplitudes of the carriers in the vertical direction Is weakened by the resulting restoring forces of the rings.

[0097] In some embodiments, which may be combined with other embodiments described herein, the flexible connection portion 125 is configured such that when the second carrier portion and the first carrier portion are moved relative to each other in the first direction V, (See, for example, the carriers shown in Figs. 2,3A, 4B, 5A and 5B). These carriers may be strongly resistant to bending. In some embodiments, the flexible connection portion 125 includes elastic components that receive compressive forces and tensile forces when the second carrier portion and the first carrier portion move relative to each other in a first direction (V) , See the carriers shown in Figures 1 and 6). These carriers may be particularly durable. In some embodiments, the flexible connection may include a combination of elastic elements that receive compressive forces and tensile forces and elastic elements that receive shear forces during relative movement between the first carrier portion and the second carrier portion.

[0098] A carrier according to embodiments described herein may include a first carrier portion (not shown) configured to magnetically interact with a fixed base structure of a magnetic levitation system configured to non-contactly hold, position, and / or transport carrier 120 121), and a second carrier portion (122) configured to carry the object (10). The first carrier portion 121 and the second carrier portion 122 are connected to each other via a flexible connection 125.

[0099] A magnetic levitation system according to any of the embodiments described herein may be used in a vacuum system. The vacuum system includes a vacuum chamber, a deposition source arranged in a vacuum chamber, and a magnetic levitation system. The levitated system can be configured to non-contactly transport a carrier that carries an object into the deposition area of the vacuum chamber. The coating material may be deposited on the object by an evaporation source in the deposition zone.

[00100] 7 is a flow diagram that schematically illustrates a method of operating a levitated system in accordance with embodiments described herein.

[00101] At box 710, a carrier according to any of the embodiments described herein is provided. The carrier includes a first carrier portion 121 and a second carrier portion 122 that are connected to each other via a flexible connection.

[00102] In box 720, the object 10 to be carried by the carrier is arranged on the second carrier portion 122.

[00103] The object 10 may be loaded on the second carrier portion 122 while the carriers are arranged in a non-vertical orientation, e.g., essentially in a horizontal orientation. The carrier may then be moved in a second orientation, e.g., essentially vertical orientation. In an essentially vertical orientation, the carrier can be held and transported along the base structure 110 of the levitated system. For example, the carrier may be rotated by a vacuum swing module essentially from a horizontal loading position to an essentially vertical transfer orientation.

[00104] Alternatively, the object may be loaded on the second carrier portion 122 while the carrier is arranged in a non-horizontal orientation, e.g., an essentially vertical orientation. For example, the carrier may be held in the base structure 110 during loading of the object on the second carrier portion.

[00105] In some embodiments, the object may be a substrate to be coated, particularly a large area substrate for display manufacture. Other objects, such as mask or shielding, may be carried by the carrier.

[00106] In box 730 the carrier is held in a noncontact manner with the base structure 110 of the levitated system using at least one active magnetic bearing 112 and the first carrier portion 121 comprises a base structure 110, Interact with each other. For example, at least one active magnetic bearing 112 may provide attraction between the first carrier portion 121 and the uppermost rail of the base structure.

[00107] In some embodiments, which may be combined with other embodiments described herein, the flexible connection portion 125 is flexible in a first direction V, particularly in an essentially vertical direction. In particular, the second carrier portion 122 may be movable relative to the first carrier portion 121 in a first direction V through a flexible connection, for example, through an elastic deformation of the elastic components of the flexible connection . Thus, the oscillating behavior of the carrier can be modified by the flexible connection, and the oscillation peaks of the carrier at, for example, resonant frequencies can be attenuated.

[00108] At least one active magnetic bearing 112 may control the distance between the base structure and the carrier in the first direction (V). Thus, the amplification of the natural vibrations of the carrier can be reduced or avoided by the active magnetic bearing acting in the first direction (V).

[00109] In the optional box 740, the carrier can be transported through the vacuum chamber while being held in a non-contact manner with the base structure.

[00110] In the optional box 750, the carrier may be positioned within the deposition area, e.g., in front of the deposition source. The coating material may be deposited on the object 10 carried by the carrier. During deposition, the carrier can be held in a non-contact manner to the base structure. Alternatively, the carrier may be mounted on the mount during deposition, and the carrier may be in mechanical contact with the mount.

[00111] The object may be a substrate, particularly a large area substrate having a size of 0.5 m 2 or more, more specifically 1 m 2 or more, or even 5 m 2 or 10 m 2 or more. For example, the substrate may be a large area substrate for display manufacture.

[00112] An organic material may be deposited on the substrate. For example, by depositing an organic material on a substrate, an OLED device can be manufactured.

[00113] It should be noted that the first carrier portion does not necessarily need to be arranged over the second carrier portion configured to carry the object. For example, in some implementations, the first carrier portion may be arranged below the second carrier portion or on the side of the second carrier portion. In particular, the first carrier portion may magnetically interact with the lowermost rail of the base structure and the actuators of the plurality of active magnetic bearings may be arranged on the lowermost rail. In the latter case, the active magnetic bearings can generate a magnetic lifting force for non-contact holding of the carrier on the lowermost rail. In still further embodiments, the second carrier portion may be arranged after the first carrier portion in the horizontal direction. The amplitudes of the vibrations excited by the horizontally acting side stabilization device can be reduced and the amplification of the inherent vibrations can be avoided.

[00114] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, and the scope of the present disclosure is defined in the following claims .

Claims (15)

As a magnetic levitation system,
A base structure 110;
A carrier (120) movable relative to the base structure (110); And
And at least one active magnetic bearing (112) configured to non-contactly hold the carrier (120) to the base structure (110)
The carrier 120 includes a first carrier portion 121 configured to interact with the base structure 110 and a second carrier portion 122 configured to carry an object 10, The carrier portion 121 and the second carrier portion 122 are connected to each other via a flexible connection 125,
Magnetic levitation system. The method according to claim 1,
The flexible connection 125 includes a flexible material, particularly an elastic material 126,
Magnetic levitation system. 3. The method according to claim 1 or 2,
The first carrier portion 121 is a carrier head that is partially or wholly arranged over the second carrier portion 122,
Magnetic levitation system. 4. The method according to any one of claims 1 to 3,
The at least one active magnetic bearing 112 includes an actuator 113 arranged in the base structure 110 and a magnetic counterpart 118 arranged in the first carrier portion 121, The actuator (113) is controllable to maintain a predetermined distance between the base structure (110) and the carrier (120)
Magnetic levitation system. 5. The method according to any one of claims 1 to 4,
Wherein the at least one active magnetic bearing (112) is movable in a first direction (V) corresponding to a direction that controls the distance between the base structure (110) and the carrier (120) Sexually deformable,
Magnetic levitation system. 6. The method according to any one of claims 1 to 5,
The flexible connection portion 125 is configured such that a gap 124 is provided between the first carrier portion 121 and the second carrier portion 122 such that the second carrier portion 121, Holding portion 122,
Magnetic levitation system. 7. The method according to any one of claims 1 to 6,
The flexible connection portion 125 includes a bridging component 130, a first resilient component 131 acting between the bridging component and the first carrier portion 121, And a second resilient component (132) acting between the carrier portions (122).
Magnetic levitation system. 8. The method according to any one of claims 1 to 7,
Wherein the flexible connection portion (125) includes a first bridging component (133) and a second bridging component (134), the first carrier portion and the second carrier portion including a first bridging component (133) 2 bridging component 134,
Magnetic levitation system. 8. The method of claim 7,
The bridging component 130 engages a first aperture of the first carrier portion 121 and a second aperture of the second carrier portion 122 and the first resilient component 131 engages the first aperture Wherein the first elastic component (131) and the second elastic component (132) are elastic rings, and the second elastic component (132) is arranged in the second opening,
Magnetic levitation system. 10. The method according to any one of claims 1 to 9,
The second carrier portion 122 comprises a mounting device 15 configured to hold the object 10 in the holding portion 11 of the second carrier portion 122 and in particular the mounting device 15 Including an electrostatic chuck or a magnetic chuck,
Magnetic levitation system. 11. The method according to any one of claims 1 to 10,
The carrier 120 is a substrate carrier or mask carrier configured to hold a substrate or mask in an essentially vertical orientation,
Magnetic levitation system. A carrier (120) for a magnetic levitation system,
A first carrier portion (121) configured to interact with a base structure (110) of the magnetic levitation system configured to non-contactly hold, position and / or transport the carrier (120); And
And a second carrier portion (122) configured to carry the object (10)
The first carrier portion 121 and the second carrier portion 122 are connected to each other via a flexible connection 125,
A carrier (120) for a magnetic levitation system. A method of operating a magnetic levitation system,
Providing a carrier comprising a first carrier portion (121) and a second carrier portion (122) interconnected via a flexible connection (125);
Arranging the object (10) on the second carrier portion (122); And
Non-contact holding the carrier with the base structure (110) using at least one active magnetic bearing (112)
The first carrier portion (121) interacts with the base structure (110)
A method of operating a magnetic levitation system. 14. The method of claim 13,
Wherein the flexible connection portion 125 is flexible in a first direction V and in particular in a substantially vertical direction and the at least one active magnetic bearing 112 is flexible in the first direction V, And the distance between the carrier and the carrier,
A method of operating a magnetic levitation system. The method according to claim 13 or 14,
Transporting the carrier through a vacuum chamber while being held in a non-contact manner with the base structure;
Positioning the carrier within a deposition area; And
Further comprising depositing a coating material on the object (10) carried by the carrier,
A method of operating a magnetic levitation system.

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