KR20180018249A - Transparent electrode and touch sensor including the same - Google Patents

Abstract

The present invention relates to a transparent electrode, and more particularly to a transparent electrode comprising a mesh pattern, wherein the mesh pattern comprises a first metal oxide layer, a metal layer and a second metal oxide layer which are sequentially stacked, and the reflectance at a wavelength of 550 nm To 5% to 20%, a transparent electrode having a high transmittance and a low reflectance, an improved visibility, a low sheet resistance and an excellent bending property, and a high adhesiveness to a substrate, will be.

Description

TECHNICAL FIELD [0001] The present invention relates to a transparent electrode and a touch sensor including the transparent electrode.

The present invention relates to a transparent electrode, a touch sensor including the transparent electrode, and an image display apparatus including the touch sensor.

2. Description of the Related Art [0002] With the development of information society in recent years, demands for the display field have been increasing in various forms. In response to this demand, various flat panel display devices having characteristics such as thinning, light weight, and low power consumption, A liquid crystal display device, a plasma display panel device, and an electro luminescent display device have been studied.

Also, a touch panel, which is an input device attached to the display device so as to select an instruction content displayed on the screen as a human hand or an object and to input a command of a user, is spotlighted. The touch panel is provided on the front face of the display device and converts a contact position in direct contact with a human hand or an object into an electrical signal.

Thus, the instruction content selected at the contact position is accepted as the input signal. Such a touch panel can be replaced with a separate input device that is connected to an image display device such as a keyboard and a mouse, and the use range thereof is gradually expanding.

Since the electrode of the touch panel must be formed on the front surface of the display device, ITO (indium doped tin oxide) is generally used as a well-known transparent electrode. However, in the case of the ITO electrode, it is difficult to apply to a flexible touch sensor due to a brittleness problem, and since it exhibits a high resistance characteristic, it is difficult to use the ITO electrode due to limitations of its large size.

On the other hand, the metal mesh structure of the transparent electrode is advantageous in that it is easily applicable to a flexible touch sensor and a large area touch sensor due to the ductility and low resistance characteristic of the metal, but it has a disadvantage that the visibility is weak, There is a problem that is difficult to apply.

 Korean Patent Laid-Open Publication No. 2013-0116597 discloses a touch screen panel.

Korea Patent Publication No. 2013-0116597

An object of the present invention is to provide a transparent electrode which has a high transmittance and a low reflectance and can not visually recognize the electrode.

Another object of the present invention is to provide a transparent electrode suitable for a flexible display device by having excellent bending properties.

It is another object of the present invention to provide a transparent electrode suitable for application to a large area image display device by having a low sheet resistance value.

It is another object of the present invention to provide a transparent electrode having a high adhesion with a substrate.

It is still another object of the present invention to provide a touch sensor including the transparent electrode and an image display apparatus including the touch sensor.

1. A transparent electrode comprising a mesh pattern, wherein the mesh pattern comprises a sequentially stacked first metal oxide layer, a metal layer and a second metal oxide layer, wherein the reflectance at a wavelength of 550 nm is 5 to 20%.

2. The transparent electrode as in 1 above, wherein the reflectance at the 550 nm wavelength is 5 to 13%.

3. The method of claim 1, wherein the first metal oxide layer and the second metal oxide layer each have a refractive index of 1.7 to 2.2 at a wavelength of 550 nm, the refractive index of the metal layer at a wavelength of 550 nm is 0.1 to 1.0, Is 2.0 to 7.0.

4. The transparent electrode according to 1 above, wherein the thicknesses of the first metal oxide layer and the second metal oxide layer are independently 5 to 140 nm and the thickness of the metal layer is 5 to 30 nm.

5. The transparent electrode as in 1 above, wherein the thicknesses of the first metal oxide layer and the second metal oxide layer are independently 30 to 50 nm and the thickness of the metal layer is 8 to 15 nm.

6. The transparent electrode according to 1 above, wherein the line width of the mesh pattern is 1 to 7 mu m.

7. The method of claim 1, wherein the first metal oxide layer and the second metal oxide layer each independently comprise indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO) , Indium tin zinc oxide (ITZO), zinc tin oxide (ZTO), indium gallium oxide (IGO), tin oxide (SnO ₂ ) and zinc oxide (ZnO).

8. The transparent electrode according to 1 above, wherein the first metal oxide layer and the second metal oxide layer each independently comprise at least one selected from the group consisting of indium tin oxide (ITO) and indium zinc oxide (IZO).

9. The method of claim 1 wherein the metal layer is selected from the group consisting of silver, gold, copper, aluminum, platinum, palladium, chromium, titanium, tungsten, niobium, tantalum, vanadium, calcium, iron, manganese, cobalt, nickel, And at least one selected from the group consisting of the above-mentioned alloys.

10. The transparent electrode according to 1 above, wherein the metal layer comprises at least one selected from the group consisting of silver, gold, copper, palladium, aluminum, and two or more alloys thereof.

11. The transparent electrode according to item 1 above, wherein the transparent electrode has a haze of -1 to + 1%.

12. The transparent electrode according to 1 above, wherein the color difference value b ^* of the transparent electrode is -4 to +4.

13. A transparent electrode having no change in line resistance when folded in a direction of 180 ° from a radius of curvature of 1 mm or more,

14. A touch sensor comprising a transparent electrode according to any one of items 1 to 13 above.

15. The method of claim 14, wherein the transparent electrode is selected from the group consisting of a cyclic olefin polymer (COP), a polyethylene terephthalate (PET), a polyacrylate (PAR), a polyetherimide (PEI), a polyethylene naphthalate (PPS), polyallylate, polyimide (PI), cellulose acetate propionate (CAP), polyethersulfone (PES), cellulose triacetate (TAC), polycarbonate (PC), cyclic olefin copolymer (COC), polymethylmethacrylate (PMMA), and the like.

16. The touch sensor of claim 14, wherein the transparent electrode is provided on a substrate comprising an annular olefin polymer (COP).

17. The touch sensor of claim 14, comprising a plurality of spaced apart sensing patterns, wherein the sensing patterns are disposed on the same surface and are formed of the transparent electrodes.

18. The touch sensor of claim 17, comprising a bridge electrode connecting a first sensing pattern formed in a first direction, a second sensing pattern formed in a second direction, and a unit pattern spaced apart from the second sensing pattern.

19. The touch sensor of claim 17, wherein the touch sensor is formed in a self-capping manner.

20. Separation layer; And a touch sensor (17) formed on the separation layer.

21. The film touch sensor of claim 20, further comprising a protective layer between the touch sensor and the separating layer.

22. An image display device comprising the touch sensor of 14 above.

23. An image display device comprising the above-mentioned film touch sensor of 20 above.

The transparent electrode of the present invention has a remarkably improved visibility by having a high transmittance and a low reflectance.

Further, the transparent electrode of the present invention has an excellent bending property suitable for a flexible display device application.

Further, the transparent electrode of the present invention has a low surface resistance suitable for application to a large-area image display apparatus.

Further, the transparent electrode of the present invention has high adhesion to a substrate.

Therefore, the transparent electrode of the present invention can be usefully used for manufacturing a touch sensor and an image display device.

1 is a structure including a transparent electrode on a substrate according to an embodiment of the present invention.
2 is a cross-sectional view of a mesh pattern according to an embodiment of the present invention.
3 is a schematic view showing a bending property test method according to the present invention.

The present invention relates to a transparent electrode, and more particularly to a transparent electrode comprising a mesh pattern, wherein the mesh pattern comprises a first metal oxide layer, a metal layer and a second metal oxide layer which are sequentially stacked, and the reflectance at a wavelength of 550 nm To 5% to 20%, a transparent electrode having a high transmittance and a low reflectance, an improved visibility, a low sheet resistance and an excellent bending property, and a high adhesiveness to a substrate, will be.

FIG. 1 illustrates a structure including a transparent electrode provided on a substrate according to an embodiment of the present invention, and FIG. 2 illustrates a cross-sectional view of a mesh pattern according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings.

The transparent electrode of the present invention includes a mesh pattern 200 and the mesh pattern 200 includes a first metal oxide layer 210, a metal layer 220, and a second metal oxide layer 230 that are sequentially stacked do.

As used herein, the term 'transparent electrode' refers not only to a transparent electrode but also to an electrode including an electrode that is substantially transparent to the user, such as being manufactured with a line width that is too small for the user to identify, even though it is made of an opaque material it means.

In this specification, the mesh pattern means a net-like pattern, and in the present invention, the mesh pattern serves as an electrode.

Since the transparent electrode of the present invention has the structure of the mesh pattern 200, it has excellent bending property, and thus it is possible to manufacture a touch sensor which is excellent in warping and restoring force and excellent in flexibility and stretchability. For example, the transparent electrode of the present invention may have no change in line resistance when it is folded in the 180 ° direction at a radius of curvature of 1 mm or more, preferably 2 mm or more. This is because the transparent electrode of the present invention has a mesh pattern structure and has a three-layer structure, so that it has excellent bending properties while maintaining the characteristics of the electrode.

In the present invention, the specific form of the mesh structure is not particularly limited. For example, a rectangular square mesh structure, a rhombus mesh structure, a hexagonal mesh structure, and the like, but the present invention is not limited thereto. The length of the long side in each structure may be, for example, 2 to 500 mu m, and may be appropriately adjusted within the above range according to electric conductivity, transmittance and the like.

In the present invention, the line width of the mesh pattern 200 is not particularly limited. For example, the line width of the mesh pattern 200 may be 1 to 7 m. The mesh pattern 200 according to the present invention is not visually recognized even when the line width is 1 to 7 mu m even when the line width is 1 to 7 mu m, Lt; / RTI >

In the present invention, the mesh pattern 200 includes a first metal oxide layer 210, a metal layer 220, and a second metal oxide layer 230 which are sequentially stacked.

The present invention uses a mesh pattern 200 including a first metal oxide layer 210, a metal layer 220, and a second metal oxide layer 230 that are sequentially stacked instead of the conventional ITO transparent electrode as a transparent electrode , Visibility can be remarkably improved by having a low reflectance while having a high transmittance. In addition, the mesh pattern of the present invention is excellent in bending property, excellent in bending and restoring force and low in surface resistance, and is suitable as a transparent electrode used in a touch sensor.

In the present invention, the thicknesses of the first metal oxide layer 210, the metal layer 220, and the second metal oxide layer 230 are not particularly limited, and a high transmittance and a low reflectance are ensured, For example, the thicknesses of the first metal oxide layer 210 and the second metal oxide layer 230 may be independently 5 to 140 nm and the thickness of the metal layer 220 may be 5 to 30 nm. More preferably, the thicknesses of the first metal oxide layer 210 and the second metal oxide layer 230 are independently 30 to 50 nm, and the thickness of the metal layer 220 may be 8 to 15 nm.

In the present invention, the materials of the first metal oxide layer 210 and the second metal oxide layer 230 are not particularly limited. For example, the first metal oxide layer 210 and the second metal oxide layer 230 230 are each formed of indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), indium tin zinc oxide (ITZO), zinc tin oxide (ZTO) At least one selected from the group consisting of gallium oxide (IGO), tin oxide (SnO ₂ ), and zinc oxide (ZnO). Preferably, the first metal oxide layer 210 and the second metal oxide layer 230 are formed of indium tin oxide (ITO) and indium zinc oxide (ITO), respectively, in view of further improving the visibility and further improving the bending property IZO). More preferably, the first metal oxide layer 210 and the second metal oxide layer 230 may include indium zinc oxide (IZO).

In the present invention, the material of the metal layer 220 is not particularly limited. For example, silver, gold, copper, aluminum, platinum, palladium, chromium, titanium, At least one selected from the group consisting of tungsten, niobium, tantalum, vanadium, calcium, iron, manganese, cobalt, nickel, zinc and alloys of two or more thereof. More preferably, at least one selected from the group consisting of gold, copper, palladium, aluminum, and at least two of these alloys may be included in terms of excellent bending properties, May be an Ag-Pd-Cu (APC) alloy which is an alloy of copper and palladium.

The method of forming the first metal oxide layer 210, the metal layer 220 or the second metal oxide layer 230 of the present invention is not particularly limited and may be selected from the group consisting of physical vapor deposition (PVD) (Chemical Vapor Deposition, CVD), or the like. For example, it can be formed by reactive sputtering, which is an example of physical vapor deposition.

The method of forming the mesh pattern 200 of the present invention is not particularly limited, and may be formed by, for example, photolithography.

The method for forming the mesh pattern 200 including the first metal oxide layer 210, the metal layer 220, and the second metal oxide layer 230 of the present invention is not particularly limited. For example, Layer 210, metal layer 220 and second metal oxide layer 230 may be sequentially formed and stacked, and then the layers may be simultaneously etched by photolithography or may be etched by layers.

The transparent electrode of the present invention has a reflectance of 5 to 20% at a wavelength of 550 nm. The transparent electrode of the present invention has a low reflectance, thereby minimizing the visibility to the user. Specifically, in the transparent electrode of the present invention, the factor that greatly affects the reflectivity is the metal layer 220. The metal layer 220 is used to have the minimum electrical conductivity required for the transparent electrode of the present invention. The reflectance of the transparent electrode can be increased by using the metal layer 220. Accordingly, the present invention can achieve the aforementioned reflectance value by reducing the reflectance and controlling the thickness and the refractive index of each layer by forming the mesh pattern 200 with the transparent electrode having the three-layer structure described above. If the reflectance of the transparent electrode 200 of the present invention at a wavelength of 550 nm is less than 5%, the thickness of the metal layer 220 must be remarkably reduced, thereby increasing the resistance of the electrode. If the reflectance is more than 20% There is a problem to be admitted. More preferably, in order to further improve the visibility, the reflectance of the transparent electrode of the present invention at a wavelength of 550 nm may be 5 to 13%.

The transparent electrode of the present invention includes the mesh pattern 200 and the first metal oxide layer 210, the metal layer 220 and the second metal oxide layer 230 in which the mesh pattern 200 is sequentially stacked. The reflectance can be greatly improved by having a high transmittance as well as a low reflectance. Specifically, preferably, the transmittance of the transparent electrode of the present invention at a wavelength of 550 nm may be 60 to 90%.

The first metal oxide layer 210 and the second metal oxide layer 230 have a relatively high refractive index and the metal layer 220 has a relatively low refractive index so that the mesh pattern 200 having a high- It is possible to secure a high transmittance and a low reflectance, thereby greatly improving the visibility. For example, the refractive indexes of the first metal oxide layer 210 and the second metal oxide layer 230 at a wavelength of 550 nm are independently from 1.7 to 2.2, and the refractive index of the metal layer 220 at a wavelength of 550 nm is 0.1 To 1.0, and an extinction coefficient of 2.0 to 7.0, but this is not restrictive. The extinction coefficient can be obtained by the following equations (1) and (2).

[Equation 1]

I = I ₀ e ^{(- 留 T )}

(Where? Is the absorption coefficient, T is the thickness, I ₀ is the intensity of the transmitted light, and I is the intensity of the transmitted light)

&Quot; (2) "

? = 4? k /? ₀

(Where? Is the absorption coefficient, k is the extinction coefficient, and? ₀ is the wavelength)

The transparent electrode of the present invention includes a laminate structure of the first metal oxide layer 210, the metal layer 220, and the second metal oxide layer 230 included in the mesh pattern 200 and the mesh pattern 200 High transmittance and low reflectance as well as a clear color difference value can be achieved. Specifically, the color difference value b ^* of the transparent electrode according to the present invention is in the range of -4 to +4, so that the visibility of the pattern can be lowered and the color distortion can be prevented.

The transparent electrode of the present invention includes a laminate structure of the first metal oxide layer 210, the metal layer 220, and the second metal oxide layer 230 included in the mesh pattern 200 and the mesh pattern 200 So that it can have a low haze value. More specifically, the haze of the transparent electrode of the present invention is in the range of -1 to + 1% and can have excellent optical properties.

The present invention also provides a touch sensor including the above-described transparent electrode.

The touch sensor of the present invention is capable of manufacturing a high-performance touch sensor by using the above-described transparent electrode having a remarkably improved visibility, excellent bending property and low surface resistance as the touch sensing electrode, It is very suitable. The transparent electrode of the present invention can be applied to a sensing electrode of a touch sensor known in the art without particular limitation.

In the touch sensor of the present invention, the above-mentioned transparent electrode may be provided on the substrate 100, and the material of the substrate 100 is not particularly limited. For example, in the touch sensor of the present invention, (PET), polyacrylate (PAR), polyetherimide (PEI), polyethylene naphthalate (PEN), polyphenylene sulfide (PPS), polyallylate, (PI), cellulose acetate propionate (CAP), polyether sulfone (PES), cellulose triacetate (TAC), polycarbonate (PC), cyclic olefin copolymer (COC), polymethyl methacrylate , And the like), and the like. Preferably, the touch sensor of the present invention may be such that the above-mentioned transparent electrode is provided on the substrate 100 including the cyclic olefin polymer (COP).

According to an embodiment of the present invention, the touch sensor of the present invention may include a plurality of spaced sensing patterns. Each sensing pattern provides coordinate information of the touch point. Specifically, when a human hand or an object touches the cover window substrate, a change in capacitance due to the contact position through the position detection line connected to the pattern and the pattern at that position And the contact position is determined by converting the change in capacitance into an electrical signal.

According to an embodiment of the present invention, the sensing patterns may be formed in a self-cap (self-capacitance) manner.

According to another aspect of the embodiment, the touch sensor of the present invention includes a bridge electrode connecting a first sensing pattern formed in a first direction, a second sensing pattern formed in a second direction, and a unit pattern spaced apart from the second sensing pattern .

The first sensing pattern and the second sensing pattern are arranged in different directions. For example, the first direction may be an X-axis direction, and the second direction may be a Y-axis direction perpendicular to the first direction, but the present invention is not limited thereto.

The first sensing pattern and the second sensing pattern provide information on the X and Y coordinates of the touched point. Specifically, when a human hand or an object is brought into contact with the cover window substrate, a change in capacitance according to the contact position is transmitted to the driver circuit side via the first sensing pattern, the second sensing pattern, and the position detection line. Then, the contact position is grasped by the change of the electrostatic capacitance by the X and Y input processing circuit (not shown) or the like and converted into an electrical signal.

The first sensing pattern and the second sensing pattern may be transparent electrodes including the above-mentioned mesh pattern.

The first sensing pattern and the second sensing pattern may be disposed on the same plane.

The bridge electrode connects the spaced apart unit patterns of the second mesh pattern. At this time, since the bridge electrode must be insulated from the first sensing pattern of the sensing patterns, an insulating layer is formed for this purpose.

The insulating layer intervenes between the sensing pattern and the bridge electrode to insulate the first sensing pattern from the second sensing pattern.

The present invention also provides a film touch sensor including the touch sensor.

The film touch sensor of the present invention may include a separation layer and a touch sensor formed on the separation layer.

The separating layer according to the present invention is a layer formed for peeling from a carrier substrate in a manufacturing process of a film touch sensor, and the material of the separating layer according to the present invention is not particularly limited. For example, a polyimide- A polymer, a polyvinyl alcohol polymer, a polyamic acid polymer, a polyamide polymer, a polyethylene polymer, a polystylene polymer, a polynorbornene polymer, Based polymer, a phenylmaleimide copolymer-based polymer, a polyazobenzene-based polymer, a polyphenylenephthalamide-based polymer, a polyester-based polymer, a polymethylmethacrylate-based polymer, methacrylate-based polymers, polyarylate-based polymers, cinnamate-based polymers, coumarin-based polymers, De limiter Dean (phthalimidine) based polymers, can be made of a polymer such as chalcone (chalcone) based polymers, aromatic acetylene-based polymer, these may be used alone or in mixture of two or more.

The separating force of the separating layer according to the present invention is not particularly limited, but may be, for example, 0.01 to 1 N / 25 mm, preferably 0.01 to 0.2 N / 25 mm. When the above-mentioned range is satisfied, the film can be easily peeled off without residue from the carrier substrate upon formation of the touch sensor, and curl and cracks due to the tensile force generated during peeling can be reduced.

The thickness of the separation layer according to the present invention is not particularly limited, but may be, for example, 10 to 1,000 nm, preferably 50 to 500 nm. When the above-mentioned range is satisfied, it is preferable that the peeling force is stable and a uniform pattern can be formed.

The film touch sensor of the present invention may further include a protective layer between the touch sensor and the separation layer.

Like the separation layer, the protection layer protects the transparent electrode by covering the transparent electrode, and prevents the separation layer from being exposed to the etchant for forming the transparent electrode during the manufacturing process of the film touch sensor of the present invention.

As the protective layer, a polymer known in the art may be used without limitation, for example, an organic insulating layer, and may be formed of a curable composition including a polyol and a melamine curing agent. However, no.

Specific examples of the polyol include polyether glycol derivatives, polyester glycol derivatives, and polycaprolactone glycol derivatives, but the present invention is not limited thereto.

Specific examples of the melamine curing agent include, but are not limited to, a methoxymethylmelamine derivative, a methylmelamine derivative, a butylmelamine derivative, an isobutoxymelamine derivative, and a butoxy melamine derivative.

According to another embodiment of the present invention, the protective layer may be formed of an organic-inorganic hybrid curable composition, and when an organic compound and an inorganic compound are used at the same time, it is preferable that cracks generated during peeling can be reduced.

As the organic compound, the above-described components can be used. Examples of the inorganic substance include silica-based nanoparticles, silicon-based nanoparticles, glass nanofibers, and the like, but are not limited thereto.

In order to ensure flexibility, the film touch sensor according to the present invention forms a separation layer by applying a composition for forming a separation layer on a carrier substrate, forms a touch sensor having the transparent electrode described above on the separation layer, And removing the carrier substrate.

Hereinafter, the above steps will be described in detail.

First, a separation layer is formed on the carrier substrate by applying a composition for forming a separation layer satisfying the above-described components and physical properties after curing.

The method for applying the composition for forming a separation layer is not particularly limited as long as it is a conventional method applied in the art. For example, a coating method using a slit nozzle such as a spray coating method, a roll coating method, a discharge nozzle coating method, A spin coating method such as a center drop spin method, an extrusion coating method, a bar coating method, and the like, and two or more coating methods can be combined and coated. Further, a drying process can be performed after coating, Baking), or drying under reduced pressure to volatilize the solvent or the like. The heating temperature may typically be 80 to 250 ° C.

The carrier substrate serves as a substrate for forming a separation layer on the upper surface. The upper surface of the carrier substrate is flat, so that the separation layer can be uniformly formed. In addition, the carrier substrate can stably carry out the lamination process of the layers formed on the separation layer A glass substrate, a plastic substrate, or the like can be used.

Then, a touch sensor having the transparent electrode described above can be formed on the isolation layer. The method of forming the first metal oxide layer, the metal layer or the second metal oxide layer of the present invention is not particularly limited, and various thin films such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) May be formed by a deposition technique. For example, it can be formed by reactive sputtering, which is an example of physical vapor deposition.

The method of forming the mesh pattern included in the transparent electrode of the present invention is not particularly limited and may be formed by, for example, photolithography.

The method for forming the mesh pattern including the first metal oxide layer, the metal layer and the second metal oxide layer according to the present invention is not particularly limited. For example, the first metal oxide layer, the metal layer and the second metal oxide layer may be sequentially And then the layers may be simultaneously etched by photolithography or etched by layers.

Next, a step of peeling the upper laminate including the separation layer and the transparent electrode from the carrier substrate is performed.

The film touch sensor of the present invention can have significantly improved visibility, excellent bending property, and low sheet resistance.

The present invention also provides an image display apparatus including the touch sensor or the film touch sensor.

The touch sensor or the film touch sensor of the present invention is applicable not only to a general liquid crystal display but also to various image display devices such as an electroluminescence display, a plasma display, and a field emission display.

The above-mentioned transparent electrode has remarkably improved visibility, has excellent bending property and low surface resistance, and therefore can be preferably applied to a flexible image display device.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to be illustrative of the present invention, and not to limit the scope of the claims. It will be apparent to those skilled in the art that various changes and modifications can be made to the examples, and it is obvious that such variations and modifications fall within the scope of the appended claims.

Example  And Comparative Example

Example  1. Manufacture of transparent electrode

A transparent electrode was prepared to evaluate optical characteristics, electrical characteristics and bending properties of the transparent electrode of the present invention. The first metal oxide layer and the second metal oxide layer were made of indium zinc oxide (IZO), the metal layer was a silver-palladium-copper (APC) alloy, and the first metal oxide layer, the metal layer, Was sequentially laminated on the cyclic olefin polymer (COP) by sputtering, and then simultaneously etched by photolithography to form a mesh pattern having a line width of 3 탆. The thickness of each layer was 30 nm for the first metal oxide layer, 10 nm for the metal layer, and 30 nm for the second metal oxide layer.

Example  2 to 12 and Comparative Example  1 to 5

The transparent electrodes of Examples 2 to 12 and Comparative Examples 1 to 5 were produced in the same manner as in Example 1 except that the materials of the respective layers were the same, except that the material, line width, and thickness were different according to the following Table 1.

division The first metal oxide layer Metal layer The second metal oxide layer Mesh pattern
Line width (탆) Mesh pattern
Reflectance (550 nm)
(%) Material thickness
(nm) Material thickness
(nm) Material thickness
(nm) Example One IZO 30 APC 10 IZO 30 3 7.0 2 IZO 30 APC 10 IZO 30 5 7.0 3 IZO 30 APC 12 IZO 30 3 12.3 4 IZO 30 APC 12 IZO 30 5 12.3 5 IZO 30 APC 15 IZO 30 3 12.8 6 IZO 40 APC 12 IZO 40 3 12.4 7 IZO 40 APC 12 IZO 40 5 12.4 8 IZO 40 APC 15 IZO 40 3 12.8 9 IZO 50 APC 15 IZO 50 3 13.0 10 IZO 20 APC 15 IZO 20 3 18.5 11 IZO 40 APC 17 IZO 40 3 19.8 12 IZO 40 APC 8 IZO 40 3 6.8 13 IZO 40 APC 10 IZO 80 3 8.2 14 IZO 40 APC 10 IZO 100 3 8.6 15 IZO 40 APC 10 IZO 120 3 9 16 IZO 40 APC 10 IZO 140 3 9.3 Comparative Example One IZO 30 APC 10 none - 3 7.0 2 IZO 30 APC 15 none - 3 17.1 3 IZO 40 APC 17 none - 3 21.1 4 IZO 30 APC 4 IZO 30 3 4.8 5 IZO 30 APC 31 IZO 30 3 67.2

Experimental Example  One

1. Reflectometry

The reflectance of the transparent electrode prepared according to Examples and Comparative Examples was measured with a spectroscopic colorimeter (CM-3600A, Konica Minolta) under a wavelength of 550 nm.

2. Transmittance measurement

The transmittance of the transparent electrode prepared according to Examples and Comparative Examples was measured with a spectroscopic colorimeter (CM-3600A, Konica Minolta) under a wavelength of 550 nm.

3. Sheet resistance  Measure

The sheet resistances of the transparent electrodes prepared according to Examples and Comparative Examples were measured with a sheet resistance meter (RG-80, Napson).

4. Color difference value  Measure

The color difference values of the transparent electrodes prepared according to Examples and Comparative Examples were measured with a spectroscopic colorimeter (CM-3600A, Konica Minolta) under a wavelength of 550 nm.

5. Hayes  Measure

The haze of the transparent electrode prepared according to Examples and Comparative Examples was measured by a hazemeter (HM-150, Murasaki).

6. Adhesion measurement

The adhesion of the transparent electrode prepared according to Examples and Comparative Examples was measured according to ASTM D3359, and the evaluation criteria are as follows.

5B: No peeling

4B: Less than 5% exfoliation

3B: peeling from 5% or more to less than 15%

2B: peeling from 15% or more to less than 35%

1B: peeling from 35% or more to less than 65%

0B: peeling of 65% or more

division reflectivity
(550 nm) (%) Transmittance
(550 nm) (%) Sheet resistance
(Ω / sq) b * Haze
(%) Adhesion
(B) Example One 7.0 89.3 10.2 1.2 0.9 5 2 7.0 88.7 10.2 1.3 0.9 5 3 12.3 88.0 5.7 -1.6 0.5 5 4 12.3 87.3 5.7 -2.0 0.5 5 5 12.8 84.7 5.1 -2.5 0.7 5 6 12.4 88.3 4.9 -1.6 0.6 5 7 12.4 87.5 4.9 -2.0 0.6 5 8 12.8 84.8 4.5 -2.3 0.8 5 9 13.0 84.5 4.4 -2.5 1.0 5 10 18.5 83.8 5.0 -2.1 1.0 5 11 19.8 82.5 4.0 -2.2 1.1 5 12 6.8 89.1 16.8 -1.5 0.5 5 13 8.2 88.7 9 One 0.7 5 14 8.6 88.1 8.6 0.9 0.7 5 15 9 87.8 8.3 0.9 0.8 5 16 9.3 87.3 8 0.8 0.9 5 Comparative Example One 7.0 88.3 10.0 0.6 0.8 0 2 17.1 84.0 6.0 0.8 1.1 0 3 21.1 80.5 5.4 -2.0 1.6 3 4 4.8 89.3 72.0 -1.5 0.5 5 5 67.2 61.9 1.2 -3.3 2.8 5

Referring to Experimental Examples, the reflectance and adhesion of Comparative Examples are inferior, while the reflectivity, transmittance, b *, sheet resistance, haze, and adhesion are excellent in Examples.

In the case of Comparative Examples 1 and 2, the transparent electrode was not visually observed, but the adhesion was remarkably lowered than in the Example. In Comparative Example 3, not only the adhesiveness was remarkably lowered but also the transparent electrode was visually observed.

In Comparative Example 4, the transparent electrode was not visually recognized, but the sheet resistance was too high to be used as an electrode. In Comparative Example 5, the transparent electrode was easily visually observed.

Experimental Example  2: Measurement of bending properties

Folding tests were performed on the transparent electrodes prepared by the examples and the comparative examples as many times as shown in the following Table 3 in the direction of 180 占 with a radius of curvature (R) = 2 mm as shown in Fig. 3 , And line resistance (k?) After bending were measured. The results are shown in Table 3 below.

Number of bends 1 * 10 ² times 5 * 10 ² times 1 * 10 ³ times 2 * 10 ³ times 5 * 10 ³ times 1 * 10 ⁴ times 5 * 10 ⁴ times 1 * 10 ⁵ times 2 * 10 ⁵ times 6 * 10 ⁵ times Example One 387.9 387.9 387.9 387.8 387.9 387.9 387.9 387.9 387.8 387.8 2 186.6 186.6 186.6 186.6 186.6 186.6 186.6 186.6 186.6 186.6 3 216.8 216.8 216.8 216.7 216.8 216.8 216.8 216.8 216.7 216.7 4 104.3 104.3 104.3 104.3 104.3 104.3 104.3 104.3 104.3 104.3 5 194.0 194.0 194.0 193.9 194.0 194.0 194.0 194.0 193.9 193.9 6 186.3 186.3 186.3 186.3 186.3 186.3 186.3 186.3 186.3 186.3 7 89.6 89.6 89.6 89.6 89.6 89.6 89.6 89.6 89.6 89.6 8 171.1 171.1 171.1 171.1 171.1 171.1 171.1 171.1 171.1 171.1 9 167.3 167.3 167.3 167.3 167.3 167.3 167.3 167.3 167.3 167.3 10 190.1 190.1 190.1 190.1 190.1 190.1 190.1 190.1 190.1 190.1 11 152.1 152.1 152.1 152.1 152.1 152.1 152.1 152.1 152.1 152.1 12 638.9 638.9 638.9 638.7 638.9 638.9 638.9 638.9 638.7 638.7 13 342.3 342.3 342.3 342.2 342.3 342.3 342.3 342.3 342.2 342.2 14 327.1 327.1 327.1 327.0 327.1 327.1 327.1 327.1 327.0 327.0 15 315.6 315.6 315.6 315.6 315.6 315.6 315.6 315.6 315.6 315.6 16 304.2 304.2 304.2 304.2 304.2 304.2 304.2 304.2 304.2 358.9 Comparative Example One 380.3 380.3 380.3 380.2 380.3 380.3 380.3 532.41 - - 2 228.2 228.2 228.2 228.1 228.2 228.2 228.2 387.90 - - 3 205.4 205.4 205.4 205.3 205.4 205.4 205.4 369.65 - - 4 2,738.1 2,738.2 2,738.1 2,737.4 2,738.1 2,738.1 2,738.2 2738.1 2738.3 2738.1 5 45.6 45.6 45.6 45.6 45.6 45.6 78.49 - - -

Referring to Table 3, it can be seen that the line resistance of the transparent electrode according to the present invention does not change at the time of bending even if the radius of curvature reaches 2 mm.

However, in Comparative Examples 1 to 3 and Comparative Example 5, it was confirmed that the line resistance increased sharply at 100,000 times and 50,000 times, respectively. In Comparative Example 4, the line resistance was not changed, As shown in FIG.

Accordingly, the transparent electrode of the present invention is excellent in flexibility and can be used for a flexible display.

100: substrate 200: mesh pattern
210: first metal oxide layer 220: metal layer
230: second metal oxide layer

Claims (23)

Including a mesh pattern,
Wherein the mesh pattern comprises a first metal oxide layer, a metal layer and a second metal oxide layer which are sequentially stacked,
And a reflectance at a wavelength of 550 nm is 5 to 20%.
The transparent electrode according to claim 1, wherein the reflectance at the 550 nm wavelength is 5 to 13%.
The method of claim 1, wherein the refractive indexes of the first metal oxide layer and the second metal oxide layer at a wavelength of 550 nm are independently from 1.7 to 2.2, the refractive index of the metal layer at a wavelength of 550 nm is 0.1 to 1.0, To 7.0.
The transparent electrode according to claim 1, wherein the thicknesses of the first metal oxide layer and the second metal oxide layer are independently 5 to 140 nm and the thickness of the metal layer is 5 to 30 nm.
The transparent electrode according to claim 1, wherein the thicknesses of the first metal oxide layer and the second metal oxide layer are independently 30 to 50 nm and the thickness of the metal layer is 8 to 15 nm.
The transparent electrode according to claim 1, wherein the line width of the mesh pattern is 1 to 7 占 퐉.
The method of claim 1, wherein the first metal oxide layer and the second metal oxide layer are each independently selected from indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO) Wherein the transparent electrode comprises at least one selected from the group consisting of tin zinc oxide (ITZO), zinc tin oxide (ZTO), indium gallium oxide (IGO), tin oxide (SnO ₂ ) and zinc oxide (ZnO).
The transparent electrode of claim 1, wherein the first metal oxide layer and the second metal oxide layer each independently comprise at least one selected from the group consisting of indium tin oxide (ITO) and indium zinc oxide (IZO).
[4] The method of claim 1, wherein the metal layer comprises at least one of silver, gold, copper, aluminum, platinum, palladium, chromium, titanium, tungsten, niobium, tantalum, vanadium, calcium, iron, manganese, cobalt, nickel, Wherein the transparent electrode comprises at least one selected from the group consisting of:
The transparent electrode according to claim 1, wherein the metal layer comprises at least one selected from the group consisting of silver, gold, copper, palladium, aluminum, and two or more alloys thereof.
The transparent electrode according to claim 1, wherein the transparent electrode has a haze of -1 to + 1%.
The transparent electrode according to claim 1, wherein the color difference value b ^* of the transparent electrode is -4 to +4.
The transparent electrode according to claim 1, wherein the transparent electrode has no change in line resistance when it is folded in a direction of 180 degrees from a radius of curvature of 1 mm or more.
A touch sensor comprising the transparent electrode according to any one of claims 1 to 13.
[14] The method of claim 13, wherein the transparent electrode is formed of at least one selected from the group consisting of a cyclic olefin polymer (COP), a polyethylene terephthalate (PET), a polyacrylate (PAR), a polyetherimide (PEI), a polyethylene naphthalate (PEN), a polyphenylene sulfide ), Polyallylate, polyimide (PI), cellulose acetate propionate (CAP), polyethersulfone (PES), cellulose triacetate (TAC), polycarbonate (PC), cyclic olefin copolymer ), Polymethylmethacrylate (PMMA), and the like.
15. The touch sensor of claim 14, wherein the transparent electrode is provided on a substrate comprising an annular olefin polymer (COP).
15. The touch sensor of claim 14, comprising a plurality of spaced apart sensing patterns, wherein the sensing patterns are disposed on the same surface and are formed of the transparent electrodes.
The touch sensor of claim 17, further comprising a bridge electrode connecting a first sensing pattern formed in a first direction, a second sensing pattern formed in a second direction, and a unit pattern spaced apart from the second sensing pattern.
The touch sensor according to claim 17, wherein the touch sensor is formed in a self-capping manner.
A separation layer; And a touch sensor according to claim 17 formed on the separation layer.
21. The film touch sensor of claim 20, further comprising a protective layer between the touch sensor and the separating layer.
An image display apparatus comprising the touch sensor of claim 14.
An image display apparatus comprising the film touch sensor of claim 20.

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