KR20130057946A - Lens unit and laser processing apparatus - Google Patents

Abstract

PURPOSE: A laser processing apparatus and a lens unit are provided to absorb laser beams in a moment, and to precisely measure temperature changes in an optical lens even when a temperature rapidly increases. CONSTITUTION: A laser processing apparatus and a lens unit comprise optical lenses(11a,11b), a lens barrel(13), and temperature detectors(14a,14b,14c,14d). The lens barrel maintains the position of the optical lens. The temperature detectors are placed in laser beam irradiated and non-irradiated areas.

Description

[0001] LENS UNIT AND LASER PROCESSING APPARATUS [0002]

The present invention relates to a lens unit for vertically projecting a laser beam onto an object to be processed and a laser processing apparatus using the lens unit.

A laser processing apparatus using a galvanometer scanner has heretofore been used as a laser engraving machine or a laser engraving machine, and is generally known as a laser marker, and is widely known.

In recent years, this laser processing apparatus has been used in a boring process such as a multilayer printed circuit board and a precision electronic part as a fine, high-speed flexible processing method replacing a conventional drilling method.

In recent years, along with improvement in miniaturization and integration of semiconductors, high precision of electronic circuits and electronic components has become remarkable. Such a high precision electronic circuit or a laser processing apparatus used for processing electronic components is required to have processing position accuracy in the order of micrometers which can not be achieved with a conventional laser marker or the like.

A laser machining apparatus that responds to the demand for machining accuracy of such ultra-high precision is provided with a galvanometer mirror temperature detecting means, a lens temperature detecting means, and a deflection displacement operation of a galvanometer mirror, which operates on the basis of temperature signals from these temperature detecting means There is proposed a laser processing apparatus having a position control means.

Such a laser machining apparatus is capable of changing the temperature around the installation environment, the temperature change due to the heat generation of the optical component accompanied by the absorption of the high energy laser beam, or the temperature change at the unit or component level constituting the laser processing apparatus, It is possible to correct the machining position deviation by the temperature change of the laser machining apparatus (for example, refer to Patent Document 1).

Patent No. 4320524 (pages 4-5, Fig. 1)

In the conventional laser machining apparatus disclosed in Patent Document 1, the temperature of the f? Lens as the lens unit is detected by the temperature detector attached to the side surface of the lens unit.

In general, the f? Lens includes a lens barrel holding an optical lens and an optical lens. Therefore, in the conventional laser processing apparatus, the temperature detector is provided on the side surface of the f? Lens. This means that the temperature detector is provided on the side surface of the lens barrel will be.

In the conventional laser processing apparatus, the temperature is measured by a temperature detector provided on the lens barrel side of the f? Lens serving as a lens unit. Therefore, when the optical lens instantaneously absorbs a high-energy laser beam (for example, in units of millisecond accuracy) and a temperature rise momentarily occurs, since the temperature measurement point is far from the laser beam irradiation area and the heat capacity of the lens barrel is large , There is a problem that the temperature change can not be precisely measured and the deviation of the machining position can not be corrected.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-described problems. It is a first object of the present invention to provide an optical lens which absorbs a laser beam of high energy instantaneously, Is obtained with a temperature detector with high accuracy.

A second object of the present invention is to provide a laser processing apparatus capable of precisely correcting a deviation of a processing position generated by an optical lens forming an f &thetas; .

In the lens unit according to the present invention,

A lens unit for converging and irradiating a laser beam onto an object,

An optical lens,

A lens barrel holding the optical lens,

A plurality of temperature detectors are provided,

The plurality of temperature detectors are provided in the laser beam non-irradiated portion between the laser beam irradiated region of the optical lens and the outer circumference of the optical lens, and obtain the average temperature of the optical lens, or the average temperature of the optical lens and the temperature distribution in the surface The temperature signal is measured.

In the laser processing apparatus according to the present invention,

A laser oscillator,

A galvanometer mirror for deflecting the laser beam output from the laser oscillator,

A galvanometer scanner for driving a galvanometer mirror,

An optical lens, a lens barrel holding the optical lens, and a laser beam irradiating region provided between the laser beam irradiating region of the optical lens and the outer periphery of the optical lens, wherein the average temperature of the optical lens, A lens unit which has a plurality of temperature detectors for measuring a temperature signal for obtaining a temperature distribution in a plane and which focuses the laser beam deflected by the galvanometer mirror toward the object,

An XY table on which an object is mounted and which moves in a horizontal plane,

A galvano driver for driving the galvano scanner,

A laser oscillator, a galvanometer driver, and a control device for controlling the XY table,

And a signal line for connecting the temperature detector to the control device,

The controller obtains an average value of the rising temperature of the optical lens or an average value of the rising temperature of the optical lens and a temperature distribution in the plane from the temperature signal measured by the plurality of temperature detectors, The point position is corrected.

Since the lens unit according to the present invention is constructed as described above, the average temperature of the optical lens due to the instantaneous absorption of the high energy laser beam can be measured with high precision.

Since the laser machining apparatus according to the present invention is constructed as described above, it is possible to correct the positional deviation of the laser beam condensing point even in processing at a high energy laser output, and high precision laser machining is possible.

Fig. 1 is an overall configuration diagram of a laser machining apparatus according to a first embodiment of the present invention,
Fig. 2 is a side sectional schematic view of a lens unit used in the f? Lens of the laser machining apparatus according to the first embodiment of the present invention, a schematic top view of the side on which the laser beam is incident,
3 is a side sectional schematic view of a lens unit used in an f? Lens of a laser machining apparatus according to Embodiment 2 of the present invention, a schematic top view of a side on which a laser beam is incident,
4 is a schematic sectional side view of the lens unit used in the f? Lens of the laser machining apparatus according to the third embodiment of the present invention,
5 is a schematic cross-sectional side view of a lens unit used in an f? Lens of a laser machining apparatus according to a fourth embodiment of the present invention and an AA cross-sectional view in this side sectional schematic view.

(Example 1)

Fig. 1 is an overall configuration diagram of a laser machining apparatus according to a first embodiment of the present invention.

1, the laser machining apparatus 100 of the present embodiment includes a laser oscillator 1, a first galvanometer mirror 3a, a second galvanometer mirror 3b, a first galvanometer scanner 3b, An XY table 7, a galvanometer driver 8, and a control device 9, which are constituted by a first galvanometer scanner 4a, a second galvanometer scanner 4b, a lens unit, have.

The first galvanometer mirror 3a deflects the laser beam 2 outputted in the horizontal direction from the laser oscillator 1 in a horizontal plane.

The second galvanometer mirror 3b deflects the laser beam 2 deflected by the first galvanometer mirror 3a also in the vertical plane.

The first galvanometer scanner 4a drives the first galvanometer mirror 3a and the second galvanometer scanner 4b drives the second galvanometer mirror 3b.

The f? lens 5 is a laser beam 2 deflected by the second galvanometer mirror 3b and is incident on an object (also referred to as a work) 6 on which the incident laser beam 2 is machined In the vertical direction.

The XY table 7 mounts the work 6 and moves in a horizontal plane.

The Galvano driver 8 drives the first and second galvanometer scanners 4a and 4b.

The controller 9 controls the laser oscillator 1, the galvanometer driver 8, and the XY table 7.

1, the arrow X indicates one moving direction in the horizontal plane of the XY table 7, and the arrow Y indicates the other moving direction perpendicular to the X direction in the horizontal plane of the XY table 7 Respectively. The directions X and Y are also the machining directions of the work 6.

2) is provided in the f? Lens 5 and the temperature detector 14 and the control device 9 are connected to the signal line 10 (see FIG. 2) Respectively. The controller 9 controls the first and second galvanometer scanners 4a and 4b by controlling the galvanometer driver 8 based on the temperature signal input from the temperature detector 14. [

Thereafter, the first and second galvanometer mirrors 3a and 3b, the first and second galvanometer scanners 4a and 4b, and the galvano driver 8 are collectively referred to as a galvanometer mechanism.

2 (a) is a schematic sectional side view of the lens unit used in the f? Lens 5 of the laser machining apparatus according to the first embodiment of the present invention, and Fig. 2 (b) Fig. 7 is a schematic top view of the lens unit. Fig.

2 (a), the lens unit 20 used in the f? Lens 5 of the present embodiment includes a first optical lens 11a and a second optical lens 11b, a protection window 12, A barrel 13, and two temperature detectors 14. The temperature detector 14 is a temperature sensor.

The first optical lens 11a and the second optical lens 11b are arranged in two stages at predetermined intervals.

The protective window 12 has a configuration in which the laser beam 2 can be transmitted. The second optical lens 11b is disposed at a predetermined interval to protect the optical lenses 11a and 11b.

The lens barrel 13 holds the first and second optical lenses 11a and 11b and the protection window 12.

The two temperature detectors 14 are provided on the surface of the first optical lens 11a on the side where the laser beam 2 is incident.

As shown in Fig. 2 (b), the temperature detector 14 is provided at each of both ends of the string passing the center point (the center of the circle on the surface) of the first optical lens 11a.

Refers to a string that passes through the center point of the optical lens and the term " both ends of string " refers to a portion of the laser beam non-irradiated portion 16 that is located near both ends of the strings Indicates the area to be located.

Thereafter, the first optical lens 11a, the second optical lens 11b, and the entire protective window 12 are collectively referred to as an optical system component group.

The first optical lens 11a and the second optical lens 11b are collectively referred to as an optical lens.

In the lens unit 20 of the present embodiment, the laser beam 2 on the lower side in Fig. 2 (a) is irradiated from the side on which the laser beam 2 on the upper side in Fig. The first optical lens 11a, the second optical lens 11b, and the protection window 12 are arranged in this order toward the exit side.

That is, the first optical lens 11a is disposed in the laser beam incidence portion, and the protection window 12 is disposed in the laser beam emergence portion.

Normally, in a laser machining apparatus, a range in which a work is machined by deflecting two galvano mirrors is a square. Therefore, a region irradiated with a laser beam on the surface of the optical lens of the f? Lens is a square or a rectangle.

When the lens unit 20 of this embodiment is used as an f? Lens, the two temperature detectors 14 are arranged so that the laser beams 20a and 20b, which are square or rectangular, of the first optical lens 11a, The irradiation area 15 and the laser beam non-irradiated part 16 between the circular outer circumference of the first optical lens 11a.

Specifically, in each of the laser beam non-irradiated portions 16 located at both ends of a string orthogonal to two opposing sides of one side of the laser beam irradiation region 15 in the first optical lens 11a, A temperature detector 14 is disposed.

Alternatively, in each of the laser beam non-irradiated portions 16 located at both ends of a string orthogonal to the other two opposing sides of the laser beam irradiation region 15 in the first optical lens 11a, A detector 14 is disposed.

The direction orthogonal to the two opposing sides of one of the laser beam irradiation regions 15 coincides with the direction of deflecting the second galvanometer mirror 3b and the other side of the laser beam irradiation region 15 The direction orthogonal to the two opposing sides coincides with the direction in which the first galvano mirror 3a is deflected.

The first and second optical lenses 11a and 11b in the lens unit 20 of the present embodiment are lenses having a sectional plane aspheric surface and a plane surface in cross section but may be lenses of both surfaces aspherical surfaces or lenses of both surfaces, Either a convex surface lens or a concave surface lens may be used.

In the lens unit 20 of the present embodiment, two optical lenses are used, but may be one optical lens, three or more optical lenses, and may be arranged in multiple stages at predetermined intervals.

Further, both sides of the protection window 12 are flat.

Although the lens barrel 13 is formed of one member, it may be formed by combining a plurality of members.

The lens unit 20 of the present embodiment is arranged such that the laser beam non-irradiated portion 16 of the first optical lens 11a having a thermal capacity smaller than that of the barrel 13 is used as the f? Lens of the laser processing apparatus, (14). Because of this, because of the proximity of the laser beam non-irradiated portion 16 to the laser beam irradiated region 15, due to the momentary absorption (for example, in units of msec) of the high energy laser beam 2, Even when the temperature of the first optical lens 11a rises momentarily, the temperature of the first optical lens 11a can be accurately measured as the temperature signal.

Further, since two temperature detectors 14 are used, a temperature signal for obtaining the average temperature of the first optical lens 11a whose temperature rises can be measured.

Two temperature detectors 14 are used to measure the temperature signal for obtaining the average temperature of the first optical lens 11a but two or more temperature detectors 14 may be used as the first optical lens Irradiated portion 16 of the laser beam non-irradiated portion 11a.

The laser machining apparatus 100 of this embodiment uses the lens unit 20 in the f? Lens 5 and the first optical lens 11a of the f? Lens 5 is a high energy laser beam The temperature of the first optical lens 11a in the case where the temperature is increased due to the instantaneous absorption (for example, in units of msec precision) of the first optical lens 11a is measured by the two temperature detectors 14 provided in the first optical lens 11a . Then, the temperatures measured by the two temperature detectors 14 are input to the controller 9 as temperature signals.

The controller 9 then obtains an average value of the temperature difference (hereinafter referred to as rising temperature) before and after the temperature rise of the first optical lens 11a, based on the temperature signal inputted from the two temperature detectors 14 .

The control device 9 also controls the first and second galvanometer scanners 4a and 4b by controlling the galvanometer driver 8 based on the average value of the rising temperatures of the optical lens 11a.

That is, in the laser machining apparatus 100 of the present embodiment, the processing position of the work 6 of the laser beam 2 due to the change in refractive index caused by the temperature rise of the optical system component group by the laser beam 2 Light-converging point position) is typically measured by controlling the first and second galvanometer scanners 4a and 4b based on the average temperature of the first optical lens 11a .

A description will be given of a specific method for correcting the deviation of the position of the condensing point of the laser beam 2 accompanied by the temperature rise of the optical system component group in the f? Lens 5 in the laser machining apparatus 100 of this embodiment.

First, as initial data, the X direction of each processing point of the workpiece | work 6 calculated | required from the shift | offset | difference of the condensing point position of the laser beam 2 which arises when the average value of the rising temperature of the 1st optical lens 11a is (DELTA) ta. The correction amount data ΔX (X, Y, Δta) and the correction amount data ΔY (X, Y, Δta) in the Y direction are held in the control device 9.

Next, the temperature of the first optical lens 11a at the time of laser processing the work 6 with the laser processing apparatus 100 is measured as temperature data with two temperature detectors 14, Is inputted to the control device 9 to obtain the average value? Ta of the rising temperature.

Next, the correction amount data ΔX (X, Y, ΔTa) in the X direction and the correction amount data in the Y direction using the correction amount data of the machining point of the work 6 held in advance in the control device 9 in the case of Δta = ΔTa. ΔY (X, Y, ΔTa) is calculated.

Next, the position Xs in the X direction of the light-converging point of the position-shifted laser beam 2 before correction is corrected to the correction amount data X (X, Y, Ta) in the X direction, Direction is Xr represented by the following expression (1).

At the same time, the Y-direction position Ys of the light-converging point of the position-deviated laser beam 2 before correction is corrected to the Y-direction correction amount data? Y (X, Y,? Ta) Direction is Yr represented by the following expression (2).

That is, the first and second galvanometer scanners 4a and 4b are controlled so that the position of the light-converging point of the laser beam 2 in the X direction is Xr and the position in the Y direction is Yr, Of the light-converging point.

That is, the correction of the deviation of the light-converging point position of the laser beam 2 is performed by controlling and correcting the operation of the galvanometer mechanism.

Actually, the target position corrected by the correction amount data is outputted from the controller 9 to the galvanometer driver 8 so that the positional deviation predicted from the temperature data is added to the desired position, To the first and second galvanometer scanners 4a and 4b.

The laser machining apparatus 100 of this embodiment can correct the deviation of the position of the light-converging point of the laser beam 2 even if the laser beam is machined with a high energy laser output, Do.

In the present embodiment, the control device 9 may control the XY table 7 based on the temperature signal input from the temperature detector 14.

In this embodiment, the number of the temperature detectors 14 provided in the laser beam non-irradiated portion 16 of the first optical lens 11a is two or more, and the temperature signal from the plurality of temperature detectors 14 The control device 9 may correct the first and second galvanometer scanners 4a and 4b by controlling the first and second galvanometer scanners 4a and 4b based on the average value of the rising temperatures obtained by inputting them to the control device 9. [

Although the first and second galvanometer mirrors 3a and 3b are used as the mechanism for deflecting the laser beam 2 in this embodiment, the present invention is not limited to this, as long as it is a mechanism for deflecting the laser beam 2 .

(Example 2)

Fig. 3 (a) is a side sectional schematic view of a lens unit used in an f? Lens of a laser machining apparatus according to Embodiment 2 of the present invention, and Fig. 3 (b) is a schematic top view of a lens unit b).

3, in the lens unit 30 used in the f? Lens of this embodiment, four temperature detectors are provided on the surface of the first optical lens 11a on the side where the laser beam 2 is incident Except for this point, it is the same as the lens unit 20 of the first embodiment.

3 (b), the first, second, third, and fourth temperature detectors 14a, 14b, 14c, and 14d are arranged so that two And is provided at each of both ends of the string.

When the lens unit 30 of this embodiment is used as an f? Lens, as shown in Fig. 3 (b), the four temperature detectors are arranged in a rectangular or rectangular laser beam irradiation area 15 of the first optical lens 11a, And the laser beam non-irradiated portion 16 between the circular outer circumference of the first optical lens 11a.

For example, in the first optical lens 11a, the first temperature detector 14a is provided in the laser beam non-irradiated portion 16 at a position corresponding to 12 o'clock on the dial of the watch.

The second temperature detector 14b is provided in the laser beam non-irradiated portion 16 at a position corresponding to 6 o'clock on the dial of the watch.

The third temperature detector 14c is provided in the laser beam non-irradiated portion 16 at a position corresponding to 9 o'clock on the dial of the watch.

The fourth temperature detector 14d is provided in the laser beam non-irradiated portion 16 at a position corresponding to 3 o'clock on the dial of the watch.

That is, the lens unit 30 of the present embodiment includes a string (referred to as D1) passing through the first temperature detector 14a and the second temperature detector 14b, a third temperature detector 14c and a fourth temperature detector (Referred to as D2) passing through the first optical lens 11a are orthogonal to each other.

The direction parallel to D1 coincides with the direction for deflecting the first galvano mirror 3a, and the direction parallel to D2 coincides with the direction for deflecting the second galvano mirror 3b.

The lens unit 30 of the present embodiment is also used for the laser beam non-irradiated portion 16 of the first optical lens 11a whose thermal capacity is smaller than that of the barrel 13 when used as the f? Second, third and fourth temperature detectors 14a, 14b, 14c and 14d are arranged. Because of this, since the laser beam non-irradiated portion 16 is close to the laser beam irradiated region 15, due to the instantaneous absorption (for example, in units of msec) of the high energy laser beam 2, The temperature of the first optical lens 11a can be precisely measured as the temperature signal even when the temperature of the first optical lens 11a rises instantaneously.

Particularly, since the four temperature detectors are provided in the laser beam non-irradiated portion 16 of the first optical lens 11a, the difference in the average value of the rising temperatures of the first optical lens 11a obtained by the controller 9 The measurement accuracy of the rising temperature can be further improved.

The lens unit 30 of the present embodiment has the first temperature detector 14a and the second temperature detector 14b at both ends of the one sagittal D1 at two orthogonal strings of the first optical lens 11a, And the third temperature detector 14c and the fourth temperature detector 14d are disposed at both ends of the other detector D2.

Therefore, the temperature distribution in the direction D1 can be obtained from the temperature signal of the first temperature detector 14a and the temperature signal of the second temperature detector 14b due to the temperature rise of the first optical lens 11a. The temperature distribution in the direction D2 can be obtained from the temperature signal of the third temperature detector 14c and the temperature signal of the fourth temperature detector 14d.

The laser machining apparatus of this embodiment is the same as the laser machining apparatus of the first embodiment except that the lens unit 30 is used as the f? Lens 5.

The laser machining apparatus of this embodiment uses the lens unit 30 as the f? Lens 5 and the first optical lens 11a of the f? Lens 5 instantaneously absorbs the laser beam 2 of high energy Second, third, and fourth temperature detectors 14a, 14b, 14c, and 14d when the temperature of the first optical lens 11a is increased. These temperatures are input to the controller 9 as temperature signals.

In the laser machining apparatus according to the present embodiment, the control device 9 calculates the temperature of each of the first, second, third, and fourth temperature detectors 14a, 14b, 14c, and 14d, The average value of the rising temperature of the first optical lens 11a is obtained.

The control device 9 obtains the temperature distribution in the direction D1 of the first optical lens 11a from the input temperature signal of the first temperature detector 14a and the temperature signal of the second temperature detector 14b. The temperature distribution in the D2 direction of the first optical lens 11a is obtained from the inputted temperature signal of the third temperature detector 14c and the temperature signal of the fourth temperature detector 14d.

In the laser machining apparatus of the present embodiment, the deviation of the position of the light-converging point of the laser beam 2 due to the change in the refractive index of the optical system component group caused by the temperature rise by the laser beam 2 is detected by the first optical lens 11a ) Is typically obtained. Then, based on this data, the first and second galvanometer scanners 4a and 4b are controlled to perform correction.

In the laser machining apparatus of the present embodiment, the direction of D1 in the first optical lens 11a of the f? Lens 5 coincides with the X direction of the work 6, Y direction.

Thereby, the laser beam 2 is irradiated with the laser beam 2, which is caused by a temperature distribution in the same direction as the X direction of the work 6 and a refractive index change accompanying the temperature distribution in the Y direction of the work, The deviation of the light-converging point position of the first optical lens 11 is obtained by obtaining the temperature distribution data in the direction D1 and the temperature distribution data in the direction D2 of the first optical lens 11a, It can be corrected by controlling the scanners 4a and 4b.

The laser machining apparatus of this embodiment will explain a specific method for correcting the deviation of the position of the light-converging point of the laser beam 2 accompanying the temperature rise of the optical system component group of the f? Lens 5.

First, as the initial data, the correction amount data ΔX in the X direction of each processing point, which is obtained from the deviation of the condensing point position of the laser beam 2 generated when the average value of the rising temperature of the first optical lens 11a is Δta. (X, Y, Δta) and correction amount data ΔY (X, Y, Δta) in the Y direction are held in the control device 9.

Moreover, the correction amount data of the X direction of each processing point of the workpiece | work 6 calculated | required from the shift | offset | difference of the laser beam condensing point position generate | occur | produced in the 1st optical lens 11a by the temperature distribution (DELTA) Tx of D1 direction, ie, X direction. ΔXx (X, Y, Δtx) and correction amount data ΔYx (X, Y, Δtx) in the Y direction are stored in the control device 9.

In addition, the correction amount data ΔXy (X, Y, Δty) in the X direction and the correction amount data in the Y direction of each machining point, which are obtained from the deviation of the laser beam condensing point position generated by the temperature distribution ΔTy in the D2 direction, that is, the Y direction. ΔYy (X, Y, Δty) is held in the control device 9.

Next, the first, second, third and fourth temperature detectors 14a, 14b, 14c and 14d in the first optical lens 11a when the work 6 is laser-processed in the laser processing apparatus, And the temperature data is input to the control device 9 to obtain the average value? Ta of the rising temperature.

The temperature distribution ΔTx in the X direction in the first optical lens 11a is obtained from the measured temperatures in the first temperature detector 14a and the second temperature detector 14b and the third temperature detector 14c and fourth The temperature distribution? Ty in the Y direction in the first optical lens 11a is obtained from the measured temperature in the temperature detector 14d.

Next, the correction amount data ΔX (X, Y, ΔTa) in the X direction and the correction amount data ΔY (X, Y in the Y direction when Δta = ΔTa are used, using the correction amount data of the machining point held in advance in the control device 9. , ΔTa) is calculated.

Further, the amount of correction data ΔXx (X, Y, ΔTx) in the X direction when Δtx = ΔTx and the amount of correction data ΔYx (X, Y, ΔTx) in the Y direction are calculated.

Further, the correction amount data ΔXy (X, Y, ΔTy) in the X direction in the case of Δty = ΔTy and the correction amount data ΔYy (X, Y, ΔTy) in the Y direction are calculated.

Next, the position Xs in the X direction of the position of the laser beam light-converging point deviated from the position of the laser beam before correction is calculated as the correction amount data in the X direction, X (X, Y,? Ta),? Xx (X, Y,? Tx) ), And the position of the laser beam condensing point in the X direction becomes Xr represented by the following expression (3).

At the same time, the Y-direction position Ys of the position-deviated laser beam condensing point before correction is calculated by the Y-direction correction amount data, Y (X, Y,? Ta),? Yx (X, Y,? Tx) ), And the position of the laser beam condensing point in the Y direction becomes Yr represented by the following expression (4).

That is, the first and second galvanometer scanners 4a and 4b are controlled so that the position of the laser beam condensing point in the X direction is Xr and the position in the Y direction is Yr so that the deviation of the laser beam light- do.

That is, the correction of the deviation of the position of the laser beam condensing point is carried out by controlling and correcting the operation of the galvanometer mechanism by the control device 9.

Actually, the target position corrected by the correction amount data is outputted from the controller 9 to the galvanometer driver 8 so that the positional deviation predicted from the temperature data is added to the desired position, To the first and second galvanometer scanners 4a and 4b.

The laser machining apparatus of the present embodiment can correct the deviation of the position of the laser beam condensing point with higher accuracy even in processing at a high-energy laser output, so that laser machining with higher precision can be performed.

Although the control device 9 controls the XY table 7 based on the temperature signals inputted from the first, second, third and fourth temperature detectors 14a, 14b, 14c and 14d in the present embodiment do.

The first, second, third, and fourth temperature detectors 14a, 14b, 14c, and 14d, which are four temperature detectors, are provided in the first optical lens 11a of the lens unit 30, Two temperature detectors in total may be provided at each of the opposite ends of the strings of the first optical lens 11a, that is, one each at a symmetrical position to the center of the first optical lens 11a.

In addition, as long as the temperature distribution in the direction parallel to the direction D1 and the direction parallel to the direction D2 of the optical lens 11a can be measured, four or more temperature detectors may be provided.

Although the first and second galvanometer mirrors 3a and 3b are used as a mechanism for deflecting the laser beam 2, the present invention is not limited thereto as long as it is a mechanism for deflecting the laser beam 2. [

(Example 3)

FIG. 4A is a side sectional schematic view of a lens unit used in an f? Lens of a laser machining apparatus according to Embodiment 3 of the present invention, and FIG. 4B is a cross- It is a schematic diagram.

As shown in Fig. 4, the lens unit 40 used in the f? Lens of this embodiment has two temperature detectors 14 on the surface of the second optical lens 11b on the side where the laser beam 2 is incident And is the same as the lens unit 20 of the first embodiment.

As shown in Fig. 4 (b), the temperature detector 14 is provided at each of both ends of the string passing the center point of the second optical lens 11b.

When the lens unit 40 of this embodiment is used as the f? Lens, as shown in FIG. 4 (b), the area irradiated with the laser beam 2 on the surface of the second optical lens 11b is a rectangular or rectangular .

Here, the two temperature detectors 14 are arranged such that the laser beam irradiation area 25 on the surface of the second optical lens 11b and the laser beam non-irradiation area 25 on the outer circumference of the circular shape of the second optical lens 11b (26).

Specifically, in each of the laser beam non-irradiated portions 26 at both end portions of the strings orthogonal to the two opposing sides of one side of the laser beam irradiation region 25 in the second optical lens 11b, A detector 14 is disposed.

Or, in each of the laser beam non-irradiated portions 26 at both end portions of the strings orthogonal to the other two opposing sides of the laser beam irradiation region 25 in the second optical lens 11b, (14).

The direction orthogonal to the two opposing sides in the laser beam irradiation area 25 coincides with the direction in which the second galvanometer mirror 3b deflects and the other two opposing sides are orthogonal Direction coincides with the direction in which the first galvanometer mirror 3a is deflected.

The lens unit 40 of the present embodiment is arranged such that the laser beam non-irradiated portion 26 of the second optical lens 11b having a smaller thermal capacity than the mirror barrel 13 is used as the f? Lens of the laser processing apparatus, Since the laser beam non-irradiated portion 26 is close to the laser beam irradiated region 25, the instantaneous absorption of the high-energy laser beam 2 (for example, in the unit of msec precision) Even when the temperature of the second optical lens 11b instantaneously rises, the temperature of the second optical lens 11b can be accurately measured as the temperature signal.

The mounting surface of the temperature detector 14 of the second optical lens 11b is not affected by the dust generated at the time of processing the workpiece 6 because it is not a surface that comes into contact with the outside air.

Further, since two temperature detectors 14 are used, a temperature signal for obtaining the average temperature of the second optical lens 11b whose temperature has risen can be measured.

Two temperature detectors 14 are used to measure the temperature signal for obtaining the average temperature of the second optical lens 11b but two or more temperature detectors 14 may be used as the second optical lens 11b The laser beam non-irradiated portion 26 of the laser beam non-irradiated portion 26 may be provided.

The laser machining apparatus of this embodiment is the same as the laser machining apparatus of the first embodiment except that the lens unit 40 is used for the f? Lens 5.

In the laser machining apparatus of the present embodiment, by instantaneous absorption (for example, in units of msec) of the high energy laser beam 2 of the second optical lens 11b in the f? Lens 5, The temperature of the second optical lens 11b is measured by the two temperature detectors 14 provided on the second optical lens 11b even when the temperature of the lens 11b instantaneously rises, The temperature measured by the temperature sensor 14 is input to the control device 9 as a temperature signal.

Based on the temperature signal inputted from the two temperature detectors 14, the controller 9 obtains the average value of the rising temperatures of the second optical lens 11b.

The controller 9 also controls the first and second galvanometer scanners 4a and 4b by controlling the galvanometer driver 8 based on the average value of the rising temperatures of the second optical lens 11b.

In the laser machining apparatus of the present embodiment, the deviation of the position of the light-converging point of the laser beam 2 due to the change in the refractive index of the optical system component group caused by the temperature rise by the laser beam 2, 11b are typically measured. Then, based on the temperature signal, the first and second galvanometer scanners 4a and 4b are controlled to perform correction.

That is, based on the data of the average value of the rising temperature in the second optical lens 11b, the deviation of the position of the laser beam condensing point is detected by the mechanism similar to the laser machining apparatus 100 of the first embodiment, , And the second galvanometer scanner 4a and 4b.

Actually, the target position corrected by the correction amount data is outputted from the controller 9 to the galvanometer driver 8 so that the positional deviation predicted from the temperature data is added to the desired position, To the first and second galvanometer scanners 4a and 4b.

The laser machining apparatus of the present embodiment can precisely correct deviation of laser beam condensing point position even in processing at a high energy laser output, so that highly accurate laser machining is possible.

In this embodiment, the control device 9 may control the XY table 7 based on the temperature signal input from the temperature detector.

In this embodiment, the number of the temperature detectors 14 provided in the laser beam non-irradiated portion 26 of the second optical lens 11b is two or more, and the temperature signals from the plurality of temperature detectors 14 The control device 9 may correct the first and second galvanometer scanners 4a and 4b by controlling the first and second galvanometer scanners 4a and 4b on the basis of the average value of the rising temperatures obtained by inputting them to the control device 9. [

Although the first and second galvanometer mirrors 3a and 3b are used as the mechanism for deflecting the laser beam 2 in this embodiment, the present invention is not limited to this, as long as it is a mechanism for deflecting the laser beam 2 .

Although the temperature detector 14 is provided in the second optical lens 11b in the lens unit 40 used in the f? Lens 5 of the present embodiment, if it is provided on the surface of the optical lens that does not contact the outside air , It may be provided in any optical lens.

Further, the temperature detector 14 may be provided in the portion of the protective window 12 where the laser beam is not irradiated, on the surface opposite to the laser beam emitting surface.

(Example 4)

5 is a schematic cross-sectional side view (a) of the lens unit used in the f? Lens of the laser machining apparatus according to the fourth embodiment of the present invention and a schematic view (b) of the A-A cross section of the lens unit in this side sectional schematic view.

5, the lens unit 50 used in the f? Lens of the present embodiment is configured such that the four temperature detectors 14a, 14b, 14c, and 14d are the laser beams 2 of the second optical lens 11b Is the same as the lens unit 30 of the second embodiment except that it is provided on the surface of the incident side.

5 (b), the first, second, third, and fourth temperature detectors 14a, 14b, 14c, and 14d are arranged in the order of two And are provided at both ends of the string.

When the lens unit 50 of this embodiment is used as the f? Lens, the area irradiated with the laser beam 2 of the second optical lens 11b becomes a square or a rectangle as shown in Fig. 5 (b).

The mounting positions of the temperature detectors 14a, 14b, 14c and 14d in the second optical lens 11b are set such that the laser beam irradiation area 25 and the circular outer circumference of the second optical lens 11b And the laser beam non-irradiated portion 26 between the laser beams.

5B, for example, in the second optical lens 11b, the first temperature detector 14a detects the laser beam non-irradiated portion 26 at the position corresponding to 12 o'clock on the dial of the watch, Respectively.

The second temperature detector 14b is provided in the laser beam non-irradiated portion 26 at a position corresponding to 6 o'clock on the dial of the watch.

The third temperature detector 14c is provided in the laser beam non-irradiated portion 26 at a position corresponding to 9 o'clock on the dial of the watch.

The fourth temperature detector 14d is provided in the laser beam non-irradiated portion 26 at a position corresponding to 3 o'clock on the dial of the watch.

That is, the lens unit 50 of the present embodiment has the first temperature detector 14a and the fourth temperature detector 14d which are the sages D1 passing through the first temperature detector 14a and the second temperature detector 14b, Each temperature detector is disposed in the second optical lens 11b so that the passing sine D2 is orthogonal.

The direction parallel to D1 coincides with the direction for deflecting the first galvano mirror 3a, and the direction parallel to D2 coincides with the direction for deflecting the second galvano mirror 3b.

The lens unit 50 of the present embodiment is also used for the laser beam non-irradiated portion 26 in the second optical lens 11b whose thermal capacity is smaller than that of the barrel 13 when used as the f? Second, third, and fourth temperature detectors 14a, 14b, 14c, and 14d are disposed, and the laser beam non-irradiated portion 26 is close to the laser beam irradiated region 25. [

Thereby, even when the temperature of the second optical lens 11b instantaneously rises due to the momentary absorption (e.g., in units of msec precision) of the high energy laser beam 2, the temperature of the second optical lens 11b It can be measured accurately as a temperature signal.

Particularly, since the four temperature detectors are provided in the laser beam non-irradiated portion 26 of the second optical lens 11b, the difference in the average value of the rising temperatures of the second optical lenses 11b is small, The measurement accuracy can be further improved.

The temperature detector mounting surface of the second optical lens 11b is not affected by the dust generated at the time of processing the workpiece 6 because it is not a surface contacting the outside air.

The laser machining apparatus of this embodiment is the same as the laser machining apparatus of the second embodiment except that the lens unit 50 is used for the f? Lens 5.

The direction of D1 in the lens unit 50 is aligned with the X direction of the work 6 and the direction of D2 is aligned with the Y direction of the work 6.

In the laser machining apparatus of this embodiment, when the temperature of the second optical lens 11b in the f? Lens 5 is raised by instantaneous absorption (for example, in units of msec) of the high energy laser beam 2 The temperature of the second optical lens 11b is measured by four temperature detectors, and these temperatures are input to the control device 9 as a temperature signal.

Then, the control device 9 obtains an average value of the rising temperatures of the second optical lens 11b from the temperature signals of the four temperature detectors.

The temperature distribution in the direction D1 of the second optical lens 11b is obtained from the temperature signals of the first temperature detector 14a and the second temperature detector 14b and the third temperature detector 14c and the fourth temperature detector 14d from the temperature signal in the direction D2.

In the laser machining apparatus of the present embodiment, the deviation of the position of the light-converging point of the laser beam 2 due to the change in the refractive index caused by the temperature rise of the optical system component group by the laser beam 2 is detected by the second optical lens 11b ) By controlling the first and second galvanometer scanners 4a and 4b based on the average value data of the rising temperatures of the first and second galvanometer scanners 4a and 4b.

At the same time, the refractive index changes due to the temperature distribution in the same direction as the X direction of the work 6 and the temperature distribution in the same direction as the Y direction of the work 6 in the optical component part group due to the laser beam 2 , The deviation of the light-converging point position of the laser beam 2 is detected based on the temperature distribution data in the D1 direction and the temperature distribution data in the D2 direction of the second optical lens 11b by using the first and second galvanometer scanners 4a and 4b ).

That is, in the laser machining apparatus of this embodiment, the average value of the rising temperature of the second optical lens 11b and the data of the temperature distribution in the same direction as the X direction of the work 6 in the second optical lens 11b From the data of the temperature distribution in the Y direction of the work 6 in the second optical lens 11b and the data of the temperature distribution in the Y direction of the work 6 in the second optical lens 11b by the same mechanism as the laser processing apparatus of the second embodiment 4a, 4b. Thus, the deviation of the light-converging point position of the laser beam 2 is corrected.

That is, the correction of the deviation of the position of the light-converging point of the laser beam 2 is performed by controlling and correcting the operation of the galvanometer mechanism by the control device 9.

Actually, the target position corrected by the correction amount data is outputted from the control device 9 to the galvanometer driver 8 so as to irradiate the positional deviation predicted from the temperature data to the desired position, To the first and second galvanometer scanners 4a and 4b.

The laser machining apparatus of the present embodiment can correct the deviation of the position of the light-converging point of the laser beam 2 with higher accuracy even in processing with a high-energy laser output, so that laser machining with higher precision can be performed.

In the present embodiment, the controller 9 may control the XY table 7 based on the temperature signal input from the temperature detector.

Four temperature detectors 14a, 14b, 14c, and 14d are provided in the second optical lens 11b in the lens unit 50 used in the f? Lens of the present embodiment. However, Any optical lens may be used as long as it is provided on the surface.

The four temperature detectors 14a, 14b, 14c, and 14d may be provided on the laser beam non-irradiated portion on the opposite side of the laser beam incident surface of the protective window 12. [

In each of the embodiments, the temperature detector is provided on the surface of the optical lens on the side where the laser beam 2 is incident. However, the surface of the optical lens on the side opposite to the side where the laser beam 2 is incident The back surface of the optical lens).

Although four temperature detectors 14a, 14b, 14c and 14d are provided in the second optical lens 11b of the lens unit 50 in the present embodiment, A total of two temperature detectors may be provided at each symmetrical position.

Four or more temperature detectors may be provided as long as the temperature distribution in the direction parallel to the direction D1 and the temperature distribution in the direction parallel to the direction D2 of the second optical lens 11b can be measured.

Although the first and second galvanometer mirrors 3a and 3b are used as a mechanism for deflecting the laser beam 2, the present invention is not limited thereto as long as it is a mechanism for deflecting the laser beam 2. [

In the present invention, the laser beam 2 may be either a short pulse, a plurality of pulses or a continuous oscillation.

The processing content in the laser machining apparatus of the present invention is not limited to hole drilling, and any processing may be used as long as it can be processed by laser such as cutting, deformation, welding, heat treatment, or marking. Further, any change may be caused in the work to be caused by the laser such as combustion, melting, sublimation or discoloration.

On the other hand, the present invention can be freely combined with each embodiment within the scope of the invention, and each embodiment can be appropriately modified or omitted.

The laser machining apparatus according to the present invention can precisely correct the deviation of the position of the light-converging point, and can perform laser machining with high precision, and thus can be used for processing of high-precision electronic circuits and electronic parts.

Claims (9)

A lens unit for converging and irradiating a laser beam onto an object,
With an optical lens,
A lens barrel holding the optical lens,
A plurality of temperature detectors
And,
The plurality of temperature detectors are provided in the laser beam non-irradiation portion between the laser beam irradiation area of the optical lens and the outer periphery of the optical lens, and the average temperature of the optical lens, or the average temperature and surface of the optical lens. To measure the temperature signal to find the temperature distribution
Lens unit.
The method of claim 1,
Wherein at least one of said temperature detectors is disposed on each of both end portions of a string passing through a center point of said optical lens.
The method of claim 1,
Wherein at least one of the temperature detectors is disposed at each of both ends of one of the strings and at both ends of the other string in two strings orthogonal to each other across the center point of the optical lens.
The method according to any one of claims 1 to 3,
Wherein the temperature detector is disposed in the optical lens disposed in the laser beam incident portion.
The method according to any one of claims 1 to 3,
Wherein the temperature detector is disposed on a surface other than a surface in contact with the outside air of the optical lens.
A laser oscillator,
A galvanomirror for deflecting the laser beam output from the laser oscillator,
A galvanometer scanner for driving the galvanometer mirror,
An optical lens, a barrel holding the optical lens, and a laser beam non-irradiation portion provided between the laser beam irradiation area of the optical lens and the outer periphery of the optical lens, the average temperature of the optical lens or the optical A lens unit having a plurality of temperature detectors for measuring a temperature signal for obtaining an average temperature of the lens and an in-plane temperature distribution, and collecting and irradiating the laser beam deflected and incident on the galvano mirror toward an object;
An XY table that mounts the object and moves in a horizontal plane,
A galvano driver for driving the galvano scanner,
A controller for controlling the laser oscillator, the galvano driver, and the XY table;
A signal line for connecting the temperature detector to the control device
And,
Wherein the controller obtains an average value of the rising temperature of the optical lens or an average value of the rising temperature of the optical lens and a temperature distribution in the plane from the temperature signal measured by the plurality of temperature detectors, The position of the light-converging point of the laser beam is corrected
Laser processing apparatus.
The method according to claim 6,
Wherein at least one of the temperature detectors is disposed on each of both ends of a string passing through a center point of the optical lens. The method according to claim 6,
Wherein the plurality of temperature detectors are four of a first temperature detector, a second temperature detector, a third temperature detector, and a fourth temperature detector,
Wherein the first temperature detector and the second temperature detector are disposed at both ends of one string at two mutually orthogonal strings passing through the center point of the optical lens and at both ends of the other string, And the fourth temperature detector,
Wherein the controller obtains an average value of the rising temperatures of the optical lenses from all the temperature signals measured by the plurality of temperature detectors and calculates the average value of the rising temperatures of the optical lenses from the temperature signals of the first temperature detector and the second temperature detector Obtaining a temperature distribution in the X direction, obtaining a temperature distribution in the Y direction in the optical lens from the temperature signals of the third temperature detector and the fourth temperature detector, and based on the obtained results, Correct the point position
Laser processing apparatus.
9. The method according to any one of claims 6 to 8,
Wherein the galvanometer scanner is controlled by the control device through the galvanometer driver to correct the position of the light-converging point of the laser beam.

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