KR20100089058A - Showerhead and chemical vapor deposition apparatus having the same - Google Patents

Abstract

Shower head according to an embodiment of the present invention, the first head having at least one gas pipe for supplying the first reaction gas into the reaction chamber; A second head having a hole having a predetermined size through which the gas pipe passes; And a gas flow path formed between the gas pipe passing through the hole and the hole to supply a second reaction gas into the reaction chamber.

Description

Shower head and chemical vapor deposition apparatus having the same {Showerhead and Chemical Vapor Deposition Apparatus Having the Same}

The present invention relates to a shower head and a chemical vapor deposition apparatus having the same, and more particularly to a shower head and a chemical vapor deposition apparatus having the same improved the injection structure of the reaction gas.

In general, chemical vapor deposition (CVD) is a process of growing a thin film through a chemical reaction on the upper surface of a wafer heated with a reaction gas supplied into the reaction chamber. Although the thin film growth method is superior in quality of the crystals grown compared to the liquid phase growth method, there is a disadvantage that the growth rate of the crystals is relatively slow. To overcome this, the method of simultaneously growing on several substrates in one growth cycle is widely adopted.

A general chemical vapor deposition apparatus includes a reaction chamber having an internal space of a predetermined size, a susceptor installed in the internal space to mount a wafer to be deposited, a heating means provided adjacent to the susceptor to apply a predetermined heat, And a shower head for injecting reaction gas onto the wafer on which the susceptor is mounted.

An object of the present invention is to provide a shower head that can simplify the assembly process between the head and reduce the time required for assembly to improve work productivity, and reduce the manufacturing cost.

In addition, another object of the present invention is to provide a shower head that can suppress parasitic deposition on the lower surface of the head by minimizing vortex generated when mixing different reaction gases.

In addition, another object of the present invention is to provide a chemical vapor deposition apparatus capable of reducing the height of the reaction chamber and reducing the total volume of the apparatus by shortening the length of mixing of the different reaction gases.

Shower head according to an embodiment of the present invention, the first head having at least one gas pipe for supplying the first reaction gas into the reaction chamber; A second head having a hole having a predetermined size through which the gas pipe passes; And a gas flow path formed between the gas pipe passing through the hole and the hole to supply a second reaction gas into the reaction chamber.

In addition, the gas flow passage is characterized in that it comprises a gap of a predetermined size formed between the inner surface of the hole and the outer surface of the gas pipe.

In addition, it is characterized in that the center of the gas pipe and the center of the hole substantially coincide with each other.

In addition, the gas pipe is characterized in that the lower end of the gas pipe and the lower end of the hole is disposed at substantially the same horizontal level.

The length of the mixing section in which the first reaction gas and the second reaction gas are mixed may be changed by changing the thickness of the gas pipe.

In addition, the gas pipe is characterized in that it comprises a hollow member having at least one gas injection hole to inject the first reaction gas.

In addition, a third head is provided between the first head and the second head, the third head having a supply pipe having a predetermined internal space to insert the gas pipe, and is formed between the supply pipe and the gas pipe to form an interior of the reaction chamber. It characterized in that it further comprises a supply passage for supplying a third reaction gas.

The gas passage may be formed between an outer surface of the supply pipe and the hole, and the supply passage may be formed between an inner surface of the supply pipe and an inner surface of the gas pipe.

In addition, the center of the gas pipe, the center of the hole, and the center of the supply pipe is characterized in that substantially match each other.

In addition, by changing the thickness of the gas pipe and the thickness of the supply pipe, respectively, it is possible to change the length of the mixing section in which the first reaction gas, the second reaction gas, and the third reaction gas are mixed with each other. do.

On the other hand, the chemical vapor deposition apparatus according to the present invention, the reaction chamber; A first head having at least one gas pipe for supplying a first reaction gas into the reaction chamber; A second head having a hole having a predetermined size through which the gas pipe passes; And a gas flow path formed between the gas pipe passing through the hole and the hole to supply a second reaction gas into the reaction chamber.

In addition, the gas flow passage is characterized in that it comprises a gap of a predetermined size formed between the inner surface of the hole and the outer surface of the gas pipe.

In addition, it is characterized in that the center of the gas pipe and the center of the hole substantially coincide with each other.

The length of the mixing section in which the first reaction gas and the second reaction gas are mixed may be changed by changing the thickness of the gas pipe.

In addition, the gas pipe is characterized in that it comprises a hollow member having at least one gas injection hole to inject the first reaction gas.

In addition, a third head is provided between the first head and the second head, the third head having a supply pipe having a predetermined internal space to insert the gas pipe, and is formed between the supply pipe and the gas pipe to form an interior of the reaction chamber. It characterized in that it further comprises a supply passage for supplying a third reaction gas.

The gas passage may be formed between an outer surface of the supply pipe and the hole, and the supply passage may be formed between an inner surface of the supply pipe and an inner surface of the gas pipe.

In addition, the center of the gas pipe, the center of the hole, and the center of the supply pipe is characterized in that substantially match each other.

In addition, by changing the thickness of the gas pipe and the thickness of the supply pipe, respectively, it is possible to change the length of the mixing section in which the first reaction gas, the second reaction gas, and the third reaction gas are mixed with each other. do.

According to the present invention having the above-described configuration, the assembly is formed so as to form a gap between the gas passage of the first head and the hole of the second head, thereby simplifying the assembly process between the heads and reducing the time required for assembly, thereby improving work productivity. It is possible to reduce the manufacturing cost.

In addition, since the vertical gap between the second head and the susceptor can be reduced by shortening the length of mixing of different reaction gases, it is possible to reduce the overall height of the reaction chamber to enable a compact design of the device, and consume the amount of reaction gas. At the same time to ensure a uniform gas flow flow can be obtained a growth layer of uniform quality.

In addition, since different reaction gases are mixed with each other after a predetermined distance, the generation of vortices at the bottom of the head can be minimized, so that parasitic deposition at the bottom of the head can be suppressed.

1 is a cross-sectional view showing an embodiment of a chemical vapor deposition apparatus having a shower head according to the present invention.
2 is an exploded perspective view showing an embodiment of a shower head according to the present invention.
3 is a cross-sectional view of the portion B of FIG.
4 is a cross-sectional view showing another embodiment of the shower head according to the present invention.
5 (a) (b) and (c) are perspective views showing the gas passages employed in the shower head according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view showing an embodiment of a chemical vapor deposition apparatus having a shower head according to the present invention, Figure 2 is an exploded perspective view showing a shower head according to the present invention, Figure 3 is a portion B of FIG. It is a cross section.

The apparatus 100 according to the embodiment of the present invention includes a reaction chamber 110, a susceptor 120, a heating means 130, and a shower head 200, as shown in FIGS. 1 to 3.

The reaction chamber 110 provides an internal space of a predetermined size to allow a chemical vapor reaction between the reaction gas introduced into the reaction gas and the wafer 2 to be deposited, and an insulation is provided on the inner surface to withstand a high temperature atmosphere. It can also be.

The reaction chamber 110 is provided with an exhaust port 119 for discharging the waste gas from which the chemical vapor phase reaction with the wafer 2 is completed to the outside.

The susceptor 120 is a wafer support structure in which at least one pocket on which the wafer 2 is mounted is recessed on an upper surface thereof to be disposed in the reaction chamber 110.

The susceptor 120 is provided in the form of a disk using graphite (graphite), the susceptor 120 is mounted on the wafer (2) by having a rotary shaft connected to the drive motor not shown in the center of the lower surface Is to be constantly rotated at a uniform speed of approximately 5 to 50 rpm in one direction by the rotational power of the drive motor.

The heating means 130 is disposed near the lower surface of the susceptor 120 on which the wafer 2 is mounted to provide heat to the susceptor 120 to heat the wafer 2.

The heating means 130 may be provided with any one of an electric heater, high frequency induction, infrared radiation, laser.

In addition, the reaction chamber 110 is disposed to be close to the outer surface of the susceptor 120 or the heating means 130 to measure the internal atmosphere temperature of the reaction chamber 110 at any time, based on the measured value. It is preferable to have a temperature sensor (not shown) to adjust the heating temperature.

Meanwhile, the shower head 200 injects at least one or more kinds of reaction gases onto the wafer 2 mounted on the susceptor 120 so that the reaction gases can evenly contact the wafer 2. The structure is installed on top of the 110, the shower head 200 includes a first head 210, and a second head 220.

The first head 210 is connected to the first supply line 201 through which the first reaction gas G1 is supplied so that the first reaction gas G1 is filled in the internal space through the first supply line 201. Is a structure.

At least one gas pipe 215 having a predetermined length is provided on a lower surface of the first head 210 to allow the first reaction gas G1 to be injected into the reaction chamber 110 through the gas pipe 215. .

1 to 5 illustrate a case where the first head 210 includes a plurality of gas pipes 215.

The second head 220 is provided with a hole 225 of a predetermined size so that the gas pipe 215 can be inserted.

In the embodiment shown in FIGS. 1-3, the first head 210 and the second head 220 are shown in relation to the top of the reaction chamber 110, between which the spacer 203 is located. Thereby forming an internal space of a predetermined size while maintaining a vertical gap.

The inner space formed by the spacer 203 communicates with the second supply line 202, and the second reaction gas G2 is supplied into the reaction chamber 110 through the second supply line 202.

1 to 3, the first head 210 and the second head 220 are disposed such that the gas pipe 215 penetrates the hole 225. A predetermined gap is formed between the outer surface and the hole 225.

That is, a predetermined interval is formed between the gas pipe 215 and the hole 225, and the interval is the second reaction gas G2 supplied through the second supply line 202 in the reaction chamber 110. A gas flow path P is formed to be supplied to the furnace.

Therefore, the first reaction gas G1 supplied through the first supply line 201 of the first head 210 is supplied into the reaction chamber 110 through the gas pipe 215 and the second supply line. The second reaction gas G2 supplied through 202 is supplied to the reaction chamber 110 through the gas flow path P, and is mixed in the space below the gas pipe 215 and the hole 225. .

Here, the space provided between the lower and the susceptor 120 of the gas pipe 215 or the hole 225 is formed of the first reaction gas G1 supplied through the gas pipe 215 and the gas flow path P. It is a mixing section in which two reaction gases G2 are mixed with each other.

Therefore, the first reaction gas G1 supplied into the first head 210 is injected into the reaction chamber 110 through the gas pipe 215, and the first head 210 and the second head 220 are disposed. The second reaction gas G2 supplied through the space between the first and second reaction gases G2 is supplied into the reaction chamber 110 through a gas flow path P formed between the gas pipe 215 and the hole 225, and the reaction chamber. The first reaction gas G1 and the second reaction gas G2 supplied into the 110 are mixed with each other in the mixing section.

In addition, when assembling the first head 210 and the second head 220, the gas pipe 215 of the first head 210 is easily inserted and disposed without catching the hole 225 of the second head 220. Since the welding operation is unnecessary without requiring high precision as in the related art, the assembly time can be shortened while reducing the work load of the operator and simplifying the assembly process.

Here, the gas pipe 215 provided in the first head 210 is preferably provided in the same number as the number of holes 225 formed in the second head 220.

And, by matching the center of the gas pipe 215 and the center of the hole 225 with each other, the injection of the second reaction gas (G2) through the gap (W) can be made more uniform.

In addition, the lower end of the gas pipe 215 and the lower end of the hole 225 are disposed in substantially the same position as the lower surface of the second head 120, the second injection through the gas flow path (P) The reaction gas G2 and the first reaction gas G1 injected through the gas pipe 215 may be mixed with each other more smoothly.

On the other hand, as shown in Figure 3, the length (ML) of the mixing section between the first reaction gas (G1) injected from the gas pipe 215 and the second reaction gas (G2) injected from the gas flow path (P) By changing the thickness (T) of the gas pipe 215 disposed in the hole 225 can be extended long or short to the bottom.

That is, when the thickness T of the gas pipe 215 is made thick while the gap W of the gas flow path P is kept constant, the injection area of the first reaction gas G1 through the gas pipe becomes narrow. At the same time, since the injection angle becomes smaller and the gas injection speed is increased, the length of the mixing section with the second reaction gas G2 injected through the gas flow path P becomes longer.

That is, the section required for sufficiently mixing the first reaction gas G1 and the second reaction gas G2 becomes longer.

On the contrary, when the thickness T of the gas pipe 215 is thinned while the gap W of the gas flow path P is kept constant, the injection of the first reaction gas G1 through the gas pipe 215 is performed. Since the area is widened and the injection angle is increased to decrease the gas injection speed, the length of the mixing section with the second reaction gas G2 injected through the gas flow path P becomes shorter.

That is, the section required for sufficiently mixing the first reaction gas G1 and the second reaction gas G2 becomes shorter.

Therefore, by reducing the thickness of the gas pipe 215, it is possible to reduce the vertical gap between the second head 220 and the susceptor 120 to lower the overall height of the reaction chamber 110 to enable a compact design of the device. On the other hand, it is possible to obtain a growth layer of uniform quality by reducing the consumption of the reaction gas and at the same time ensuring a uniform gas flow.

Also, since the first reaction gas G1 and the second reaction gas G2 are mixed with each other after a predetermined distance, parasitic deposition occurs at the lower end of the gas pipe 215 or the lower surface of the second head 220. It can be prevented.

1 and 3, the lower end of the gas pipe 215 and the lower end of the hole 225 are arranged to have substantially the same horizontal level, thereby supplying through the gas pipe 215. The mixing efficiency of the first reaction gas G1 and the second reaction gas G2 supplied through the gas flow path P of the hole 225 may be further improved. This is the same also in the case of the embodiment shown in Figure 4 to be described later.

On the other hand, Figure 4 is a cross-sectional view showing another embodiment of the shower head according to the present invention, as shown in Figure 4, the shower head 200a according to another embodiment of the present invention is the first head 210 And a third head 230 supplying a third reaction gas G3 between the second head 220 and the second head 220.

The third head 230 includes a supply pipe 235 in a region corresponding to the gas pipe 215 provided in the first head 210, and the supply pipe 235 penetrates through the third head 230. It is inserted into the formed through hole 231 to be fixed or fixedly installed on the lower surface of the third head 230 in a welding manner so as to communicate with the through hole 231.

The gas pipe 215 of the first head 210 is inserted into the supply pipe 235 of the third head 230, the outer surface of the gas pipe 215 inserted into the supply pipe 235 and the supply pipe Between the inner surface of the (235) and the third reaction gas supplied between the first head 210 and the third head 230, a predetermined size interval (W1) to be supplied into the reaction chamber 110 That is, the supply flow path S is provided. In addition, the supply pipe 235 of the third head 230 is inserted into the hole 225 of the second head 220, the outer surface of the supply pipe 235 is inserted and disposed in the hole 225 Between the inner surface of the hole 225 a predetermined size interval (W2), that is, the gas flow path (P2) in which the second reaction gas (G2) supplied between the third head 230 and the second head 220 is injected ) Is provided.

Here, the gas pipe 215 provided in the first head 210 is the number of holes 225 formed in the second head 220 and the number of formation of the supply pipe 235 of the third head 230. And preferably provided in substantially the same number as each other.

Then, the second reaction gas (G2) through the gas passage (P) and the supply passage (S) by substantially matching the center of the gas pipe 215 and the center of the hole 225 and the center of the supply pipe 235. ) And the third reaction gas G3 may be more uniformly injected.

In addition, the lower end of the gas pipe 215, the lower end of the hole 225 and the lower end of the supply pipe 235 is disposed at substantially the same position as the lower surface of the second head 220, the gas flow path Mixing between the second and third reaction gases sprayed through P and the supply passage S and the first reaction gases G1 injected through the gas pipe 215 may be performed more smoothly.

The length of the mixing section between the first reaction gas G1 injected from the gas pipe 215 and the second and third reaction gases injected through the gas flow path P and the supply flow path S is the hole 225. By changing the thickness of the supply pipe 235 disposed in the) and the thickness of the gas pipe 215 inserted into the supply pipe 235 can be extended or shortened to the bottom.

As shown in FIG. 5 (a), the gas pipe 215 provided in the first head 210 may be formed of a hollow cylinder member having a predetermined length, and the hollow cylinder member includes one or more gas injection holes ( 216, 216a, 216b). In FIG. 5C, a case where a plurality of gas injection holes 216b are provided is illustrated.

The matters concerning the cylindrical members shown in (a), (b) and (c) of FIG. 5 are not necessarily limited to the gas pipe 215, but the same applies to the supply pipe 235. Therefore, the detailed description of the supply pipe 235 will be replaced with the description of the gas pipe 215.

While the invention has been shown and described with respect to particular embodiments, it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as set forth in the claims below. I want to make it clear.

110: reaction chamber 120: susceptor
130: heating means 200: shower head
210: first head 215: gas pipe
220: second head 225: hole
230: third head 235: supply pipe
P: Gas flow path ML: Length of mixing section
S: supply flow path

Claims (20)

A first head having at least one gas pipe for supplying a first reaction gas into the reaction chamber;
A second head having a hole having a predetermined size through which the gas pipe passes; And
And a gas flow path formed between the gas pipe passing through the hole and the hole to supply a second reaction gas into the reaction chamber.
The method of claim 1,
The gas flow path includes a shower head having a predetermined size formed between the inner surface of the hole and the outer surface of the gas pipe.
The method of claim 1,
And a center of the gas pipe and a center of the hole coincide with each other.
The method of claim 1,
And a lower end of the gas pipe and a lower end of the hole are disposed at the same horizontal level.
The method of claim 1,
By changing the thickness of the gas pipe is a shower head, it is possible to change the length of the mixing section in which the first reaction gas and the second reaction gas is mixed.
The method of claim 1,
The gas pipe comprises a hollow member having at least one gas injection hole to inject the first reaction gas.
The method of claim 1,
A third head provided between the first head and the second head, the third head including a supply pipe having a predetermined internal space to insert the gas pipe;
And a supply passage formed between the supply pipe and the gas pipe to supply a third reaction gas into the reaction chamber.
The method of claim 7, wherein
The gas flow path is formed between the outer surface of the supply pipe and the hole, the shower head is formed between the inner surface of the supply pipe and the inner surface of the gas pipe.
The method of claim 7, wherein
And a center of the gas pipe, a center of the hole, and a center of the supply pipe coincide with each other.
The method of claim 7, wherein
The thickness of the gas pipe and the supply pipe by changing the thickness of the shower, characterized in that to change the length of the mixing section in which the first reaction gas, the second reaction gas, and the third reaction gas are mixed with each other head.
Reaction chamber;
A first head having at least one gas pipe for supplying a first reaction gas into the reaction chamber;
A second head having a hole having a predetermined size through which the gas pipe passes; And
And a gas flow path formed between the gas pipe passing through the hole and the hole to supply a second reaction gas into the reaction chamber.
The method of claim 11,
And the gas flow path comprises a gap having a predetermined size formed between an inner surface of the hole and an outer surface of the gas pipe.
The method of claim 11,
And a center of the gas pipe and a center of the hole coincide with each other.
The method of claim 11,
And changing a thickness of the gas pipe to change a length of a mixing section in which the first reaction gas and the second reaction gas are mixed.
The method of claim 11,
The gas pipe comprises a hollow member having at least one gas injection hole to inject the first reaction gas.
The method of claim 11,
A third head provided between the first head and the second head, the third head including a supply pipe having a predetermined internal space to insert the gas pipe;
And a supply passage formed between the supply pipe and the gas pipe to supply a third reaction gas into the reaction chamber.
The method of claim 16,
And a gas passage is formed between an outer surface of the supply pipe and the hole, and the supply passage is formed between an inner surface of the supply pipe and an inner surface of the gas pipe.
The method of claim 16,
And the center of the gas pipe, the center of the hole, and the center of the supply pipe coincide with each other.
The method of claim 16,
By varying the thickness of the gas pipe and the thickness of the supply pipe, respectively, it is possible to change the length of the mixing section in which the first reaction gas, the second reaction gas, and the third reaction gas are mixed with each other Vapor deposition apparatus.
The method of claim 11,
And a lower end of the gas pipe and a lower end of the hole are disposed at the same horizontal level.

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