KR20090092116A - Apparatus and method for measuring three dimension shape of a object - Google Patents

Abstract

The present invention relates to a three-dimensional shape measuring apparatus and method that can simultaneously photograph the inspection object in a plurality of directions using a plurality of image forming portion, the three-dimensional shape measuring apparatus of the present invention is a projection unit for generating a grid pattern illumination and irradiation ( 10) and the XY axis transfer table 20 which is provided below the projection part 10 to convey the test object P, and is installed between the projection part 10 and the XY axis transfer table 20, and the test object A beam splitter 30 for separating and passing the reflected grid pattern image at (P) and a grid pattern image installed at a lower side of the beam splitter 30 in a circumferential direction to be spaced apart from each other and reflected from the inspection object P Is irradiated when the plurality of reflection mirrors 40 and the beam splitter 30 and the plurality of reflection mirrors 40 are respectively installed on one side of the grid pattern image passing through the beam splitter 30 and a plurality of Reflected by the reflection mirror 40 Chairs characterized by a plurality of result consisting of a top (50) for recording an image pattern.

Description

Apparatus and method for measuring three dimension shape of a object}

The present invention relates to an apparatus and method for measuring a three-dimensional shape, and more particularly, to an apparatus and method for measuring a three-dimensional shape that can simultaneously photograph an inspection object in multiple directions using a plurality of imaging units.

In order to measure the three-dimensional shape of the inspection object, a three-dimensional shape measuring apparatus is applied, and this three-dimensional shape measuring apparatus will be described with reference to the accompanying drawings as follows.

As shown in FIG. 1, a conventional three-dimensional shape measuring apparatus is composed of an X-Y axis transfer table 1, a projection unit 2, and a camera 3, and the respective configurations will be described as follows.

The X-Y-axis transfer table 1 transfers the inspection object (P) to the X-axis or the Y-axis, and the projection unit 2 generates and irradiates a grid-patterned light to the inspection object (P). The projection part 2 which produces | generates and irradiates a grid-patterned illumination is comprised from the illumination source 2a, the grid element 2b, the grid | lattice transfer mechanism 2c, and the projection lens 2d. The illumination source 2a generates light and irradiates it to the grid element 2b, and the grid element 2b converts the irradiated light into grid pattern illumination and irradiates it to the inspection object P through the projection lens 2d. .

When the grid-patterned light is irradiated and reflected by the inspection object (P), it is photographed by the camera (3). When the photographing of the lattice pattern is completed in the camera 3, the lattice transfer mechanism 2c repeatedly transfers the lattice elements 2b, and at each transfer, the lattice transfer image 2 is reflected from the inspection object P. To shoot.

When the grid element 2b is repeatedly transferred and the photographing of one side of the inspection object P is completed, the other side of the inspection object P is photographed. In order to photograph the other side of the inspection object P, the projection 2 is rotated in the same direction as the arrow A. FIG. When the projection unit 2 is rotated, the grid element 2b is repeatedly transported, and the grid 3 image is photographed by the camera 3 for each transfer to measure the three-dimensional shape of the inspection object P.

As described above, in the conventional three-dimensional shape measuring apparatus, when the projection unit is rotated to one side and the other side of the inspection object to measure the three-dimensional shape of the inspection object, a work time for rotating the projection unit is added to measure the three-dimensional shape of the inspection object. There is a problem that the productivity of the work is lowered.

An object of the present invention is to provide a three-dimensional shape measuring apparatus and method that can improve the productivity of the three-dimensional shape measurement work of the inspection object by simultaneously photographing the inspection object in a plurality of directions using a plurality of imaging parts.

Another object of the present invention is to provide a three-dimensional shape measuring apparatus and method that can be more accurately measured when there is a portion protruding on the side of the inspection object by installing the imaging unit to photograph the side of the inspection object.

The three-dimensional shape measuring apparatus of the present invention is provided between the projection unit for generating and irradiating the grid pattern illumination, the XY axis transfer table installed under the projection unit for transferring the inspection object, and installed between the projection unit and the XY axis transfer table for inspection. A beam separation unit for separating and passing the grid pattern image reflected from the object, and a plurality of reflection mirrors installed below the beam separation unit to be spaced apart from each other in a circumferential direction and reflecting the grid pattern image reflected from the inspection object; Each of the beam splitter and the plurality of reflection mirrors is installed on each side, characterized in that it consists of a plurality of image pickup portion for taking a grid pattern image and the grid pattern image reflected from the plurality of reflection mirrors.

The three-dimensional shape measuring method of the present invention includes the steps of transferring the inspection object to the measurement position by the XY axis transfer table, and the step of transferring the grid element by the grid transfer mechanism when the inspection object is transferred to the measurement position; When the grid element is pitch-transmitted, the illumination source of the imaging unit is turned on to irradiate the grid pattern light with the test object, and when the grid pattern light is irradiated with the test object, a plurality of grid pattern images reflected from the test object are reflected. Photographing in a plurality of image forming parts by irradiating through a mirror; turning off the illumination source of the image forming part when the grid pattern image is photographed in the plurality of image forming parts; Checking whether N is the N + 1th pitch feed, and if the grating element is the N + 1th pitch feed, turn on the first circular lamp portion or the second circular lamp portion and Photographing the object with a plurality of imaging units; checking whether the measurement of the inspection object is completed when the imaging object is photographed by the plurality of imaging units; and when the measurement of the inspection object is completed, the control unit includes a first circular lamp unit or a second After turning on the circular lamp, characterized in that it comprises the step of calculating the three-dimensional shape of the inspection object by using the image of the inspection object photographed and the grid pattern image taken from the plurality of imaging units.

The apparatus and method for measuring a three-dimensional shape of the present invention provides an advantage of improving productivity of a three-dimensional shape measuring operation of an inspection object by allowing a plurality of imaging units to simultaneously photograph the inspection object in various directions. In addition, the apparatus and method for measuring a three-dimensional shape of the present invention provides an advantage of more accurate measurement when there is a protruding portion on the side of the inspection object by installing the imaging unit to photograph the side of the inspection object.

1 is a view showing the configuration of a conventional three-dimensional shape measuring apparatus,

2 is a view showing the configuration of a three-dimensional shape measuring apparatus of the present invention,

3 is a plan view of the projection shown in FIG. 2;

4 is a plan view of the second and third lighting source shown in FIG.

5 is a flowchart showing a three-dimensional shape measuring method of the present invention.

Explanation of symbols on the main parts of the drawings

10: projection unit 11: light source

12: lattice element 13: lattice transfer mechanism

14: projection lens 15: projection lens filter

20: X-Y axis transfer table 30: Beam splitter

40: reflection mirror 50: imaging part

51: camera filter 52: imaging lens

53: camera 60: first circular lamp unit

70: second circular lamp unit 80: control unit

Referring to the three-dimensional shape measuring apparatus of the present invention with reference to the accompanying drawings as follows.

2 is a view showing the configuration of the three-dimensional shape measuring apparatus of the present invention, Figure 3 is a plan view of the projection shown in Figure 2, Figure 4 is a plan view of the second and third illumination source shown in FIG. Here, the first circular lamp unit 60 or the second circular lamp unit 70 shown in FIG. 2 represents a side cross-sectional state, respectively, and the first circular lamp unit 60 or the second circular lamp unit shown in FIG. Reference numeral 70 denotes a planar cross-sectional state, respectively.

2 to 4, the three-dimensional shape measuring apparatus of the present invention, the projection unit 10, the XY axis transfer table 20, the beam separation unit 30, a plurality of reflective mirrors 40 and a plurality of image forming unit Comprising 50, each component is as follows.

The projection unit 10 generates and irradiates a grid-patterned light, and the X-Y axis transfer table 20 is installed below the projection unit 10 to transfer the inspection object P. The beam separation unit 30 is installed between the projection unit 10 and the X-Y axis transfer table 20 to separate and pass the grid pattern image reflected from the inspection object (P). The plurality of reflective mirrors 40 are installed on the lower side of the beam separation unit 30 so as to be spaced apart from each other in the circumferential direction, and reflect the grid pattern image reflected from the inspection object P. The plurality of imaging units 50 are respectively installed at one side of the beam splitter 30 and the plurality of reflective mirrors 40 to reflect the grid pattern image and the plurality of reflective mirrors 40 that are passed through the beam splitter 30. Take a picture of the grid pattern.

Detailed configuration of the projection unit 10, the XY axis transfer table 20, the beam separation unit 30, the plurality of reflective mirrors 40 and the plurality of imaging units 50 constituting the three-dimensional shape measuring apparatus of the present invention This is as follows.

The projection unit 10 is composed of an illumination source 11, a grating element 12, a grating transfer mechanism 13, a projection lens 14, and a projection lens filter 15.

The illumination source 11 of the projection unit 10 generates and irradiates the illumination, and the grid element 12 is installed below the illumination source 11 to convert the illumination irradiated from the illumination source 11 into a grid pattern illumination. Investigate. An inclination angle g of the grating element 12 for converting illumination into a grid pattern lighting is installed at an angle of 45 degrees with respect to the Y-axis direction in the X-Y axis plane as shown in FIG. 3. The grating transfer mechanism 13 is applied to the PZT (piezoelectric) and installed in the grating element 12 to transfer the grating element 12, and the projection lens 14 is installed below the grating element 12 to illuminate the lattice pattern illumination. Project the. The projection lens filter 15 is disposed under the projection lens 14 to irradiate the grid-patterned light irradiated through the projection lens 14 by filtration.

The XY axis transfer table 20 includes a motor 21 for driving the XY axis transfer table 20 in the X axis direction, and a motor 22 for driving the XY axis transfer table 20 in the Y axis direction. Then, the inspection object (P) is aligned or transferred to the measurement position.

The beam splitter 30 irradiates the grid pattern image generated by the projection unit 10 or the illumination generated by the first circular lamp unit 60 or the second circular lamp unit 70 to the inspection object P. A beam splitter is applied to irradiate the reflected image to one of the plurality of imaging units 50 installed on one side of the beam splitter 30.

The plurality of reflection mirrors 40 are X to irradiate the plurality of image forming portions 50 except for the image forming portions 50 installed in the beam splitter 30 to reflect the grid pattern image reflected from the inspection object P. It is installed to be inclined in the axial direction, and installed to be spaced apart from each other in the circumferential direction. That is, the plurality of reflective mirrors 40 are installed to be spaced apart at equal intervals from each other along the circle shown by dashed lines in FIG. 4.

The plurality of imaging units 50 simultaneously capture a grid pattern image reflected by the reflection mirror 40, and are composed of a camera filter 51, an imaging lens 52, and a camera 53, respectively. The camera filter 51 filters and irradiates the grid pattern image reflected by the reflective mirror 40. The camera filter 51 for filtering the grid pattern image is applied with one of a frequency filter, a color filter, and a light intensity control filter. The imaging lens 52 is installed at one side of the camera filter 51 to form a grid pattern image transmitted from the camera filter, and the grid pattern image imaged and irradiated by the imaging lens 52 is photographed by the camera 53. The camera 53 is installed on one side of the imaging lens 52 to photograph the grid pattern image irradiated from the imaging lens 52.

In the three-dimensional shape measuring apparatus of the present invention having the above configuration, the first circular lamp unit 60 and the second circular lamp unit for capturing a two-dimensional image, that is, an illumination image, for extracting a specific shape of the inspection object P; An additional 70 is configured, and a control unit 80 for controlling these components is further provided.

The first circular lamp unit 60 and the second circular lamp unit 70 further configured to the three-dimensional shape measuring apparatus of the present invention will be described as follows.

The first circular lamp unit 60 is installed on the lower side of the beam separation unit 30 to generate and irradiate the illumination to the inspection object (P) so that the illumination image is reflected from the inspection object (P). The second circular lamp unit 70 is installed on the lower side of the plurality of reflective mirrors 40 to generate illumination to the inspection object (P) so that the illumination image is reflected from the inspection object (P) and irradiates the inspection object (P). . The first circular lamp unit 60 and the second circular lamp unit 70 for illuminating the inspection object P are composed of circular ring members 61 and 71 and a plurality of light emitting elements 62 and 72, respectively. .

The circular ring members 61 and 71 have through holes 61a and 71a so that the grid pattern illumination or the grid pattern image can pass therethrough. Here, the through hole 71a of the second circular lamp unit 70 allows the illumination irradiated from the first circular lamp unit 60 to be irradiated to the inspection object P or the grid pattern image reflected from the inspection object P. Is larger in diameter than the through hole 61a of the first circular lamp unit 60 so as to be irradiated with a plurality of reflective mirrors 40. The plurality of light emitting elements 62 and 72 are installed below the circular ring members 61 and 71 to generate illumination.

When the illumination is generated from the first circular lamp unit 60 or the second circular lamp unit 70 and irradiated to the inspection object P, the illumination image reflected from the inspection object P is divided with the beam separation unit 30. Two reflection mirrors 40 are irradiated. Illumination images irradiated with the beam splitter 30 and the plurality of reflection mirrors 40 are respectively photographed by the plurality of imaging units 50.

The grid pattern image or the illumination image photographed by the plurality of imaging units 50 is received by the control unit 80. When the grid pattern image or the illumination image is received, the control unit 80 uses the 3D image of the inspection object P. Calculate the shape. The control unit 80 for calculating the three-dimensional shape of the inspection object P includes the projection unit 10, the XY axis transfer table 20, the plurality of imaging units 50, the first circular lamp unit 60, and the second. The circular lamp unit 70 and the like generally control the three-dimensional shape measuring apparatus of the present invention.

The three-dimensional shape measuring method using the three-dimensional shape measuring apparatus of the present invention having the above configuration will be described with reference to FIGS. 2 and 4.

2 and 4, in the three-dimensional shape measuring method of the present invention, first, the inspection object P is transferred to the measurement position by the X-Y axis transfer table 20 (S10). When the inspection object P is transferred to the measurement position, the grid element 12 is pitched by the grid transfer mechanism 13 (S20). When the grid element 12 is pitch-feeded, the illumination source 11 of the image forming unit 50 is turned on to irradiate the grid-patterned light with the inspection object P (S30).

When the grid pattern light is irradiated onto the inspection object P, the grid pattern image reflected by the inspection object P is irradiated through the plurality of reflection mirrors 40 and photographed by the plurality of imaging units 50 (S40). At the time of capturing the grid pattern image, a plurality of image forming units 50 simultaneously photograph the grid pattern image. When the grid pattern image is photographed by the plurality of image forming units 50, the illumination source 11 of the image forming unit 50 is turned off (S50).

When the illumination source 11 of the image forming unit 50 is turned off, the controller 80 checks whether the grating element 12 is the N + 1 th pitch transfer (S60). As described above, the step S60 of checking whether the N + 1 th pitch transfer is performed returns to the step S20 of pitch feeding the grating element 12 when the grating element 12 is not the N + 1 th pitch transfer. That is, when calculating the three-dimensional shape of the inspection object P using the 4-bucket algorithm, it is transferred four times at the pitch interval of the grating element 12.

When the grid element 12 is the N + 1th pitch feed, the first circular lamp unit 60 or the second circular lamp unit 70 is turned on, and the inspection object P is photographed by the plurality of imaging units 50. (S70). That is, the illumination image which is a two-dimensional image of the inspection object P is photographed.

A method for photographing an illumination image will be described in more detail as follows. First, when the grating element 12 is the N + 1th pitch feed, the first circular lamp unit 60 is turned on (S71). When the first circular lamp unit 60 is turned on, the inspection objects P are photographed by the plurality of imaging units 50 (S72). When the inspection object P is photographed by the plurality of imaging units 50, the first circular lamp unit 60 is turned off (S73). When the first circular lamp unit 60 is off, the second circular lamp unit 70 is turned on (S74). When the second circular lamp unit 70 is turned on, the inspection objects P are photographed by the plurality of imaging units 50 (S75). When the inspection object P is photographed in the plurality of imaging units 50, the second circular lamp unit 70 is turned off (S76). In this way, by photographing the illumination image from the plurality of imaging units 50 according to the illumination generated from the first circular lamp unit 60 or the second circular lamp unit 70 to determine the singularity in various directions of the inspection object (P) You can shoot faster.

When the illumination image is photographed, when the plurality of imaging units 50 photograph the inspection object P, it is checked whether the measurement of the inspection object P is completed (S80). In step S80 of checking whether the measurement of the inspection object P is completed, if the measurement of the inspection object P is not completed, the process returns to the step of transferring the inspection object P to the measurement position. On the contrary, when the measurement of the inspection object P is completed, the controller 80 turns on the first circular lamp unit 60 or the second circular lamp unit 70 and then photographs the inspection object P. The three-dimensional shape of the inspection object P is calculated using the image of the image and the grid pattern images photographed by the plurality of image forming units 50 (S90).

As described above, the three-dimensional shape measurement time of the inspection object can be reduced by calculating the three-dimensional shape of the inspection object by simultaneously photographing the inspection object using a plurality of imaging units.

The apparatus and method for measuring a three-dimensional shape of the present invention can be applied to a field for measuring a three-dimensional shape of an inspection object such as a printed circuit board or a solder.

Claims (10)

A projection unit for generating and illuminating the lattice lighting; An X-Y axis transfer table installed at the lower side of the projection unit to transfer an inspection object; A beam separation unit installed between the projection unit and the X-Y axis transfer table to separate and pass the grid pattern image reflected from the inspection object; A plurality of reflection mirrors installed on the lower side of the beam separation unit to be spaced apart from each other in a circumferential direction and reflecting a grid pattern image reflected from an inspection object; 3D, characterized in that it is provided on each side of the beam splitter and the plurality of reflective mirrors and consists of a plurality of image forming parts for taking a grid pattern image passed through the beam splitter and a grid pattern image reflected from the plurality of reflection mirrors Shape measuring device. According to claim 1, The projection unit is an illumination source for generating illumination and irradiating, A lattice element installed at the lower side of the illumination source and converting the illumination irradiated from the illumination source into a lattice patterned illumination; A lattice transfer mechanism installed at the lattice element to transfer the lattice element; A projection lens provided below the grid element to project the grid pattern illumination; A projection lens filter installed under the projection lens and configured to filter and irradiate the grid-patterned light irradiated through the projection lens, The grating element is installed inclined 45 degrees relative to the Y-axis direction in the X-Y axis plane, the grating transfer mechanism is a three-dimensional shape measuring apparatus characterized in that the PZT is applied. The apparatus of claim 1, wherein the beam splitter comprises a beam splitter. The camera filter of claim 1, wherein the plurality of imaging units simultaneously photograph the lattice pattern images reflected by the reflection mirror, and each of the camera filters filters and irradiates the lattice image reflected by the reflection mirror; An imaging lens installed at one side of the camera filter to form a grid pattern image transmitted from the camera filter; It is installed on one side of the imaging lens and consists of a camera to shoot a grid pattern image irradiated from the camera lens, The camera filter is a three-dimensional shape measuring device, characterized in that one of the frequency filter, color filter or light intensity control filter is applied. A projection unit for generating and illuminating the lattice lighting; An X-Y axis transfer table installed at the lower side of the projection unit to transfer an inspection object; A beam separation unit installed between the projection unit and the X-Y axis transfer table to separate and pass a grid pattern image or an illumination image; A first circular lamp unit installed below the beam separation unit to generate and irradiate illumination to the inspection object so that the illumination image is reflected from the inspection object; A plurality of reflection mirrors installed on the lower side of the beam separation unit to be spaced apart from each other in a circumferential direction and reflecting a grid pattern image or an illumination image reflected from an inspection object; A second circular lamp unit disposed below the plurality of reflection mirrors and generating illumination to the inspection object so that the illumination image is reflected from the inspection object and irradiating the inspection object to the inspection object; A plurality of imaging units installed at one side of the beam separation unit and the plurality of reflection mirrors to photograph a grid pattern image or an illumination image irradiated from the beam separation unit and the plurality of reflection mirrors; And a control unit configured to receive a grid pattern image or an illumination image photographed by the plurality of imaging units and calculate a three-dimensional shape of an inspection object. The method of claim 5, wherein the first circular lamp portion and the second circular lamp portion is a circular ring member having a through hole so that the lattice pattern illumination or the lattice pattern image, respectively; It is installed on the lower side of the circular ring member is composed of a plurality of light emitting elements for generating illumination, The through hole of the second circular lamp portion is larger than the through hole of the first circular lamp portion so that the illumination from the first circular lamp portion is irradiated to the inspection object or the grid pattern image reflected from the inspection object is irradiated with a plurality of reflection mirrors. Three-dimensional shape measuring device characterized in that the large diameter. Transferring the inspection object to the measurement position by means of an X-Y axis transfer table; Pitch-feeding the lattice elements by the lattice transfer mechanism when the inspection object is moved to the measurement position; Irradiating the grid pattern illumination to the inspection object by turning on the illumination source of the image forming unit when the grid element is pitch-transferred, When the grid pattern light is irradiated to the inspection object, the grid pattern image reflected from the inspection object is irradiated through a plurality of reflection mirrors and photographed at a plurality of image forming units; Turning off the illumination source of the image forming portion when the grid pattern image is taken from the plurality of image forming portions, When the illumination source of the image forming unit is turned off, the control unit checks whether the lattice element is the N + 1th pitch feed; Photographing the inspection object with a plurality of imaging units after turning on the first circular lamp unit or the second circular lamp unit when the lattice element is the N + 1th pitch feed; Checking whether the measurement of the inspection object is completed when a plurality of imaging units are photographed on the inspection object; When the measurement of the inspection object is completed, the controller turns on the first circular lamp portion or the second circular lamp portion, and then uses the image of the inspection object photographed from the inspection object and the grid pattern images photographed from a plurality of image forming portions to make the object three-dimensional. Three-dimensional shape measurement method characterized in that the step of calculating the shape. The method of claim 7, wherein the determining whether the N + 1 th pitch transfer is performed by returning to the step of pitch feeding the grating element is not the N + 1 th pitch transfer. Way. 8. The method of claim 7, wherein after the first circular lamp unit or the second circular lamp unit is turned on, photographing an object to be inspected with a plurality of image forming units comprises: turning on the first circular lamp unit when the lattice element is N + 1th pitch transfer; , Photographing the inspection object in each of the plurality of imaging units when the first circular lamp unit is turned on; Turning off the first circular lamp unit when the inspection object is photographed in the plurality of imaging units; Turning on the second circular lamp unit when the first circular lamp unit is turned off; Photographing the inspection object in each of the plurality of imaging units when the second circular lamp unit is turned on; 3. The method of claim 3, further comprising: turning off the second circular lamp unit when the inspection object is photographed from the plurality of imaging units. The method of claim 7, wherein the determining of whether the measurement of the inspection object is completed returns to transferring the inspection object to a measurement position when the measurement of the inspection object is not completed.