KR20070021183A - Moving Magnet Linear Sliders - Google Patents

Abstract

It provides moving magnet linear sliders that can minimize the effects of micro-vibration when driving linear motors, increase the servo gain easily, and reduce the speed ripple.

In the moving magnet type linear slider, it is comprised by the linear motor which reciprocates the table 3, and the detection means which detects the relative position of the table 3 and the fixed base 1, This linear motor is a fixed base. It is mounted in the vertical direction on the lower surface of the armature 2 and the table 3 formed by winding a multi-phase armature coil around the armature core fixed to (1), while the inner side of the linear guide and the outer side of the armature 2 It consists of the permanent magnet 4 for a field arrange | positioned through the space | gap between and. Moreover, this detection means consists of the linear scale part 5 fixed to the lower surface side of the table 3, and the sensor head part 6 attached to the upper surface side of the armature 2, and forms the center axis of this detection means. The thrust force central axis GG of the armature 2 is approximately coincided.

Moving magnet, linear slider, linear motor, detection means, permanent magnet for field

Description

Moving magnet type linear slider {MOVING MAGNET LINEAR SLIDER}

The present invention relates to a linear motor, which is used for various industrial machines such as an electric component mounting device, a semiconductor related device, or a machine tool, and is very suitable for driving the linear motion mechanism. A moving magnet type linear slider having a suction force canceling type structure in which an armature formed as a mover and an armature having an armature coil as a stator is provided.

Conventionally, moving magnet type linear sliders, which are used in various industrial machines such as electric parts mounting devices, semiconductor-related devices, or machine tools, and are very suitable for driving the linear motion mechanism, are shown in FIGS. 6 and 7. It consists of 6 is a plan view of a moving magnet type linear slider showing the prior art, and FIG. 7 is a side view of FIG.

6 and 7, reference numeral 31 denotes a fixed base, 32 denotes an armature, 33 denotes a table, 34 denotes a permanent magnet for field, 35 denotes a linear scale, and 36 denotes a sensor head. 37 is a slider, 38 is a guide rail, 39 is a stopper, 40 is a motor lead, 41 is a linear scale cable lead, 42 is a drive driver, 43 is a sensor It is a holder.

The fixed base 31 is provided with the linear guide which consists of the slider 37 and the guide rail 38 which guide and support the left and right of the table 33 arrange | positioned in parallel and freely.

Further, between the linear guides, the permanent magnet 34 for the field, which is fixed to the armature 32 fixed on the fixed base 31 and the lower surface of the table 33, and is disposed to face the armature 32 via a gap. Is installed.

The linear scale 35 is fixed to the side surface of the fixed base 31, and the sensor head portion 36 is disposed on the side surface of the table 33 via the sensor holder 43 so as to face the linear scale 35. It is fixed and the relative position of the table 33 and the fixed base 31 is detected.

In the conventional moving magnet type linear slider, since the sensor head 36 is fixed to the table 33, the linear scale cable lead 41 moves when the table is driven. In addition, when combined with the drive driver 42, motor parameters are recorded in the internal memory of the drive driver 42 (see Patent Document 1, for example).

<Patent Document 1> Japanese Patent Application Laid-Open No. 1994-054516 (FIG. 1)

Problems to be Solved by the Invention

By the way, in the conventional moving magnet type linear slider, since the linear scale is arrange | positioned at one side of the slider, the distance L between the driving force central axis GG of the armature and the central axis SS in the mounting position of the linear scale becomes long, At the time of linear motor control, the scale side is slightly shaken by the influence of the micro-vibration of the table driving, the servo gain does not rise, and the speed ripple becomes large.

SUMMARY OF THE INVENTION The present invention has been made in view of these problems, and the arrangement position of the linear scale is in line with the central axis of the driving force of the linear motor, thereby minimizing the influence of fine vibration during linear motor driving and increasing the servo gain easily. It is an object of the present invention to provide a moving magnet linear slider capable of reducing the speed ripple.

Means for solving the problem

In order to solve the said problem, invention of Claim 1 is the linear guide which consists of a slider and a guide rail which guides and supports freely the left and right of the table arrange | positioned in parallel with the fixed base, and guides the said table with respect to the said fixed base. In the linear slider provided with the linear motor which reciprocates along the longitudinal direction on a rail, and the detection means for detecting the relative position of the said table and the said fixed base, The said linear motor is a magnet fixed to the center of the said fixed base. An armature formed by winding a multi-phase armature coil around a armature core that becomes a circuit, and mounted on the lower surface of the table so as to extend in a vertical direction, while an inner surface of a linear guide provided on the left and right sides of the table and an outer surface of the armature Field magnets, which face each other with a gap between them A suction force canceling type constituted by a magnet, and the detection means is constituted by a linear scale portion fixed to the lower surface side of the table and a sensor head portion mounted on the upper surface side of the armature to detect the linear scale. In addition, the central axis of the detection means composed of the linear scale and the sensor head is made to substantially coincide with the central axis of the thrust force of the armature.

In the moving magnet type linear slider of Claim 1, the invention of Claim 2 arrange | positions the magnetic pole detector which detects the relative position of the said armature and the said permanent magnet for a field in the side surface of one of the said left and right linear guides. The table side such that one Hall device constituting the magnetic pole detector head is fixed on the fixed base side, and the other magnetic pole detector permanent magnet has the same pitch as the field permanent magnet. It is fixed on.

In the moving magnet type linear slider according to claim 2, the magnetic pole detection signal for detecting the Hall element and the linear scale signal for detecting the sensor head are connected to the same serial converter, and a serial signal is used. It converts and transfers it to the driver.

In the invention according to claim 4, in the moving magnet type linear slider according to claim 3, the series converter is placed in the sensor head.

According to the invention of claim 5, in the moving magnet type linear slider according to claim 3 or 4, a memory is provided in the sensor head or the serial converter, and the motor parameters of the linear motor are input to the memory. When the linear slider and the drive driver are connected, the motor parameters are also serialized by the serial signal conversion circuit and the signal is transmitted to the drive driver.

The invention according to claim 6 is the moving magnet type linear slider according to any one of claims 1, 3, 4, and 5, wherein an absolute value for detecting an absolute position signal of a linear motor mover is provided on the linear scale. type) It is equipped with an encoder.

According to a seventh aspect of the present invention, in the moving magnet type linear slider according to claim 1, the fixing base is provided with a mounting hole for attaching to an external device outside or inside the guide rail.

Effect of the Invention

According to the invention of claim 1, since the linear scale is disposed and fixed on the center axis of the propulsion force of the linear motor, the influence of vibration on the sensor signal can be minimized due to the influence of fine vibration during table driving. Since the gain can be improved or the speed ripple can be reduced, the positioning correction performance or the constant feed performance of the device equipped with this can be improved.

According to the invention of claim 2, by providing the magnetic pole detector, the relative position of the linear motor armature and the permanent magnet for the field can be detected at the time of servo-on, and the setup can be simplified. There is a number.

According to the invention described in Claim 3, by converting the stimulus detection signal and the linear scale signal into a serial signal and connecting the drive driver to a drive driver, large-capacity transmission is possible as compared with the conventional pulse transmission, and high-speed, high-resolution linear driving is possible. You can build a system.

In addition, according to the invention described in claim 4, since the serial converter is placed in the sensor head, the size can be reduced.

In addition, according to the invention of claim 5, the motor parameters are serially transmitted, so that the motor time constant information and the like are stored in the linear slider in advance, and the motor parameter information is input to the driver when connected to the drive driver. When the driver driver is damaged, even if it is replaced with another driver, it can be immediately returned to the same state as before.

According to the invention as set forth in claim 6, by setting the signal output form of the linear scale as an absolute signal, the home position return operation from the surface of a machine tool or the like is performed without requiring the home position return operation at the time of power-on. It is suitable for the use that affects.

According to the invention as set forth in claim 7, the slider width dimension can be designed small by processing the user's mounting hole into an empty space.

1 is a plan view of a moving magnet type linear slider showing a first embodiment of the present invention.

2 is a side view of FIG. 1.

Fig. 3 is a perspective view showing the form of a circuit for processing a linear scale signal or the like employed in the present invention, (a) shows a sensor head for linear scale, and (b) shows a case of a serial converter.

4 is a plan view of a moving magnet type linear slider showing a second embodiment of the present invention.

5 is a side view of FIG. 4.

Fig. 6 is a plan view of a moving magnet type linear slider showing the prior art.

7 is a side view of FIG. 6.

<Description of the code>

1 fixed base

2 armature

3 table

4 Permanent magnet for field

5 linear scales

6 sensor head

7 slider

8 guide rail

9 stopper

10 motor leads

11 linear scale leads

12 driven driver

13 series conversion circuit

14 Memory Integrated Circuits (ICs)

15 fixing holes

16 sensor holder

17 magnetic yoke

20 stimulation detector magnet

21 stimulation detector head

22 stimulation detector leads

23 stimulation detector holder

31 fixed base

32 armature

33 tables

34 Permanent Magnet for Field

35 linear scale

36 sensor head

37 slider

38 guide rail

39 stopper

40 motor leads

41 linear scale cable leads

42 driven driver

43 sensor holder

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

<Example 1>

1 is a plan view of a moving magnet type linear slider according to a first embodiment of the present invention, and FIG. 2 is a side view of FIG.

In the figure, reference numeral 1 denotes a fixed base, 2 denotes an armature, 3 denotes a table, 4 denotes a permanent magnet for field, 5 denotes a linear scale, 6 denotes a sensor head, and 7 denotes a Slider, (8) guide rail, (9) stopper, (10) motor lead, (11) linear scale cable lead, (12) drive driver, (15) mounting hole, ( 16 is a sensor holder, and 17 is a magnetic yoke.

The characteristics of this invention are as follows.

That is, the moving magnet type linear slider is basically a linear guide including a slider 7 and a guide rail 8 for guiding and supporting the left and right sides of the table 3 arranged in parallel to the fixed base 1 freely. And a linear motor for reciprocating the table 3 along the long direction on the guide rail 8 with respect to the fixed base 1, and detection means for detecting the relative position of the table 3 and the fixed base 1. The linear motor comprises an armature 2 formed by winding a multi-phase armature coil around an armature core that is a magnetic circuit fixed to the center of the fixed base 1, and a lower surface of the table 3. Permanent magnets for the field (4) which are mounted so as to extend in the vertical direction and are disposed to face each other via a gap between the inner surface of the linear guide provided on the left and right sides of the table (3) and the outer surface of the armature (2). Composed by) A point (suction force offset-like structure).

The detection means includes a linear scale portion 5 fixed to the lower surface side of the table 3 and a sensor head portion mounted on the upper surface side of the armature 2 to detect the linear scale 5. The central axis of the detection means composed of the linear scale 5 and the sensor head 6 coincides substantially with the driving force central axis GG of the armature 2.

In addition, in the present embodiment, when the user processes two rows of holes for fixing the linear slider to the device in parallel to the fixed base 1, the mounting holes 15 are provided on the outside or the inside of the guide rail 8. In particular, with respect to the mounting hole 15 provided inside the guide rail 8, the width of the linear slider can be reduced by making the structure to be machined into the empty space between the armature and the linear guide.

In addition, four stoppers 9 are provided at the stroke end of the slider (front and rear ends of the linear guide) to stop the overrun and to match the functions of the carrying handle.

3 is a form of the circuit which processes the linear scale signal etc. which this invention employ | adopts, (a) is a perspective view which shows the sensor head for linear scales, and (b) shows a series converter. In Fig. 3, reference numeral 13 denotes a series conversion circuit, and 14 denotes a memory IC.

The sensor head 6 incorporates a serial conversion circuit 13 for converting a stimulus detection signal, a scale signal, or the like of a linear motor into a serial signal. In addition, when the sensor head 6 inputs the motor parameters of the linear motor with the memory 14 and the linear slider and the drive driver 12 are connected, the motor parameters are also supplied to the serial signal conversion circuit 13. By serialization, a signal is transmitted to the drive driver 12.

Next, the operation will be described.

As shown in Figs. 1 and 2, when the linear slider is conducted from an external power source not shown by the armature 2 of the linear motor, the table 3 moves along the long direction on the guide rail 8 with respect to the fixed base 1; Reciprocate At this time, when the relative position of the table 3 and the fixed base 1 is detected by the sensor head 6 provided on the fixed base 1 side with respect to the linear scale 5 provided on the table 3 side, As shown in FIG. 3, the serial conversion circuit 13 inside the sensor head 6 serially converts the linear scale signal, the stimulus signal, and the motor parameters stored in the memory IC 14 to convert the drive driver ( 12) Communication is transmitted to the side. The high precision positioning of the linear motor is performed by the drive driver 12 based on the signal and the motor parameter transmitted to the drive driver 12 side. This configuration enables a large capacity transfer as compared to the conventional pulse transfer, and a high speed and high resolution linear drive system can be obtained. In addition, the minimum positioning resolution can be improved by 10 times compared with the conventional pulse heat transfer.

Accordingly, the moving magnet type linear slider according to the first embodiment of the present invention employs a linear motor of a suction force canceling structure in which the field portion is disposed opposite to both sides of the armature provided on the fixed base via a gap. Since the linear scale is arranged and fixed on the central axis of the armature of the armature, it is possible to minimize the influence of vibration on the sensor signal due to the influence of the micro-vibration during table driving, and to improve the servo gain or reduce the speed ripple. Can be enabled. As a result, it is possible to improve the positioning correction performance or the constant feed performance of the device equipped with such a linear slider.

Further, by arranging all kinds of lead wires such as the motor lead 10 and the linear scale cable lead 11 from the mover on the stator side, the cable bear can be removed from the moving coil type.

<Example 2>

4 is a diagram showing a configuration of a second embodiment.

In the figure, reference numeral 20 denotes a stimulus detector magnet, 21 a stimulus detector head, 22 a stimulus detector lead, and 23 a stimulus detector holder.

The second embodiment differs from the first embodiment in that the magnetic pole detector for detecting the relative position of the armature 2 and the permanent magnet 4 for the field is arranged on one side of the left and right linear guides. In addition, the table 3 so that one Hall element constituting the magnetic pole detector head 21 has the same pitch on the fixed base side 1 as the other magnetic pole detector permanent magnet 20 with the field permanent magnet 4. It is fixed to the side.

The stimulus detection signal detected from the stimulus detector head 21 is serially signaled by the serial converter 13 together with the scale signal output from the sensor head 6 of the linear scale, connected to the drive driver 12, and communicated. Is sent.

Therefore, in the second embodiment, the magnetic pole detector for performing the initial magnetic pole detection is provided on the slider side opposite to the linear scale, which also fixes the detection side (hall element) to the fixed base and the magnet for the magnetic pole sensor to the table. In this configuration, the relative position between the armature and the permanent magnet for the field can be detected at the time of servo-on, and the setup can be simplified.

In the linear scale described in this embodiment, it is preferable to use an absolute type encoder that detects the absolute position signal of the mover. Thus, the home position return operation is required when the power is turned on. You can provide a linear slider that is easy to operate.

As described above, the present invention enables a high tact (frequency) operation by having a structure that does not use a member having a lead wire on the movable side, so that high speed response is required, for example, and drive duty is required. The present invention can also be applied to a bonder, which is an application of a high semiconductor component manufacturing apparatus. In addition, it utilizes the smoothness of constant speed feed and is very suitable for the feed shaft of the high-precision machine.

Claims (7)

A linear guide comprising a slider and a guide rail for guiding and supporting the left and right sides of the table arranged in parallel with the fixed base freely; a linear motor for reciprocating the table along the long direction on the guide rail with respect to the fixed base; A linear slider comprising detection means for detecting a relative position of the table and the fixed base, The linear motor is mounted so as to extend in the vertical direction on the lower surface of the table with an armature formed by winding a multi-phase armature coil around an armature core which is a magnetic circuit fixed at the center of the fixed base, and the left and right sides of the table. It is a suction force offset type constituted by a permanent magnet for field, which is disposed between the inner surface of the linear guide and the outer surface of the armature via a gap, The detecting means comprises a linear scale fixed to the lower surface side of the table, and a sensor head portion mounted on the upper surface side of the armature to detect the linear scale, and to the linear scale and the sensor head. A moving magnet type linear slider, characterized in that the central axis of the detecting means is substantially coincident with the central axis of the thrust force of the armature. The method of claim 1, The magnetic pole detector for detecting the relative position of the armature and the permanent magnet for the field is arranged on one side of the left and right linear guides, and one hall element constituting the magnetic pole detector head is placed on the fixed base side. And a moving magnet type linear slider characterized in that the other magnetic pole detector permanent magnet is fixed to the table side so as to have the same pitch as the field permanent magnet. The method of claim 2, A moving magnet type linear slider, characterized in that the magnetic pole detection signal detected by the hall element and the linear scale signal detected by the sensor head are connected to the same serial converter, and converted into a serial signal for connection to a drive driver. The method of claim 3, And a moving magnet type linear slider, wherein the serial converter is inserted into the sensor head. The method according to claim 3 or 4, When a memory is installed in the sensor head or the serial converter, inputs a motor parameter of a linear motor to the memory, and connects the linear slider and a drive driver, the motor parameter is also serialized by the serial signal conversion circuit. And a moving magnet type linear slider characterized in that a signal is transmitted to a drive driver. The method of claim 1, A moving magnet type linear slider, wherein the linear scale includes an absolute type encoder that detects an absolute position signal of a linear motor mover. The method of claim 1, A moving magnet type linear slider, wherein the fixing base is provided with a mounting hole for attaching to an external device outside or inside the guide rail.

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