KR20060044265A - Device for manufacturing organic electroluminescent display device - Google Patents

Abstract

The present invention relates to an apparatus for manufacturing an organic electroluminescent display device capable of improving alignment of a substrate and a mask.

An apparatus for manufacturing an organic electroluminescent display device of the present invention comprises: a chamber having a substrate on which a predetermined deposit is deposited; A mask positioned under the substrate to mask a predetermined region of the substrate; And a light unit positioned below the mask and attached to the wall of the chamber to supply a light source when the mask and the substrate are aligned.

Description

Apparatus for manufacturing organic electroluminescent display device {APPARATUS FOR FABRICATING ORGANIC ELECTRO LUMINESCENCE DISPLAY DEVICE}             

1 is a cross-sectional view showing an organic electroluminescent cell of a conventional organic electroluminescent display device.

2 is a view showing an organic material deposition apparatus of a conventional organic electroluminescent display device.

3 is a view for explaining the operation of the organic material deposition apparatus shown in FIG.

4 is a diagram illustrating an apparatus for manufacturing an organic light emitting display device according to an exemplary embodiment of the present invention.

FIG. 5 is a schematic view of an organic electroluminescent display device formed using the manufacturing apparatus shown in FIG. 4.

<Explanation of symbols for the main parts of the drawings>

2: anode electrode 10: organic light emitting layer

12: cathode electrode 22,122: vacuum chamber

24, 124: container 28, 128: substrate                 

30, 130: light emitting organic material 34, 134: spout

36, 136: heater

The present invention relates to an organic electroluminescent display device, and more particularly, to an apparatus for manufacturing an organic electroluminescent display device capable of improving alignment of a substrate and a mask.

Recently, various flat panel display devices that can reduce weight and volume, which are disadvantages of cathode ray tubes, have emerged. Such flat panel displays include a liquid crystal display, a field emission display, a plasma display panel, and an organic electroluminescence display. Etc.

Among these, organic EL display devices are self-luminous devices that emit phosphors by recombination of electrons and holes, and are classified into inorganic ELs using inorganic compounds and organic ELs using organic compounds. Such an EL display device has an advantage that the response speed is as fast as that of a cathode ray tube compared to a passive light emitting device requiring a separate light source such as a liquid crystal display device. In addition, the EL display element has many advantages such as low voltage driving, self-luminous, thin film type, wide viewing angle, fast response speed, high contrast, and the like, and is expected to be the next generation display device.                         

1 is a cross-sectional view showing a general organic EL cell structure for explaining the light emission principle of an organic EL display element. The organic EL cell has an organic light emitting layer 10 positioned between the anode electrode 4 and the cathode electrode 12, and the organic light emitting layer 10 includes an electron injection layer 10a, an electron transport layer 10b, and a light emitting layer 10c. ), A hole transport layer 10d, and a hole injection layer 10e.

When a voltage is applied between the anode electrode 4 and the cathode electrode 12, electrons generated from the cathode electrode 12 move toward the light emitting layer 10c through the electron injection layer 10a and the electron transport layer 10b. In addition, holes generated from the anode electrode 4 move toward the light emitting layer 10c through the hole injection layer 10d and the hole transport layer 10e. Accordingly, in the light emitting layer 10c, light is generated by collision and recombination of electrons and holes supplied from the electron transport layer 10b and the hole transport layer 10d, and the light is emitted to the outside through the anode electrode 4. To display an image. The luminescence brightness of such an organic EL display element is not proportional to the voltage across the element but proportional to the supply current, so that the anode electrode 4 is usually connected to a constant current source.

These layers of the conventional organic EL display element are formed by a vacuum deposition method using a vapor deposition apparatus or the like.

2 is a view showing a conventional deposition apparatus.

Referring to FIG. 2, a conventional deposition apparatus includes a vacuum chamber 22, a container 24 located on a bottom surface of the vacuum chamber 22, and a container 24 containing a deposition material 30, and the container 24. A heater 36 for heating, a substrate 28 on which the deposition material is to be deposited, and a mask 45 for masking a desired area of the substrate 28 are provided.                         

The vacuum chamber 22 is in a vacuum state so that foreign matter does not flow from the outside, and the pressure inside is adjusted.

The container 24 may be sequentially installed at a bottom of the vacuum chamber 22, for example, a plurality of organic materials containing red (R), green (G), and blue (B) organic materials spaced apart at predetermined intervals. Each of the vessels 24 has a spout 34 on the upper side, through which the organic material that implements red (R), green (G) and blue (B) on the substrate 28 30 is deposited. At this time, the container 24 is wrapped with the heaters 36 and by the heaters 36 the container 24 is heated to a temperature of approximately 300 ~ 600 ℃ to accommodate the organic material 30 contained in the container 24 Is sublimated.

Mask 45 is positioned below substrate 28 to allow deposition material to be formed in a desired region on substrate 28.

Here, the mask 45 positioned in the chamber 22 is provided with a first alignment mark 27 formed in a hole shape, and the substrate 28 has a second alignment corresponding to the first alignment mark 27. The mark 25 is provided. The first and second alignment marks 27 and 25 are aligned as shown in FIG. 3 to align the mask 45 and the substrate 28. Thereafter, the positions of the first and second alignment marks 27 and 25 are determined using the charge coupled device (CCD) camera 55 positioned above the chamber 22. However, since there is no separate lighting device under the chamber 22, there is a problem that the CCD camera 55 does not easily check whether the first and second alignment marks 27 and 25 are correctly positioned.

Accordingly, it is an object of the present invention to provide an apparatus for manufacturing an organic electroluminescent display device capable of improving alignment of a substrate and a mask.

In order to achieve the above object, an apparatus for manufacturing an organic electroluminescent display device according to the present invention includes a chamber having a substrate on which a predetermined deposit is deposited; A mask positioned under the substrate to mask a predetermined region of the substrate; And a light unit positioned below the mask and attached to the wall of the chamber to supply a light source when the mask and the substrate are aligned.

A first alignment mark formed on the mask; And a second alignment mark corresponding to the first alignment mark and formed on the substrate, wherein the light unit is positioned under the first and second alignment marks corresponding to each other.

The light unit includes a lamp for generating the light; A support mounted to the wall of the chamber; A connection part positioned between the support part and the lamp; And a link part positioned between the connection part and the support part to move the lamp and the connection part in a predetermined direction.

Other objects and features of the present invention in addition to the above object will be apparent from the description of the embodiments with reference to the accompanying drawings.

4, a preferred embodiment of the present invention will be described.                     

4 is a diagram illustrating an apparatus for manufacturing an organic light emitting display device according to an exemplary embodiment of the present invention.

The vapor deposition apparatus shown in FIG. 4 is located at the bottom of the vacuum chamber 122, the inside of the vacuum chamber 122, the container 124 containing the deposition material 130 and the like, and for heating the container 124. The heater 136, the substrate 128 on which the deposition material is to be deposited, the mask 145 masking a desired area of the substrate 128, and the light unit mounted on the inner wall of the chamber 22 and located under the mask. 150.

The vacuum chamber 122 is in a vacuum state so that foreign matter does not flow from the outside, the pressure inside is adjusted.

The container 124 may be installed on the bottom surface of the vacuum chamber 122, for example, a plurality of organic materials containing red (R), green (G), and blue (B) spaced apart at predetermined intervals. Each of the vessels 124 has a spout 134 on the upper side, and through the spout 134 is an organic material that implements red (R), green (G) and blue (B) on the substrate 128 130 is deposited. At this time, the container 124 is wrapped with the heaters 136 and by the heaters 136 the container 124 is heated to a temperature of approximately 300 ~ 600 ℃ and the organic material 130 contained in the container 124 Is sublimated.

Mask 145 is positioned below substrate 128 to allow deposition material to be formed in a desired region on substrate 128. To this end, at least one hole-aligned first align mark 127 is disposed on one side of the mask 145, and a second formed on one side of the substrate 128 to correspond to the first align mark 127. The alignment mark 125 is provided.                     

The first and second alignment marks 127 and 125 are aligned so that the mask 145 is aligned below the substrate 128.

The light unit 150 includes a lamp 152 for generating light, a support part 154 mounted on the wall surface 122a of the chamber 122, a connection part 156 positioned between the lamp 152 and the support part 154, It is provided between the connecting portion 156 and the support 154 and having a link portion 158 for allowing the lamp 152 and the connecting portion 156 to move up, down, left and right, and applied from a voltage source such as a power source or a battery from the outside. It can be driven by the voltage being.

The light unit 150 is positioned below the mask 145 to emit light when the first and second alignment marks 127 and 125 are positioned. Accordingly, the CCD camera 155 can easily determine the positions of the first and second alignment marks 127 and 125, thereby easily positioning the first and second alignment marks 127 and 125. . The light unit 150 may be folded to the wall surface 122a of the chamber 122 when the mask 145 and the substrate 128 are aligned and then a deposition process is performed, and at the wall surface 122a. Detachable may be possible. Meanwhile, as the lamp 152 used in the present invention, a known halogen lamp, a light emitting diode (LED), or the like may be used.

As described above, the apparatus for manufacturing the organic light emitting display device according to the present invention is mounted on the wall surface 122a of the chamber 122 and the light unit 150 for supplying a light source when the substrate 128 and the mask 145 are aligned. ). Accordingly, the CCD camera 155 can easily determine the positions of the first and second alignment marks 127 and 125, thereby easily positioning the first and second alignment marks 127 and 125. .                     

5 is a diagram schematically illustrating an organic light emitting display device formed using a deposition apparatus according to an embodiment of the present invention.

In the organic EL display device illustrated in FIG. 5, the first electrode (or anode electrode) 104 and the second electrode (or cathode electrode) 112 are formed on the substrate 102 in a direction crossing each other.

A plurality of anode electrodes 104 are spaced apart at predetermined intervals on the substrate 102. On the substrate 102 on which the anode electrode 104 is formed, an insulating film 106 having an opening for each EL cell E region is formed. On the insulating layer 106, a partition wall 108 for separating the organic light emitting layer 110 and the cathode electrode 112 to be formed thereon is positioned. The partition 108 is formed in a direction crossing the anode electrode 104 and has an inverted taper structure in which the upper end portion has a wider width than the lower end portion. On the insulating layer 106 on which the partition 108 is formed, the organic light emitting layer 110 and the cathode electrode 112 made of an organic compound are sequentially deposited on the entire surface. The organic light emitting layer 110 is formed by stacking a hole transporting layer, a light emitting layer, and an electron transporting layer on an insulating film.

As described above, the manufacturing apparatus of the organic light emitting display device according to the embodiment of the present invention includes a light unit which is mounted on the wall of the chamber and located under the mask to supply a light source when the substrate and the mask are aligned. . Accordingly, the CCD camera can easily determine the position of the first alignment mark of the mask and the second alignment mark of the substrate, thereby improving the alignment of the mask and the substrate.                     

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (3)

A chamber having a substrate on which a predetermined deposit is deposited; A mask positioned under the substrate to mask a predetermined region of the substrate; And a light unit positioned below the mask and attached to a wall of the chamber to supply a light source upon alignment of the mask and the substrate. The method of claim 1, A first alignment mark formed on the mask; A second alignment mark corresponding to the first alignment mark and formed on the substrate; And the light unit is positioned below the first and second alignment marks corresponding to each other. The method of claim 1, The light unit A lamp for generating the light; A support mounted to the wall of the chamber; A connection part positioned between the support part and the lamp; And a link part positioned between the connection part and the support part to move the lamp and the connection part in a predetermined direction.

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