KR20050120841A - The vacuum suction ultrasonic wave washing method and its equipment of a detailed hole nozzle - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning method and apparatus capable of effectively removing foreign matters and contaminants stuck inside precision parts such as nozzles penetrated through fine holes.

To this end, the present invention provides a washing tank 1 and an ultrasonic diaphragm 2 disposed below the washing tank 1, and a pallet 5 to which to-be-cleaned objects 6a, 6b, 6c of the nozzles penetrated through the fine holes are attached. The suction tube 7a, 7b, 7c attached to the tip of the object to be cleaned 6a, 6b, 6c described above and the inside of the fine hole nozzle of the object to be cleaned described above can be sucked into the ultrasonic cleaning device composed of The vacuum which integrated the vacuum suction system which consists of the trap 10 which collect | recovers the washing | cleaning liquid provided between the vacuum pump 11 and the suction tube 7 which can be connected, and the pipe 14 which vacuum-reduces the vacuum in the washing tank 1. It is a suction ultrasonic cleaning device. In the state where the vacuum valve 13 is opened and the pressure inside the washing tank 1 is reduced in pressure, the washing liquid 3 is sprayed from the washing liquid supply port 16 until the lower part of the object to be cleaned 6a, 6b, 6c is immersed. After the introduction was free, the vacuum valve 13 was closed, the cleaning liquid 3 was filled up to the cleaning liquid surface 4, and the air collected in the nozzles of the objects to be cleaned 6a, 6b, and 6c was removed. Then, the ultrasonic wave is oscillated, and the cleaning liquid 3 which radiates the ultrasonic wave from the ultrasonic diaphragm 2 is forcibly flowed into the micropore nozzle by the force of sucking up from the lower portion to the upper portion by vacuum suction, thereby producing a fine hole. A vacuum suction ultrasonic cleaning method and apparatus for microporous nozzles characterized by cleaning foreign substances and contaminants adhered to the nozzle inner surface.

Description

The vacuum suction ultrasonic wave washing method and its apparatus of the detailed hole nozzle

The present invention relates to an ultrasonic cleaning method and apparatus capable of effectively removing foreign matters and contaminants adhering to the inside of precision parts such as nozzles penetrated by fine holes, which are to be cleaned, and more particularly, to a diameter of several mm or less, For example, it is possible to clean the inside of a hollow hole having a fine hole of 20 m to 200 m or less and having a narrow penetration from several mm to several cm. Examples of the object to be cleaned of the present invention include For example, a ferrule used as an optical connector part, or a precision part having a fine hole penetrated such as a needle nozzle or a precision nozzle for an adhesive dispenser and an inkjet nozzle, which are used for assembly of a part such as a semiconductor, a liquid crystal or an organic EL. The vacuum which is very suitable and can exert an excellent effect and can wash foreign substances and contaminants which stuck to the inside of the micropores such as precision parts The ultrasonic cleaning method combining system and to the device.

In order to clean the inside of a nozzle, such as a penetrating hole of a micropore, to be cleaned of this kind, a technique is known in the art for cleaning using ultrasonic waves, and in general, ultrasonic cleaning liquids stored in ultrasonic cleaning tanks and ultrasonic cleaning tanks and ultrasonic waves disposed in cleaning liquids are known. In the ultrasonic cleaning apparatus composed of the oscillation diaphragm, a plurality of objects to be cleaned are immersed in a cleaning case in a cleaning liquid, and the ultrasonic waves are radiated and washed.

In order to increase the cleaning ability, various cleaning liquids such as pure water, alkaline solutions, organic solvents such as acetone, hydrocarbon solvents, and alcohols have been studied as appropriate cleaning liquids depending on the type of foreign matter or contaminants stuck inside the micropores. In addition, with respect to any cleaning liquid, the cleaning power is also enhanced by increasing the cavitation of the ultrasonic cleaning by using the cleaning liquid that degass the air dissolved in the cleaning liquid.

In addition, the precision cleaning method using a high frequency of 1 MHz or more so as to increase the precision cleaning ability by combining or overlapping the ultrasonic oscillation frequency with a low frequency of 25 kHz to 40 kHz and a high frequency of several hundred kHz and further reducing the cavity It is used.

Instead of cleaning the object to be cleaned randomly in the cleaning case, the cleaning pallet is placed in the upper opening of the trapezoid-shaped metal scaffold with the upper and lower portions of the cleaning pallet arranged so that the micro holes of the object are vertically aligned. It has also been attempted to increase the cleaning ability by immersing in water, so that the ultrasonic waves concentrate on the object to be cleaned.

In the case where the object to be cleaned has penetrated and not penetrated, air lumps are generated inside the micropores when the object to be immersed in the solution makes it difficult to transmit ultrasonic radiation, and the ultrasonic cleaning ability is remarkable. It is known that the micropores of the object to be cleaned are vertically immersed in the cleaning solution by half dipping in the cleaning solution, and then the inverted object is inverted and the wet side is immersed in the cleaning solution. There has also been proposed a method of removing and washing air masses.

In the present invention, when the plurality of cleaning objects of the fine pore nozzle are immersed in the cleaning liquid and ultrasonically cleaned, the outer surface of the fine pore nozzle is cleaned, but the cleaning and removal of foreign substances and contaminants on the inner surface of the fine pore nozzle are sufficiently cleaned. In particular, when the inner diameter of the fine hole nozzle is several mm or less, especially 20 m to 300 m or less, almost no cleaning is possible.

The reason for this is that when a normal ultrasonic oscillation frequency of 25 kHz is used, there is a relationship of c / f between the frequency f, the wavelength, and the sound velocity c of the ultrasonic wave. For example, when the cleaning liquid is water, the sound velocity is about 1540. m / s, and the wavelength of the ultrasonic waves is about 60 mm, so the ultrasonic waves radiated in the cleaning liquid do not enter the middle of the fine hole nozzles. Although the nozzle outer surface can be cleaned, the inner surface is hardly washed. Furthermore, in the case where the ultrasonic oscillation frequency is combined or overlapped with a low frequency of 25 kHz to 40 kHz and a high frequency of several hundred kHz, the cleaning power is increased several times, or the cleaning power is increased several times. Since the inside of the air hole exists in the micropores, especially the object to be cleaned at 200 m or less, the ultrasonic cleaning power is weakened, and the degassed cleaning liquid alone cannot sufficiently remove and remove foreign substances or contamination on the inner surface of the micropore nozzle.

By making the frequency of the ultrasonic wave 1 MHz or more, the method of shortening the wavelength of the ultrasonic wave to generate a small cavity and inserting it into the middle of the micropore nozzle has a small amplitude of the ultrasonic wave, a small impact force for cleaning, and a high cleaning ability. Since it becomes small, the foreign matter and contamination adhered to the inner surface of the micropore nozzle cannot be sufficiently washed out.

Furthermore, if foreign matter or contaminants adhere firmly to the inner surface of the micro-pore nozzle, and the nozzle is clogged with foreign matter or contaminants, for example, if the nozzle tip is blocked and the lower end is not clogged, Since air bubbles exist inside the nozzles and bubbles remain between the cleaning liquid and the adhered foreign matter, the vibration force of the ultrasonic wave is absorbed to reduce the cleaning effect. After aligning and inserting a plurality of nozzles into the upper part of the trapezoid-shaped metal scaffold with the upper and the lower part, the cleaning jig is immersed in the cleaning liquid so that the ultrasonic waves can concentrate on the object to be cleaned and improve the cleaning ability. In addition, there arises a problem that the cleaning liquid does not sufficiently pass through the micropores.

Ultrasonic cleaning is performed by immersing the micropore of the object to be vertical in half and immersing it in the cleaning solution.Then, the object is inverted and the wet side is immersed in the cleaning solution to remove air pockets inside the micropore of the object. When the cleaning process is complicated, and foreign matters or contaminants are firmly adhered to the inner surface of the fine hole nozzles, and the minute holes of the nozzles are almost filled with foreign matters or contaminants, the air mass inside the nozzles immersed in the cleaning liquid Is not easily removed, and an air mass remains between the cleaning liquid and the adherent foreign matter, so as to absorb the vibration force of the ultrasonic wave, thereby reducing the cleaning effect.

Due to the above reasons, when the inner diameter of the micropore nozzle is less than 1mm, especially 20um to 200um, the micropore is almost closed with foreign matter or contaminants, and the air mass cannot be removed. Since the irradiated cleaning liquid cannot pass through the inside, it is considered that the cleaning is almost impossible. There is a need for a new ultrasonic cleaning method and apparatus for the microporous nozzle.

EMBODIMENT OF THE INVENTION Embodiment of this invention is described in detail below, referring an accompanying drawing for clarifying the characteristic and advantage with respect to the said to-be-cleaned object of this invention.

 Fig. 1 shows a schematic diagram showing the overall configuration of an ultrasonic cleaning device incorporating a vacuum suction system as one preferred embodiment of the present invention. From the cleaning tank 1 and the pallet 5 for installing a plurality of nozzles 6a, 6b, 6c, etc., which penetrate into the micropore as the object to be cleaned and the ultrasonic vibrating plate 2 disposed at the bottom of the cleaning tank 1; When the suction tube 7a, 7b, 7c is provided in the ultrasonic cleaning apparatus comprised at the front-end | tip of the to-be-cleaned object 6a, 6b, 6c of the above-mentioned fine hole nozzle, the vacuum which can suck the inside of a fine hole nozzle The vacuum suction ultrasonic cleaning device which integrates the trap 10 which collect | recovers the washing | cleaning liquid provided between the pump 11 and the suction tube 7, and the vacuum suction system comprised from the vacuum pressure reduction in the washing tank 1 is provided. In the example of FIG. 1, although the installation number of the to-be-cleaned object is shown in the pallet 5 only two or three, it is preferable that it is about 5-10 pieces or more as needed.

A preferable washing method is to introduce the washing liquid 3 into the shower state from the washing liquid supply port 16 until the lower part of the object to be cleaned is immersed in the washing tank 1 by opening the vacuum valve 13. Then, after closing the vacuum valve 13, the cleaning liquid 3 is filled to the cleaning liquid surface 4 so that the objects to be cleaned 6a, 6b and 6c are immersed, and then the objects to be cleaned 6a, 6b and 6c. After removing the air mass contained in the nozzle of the nozzle, the ultrasonic wave is oscillated, and the cleaning liquid 3 which radiates the ultrasonic wave from the ultrasonic diaphragm 2 is sucked from the lower part to the upper part by the vacuum suction, and thus the fine hole. It is a method to clean the foreign matter and contaminants stuck to the inner surface of the fine hole nozzle by flowing inside the nozzle. Moreover, although it can wash, regardless of the top and bottom of the to-be-cleaned object provided in a pallet, when the shape of the hole of a to-be-cleaned object is conical, it is more preferable that a washing | cleaning liquid flows from the larger one to the smaller one.

In the object to be cleaned, the shape of the object to be cleaned itself is not specified. Moreover, the shape of the penetrating fine hole of the object to be cleaned may be a conical shape such as a conical shape (funnel shape), a cylindrical shape, a hexahedral shape, or the like, or when the liquid is immersed in the cleaning liquid, an air mass is generated. good. Fig. 2, Fig. 3 and Fig. 4 are schematic views of the ferrule of the optical component, the needle nozzle for the dispenser, the multi-discipline needle nozzle, and the foreign matter or contaminants therein, and the air lump when immersed in the cleaning liquid. Indicates. It is preferable to have a small hole, a fine hole, and a fine hole, such as a fine hole nozzle as the object to be cleaned, and specifically, one or more nozzle holes having a diameter of about 3 mm or less, and usually about 1 mm or less And dispenser nozzles having one or more micropores, in particular, having a diameter of 20 m to 200 m or less. As the inner diameter of the micropores is smaller or the inside is filled with foreign matter or contaminants, the object to be cleaned tends to have an air mass inside.

In the mounting method of the suction tube 7a by the shape of the said to-be-cleaned object 6, as shown in FIG. 5, when there is one fine hole nozzle 6 of a cleaning object, the tube which vacuum-sucks is inserted, It is preferable to provide a packing for enhancing the airtightness therebetween on the inner surface of the vacuum suction tube end. On the other hand, when the fine hole nozzle 6 of the cleaning object branches as shown in Fig. 6, the suction tube end and the suction tube end are inserted so as to insert the suction tube into the fine hole nozzle of the cleaning object and vacuum suction the upper portion of the fine hole nozzle. It is preferable to provide the packing which improves airtightness with a pallet.

As shown in Fig. 7, in the case of the appearance of a complicated to-be-cleaned object such that the vacuum seal is not sufficiently obtained by the installation of the pallet 5 and the to-be-cleaned object, the pallet 5 to which the to-be-cleaned object has been previously attached in the washing tank is The inside of the washing tank 1 can be vacuum-pressure-reduced through the packing 21 between the lids 20, and the washing | cleaning liquid 3 is introduce | transduced from the washing | cleaning liquid supply opening 12, and the to-be-cleaned object ( After filling the cleaning liquid 3 to the cleaning liquid surface 4 so that 6a, 6b, and 6c and the pallet 5 are completely immersed, the lid 20 is opened and the pallet 5 is placed on the liquid surface as shown in FIG. It is preferable to move, attach the suction tubes 7a, 7b, and 7c to the suction tube 7a, 7b, and 7c at the upper end of the fine hole nozzles 6a, 6b, and 6c of the object to be cleaned, and perform ultrasonic cleaning while vacuum suction. Do.

{Example 1}

The zirconia ferrule used for the optical connector as shown in FIG. 2 was selected as the to-be-cleaned object, and the inside washing | cleaning was tested. The dimension of the used ferrule is 2.5 mm of external shape, 126 m of internal diameters, and 15 mm in length. After performing the polishing process of the ferrule inner diameter, what was left to stand for 24 hours was used. Foreign substances or contaminants inside the ferrule are abrasives polished to the inside and polished debris. As shown in FIG. 1, after the ten ferrules are installed on the pallet 5, as shown in FIG. 1, the vacuum suction tubes are not shown in FIG. 1. Using suction tubes 7a, 7b, 7c, and the like, the upper portions of the ten ferrules were provided by the sealing method of the packing 19 shown in FIG. 5. Then, the pallet 5 was installed in the upper part of the washing tank 1 so that it might be covered with a lid. The vacuum pump 11 opened the vacuum valve 13 via the vacuum pressure reduction pipe 14 via the recovery trap 10 of the washing | cleaning liquid, and vacuum-reduced the inside of the washing tank 1. At the same time, vacuum decompression was also carried out from the hole of the ferrule to be cleaned. The washing tank 1 used the thing of the internal volume of diameter 20cm and depth 10cm. After the inside of the washing tank 1 is vacuum-reduced to 0.1 MPa or less using the diaphragm type vacuum pump 11, the cleaning solution of alkaline solution is opened from the supply port 16, and the to-be-cleaned object can be immersed. Until introduced. At that time, it was observed that the cleaning liquid was sucked into the suction tube from the inner hole of the ferrule of the object to be cleaned. Then, the vacuum valve 13 was closed and the washing | cleaning liquid was supplied to the vicinity of the pallet so that it might become the washing | cleaning liquid surface of FIG. As the ultrasonic cleaning condition, a vacuum suction ultrasonic cleaning for 5 minutes was performed while supplying the cleaning liquid as much as the cleaning liquid surface was reduced to an oscillation output of 600 W, a frequency of 25 kHz, and a cleaning liquid temperature of 25 ° C. Thereafter, the object to be cleaned was dried after rinsing with pure water and washing with methanol. Afterwards, the inside of the ferrule, which was to be cleaned, was observed, and foreign substances and contaminants were removed to obtain a cleaning yield of 98% to 100%. By sucking the inside of the ferrule, it was found that the cleaning liquid radiated with ultrasonic waves from the ultrasonic diaphragm flows into the hole of the ferrule inner diameter and can be cleaned.

{Example 2}

In order to compare the said Example 1 of this invention with the conventional washing | cleaning method, the washing | cleaning case which stored ten ferrules was immersed in the washing tank which put the washing | cleaning liquid of alkaline solution as washing | cleaning conditions, and the oscillation output of 600W, 25kHz of The frequency and the temperature of the cleaning liquid were also 25 ° C, and ultrasonic cleaning was performed for 5 minutes, followed by rinsing of water, methanol washing and drying in the same manner as described above. Thereafter, the inside of the ferrule, which is to be cleaned, was observed, and in almost all cases, foreign matter and contaminants remained, and the cleaning yield was 0%. For this reason, the ultrasonic cleaning time was made into 5 to 30 minutes, and the above test was done, but the yield of 10 to 30% was obtained. In the prior art washing | cleaning, it turned out that product ratio is low and washing time becomes long, and it turned out that the washing | cleaning of Example 1 of this invention has high washing | cleaning ability, and can wash in a short time.

{Example 3}

The needle nozzle for dispensers as shown in FIG. 3 was selected as a to-be-cleaned object, and after wash | cleaning using the silicone grease, the washing | cleaning of the silicone grease which remained inside the needle nozzle was tested. The used needle nozzles had an external shape of 1.5 mm, an inner diameter of 1.1 mm, and a length of 20 mm. After using silicone grease, it was left to stand for 24 hours, and the thing inside the needle nozzle almost filled with grease was used as a to-be-cleaned object. The hydrocarbon solution was used for the washing | cleaning liquid (3). As in the first embodiment, after the ten needle nozzles 6a, 6b, 6c and the like are installed on the pallet 5 on the pallet 5, the packing 19 shown in Fig. 3 is placed on top of the ten needle nozzles, respectively. The suction tubes 7a, 7b, 7c, etc. were attached by the vacuum sealing method. Thereafter, in the same manner as in Example 1, the pallet 5 was attached to the upper part of the cleaning tank 1 so as to cover it. The vacuum pump 11 opened the vacuum valve 13 via the vacuum pressure reduction pipe 14 via the recovery trap 10 of the washing | cleaning liquid, and vacuum-reduced the inside of the washing tank 1. After the inside of the washing tank 1 was made into vacuum pressure of 0.1 Mpa or less, the washing | cleaning liquid of a hydrocarbon solvent was opened from the supply port 16, and it introduce | transduced until the to-be-cleaned object was immersed. It was observed that the cleaning liquid was sucked into the suction tube 7 from the inner hole of the needle nozzle of the cleaning object. Then, the vacuum valve 13 was closed and the washing | cleaning liquid was supplied to the vicinity of the pallet so that it might become the washing | cleaning liquid surface of FIG. Ultrasonic cleaning conditions were ultrasonic cleaning for 5 minutes, supplying the cleaning liquid only by the amount which reduces the cleaning liquid surface at the oscillation output of 600 W, the frequency of 25 kHz, and the temperature of the cleaning liquid is also 25 degreeC. One minute after the ultrasonic oscillation, it was observed that the amount of liquid sucked into the suction tube from the inner hole of the object to be cleaned rapidly increased. After ultrasonic cleaning, after rinsing with a methanol solution and drying, the inside of the fine holes of the needle nozzle was observed, and a cleaning yield of 98% to 100% was obtained.

{Example 4}

In order to compare Example 3 of this invention with the conventional washing | cleaning method, as a washing | cleaning condition, the cleaning case which accommodated ten needle nozzles was immersed in the ultrasonic washing tank which put the washing | cleaning liquid of a hydrocarbon type solution, and the oscillation output of 600W, 25 After ultrasonic cleaning for 5 minutes at the frequency of kHz and the temperature of the washing | cleaning liquid at 25 degreeC, the rinse washing and drying were performed with the methanol solution as mentioned above. Then, when the inside of the fine hole of the needle nozzle was observed, the washing | cleaning yield was 10%-30%.

{Example 5}

The precision nozzle for dispenser of adhesive was selected as the to-be-cleaned object, and the washing | cleaning in the inside was tested. The dimension of the used precision nozzle is 2.4 mm, 50 m of internal diameters, and 20 mm in length. The foreign matter and contaminants inside the precision nozzle were epoch-coated adhesives, and the objects to be cleaned were almost fine pores almost filled with foreign matter. As the cleaning solution, an acetone solution was used. As shown in Fig. 1, after installing 10 precision nozzles 6a, 6b, 6c, etc. of the object to be cleaned on the pallet 5, suction tubes 7a, 7b, 7c) and so on. Then, the pallet 5 was installed so that the lid may be covered in the upper part of the washing tank 1. As shown in FIG. The vacuum pump 11 opened the vacuum valve 13 via the vacuum pressure reduction pipe 14 via the recovery trap 10 of the washing | cleaning liquid, and vacuum-reduced the inside of the washing tank 1. After making the inside of the washing tank 1 into the vacuum pressure of 0.1 Mpa or less, the acetone washing liquid was opened from the supply port 16 until the to-be-cleaned object was immersed. Then, the vacuum valve 13 was closed and the washing | cleaning liquid was supplied to the vicinity of the pallet so that it might become the washing | cleaning liquid surface of FIG. Then, ultrasonic cleaning was started after making the inside of a washing tank atmospheric pressure. Ultrasonic cleaning conditions were 600 minutes of oscillation output, 25 kHz to 525 kHz multiple frequency, 30 degreeC of washing | cleaning liquid temperature, The washing | cleaning was performed for 10 minutes, supplying a washing | cleaning liquid by the amount which reduces the washing liquid surface. Then, the inside of a precision nozzle was vacuum-sucked and dried in the state which removed the pallet from the ultrasonic cleaning tank 1. Thereafter, the inside of the through fine holes of the precision nozzle was observed. As a result, all of the 10 precision nozzles tested were removed by washing to obtain a cleaning yield of almost 100%. The flow of the cleaning liquid from the inner hole of the precision nozzle rapidly increased from 2 minutes to 5 minutes after the start of the ultrasonic cleaning. The advantage of being able to observe the progress of the cleaning, the determination of the quality of the cleaning, and the like by the amount of the washing liquid flowing or by the method of flowing was also evident.

{Example 6}

In order to compare Example 5 of this invention with the conventional washing | cleaning method, the washing | cleaning case which stored ten precision nozzles was immersed in the ultrasonic cleaning tank which put the washing | cleaning liquid of acetone as washing | cleaning conditions, and the oscillation output of 600W, 25kHz Drying was performed after ultrasonic cleaning for 10 minutes at a multiple frequency of 525 kHz and the temperature of the washing liquid at 30 ° C. Thereafter, the inside of the through fine holes of the precision nozzles was observed, and foreign substances and contaminants in all ten precision nozzles did not fall off and remained in a blocked state. In the case where only the cleaning time was 60 minutes under the above-mentioned cleaning conditions, as a result of 10 cleaning attempts, the inside of the precision nozzle was cleaned and almost penetrated, but two foreign matters and contaminants remained. The other eight remained blocked. In addition, after performing the process of vacuum-depressurizing the inside of the washing tank 1 before performing by the said conventional washing | cleaning method, the result of the washing test as mentioned above shows the cleaning yield of 10 to 20% in 10 minutes of washing time. A yield of 30% to 40% was obtained at 30 minutes of cleaning time. As a result, it became clear that the vacuum depressurization process of removing air bubbles in the nozzle and the vacuum suction process of creating the flow of the cleaning liquid in the nozzle each improved the cleaning ability.

{Example 7}

The porous branch needle nozzle was selected as the object to be cleaned, and the cleaning therein was tested. As shown in Fig. 5, the porous branch nozzles used are two branched nozzles, and the size of each branched needle nozzle is 0.4 mm in outer diameter, 190 m in inner diameter, and 13 mm in length. The foreign matters and contaminants in the porous branch nozzles are epoxy clock adhesives, and those having a state where almost fine pores were almost clogged with foreign matters were used as the object to be cleaned. Acetone was used for the washing | cleaning liquid. As shown in FIG. 7, since the case of the complex to-be-cleaned object which the vacuum seal does not become enough by the installation of the pallet 5 and the to-be-cleaned object, with the pallet 5 which installed the to-be-cleaned object not by a vacuum seal, It puts in the washing tank 1 previously, sandwiches the packing 21 with the other lid 20 in the washing tank 1, and covers a lid so that a vacuum pressure can be reduced, and the washing liquid 3 is washed liquid supply port ( 12, the lid 20 was opened after filling the cleaning liquid 3 to the cleaning liquid surface 4 so that the objects to be cleaned 6a, 6b, 6c and the pallet 5 were completely immersed. Then, as shown in Fig. 1, the pallet 5 is moved above the liquid level as in the sixth embodiment, so that the suction tubes 7a, 7b and 7c are placed on the upper ends of the fine hole nozzles 6a, 6b and 6c of the object to be cleaned. And the valves 8a, 8b, and 8c were opened, and ultrasonic cleaning was performed while vacuum suction. However, as shown in FIG. 6, the suction tube was installed in the pallet 5 by the structure which a packing is put between the periphery of the hole of a pallet, and a suction tube. The ultrasonic cleaning conditions were performed for 10 minutes while supplying the cleaning liquid by the amount which reduces the cleaning liquid surface at the oscillation output of 600 W, the frequency of 1 MHz, and the cleaning liquid temperature of 30 degreeC. Then, the inside was vacuum-sucked and dried in the state which removed the pallet from the washing tank 1. Then, when the inside of the through fine hole of the porous branch needle nozzle was observed, all the three porous branch nozzles which were tested were wash-removed inside and the cleaning yield of nearly 100% was obtained.

{Example 8}

In order to compare Example 7 of this invention with the conventional washing | cleaning method, as a washing | cleaning condition, the cleaning case which accommodated ten porous branch nozzles in the ultrasonic cleaning tank which put the cleaning liquid of acetone was immersed, and the oscillation output of 600 W, 1 MHz After ultrasonic cleaning for 10 minutes at the frequency of 30 degreeC and the washing | cleaning liquid temperature, it dried. Then, when the inside of the through fine hole of the porous branch needle nozzle was observed, the foreign material and the contaminant in all ten porous branch needle nozzles did not fall, and remained clogged. In the above cleaning condition, when only the cleaning time is 60 minutes, the result of 10 cleaning attempts is that foreign substances and contaminants inside all 10 porous branch needle nozzles do not fall off and remain blocked, and high ultrasonic oscillation of the conventional method is achieved. In fine cleaning at the frequency, it was found that cleaning could not be performed.

As described above, according to the present invention, the basic function configuration includes vacuum depressurization in the cleaning tank, vacuum suction inside the micropores, supply of the cleaning liquid under vacuum pressure reduction to the cleaning tank, and immersion of the object to be cleaned. Ultrasonic cleaning apparatus integrated with vacuum suction system based on the above, it is possible to perform ultrasonic radiation in the absence of air lump inside the micropores as the object to be cleaned and to force the degassed cavitation-enhanced cleaning liquid into the micropores by vacuum suction. It can be made to flow at a high efficiency, and it can wash | clean in high efficiency and a short time. In addition, since rinse cleaning and drying after washing of foreign matter and contaminants in the fine pores use vacuum suction, it is possible to shorten the time. Furthermore, since the present invention has the configuration as described above, the present invention exhibits an excellent effect for cleaning precision parts having a pore of 1 mm or less, especially a penetrating nozzle of a fine hole of 20 m to 200 m or less.

In addition, this invention is not limited to each said Example, It is applicable also in the case where a shape, a structure, etc. are complicated with the to-be-cleaned object which penetrates through. Within the scope of the technical idea of the present invention, it is clear that each embodiment can be changed as appropriate.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram of the whole structure of the ultrasonic cleaning apparatus equipped with the vacuum suction system which concerns on this invention.

Fig. 2 is an example of a to-be-cleaned object, which is a micropore nozzle of a ferrule, and foreign matter or contaminants therein, and a mass of air when immersed in a cleaning liquid. The other space is the schematic diagram which is a washing | cleaning liquid.

Fig. 3 is a fine hole needle nozzle for a dispenser as an example of the object to be cleaned and a state in which the inside thereof is clogged with foreign matter or contaminants and an air mass when immersed in a cleaning liquid. The other space is the schematic diagram which is a washing | cleaning liquid.

Fig. 4 is a multi-branch micro-pore needle nozzle for a dispenser as an example of the object to be cleaned and the air mass when the inside is clogged with foreign matter or contaminants and when it is immersed in the cleaning liquid. The other space is the schematic diagram which is a washing | cleaning liquid.

Fig. 5 is a configuration diagram showing an example of installation of a fine nozzle, which is to be cleaned, on a pallet, and installation of a suction tube and a fine hole nozzle which are sucked in vacuum through packing.

Fig. 6 is a configuration diagram showing an example of installation of a fine nozzle, which is to be cleaned, on a pallet, and an installation of a suction tube and a pallet for vacuum suction through packing.

7 is a configuration diagram of another example of the cleaning method in the ultrasonic cleaning apparatus for the fine hole nozzle which is the object to be cleaned.

<Description of the symbols for the main parts of the drawings>

1: washing tank

2: ultrasonic diaphragm

3: cleaning liquid

4: cleaning liquid surface

5: pallet

6, 6a, 6b, 6c: Cleansing object of fine hole nozzle

7, 7a, 7b, 7c: suction tube

8, 8a, 8b, 8c: valve

9: vacuum suction pipe

10: trap

11: vacuum pump

12, 13: vacuum valve

14: vacuum decompression pipe

15: valve

16: cleaning liquid supply port

17: foreign matter or contaminants

18: air mass

19: Packing

20: lid

21: vacuum packing

Claims (8)

The nozzle of the cleaning object described above with respect to the ultrasonic cleaning device comprising an ultrasonic vibrating plate, a cleaning tank accommodating the cleaning liquid, a to-be-cleaned object such as a nozzle penetrated through a fine hole, and a pallet for storing a plurality of the objects to be cleaned. The cleaning liquid recovery trap provided between the suction tube for vacuum suction inside the vacuum tube, the vacuum pump for vacuuming the suction tube described above, the vacuum pump described above, and the suction tube described above, and the cleaning tank described above. A vacuum suction system for micropore nozzles, wherein the vacuum suction system comprising a vacuum decompression pipe having a vacuum is integrally attached to the ultrasonic cleaning apparatus described above. The vacuum suction ultrasonic cleaning apparatus according to claim 1, wherein the vacuum suction ultrasonic cleaning apparatus includes a process of inserting a microporous nozzle to be cleaned into a pallet, a process of capping the upper portion of the ultrasonic cleaning tank with a pallet described above, and the microporous nozzle described above. Vacuum suction in the micropore nozzle and the ultrasonic cleaning tank by a vacuum pump installed through a process of inserting a suction tube for vacuum suction in the upper part of the vacuum chamber and a trap for recovering the cleaning liquid, and the cleaning liquid in the previously described cleaning tank. The process of degassing the dissolved air in the cleaning liquid by vacuum depressurizing while supplying the pressure and the process of dipping the nozzle in the degassing cleaning liquid, and the cleaning liquid propagated by the ultrasonic wave radiated from the diaphragm by oscillating the ultrasonic wave from the lower end to the upper end of the fine hole nozzle. Fine using both the pumping force and the suction force by vacuum suction Vacuum suction ultrasonic cleaning method which comes from the process of washing a foreign material and a contaminant in a hole nozzle. The vacuum suction system according to claim 1, wherein a suction tube is inserted into a fine hole nozzle of the object to be cleaned, and a packing is installed on the inner surface of the suction tube end to increase the airtight therebetween. The vacuum suction ultrasonic cleaning apparatus according to claim 1, wherein a packing for inserting a suction tube into the fine hole nozzle of the object to be cleaned to increase the airtightness between the tip of the suction tube and the pallet so as to vacuum the upper part of the fine hole nozzle is provided. A vacuum suction system, which is provided. The vacuum suction ultrasonic cleaning apparatus is provided so that the pallet provided with the fine hole nozzle of the cleaning object can be immersed above and below the washing liquid surface, and the pallet can be moved up and down so that ultrasonic cleaning can be performed. Vacuum suction ultrasonic cleaning device. The vacuum suction ultrasonic cleaning apparatus according to claim 1, wherein the inside of the ultrasonic cleaning tank is evacuated by vacuum decompression as a structure of vacuum decompression using a pallet or another lid as described above, and then the cleaning liquid is introduced to degas the dissolved air in the cleaning liquid. Vacuum suction ultrasonic cleaning device, characterized in that to enable. The vacuum suction ultrasonic cleaning apparatus according to claim 6, wherein the cleaning liquid is introduced after vacuum depressurizing the inside of the ultrasonic cleaning tank, and the cleaning liquid is introduced into a spray state or a shower state from a supply port of the cleaning liquid provided in the ultrasonic cleaning tank. . The ultrasonic cleaning device according to claim 1, wherein the vacuum cleaning ultrasonic cleaning device is circulated from the trap to recover the cleaning liquid to the tank to be cleaned.