KR200169700Y1 - 반도체 장치 - Google Patents
반도체 장치 Download PDFInfo
- Publication number
- KR200169700Y1 KR200169700Y1 KR2019970012066U KR19970012066U KR200169700Y1 KR 200169700 Y1 KR200169700 Y1 KR 200169700Y1 KR 2019970012066 U KR2019970012066 U KR 2019970012066U KR 19970012066 U KR19970012066 U KR 19970012066U KR 200169700 Y1 KR200169700 Y1 KR 200169700Y1
- Authority
- KR
- South Korea
- Prior art keywords
- gas line
- gas
- line tape
- temperature
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
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- H10P72/0602—
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- H10P72/0402—
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- H10P72/0432—
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- H10P72/0616—
Abstract
Description
Claims (1)
- 다수의 가스라인과, 가스라인 테이프 히터와, 상기 가스라인 테이프 히터에 전압을 인가하는 온도제어수단을 포함하는 반도체 장치에 있어서, 상기 다수의 가스라인 테이프 히터의 온도값을 검출하여 소정의 조합을 통해 각각의 가스라인 테이프 히터 온도값이 전체온도값에 영향을 주도록 구성한 열전대와, 상기 열전대의 출력값과 기준값을 비교하여 이상이 있는 경우 알람을 발생하고, 상기 온도제어수단을 제어하는 온도검출수단을 더 포함하여 된 것을 특징으로 하는 반도체 장치.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019970012066U KR200169700Y1 (ko) | 1997-05-27 | 1997-05-27 | 반도체 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019970012066U KR200169700Y1 (ko) | 1997-05-27 | 1997-05-27 | 반도체 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19980067494U KR19980067494U (ko) | 1998-12-05 |
| KR200169700Y1 true KR200169700Y1 (ko) | 2000-02-01 |
Family
ID=19501743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019970012066U Expired - Fee Related KR200169700Y1 (ko) | 1997-05-27 | 1997-05-27 | 반도체 장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200169700Y1 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100674476B1 (ko) * | 2005-04-28 | 2007-01-30 | (주)티티에스 | 가스라인용 블록히터 |
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1997
- 1997-05-27 KR KR2019970012066U patent/KR200169700Y1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR19980067494U (ko) | 1998-12-05 |
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