KR102883720B1 - Substrate type sensor for measuring condition of process chamber and data collecting system having the same - Google Patents

Abstract

A substrate-type sensor for measuring the state of a process chamber according to the present invention may include a trigger sensor for detecting at least one condition for starting and ending measurement, at least one measurement sensor for measuring or ending a physical quantity to be measured in response to a trigger signal, a power circuit for supplying power from a carrier, a communication circuit for transmitting data measured from the at least one measurement sensor to an external device via wireless communication, a memory for storing a measurement algorithm for generating the trigger signal corresponding to the start or end of the measurement, and a central processing unit for executing the measurement algorithm.

Description

{Substrate type sensor for measuring condition of process chamber and data collecting system having the same}

The present invention relates to a substrate-type sensor for measuring the state of a process chamber and a data acquisition system including the same.

In general, flat panel displays or semiconductor devices are produced through various processes such as a photoresist coating process, a developing process, an etching process, a chemical vapor deposition process, and an ashing process. A semiconductor manufacturing device is provided with a plurality of substrate processing devices within a process module, and the same process is performed in each substrate processing device. In order for the process to be performed uniformly in each substrate processing device, the internal environment of the substrate processing device must be maintained uniformly. In order to measure the internal environment of the substrate processing devices, a measuring device is installed inside each substrate processing device.

An object of the present invention is to provide an unmanned/automatable substrate-type sensor for measuring the state of a process chamber and a data acquisition system including the same.

A substrate-type sensor for measuring a state of a process chamber according to an embodiment of the present invention may include: a trigger sensor for detecting at least one condition for starting and ending measurement; at least one measurement sensor for measuring or ending a physical quantity to be measured in response to a trigger signal; a power circuit for supplying power from a carrier; a communication circuit for transmitting data measured from the at least one measurement sensor to an external device via wireless communication; a memory for storing a measurement algorithm for generating the trigger signal corresponding to the start of the measurement or the end of the measurement; and a central processing unit for executing the measurement algorithm.

In an embodiment, the at least one measurement sensor includes a wafer-type vision sensor, the trigger sensor includes an acceleration sensor for inferring a position of the substrate-type sensor inside the equipment; and a distance sensor for detecting proximity to an electrostatic chuck (ESC), and the measurement algorithm is characterized in that it starts shooting of the wafer-type vision sensor using a detection value of the acceleration sensor and a detection value of the distance sensor.

In an embodiment, the measurement algorithm is characterized in that it terminates the shooting of the wafer-type vision sensor when the detection value of the distance sensor is greater than a predetermined value.

In an embodiment, the at least one measurement sensor includes a wafer-type electrostatic sensor, the trigger sensor includes an acceleration/angular velocity sensor that detects acceleration/angular velocity according to rotation of the measurement target, and the measurement algorithm is characterized in that it determines the start/end of a recipe of a wet clean process through a detection value of the acceleration/angular velocity sensor.

In an embodiment, the communication circuit is characterized in that it transmits the measured data to the external device using low-power long-range wireless communication or a low-power mesh network.

In an embodiment, the power circuit is characterized in that it receives power wirelessly/wirelessly from the carrier and is implemented as a detachable module structure.

In an embodiment, the communication circuit monitors whether wireless communication is possible during measurement of the at least one measurement sensor or before/after measurement, and when the wireless communication is not possible in the communication circuit, the measured data is stored in the memory, and after measurement is completed in the at least one measurement sensor, the measured data is transmitted to the external device when the wireless communication is possible.

An embodiment of the present invention includes a data acquisition system for process equipment, a substrate-type sensor for measuring the state of a process; a carrier for supplying power to the substrate-type sensor; a station for supplying power to the carrier and storing the carrier; and an infrastructure system for receiving measurement data from the substrate-type sensor and communicating with the station.

In an embodiment, the substrate-type sensor may include a trigger sensor for determining the start/end of measurement and a memory for storing a measurement algorithm that generates a trigger signal using a detection value of the trigger sensor.

In an embodiment, the substrate-type sensor may be implemented in a module form that is detachable from the carrier and may include a power circuit that receives power from the carrier.

In an embodiment, the carrier includes a power circuit for supplying power to the substrate-type sensor, and is characterized in that it is implemented as a module structure that can be detachably attached to a Standard Substrate Carrier (FOUP, FOSB, etc.).

The substrate-type sensor and data acquisition system according to an embodiment of the present invention can enable automation/unmanned operation by having a substrate-type sensor that automatically executes measurement as well as measurement start/end.

In addition, the substrate-type sensor and data collection system according to an embodiment of the present invention can significantly reduce equipment parameter measurement and maintenance time by directly communicating with the infrastructure system through wireless communication from the substrate-type sensor and transmitting measurement data.

The drawings attached below are intended to aid in understanding of the present embodiment and provide embodiments together with detailed descriptions.
FIG. 1 is a drawing exemplarily showing a data collection system (10) according to an embodiment of the present invention.
FIGS. 2A and 2B are drawings showing an example of detecting the start and end of shooting of a wafer-type vision sensor according to an embodiment of the present invention.
FIGS. 3A and 3B are drawings showing examples of detecting the start/end of shooting of a wafer-type electrostatic sensor according to an embodiment of the present invention.
FIG. 4 is a diagram exemplifying direct communication between a sensor and a server using low-power long-distance communication according to an embodiment of the present invention.
FIG. 5a, FIG. 5b, and FIG. 5c are drawings exemplarily showing a station (300) according to an embodiment of the present invention.
Figure 6 is a flowchart exemplarily showing an operation method of a substrate-type sensor (100) according to an embodiment of the present invention.
FIG. 7 is a drawing showing a wafer-type sensor-based measurement automation system having a vision sensor according to an embodiment of the present invention.
FIG. 8 is a drawing exemplarily showing the use of a wafer-type sensor automation system according to an embodiment of the present invention in conjunction with machine learning.

Below, the contents of the present invention will be described clearly and in detail using drawings so that a person having ordinary skill in the art can easily practice the present invention.

A substrate type sensor according to an embodiment of the present invention is equipped with a separate physical quantity measurement circuit for automated start/end in addition to the physical quantity to be measured in order to measure the state of a process, thereby being able to determine the start/end of measurement on its own. The substrate type sensor according to an embodiment of the present invention can directly link the measurement data to an infrastructure system (or server) such as a server or production management system via wireless communication.

According to an embodiment of the present invention, a data acquisition system measures the process status within a target environment (line) by combining a substrate-type sensor and a carrier, and the sensor itself determines whether measurement has started/ended, thereby eliminating the need for unmanned measurement and equipment modification. According to an embodiment of the present invention, the data acquisition system eliminates the electronics module for communication within the carrier, thereby enabling the use of a standard substrate carrier (FOUP, FOSB, etc.), thereby reducing maintenance costs. In addition, the data acquisition system according to an embodiment of the present invention can minimize the time delay between data acquisition by directly communicating with the substrate-type sensor and a server within a mass production line. The substrate-type sensor and data acquisition system according to an embodiment of the present invention eliminate the need for human intervention since the sensor itself determines whether measurement has started/ended. In addition, the substrate-type sensor and data acquisition system according to an embodiment of the present invention communicate directly with an infrastructure system (or server) rather than a carrier, station, or equipment, thereby eliminating the need for the time required for the sensor to be retrieved by the carrier, thereby minimizing the time delay between data acquisition and ensuring real-time performance.

FIG. 1 is a drawing exemplarily showing a data collection system (10) according to an embodiment of the present invention. Referring to FIG. 1, the data collection system (10) has a shape similar (identical) to that used in a process, and may include a substrate-type sensor (100) for measuring a process environment, a carrier (200) that can mechanically connect the sensor (100) to production process automation, a station (300) for storing the carrier (200), and an infrastructure system (400).

The substrate-type sensor (100) may include a central processing unit (CPU, 110), a power circuit (120), a communication circuit (130), a memory (140), a measurement sensor (150), and a trigger sensor (160).

The central processing unit (110) may be implemented to control the overall operation of the substrate-type sensor (100). The central processing unit (110) may execute a measurement algorithm for generating a trigger signal corresponding to the start or end of measurement. The power circuit (120) may be implemented to receive power from the carrier (200). In an embodiment, the power circuit (120) may be implemented to charge a battery that is charged in a wireless charging manner or may be implemented in a detachable form. The communication circuit (130) may be implemented to transmit data measured from at least one measurement sensor (150) to an external device via wireless communication. The memory (140) may be implemented to store a measurement algorithm for generating a trigger signal corresponding to the start or end of measurement, or to temporarily store measurement data. The measurement sensor (150) may be implemented to measure or end a physical quantity to be measured in response to a trigger signal. The trigger sensor (160) may be implemented to detect at least one condition for the start or end of measurement.

Meanwhile, the sensor (100) includes a trigger sensor (160) for determining the start/end of measurement on its own in addition to a sensor for measuring the process environment, and a memory (140) for storing a measurement algorithm. When a user transmits parameters for determining the start/end to the sensor before starting measurement, the sensor (100) stores the corresponding data in the memory (140), etc., and can start measurement on its own when the corresponding condition is satisfied. Here, the parameters transmitted by the user can be stored in the memory (140). In an embodiment, the parameters can be maintained in volatile memory data through an energy source such as a battery, or can be stored in non-volatile memory data. Here, the parameters are maintained unless the user updates the parameters.

In addition, the sensor (100) can be connected to a carrier (200), a station (300), or an infrastructure system (400) of a mass production line other than the equipment via wireless communication. In an embodiment, the communication circuit (130) of the sensor (100) can communicate using low-power long-distance wireless communication such as NB-IoT, Lora, or Sigfox. In another embodiment, the communication circuit (130) of the sensor (100) can transmit and receive data using a mesh network such as BLE Mesh or Zigbee. The infrastructure system (400) can directly issue a measurement command to the sensor (100) to collect data.

The carrier (200) may be a standard product or a carrier compatible with a standard product during the production process. Compared to conventional carriers, the carrier (200) does not include a circuit for communication, and includes a power circuit (220) for supplying power to the sensor when necessary. The sensor (100) can basically operate on a standard carrier, but if a dedicated carrier (200) is used, a separate charging procedure is not necessary, and power can be supplied from the carrier (200) to extend the usage time. In an embodiment, the power circuit (212) may be built into a carrier (200) that is compatible with a standard product. In another embodiment, the power circuit (212) may exist in the form of a detachable module mounted on the standard carrier (200). In an embodiment, the power circuit (212) may be implemented to charge a battery using a wireless charging method.

The station (300) can be implemented to store and manage the carrier (200) so that the carrier (200) can be placed in a form that satisfies the standards of the production line. The station (300) can include a CPU (310), a power circuit (320), a communication circuit (330), and a memory (340).

Additionally, the station (300) can determine whether measurement is possible depending on the conditions by checking the status of the carrier (200). Meanwhile, the status of the sensor (100) can be checked through an infrastructure system (400) within the line, such as a separate server, rather than being checked directly by the station (300).

In addition, the station (300) as well as the sensor (100) can be linked to an infrastructure system (400) including an in-line production management system. The station (300) can verify whether the station (300) or the carrier (200) is operating normally, and transmit the verification result to the infrastructure system (400) to generate an interlock.

A data collection system (10) according to an embodiment of the present invention is equipped with a trigger sensor (160) and related algorithm for measurement start/end detection (trigger) in addition to sensor measurement on a substrate-type sensor (100), and an electronic module for communication within a carrier (FOUP, 200) is removed, and direct communication between the sensor (100) and a server (300) using wireless communication can be performed.

FIGS. 2A and 2B are drawings showing an embodiment of detecting the start and end of shooting of a wafer-type vision sensor according to an embodiment of the present invention. Referring to FIG. 2A, the substrate-type sensor may include, in addition to the vision sensor, an acceleration sensor and a proximity sensor for detecting the start/end of shooting of the vision sensor. In the embodiment, the position of the sensor within the facility (between the PM (Process Module) and the TM (Transfer Module)) may be inferred through the acceleration/angular velocity sensor, and the proximity of the ESC (electrostatic chuck) may be detected through the distance sensor. At this time, as shown in FIG. 2B, when the measurement start condition is satisfied, shooting of the vision sensor may start. In the embodiment, shooting of the vision sensor may end when a certain distance is exceeded through the distance sensor.

FIGS. 3A and 3B are drawings showing examples of detecting the start/end of shooting by a wafer-type electrostatic sensor according to an embodiment of the present invention. Referring to FIG. 3A, the substrate-type sensor (100) may be equipped with an acceleration sensor and an angular velocity sensor for detecting the start/end of shooting in addition to a sensor for measuring static electricity inside the sensor. In the embodiment, as shown in FIG. 3B, the start/end of the Recipe of the Wet Clean process can be determined through the acceleration/angular velocity sensor. That is, the rotation speed can be determined.

Fig. 4 is a diagram illustrating direct sensor-server communication using low-power long-distance communication according to an embodiment of the present invention. As illustrated in Fig. 4, a conventional data collection system comprises a sensor carrier Data is collected while going through the server communication step, but the data collection system (10) according to the embodiment of the present invention is a sensor Communication can be simplified through server communication.

In an embodiment, the carrier (200) may utilize a standard product (FOUP, FOSB, etc.) or a sensor-specific product. In an embodiment, the carrier (200) does not require a function for internally communicating with the sensor (100), and may only be equipped with a power circuit (220) for charging the sensor (100). In an embodiment, the power circuit (220) for charging the sensor may be implemented in a modular structure that can be attached and detached to the standard carrier (200).

In an embodiment, the sensor (100) can monitor whether wireless communication is possible during measurement or before/after measurement. In an embodiment, if wireless communication is not possible during measurement, the measurement data can be stored in memory, and the measurement data can be transmitted from the moment communication becomes possible after measurement is completed.

FIGS. 5A, 5B, and 5C are drawings exemplarily showing a station (300) according to an embodiment of the present invention. The station (300) may be implemented in a form that occupies an independent space within a production line as illustrated in FIG. 5A, implemented in a form that is connected to a FOUP Stocker as illustrated in FIG. 5B, or implemented in a form that is connected to a Side Track Buffer (STB) as illustrated in FIG. 5C.

FIG. 6 is a flowchart exemplarily showing an operating method of a substrate-type sensor (100) according to an embodiment of the present invention. Referring to FIGS. 1 to 6, the substrate-type sensor (100) can operate as follows.

When a user transmits a trigger parameter to the sensor to determine start/end before starting measurement, the sensor stores the corresponding data in memory, etc., and checks the trigger parameter (S110). It is determined whether the trigger parameter satisfies the corresponding condition within the normal range (S120). If the trigger parameter is within the normal range, the trigger sensor is set (S130). Thereafter, it can be determined whether the trigger start condition is satisfied based on the detection value of the trigger sensor (S140). If the detection value of the trigger sensor satisfies the trigger start condition, the sensor can start measurement on its own (S150). Meanwhile, the trigger parameter transmitted by the user can be stored in memory. At this time, the trigger parameter stored in volatile memory can be maintained through an energy source such as a battery, or the trigger parameter can be stored in non-volatile memory. The trigger parameter will be maintained unless the user updates the trigger parameter.

The sensor continuously monitors the measurement start/end parameters and initiates measurement when the start condition is met. At this time, the start/end of measurement can be determined using an additional sensor that determines the start/end of measurement in addition to the physical quantity being measured (temperature in the case of a temperature sensor, image in the case of a vision sensor) (S160).

The sensor can continuously monitor the availability of wireless communication, along with measurement start/end conditions (S170). If wireless communication is possible, the sensor can transmit measured data to a server or production management system installed on the line (S180). Conversely, if wireless communication is not possible, the measured data can be stored in memory (S190). Afterwards, the sensor can automatically terminate measurement and enter a standby state.

FIG. 7 is a diagram illustrating a wafer-type sensor-based measurement automation system with a vision sensor according to an embodiment of the present invention. Referring to FIG. 7, the alignment of an in-facility transport system can be automatically taught using measured data.

In existing facilities, the process chamber is shut down, a person opens it, and manually checks and corrects the alignment, or a vision sensor is used to measure and then manually correct the alignment. In contrast, using the automated system of the present invention, the vision sensor measures the alignment status and transmits the data to the server, and the server calculates the alignment amount and then feeds it back to the facility, thereby shortening the alignment teaching time of the transport system. Furthermore, since the sensor determines the measurement start/end conditions on its own, no additional linkage procedure with the facility is required, eliminating the need for facility modifications when applying to existing mass production facilities. If the sensor cannot determine the measurement conditions on its own, personnel or the facility must transmit a measurement start/end signal to the sensor to obtain data under the desired conditions when the sensor arrives at the target facility. For example, the results of the feasibility verification using the vision sensor show that the alignment teaching time can be significantly shortened compared to existing systems.

Figure 8 is a diagram exemplifying the use of a wafer-type sensor automation system according to an embodiment of the present invention in conjunction with machine learning. There is no need to shut down the chamber to check the status of the process chamber in wafer form. The sensor can independently determine whether measurement is being performed, eliminating the need for equipment modification. Furthermore, automatic measurement is possible. The sensor is directly connected to a server or production management system, offering the advantage of a short data acquisition delay of only a few minutes. This advantage allows sensors to be deployed at any time to check the status of the equipment or chamber. This allows for the accumulation of a large amount of previously unavailable equipment or chamber status data. By linking this data with production or equipment management data, such as FDC, when an issue arises, the cause can be identified by comparing the data with normal data. Furthermore, over time, machine learning can be used to compare accumulated data with mass production status, enabling the system to autonomously assess the situation and issue an alarm, or even automatically adjust equipment parameters to resolve the issue.

This invention is being actively adopted by manufacturers of temperature and vibration sensors, and is being implemented in mass production lines, albeit in a more limited form than the invention itself. However, it appears that no attempt has been made to automate the start/end of measurement using the various sensors described in this invention, or to use direct connections between sensors and servers.

Whether the sensor and server proposed in the present invention communicate directly and whether other triggering conditions other than the physical quantity to be measured are used can both be easily confirmed through the product specifications.

Meanwhile, the above-described content of the present invention is merely a concrete example for carrying out the invention. The present invention will encompass not only specific and practically applicable means itself, but also technical ideas, which are abstract and conceptual ideas that can be utilized in future technologies.

10: Data Collection System
100: Substrate-type sensor
200: Carrier
300: Station
400: Infrastructure Systems

Claims (10)

In a substrate-type sensor for measuring the status of a process chamber,
A trigger sensor that detects at least one condition for starting and ending measurement;
At least one measurement sensor that measures or terminates the measurement target physical quantity in response to a trigger signal;
A power circuit that supplies power from the carrier;
A communication circuit that transmits data measured from at least one of the above measurement sensors to an external device via wireless communication;
A memory storing a measurement algorithm that generates the trigger signal corresponding to the start or end of the measurement; and
A central processing unit that executes the above measurement algorithm,
wherein at least one of the measurement sensors comprises a wafer-type vision sensor,
The above trigger sensor,
An acceleration sensor for inferring the position of the substrate-type sensor inside the facility; and
Includes a distance sensor to detect proximity to the ESC (electrostatic chuck),
The above measurement algorithm is,
Using the detection value of the acceleration sensor and the detection value of the distance sensor, the wafer-type vision sensor starts taking pictures,
A substrate-type sensor characterized in that when the detection value of the distance sensor is greater than a predetermined value, the shooting of the wafer-type vision sensor is terminated. delete delete In a substrate-type sensor for measuring the status of a process chamber,
A trigger sensor that detects at least one condition for starting and ending measurement;
At least one measurement sensor that measures or terminates the measurement target physical quantity in response to a trigger signal;
A power circuit that supplies power from the carrier;
A communication circuit that transmits data measured from at least one of the above measurement sensors to an external device via wireless communication;
A memory storing a measurement algorithm that generates the trigger signal corresponding to the start or end of the measurement; and
A central processing unit that executes the above measurement algorithm,
wherein at least one of the above measurement sensors comprises a wafer-type electrostatic sensor,
The above trigger sensor includes an acceleration/angular velocity sensor that detects acceleration/angular velocity according to the rotation of the measurement target,
A substrate-type sensor characterized in that the above measurement algorithm determines the start/end of the recipe of the wet clean process through the detection value of the acceleration/angular velocity sensor. In any one of paragraphs 1 and 4,
A substrate-type sensor characterized in that the above communication circuit transmits the measured data to the external device using low-power long-distance wireless communication or a low-power mesh network. In any one of paragraphs 1 and 4,
A substrate-type sensor characterized in that the power circuit is implemented in a module structure that can be detached from the carrier. In any one of paragraphs 1 and 4,
A substrate-type sensor characterized in that the communication circuit monitors whether wireless communication is possible during, before, or after measurement of the at least one measurement sensor, and when the wireless communication is not possible in the communication circuit, the measured data is stored in the memory, and when the measurement is completed in the at least one measurement sensor, the measured data is transmitted to the external device when the wireless communication is possible. In a data collection system for process equipment,
A substrate-type sensor that measures the status of a process;
A carrier for supplying power to the above substrate-type sensor;
A station for supplying power to the carrier and storing the carrier; and
An infrastructure system that receives measurement data from the substrate-type sensor and communicates with the station,
The above substrate-type sensor is a data acquisition system including a trigger sensor for determining the start/end of measurement and a memory for storing a measurement algorithm that generates a trigger signal using the detection value of the trigger sensor. delete In paragraph 8,
A data acquisition system in which the substrate-type sensor is implemented in the form of a module that can be detachably attached to the carrier and includes a power circuit that receives power from the carrier.