KR102768797B1 - Inkjet head cleaning apparatus, inkjet head cleaning method and substrate treating method using the same - Google Patents

Abstract

An inkjet head cleaning device comprises a blade body rotatable about a rotation axis and extending in a direction perpendicular to the rotation axis, an injection port formed at an end of the blade body and spraying a solvent onto an inkjet head having a nozzle formed thereon, a blade tip connected and fixed to the end of the blade body and provided to wipe and remove contaminants on a surface of the nozzle, and a suction port formed at the end of the blade body and arranged between the injection port and the blade tip and provided to suck the solvent sprayed from the injection port.

Description

{INKJET HEAD CLEANING APPARATUS, INKJET HEAD CLEANING METHOD AND SUBSTRATE TREATING METHOD USING THE SAME}

The present invention relates to an inkjet head cleaning device, an inkjet head cleaning method, and a substrate processing method using the same, and more specifically, to an inkjet head cleaning device with improved cleaning efficiency, an inkjet head cleaning method, and a substrate processing method using the same.

Recently, technological advancements have led to the production of display products that are smaller, lighter, and have better performance. Up until now, the existing cathode ray tube (CRT) television has been widely used as a display device because of its many advantages in terms of performance and price. However, display devices that overcome the shortcomings of CRT in terms of miniaturization or portability and have advantages such as miniaturization, lightness, and low power consumption, such as plasma display devices, liquid crystal display devices, and organic light-emitting display devices, are attracting attention.

In manufacturing the above display device, an inkjet printing method is used that has the effect of reducing costs, etc. In the inkjet printing method, cleaning of the inkjet head is essential, and various devices for cleaning the inkjet head are being developed.

Typically, a suction method is used in which a suction nozzle is raised and moved to remove residual solution on the discharge surface of the nozzle plate of the inkjet head, or a blade method is used in which residual solution on the surface is removed by a blade that moves while in contact with the nozzle plate.

Accordingly, the technical problem of the present invention was conceived from this point, and the purpose of the present invention is to provide an inkjet head cleaning device with improved cleaning efficiency.

Another object of the present invention is to provide a method for cleaning an inkjet head.

Another object of the present invention is to provide a method for treating a substrate.

According to one embodiment of the present invention for realizing the above-described object, an inkjet head cleaning device comprises: a blade body rotatable about a rotation axis and extending in a direction perpendicular to the rotation axis, an injection port formed at an end of the blade body and spraying a solvent onto an inkjet head having a nozzle formed thereon, a blade tip connected and fixed to the end of the blade body and provided to wipe and remove contaminants on a surface of the nozzle, and a suction port formed at the end of the blade body and arranged between the injection port and the blade tip to suck the solvent sprayed from the injection port.

In one embodiment of the present invention, the inkjet head cleaning device may further include a solvent storage unit in which a solvent is stored. The blade body and the solvent storage unit may be coupled so that the blade tip is immersed in the solvent when the blade body rotates.

In one embodiment of the present invention, the blade tip can contact the nozzle and remove contaminants on the surface of the nozzle while forming a first angle less than 45 degrees with respect to a direction perpendicular to the lower surface of the inkjet head on which the nozzle is formed.

In one embodiment of the present invention, the inkjet head cleaning device may further include a spray pipe and a suction pipe connected to the blade body. The spray port may be connected to the spray pipe through the inside of the blade body and may receive the solvent from the spray pipe. The suction port may be connected to the suction pipe through the inside of the blade body and may receive a vacuum suction force from the suction pipe.

In one embodiment of the present invention, an auxiliary suction port may be further formed at the end of the blade body in an opposite direction to where the suction port is formed with respect to the blade tip.

In one embodiment of the present invention, the injection port and the suction port may be in the form of a slit extending in a direction parallel to the rotation axis.

In one embodiment of the present invention, the solvent may include N-methyl pyrrolidone (NMP), and the contaminant may include polyimide (PI).

In one embodiment of the present invention, the blade tip may include silicon.

According to one embodiment of the present invention for realizing the above-described object, a method for cleaning an inkjet head includes the steps of spraying a solvent toward a nozzle of an inkjet head, removing contaminants on the nozzle dissolved by the sprayed solvent from the nozzle using a blade tip, sucking the contaminants removed by the blade tip, and removing the contaminants remaining on the blade tip from the blade tip by immersing them in a solvent stored in a solvent storage unit.

In one embodiment of the present invention, in the spraying step, the solution can be sprayed through a spray port formed at the end of the blade body to which the blade tip is connected.

In one embodiment of the present invention, in the step of removing from the nozzle, the contaminant on the surface of the nozzle can be removed by wiping it with the blade tip.

In one embodiment of the present invention, the blade tip can contact the nozzle to remove the contaminant while forming a first angle less than 45 degrees with respect to a direction perpendicular to the lower surface of the inkjet head on which the nozzle is formed.

In one embodiment of the present invention, in the suction step, the contaminants and the solvent can be sucked through a suction port formed at the end of the blade body and positioned between the injection port and the blade tip.

In one embodiment of the present invention, in the step of removing from the blade tip, the blade tip may be immersed in a solvent stored in a solvent storage unit, thereby dissolving the contaminants remaining on the blade tip into the solvent.

In one embodiment of the present invention, the solvent may include N-methyl pyrrolidone (NMP), and the contaminant may include polyimide (PI).

According to one embodiment of the present invention for realizing the above-described object, a substrate processing method includes a step of forming a pattern layer on a substrate using an inkjet printing method of dropping a solution from a nozzle of an inkjet head, and a step of cleaning a surface of a nozzle of the inkjet head. The cleaning step includes a step of spraying a solvent toward the nozzle of the inkjet head, a step of removing contaminants on the nozzle dissolved by the sprayed solvent from the nozzle using a blade tip, a step of sucking the contaminants removed by the blade tip, and a step of removing the contaminants remaining on the blade tip from the blade tip by immersing them in a solvent stored in a solvent storage unit.

In one embodiment of the present invention, the substrate and the pattern layer may be components of a display device.

In one embodiment of the present invention, the display device is a liquid crystal display device, and the pattern layer may be a color filter pattern, a light-shielding pattern, or an alignment film.

In one embodiment of the present invention, the display device may be an organic light emitting display device, and the pattern layer may be a light emitting layer.

According to embodiments of the present invention, more efficient cleaning is possible by cleaning contaminants (solid crystals) formed by the evaporation of the solvent of the solution remaining in the nozzle of the inkjet head using a solvent and a blade tip that are sprayed through the nozzle.

In addition, the sprayed solvent and dissolved contaminants can be sucked in through the suction port, thereby improving the cleaning efficiency.

In addition, since contaminants remaining on the blade tip are removed by being immersed in the solvent stored in the solvent storage unit, maintenance of the inkjet head cleaning device can be made easy.

However, the effects of the present invention are not limited to the above effects, and may be expanded in various ways without departing from the spirit and scope of the present invention.

FIG. 1 is a perspective view of an inkjet head cleaning device according to one embodiment of the present invention.
FIGS. 2A to 2D are drawings showing an inkjet head cleaning method using the inkjet head cleaning device of FIG. 1.
FIG. 3 is a perspective view of an inkjet head cleaning device according to one embodiment of the present invention.
FIGS. 4A to 4D are drawings showing an inkjet head cleaning method using the inkjet head cleaning device of FIG. 1.
FIG. 5 is a cross-sectional view of a liquid crystal display device manufactured using an inkjet head cleaning device and an inkjet head cleaning method according to one embodiment of the present invention.
FIG. 6 is a cross-sectional view of an organic light-emitting display device manufactured using an inkjet head cleaning device and an inkjet head cleaning method according to one embodiment of the present invention.
Figure 7 is a flowchart showing an inkjet head cleaning method according to one embodiment of the present invention.
Figure 8 is a flowchart showing a substrate processing method according to one embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

FIG. 1 is a perspective view of an inkjet head cleaning device according to one embodiment of the present invention.

Referring to FIG. 1, the inkjet head cleaning device may include a blade body (100), an injection port (110), a suction port (120), a blade tip (130), a solvent storage unit (200), an injection tube (210), and a suction tube (220).

The blade body (100) above has a rotation axis (RA) parallel to the first direction (D1) and can extend in a direction perpendicular to the rotation axis (RA). The blade body (100) can be arranged to be inclined at a predetermined angle with respect to a third direction (D3). The third direction (D3) can be a direction perpendicular to a plane formed by the first direction (D1) and a second direction (D2) perpendicular to the first direction (D1), and can be a direction perpendicular to the ground.

The injection port (110) and the suction port (120) may be formed at the end of the blade body (100). In addition, the blade tip (130) may be connected and fixed to the end of the blade body (100).

The above-described nozzle (110) can spray a solvent toward the contaminants (see PC of FIG. 2b) of the blade tip (130) and the nozzle (see 12 of FIG. 2b) of the inkjet head. The nozzle (110) is connected to the injection pipe (210) through the inside of the blade body (100) and can receive the solvent from the injection pipe (210). For example, when the inkjet head is a device for forming an alignment film of a liquid crystal display device, contaminants of a PI (polyimide) solution may remain in the nozzle of the inkjet head, and the nozzle (110) can spray N-methyl pyrrolidone (NMP), which is a solvent, toward the contaminants.

The above-mentioned injection holes (110) may be formed in plurality along the first direction (D1). That is, the plurality of injection holes (110) may be arranged in the first direction (D1) on the end of the blade body (100). Each of the injection holes (110) may be in the form of a slit having a length in the first direction (D1).

The above suction port (120) can re-suck the solvents sprayed from the injection port (110) and the contaminants dissolved by the solvents. The suction port (120) is connected to the suction pipe (220) through the inside of the blade body (100) and can receive vacuum suction force from the suction pipe (220). The suction port (120) can be located between the blade tip (130) and the injection port (110).

The above suction port (120) may be in the form of a slit having a length in the first direction (D1). That is, the suction port (120) may be formed in the form of a slit extending in the first direction (D1) on the end of the blade body (100).

The blade tip (130) may be fixedly coupled to one end of the blade body (100). The blade tip (130) may include an elastic material such as silicone. The blade tip (130) may directly wipe away contaminants from the nozzle of the inkjet head, thereby removing the contaminants from the nozzle. When the blade tip (130) is worn, the worn blade tip may be removed from the blade body (100) and then replaced with a new blade tip.

The solvent storage unit (200) above can support the blade body (100) so that the blade body (100) can rotate about the rotation axis (RA). A solvent (CS) can be stored in the solvent storage unit (200). As the blade body (100) rotates, the end of the blade body (100) is immersed in the solvent (CS) of the solvent storage unit (200), so that contaminants around the blade tip (130), the injection port (110), and the suction port (120) can be dissolved in the solvent (CS) and removed.

The above injection pipe (210) is connected to the injection port (110) through the inside of the blade body (100) and can provide the solvent to the injection port (110).

The above suction pipe (220) is connected to the suction port (120) through the inside of the blade body (100) and can provide vacuum suction force to the suction port (120).

According to the present embodiment, the inkjet head cleaning device can immediately suck up contaminants wiped from the nozzle surface of the inkjet head, thereby minimizing contaminants (inkjet ink) remaining on the nozzle surface.

In addition, by spraying the solvent through the nozzle, the efficiency of wiping can be increased, the generation of solids at the blade tip can be prevented, the generation of solids can be reduced, making management easier, and the maintenance of the inkjet head cleaning device can be made easier.

In addition, through efficient wiping, the residual ink in the nozzle of the inkjet head can be reduced, thereby reducing abnormal ejection problems caused by nozzle clogging, etc.

FIGS. 2A to 2D are drawings showing an inkjet head cleaning method using the inkjet head cleaning device of FIG. 1.

In general, an inkjet printing system is used when forming color filter patterns and alignment film patterns of liquid crystal displays, and when forming thin film patterns made of various organic materials, including the light-emitting layer of an organic light emitting display.

In order to form the color filter pattern and the alignment film pattern, etc., through an inkjet printing method, ink is dropped in a constant volume at each predetermined location through a plurality of nozzles of an inkjet head.

Therefore, in the inkjet printing system, it is very important to maintain and manage the nozzle (12) of the inkjet head (10). If the bottom of the nozzle (12) of the inkjet head (10) is contaminated by contaminants (PC), the spray distribution and spray straightness become poor. If the spray straightness becomes poor, the probability that ink will be sprayed to an adjacent pixel increases. In addition, if the bottom of the nozzle (12) of the inkjet head (10) is severely contaminated, the spray does not occur, so ink accumulates on the bottom of the nozzle (12), and the adjacent nozzles also do not spray.

If the inkjet head (10) is used for a long period of time, the nozzle (12) of the inkjet head (10) is likely to become clogged, causing defects, so cleaning of the inkjet head (10) is necessary.

Referring to FIGS. 1 and 2a, the blade body (100) and the blade tip (130) of the inkjet head cleaning device may form a first angle (θ1) with respect to the third direction (D3) perpendicular to the ground. The first angle (θ1) may be less than 45 degrees.

The surface of the nozzle (12) of the inkjet head (10) may be contaminated with the contaminant (PC).

Referring to FIGS. 1 and 2b, when the inkjet head (10) moves in a direction opposite to the second direction (D2) (see the arrow on the inkjet head (10) in the drawing), the contaminant (PC) can be removed from the surface of the nozzle (12) of the inkjet head (10) by the blade tip (130). At this time, the solution can be sprayed onto the surface of the nozzle (10) from the injection port (110), and the contaminant (PC) dissolved by the solution can be removed by the blade tip (130) and sucked through the suction port (120).

Referring to FIGS. 1 and 2c, the inkjet head (10) continues to move in the opposite direction of the second direction (D2) (see the arrow on the inkjet head (10) in the drawing), and the contaminants (PC) on the surface of the nozzle (12) can be removed by the blade tip (130). The contaminants (PC) may be sucked in through the suction port (120) or may remain on the blade tip (130).

Referring to FIGS. 1 and 2d, the surface of the nozzle (12) of the inkjet head (10) is cleaned and can be used again in the inkjet process. The blade body (100) rotates so that the blade tip (130) is immersed in the solvent (CS) of the solvent storage unit (200), and accordingly, the contaminants (PC) remaining on the surface of the blade tip (130) can be dissolved in the solvent (CS) and removed. In addition, the area around the injection port (110) and the suction port (120) can also be cleaned together. At this time, when the blade body (100) is rotated to form a second angle (θ2) greater than the first angle (θ1) with respect to the third direction (D3), the blade tip (130) can be immersed in the solvent (CS).

Thereafter, the blade body (100) can be rotated again to return to a ready position for inkjet head cleaning. (See FIG. 2a)

According to the present embodiment, contaminants on the bottom surface of the nozzle of the inkjet head are dissolved by a solvent sprayed from an injection port, removed from the nozzle by a blade tip, and the contaminants dissolved by the solvent are sucked through a suction port. In addition, contaminants remaining on the blade tip are dissolved in a solvent in a solvent storage portion by the rotation of the blade body and removed from the blade tip, so that the contaminants are efficiently cleaned without damaging the nozzle of the inkjet head, and continuous cleaning can be performed.

FIG. 3 is a perspective view of an inkjet head cleaning device according to one embodiment of the present invention.

Referring to FIG. 3, the inkjet head cleaning device may be substantially the same as the inkjet head cleaning device of FIG. 1, except that it further includes an auxiliary suction port (140). Therefore, repeated descriptions are brief or omitted.

The inkjet head cleaning device may include a blade body (100), an injection port (110), a suction port (120), a blade tip (130), a solvent storage unit, an injection tube, and a suction tube. The solvent storage unit, the injection tube, and the suction tube are not shown in the drawing, but are substantially the same as the configuration of the inkjet head cleaning device of FIG. 1.

The above blade body (100) has a rotation axis (RA) parallel to the first direction (D1) and can extend in a direction perpendicular to the rotation axis (RA). The blade body (100) can be arranged to be inclined at a predetermined angle with respect to the third direction (D3).

The injection port (110) and the suction port (120) may be formed at the end of the blade body (100). In addition, the blade tip (130) may be connected and fixed to the end of the blade body (100).

Additionally, at the end of the blade body (100), an auxiliary suction port (140) may be formed in the opposite direction to where the suction port (120) is formed based on the blade tip (130). The auxiliary suction port (140) may have a slit shape similar to the suction port (120).

The auxiliary suction port (140) can re-suck the solvents sprayed from the injection port (110) and the contaminants dissolved by the solvents. The auxiliary suction port (140) is connected to the suction pipe through the inside of the blade body (100) and can receive vacuum suction force from the suction pipe. The auxiliary suction port (140) can be positioned in the opposite direction in which the suction port (120) is formed with respect to the blade tip (130). That is, the blade tip (130) can be placed between the suction port (120) and the auxiliary suction port (140).

Contaminants and solvent flowing forward of the blade tip (130) can be sucked in by the suction port (120), and contaminants and solvent flowing backward of the blade tip (130) can be sucked in by the auxiliary suction port (140).

FIGS. 4A to 4D are drawings showing an inkjet head cleaning method using the inkjet head cleaning device of FIG. 1.

Referring to FIGS. 3 and 4a, the blade body (100) and the blade tip (130) of the inkjet head cleaning device can form a first angle (θ1) with respect to the third direction (D3) perpendicular to the ground.

The surface of the nozzle (12) of the inkjet head (10) may be contaminated with the contaminant (PC).

Referring to FIGS. 3 and 4b to 4c, the inkjet head (10) moves in a direction opposite to the second direction (D2) (see the arrow above the inkjet head (10) in the drawing), and the contaminant (PC) can be removed from the surface of the nozzle (12) of the inkjet head (10) by the blade tip (130).

At this time, the solution can be sprayed onto the surface of the nozzle (10) through the injection port (110), and the contaminants (PC) dissolved by the solution can be removed by the blade tip (130) and sucked through the suction port (120) and the auxiliary suction port (140).

Referring to FIGS. 3 and 4d, the surface of the nozzle (12) of the inkjet head (10) is cleaned and can be used again in the inkjet process. The blade body (100) rotates so that the blade tip (130) is immersed in the solvent (CS) of the solvent storage unit (200), and accordingly, the contaminants (PC) remaining on the surface of the blade tip (130) can be dissolved in the solvent (CS) and removed.

Thereafter, the blade body (100) can be rotated again to return to a ready position for inkjet head cleaning.

FIG. 5 is a cross-sectional view of a liquid crystal display device manufactured using an inkjet head cleaning device and an inkjet head cleaning method according to one embodiment of the present invention.

Referring to FIG. 5, the liquid crystal display device may include a first base substrate (500), a buffer layer (510), a gate electrode (GE), a gate insulating layer (520), an active pattern (ACT), an interlayer insulating layer (530), a source electrode (SE) and a drain electrode (DE), an insulating layer (540), a pixel electrode (PE), a first alignment film (550), a liquid crystal layer (LC), a second alignment film (620), a common electrode (CE), an overcoating layer (610), a color filter pattern (CF), a light-shielding pattern (BM), and a second base substrate (600).

The buffer layer (510) may be disposed on the first base substrate (500). The gate electrode (GE) may be disposed on the buffer layer (510). The gate insulating layer (520) may be disposed on the buffer layer (510) on which the gate electrode (GE) is disposed. The active pattern (ACT) may be disposed on the gate insulating layer (520). The interlayer insulating layer (530) may be disposed on the gate insulating layer (520) on which the active pattern (ACT) is disposed. The source electrode (SE) and the drain electrode (DE) may be disposed on the interlayer insulating layer (530). The gate electrode (GE), the active pattern (ACT), the source electrode (SE), and the drain electrode (DE) may be included as components of a thin film transistor (TFT).

An insulating layer (540) may be disposed on the interlayer insulating layer (530) on which the source electrode (SE) and the drain electrode (DE) are disposed. The pixel electrode (PE) electrically connected to the thin film transistor (TFT) may be disposed on the insulating layer (540). The first alignment film (550) may be disposed on the pixel electrode (PE). The first alignment film (550) may include polyimide (PI).

The second base substrate (600) may be placed so as to face the first base substrate (500). The light-shielding pattern (BM) and the color filter pattern (CF) may be placed on the second base substrate (600). The over-coating layer (610) may be placed on the light-shielding pattern (BM) and the color filter pattern (CF). The second alignment film (620) may be placed on the over-coating layer (610). The second alignment film (620) may include polyimide (PI).

The liquid crystal layer (LC) may be placed between the first alignment film (550) and the second alignment film (620).

Here, at least one of the color filter pattern (CF), the light-shielding pattern (BM), the first alignment film (550) and the second alignment film (620) can be formed using an inkjet printing method of dropping a solution from a nozzle of an inkjet head, and at this time, the nozzle of the inkjet head can be cleaned by a method for cleaning an inkjet head according to an embodiment of the present invention.

FIG. 6 is a cross-sectional view of an organic light-emitting display device manufactured using an inkjet head cleaning device and an inkjet head cleaning method according to one embodiment of the present invention.

Referring to FIG. 6, the display device may include a base substrate (700), a buffer layer (710), an active pattern (ACT), a gate insulating layer (720), a gate electrode (GE), an interlayer insulating layer (730), a source electrode (SE) and a drain electrode (DE), a via insulating layer (740), a pixel defining layer (PDL), a light-emitting structure (750), and an encapsulation layer (760).

The buffer layer (710) may be disposed on the base substrate (700). The active pattern (ACT) may be disposed on the buffer layer (710). The gate insulating layer (720) may be disposed on the active pattern (ACT). A gate electrode (GE) may be disposed on the gate insulating layer (720). The interlayer insulating layer (730) may be disposed on the gate electrode (GE). The source electrode (SE) and the drain electrode (DE) may be disposed on the interlayer insulating layer (730). The via insulating layer (740) may be disposed on the source electrode (SE) and the drain electrode (DE). The light-emitting structure (750) including a first electrode (751), a light-emitting layer (752), and a second electrode (753), and a pixel defining layer (PDL) may be disposed on the via insulating layer (740). A sealing layer (760) may be placed on the above light-emitting structure (750).

Here, at least one of the pixel defining film (PDL) and the light-emitting layer (752) can be formed using an inkjet printing method of dropping a solution from a nozzle of an inkjet head, and at this time, the nozzle of the inkjet head can be cleaned by a method for cleaning an inkjet head according to an embodiment of the present invention.

According to the method for cleaning an inkjet head according to the present embodiment, more efficient cleaning is possible by cleaning the contaminants (solid crystals) formed by the evaporation of the solvent of the solution remaining in the nozzle of the inkjet head using a solvent and a blade tip sprayed through an injection port.

In addition, the sprayed solvent and dissolved contaminants can be sucked in through the suction port, thereby improving the cleaning efficiency.

In addition, since contaminants remaining on the blade tip are removed by being immersed in the solvent stored in the solvent storage unit, maintenance of the inkjet head cleaning device can be made easy.

Figure 7 is a flowchart showing an inkjet head cleaning method according to one embodiment of the present invention.

Referring to FIG. 7, the inkjet head cleaning method may include a step of spraying a solvent (S100), a step of removing contaminants from a nozzle (S200), a step of sucking contaminants (S300), and a step of removing remaining contaminants from a blade tip (S400).

In the step of spraying the solvent (S100), the solvent can be sprayed toward the nozzle of the inkjet head. For example, the solution can be sprayed through a spray port formed at the end of the blade body to which the blade tip is connected.

In the step (S200) of removing the contaminant from the nozzle, the contaminant on the nozzle dissolved by the sprayed solvent can be removed from the nozzle using a blade tip. For example, the contaminant on the surface of the nozzle can be removed by wiping it with the blade tip.

In the step (S300) of sucking the contaminant, the contaminant remaining on the blade tip can be removed from the blade tip by immersing it in a solvent stored in a solvent storage unit. For example, the contaminant and the solvent can be sucked through a suction port formed at the end of the blade body and arranged between the injection port and the blade tip.

In the step (S400) of removing the remaining contaminants from the blade tip, the blade tip may be immersed in a solvent stored in a solvent storage unit, thereby dissolving the contaminants remaining on the blade tip into the solvent.

Figure 8 is a flowchart showing a substrate processing method according to one embodiment of the present invention.

Referring to FIG. 8, the substrate processing method may include a step (S10) of forming a pattern layer on a substrate using an inkjet printing method, and a step (S20) of cleaning a nozzle surface of an inkjet head.

In the step (S10) of forming a pattern layer on a substrate using the inkjet printing method, a solution may be dropped from a nozzle of an inkjet head to form a pattern layer on the substrate using the inkjet printing method.

In the step (S20) of cleaning the nozzle expression of the inkjet head, the surface of the nozzle of the inkjet head can be cleaned using an inkjet head cleaning method according to one embodiment of the present invention.

Here, if the substrate is a substrate of a liquid crystal display device, the pattern layer may be a color filter pattern, a light-shielding pattern, or an alignment film, and if the substrate is an organic light emitting display device, the pattern layer may be a light-emitting layer.

Although the present invention has been described above with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various modifications and changes may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below.

100: Blade body 110: Nozzle
120: Inlet 130: Blade tip
200: Solvent storage compartment

Claims (19)

A blade body rotatable about an axis of rotation and extending in a direction perpendicular to the axis of rotation;
A nozzle formed at the end of the blade body and spraying a solvent to an inkjet head having a nozzle formed therein;
A blade tip connected and fixed to the end of the blade body and provided to wipe and remove contaminants on the surface of the nozzle; and
A suction port formed at the end of the blade body and arranged between the nozzle and the blade tip to suck the solvent sprayed from the nozzle,
The above suction port is a slit shape extending in a direction parallel to the rotation axis,
An inkjet head cleaning device, characterized in that an auxiliary suction port is further formed at the end of the blade body in an opposite direction to where the suction port is formed based on the blade tip. In the first paragraph,
Further comprising a solvent storage section in which a solvent is stored,
An inkjet head cleaning device characterized in that the blade body and the solvent storage unit are combined so that the blade tip is immersed in the solvent when the blade body rotates. In the first paragraph,
An inkjet head cleaning device characterized in that the blade tip contacts the nozzle and removes contaminants on the surface of the nozzle while forming a first angle less than 45 degrees with respect to a direction perpendicular to the lower surface of the inkjet head on which the nozzle is formed. In the first paragraph,
Further comprising an injection pipe and a suction pipe connected to the above blade body,
The above nozzle is connected to the injection pipe through the inside of the blade body, and receives the solvent from the injection pipe.
An inkjet head cleaning device, characterized in that the suction port is connected to the suction tube through the inside of the blade body and receives vacuum suction force from the suction tube. delete In the first paragraph,
An inkjet head cleaning device, characterized in that the nozzle is in the form of a slit extending in a direction parallel to the rotation axis. In the first paragraph,
An inkjet head cleaning device, characterized in that the solvent comprises N-methyl pyrrolidone (NMP) and the contaminant comprises polyimide (PI). In the first paragraph,
An inkjet head cleaning device, characterized in that the blade tip comprises silicone. A step of spraying solvent toward the nozzle of the inkjet head;
A step of removing contaminants on the nozzle dissolved by the sprayed solvent from the nozzle using a blade tip;
a step of suctioning the contaminants removed by the blade tip; and
A step of removing the contaminants remaining on the blade tip from the blade tip by immersing the contaminants in a solvent stored in a solvent storage unit,
In the above suction step, the contaminants and the solvent are sucked through a suction port arranged between the blade tip and the nozzle formed at the end of the blade body to which the blade tip is connected.
The above blade body is rotatable around a rotation axis and extends in a direction perpendicular to the rotation axis,
The above suction port is a slit shape extending in a direction parallel to the rotation axis,
A method for cleaning an inkjet head, characterized in that an auxiliary suction port is further formed at the end of the blade body in an opposite direction to where the suction port is formed based on the blade tip. In Article 9,
In the above injection step,
A method for cleaning an inkjet head, characterized by spraying the solvent through the nozzle. In Article 10,
In the step of removing from the above nozzle,
A method for cleaning an inkjet head, characterized in that the contaminants on the surface of the nozzle are removed by wiping with the blade tip. In Article 11,
A method for cleaning an inkjet head, characterized in that the blade tip contacts the nozzle to remove the contaminant while forming a first angle less than 45 degrees with respect to a direction perpendicular to the lower surface of the inkjet head on which the nozzle is formed. delete In Article 10,
In the step of removing from the above blade tip,
A method for cleaning an inkjet head, characterized in that the blade tip is immersed in a solvent stored in a solvent storage unit to dissolve contaminants remaining on the blade tip into the solvent. In Article 9,
A method for cleaning an inkjet head, characterized in that the solvent comprises N-methyl pyrrolidone (NMP) and the contaminant comprises polyimide (PI). A step of forming a pattern layer on a substrate using an inkjet printing method that drops a solution from a nozzle of an inkjet head;
Comprising a step of cleaning the surface of the nozzle of the inkjet head,
The above cleaning step is
A step of spraying a solvent toward the nozzle of the inkjet head;
A step of removing contaminants on the nozzle dissolved by the sprayed solvent from the nozzle using a blade tip;
a step of suctioning the contaminants removed by the blade tip; and
A step of removing the contaminants remaining on the blade tip from the blade tip by immersing the contaminants in a solvent stored in a solvent storage unit,
In the above suction step, the contaminants and the solvent are sucked through a suction port arranged between the blade tip and the nozzle formed at the end of the blade body to which the blade tip is connected.
The above blade body is rotatable around a rotation axis and extends in a direction perpendicular to the rotation axis,
The above suction port is a slit shape extending in a direction parallel to the rotation axis,
A substrate processing method, characterized in that an auxiliary suction port is further formed at the end of the blade body in an opposite direction to where the suction port is formed based on the blade tip. In Article 16,
A substrate processing method, characterized in that the substrate and the pattern layer are components of a display device. In Article 17,
The above display device is a liquid crystal display device,
A substrate processing method, characterized in that the pattern layer is a color filter pattern, a light-shielding pattern, or an alignment film. In Article 17,
The above display device is an organic light emitting display device,
A substrate processing method, characterized in that the above pattern layer is a light-emitting layer.

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