KR102470479B1 - Valve apparatus and operating method thereof - Google Patents

Abstract

The present invention, a body portion in which a passage is formed, a plate portion formed in an area capable of closing the passage, installed in the body portion to be able to move forward and backward with respect to the passage, and having a refrigerant flow path therein, and a plate portion capable of moving the plate forward and backward A drive part installed in the body part to detect the internal state of the passage, a sensor part mounted in the plate part to detect the internal state of the passage, and a refrigerant to adjust at least one of the supply flow rate and supply temperature of the refrigerant supplied to the refrigerant passage according to the internal state. A valve device including a control unit connected to a passage and a control method thereof, which can suppress or prevent deterioration by adjusting the cooling rate of the device according to the internal state of the passage, and a control method thereof are proposed.

Description

Valve device and its control method {VALVE APPARATUS AND OPERATING METHOD THEREOF}

The present invention relates to a valve device and a control method thereof, and more particularly, to a valve device capable of suppressing or preventing deterioration by adjusting a cooling rate of the device according to an internal state of a passage and a control method thereof.

BACKGROUND ART When manufacturing a semiconductor, a liquid display (LCD), an organic light emitting device (OLED), or the like, at least one process of thin film deposition and etching is performed.

A substrate processing facility that performs this process is a chamber provided with an internal space capable of depositing a thin film on a substrate or etching the thin film on the substrate, and an injection supplying a gas (hereinafter referred to as process gas) for thin film deposition or etching to the chamber. It includes a pipe, a transfer pipe that is connected to the injection pipe and transfers process gas to the injection pipe, and a valve that controls communication between the transfer pipe and the injection pipe.

Here, the valve includes a blade capable of horizontal movement in a direction crossing the connection direction of the injection pipe and the transfer pipe. At this time, while controlling the flow of the process gas by operating the blade, at least a part of the blade may be exposed to the heat of the process gas itself. As a result, the blade may be deteriorated and deformed or corroded.

The background technology of the present invention is published in the following patent documents.

KR 10-1999-0053265 A KR 10-2001-0076318 A

The present invention provides a valve device capable of suppressing or preventing deterioration of the device by adjusting the cooling rate of the device according to the internal state of the passage and a control method thereof.

A valve device according to an embodiment of the present invention includes a body portion in which a passage is formed to pass an object to be processed; a plate portion formed with an area capable of closing the passage, installed in the body to be able to move forward and backward with respect to the passage, and having a refrigerant flow path therein; a driving unit installed in the body so as to move the plate forward and backward; a sensor unit mounted on the plate unit to detect an internal state of the passage; and a controller connected to the refrigerant passage to adjust at least one of a supply flow rate and a supply temperature of the refrigerant supplied to the refrigerant passage according to the internal state.

The body portion may include a valve housing disposed between first and second transfer paths through which the object to be processed passes, and having the passage formed to communicate with the first and second transfer paths; a drive housing disposed behind the valve housing and supporting the plate portion; and a connection housing formed to connect the valve housing and the drive housing, through which the plate portion passes.

The body portion includes a valve housing in which the passage is formed and a connection housing supporting the plate portion at a rear side of the valve housing, and the valve housing has a through hole in a direction in which the plate portion moves forward and backward so as to pass the plate portion. The passage is formed, the width of the through hole is larger than the thickness of the plate part in the extension direction of the passage, and the passage can communicate with a spaced space between the plate part and the inner surface of the connection housing through the through hole. have.

A portion of the plate portion may be located in the drive housing and the connection housing, and a portion of the plate portion may pass through the through hole and protrude into the passage.

The plate portion may include a blade extending in the forward and backward direction and the width direction of the passage so as to close the passage, at least a part of which is disposed inside the connection housing and can be moved forward and backward by the drive unit; The refrigerant passage formed concavely on one surface of the blade and extending along the circumference of the blade; It may include; a passage cover mounted on one surface of the blade to seal the refrigerant passage from the outside.

The plate unit may include a driving shaft disposed to penetrate the driving housing at the rear of the blade and connected to the blade; and a sensor installation hole formed to pass through the driving shaft in the forward and backward directions and extending into the inside of the blade.

The refrigerant passage may extend around an edge of the blade, and the sensor installation hole may pass through a center of the blade and extend to an edge of the blade.

The drive unit may be formed to inject and discharge fluid into and out of the drive housing to move the plate unit forward and backward.

The driving part may include a partition wall spaced apart from a rear end of the driving housing, protruding from an inner surface of the driving housing, and contacting the plate part to form a cylinder inside the driving housing; a piston disposed between the rear end of the drive housing and the partition wall, protruding from the plate portion, and contacting the inner surface of the drive housing; It may include; first and second fluid pipes respectively formed to pass through the drive housing at the front and rear of the piston so as to inject and discharge fluid into and out of the cylinder.

The sensor unit may include an insertion member inserted into the plate unit; A plurality of temperature sensors are installed at a plurality of locations of the insertion member and indirectly measure the internal temperature of the passage through the plate part and output the result as an internal state of the passage.

The plurality of temperature sensors may be arranged in the forward and backward directions along the insertion member to respectively measure the central temperature and the ambient temperature of the passage.

The sensor unit may include a fastening member mounted at a rear end of the plate unit, disposed behind the insertion member, and spaced apart from the insertion member; It may include; an elastic member for elastically supporting the insertion member to the fastening member.

The control unit may include a plurality of refrigerant pipes disposed to pass through the plate unit and connected to the refrigerant passage; a communication unit connected to the sensor unit; A controller connected to the refrigerant pipe and the communication means to adjust the supply flow rate and supply temperature of the refrigerant by using the detection result of the sensor unit; may include.

The controller includes a refrigerant chamber connected to the refrigerant pipe; a pump installed in the refrigerant chamber; a heating means and a cooling means connected to the refrigerant pipe; A control circuit connected to the communication unit, the pump, the heating unit, and the cooling unit, and controlling operations of the pump, the heating unit, and the cooling unit according to the detection result.

A valve device control method according to an embodiment of the present invention includes the steps of controlling opening and closing of a passage connected to a chamber using a plate unit; circulating the refrigerant into the plate part; detecting an internal state of the passage; and controlling a cooling rate of the plate part by adjusting at least one of a supply flow rate and a supply temperature of the refrigerant according to the internal state.

The process of detecting the internal state of the passage may include a process of indirectly measuring the internal temperature of the passage through the plate portion exposed to the passage.

The process of indirectly measuring the internal temperature of the passage may include measuring temperatures at a plurality of positions of the plate part.

The process of controlling the cooling rate of the plate part may include calculating an average of temperatures measured at the plurality of positions; maintaining the supply flow rate and supply temperature of the refrigerant when the average is within the reference temperature range; reducing the supply flow rate of the refrigerant and increasing the supply temperature when the average is less than the reference temperature range; If the average is greater than the reference temperature range, increasing the supply flow rate of the refrigerant and lowering the supply temperature; may include.

During the process of controlling the opening and closing of the passage to the process of controlling the cooling rate of the plate part, the process of correcting the position of the sensor unit installed inside the plate part according to the forward and backward movement, expansion and contraction of the plate part; may include. have.

According to an embodiment of the present invention, while controlling the opening and closing of the passage connected to the chamber using the plate part, the internal state of the passage may be detected, and at least one of the flow rate and temperature of the refrigerant supplied to the plate part may be set according to the detection result. can be adjusted From this, it is possible to adjust the cooling rate of the plate part in real time in response to changes in the internal state of the passage. Accordingly, deterioration of the plate portion can be effectively suppressed or prevented, and the lifespan of the device can be improved.

1 is a schematic diagram of a substrate processing facility according to an embodiment of the present invention.
Figure 2 is a schematic diagram showing the operation of the valve device according to an embodiment of the present invention.
Figure 3 is a plan view showing a part of the valve device according to an embodiment of the present invention.
Figure 4 is a plan view showing the rest of the valve device according to an embodiment of the present invention.
5 is a side cross-sectional view showing a part of a valve device according to an embodiment of the present invention.
6 is a side cross-sectional view showing a part of a blade according to an embodiment of the present invention.
7 is a side cross-sectional view showing a part of a drive shaft according to an embodiment of the present invention.
8 is a side cross-sectional view showing a plate unit according to an embodiment of the present invention.
9 is a cross-sectional plan view showing a plate unit according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and will be implemented in a variety of different forms. Only the embodiments of the present invention are provided to complete the disclosure of the present invention and to fully inform those skilled in the art of the scope of the invention. In order to explain an embodiment of the present invention, the drawings may be exaggerated, and the same reference numerals in the drawings refer to the same elements.

A valve device and a control method thereof according to an embodiment of the present invention may be applied to a valve device that controls opening and closing of a passage connected to a process chamber in which manufacturing processes for manufacturing semiconductors, liquid crystal display devices, organic light emitting devices, and the like are performed.

In this case, the passage may be a passage through which a fluid including a process gas for thin film deposition and etching and a cleaning gas for cleaning the process chamber may be moved. Also, the passage may be a passage through which a substrate may be brought in and out of the process chamber. Also, the passage may be a passage capable of connecting the process chamber and the vacuum pump. Of course, other types of passages may be various other than these.

Hereinafter, an embodiment of the present invention will be described based on a valve device that controls opening and closing of a passage through which process gas is moved to a process chamber.

1 is a schematic diagram of a substrate processing facility according to an embodiment of the present invention.

Referring to FIG. 1 , a substrate processing facility according to an embodiment of the present invention includes a chamber 100 formed to process a substrate, a supply device 200 formed to supply fluid to the chamber 100, It includes a pipe 300 connecting the chamber 100 and the supply device 200 to move fluid, and a valve device 400 mounted to open and close the pipe 300.

The chamber 100 may deposit a thin film on the substrate and may have an internal space formed to etch the thin film on the substrate. The chamber 100 may be formed in a tubular shape. Inside the chamber 110 , a substrate support unit and a fluid spray unit may be disposed to face each other. The substrate support may seat the substrate. Also, the fluid ejection unit may be connected to the pipe 300 and may eject the fluid to the substrate.

The supply device 200 may store a fluid for processing a substrate therein and supply the stored fluid to the pipe 300 . At this time, the supply device 200 may heat the fluid to a predetermined temperature. Also, the supply device 200 may ionize the fluid.

The pipe 300 may include a transfer pipe 310 connected to the supply device 200 and an injection pipe 320 mounted to connect the transfer pipe 310 and the fluid ejection unit. A valve device 400 may be installed between the transfer pipe 310 and the injection pipe 320 . At this time, the valve device 400 may control communication between the transfer pipe 310 and the injection pipe 320 .

Meanwhile, the inside of the chamber 100 may be controlled to a high temperature, for example, a predetermined temperature higher than room temperature. In addition, the temperature of the fluid supplied to the chamber 100 through the pipe 300 may be controlled to be high. Accordingly, the valve device 400 may be exposed to the high temperature of the chamber 100 through the pipe 300 and may be exposed to the high temperature of the fluid passing through the pipe 300 .

In this case, the degree of exposure of the valve device 400 to high temperature may be different between a state in which the valve device 400 closes the pipe 300 and a state in which the pipe 300 is opened. For example, in a state where the valve device 400 is closing the pipe 300, a portion of the valve device 400 moves forward to cross the pipe 300 and contacts the fluid inside the pipe 300 over a large area. On the other side, a part of the valve device 400 may be exposed to the chamber 100 in a large area through the pipe 300. Thus, the valve device 400 can be heated relatively quickly.

In a state in which the valve device 400 opens the pipe 300, the protruding area of the valve device 400 within the pipe 300 is reduced, and is in contact with the fluid inside the pipe 300 in a relatively small area. can Thus, the valve device 400 may be heated relatively slowly.

While the substrate processing process is repeated, the valve device 400 may repeat opening and closing of the pipe 300 according to a predetermined schedule. Here, when the valve device 400 is cooled according to the state in which the valve device 400 closes the pipe 300, the valve device 400 may be supercooled, which may affect the temperature of the fluid. .

If the valve device 400 cools the valve device 400 according to the state in which the pipe 300 is open, the valve device 400 may not be cooled to a desired temperature when the pipe 300 is closed and may be thermally contaminated. have. Thus, the valve device 400 may be deteriorated at an early stage.

Therefore, the valve device 400 according to an embodiment of the present invention detects the internal state of the pipe 300 and uses the result to adjust the cooling rate, thereby preventing deterioration without affecting the process. can be done, and the lifespan can be extended.

Figure 2 is a schematic diagram showing the operation of the valve device according to an embodiment of the present invention. Figure 3 is a plan view showing a portion of the valve device according to an embodiment of the present invention, Figure 4 is a plan view showing the rest of the valve device according to an embodiment of the present invention. FIG. 5 is a side cross-sectional view showing the inside of a valve device according to an embodiment of the present invention by cutting a part along the line A-A' of FIG. 4;

Referring to Figures 2 to 5, the valve device 400 according to an embodiment of the present invention will be described in detail.

Referring to FIG. 2 , the valve device 400 according to an embodiment of the present invention is a valve device 400 capable of suppressing or preventing deterioration due to exposure to the inside of the pipe 300, and is a valve device 400 that can be treated with an object such as a fluid ( The body portion 410 in which a passage is formed so as to pass f), formed in an area capable of closing the passage, installed in the body portion 410 so as to be able to move forward and backward with respect to the passage, and a refrigerant passage 422 therein A plate unit 420 having a plate unit 420, a driving unit 430 installed in the body unit to move the plate unit 420 forward and backward, and a sensor unit mounted on the plate unit 420 to detect the internal state of the passage ( 440), and a controller 450 connected to the refrigerant passage 422 to adjust at least one of a supply flow rate and a supply temperature of the refrigerant supplied to the refrigerant passage 422 according to the detected internal state.

Referring to FIG. 5 , the body portion 410 is a valve housing disposed between the first and second transfer paths through which the fluid f passes and having a passage H1 formed in communication with the first and second transfer paths. 411, a drive housing 413 disposed behind the valve housing 411 and supported by the plate portion 420, and formed to connect the valve housing 411 and the drive housing 413, the plate portion It may include a connection housing 412 through which 420 passes.

In this case, the first transfer path may include the transfer pipe 310 . Also, the second transfer path may include an injection pipe 320 . Here, the passage H1 may extend in a direction parallel to the direction in which the transfer pipe 310 and the injection pipe 320 are arranged.

The valve housing 411 may include one surface and the other surface facing each other in the extending direction of the passage H1 and a side surface connecting the one surface and the other surface. Openings may be formed on one side and the other side of the valve housing 411 . At this time, a passage H1 may be formed to connect the opening on one side and the opening on the other side of the valve housing 411 . The valve housing 411 may have a hollow pipe shape. Meanwhile, a through hole may be formed in the valve housing 411 in a direction in which the plate portion 420 moves forward and backward so that the plate portion 420 can pass therethrough.

The connection housing 412 may be mounted on the side of the valve housing 411 at the rear of the valve housing 411 . Here, rear and front may be determined based on a direction in which the plate unit 420 moves forward and backward. The forward and backward direction may be a direction crossing the extension direction of the passage H1. A direction moving toward the passage H1 is referred to as forward, and a direction moving away from the passage H1 is referred to as backward.

Referring to FIG. 3 , a front end of the connection housing 412 may be formed in a shape surrounding a side surface of the valve housing 411 , and a rear end of the connection housing 412 may be formed in a flange shape.

Referring to FIG. 5 , the drive housing 413 may be mounted on the rear end of the connection housing 412 . A cylinder S may be formed inside the drive housing 413 . The cylinder (S) may be supplied with fluid through the driving unit 430 . The fluid used for forward and backward movement of the plate unit 420 may be referred to as a working fluid to be distinguished from the fluid in the pipe 300 . The plate unit 420 may move forward and backward by injecting the working fluid.

Referring to FIG. 2 , a portion of the plate portion 420 is located in the drive housing 413 and the connection housing 412, and the rest passes through the through hole of the valve housing 411 and protrudes into the passage H1. can The plate unit 420 may move forward into the passage H1 to close the pipe 300 and may move backward from the passage H1 to open the pipe 300 . A part of the rear end of the plate portion 420 may protrude toward the rear of the drive housing 413 . The control unit 450 may be mounted on the protruding portion of the rear end of the plate unit 420 .

Referring to FIG. 5 , the plate portion 420 extends in forward and backward directions and in the width direction of the passage H1 so as to close the passage H1, and at least a portion thereof is inside the connection housing 412. A blade 421 disposed and capable of moving forward and backward by the drive unit 430, a refrigerant passage 422 formed concavely on one surface of the blade 421 and extending along the circumference of the blade 421, and a refrigerant passage 422 ) may include a flow path cover 423 mounted on one side of the blade 421 to seal it.

Referring to FIG. 3 , the length of the blade 421 in the forward and backward directions may be greater than the inner diameter of the passage H1. Also, the width of the blade 421 may be the same as that of the passage H1. Meanwhile, a front end of the blade 421 may be formed in a semicircular shape so as to be in close contact with the inner surface of the valve housing 411 . Also, the rear end of the blade 421 may be formed in a rectangular plate shape.

The refrigerant passage 422 may extend from the inside of the blade 421 around the edge of the blade 421 . More specifically, the refrigerant passage 422 may extend along the circumference of one surface of the blade 421 . One side may be the side facing the feeding device 200 (see FIG. 2). A refrigerant may be supplied to the inside of the refrigerant passage 422 , whereby the blade 421 may be cooled. The refrigerant cover 423 may be mounted on one surface of the blade 421 to seal the refrigerant passage 422 .

8 is a side cross-sectional view of a plate unit according to an embodiment of the present invention. FIG. 9 is a cross-sectional plan view of a plate unit according to an embodiment of the present invention, taken along line D-D' of FIG. 8 .

5, 8, and 9, the plate portion 420 is disposed to penetrate the drive housing from the rear of the blade 421 and rotates the drive shaft 424 connected to the blade 421 and the drive shaft 424 back and forth. It may include a sensor installation hole 425 formed to pass through in the true direction and extending into the inside of the blade 421 .

The drive shaft 424 may extend in forward and backward directions. The driving shaft 424 may transmit forward and backward motions by the driving unit 430 to the blade 421 . A part of the driving shaft 424 may be connected to the blade 421 inside the connection housing 412 and the rest may be disposed inside the driving housing 413 . A portion of the rear end of the drive shaft 424 may protrude from the rear of the drive housing 412 .

A part of the sensor installation hole 425 may pass through the driving shaft 424 and the rest may pass through the center of the blade 421 and extend to the edge of the blade 421 . The sensor unit 440 is disposed in the sensor installation hole 425 to be protected from the fluid f.

The drive unit 430 may be formed to inject and discharge a working fluid into and out of the drive housing 413 to move the plate unit 420 forward and backward. That is, the driving unit 430 may have a structure using a working fluid. Of course, the structure of the driving unit 430 may vary. For example, the driving unit 430 may be modified into a structure that moves the plate unit 420 using a motor.

The drive unit 430 is spaced apart from the rear end of the drive housing 413 to form a cylinder S inside the drive housing 413, protrudes from the inner surface of the drive housing 413, and has a plate portion 420. A piston 432 disposed between the partition wall 431 in contact with the rear end of the driving housing 413 and the partition wall 431, protruding from the plate portion 420, and contacting the inner surface of the driving housing 413 , Including first and second fluid pipes 433 and 434 formed to penetrate the drive housing 413 at the front and rear of the piston 432 to inject and discharge fluid into the cylinder S can do.

The barrier rib 431 may form an isolated space inside the driving housing 413 . The isolated space may be divided by the piston 432 to form a cylinder (S). At this time, the cylinder (S) located in front of the piston 432 is referred to as a front cylinder, and the cylinder (S) located in the rear of the piston 432 is referred to as a rear cylinder.

A first fluid pipe 433 may be connected to the front cylinder. A second fluid pipe 434 may be connected to the rear cylinder. When the working fluid is injected into the front cylinder and the working fluid is discharged from the rear cylinder, the piston 432 may move backward. Accordingly, the plate unit 420 may move backward in the same way as the piston 432 . When the working fluid is discharged from the front cylinder and the working fluid is injected into the rear cylinder, the plate part 4420 may move forward while the piston 432 moves forward.

6 is a side cross-sectional view showing a part of a blade according to an embodiment of the present invention by enlarging part B of FIG. 5 . FIG. 7 is a side cross-sectional view illustrating a part of a drive shaft according to an embodiment of the present invention by enlarging part C of FIG. 5 .

The sensor unit 440 may indirectly detect the internal state of the passage H1 through the plate unit 420 . At this time, the internal state may be a temperature. Of course, the internal state may vary. For example, the internal state may be pressure and flow rate. The internal state of the passage H1 detected by the sensor unit 440 may be utilized for control by the controller 450.

Referring to FIG. 6 , the sensor unit 440 is installed in a plurality of positions of the insertion member 441 inserted into the plate unit 420 and the insertion member 441, and measures the internal temperature of the passage H1 to the plate. It may include a plurality of temperature sensors 442 that measure indirectly through the unit 420 and output the internal state of the passage H1.

Insertion member 441 may be bar-shaped. The insertion member 441 is disposed to pass through the sensor installation hole 425 and the temperature sensor 442 may be positioned inside the blade 421 . The plurality of temperature sensors 442 may be arranged in a forward and backward direction along the insertion member 441 to measure the central temperature and the ambient temperature of the passage H1 in the width direction, respectively.

Meanwhile, the length of the plate portion 420 may vary according to the degree to which the plate portion 420 is heated by the fluid f, and accordingly, the length of the sensor installation hole 425 may also change. At this time, to prevent the insertion member 441 from colliding with the inner surface of the sensor installation hole 425, the length of the insertion member 441 may be smaller than the length of the sensor installation hole 425, and the insertion member The rear end of 441 is elastically supported and can accommodate the length change of the sensor installation hole 425 .

Referring to FIG. 7 , the sensor unit 440 is mounted on the rear end of the plate unit 420, is disposed behind the insertion member 441 and is spaced apart from the insertion member 441, the fastening member 443 and An elastic member 444 for elastically supporting the insertion member 441 to the fastening member 443 may be further included.

The fastening member 443 may be screwed to the rear end of the sensor installation hole 425 . The fastening member 443 may support the rear end of the elastic member 444 . The elastic member 444 may include, for example, a spring. Of course, the types of elastic members may vary. For example, the elastic member 444 may include a block made of a predetermined material to have restoring force and elasticity. When the insertion member 441 moves forward and backward according to the change in the length of the sensor installation hole 425, the elastic member 444 can accommodate its movement and expand and contract.

Meanwhile, referring to FIG. 6 , a through hole H2 may be formed through the valve housing 411 in a direction in which the plate portion 420 moves forward and backward so that the plate portion 420 can pass therethrough. Here, the width of the through hole H2 in the extension direction of the passage H1 may be greater than the thickness of the plate portion 420 . Accordingly, the separation space between the plate portion 420 and the inner surface of the connection housing 412 may communicate with the passage H1 through the through hole H2.

Accordingly, when the plate part 420 moves backward and the blade 421 is positioned inside the connection housing 412, a part of the fluid f inside the passage H1 flows between the plate part 420 and the connection housing 412. ), and by this introduced fluid, when the passage H1 is opened, the inside of the passage H1 is thermally connected to the blade 421 and the temperature sensor 442. and the temperature sensor 442 can smoothly measure the internal state of the passage H1, that is, the temperature, through the blade 421 and the introduced fluid.

Referring to FIGS. 4 and 5 , the control unit 450 is disposed to pass through the plate unit 420 and connects a plurality of refrigerant pipes 451 connected to the refrigerant passage 422 and communication connected to the sensor unit 440 . A controller 453 connected to the refrigerant pipe 451 and the communication unit 452 may be included to adjust the supply flow rate and supply temperature of the refrigerant by using the detection result of the unit 452 and the sensor unit 440. .

The plurality of refrigerant pipes 451 extend in forward and backward directions and may extend a predetermined length along the inside of the driving shaft 424 . At this time, one of the plurality of refrigerant pipes 451 may be connected to one end of the annular refrigerant passage 422, and the other may be connected to the other end of the annular refrigerant passage 422.

The communication unit 452 may include a connection plug and a communication line. The connection plug is mounted through, for example, the fastening member 443, and through the connection plug, one side of the communication line extends to a location where the plurality of sensors 442 are installed, and may be connected to the plurality of sensors 442. The other side of the communication line may be connected to the controller 453. Of course, the communication means 452 may be connected to the controller 453 in a wireless communication method.

The controller 453 includes a refrigerant chamber (not shown) connected to the refrigerant pipe 451, a pump (not shown) mounted in the refrigerant chamber, a heating means and a cooling means (not shown) connected to the refrigerant pipe 451, communication A control circuit (not shown) connected to the means 452, the pump, the heating means, and the cooling means, and controlling the operation of the pump, the heating means, and the cooling means according to the detection results detected by the plurality of sensors 442. can do.

The refrigerant chamber may include a predetermined storage tank. Of course, the coolant chamber may include a coolant supply source connected to the utility line of the substrate processing facility. The refrigerant chamber may continuously receive replacement supply of refrigerant at a predetermined temperature. In addition, the refrigerant chamber may include a heater and a cooler to maintain the refrigerant at a predetermined temperature. The operation of the pump may be controlled by a control circuit. In addition, the flow rate of the refrigerant supplied to and recovered from the refrigerant pipe 451 may be adjusted by controlling the operation of the pump.

Heating means may vary. For example, the heating means may include a hot wire. The heating unit may contact at least one of the refrigerant pipe 451 and the storage tank. The cooling means may include a radiator and a condenser. The cooling unit is spaced apart from the heating unit and may contact at least one of the refrigerant pipe 451 and the storage tank. Of course, the types of cooling means may vary.

The control circuit may calculate an average of temperatures measured at a plurality of locations by the plurality of sensors 442 . In addition, the control circuit may control the operation of the pump, the heating means, and the cooling means to maintain the supply flow rate and supply temperature of the refrigerant when the calculated average is included in the reference temperature range. For example, the number of rotations of the pump can be maintained, and the operation of the heating unit and the cooling unit can be stopped.

The control circuit may control the operation of the pump, the heating unit, and the cooling unit to reduce the supply flow rate of the refrigerant and increase the supply temperature when the calculated average, that is, the calculated average temperature value is less than the reference temperature range. For example, the rotational speed of the pump may be lowered, the heating means may be operated, and the cooling means may be stopped.

The control circuit may control the operation of the pump, the heating means, and the cooling means to increase the supply flow rate of the refrigerant and lower the supply temperature when the calculated average is greater than the reference temperature range. For example, the rotational speed of the pump may be increased, the heating means may be stopped, and the cooling means may be operated.

By the operation of this control circuit, the temperature of the blade 421 can be smoothly maintained within the reference temperature range. Here, the reference temperature range may be a predetermined temperature range in which the blade 421 may not be thermally damaged. The reference temperature range may vary depending on the material of the blade 421 .

The valve device 400 according to an embodiment of the present invention may further include a sealing part.

Referring to FIGS. 5, 6, and 8, the sealing portion is a first seal formed along the circumference of the front end of the blade 421 so as to seal between the inner surface of the passage H1 and the blade 421. The member 461 and the second sealing member 462 formed on the front surface of the protruding portion protruding from the rear end of the blade 421 may be included.

The first sealing member 461 may seal between the inner surface of the valve housing 411 and the front end of the blade 421 . In addition, the second sealing member 462 may seal between the step inside the through hole H2 and the protrusion of the rear end of the blade 421 .

The sealing unit may include a bellows 463 installed to seal between the inner surface of the connection housing 412 and the driving shaft 424 and an installation protrusion 464 supporting the bellows 463 to the driving shaft 424. When the plate unit 420 moves forward and backward, the bellows 463 can seal between the inner surface of the connection housing 412 and the drive shaft 424 while expanding and contracting.

Hereinafter, a valve device control method according to an embodiment of the present invention will be described with reference to FIGS. 1 to 9 .

A valve device control method according to an embodiment of the present invention is a process of controlling the opening and closing of the passage H1 connected to the chamber 100 using the plate unit 420, circulating a refrigerant into the plate unit 420. The process includes detecting the internal state of the passage H1 and controlling the cooling rate of the plate unit 420 by adjusting at least one of the supply flow rate and supply temperature of the refrigerant according to the detected internal state. .

At this time, during the process of controlling the opening and closing of the passage H1 connected to the chamber 100 using the plate part 420, the process of circulating the refrigerant into the inside of the plate part 420 and the internal state of the passage H1 The detection process may be performed in real time or at predetermined time intervals. In addition, after the process of detecting the internal state of the passage H1, a process of controlling the cooling rate of the plate unit 420 may be performed. Of course, the process of detecting the internal state of the passage H1 and the process of controlling the cooling rate of the plate unit 420 may be sequentially and repeatedly performed.

Meanwhile, the valve device control method according to an embodiment of the present invention may be performed during a process of processing a substrate using a substrate processing facility.

First, a substrate is loaded into the chamber 100 and a fluid f for substrate processing is supplied to the chamber 100 . At this time, the valve device 400 is operated to open the pipe 300. Accordingly, the fluid f may be supplied from the supply device 200 to the chamber 100 . Then, a process of treating the substrate using the fluid f is performed. When the substrate processing is completed, the substrate is unloaded, and cleaning gas is supplied into the chamber 100 to clean the inside of the chamber 100 . At this time, the valve device 400 is operated to close the pipe 300. When the cleaning of the chamber 100 is completed, the process of loading the substrate into the chamber 100 to the process of cleaning the inside of the chamber 100 are repeated for processing the next substrate.

During this process, a process of controlling opening and closing of the passage H1 connected to the chamber 100 may be performed using the plate unit 420 .

The process of opening the passage H1 includes a process of increasing the volume of the front cylinder by discharging the working fluid from the rear cylinder while injecting the working fluid into the front cylinder among the front and rear cylinders connected to the plate unit 420, and The process of retracting the piston 432 using the increase in volume of the piston 432, and the inside of the connection housing 412 by retracting the plate portion 420 connected to the piston 432 from the passage H1 by the retraction of the piston 432 It may include a process of storing in.

The process of closing the passage H1 is a process of injecting the working fluid into the rear cylinder while discharging the working fluid from the front cylinder to increase the volume of the rear cylinder, and using the volume increase of the rear cylinder to advance the piston 423. The plate part 420 is moved forward through the passage H1 by the forward movement of the piston 432 and positioned inside the valve housing 411, and the inner surface of the plate part 420 and the valve housing 411 It may include a process of blocking the flow of the fluid (f) by contacting.

During this process, a process of circulating the refrigerant into the plate unit 420 may be performed. For example, the refrigerant may be circulated into the refrigerant passage 422 provided inside the plate unit 420 . More specifically, the refrigerant is supplied from the refrigerant chamber provided in the controller 450 to one of the plurality of refrigerant pipes 451, the refrigerant is injected into one side of the cooling passage 422, and the cooling passage ( The refrigerant may be recovered from the other side of the refrigerant pipe 451 from the other side of the refrigerant pipe 451 and returned to the refrigerant chamber, and the refrigerant may be circulated into the plate unit 420 through a process of circulating the refrigerant.

At this time, a process of detecting the internal state of the passage H1 may be performed while performing the above-described processes. That is, the internal state of the passage H1 can be detected by indirectly measuring the internal temperature of the passage H1 through the plate portion 420 exposed to the passage H1. Here, by measuring the temperature at a plurality of positions of the plate unit 420, the internal temperature of the plurality of positions of the passage H1 may be indirectly measured.

While performing this process, a process of controlling the cooling rate of the plate unit 430 may be performed by adjusting at least one of the supply flow rate and the supply temperature of the refrigerant according to the detected internal state. First, an average of temperatures measured at a plurality of locations of the plate unit 420 may be calculated using a control circuit built in the controller 453 . At this time, if the calculated average, that is, the average temperature is included in the reference temperature range, the supply flow rate and supply temperature of the refrigerant can be maintained. For example, the supply flow rate and the supply temperature of the refrigerant can be maintained by maintaining the operation of the pump with a control circuit and stopping the operation of the heating unit and the cooling unit.

In addition, when the average temperature is less than the reference temperature range, the supply flow rate of the refrigerant may be reduced and the supply temperature may be increased. For example, the operation of the pump may be controlled by the control circuit to reduce the supply flow rate of the refrigerant, and the supply temperature of the refrigerant may be increased by operating the heating unit. In addition, when the average temperature is greater than the reference temperature range, the supply flow rate of the refrigerant may be increased and the supply temperature may be lowered. The control circuit controls the operation of the pump to increase the flow rate of the refrigerant, stop the heating means, and operate the cooling means to lower the supply temperature.

Meanwhile, during the process of controlling the opening and closing of the passage H1 and the process of controlling the cooling rate of the plate part 420, the plate part 420 A process of correcting the position of the sensor unit 440 installed inside the can be performed.

For example, as the plate part 420 moves forward and backward, the plate 420 is exposed to the high temperature of the fluid f and the high temperature of the chamber 100, and the degree of heating is changed, and the plate part 420 is exposed to the high temperature of the fluid f The length of the plate portion 420 is changed according to the degree of heating by the plate portion 420 and may be expanded or contracted. Accordingly, the length of the sensor installation hole 425 may also change.

Accordingly, the elastic member 444 provided at the rear end of the sensor unit 440 is stretched and contracted, and the length change of the sensor installation hole 425 is accommodated to change the position of the insertion member 441 in which the sensor 442 is installed. can do it Accordingly, it is possible to prevent the sensor 442 installed on the insertion member 441 from colliding with the inner surface of the sensor installation hole 425 .

The above embodiments of the present invention are for explanation of the present invention and are not intended to limit the present invention. It should be noted that the configurations and methods disclosed in the above embodiments of the present invention may be combined and modified in various forms by combining or crossing each other, and variations thereof may also be considered within the scope of the present invention. That is, the present invention will be implemented in a variety of different forms within the scope of the claims and equivalent technical ideas, and various embodiments are possible within the scope of the technical idea of the present invention by those skilled in the art to which the present invention pertains. will be able to understand

100: chamber 200: supply device
300: piping 400: valve device
410: body part 411: valve housing
412: connection housing 413: drive housing
420: plate portion 421: blade
422: refrigerant flow path 423: refrigerant cover
424: drive shaft 425: refrigerant installation hole
430: driving unit 431: bulkhead
432: piston 433: first fluid pipe
434: second fluid pipe 440: sensor unit
440: insertion member 442: temperature sensor
443: mounting member 444: elastic member
450: control unit 451: refrigerant piping
452 communication means 453 controller

Claims (16)

a body portion in which a passage is formed;
a plate portion formed with an area capable of closing the passage, installed in the body to be able to move forward and backward with respect to the passage, and having a refrigerant flow path therein;
a driving unit installed in the body so as to move the plate forward and backward;
a sensor unit mounted on the plate unit to detect an internal state of the passage; and
A controller connected to the refrigerant passage to adjust at least one of a supply flow rate and a supply temperature of the refrigerant supplied to the refrigerant passage according to the internal state;
The plate part,
a blade extending in the forward and backward direction and in the width direction of the passage to close the passage, and capable of moving forward and backward by the driving unit;
The refrigerant passage formed concavely on one surface of the blade and extending along the circumference of the blade;
Valve device comprising a; flow path cover mounted on one surface of the blade to seal the refrigerant flow path from the outside. The method of claim 1,
The body portion includes a valve housing in which the passage is formed and a connection housing supporting the plate portion at the rear of the valve housing,
A through hole is formed in the valve housing in a direction in which the plate part moves forward and backward so that the plate part can pass therethrough;
The width of the through hole in the extension direction of the passage is formed greater than the thickness of the plate portion,
A valve device in which the passage can communicate with a spaced space between the plate portion and the inner surface of the connection housing through the through hole. delete The method of claim 1,
The plate part,
a drive shaft disposed to pass through the body at the rear of the blade and connected to the blade; and
A valve device comprising a sensor installation hole formed to pass through the drive shaft in the forward and backward directions and extending into the inside of the blade. The method of claim 4,
The refrigerant passage extends around the edge of the blade,
The sensor installation hole passes through the center of the blade and extends to the edge of the valve device. The method of claim 1,
the driving unit,
a partition wall spaced apart from a rear end of the body portion, protruding from an inner surface of the body portion, and contacting the plate portion to form a cylinder inside the body portion;
a piston disposed between the rear end of the body and the bulkhead, protruding from the plate, and contacting the inner surface of the body;
A valve device comprising: first and second fluid pipes formed to penetrate the body in front and rear of the piston, respectively, so as to inject and discharge fluid into and out of the cylinder. a body portion in which a passage is formed;
a plate portion formed with an area capable of closing the passage, installed in the body to be able to move forward and backward with respect to the passage, and having a refrigerant flow path therein;
a driving unit installed in the body so as to move the plate forward and backward;
a sensor unit mounted on the plate unit to detect an internal state of the passage; and
A controller connected to the refrigerant passage to adjust at least one of a supply flow rate and a supply temperature of the refrigerant supplied to the refrigerant passage according to the internal state;
The sensor unit,
an insertion member inserted into the plate portion;
A valve device comprising: a plurality of temperature sensors installed at a plurality of locations of the insertion member and indirectly measuring the internal temperature of the passage through the plate part and outputting the result as an internal state of the passage. The method of claim 7,
The plurality of temperature sensors are arranged in the forward and backward directions along the insertion member so as to measure the central temperature and the ambient temperature of the passage, respectively. The method of claim 7,
The sensor unit,
a fastening member mounted on the rear end of the plate unit, disposed behind the insertion member, and spaced apart from the insertion member;
A valve device comprising: an elastic member for elastically supporting the insertion member to the fastening member. a body portion in which a passage is formed;
a plate portion formed in an area capable of closing the passage, installed in the body so as to move forward and backward with respect to the passage, and having a refrigerant passage therein;
a driving unit installed in the body so as to move the plate forward and backward;
a sensor unit mounted on the plate unit to detect an internal state of the passage; and
A controller connected to the refrigerant passage to adjust at least one of a supply flow rate and a supply temperature of the refrigerant supplied to the refrigerant passage according to the internal state;
The control unit,
a plurality of refrigerant pipes disposed to pass through the plate portion and connected to the refrigerant passage;
a communication unit connected to the sensor unit;
A valve device comprising a controller connected to the refrigerant pipe and a communication means so as to adjust the supply flow rate and supply temperature of the refrigerant by using the detection result of the sensor unit. The method of claim 10,
The controller,
a refrigerant chamber connected to the refrigerant pipe;
a pump installed in the refrigerant chamber;
a heating means and a cooling means connected to the refrigerant pipe;
A control circuit connected to the communication unit, the pump, the heating unit, and the cooling unit, and controlling operations of the pump, the heating unit, and the cooling unit according to the detection result. Controlling the opening and closing of the passage connected to the chamber using the plate unit;
circulating the refrigerant into the plate portion;
detecting an internal state of the passage;
Controlling the cooling rate of the plate part by adjusting at least one of a supply flow rate and a supply temperature of the refrigerant according to the internal state;
During the process of controlling the opening and closing of the passage to the process of controlling the cooling rate of the plate part,
A valve device control method comprising: correcting a position of a sensor unit installed inside the plate unit according to forward/backward movement, expansion and contraction of the plate unit. The method of claim 12,
The process of detecting the internal state of the passage,
and indirectly measuring an internal temperature of the passage through the plate portion exposed to the passage. The method of claim 13,
The process of indirectly measuring the internal temperature of the passage,
A valve device control method comprising: measuring temperatures at a plurality of positions of the plate part. The method of claim 14,
The process of controlling the cooling rate of the plate part,
Calculating an average of the temperatures measured at the plurality of locations;
maintaining the supply flow rate and supply temperature of the refrigerant when the average is within the reference temperature range;
reducing the supply flow rate of the refrigerant and increasing the supply temperature when the average is less than the reference temperature range;
and increasing the supply flow rate of the refrigerant and lowering the supply temperature when the average is greater than the reference temperature range. delete

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