KR102170813B1 - 연소화학기상증착 반응을 이용한 기능성 코팅 장치 - Google Patents
연소화학기상증착 반응을 이용한 기능성 코팅 장치 Download PDFInfo
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- KR102170813B1 KR102170813B1 KR1020130080410A KR20130080410A KR102170813B1 KR 102170813 B1 KR102170813 B1 KR 102170813B1 KR 1020130080410 A KR1020130080410 A KR 1020130080410A KR 20130080410 A KR20130080410 A KR 20130080410A KR 102170813 B1 KR102170813 B1 KR 102170813B1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/4557—Heated nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
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- Coating By Spraying Or Casting (AREA)
Abstract
Description
도 2는 본 발명의 일 실시예에 따른 코팅 장치의 연소부의 분사노즐 및 혼합 노즐을 도시한 단면도이다.
도 3은 본 발명의 일 실시예에 따른 코팅 장치의 코팅제 공급부를 도시한 단면도이다.
| 열적 활성화 | 무 | 유 |
| 코팅제 분사 거리(cm) | 17.5 | 44.7 |
200; 연소부 300; 코팅체 공급부
Claims (14)
- 연료와 조연성 가스를 혼합하여 화염을 발생하는 연소부 및 상기 화염에 코팅제를 공급하는 코팅제 공급부를 포함하는 코팅 장치에 있어서,
상기 연소부와 상기 코팅제 공급부가 분리하여 배열되고,
상기 연소부는 연료 저장용기와 조연성 가스용기가 각각 별도의 배관을 통해 연결되고,
상기 코팅제 공급부는 코팅제 저장용기와 운반가스 용기가 각각 별도의 배관을 통해 연결되고,
상기 코팅제 공급부는,
상기 코팅제와 운반가스를 운반받아 각각 별도의 배관을 통해 공급받아 혼합하는 혼합관;
상기 혼합관에 연결되며, 상기 운반가스가 혼합된 코팅제를 소정 각도 및 분사거리로 분무하여 미립자화하는 코팅제 분무노즐;
상기 코팅제 분무노즐에 연결되고, 외주면에 발열체가 설치된 되어, 미립자화된 코팅제를 비등점 이상으로 가열하여 기화시켜 상기 운반가스와 혼합하여 열적으로 활성화하는 활성화관; 및
상기 활성화관에 연결되고, 상기 열적으로 활성화된 코팅제를 분사하는 코팅제 분사노즐; 을 포함하는 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 혼합관과 코팅제 분무노즐 사이에는 필터가 설치되는 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 코팅제 분무노즐과 활성화관 사이에는 제1실링부재가 설치되는 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 활성화관과 코팅제 분사노즐 사이에는 제2실링부재가 설치되는 것을 특징으로 하는 코팅 장치. - 제 4항에 있어서,
상기 제2실링부재는 내열성 재질로 형성되는 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 코팅제 분무노즐의 토출부에는 망이 설치된 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 코팅제 분무노즐, 활성화관 및 코팅제 분사노즐은 Ni합금으로 형성되는 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 발열체의 발열 온도는 상기 코팅제의 비등점을 기준으로 50% 내지 150%인 것을 특징으로 하는 코팅 장치. - 제 8항에 있어서,
상기 발열체에는 온도를 조절하기 위한 제어장치가 설치된 것을 특징으로 하는 코팅 장치. - 제 1항에 있어서,
상기 연소부는 상기 연료와 상기 조연성 가스를 공급하는 독립된 배관, 상기 배관의 유량을 각각 조절할 수 있는 밸브와 유량계, 상기 연료와 조연성 가스를 혼합하는 연료 혼합노즐, 상기 조연성 가스의 유속을 가속하고 상기 연료와 조연성 가스를 완전히 혼합시켜서 원거리까지 곧게 분출할 수 있도록 구성된 연료 분사노즐을 포함하는 것을 특징으로 하는 코팅 장치. - 제 10항에 있어서,
상기 연료 분사노즐의 내측 각도는 10° 내지 30°로 형성되는 것을 특징으로 하는 코팅 장치. - 제 10항에 있어서,
상기 연료 분사노즐의 출구는 소정 길이를 갖도록 평행하게 형성되는 것을 특징으로 하는 코팅 장치. - 제 12항에 있어서,
상기 연료 분사노즐의 출구는 적어도 하나 이상으로 형성되는 것을 특징으로 하는 코팅 장치. - 제 10항에 있어서,
상기 연료는 LPG 또는 LNG 중 어느 하나로 구성되고, 상기 조연성 가스는 산소로 구성되는 것을 특징으로 하는 코팅 장치.
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| Application Number | Priority Date | Filing Date | Title |
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| KR1020130080410A KR102170813B1 (ko) | 2013-07-09 | 2013-07-09 | 연소화학기상증착 반응을 이용한 기능성 코팅 장치 |
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| KR1020130080410A KR102170813B1 (ko) | 2013-07-09 | 2013-07-09 | 연소화학기상증착 반응을 이용한 기능성 코팅 장치 |
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| Publication Number | Publication Date |
|---|---|
| KR20150006939A KR20150006939A (ko) | 2015-01-20 |
| KR102170813B1 true KR102170813B1 (ko) | 2020-10-28 |
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| KR1020130080410A Active KR102170813B1 (ko) | 2013-07-09 | 2013-07-09 | 연소화학기상증착 반응을 이용한 기능성 코팅 장치 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001047704A1 (en) * | 1999-12-29 | 2001-07-05 | Microcoating Technologies, Inc. | Chemical vapor deposition method and coatings produced therefrom |
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| KR100742857B1 (ko) * | 2005-12-26 | 2007-07-25 | 주식회사 포스코 | 젖음성이 우수한 실리콘 산화피막의 연소화학 기상증착방법 |
| JP2010087169A (ja) * | 2008-09-30 | 2010-04-15 | Tokyo Electron Ltd | 気化器およびそれを用いた成膜装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2001047704A1 (en) * | 1999-12-29 | 2001-07-05 | Microcoating Technologies, Inc. | Chemical vapor deposition method and coatings produced therefrom |
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