KR100497839B1 - Method of manufacturing a micro column combined emission - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a microcolumn, wherein microlens elements and insulating spacers are alternately attached to each other during microcolumn fabrication, and then openings are formed in the microlens element using a focused ion beam (FIB). By forming a, a method of manufacturing a microcolumn capable of aligning the openings while preventing the occurrence of alignment errors of the openings that may occur when attaching the microlens components and the insulating spacer and preventing the occurrence of contamination is disclosed.

Description

Method of manufacturing a micro column combined emission

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microcolumn manufacturing method, and more particularly, to a microcolumn manufacturing method capable of reducing an error in alignment of openings formed in each component while suppressing contamination in the process of forming openings in each component.

Microcolumns are high-aspect-ratio micromechanical structures that include multilayer microlenses and deflectors. The micro lens consists of a plurality of micro lens components and elements that are precisely aligned. The micro lens component is a silicon chip or silicon film having a membrane window for lens electrodes and spread by an insulating layer having a thickness of 100 to 500 um. Such microlens components are provided with openings of various diameters ranging from a few um to hundreds of um.

In the process of stacking such microlens components and manufacturing a microcolumn, a method of aligning the microlens components using rigid fibers to align the openings has been proposed by ATEK Systems Incorporated (Application No. 10). -2000-701136). A method of aligning the microlens components proposed by ATTEC Systems Inc. is as follows.

1 is a cross-sectional view for explaining a microcolumn alignment method according to the prior art.

Referring to FIG. 1, a microcolumn includes a plurality of microlens components (only three are shown in the drawing; 110 to 130) provided with openings 111, 121, and 131 through which beams can pass. The micro lens component elements 110 to 130 are attached in a laminated structure. Insulation spacers 115, 125, and 135 are formed at edges between the micro lens components 110 to 130.

Meanwhile, alignment openings 112, 122, 132, 116, 126, and 136 are formed at both sides of the microlens component elements 110 to 130 and the insulating spacers 115, 125, and 135 with the opening therebetween. As the alignment body 140 is screwed to the 112, 122, 132, 116, 126, and 136, the micro lens component elements 110 to 130 and the insulating spacers 115, 125, and 135 are fixed in a line.

The above method allows limited alignment within the range of mechanical machining errors between the alignment body 140 and the alignment openings 112, 122, 132, 116, 126 and 136. However, when cutting unnecessary portions of the alignment body 140, the alignment of the micro lens components 110 to 130 and the insulating spacers 115, 125, and 135 may be scattered.

Another method of fabricating a microcolumn is to attach microlens components and insulating spacers first, and then form an opening through laser processing to allow self alignment. However, this method may cause a problem of contamination around the opening due to the heat generated by the high temperature laser.

Therefore, in order to solve the above problem, the present invention first attaches microlens components and insulating spacers alternately when fabricating a microcolumn, and then opens apertures in the microlens components using a focused ion beam. It is an object of the present invention to provide a microcolumn manufacturing method capable of aligning the openings while preventing the occurrence of alignment errors of the openings that may occur when attaching the microlens elements and the insulating spacer, and preventing the occurrence of contamination.

According to an embodiment of the present invention, a method of manufacturing a microcolumn may include alternately attaching a microlens component and an insulation spacer to the center portion of the microlens components, with insulating spacers having an opening formed therebetween, between the microlens components. Forming an opening using a focused ion beam.

The opening forming step is to first form openings in the microlens components based on the smallest of the openings to be formed in the microlens components, and then reprocess the openings of the microlens components of the upper layer with the focused ion beam to different sizes. To form an opening.

delete

Alternatively, an opening is first formed with a focused ion beam in the microlens elements of the upper layer to which the larger size of the microlens elements are to be formed, and then the smallest opening is formed in the microlens elements of the remaining lower layer. You may.

Meanwhile, in the opening forming process using the focused ion beam, Ga + ions may be emitted into the focused ion beam at an ion beam current of 4 pA to 19.7 nA at a pressure of 10E-8 tor to 10E-6 tor to form an opening.

In this case, in the opening forming process using the focused ion beam, the diameter of the focused ion beam is set to 25 μm to 350 μm, and the focusing size of the focused ion beam is set to have a diameter of 7 nm to 500 nm while applying 5 to 50 keV as acceleration energy. It can be carried out.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention. However, the present invention is not limited to the embodiments disclosed below, but may be embodied in various different forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art. It is provided for complete information. In the drawings, like reference numerals refer to like elements.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2A to 2C are cross-sectional views of devices for describing a microcolumn manufacturing method according to an embodiment of the present invention.

Referring to FIG. 2A, the insulating spacers 215, 225, and 235 are disposed between the first, second, and third micro lens elements 210, 230, and the first, second, and third micro lens elements 210, 2, 2, 3, and 3, respectively. 230 and insulating spacers 215, 225, and 235 are alternately attached.

In the above description, the microlens components 210 to 230 are formed of a silicon film having a square size of 7 mm x 7 mm to 10 mm x 10 mm, and a membrane window having a thickness thinner than an edge by an etching process is formed in the center portion. , 222 and 232 are provided. The opening is formed in the central portion of the membrane window in a subsequent process.

Insulation spacers 215, 225, and 235 may also be formed from ordinary insulators, or SD-2 made by heat-resistant borosilicate glass or Hoya, commonly known as Pyrex. In this case, the insulating spacers 215, 225, and 235 are adhered to the micro lens elements 210 to 230 in the openings 216, 226, and 236 having diameters of 1 mm to 3 mm.

The first to third micro lens components 210 to 230 may be extraction devices, anodes, limiting aperture plates, or the like. Hereinafter, in order to facilitate understanding of the present invention, when the first micro lens component 210 is an extraction device, the second micro lens component 220 is an anode, and the third micro lens component 230 is a limiting opening plate. Will be described as an example.

Meanwhile, the extraction device 210, the anode 220, and the limiting opening plate 230 are formed with respective insulating spacers 215, 225 formed between the extraction device 210, the anode 220, and the limiting opening plate 230. 235) and by annodic bonding. The anodic bonding method is an electrochemical process for the heat sealing of glass to metals and semiconductors.

At this time, since the opening is not yet formed in the extraction device 210, the anode 220, and the limiting opening plate 230, the openings 216, 226, and 236 formed in the insulating spacers 215, 225, and 235 are aligned. While the extraction device 210, the anode 220 and the limiting opening plate 230 may be aligned using the outermost size. Since the openings 216, 226, and 236 formed in the insulating spacers 215, 225, and 235 are 1 mm to 3 mm in diameter, there is no difficulty in aligning and lower the difficulty of the bonding process.

Referring to FIG. 2B, the openings 211, 221 are arranged in a line in the center of the film windows 212, 222, and 232 of the extraction apparatus 210, the anode 220, and the limiting opening plate 230 using the focused ion beam 240. And 231). That is, the extraction apparatus 210 is formed with the extraction apparatus reference opening 211, the anode 220 is formed with the anode reference opening 221, the restriction opening plate 230 is formed with a restriction opening 231. Here, the size of the extraction device reference opening 211 and the anode reference opening 221 is a reference for determining the size of the restriction opening 231, and the 3um to 10um so as not to overlap with the insulating spaces (215, 225, and 235). Each opening 211, 221 and 231 is formed in size.

In the above, the opening forming process releases Ga + ions into the focused ion beam at an ion beam current of 4 pA to 19.7 nA at a pressure of 10E-8 tor to 10E-6 torr to form the openings 211, 221, and 231. In this case, the opening forming process using the focused ion beam is performed by applying 5 to 50 keV as acceleration energy in a state in which the diameter of the ion beam is set to 25 μm to 350 μm and the focusing size of the ion beam is set to 7 nm to 500 nm.

Referring to FIG. 2C, the size of the extractor reference opening 211 and the anode reference opening 221 are adjusted by using the focused ion beam 240 coaxially with the limiting opening 231.

In more detail, using the focused ion beam 240, the extraction apparatus reference opening 211 is processed into a size of 5 to 100um, and the anode reference opening 221 is the same size as the extraction apparatus reference opening 211. In the form of concentric circles. At this time, the limiting opening 231 is aligned with the coaxial center of the extraction apparatus reference opening 211 and the anode reference opening 221 itself. On the other hand, the resolution of self-alignment has the resolution of the focused ion beam 240.

In the above, the extraction apparatus reference opening 211, the anode reference opening 221 and the restriction opening 231 are formed at the same time, and then the sizes of the extraction apparatus reference opening 211 and the anode reference opening 221 are adjusted. It is also possible to first form the opening 211 and the anode reference opening 221 to a target size and then form the limiting opening 231.

In this way, a micro column is produced.

As described above, the present invention, by attaching the extraction device 210, the anode 220 and the limiting opening plate 230 first, and then forming the openings (211, 221 and 231) using a focused ion beam, Even when alignment errors occur in the 210, the anode 220, and the limiting opening plate 230, the openings 211, 221, and 231 may be formed in a line. This will be described with reference to FIG. 3.

FIG. 3 is a plan view illustrating an alignment state of openings during alignment error of the microlens components in FIG. 2C.

Referring to FIG. 3, even if an alignment error occurs in the process of adhering the extraction apparatus 210 and the anode 220 to the anodic bonding described in FIG. 2A, the extraction apparatus 210 and the anode 220 are bonded to each other. It can be seen that since the opening is formed in the self-aligning not only the extraction opening (211) and the anode reference opening 221 but also the limiting opening (not shown in Figure 3).

As described above, according to the present invention, the microlens elements are first bonded to each other, and then the apertures are formed in each microlens element using the focused ion beam, thereby precisely aligning the openings regardless of the alignment error of the microlens elements. Can be formed.

In addition, since the focused ion beam is used to form the opening, it is possible to solve the problem of contamination by heat generated when using a high-temperature laser.

Furthermore, since the resolution of the alignment error of each opening has the resolution of the ion beam, the error range can be minimized according to the control of the ion beam.

Therefore, according to the present invention, it is possible to lower the difficulty of the manufacturing process and improve reliability of the device.

1 is a cross-sectional view for explaining a microcolumn alignment method according to the prior art.

2A to 2C are cross-sectional views of devices for describing a microcolumn manufacturing method according to an embodiment of the present invention.

FIG. 3 is a plan view illustrating an alignment state of openings during alignment error of the microlens components in FIG. 2C.

<Explanation of symbols for the main parts of the drawings>

110, 120, 130: Micro lens component

111, 121, 131, 216, 226, 236: opening

115, 125, 135, 215, 225, 235: insulated spacer

112, 122, 132, 116, 126, 136: alignment opening

140: alignment body 210: first micro lens component, extraction device

211: extraction opening limit

220: second micro lens component, anode

221: anode reference opening

230: third micro lens component, limiting aperture plate

231: restriction opening 212, 222, 232: window

240: focused ion beam

Claims (11)

delete delete delete delete Alternately bonding the micro lens component and the insulating spacer with insulating spacers having a central opening formed between the micro lens components; And Forming an opening in the central portion of the micro lens components by using a focused ion beam, The opening forming step may be performed by first forming an opening in the micro lens elements based on the smallest one of the openings to be formed in the micro lens elements, and then reprocessing the openings of the micro lens element of the upper layer with the focused ion beam. To form openings of different sizes. Alternately bonding the micro lens component and the insulating spacer with insulating spacers having a central opening formed between the micro lens components; And Forming an opening in the central portion of the micro lens components by using a focused ion beam, In the opening forming step, an opening is first formed with the focused ion beam in the microlens elements of the upper layer to which the larger size of the microlens elements is to be formed, and then the smallest opening in the microlens elements of the remaining lower layer. Micro-column manufacturing method characterized in that it forms a. 7. The method of claim 5 or 6, wherein the diameter of the smallest opening is 3um to 10um, and the diameter of the other openings is 5 to 100um. The method of claim 5, wherein the opening forming process using the focused ion beam emits Ga + ions into the focused ion beam at an ion beam current of 4 pA to 19.7 nA at a pressure of 10 E-8 torr to 10 E-6 torr. A microcolumn manufacturing method, characterized by forming an opening. The method of claim 8, wherein the aperture forming process using the focused ion beam is set to 25 μm to 350 μm of the focused ion beam, and the focusing size of the focused ion beam is set to have a diameter of 7 nm to 500 nm. A method of manufacturing a microcolumn characterized in that it is carried out while applying 5 to 50 keV as acceleration energy. The microlens elements of claim 5 or 6, wherein the microlens elements are bonded to the insulating spacer with a central portion etched by a predetermined thickness to form a thinner window than the edge, and the opening is formed at the center of the window. Micro-column manufacturing method characterized by. 7. The method of claim 5 or 6, wherein the diameter of the opening formed in the insulating spacer is 1mm to 3mm.