KR100192728B1 - Radio Frequency Tag Manufacturing Method - Google Patents
Radio Frequency Tag Manufacturing Method Download PDFInfo
- Publication number
- KR100192728B1 KR100192728B1 KR1019950036741A KR19950036741A KR100192728B1 KR 100192728 B1 KR100192728 B1 KR 100192728B1 KR 1019950036741 A KR1019950036741 A KR 1019950036741A KR 19950036741 A KR19950036741 A KR 19950036741A KR 100192728 B1 KR100192728 B1 KR 100192728B1
- Authority
- KR
- South Korea
- Prior art keywords
- wire
- attaching
- substrate
- chip
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
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- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/08—Methods or arrangements for sensing record carriers, e.g. for reading patterns by means detecting the change of an electrostatic or magnetic field, e.g. by detecting change of capacitance between electrodes
- G06K7/082—Methods or arrangements for sensing record carriers, e.g. for reading patterns by means detecting the change of an electrostatic or magnetic field, e.g. by detecting change of capacitance between electrodes using inductive or magnetic sensors
- G06K7/083—Methods or arrangements for sensing record carriers, e.g. for reading patterns by means detecting the change of an electrostatic or magnetic field, e.g. by detecting change of capacitance between electrodes using inductive or magnetic sensors inductive
- G06K7/086—Methods or arrangements for sensing record carriers, e.g. for reading patterns by means detecting the change of an electrostatic or magnetic field, e.g. by detecting change of capacitance between electrodes using inductive or magnetic sensors inductive sensing passive circuit, e.g. resonant circuit transponders
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Abstract
와이어 결합(wire bonding)을 이용하여 무선 주파수 태그(radio frequency tag)및 그 안테나 구조(antenna structure)가 제조된다. 반도체 칩은 유기체막 기판(organic film substrate)상에 위치되어 부착된다. 하나 이상의 얇은 와이어(one or more thin wires)로 구성되는 안테나는 기판 상에서 생성되고 와이어 결합 머쉰(a wirebonding machine)을 이용하여 칩 상의 접점에 접속된다. 기판의 조각(a strip of substrate)상에서 다수의 반도체(a plurality of semiconductors)를 이용하는 다른 실시예가 또한 개시된다. 이 칩은 캡슐 재료(encapsulant)로 보호될 수도 있고, 칩 및 안테나 결합은 유기체막으로 된 층 사이에 밀봉(seal)될 수 있다.A radio frequency tag and its antenna structure are fabricated using wire bonding. The semiconductor chip is positioned and attached on an organic film substrate. Antennas consisting of one or more thin wires are created on a substrate and connected to contacts on a chip using a wirebonding machine. Another embodiment is also disclosed that uses a plurality of semiconductors on a strip of substrate. The chip may be protected with an encapsulant, and the chip and antenna coupling may be sealed between layers of organic film.
Description
제1도는 본 발명의 단계를 예시하는 흐름도.1 is a flow diagram illustrating the steps of the present invention.
제2a 내지 2k도는 제1도에 예시된 방법의 각 단계에서 무선주파수 태그를 도시한 도면.2A-2K illustrate radio frequency tags at each stage of the method illustrated in FIG.
제3a 내지 3e도는 본 발명에 따른 방법의 각종 단계를 상세히 도시한 도면.3a to 3e detail the various steps of the method according to the invention.
제4a및 4b도는 안테나 와이어 단부에 금속 패드 종결부를 갖도록 제조되는 RF태그의 도면.4a and 4b illustrate an RF tag fabricated to have a metal pad termination at an antenna wire end.
제5a 내지 5b도는 본 발명에 따른 공정의 두 바람직한 실시예에 의해 개개의 태그를 제조하기 위해 절단 되는 연속적인 RF태그의 조각을 도시한 도면.5a to 5b show pieces of a continuous RF tag being cut to manufacture individual tags by two preferred embodiments of the process according to the invention.
제6도는 나이프 블레이드의 어레이에 의해 개개의 세그먼트로 절단 되고 있는 태그열의 측면도.6 is a side view of a tag string being cut into individual segments by an array of knife blades.
제7도는 임시 포스트(a temporary post)를 이용하여 안테나 와이어의 배치를 안내하는 루프 안테나의 제조를 예시한 도면.7 illustrates the fabrication of a loop antenna for guiding the placement of antenna wires using a temporary post.
제8도는 엠보스된 스터드를 이용하여 안테나 와이어의 배치를 안내하는 루프 안테나의 구조를 예시한 도면.FIG. 8 illustrates the structure of a loop antenna for guiding the placement of antenna wires using embossed studs. FIG.
제9도는 상승된 플랩을 이용하여 안테나 와이어의 배치를 안내하는 루프 안테나의 구조를 예시한 도면.9 illustrates the structure of a loop antenna for guiding the placement of antenna wires using raised flaps.
제10도는 유기체 커버 사이에 두개의 루프 안테나를 갖는 태그의 박판을 도시한 도면.FIG. 10 shows a thin sheet of tag with two loop antennas between organic covers. FIG.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
205 : 반도체 칩 206 : 레이저205 semiconductor chip 206 laser
207,208 : 접점 210 : 기판207,208: contact 210: substrate
700,800,900 : 안테나 720 : 임시 포스트700,800,900: Antenna 720: Temporary Post
820 : 엠보스된 스터드 920 : 상승된 플랩820: embossed stud 920: raised flap
본 발명은 무선주파수(RF)태깅(radio frequncy tagging)분야에 관한 것으로, 특히 다수의 정부 비트(multiple bits of information)를 전송하는 저가의 개선된 소형 RF태그를 제조하는 방법에 관한 것이다.FIELD OF THE INVENTION The present invention relates to the field of radio frequency tagging and, more particularly, to a method for manufacturing a low cost, improved small RF tag that transmits multiple bits of information.
일반적으로, 회로는 딱딱한 인쇄 회로 보드(hard printed circuit boards)또는 유동 기판(flexible substrates)상에 제조된다. 인쇄 회로 보드는 에폭시 수지(epoxy-resin)또는 에폭시 유리 보드(epoxy-glass boards)와 같은 물질을 포함한다. 이들 회로가 제조되는 하나의 범용 클래스(general class)는 FR4이다. 또한 플렉스(flex)라고도 칭해지는 유동 기판은 폴리아미드(ployamide)상에 구리구조물을 포함한다. 이들 회로는 일반적으로 자동차(automobiles), 소비자 전자제품(consumer electronics)및 전반적인 상호접속(general interconnection)에서 사용된다. 반도체 회로 상에, 접점을 부착하거나 회로 보드 또는 플렉스 구조상에 위치되는 칩(chips)을 부착하기 위한 공지된 기술은 와이어 결합(wirebonding)으로 칭해진다. 와이어 결합은 매우 짧은 길이의 직경이 작은 와이어(대략 25미크론(microns)의 직경)로 제조된다. 보통와이어 결합에 의해 접속된 와이어는 약 1밀리미터(millimeter)정도의 길이이다. 이들 와이어 길이는 보통 몇몇 이유로 인해 짧게 유지된다 즉,In general, circuits are fabricated on hard printed circuit boards or flexible substrates. Printed circuit boards include materials such as epoxy-resin or epoxy-glass boards. One general class in which these circuits are manufactured is FR4. Flow substrates, also referred to as flexes, include copper structures on polyamides. These circuits are commonly used in automobiles, consumer electronics, and general interconnection. Known techniques for attaching contacts on semiconductor circuits or for placing chips located on circuit boards or flex structures are referred to as wirebonding. Wire bonds are made of very short length small wires (approximately 25 microns in diameter). The wires connected by common wire bonds are about 1 millimeter long. These wire lengths are usually kept short for some reason,
1. 직경이 작은 와이어는 매우 약 하다.1. Small diameter wire is very weak.
2. 전형적으로 회로에는 다수의 결합이 형성되어 있어 보다 와이어 길이가 길어지면 접속부에 전기적인 쇼트(electrical shorting)가 발생하기가 더욱 쉽다.2. Typically, many bonds are formed in a circuit, so longer wire lengths make it easier to cause electrical shorting at the connection.
3. 와이어의 길이가 증가하면 회로의 전기적 성능을 저하시키는 자신 및 상호 인덕턴스(self and mutual inductance)를 증가한다.3. Increasing the length of the wire increases self and mutual inductance, which degrades the electrical performance of the circuit.
무선 주파수 식별(RF ID)은 객체를 식별하는 다수의 식별 기법 중의 하나이다. RF ID시스템의 핵심은 태그를 갖는 정보에 있다. 태그는 베이스 스테이션(a base station)으로부터 수신된 코드화된(Coded)RF신호에 응답하여 기능한다. 태그는 베이스 스테이션으로 반송된 입사 RF캐리어(incident RF carrier)를 되반사한다. 정보는 태그에 의해 태그의 프로그램된 정보 프로토콜(programmed information protocol)에 따라 변조된 반사 신호로써 전송된다.Radio Frequency Identification (RF ID) is one of many identification techniques for identifying objects. At the heart of the RF ID system is information with tags. The tag functions in response to a Coded RF signal received from a base station. The tag reflects an incident RF carrier back to the base station. The information is transmitted by the tag as a reflected signal modulated according to the tag's programmed information protocol.
태그는 RF회로(RF circuits), 로직(logic)및 메모리(memory)를 갖는 반도체 칩으로 구성된다. 태그는 안테나와, 종종 예를 들면, 활성 태그 케이스내의 배터리(a battery in the case of active tag), 구성 요소를 탑재하는 기판(a substrate for mounting the components), 구성 요소간의 상호접속(interconnections between components)및 물리적 밀봉 수단(means of physical enclosure)과 같은 이산의 구성 요소, 캐패시터(capacitors)및 다이오드(diodes)의 콜렉션(collection)을 포함한다. 태그의 한가지 형태인 수동 태그(passive tags)는 배터리를 포함하지 않는다. 그들은 태그를 질의하기 위해 사용된 RF신호로부터 자신의 에너지를 도출한다. 통상, RF ID태그는 개개의 요소를 회로 카드(a circuit card)에 탑재함으로써 제조된다. 이것은 보드와 회로 요소. 즉, 칩. 캐패시터, 다이오드, 안테나 사이에 짧은 와이어 결합 접속(short wire bond connections) 또는 납땜 접속(soldered connections)을 사용함으로써 행해진다. 이 회로 카드는 에폭시-광유리 합성물(epoxy-fiberglass)또는 세라믹(ceramic)이 제조될 수도 있다. 안테나는 통상 회로에 대해 납땜된 몇 루프의 와이어(loops of wire)이거나, 또는 회로 카드 상에 에치되거나(etched)또는 도금된(plated)금속으로 구성된다. 전체 조립체는 플라스틱 박스(a plastic box)내에 밀입되거나 또는 3-차원 플라스틱 패키지(a three-dimensional plastic package)로 성형될 수도 있다.A tag consists of a semiconductor chip with RF circuits, logic, and memory. The tag may be an antenna, often a battery in the case of active tag, a substrate for mounting the components, and interconnections between components, for example. And a collection of discrete components such as means of physical enclosure, capacitors and diodes. One form of tag, passive tags, does not include a battery. They derive their energy from the RF signal used to query the tag. RF ID tags are typically manufactured by mounting individual elements on a circuit card. This is a board and circuit elements. That's a chip. This is done by using short wire bond connections or soldered connections between the capacitor, diode, and antenna. The circuit card may be made of epoxy-fiberglass or ceramic. The antenna is typically a few loops of wire soldered to the circuit, or consists of a metal etched or plated on the circuit card. The entire assembly may be enclosed in a plastic box or molded into a three-dimensional plastic package.
RF ID기술의 애플리케이션은 다른 ID기술, 예를 들면 바코드(barcode)와 같이 널리 전파되지 않았으나, 특히 차량 식별과 같은 몇몇 영역에서 설득력을 갖는 기술로 발전하고 있다.Applications of RF ID technology have not been as widely spread as other ID technologies, such as barcodes, but are developing into compelling technologies, particularly in some areas such as vehicle identification.
RF ID의 성장은 태그를 제조하는 부대 시설의 부재, 태그의 높은 비용, 대다수 태그의 대형화(the bulkiness of most of the tags), 태그 감도 및 범위의 문제점과 다수 태그(multiple numbers of tags)의 동시 판독에 대한 필요성으로 인해 저지되어 왔다. 전형적인 태그는 $5 내지 $10범위의 비용이 든다. 회사는 특정 분야의 애플리케이션(niche applications)에 촛점을 맞추어 왔다. 몇몇 종래 기술은 철로 박스카(railway boxcars)를 식별하기 위해 이용된 RF태그를 개시한다. 현재 RF태그는 자동 통행세 징수 산업(automatic toll industry),예를 들면 고속도로 및 교량상에서의 통행세 징수(on thruway and bridge tolls)에서 이용되고 있다. RF태그는 버스에 대한 무접촉 운임 카드(contactless fare cards)로서의 이용을 위해 시험되고 있는 중이다. 고용자 식별 배지 및 보안 배지(employee identification badges and security badges)는 이미 생산되었다. RF ID시스템이 제조 과정에서 구성요소를 추적하기 위해 이용되는 것처럼 동물 식별 태그가 역시 상업적으로 이용가능하다.The growth of RF IDs is due to the absence of additional facilities to manufacture tags, the high cost of tags, the bulkiness of most of the tags, the problems of tag sensitivity and range, and the multiple numbers of tags. The need for reading has been hampered. Typical tags cost from $ 5 to $ 10. The company has focused on niche applications. Some prior art discloses RF tags used to identify railway boxcars. RF tags are currently used in the automatic toll industry, for example on thruway and bridge tolls. RF tags are being tested for use as contactless fare cards for buses. Employer identification badges and security badges have already been produced. Animal identification tags are also commercially available as RF ID systems are used to track components in the manufacturing process.
PC보드(PC boards)또는 플렉스(flex)로 제조되는 RF태그 제조의 한가지 제한은, 플렉스 또는 보드가 먼저 제조되어야 한다는 것이다. 매우 높은 태그 양은(백만 개 보다 많은 태그)에 대한 요구를 만족시키려면, 보다 많은 보드 또는 플렉스를 생산하도록 새로운 공장이 지어져야 한다. 또한, 이들 기술로부터 제조되는 RF태그는 다수의 애플리케이션에 피해 너무 고가이다. 예를 들면, 바 코드는 현존 하는 RF태깅 기술보다 훨씬 낮은 비용으로 식별에 이용되는 기술이다.One limitation of the manufacture of RF tags made of PC boards or flex is that the flex or board must be manufactured first. To meet the demand for very high tag quantities (more than 1 million tags), new plants must be built to produce more boards or flexes. In addition, RF tags manufactured from these technologies are too expensive to avoid in many applications. For example, bar code is a technique used for identification at much lower cost than existing RF tagging techniques.
본 발명의 목적은 무선 주파수 식별 태그를 제조하는 개선된 방법을 제공하는데 있다.It is an object of the present invention to provide an improved method of manufacturing a radio frequency identification tag.
본 발명의 목적은 현재 이용가능한 물질로 제조되는 저가의 무선 주파수 식별 태그를 제조하는 개선된 방법을 제공하는데 있다.It is an object of the present invention to provide an improved method for producing a low cost radio frequency identification tag made of currently available materials.
본 발명의 다른 목적은 대량으로 제조될 수 있는 무선 주파수 식별 태그를 제조하는 개선된 방법을 제공하는데 있다.It is another object of the present invention to provide an improved method of manufacturing a radio frequency identification tag that can be manufactured in large quantities.
본 발명에 따르면, 로직, 메모리 및 무선 주파수 회로를 갖는 반도체 회로를 포함하는 신규한 무선 주파수(RF)태그의 제조 방법이 제공된다. 이 반도체는 기판 상에 탑재되어, 반도체 상의 접점을 통해 반도체에 전기적으로 접속된 안테나를 통해 RF신호를 수신할 수 있다.According to the present invention, there is provided a novel method of manufacturing a radio frequency (RF) tag comprising a semiconductor circuit having logic, memory and radio frequency circuitry. The semiconductor is mounted on a substrate and can receive an RF signal through an antenna electrically connected to the semiconductor via a contact on the semiconductor.
안테나는 신규하고, 신규한 구조를 가지며, 와이어 결합 기술의 신규한 이용에 의해 구성된다. 안테나는 제각기 하나 또는 두개의 와이어 결합에 의해 반도체 접속부에 접속된 하나 이상의 와이어이다. (한 바람직한 실시예에서, 안테나는 한 쌍 또는 다수 쌍의 와이어로 제조된다.The antenna is new, has a new structure, and is constructed by new use of wire bonding technology. The antenna is one or more wires, each connected to a semiconductor connection by one or two wire couplings. (In one preferred embodiment, the antenna is made of one or multiple pairs of wires.
한 바람직한 차이어 결합 방법은 안테나 설계에 의해 요구되는 소정 길이의 와이어(a length of wire)를 스풀 아웃(spools out)하고, 제2절단 단부(second cut end)에서 어떤 전기적 접속도 없이 와이어의 제2단부를 절단한다. 다른 바람직한 실시예에서, 와이어의 제2절단 단부는 접착제(adhesives)로 그 절단 단부를 기판에 접착하거나 또는 기판을 국부적으로 가열시킴으로써 제 위치에 고정된다. 이러한 방법으로, 와이어 결합 방법은 두 구성 요소를 접속하기 보다는 실질적으로 RF태그 회로(안테나)의 구성요소를 생성하도록 이용된다. 그 결과의 신규한 안테나 구조는 와이어 결합에 의해 회로에 접속된 긴 와이어이다. 다른 바람직한 실시예는 와이어 결합 도구로 한 조각의 기판의 조각(a strip of substrate)상의 다수의 반도체로부터 다중 구조를 제조하는 방법과, 와이어 결합 도구(wire bonding tool)로 접힌 쌍극자(folded dipoles)를 제조하는 방법을 포함한다. 그리고 나서 신규한 RF태그의 구성요소는 본 유형의 장치에서 신규한 사용법을 갖는 유기체 커버(an organic cover)로 커버된다.One preferred differential coupling method spools out a length of wire required by the antenna design and removes the wire without any electrical connection at the second cut end. Cut two ends. In another preferred embodiment, the second cut end of the wire is held in place by adhering the cut end to the substrate with adhesives or by locally heating the substrate. In this way, the wire bonding method is used to substantially create the components of the RF tag circuit (antenna) rather than connecting the two components. The resulting novel antenna structure is a long wire connected to the circuit by wire bonding. Another preferred embodiment is a method of fabricating multiple structures from a plurality of semiconductors on a strip of substrate with a wire bonding tool and folded dipoles with a wire bonding tool. It includes a method of manufacturing. The components of the novel RF tag are then covered with an organic cover with new usage in this type of device.
제1도는 바람직한 실시예에서 칩 부착, 와이어 결합 및 패키지 밀봉(package sealing)에 대한 단계를 예시하는 흐름도이다.1 is a flowchart illustrating the steps for chip attachment, wire bonding, and package sealing in a preferred embodiment.
단계 110에서 반도체 칩은 유기체 기판 상에 위치되어 부착된다. (제2도를보라.) 바람직한 실시예에서 칩(205)은 무선주파수 반도체 칩이다. 이와 같은 구조는 U.S. Patent application number 08/303,976 to Brady et al. entitied Radio Frequency Identification Tag filed on September 9, 1994에 기술되어 있고, 이하 명세서 전 범위에서 참조 문헌으로 인용된다.In step 110, the semiconductor chip is positioned and attached on the organic substrate. (See FIG. 2) In a preferred embodiment chip 205 is a radiofrequency semiconductor chip. Such a structure is U.S. Patent application number 08 / 303,976 to Brady et al. entitied Radio Frequency Identification Tag filed on September 9, 1994 and incorporated herein by reference in its entirety.
칩(205)은 반도체 산업에서 공지된 구성요소의 선택 및 배치 머쉰(a components pick and place machine)(202)에 의해 기판(210)상에 위치된다(제 2a도).칩(205)은 몇몇 바람직한 방법에 의해 기판(210)에 부착될 수 있다(단계 110). 먼저, 칩은 접착제와 부착될 수 있다(단계 110).바람직한 접착제는 아크릴(silicones), 실리콘(silic ones), 우레탄(urethanes)등과 같은 압력 감지 접착제(pressure sensi ve adhesives)를 포함한다. 접착제는 접착제 투입 머쉰( adhesive dispensing machine)에 의해 기판 상에 위치된다(단계 110). 또한, 에폭시 드롭(a drop of epoxy)은 칩(205)과 기판(210)사이에 투입될 수 있다. 칩(205)부착의 다른 바람직한 방법은 히트 스테이지(heat stage)(21)와 같은 가열 도구(a heating tool)를 이용하여 기판을 가열하는 것이다. 히트 스테이지(212)는 칩이 위치되는 반대측인 기판(210)의 하부(bottom)에 직접 접촉하여 위치될 수 있다. 이러한 방법으로 기판은, 기판이 부분적으로 리플로우(reflow)하고 접착성이 되게끔 가열되어 칩은 리플노우된 영역에 부착될 수 있다. 바람직한 실시예에서, 칩 자체가 가열된다. 이것은 기판상에 칩을 먼저 위치하고, 그 다음에 기판이 리플로우하거나 또는 융해되도록 하여 칩에 부착 되는 칩을 국부적으로 가열함으로써 이루어질 수 있다. 칩 가열은 레이저(a laser)(206)또는 다른 공지된 방법에 의해 수행될 수 있다. 칩을 부착하는 접착제가 기판 상의 충(211)으로서 역시 제공될 수 있다. 종래 기술에서는 공지된 다른 부착 수단이 고려된다.The chip 205 is placed on the substrate 210 by a components pick and place machine 202 known in the semiconductor industry (FIG. 2A). It may be attached to the substrate 210 by the preferred method (step 110). First, the chip may be attached with an adhesive (step 110). Preferred adhesives include pressure sensitive adhesives such as acrylics, silicone ones, urethanes and the like. The adhesive is placed on the substrate by an adhesive dispensing machine (step 110). In addition, a drop of epoxy may be introduced between the chip 205 and the substrate 210. Another preferred method of attaching the chip 205 is to heat the substrate using a heating tool, such as a heat stage 21. The heat stage 212 may be positioned in direct contact with the bottom of the substrate 210 on the opposite side where the chip is located. In this way, the substrate can be heated such that the substrate partially reflows and becomes adhesive so that the chip can be attached to the ripple-no area. In a preferred embodiment, the chip itself is heated. This can be done by first placing the chip on the substrate and then locally heating the chip attached to the chip by causing the substrate to reflow or melt. Chip heating may be performed by a laser 206 or other known method. An adhesive that attaches the chip may also be provided as a charge 211 on the substrate. Other attachment means known in the prior art are contemplated.
칩(205)은 무선 주파수 안테나의 부착을 위해 이용되는 적어도 두개의 전기적인 접점을 갖는다. 안테나는 접점(207,208)에 부착되고 와이어 결합(제2b도)을 이용하여 신규한 방법으로 형성된다. 한 바람직한 안테나 구조에서, 제1안테나 접속(a first antenna connection)은 와이어 결합도구를 이용하는 제1접점에 와이어 결합된다(단계 120). 이들 도구는 울트라소닉 웨지형 결합(ultrasonic wedge bonding), 구형 결합(ball bonding), 레이저 결합(laser bonding), 레이저 소닉 결합(laser sonic bonding), 열압축(thermocompression), 납땜(soldering), 또는 이들 비술의 소정의 결합도 가능하다.Chip 205 has at least two electrical contacts used for attachment of a radio frequency antenna. The antenna is attached to the contacts 207 and 208 and formed in a novel way using wire coupling (FIG. 2b). In one preferred antenna structure, a first antenna connection is wire coupled to a first contact using a wire coupling tool (step 120). These tools are ultrasonic wedge bonding, ball bonding, laser bonding, laser sonic bonding, thermocompression, soldering, or these Certain combinations of secrets are also possible.
단계 130에서, 와이어는 제1접속이 이루어진 후에 언스풀된다(unspooled). 이 단계에서, 언스풀된 와이어는 실질적으로 안테나 구성요소를 생성하기 위해 이용되므로 종래 기술의 방법보다 보다 많은 와이어가 언스풀된다. 와이어의 길이는 공명 안테나 주파수 (resonant antenna frequency)에 의해 결정된다.In step 130, the wire is unspooled after the first connection is made. At this stage, the unspooled wire is substantially used to create the antenna component, so more wire is unspooled than the prior art methods. The length of the wire is determined by the resonant antenna frequency.
이 단계 130에서, 와이어는 언스풀된 와이어가 장력 상태에 위치하지 않도록 와이어 결합 도구의 헤드의 운행 속도에 관한 제어된 속도로 언스풀되어져야 한다. 이것은 스풀된 와이어의 짧은 길이 즉, 1mm 내지 3mm에 대한 와이어 결합 산업에서의 일반 동작이다. 그러나, 본 발명은 이러한 제어가 와이어 스풀링(wire spooling)의 길이 이상으로 이루어져야 한다. 또한, 소정의 경우에 있어서 헤드는 와이어 공급에 대해 천천히 진행하도록 제어됨에 따라 안테나 구성요소의 형성 동안 커브 또는 루프(a curve or loop)가 이루어질 수 있다. 이 스풀링은 10mm 내지 1000mm길이 사이의 안테나를 생성한다.In this step 130, the wire must be unspooled at a controlled speed relative to the running speed of the head of the wire bonding tool such that the unspooled wire is not in tension. This is a common operation in the wire bonding industry for short lengths of spooled wire, ie 1 mm to 3 mm. However, the present invention requires that such control be made beyond the length of wire spooling. Also, in some cases, the head may be controlled to progress slowly with respect to the wire feed as a curve or loop may occur during the formation of the antenna component. This spooling creates an antenna between 10 mm and 1000 mm long.
단계 140에서, 제1와이어의 제2단부(the second end)는 절단되고 와이어의 절단 단부는 접속해제된(unconnected)상태로 남겨진다. 이 절단은 나이프 블레이드(knife blade)(213)(스웨지(swedge), 길로틴(guillotine)), 자동 쵸퍼(mechanical chopper), 자동 핀서(mechanical pincers), 레이저 등을 포함하는 소정의 공지된 방법 에 의해 수행될 수 있다.In step 140, the second end of the first wire is cut and the cut end of the wire is left unconnected. This cutting is in any known method, including knife blade 213 (swedge, guillotine), automatic chopper, automatic pincers, laser, and the like. Can be performed by
와이어의 절단 단부(cut end)는 몇몇 방법으로 적절히 부착될 수 있다(단계130 및 단계140). 와이어의 절단단부는, 와이어 단부 밑에 위치되는 접착제(169)의 작은 양의 드롭에 의해 기판 상에 적절히 유지될 수 있다. (제 2d도 및 제 2g도를 보라). 접착제(169)는 노즐(nozzle)(l68)에 의해 투입된다. 절반 단부는, 기판이 접착성이 되고 절단 단부에 접착하도록 절단 단부가 휴식하는 지점에서 기판을 국부적으로 가열함으로써 역시 제 위치에서 유지될 수 있다. 국부화된 기판의 가열 방법은 공지되어 있고 가열 지점에서 도구 또는 레이저(236)로 포커스되는(focused)열 스푯 애플리케이션(spot application of heat)을 포함한다. 접착제도 역시 공지되어 있다. 그들은 에폭시, 실리콘 및 페놀-부티럴(phenolic-butyral)을 포함한다. 와이어는 절단 전이나 또는 후에(단계 140,170)부착될 수 있음(단계 130,160)에 주목하라. 와이어가 절단 후에 접착되는 경우, 절단 와이어 단부는 기판에 부착하기 전에 일시적으로 압력에 의해 적절히 유지될 수 있다.The cut ends of the wires can be properly attached in several ways (steps 130 and 140). The cut end of the wire may be properly held on the substrate by a small amount of drop of adhesive 169 positioned below the wire end. (See Figures 2d and 2g). The adhesive 169 is introduced by a nozzle 168. The half end can also be held in place by locally heating the substrate at the point where the cut end rests so that the substrate becomes adhesive and adheres to the cut end. Methods for heating localized substrates are known and include a spot application of heat focused with a tool or laser 236 at the heating point. Adhesives are also known. They include epoxy, silicone and phenolic-butyral. Note that the wire may be attached before or after cutting (step 140, 170) (step 130, 160). If the wire is bonded after cutting, the cutting wire end may be properly held by pressure temporarily before attaching to the substrate.
기판에 절단 단부를 부착시키는 다른 방법은 와이어 (131,132)를 가열시키는 단계(제2E도)를 포함함으로써 절단 단부는 접촉 지점에서 기판을 가열시키고 절단 단부가 기판에 부착되도록 한다. 와이어는 유도성 가열(inductive heating)(237), 저항 가열 (resistive heating)(235), 레이저 가열(laser heating)(236), 또는 본 목적을 위해 이용된 소정의 다른 방법으로 가열될 수 있다. 또한, 와이어 밑의 기판의 일부는, 와이어의 일부 또는 전부가 기판내에 삽입되도록(embedded)가열될 수 있다(235-237). 이 효과는 와이어(131,132)의 구분(또는 전부)가 기판내에 삽입되도록 와이어(235-237)를 가열하고, 와이어의 부분(또는 전부)에 압력(246)을 인가함으로써 역시 성취될 수 있다. 이것은 와이어가 기판의 연화된 부분(a softened part)에 접착하도록 히트 스테이지(212)로 기판을 가열함으로써(제2도) 역시 성취될 수 있다. 또한, 압력 수단(pressure means)(246)은, 압력 및 열이 동시에 와이어(131)에 인가되도록 예를 들어, 저항 사열(235)로 가열될 수 있다.Another method of attaching the cut end to the substrate includes heating the wires 131, 132 (FIG. 2E) such that the cut end heats the substrate at the point of contact and causes the cut end to adhere to the substrate. The wire may be heated by inductive heating 237, resistive heating 235, laser heating 236, or any other method used for this purpose. In addition, a portion of the substrate under the wire may be heated (235-237) so that some or all of the wire is embedded in the substrate. This effect can also be achieved by heating the wires 235-237 so that the segments (or all) of the wires 131, 132 are inserted into the substrate and applying pressure 246 to a portion (or all) of the wires. This can also be accomplished by heating the substrate with the heat stage 212 (FIG. 2) such that the wire adheres to a softened part of the substrate. In addition, pressure means 246 may be heated to, for example, resistance resistor 235 such that pressure and heat are simultaneously applied to wire 131.
상술한 단계를 이용하여, 하나 이상의 와이어(more than one wire)(131 또는 132)는 개개의 접점(208 또는 207)에 부착되고, 스풀 아웃되어, 기판에 부착된 후, 절단될 수 있다. 이들 와이어는 상호간 에 대해 상이한 각으로 위치될 수 있다.Using the steps described above, more than one wire 131 or 132 may be attached to individual contacts 208 or 207, spooled out, attached to a substrate and then cut. These wires can be positioned at different angles with respect to each other.
제1도의 단계 180에서, 칩은 제2h도에 도시된 보호캡슐 재료 층(a protective encapsulant layer)으로 커버된다. 투입 노즐(281)은 보호 코팅(a protective coating)(283)을 형성하도록 칩(235)의 표면 상에 캡슐 재료 드롭(a drop of encapsulant)(282)을 위치시킨다. 바람직한 실시예에서, 캡슐 재료는 칩 상에서의 광-감지회로(light-sensitive circuits)를 보호함에 명확하지 않다.In step 180 of FIG. 1, the chip is covered with a protective encapsulant layer shown in FIG. 2H. Input nozzle 281 locates a drop of encapsulant 282 on the surface of chip 235 to form a protective coating 283. In a preferred embodiment, the capsule material is not clear in protecting light-sensitive circuits on the chip.
단계 190에서, 완료된 칩 및 안테나구조는 가열된 롤러 (295 및 296)사이의 샌드위치(sandwich)를 압축하는 롤 레미네이터(a rolllaminator)를 이용함으로써 유기체 커버(293(하부) 및 294(상부))사이에서 밀봉된다(제2i도). 유기체 커버는 폴리에스테츠의 단층(a simgle layer of polyester), 폴리에틸렌(polyethylene)또는 가열에 의해 연화될 수 있는 다른 유기체 막(organic film)으로 구성된다. 바람직한 실시예에서 막은 두개의 층 즉, 공중합체 EVA(에틸 비닐 아세테이트)(copolymer EVA(ethyl vinyl acetate))의 내층(297)과 폴리에스테르의 외층(298)으로 구성된다. 다른 바람직한 실시예에서, 하나의 층 예를 들면, 상부 층(294)만이 인가되는 것을 필요로 한다.In step 190, the completed chip and antenna structure is covered with an organic cover 293 (bottom) and 294 (top) by using a roll laminator to compress the sandwich between the heated rollers 295 and 296. It is sealed between (FIG. 2i). The organic cover consists of a simgle layer of polyester, polyethylene or other organic film that can be softened by heating. In a preferred embodiment the membrane consists of two layers: an inner layer 297 of copolymer EVA (ethyl vinyl acetate) and an outer layer 298 of polyester. In another preferred embodiment, only one layer, for example top layer 294, needs to be applied.
제3도는 와이어(331)의 배치(제3a도), 와이어의 결합(제3b도 및 제3c도), 와이어의 언스풀링(제3d도), 와이어의 절단(제3e도)에 대해 상세히 도시한다. 제3a도에서 와이어(331)는 기판(310)에 부착되었던 반도체 칩(305)상의 접촉 패드(contact pad)(307)상에 위치된다. 제3b도에서 와이어(331)는 울트라소닉 에너지(ultrasonic energy)(334)를 이용하는 패드(307)에 결합된다. 제3c도에서 웨지 결합(333)은 완료되고, 와이어가 제3d도에 도시된 바와 같이 스풀 아웃됨에 따라 결합 헤드(332)는 기판으로부터 제거된다. 제3e도에서 와이어는 지정된 길이로 종결되고 나이프 에지(knife edge)(340)에 의해 절단된다.3 shows in detail the placement of the wire 331 (FIG. 3A), the bonding of the wires (FIG. 3B and FIG. 3C), the unspooling of the wire (FIG. 3D), and the cutting of the wire (FIG. 3E). do. In FIG. 3A the wire 331 is located on a contact pad 307 on the semiconductor chip 305 that was attached to the substrate 310. In FIG. 3B the wire 331 is coupled to a pad 307 using ultrasonic energy 334. In FIG. 3C the wedge bond 333 is complete and the bond head 332 is removed from the substrate as the wire is spooled out as shown in FIG. 3D. In FIG. 3E the wire is terminated to a specified length and cut by knife edge 340.
제4도는 와이어(431 및 432)가 금속 패드 종결 지점(metal pad termination sites)(445및 446)에서 종결되는 방법의 실시예(400)를 도시한다. 평면도 4a는 와이어(431및 432)로 칩 상의 접점(445 및 446)에 접속된 유기체 기판(410)상에서의 반도체 칩(405)을 도시한다. 제4b도는 측면도이다.4 illustrates an embodiment 400 of how wires 431 and 432 terminate at metal pad termination sites 445 and 446. Top view 4a shows a semiconductor chip 405 on an organic substrate 410 connected to wires 431 and 432 to contacts 445 and 446 on the chip. 4b is a side view.
접점(445 및 446)은 안테나 와이어(432,431)의 절단 단부를 제 위치에서 유지하도록 제공된다. 접점(445 및 446)은 금, 은, 알루미늄, 구리 니켈 또는 그들의 합금으로 구성될 수 있다. 이들은 기판의 표면에 부착되는 기판 상에서 또는 다른 물질(실리콘 또는 다른 금속과 같은) 상에서의 얇은 층으로서 디포지트(deposit)될 수 있다. 바람직한 실시예에서, 안테나 와이어 단부는 접점(445 및 446)에 대해 어떤 접속도 이루어지지 않는다.Contacts 445 and 446 are provided to hold the cut ends of the antenna wires 432 and 431 in place. Contacts 445 and 446 may be composed of gold, silver, aluminum, copper nickel or alloys thereof. They may be deposited as a thin layer on a substrate that is attached to the surface of the substrate or on another material (such as silicon or other metal). In a preferred embodiment, the antenna wire ends do not make any connections to contacts 445 and 446.
제5a도는 반도체 칩 상에서 제1 및 제2접점(507 및 508)에 결합된 와이어를 포함하는 유기체 기판(502)상에서 반도체 칩(505,515,525)의 연속적인 조각(500)을 도시한다. 와이어(531,532)는 각각 2분의1파장(one-half wavelength)길이이다. 상기 제2도 및 제3도에 도시된 바와같이 결합 및 스케일링(scaling)동작후에, 태그(501)의 조각은 나이프 블레이드(561)에 의해 도트된 라인(551 및 552)으로 도시된 위치에서 세그먼트(541,542,543등)로 절단된다. 바람직한 실시예에서, 나이프 블레이드 절단은 각각 4분의1파장 길이인 나머지 와이어 세그먼트(533, 534,535,536등)를 만들기 위한 칩 사이의 중간에서 이루어진다.5A shows a continuous piece 500 of semiconductor chips 505, 515, 525 on an organic substrate 502 that includes wires coupled to first and second contacts 507 and 508 on the semiconductor chip. Wires 531 and 532 are each one-half wavelength long. After combining and scaling operations as shown in FIGS. 2 and 3 above, the piece of tag 501 is segmented at the location shown by the lines 551 and 552 dotted by the knife blade 561. (541, 542, 543, etc.). In a preferred embodiment, knife blade cutting is made midway between the chips to make the remaining wire segments 533, 534, 535, 536, etc., each quarter wavelength long.
제5b도는 반도체 칩 상에 제각기 제1 및 제2접점(551과553,561과563,571과557,574와557,577과578)뿐만 아니라 제3 및 제4접점(552와554,562와564, 594와595,581과583,591과593)에 결합된 와이어를 포함하는 유기체 기판(502)상의 반도체 칩(550, 560, 570, 580, 590)의 연속적인 조각 어레이(a continuous strip array)(501)를 도시한다. 바람직한 실시예에서, 와이어(511,512,513및514)는 각각 2분의1파장길이이다. 상기 제2도 및 제3도에 도시된 바와같이 결합 및 스케일링후에, 태그(501)의 조각 어레이는 나이프 블레이드(561)에 의해 도트된 라인(522,523 및 524)에 의해 도시된 위치에서 세그먼트(517, 518, 519, 520, 521등)로 절단된다. 바람직한 실시예에서, 나이프 블레이드 절단은 각각 4분의 1파장(one-quarter wavelength)길이인 나머지 와이어 세그먼트(556. 565, 566, 576. 567, 568등)를 만들기 위한 칩 사이의 중간에서 이루어진다. 다른 바람직한 실시예에서, 절단(522. 523, 524등)은 한 무리의 나이프 블레이드(a gang of knife blade)(561)에 의해 동시에 이루어질 수 있다. 반도체 칩(전형적으로 590)은 다른 반도체 칩 상의 접점에 접속되지 않는 하나의 와이어(전형적으로 593a)를 가짐에 주목하라. 이들 경우에 있어서, 와이어(593a)의 단부는 상술된 어떤 방법으로도 종결될 것이다. 한 바람직한 실시예에서, 와이어 (593a)는 제4도에 도시된 바와같은기판상에 위치되는 접점(전형적으로 593b)으로 종결될 것이다. 제5b도는 기판상에어레이를 형성하는 반도체 칩의 세개의 행을 나타냄에 또한 주목하라. (한 행은 제 5a도에 도시되어 있다.) 그러나 행의 수는 두개로부터 기판 상에서 합치하는 수 만큼까지 변할 수 있다.5b shows the first and second contacts 551 and 553, 561 and 563, 571 and 557, 574 and 557, 577 and 578 as well as the third and fourth contacts 552 and 554, 562 and 564, 594 and 595, 581 and 583, 591 and 593, respectively, on the semiconductor chip. A continuous strip array 501 of semiconductor chips 550, 560, 570, 580, 590 on an organic substrate 502 including wires coupled to the substrate is shown. In a preferred embodiment, the wires 511, 512, 513 and 514 are each one-half wavelength long. After joining and scaling, as shown in FIGS. 2 and 3 above, the piece array of tags 501 is segment 517 at the location shown by lines 522, 523 and 524 dotted by knife blades 561. 518, 519, 520, 521, etc.). In a preferred embodiment, knife blade cutting is made midway between the chips to make the remaining wire segments (556.565, 566, 576.567, 568, etc.) each one-quarter wavelength long. In another preferred embodiment, the cuts (522. 523, 524, etc.) can be made simultaneously by a gang of knife blades 561. Note that the semiconductor chip (typically 590) has one wire (typically 593a) that is not connected to a contact on another semiconductor chip. In these cases, the end of wire 593a will be terminated in any of the ways described above. In one preferred embodiment, wire 593a will terminate with a contact (typically 593b) located on a substrate as shown in FIG. Note also that Figure 5b shows three rows of semiconductor chips forming an array on a substrate. (One row is shown in FIG. 5A.) However, the number of rows can vary from two to as many matching on the substrate.
제6도는 나이프 블레이드(641및 642)의 어레이에 의해 개별적인 세그먼트(611,612,613)로 절단되고 있는(650) RF태그의 조각(610)을 도시한다.6 shows a piece 610 of RF tag 650 being cut 650 into individual segments 611, 612, 613 by an array of knife blades 641 and 642.
제7도는 임시 포스트 와이어 가이드(temporart post wire guide)(720)의 이용에 의한 루프 안테나의 제조(700)를 예시한다. 포스트(720)는 기판(710)으로 하강된다(750). 와이어(730)는 제2도의 접촉 패드에 먼저 결합되고, 와이어는 결합 헤드(740)에 의해 언스풀된다(단계 130). 와이어(730)는 임시 포스트(720)를 에워싸는 결합 헤드에 의해 안내된다. 이 과정은 기판의 다른 단부에서 반영되고, 와이어는 루프 안테나를 형성하는 제2도의 접촉패드(208)에 결합된다. 임시 포스트(720)는 다음에 이 과정을 완료하도록 상승된다(751). 와이어는 상술한 방법을 이용하여 기판에 부착된다.7 illustrates fabrication of a loop antenna 700 by the use of a temporary post wire guide 720. Post 720 is lowered to substrate 710 (750). Wire 730 is first coupled to the contact pad of FIG. 2, and the wire is unspooled by coupling head 740 (step 130). Wire 730 is guided by a coupling head that surrounds temporary post 720. This process is reflected at the other end of the substrate, and the wire is coupled to the contact pad 208 of FIG. 2 forming the loop antenna. Temporary post 720 is then raised 751 to complete this process. The wire is attached to the substrate using the method described above.
제8도는 엠보스된 스터드(embossed stud)(820)와이어 가이드의 이용에 의한 루프 안테나의 제조(800)를 예시한다. 스터드(820)는 기판(810)에서 영구적으로 엠보스된다. 와이어(830)가 제2도의 접촉 패드(207)에 먼저 결합된 후에, 와이어는 결합 헤드(840)에 의해 언스풀된다. 이 과정은 기판의 다른 단부에서 반영되고 와이어는 루프 안테나를 형성하는 제2도의 접촉 패드(208)에 결합된다. 스터드(820)는 기판 상의 제 위치에서 적절히 상주한다.8 illustrates the fabrication of a loop antenna 800 by use of an embossed stud 820 wire guide. Stud 820 is permanently embossed on substrate 810. After the wire 830 is first bonded to the contact pad 207 of FIG. 2, the wire is unspooled by the coupling head 840. This process is reflected at the other end of the substrate and the wire is coupled to the contact pad 208 of FIG. 2 forming the loop antenna. Stud 820 resides in place on the substrate.
제9도는 상승된 플랩 와이어 가이드(raised flap wire guide)(900)에 의한 루프 안테나의 제조(900)를 예시한다. 플랩은 펀칭 도구(a punching tool)에 의해 기판(910)으로 사전 펀치된다(pre-punched). 플랩(920)은 공기 분사(an air jet)(925)또는 핀(pin)(926)과 같은 기계적인 방법에 의해 기판에서 상승된다. 와이어(920)가 제2도의 접촉 패드(207)에 먼저 결합된 후에, 와이어는 결합 헤드(940)에 의해 언스풀된다. 이것은 상승된 플랩(920)을 에워싸는 결합 헤드에 의해 안내된다. 이 과정은 기관의 다른 단부에서 반영되고 와이어는 루프 안테나를 형성하는 제 2도의 접촉 패드(208)에 결합된다. 기계적인 상승 수단(925)이 제거되고. 플랩(920)이 완화(relax)된 후, 플랩(920)은 기판 상의 제 위치에서 와이어(930)를 유지한다.9 illustrates the fabrication of a loop antenna 900 by raised flap wire guide 900. The flap is pre-punched to the substrate 910 by a punching tool. Flap 920 is raised from the substrate by a mechanical method such as an air jet 925 or pin 926. After the wire 920 is first bonded to the contact pad 207 of FIG. 2, the wire is unspooled by the coupling head 940. This is guided by a coupling head that surrounds the raised flap 920. This process is reflected at the other end of the organ and the wire is coupled to the contact pad 208 of FIG. 2 forming a loop antenna. Mechanical lifting means 925 is removed. After the flap 920 is relaxed, the flap 920 holds the wire 930 in place on the substrate.
제7-9도에 예시된 방법의 몇몇 바람직한 실시예에서, 와이어는 상술한 방법중의 어느 한 방법 즉, 열 및/또는 압력에 의해 기판에 부착될 수 있다.In some preferred embodiments of the method illustrated in FIGS. 7-9, the wire may be attached to the substrate by any of the methods described above, ie, heat and / or pressure.
제10도는 열(1064)및 압력(1065)의 애플리케이션에 의한 태그(1000)의 완료를 도시한다. 다중 안테나(multiple antennas)(l020)(및 1030)는 반도체 칩(1010)상에서, 와이어(1025)(및 1035)와 접촉패드(1006및1008(1007및 1009))의 결합에 의해 생성되어 왔다. 캡슐 재료(1030)는 칩(1005)과 접촉 패드(1006-1009)를 커버하도록 투입 되었다. 기판(1040)은 유기체 커버(organic cover)(1045)밑에 위치된다. 바람직한 실시예에서, 유기체 커버는 PET의 외층(1060)과 EVA의 내층(1050)으로 구성된다. 열(1064)및 압력(1065)이 패키지를 밀봉하도록 인가된다. 다른 실시예에서, 하부 커버(1046)는 태그 밑에 위치되고, 상부 커버(1045)로 동시에 막이 형성된다. PET는 폴리에스테르로서 역시 공지되어 있다.10 illustrates completion of tag 1000 by application of heat 1064 and pressure 1065. Multiple antennas 1020 (and 1030) have been created on the semiconductor chip 1010 by the combination of wires 1025 (and 1035) and contact pads 1006 and 1008 (1007 and 1009). The capsule material 1030 was introduced to cover the chip 1005 and the contact pads 1006-1009. Substrate 1040 is positioned under organic cover 1045. In a preferred embodiment, the organic cover consists of an outer layer 1060 of PET and an inner layer 1050 of EVA. Heat 1064 and pressure 1065 are applied to seal the package. In another embodiment, the bottom cover 1046 is positioned under the tag and a film is formed simultaneously with the top cover 1045. PET is also known as polyester.
본 발명의 개시에 따르면, 통상의 지식을 가진 자는 본 발명의 고려 범위내에 있는 동등한 실시예를 개발할 수 있다. 예를들면, 제2,3, 및 5도에 도시된 방법은 서로 상이한 각(예를들면, 직교하지 않는(non-orthogonal)으로 존재하는 다중 안테나로 각각의 무선 주파수 태그를 생성하기 위해 이용될 수 있다.According to the disclosure of the present invention, one of ordinary skill in the art can develop equivalent embodiments within the scope of the present invention. For example, the method shown in FIGS. 2, 3, and 5 may be used to generate each radio frequency tag with multiple antennas present at different angles (eg, non-orthogonal) from each other. Can be.
Claims (36)
Applications Claiming Priority (2)
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US33028894A | 1994-10-27 | 1994-10-27 | |
US8/330,288 | 1994-10-27 |
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KR960016656A KR960016656A (en) | 1996-05-22 |
KR100192728B1 true KR100192728B1 (en) | 1999-06-15 |
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KR1019950036741A Expired - Fee Related KR100192728B1 (en) | 1994-10-27 | 1995-10-24 | Radio Frequency Tag Manufacturing Method |
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JP (1) | JP2818392B2 (en) |
KR (1) | KR100192728B1 (en) |
HU (1) | HUT76992A (en) |
TW (1) | TW280897B (en) |
WO (1) | WO1996013793A1 (en) |
ZA (1) | ZA957085B (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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US6107920A (en) * | 1998-06-09 | 2000-08-22 | Motorola, Inc. | Radio frequency identification tag having an article integrated antenna |
JP2000216188A (en) * | 1999-01-22 | 2000-08-04 | Seiko Epson Corp | Wire bonding method, semiconductor device, circuit board, electronic device, and wire bonding device |
US6472747B2 (en) * | 2001-03-02 | 2002-10-29 | Qualcomm Incorporated | Mixed analog and digital integrated circuits |
US6732923B2 (en) * | 2001-04-04 | 2004-05-11 | Ncr Corporation | Radio frequency identification system and method |
US7692545B2 (en) * | 2004-05-18 | 2010-04-06 | Hitachi, Ltd. | Wireless IC tag and process for manufacturing the same |
US7295161B2 (en) | 2004-08-06 | 2007-11-13 | International Business Machines Corporation | Apparatus and methods for constructing antennas using wire bonds as radiating elements |
KR101038493B1 (en) * | 2004-11-12 | 2011-06-01 | 삼성테크윈 주식회사 | Method for manufacturing radio frequency recognition tag for microwave |
CN101147295B (en) | 2005-03-25 | 2012-10-03 | 东丽株式会社 | Planar antenna and method for manufacturing same |
US7586193B2 (en) | 2005-10-07 | 2009-09-08 | Nhew R&D Pty Ltd | Mm-wave antenna using conventional IC packaging |
JP4316607B2 (en) | 2006-12-27 | 2009-08-19 | 株式会社東芝 | ANTENNA DEVICE AND WIRELESS COMMUNICATION DEVICE |
WO2011083502A1 (en) | 2010-01-05 | 2011-07-14 | 株式会社 東芝 | Antenna and wireless device |
JP5172925B2 (en) | 2010-09-24 | 2013-03-27 | 株式会社東芝 | Wireless device |
JP5414749B2 (en) | 2011-07-13 | 2014-02-12 | 株式会社東芝 | Wireless device |
JP5417389B2 (en) | 2011-07-13 | 2014-02-12 | 株式会社東芝 | Wireless device |
TW201325842A (en) * | 2011-12-16 | 2013-07-01 | hong-ren Li | Tool box structure |
JP6121705B2 (en) | 2012-12-12 | 2017-04-26 | 株式会社東芝 | Wireless device |
KR102200058B1 (en) * | 2014-12-19 | 2021-01-08 | 글로 에이비 | Light emitting diode array on a backplane and method of making thereof |
FR3047101B1 (en) * | 2016-01-26 | 2022-04-01 | Linxens Holding | METHOD FOR MANUFACTURING A CHIP CARD MODULE AND A CHIP CARD |
US11233017B2 (en) * | 2019-10-03 | 2022-01-25 | Texas Instruments Incorporated | Ex-situ manufacture of metal micro-wires and FIB placement in IC circuits |
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FR2269409B1 (en) * | 1974-04-30 | 1979-03-09 | Central Glass Co Ltd | |
NL9200396A (en) * | 1992-03-03 | 1993-10-01 | Nedap Nv | RADIO FREQUENT IDENTIFICATION LABEL WITH RELATIVELY LARGE DETECTION DISTANCE AND A MINIMUM NUMBER OF ELECTRONIC COMPONENTS. |
DE4319878A1 (en) * | 1992-06-17 | 1993-12-23 | Micron Technology Inc | High frequency identification system card - has integrated circuit chip or carrier layer sealed by top layer and coupled to batteries and antenna system |
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1995
- 1995-05-09 TW TW084104596A patent/TW280897B/zh active
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- 1995-09-20 HU HU9701699A patent/HUT76992A/en unknown
- 1995-09-20 WO PCT/EP1995/003703 patent/WO1996013793A1/en not_active Application Discontinuation
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WO1996013793A1 (en) | 1996-05-09 |
JPH08213419A (en) | 1996-08-20 |
TW280897B (en) | 1996-07-11 |
ZA957085B (en) | 1996-03-11 |
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