JPS6232295A - gas pressure driven pump - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention (Technical Field of the Invention) The present invention uses gas pressure such as air or other gas to
The present invention relates to a pneumatically driven pump that feeds fluids such as chemical solutions.

(Technical background of the invention and its problems) Conventionally, this type of pump uses a so-called piston type pump, which uses a mechanical reciprocating body such as a piston or plunger as a drive unit that applies gas pressure to the pump body. A plunger-type configuration was commonly employed. However, in this case, since there is a mechanically sliding part, problems such as damage and wear of the part cannot be avoided. Therefore, there are disadvantages in that constant care must be taken to prevent slippage, and frequent maintenance inspections such as replacement of worn seal members are required.

Furthermore, in the case of a piston type or plunger type, it is difficult to significantly downsize the driving part, so there is a drawback that it is difficult to incorporate the drive unit into various process devices that require miniaturization of the entire device.

In addition, today there are 20 pump fluids such as semiconductor processing fluids.
When the temperature reaches a high temperature of around 0 degrees Celsius, the conventional type of pump described above has a problem in that the hydraulic oil and mechanical seals used are affected by the heat and their functions are impaired.

(Object of the Invention) The present invention has been made in view of the above-mentioned conventional circumstances, and its object is to provide a structure that does not have mechanical sliding parts, is free from problems of scratching or wear, and has a structure that does not have any mechanical sliding parts. To provide a new gas drive pump that is simple and durable, can be significantly downsized, and can easily reduce manufacturing costs.

(Summary of the Invention) In order to achieve the above-mentioned object 1, the present invention basically comprises: a primary flow passage into which a pressurized gas flow is introduced from a gas pressure supply source; and a primary flow passage communicating with the flow passage. An ejector unit having a secondary side flow passage communicating with the flow passage, and a diffuser communicating with both flow passages and having a cross-sectional area of the flow passage gradually increasing toward the outlet side; An opening/closing means: a pump body having a pump supply fluid storage section and a gas pressure introduction space, and provided with check valves on the suction side and discharge side of the pump supply fluid; a secondary side flow path of the ejector unit; and a gas communication means for communicating the gas pressure introduction space of the pump body with the gas pressure introduction space of the pump body; and by repeating the opening and closing operation of the opening/closing means, the pump-driven gas pressure is transferred from the ejector unit to the gas pressure introduction space of the pump body. The present invention proposes a gas drive pump having a structure characterized in that it provides the following properties.

According to the above configuration, when the )5fl closing means is in the open position, the pressurized gas flow introduced into the downstream flow passage directly flows into the secondary flow passage, and this flows through the gas communication means. The gas is fed into the gas pressure introduction space of the pump body along the forward direction, and the gas pressure causes the pump feeding fluid in the body to be discharged from the discharge side via the check valve. On the other hand, when the opening/closing means is switched to the open position, the pressurized gas flow flows to the diffuser, and the secondary side flow path becomes negative pressure due to the ejector action, and the gas in the gas pressure introduction space is Via the communication means, it is then sucked into the secondary flow path along the backward direction and discharged from the diffuser. Then, the gas pressure in the gas pressure introduction space becomes a negative pressure, the suction side check valve opens, and the pumped fluid is sent into the main body. Therefore, the opening/closing means performs the pumping operation by repeating such opening/closing operations, and the above-mentioned object of the present invention is fully achieved.

Hereinafter, the present invention will be described in detail with reference to the drawings.

(Embodiment of the Invention) In FIG. 1, 1 is an ejector unit, 2 is a pump main body, and 3 is a gas pressure pipe forming a gas communication means between the unit 1 and the main body 2.

The ejector function (1) has a downstream flow passage 4, a secondary flow passage 5 communicating therewith, and a gas pressure conduit for a diffuser 6 formed therein, and is connected to the downstream end of the downstream flow passage 4. forms an aperture nozzle 7. Therefore, the secondary side flow passage 5 and the diffuser 6 communicate with the primary side wave passage 4 via this nozzle 7.

The diffuser 6 has the form of a widening tube whose cross section gradually expands toward the opening 8 on the outlet side, and
A commercially available ejector part can be used as l.

The primary side flow path 4 is connected via a pressure reducing valve 9 to a near compressor 10 that serves as a gas pressure supply source through a pipe 11, and the compressor 10 has a pressure of, for example, 7 kg/Cm.
The pressurized air of 2 is sent out and the pressure reducing valve 9 gives a pressure of, for example, 1.5.
The pressure is reduced to ~4.0 kg/cm 2 and introduced into the primary flow path 4 . The introduction pressure is detected by a pressure gauge 12.

The outlet side of the diffuser 6 is connected to a 2-point, 2-position electromagnetic on-off valve 14 via piping 13, and the on-off valve 14 is connected to a power source 15.
The timer 16 is electrically connected to the timer 16 connected to the timer 16 .

The timer 16 is configured to send ON/OFF driving pulses to the on-off valve 14 in a predetermined cycle, and is a commercially available timer in which a terminal rotates and sequentially contacts a plurality of contacts arranged in a disk shape. Available.

The opening/closing valve 14 and the timer 16 constitute an opening/closing means for opening and closing the diffuser 6 of the ejector unit 1.

Note that, instead of the on-off valve, the opening/closing means may be constructed in such a manner that a shutter is arranged so as to be openable and closable in correspondence with the opening 8 of the diffuser 6, and the shutter is opened and closed by an appropriate reciprocating means.

In FIG. 1, the outlet side of the diffuser 6 is in an open state.

One end or upper end of the gas piping 3 is connected to the secondary flow path 5 of the unit 1, and the other end or lower end is connected to the pump body 2 via a filter 17, and the lower end is connected to the pump body 2 for introducing gas pressure into the body. It communicates with the space 2a. The main body 2 has a vertical arrangement, and the pumped fluid, for example water, is accommodated in the lower accommodation section 2b, leaving the space 2a, as shown. Therefore, the gas pressure is in direct contact with the pumping fluid.

The main body 2 is connected to a fluid supply tank 20 via a check valve 18 on the suction side by a suction side piping 1° 9 for pump-fed fluid, and on the discharge side, connected to a fluid supply tank 20 via a check valve 21. It is connected to a fluid supply portion (not shown) by a fluid discharge side piping 22 .

Note that 23 is a drain. Furthermore, the ejector unit 1 can actually be made much smaller than the pump body 2. In FIG. 1, size is not taken into account for convenience of explanation.

Referring to FIG. 2, the pump body 2 will be further described. Main body 2
is composed of an upper plate 30, a lower plate 31, and a cylindrical side plate 32 that connects them vertically.The upper plate 30 has holes 33 for mounting the gas pressure piping 3 and holes 34 for mounting the check valve 18. It is formed. On the other hand, a hole 35 for the drain 23 and a hole 36 for mounting the check valve 21 are formed in the lower plate 31.

The check valve 18.21 is a Pall valve type, and has a valve ball 37,
They are of substantially identical construction, each having a spring 39 biasing it towards the valve seat 38. Check valve 18 on the suction side
When the gas pressure introduction space 2a in the main body 2 reaches a predetermined negative pressure, it opens against the bias of the spring 37, allowing the pumping fluid to be sucked into the main body from the piping 19. On the other hand,
When a predetermined gas pressure is introduced into the space 2a, the check valve 21 on the discharge side opens against the bias of the spring 39 due to the pressure, and the check valve 21 opens the piping of the fluid contained in the storage portion 2b. Discharge to the 22 side is allowed.

The operation of the pneumatically driven pump of the present invention constructed as described above will be explained with reference to FIG. 1 again.

The pressurized gas flow introduced into the primary flow path 4 of the ejector unit (1) from the compressor (10) via the pressure reducing valve (9) passes through the nozzle (7) and heads toward the diffuser (6), where the on-off valve (14) is in the closed position. , the flow of pressurized gas to the outlet side of the diffuser 6 is blocked, as shown by the solid line.
The gas is guided into the secondary flow path 5 and sent into the gas pressure introduction space 2a of the main body along the outward direction via the piping 3, and the gas pressure opens the discharge side check valve 21 to release the fluid. A discharge operation is performed.

On the other hand, when the on-off valve 14 is switched to the open position,
The pressurized gas flow flows out to the outlet side of the diffuser 6 as shown by the broken line, and the resulting ejector action creates a negative pressure in the secondary flow path 5. Also, due to the viscosity of the pressurized gas flow itself, The gas in the next flow path 5 is drawn toward the diffuser 6 side, flows from the gas pressure introduction space 2a of the main body 2 through the piping 3 in the backward direction, and negative pressure is generated in the space 2a. The check valve 18 on the suction side is opened and pumped fluid is sucked into the main body 2.

The opening/closing valve 14 is switched between opening and closing at a predetermined speed by the timer 16, so that the reciprocating motion of the normal gas flow is transmitted from the ejector unit 1 to the main body 2.
The pump feeding operation is performed with a stroke corresponding to the opening/closing operation of the on-off valve 14.

Therefore, the stroke can be arbitrarily set to a desired value by adjusting the timer 16.

Note that the filter 17 removes the pumping fluid mixed into the gas when it is returned to the secondary flow path 5.

In this example, air pressure was used as the gas pressure, but
For example, if the fluid being pumped is a chemical, a special gas may be used that does not cause any problems even if it comes into direct contact with the chemical. Furthermore, if there is a risk of explosion due to contact with a fluid, an explosion-proof gas may be used, and the present invention is not limited to the embodiments.

In addition, although an air conditioner buoy/resor is used as the gas pressure supply source in the embodiment, if it is used in a factory etc. that has piping equipment for the compressor, it can be connected to the existing piping and there is no need to provide it specially. .

(Effects of fjl) - As explained above, the present invention does not have any mechanical sliding parts like the conventional pinstone type or plunger type, so it eliminates the problems associated with chafing and wear. It is easy to maintain, has high durability, has few breakdowns, is suitable for handling high-temperature liquids as a pump-supplied fluid, and can be significantly downsized, and can be used in various applications that require downsizing. It is easy to design and incorporate into process equipment, and it has the advantage of being able to significantly reduce manufacturing costs.

[Brief explanation of drawings]

FIG. 1 is an overall configuration diagram showing an outline of the circuit configuration of a pneumatically driven pump according to an embodiment of the present invention, and FIG. 2 is a detailed vertical sectional view of the pump main body portion in FIG. 1. 1--Ejector unit 2--Pump body 3--Gas pressure piping 4--Next flow path 5--Secondary side flow path
6. Diffuser 14. φ electromagnetic on-off valve 16. Timer Applicant: Iwaki Co., Ltd. Agent: Patent attorney: Masaaki Asakura 1. 1. Makatsu 2. Illustration procedure amendment September 2, 1985 Commissioner of the Japan Patent Office Uga Michibe 1, Indication of the case, Patent Application No. 170759/1983, 2, Name of the invention, pneumatic drive pump 3, Person making the amendment, Relationship to the case Patent applicant address: 2 Kanda Iwamoto-cho, Chiyoda-ku, Tokyo Name Ikki Co., Ltd. Representative Yoshiaki Fujinaka 4, Agent 103 Address Hidekazu Nihonbashi Hakozaki Residence 6, 32-3-411 Hikitachibana Hakozaki-cho, Chuo-ku, Tokyo Subject of amendment Description 7, Contents of amendment

Claims (4)

[Claims] (1) A primary flow passage that introduces a pressurized gas flow from a gas pressure supply source, a secondary flow passage that communicates with the flow passage, and a flow passage that communicates with both flow passages and whose cross-sectional area is on the outlet side. an ejector unit having a diffuser that gradually expands toward the ejector unit; opening/closing means for opening and closing the diffuser of the ejector unit; having a pump-fed fluid storage section and a gas pressure introduction space, and a pump-fed fluid a pump body equipped with check valves on the suction side and the discharge side, respectively; gas pressure communication means for communicating the secondary flow path of the ejector unit with the gas pressure introduction space of the pump body; A gas pressure driven pump characterized in that the ejector unit applies pump driving gas pressure to the gas pressure introduction space of the pump body by repeating the opening and closing operations of the opening and closing means. (2) The gas pressure driven pump according to claim 1, wherein in the pump body, the gas introduced into the gas pressure introducing space is in direct contact with the pump feeding fluid in the pump feeding fluid storage section. (3) The gas pressure driven pump according to claim 1 or 2, wherein the gas introduced into the gas pressure introduction space of the pump body is air. (3) The gas pressure driven pump according to claim 1 or 2, wherein the gas introduced into the gas pressure introduction space of the pump body is an explosion-proof gas. (4) The gas pressure-driven pump according to claim 1, wherein the opening/closing means includes an electromagnetic opening/closing valve connected to the outlet side of the diffuser, and a timer for supplying an opening/closing drive pulse to the opening/closing valve.