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JPS53108790A - Production of capacity element - Google Patents

Production of capacity element

Info

Publication number
JPS53108790A
JPS53108790A JP2419977A JP2419977A JPS53108790A JP S53108790 A JPS53108790 A JP S53108790A JP 2419977 A JP2419977 A JP 2419977A JP 2419977 A JP2419977 A JP 2419977A JP S53108790 A JPS53108790 A JP S53108790A
Authority
JP
Japan
Prior art keywords
production
film
capacity element
forming
capacities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2419977A
Other languages
Japanese (ja)
Other versions
JPS6032357B2 (en
Inventor
Takashi Osone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP52024199A priority Critical patent/JPS6032357B2/en
Publication of JPS53108790A publication Critical patent/JPS53108790A/en
Publication of JPS6032357B2 publication Critical patent/JPS6032357B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PURPOSE: To produce a multiplicity of capacities of uniform characteristics by forming an insulation film, selectively forming anodic-oxidized films and evaporating a metal film or semiconductor film thereafter removing the insulator film.
COPYRIGHT: (C)1978,JPO&Japio
JP52024199A 1977-03-04 1977-03-04 Manufacturing method of capacitive element Expired JPS6032357B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52024199A JPS6032357B2 (en) 1977-03-04 1977-03-04 Manufacturing method of capacitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52024199A JPS6032357B2 (en) 1977-03-04 1977-03-04 Manufacturing method of capacitive element

Publications (2)

Publication Number Publication Date
JPS53108790A true JPS53108790A (en) 1978-09-21
JPS6032357B2 JPS6032357B2 (en) 1985-07-27

Family

ID=12131642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52024199A Expired JPS6032357B2 (en) 1977-03-04 1977-03-04 Manufacturing method of capacitive element

Country Status (1)

Country Link
JP (1) JPS6032357B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200566A (en) * 1982-04-30 1983-11-22 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Manufacturing method of semiconductor device
JPS5978553A (en) * 1982-10-27 1984-05-07 Hitachi Ltd Capacitor and its manufacturing method
US6992368B2 (en) 2001-01-17 2006-01-31 International Business Machines Corporation Production of metal insulator metal (MIM) structures using anodizing process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200566A (en) * 1982-04-30 1983-11-22 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Manufacturing method of semiconductor device
JPS5978553A (en) * 1982-10-27 1984-05-07 Hitachi Ltd Capacitor and its manufacturing method
US6992368B2 (en) 2001-01-17 2006-01-31 International Business Machines Corporation Production of metal insulator metal (MIM) structures using anodizing process

Also Published As

Publication number Publication date
JPS6032357B2 (en) 1985-07-27

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