JPS5235047Y2 - - Google Patents
Info
- Publication number
- JPS5235047Y2 JPS5235047Y2 JP209672U JP209672U JPS5235047Y2 JP S5235047 Y2 JPS5235047 Y2 JP S5235047Y2 JP 209672 U JP209672 U JP 209672U JP 209672 U JP209672 U JP 209672U JP S5235047 Y2 JPS5235047 Y2 JP S5235047Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP209672U JPS5235047Y2 (en) | 1971-12-30 | 1971-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP209672U JPS5235047Y2 (en) | 1971-12-30 | 1971-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4881904U JPS4881904U (en) | 1973-10-06 |
| JPS5235047Y2 true JPS5235047Y2 (en) | 1977-08-10 |
Family
ID=33091904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP209672U Expired JPS5235047Y2 (en) | 1971-12-30 | 1971-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5235047Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6998014B2 (en) | 2002-01-26 | 2006-02-14 | Applied Materials, Inc. | Apparatus and method for plasma assisted deposition |
-
1971
- 1971-12-30 JP JP209672U patent/JPS5235047Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6998014B2 (en) | 2002-01-26 | 2006-02-14 | Applied Materials, Inc. | Apparatus and method for plasma assisted deposition |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4881904U (en) | 1973-10-06 |