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JPS57144373A - Control valve - Google Patents

Control valve

Info

Publication number
JPS57144373A
JPS57144373A JP2872981A JP2872981A JPS57144373A JP S57144373 A JPS57144373 A JP S57144373A JP 2872981 A JP2872981 A JP 2872981A JP 2872981 A JP2872981 A JP 2872981A JP S57144373 A JPS57144373 A JP S57144373A
Authority
JP
Japan
Prior art keywords
supplied
electromagnetic pump
wave
constitution
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2872981A
Other languages
Japanese (ja)
Other versions
JPS629786B2 (en
Inventor
Kentaro Inoue
Tadashi Kojima
Eiichi Morozumi
Hitoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP2872981A priority Critical patent/JPS57144373A/en
Publication of JPS57144373A publication Critical patent/JPS57144373A/en
Publication of JPS629786B2 publication Critical patent/JPS629786B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0651—One-way valve the fluid passing through the solenoid coil

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

PURPOSE:To enable to hold a valve body at the predetermined position of opening or closing by a constitution wherein a driving signal corresponding to the half-wave of an alternating current can be supplied to an electromagnetic pump only when the output signal of a position detecting means is not supplied. CONSTITUTION:When a responding body 39 is arrived at the predetermined position thereof by the pressure of working fluid sent under pressure by the operation of an electromagnetic pump 33, it is detected by a lead switch 43 and the driving signal supplied to the electromagnetic pump 33 at that time is changed from the signal having a wave form corresponding to the half-wave of the alternating current into the same of a direct current, whereby, the plunger 55 of the electromagnetic pump 33 is stopped. However, a bypass valve 70 is held at the closing position thereof by the direct current supplied from a coil 51, therefore, the responding body 39 is held at the position as it is located.
JP2872981A 1981-02-28 1981-02-28 Control valve Granted JPS57144373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2872981A JPS57144373A (en) 1981-02-28 1981-02-28 Control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2872981A JPS57144373A (en) 1981-02-28 1981-02-28 Control valve

Publications (2)

Publication Number Publication Date
JPS57144373A true JPS57144373A (en) 1982-09-06
JPS629786B2 JPS629786B2 (en) 1987-03-02

Family

ID=12256515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2872981A Granted JPS57144373A (en) 1981-02-28 1981-02-28 Control valve

Country Status (1)

Country Link
JP (1) JPS57144373A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7114404B2 (en) * 2001-08-30 2006-10-03 Micron Technology, Inc. System and method for detecting flow in a mass flow controller

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7114404B2 (en) * 2001-08-30 2006-10-03 Micron Technology, Inc. System and method for detecting flow in a mass flow controller
US7255128B2 (en) 2001-08-30 2007-08-14 Micron Technology, Inc. System and method for detecting flow in a mass flow controller

Also Published As

Publication number Publication date
JPS629786B2 (en) 1987-03-02

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