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JPS5640996B2 - - Google Patents

Info

Publication number
JPS5640996B2
JPS5640996B2 JP7033079A JP7033079A JPS5640996B2 JP S5640996 B2 JPS5640996 B2 JP S5640996B2 JP 7033079 A JP7033079 A JP 7033079A JP 7033079 A JP7033079 A JP 7033079A JP S5640996 B2 JPS5640996 B2 JP S5640996B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7033079A
Other languages
Japanese (ja)
Other versions
JPS55162288A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7033079A priority Critical patent/JPS55162288A/en
Publication of JPS55162288A publication Critical patent/JPS55162288A/en
Publication of JPS5640996B2 publication Critical patent/JPS5640996B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227Buried mesa structure ; Striped active layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2304/00Special growth methods for semiconductor lasers
    • H01S2304/06LPE
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227Buried mesa structure ; Striped active layer
    • H01S5/2275Buried mesa structure ; Striped active layer mesa created by etching

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
  • Weting (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7033079A 1979-06-04 1979-06-04 Manufacture of buried type photosemiconductor device Granted JPS55162288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7033079A JPS55162288A (en) 1979-06-04 1979-06-04 Manufacture of buried type photosemiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7033079A JPS55162288A (en) 1979-06-04 1979-06-04 Manufacture of buried type photosemiconductor device

Publications (2)

Publication Number Publication Date
JPS55162288A JPS55162288A (en) 1980-12-17
JPS5640996B2 true JPS5640996B2 (en) 1981-09-25

Family

ID=13428304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7033079A Granted JPS55162288A (en) 1979-06-04 1979-06-04 Manufacture of buried type photosemiconductor device

Country Status (1)

Country Link
JP (1) JPS55162288A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160351392A1 (en) * 2014-03-11 2016-12-01 Furukawa Electric Co., Ltd. Semiconductor device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662386A (en) * 1979-10-29 1981-05-28 Hitachi Ltd Manufacture of semiconductor device
GB2114808B (en) * 1981-12-01 1985-10-09 Standard Telephones Cables Ltd Semiconductor laser manufacture
GB2115608B (en) * 1982-02-24 1985-10-30 Plessey Co Plc Semi-conductor lasers
JPS63284878A (en) * 1987-04-30 1988-11-22 シーメンス、アクチエンゲゼルシヤフト Method for manufacturing laser diode with buried active layer
KR0141057B1 (en) * 1994-11-19 1998-07-15 이헌조 Semiconductor laser manufacturing method
KR100567346B1 (en) * 2004-03-23 2006-04-04 학교법인 포항공과대학교 Al epispheric epitaxial etchant and method of manufacturing semiconductor device using same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160351392A1 (en) * 2014-03-11 2016-12-01 Furukawa Electric Co., Ltd. Semiconductor device
US9960572B2 (en) * 2014-03-11 2018-05-01 Furukawa Electric Co., Ltd. Semiconductor device

Also Published As

Publication number Publication date
JPS55162288A (en) 1980-12-17

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