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JPS5616806A - Surface roughness measuring unit - Google Patents

Surface roughness measuring unit

Info

Publication number
JPS5616806A
JPS5616806A JP9149679A JP9149679A JPS5616806A JP S5616806 A JPS5616806 A JP S5616806A JP 9149679 A JP9149679 A JP 9149679A JP 9149679 A JP9149679 A JP 9149679A JP S5616806 A JPS5616806 A JP S5616806A
Authority
JP
Japan
Prior art keywords
onto
array
shaped detector
reflection light
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9149679A
Other languages
Japanese (ja)
Other versions
JPS6243482B2 (en
Inventor
Yoshisada Oshida
Hiroshi Makihira
Nobuyuki Akiyama
Yasuo Nakagawa
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9149679A priority Critical patent/JPS5616806A/en
Publication of JPS5616806A publication Critical patent/JPS5616806A/en
Publication of JPS6243482B2 publication Critical patent/JPS6243482B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE: To make it possible to measure minute ruggedness on the surface of an object without contact in a high speed with a high precision, by focusing the reflection light pattern for the projection pattern from the measured object onto an array- shaped detector.
CONSTITUTION: The white light from light source 1 through optical pattern 2 is projected onto the surface of measured object 4 in an optical pattern form and becomes a reflection light corresponding to the optical property of the surface and is focused onto array-shaped detector 60 and is picked up. Meanwhile, the radiant light of semiconductor laser 10 is irradiated onto object 4 from the oblique direction, and the reflection light is incident onto position sensor 62, and rough adjustment for defocusing can be performed by defocusing detection signal IP. Further, the detection signal dependent upon one one-dimensional scanning of array-shaped detector 60 is taken out into read circuit 6 and is processed by contrast detecting circuit 7, and focusing driving circuit 8 is driven to perform fine adjustment. Thus, the focusing operation is performed in a high speed, and high-precision measurement is possible.
COPYRIGHT: (C)1981,JPO&Japio
JP9149679A 1979-07-20 1979-07-20 Surface roughness measuring unit Granted JPS5616806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9149679A JPS5616806A (en) 1979-07-20 1979-07-20 Surface roughness measuring unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9149679A JPS5616806A (en) 1979-07-20 1979-07-20 Surface roughness measuring unit

Publications (2)

Publication Number Publication Date
JPS5616806A true JPS5616806A (en) 1981-02-18
JPS6243482B2 JPS6243482B2 (en) 1987-09-14

Family

ID=14028015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9149679A Granted JPS5616806A (en) 1979-07-20 1979-07-20 Surface roughness measuring unit

Country Status (1)

Country Link
JP (1) JPS5616806A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS5987610U (en) * 1982-12-03 1984-06-13 セイコーインスツルメンツ株式会社 X-ray film thickness meter
US4827301A (en) * 1984-12-11 1989-05-02 Minolta Camera Kabushiki Kaisha Focus detection system and lighting device therefor
JPH01191817A (en) * 1988-01-28 1989-08-01 Mitsutoyo Corp Automatic focusing detection controller
WO2002005005A1 (en) * 2000-07-10 2002-01-17 Zsp Geodätische Systeme Gmbh Autofocussing method for telescopes pertaining to surveying equipment
JP2007171710A (en) * 2005-12-26 2007-07-05 Hitachi Kokusai Electric Inc Focusing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50103366A (en) * 1974-01-14 1975-08-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50103366A (en) * 1974-01-14 1975-08-15

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS5987610U (en) * 1982-12-03 1984-06-13 セイコーインスツルメンツ株式会社 X-ray film thickness meter
US4827301A (en) * 1984-12-11 1989-05-02 Minolta Camera Kabushiki Kaisha Focus detection system and lighting device therefor
JPH01191817A (en) * 1988-01-28 1989-08-01 Mitsutoyo Corp Automatic focusing detection controller
WO2002005005A1 (en) * 2000-07-10 2002-01-17 Zsp Geodätische Systeme Gmbh Autofocussing method for telescopes pertaining to surveying equipment
US6927376B2 (en) 2000-07-10 2005-08-09 Trimble Jena Gmbh Autofocusing method for telescopes pertaining to surveying equipment
JP2007171710A (en) * 2005-12-26 2007-07-05 Hitachi Kokusai Electric Inc Focusing device

Also Published As

Publication number Publication date
JPS6243482B2 (en) 1987-09-14

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