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JPS544061A - Test piece chamber for electronic microscope or the like - Google Patents

Test piece chamber for electronic microscope or the like

Info

Publication number
JPS544061A
JPS544061A JP6796077A JP6796077A JPS544061A JP S544061 A JPS544061 A JP S544061A JP 6796077 A JP6796077 A JP 6796077A JP 6796077 A JP6796077 A JP 6796077A JP S544061 A JPS544061 A JP S544061A
Authority
JP
Japan
Prior art keywords
test piece
electronic microscope
piece chamber
high vacuum
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6796077A
Other languages
Japanese (ja)
Other versions
JPS583585B2 (en
Inventor
Kasumi Shiraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52067960A priority Critical patent/JPS583585B2/en
Publication of JPS544061A publication Critical patent/JPS544061A/en
Publication of JPS583585B2 publication Critical patent/JPS583585B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To keep the ultra high vacuum in the electron gun chamber stably and safely, by placing an exhausting hole and a differential exhausting throttle between an intermediate chamber and lens system leading to super high vacuum electron gum.
COPYRIGHT: (C)1979,JPO&Japio
JP52067960A 1977-06-10 1977-06-10 Sample room for electron microscopes, etc. Expired JPS583585B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52067960A JPS583585B2 (en) 1977-06-10 1977-06-10 Sample room for electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52067960A JPS583585B2 (en) 1977-06-10 1977-06-10 Sample room for electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS544061A true JPS544061A (en) 1979-01-12
JPS583585B2 JPS583585B2 (en) 1983-01-21

Family

ID=13360034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52067960A Expired JPS583585B2 (en) 1977-06-10 1977-06-10 Sample room for electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS583585B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52102277A (en) * 1976-02-20 1977-08-27 Schering Ag 22dimethylcarbamoyliminoo 1*3*44thiadiazolinee33ido derivatives * production thereof and herbicide containing same
JPS60157464A (en) * 1984-01-27 1985-08-17 Furukawa Electric Co Ltd:The Linear material end catching device for winder

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042879U (en) * 1983-09-01 1985-03-26 木下　邦男 Accident prevention device using power windows
JPS60119883A (en) * 1983-11-30 1985-06-27 株式会社城南製作所 Safety apparatus for power window
JPS61194073U (en) * 1985-05-27 1986-12-03

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131267A (en) * 1975-05-10 1976-11-15 Hitachi Ltd The exhaustion system of the electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131267A (en) * 1975-05-10 1976-11-15 Hitachi Ltd The exhaustion system of the electronic microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52102277A (en) * 1976-02-20 1977-08-27 Schering Ag 22dimethylcarbamoyliminoo 1*3*44thiadiazolinee33ido derivatives * production thereof and herbicide containing same
JPS60157464A (en) * 1984-01-27 1985-08-17 Furukawa Electric Co Ltd:The Linear material end catching device for winder

Also Published As

Publication number Publication date
JPS583585B2 (en) 1983-01-21

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