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JPS4940904B1 - - Google Patents

Info

Publication number
JPS4940904B1
JPS4940904B1 JP1232970A JP1232970A JPS4940904B1 JP S4940904 B1 JPS4940904 B1 JP S4940904B1 JP 1232970 A JP1232970 A JP 1232970A JP 1232970 A JP1232970 A JP 1232970A JP S4940904 B1 JPS4940904 B1 JP S4940904B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1232970A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1232970A priority Critical patent/JPS4940904B1/ja
Publication of JPS4940904B1 publication Critical patent/JPS4940904B1/ja
Pending legal-status Critical Current

Links

JP1232970A 1970-02-13 1970-02-13 Pending JPS4940904B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1232970A JPS4940904B1 (en) 1970-02-13 1970-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1232970A JPS4940904B1 (en) 1970-02-13 1970-02-13

Publications (1)

Publication Number Publication Date
JPS4940904B1 true JPS4940904B1 (en) 1974-11-06

Family

ID=11802251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1232970A Pending JPS4940904B1 (en) 1970-02-13 1970-02-13

Country Status (1)

Country Link
JP (1) JPS4940904B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3118883A1 (en) * 2013-03-15 2017-01-18 Nikon Metrology NV Rotary vacuum seal and target assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3118883A1 (en) * 2013-03-15 2017-01-18 Nikon Metrology NV Rotary vacuum seal and target assembly

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