JPH116855A - Tuner for measuring load pull or source pull and its measuring method - Google Patents

Abstract

(57) [Problem] With a conventional load-pull measurement tuner, measurement cannot be performed over a wide range of conditions when the center conductor has a bend or inclination, and the reproducibility of measurement is poor. SOLUTION: A rod-shaped center conductor 26 and a cylindrical ground conductor 27 arranged around the rod-shaped center conductor 26, and a part of the ground conductor 27 along the axial direction is movable in a direction perpendicular to the center conductor 26. This is a load-pull or source-pull measurement tuner composed of a large number of metal pieces 27b. Any combination of metal pieces 27b can be controlled independently, and scaling can be performed at a desired position for measurement, so measurement can be performed over a wide range of conditions even when the center conductor 26 with low accuracy is used. And excellent reproducibility of measurement.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load-pull or source-pull measurement tuner used for load-pull measurement and source-pull measurement as a method for evaluating the characteristics of high-frequency transistors, and a load-pull or source-pull measurement with an improved load measurement range for a second harmonic. The present invention relates to a measuring method using a tuner.

[0002]

2. Description of the Related Art In recent years, measurement or design techniques for microwave semiconductor devices and devices and microwave circuits have been remarkably advanced in the field of microwave technology, and circuit design has been carried out by evaluating the characteristics of microwave semiconductor devices and devices. In order to make effective use of such characteristics, techniques for accurately measuring these characteristics are becoming increasingly important.

Conventionally, as a measurement of electrical characteristics of a high-output device such as a microwave semiconductor device for a high-frequency transistor such as a microwave semiconductor device, a tuner is connected to an input / output terminal of the transistor and the load of the tuner is changed. Therefore, load-pull measurement or source-pull measurement is performed in order to check electrical characteristics such as load dependence and input power dependence of output, efficiency, and distortion characteristics of the high-frequency transistor. FIG. 3 shows a schematic configuration diagram of such a measurement system for load pull measurement.

In FIG. 3, 1 is an input signal source, 2 is an amplifier, 3 is a power meter for measuring input signal power,
4 is a coupler for connecting the power meter 3 to a signal system, 5 is an isolator for preventing reflection and leakage of a signal to the input signal source 1 side, 6 is a bias tee for supplying power to the device under test, 7 is Is a source-pull measurement tuner connected between the signal system and the input terminal of the device under test 8. The input-side impedance (Z _Source , hereinafter referred to as Z _S ) viewed from the device under test 8 is used as a measurement specification. A predetermined value is set accordingly, for example, optimization is performed to obtain high gain and low distortion.

[0005] Reference numeral 8 denotes a device under test (DUT: Device Und).
er Test), for example, GaAs MESFET (Me
tal Semiconductor FET). Reference numeral 9 denotes a load-pull measurement tuner connected between the output terminal of the device under test 8 and the signal system on the output side, whereby the output impedance (Z _Load , Z _Load , (Hereinafter referred to as Z _L )
Is changed in accordance with the specification of the measurement, and the load condition for obtaining the maximum output of the high-frequency transistor as the device under test 8 and the load condition for obtaining the maximum efficiency and low distortion are obtained.

10 is a bias tee for supplying power to the device under test, 11 is a power meter for measuring the output signal power, 12 is a coupler for connecting the power meter 11 to a signal system, and 13 is the frequency of the signal power. It is a spectrum analyzer for analyzing components. Reference numeral 14 controls the source-pull measurement tuner 7 and the load-pull measurement tuner 9 to various positions (impedance) based on data obtained by calibrating RF components used in a measurement system including the tuner body by a network analyzer in advance. Personal computer.

FIG. 4A shows an external perspective view and FIG. 4B shows a cross-sectional view of a conventional example of the load-pull measuring tuner 9 used in the above-described measuring system.

The load-pull measuring tuner 9 shown in FIG.
In the figure, 15 is an elongated cylindrical outer conductor having a U-shaped cross section, and 16 is a rod-shaped center arranged at the center of the outer conductor 15 in parallel with the outer conductor 15 and having the same length as the outer conductor 15. Conductor. FIG. 3A shows a state of the device under test 8 shown in FIG.
Is connected to the ground system of the measurement system, and the center conductor 16 is connected to the signal system of the measurement system, in this case, the signal line from the output terminal of the device under test 8. Thus, the center conductor 16 functions as a distributed constant line regarded as a transmission line having a characteristic impedance Z ₀ = 50Ω.

Reference numeral 17 denotes a movable metal piece, which is electrically connected to the outer conductor 15 and is movably arranged in a direction indicated by an arrow in FIG. FIG. 3A shows a state in which the movable metal piece 17 is arranged on the device under measurement 8 side of the center conductor 16. With the movable metal piece 17 arranged in this way, a predetermined capacitance component determined by the facing area and the facing interval at the position facing the center conductor 16 is obtained, and the capacitance component and the center conductor
The impedance Z _L on the output side of the device under test 8 can be changed to a desired condition according to the specification of the measurement by the transmission line length obtained by the remaining part of the device 16.

FIG. 5A is an equivalent circuit of such a load-pull measurement tuner 9, and FIG. 5B is a Smith chart showing changes in the load condition of Z _{L at} a certain frequency by the load-pull measurement tuner 9. FIG.
FIG. 5C is an example of the load of Z _L shown on the Smith chart similar to FIG. 5B.

In FIG. 5A, reference numeral 19 denotes a transmission line corresponding to the center conductor 16 of the tuner 9 for load pull measurement, and the characteristic impedance Z ₀ of the transmission line 19 is usually set to 50Ω. Reference numeral 20 denotes a capacitance component obtained by the movable metal piece 17, and reference numeral 21 denotes a transmission line length obtained by the transmission line 19 up to a portion where the capacitance component 20 is connected.

In the load pull measurement tuner 9,
By changing the distance d between the movable metal piece 17 having the area S facing the center conductor 16 and the center conductor 16, the capacitance component 20 connected to the transmission line 19 is changed so as to be proportional to the area S facing the area and inversely proportional to the distance d. Can be variable, so that
Capacitance component at a predetermined location with respect to transmission line 19
Perform 20 scaling and measure measurable VSWR (Volt
age Standing Wave Ratio). Also, as shown by the opposing arrow below the capacitance component 20, the movable metal piece
By changing the position of 17, the capacitor component 20 of the transmission line 19
Can be changed, and a phase change can be created by changing the transmission line length 21.

Reference numeral 22 denotes an input impedance of a measurement system connected to the output side of the load-pull measurement tuner 9;
This is also typically 50Ω.

In FIG. 5B, reference numeral 23 denotes a parallel susceptance j by the capacitance component 20 at a certain frequency f.
B (= 2πfC), and 24 is a phase change due to the transmission line length 21. Thus, the capacitance component 20 and C ₁ for example at a frequency f, the transmission line length 21
Is λ / 8 (λ: wavelength), Z _L is a load having the magnitude and phase shown in FIG. 5C.

For example, a capacitance component 20 at a frequency f ₀ of a certain fundamental wave is represented by C1, and a transmission line length 21 is represented by C1.
Assuming that 0.07λ (λ: wavelength), the load Z _{Lf0 at} the frequency f ₀ of the fundamental wave and the load Z _{L at} the frequency 2f ₀ of the second harmonic
_L2f0 is the load shown in FIGS. 9A and _9B , respectively.

[0016]

As shown in the sectional view of FIG. 6A, a conventional load pull measuring tuner 9 is shown.
Then, the movable metal piece is arranged at a desired distance d with respect to the center conductor 16 arranged at a predetermined distance from the outer conductor 15 in parallel with the center thereof.
Since 17 is arranged and scaling is performed according to the position of the movable metal piece 17, the measurement range due to the variable load is determined by the linearity of the center conductor 16 and the parallelism with the outer conductor 15 and the movable metal piece 17.

However, as shown in FIG. 6B, when the linearity of the central conductor 16 is poor and it is bent in the middle, when the movable metal piece 17 is Therefore, it is necessary to increase the minimum value of the distance between the movable metal piece 17 and the center conductor 16 to d ′ as shown in FIG.

Further, as shown in FIG.
If the parallelism is poor and inclined with respect to the outer conductor 15 and the movable metal piece 17, since the movable metal piece 17 is moved right and left at the interval d, it comes into contact with the inclined center conductor 16, Similarly to the above, as shown in FIG.
It is necessary to increase the minimum value of the distance between the center conductor 16 and the center conductor 16 as d ″.

For this reason, it is necessary to set the movable metal piece 17 at a position where the distance between the movable metal piece 17 and the center conductor 16 is the widest, which causes a problem that the measurable VSWR becomes small and the measurement range becomes narrow. was there.

Further, since the movable metal piece 17 is moved both in the horizontal direction and the vertical direction, there is a problem that the reproducibility of the measurement becomes poor when the measurement is repeatedly performed under various conditions.

Further, in the above-described load-pull or source-pull measuring tuner, the load for the frequency of the second harmonic is fixed with respect to the load for the frequency of a certain fundamental wave. Therefore, to realize further low distortion and high efficiency, it is necessary to optimize the load of the second harmonic. On the other hand, it is necessary to change the load of the second harmonic while keeping the load of the fundamental wave fixed. However, there is a problem that the load of the second harmonic cannot be optimized.

The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to enable measurement under a wide range of conditions even when the center conductor has a bend or inclination, and to provide a measurement reproducibility. Another object of the present invention is to provide an excellent load pull or source pull measurement tuner.

It is another object of the present invention to provide a method of measuring a load-pull or source-pull tuner in which the load on the second harmonic is improved while the load on the fundamental is fixed while the load on the second harmonic is improved. It is in.

[0024]

A load-pull or source-pull measuring tuner of the present invention is a load-pull or source-pull measuring tuner which is connected to the input side or output side of a high-frequency transistor and evaluates the electrical characteristics of the high-frequency transistor. There is a rod-shaped center conductor, and a cylindrical ground conductor disposed around the center conductor, and a part of the ground conductor along the axial direction is movable in a direction perpendicular to the center conductor. It is characterized by being constituted by a large number of metal pieces.

Further, in the measuring method using the load-pull or source-pull measuring tuner of the present invention, the tuner for measuring load-pull or source-pull having the above-described configuration may be used to connect two sets of metal pieces separated from each other to the central conductor. The load on the second harmonic wave is changed while the load on the fundamental wave is fixed by bringing them close to each other.

According to the tuner for load pull or source pull measurement of the present invention, the tuner includes the central conductor through which the high-frequency electric signal propagates and the cylindrical ground conductor disposed around the central conductor, and extends along the axial direction of the ground conductor. Part is composed of a number of metal pieces movable vertically to the center conductor, and by moving these many pieces of metal in a direction perpendicular to the center conductor, Since a variable capacitance is formed between the two, it is possible to arbitrarily combine and control these multiple metal pieces arbitrarily and to perform scaling and measurement at a desired position. Compared to the case where the distance between the center conductor and the movable metal piece must be adjusted to the widest position as in the case of a tuner, the contact between the metal piece of the ground conductor and the center conductor is prevented. The distance between the metal piece and the center conductor can be set narrower.As a result, even if the center conductor has a bend or tilt, the variable range of the capacitance can be widened and the measurement range can be widened. This is a tuner for load-pull or source-pull measurement that is capable of measuring the temperature and is excellent in the reproducibility of the measurement.

Further, according to the measuring method using the load-pull or source-pull measuring tuner of the present invention, two sets of metal pieces, which are separated from each other, are brought close to the center conductor among a large number of metal pieces. Even with the load fixed, the load for the second harmonic can be made variable by a large number of combinations of the two sets of metal pieces.
It is possible to change the load on the second harmonic while fixing the load on the fundamental wave.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a tuner for measuring a load pull or a source pull according to the present invention will be described with reference to the accompanying drawings. The present invention is not limited to the following examples, and various changes and improvements can be made without departing from the scope of the present invention.

FIG. 1 is an external perspective view showing an example of an embodiment of a load pull or source pull measuring tuner of the present invention.

In the load-pull or source-pull measurement tuner 25 shown in FIG. 1, reference numeral 26 denotes a rod-shaped center conductor, 27 denotes a cylindrical ground conductor disposed around the center conductor 26, and this ground conductor 27 An elongated cylindrical outer conductor 27a having a U-shaped cross section, and a number of movable members arranged in a part along the axial direction corresponding to the opening of the main body portion 27a and movable in the vertical direction with respect to the center conductor 26. It is composed of two metal pieces 27b. The outer conductor 27a is arranged parallel to the center conductor 26, and the length of the outer conductor 27a and the length of the metal piece 27b are substantially equal to the length of the center conductor 26. The outer conductor 27a of the ground conductor 27 may have a U-shaped or circular cross section.

FIG. 1 shows a state viewed from the output terminal side of the device under test 8 in FIG. 3 as in FIG. 4 (a). The external conductor 27a is connected to the ground system of the measuring system,
26 is a signal system of a measurement system, in this case, connected to a signal line from an output terminal of the device under test 8. As a result, the center conductor 26 functions as a distributed constant line regarded as a transmission line having a characteristic impedance Z ₀ = 50Ω.

A large number of metal pieces 27b arranged so as to constitute a part of the cylindrical ground conductor 27 in the axial direction are connected to the outer conductor 27.
a while being electrically connected to a and being movable in the direction indicated by the arrow in FIG. The figure shows a state in which a large number of metal pieces 27b are arranged at the same interval with respect to the center conductor 26.

A large number of metal pieces 27b thus arranged
According to the above, these can be arbitrarily combined and independently controlled, and scaling can be performed at a desired position with respect to the center conductor 26, whereby the metal piece 27 b arbitrarily combined with the center conductor 26 A predetermined capacitance component determined by the opposing area and the opposing interval is obtained at a position opposing the device, and the capacitance component and the transmission line obtained by the remaining portion of the center conductor 26 allow the output side of the device under test 8 to be obtained. The impedance Z _L can be changed to a desired condition according to the specification of the measurement.

FIGS. 2A to 2D are cross-sectional views showing an example of the arrangement of a large number of metal pieces 27b in the tuner 25 for measuring source pull or load pull shown in FIG. 1. In these figures, reference numeral 26 denotes a center. A conductor, 27a is an outer conductor, 27b is a number of metal pieces, and d represents a desired distance between the center conductor 26 and the metal piece 27b.

FIG. 2 (a) shows a case in which one piece of a large number of metal pieces 27b is desired with respect to a center conductor 26 arranged at a predetermined distance from an outer conductor 27a and parallel to the center thereof as shown in FIG. In this case, the impedance Z _L is a predetermined value determined by the facing area and facing distance at a position facing the center conductor 26 by one of the plurality of metal pieces 27b arranged in this manner. Is obtained, and the impedance Z _L on the output side of the device under test is adjusted to a desired condition in accordance with the measurement specifications by the capacitance component and the transmission line length obtained by the remaining portion of the center conductor 26. It can be changed.

FIG. 2B shows an example of an arrangement in which the center conductor 26 has poor linearity and is bent in the middle. According to the tuner 25 for measuring source pull or load pull of the present invention, a large number of metal pieces are used. Each of the metal pieces 27b can be independently arranged at a distance d so as to correspond to the bent portion of the center conductor 26, and the metal piece 27b can be set at a desired distance d without contacting the center conductor 26. As shown in ()), it is not necessary to increase the minimum value of the distance between the movable metal piece 17 and the center conductor 16 as in d ′.

FIG. 2 (c) shows an example of an arrangement in which the center conductor 26 has poor parallelism and is inclined with respect to the external conductor 27b. According to the tuner 25 for measuring source pull or load pull of the present invention, a large number is shown. Each of the metal pieces 27b is separated by a distance d.
6 can be independently set corresponding to the inclination of the center conductor 26, and the metal piece 27b can be set to a desired distance d without contacting the inclined center conductor 26.
As shown in (e), it is not necessary to increase the minimum value of the distance between the movable metal piece 17 and the center conductor 16 to d ″.

FIG. 2D shows a large number of metal pieces 27b.
Are arranged at a desired interval d with respect to the center conductor 26. In this case, the impedance Z _L
With a given combination of a large number of metal pieces 27b arranged in this way, a predetermined capacitance component determined by the facing area and facing distance at the position facing the central conductor 26 is obtained, and the capacitance component and by a transmission line length obtained by the remaining portion of the central conductor 26, and thus it can be changed to desired conditions according to the specifications of the measuring impedance Z _L of the output side of the device under test.

As described above, according to the tuner 25 for measuring source pull or load pull of the present invention, a large number of metal pieces 27 are provided.
Since any combination of b can be independently arranged, the facing area S can be changed according to the area of the combination of the many metal pieces 27b, and it becomes possible to set various load conditions. .

Therefore, according to the tuner 25 for measuring a source pull or a load pull of the present invention, a large number of metal pieces can be set at an arbitrary position at a desired interval with respect to the center conductor. Can be increased, and the measurement range can be widened.

Further, since each of the large number of metal pieces 27b is movable at a fixed position in the horizontal direction and only in the vertical direction, the reproducibility of the set position of the metal piece 27b is high, and various conditions can be set. When the measurement is repeated, the reproducibility of the measurement can be improved.

As described above, according to the tuner 25 for measuring source pull or load pull of the present invention, the scaling of the variable capacitance value C can be performed independently for each of the plurality of metal pieces 27b. There is also an advantage that the influence of the parallelism and the parallelism is reduced, so that it is not necessary to manufacture the center conductor 26 with high accuracy.

If the surface of the metal piece 27b facing the center conductor 26 is set to have the same curvature as that of the center conductor 26, the facing area between them can be effectively secured, and the distance between them can be made substantially uniform. This is preferable because a stable capacitance component can be obtained close to the state. Also,
The thickness of each metal piece 27b may be set in accordance with a desired transmission line change amount (phase rotation change amount) in accordance with the measurement specifications.

The equivalent circuit of the source-pull or load-pull measuring tuner 25 of the present invention is the same as that shown in FIG. 5A, and the load-pull measuring tuner 9 is replaced by the source-pull or load-pull measuring tuner 25 in FIG. , 19 to a transmission line corresponding to the central conductor 26 of the source pull or load pull measurement tuner 25, 20 to a capacitance component obtained by a large number of metal pieces 27b, 21 to
Is the transmission line length obtained by the transmission line 19 up to the portion where the capacitance component 20 is connected. In the tuner 25 for measuring source pull or load pull of the present invention, the characteristic impedance Z _{0 of the} transmission line 19 is also used.
Is usually set to 50Ω.

Also, according to the tuner 25 for measuring source pull or load pull of the present invention, the change of the parallel susceptance jB (= 2πfC) is the same as that shown in FIG. Assuming that the capacitance component 20 at a certain frequency f obtained by the above is C ₁ and the transmission line length 21 is λ / 8 (λ: wavelength), Z _L
Is a load as shown in FIG.

In a normal load-pull or source-pull measuring tuner, when the load (Z _Lf0 ) for the fundamental wave is set to a certain value at the time of measurement, the capacitance component and the transmission line each become one due to the center conductor and the movable metal piece.
Each stage has a single-stage configuration, and the combination is one, so that the load for the second harmonic is fixed. On the other hand, according to the load-pull or source-pull measuring tuner 25 of the present invention, by bringing two sets of metal pieces separated from each other out of a large number of metal pieces 27b close to the center conductor 26, the capacitance component and the transmission line are reduced. Have a two-stage configuration of two each, and the combination is an intermediate load (Z
_{Depending on} how to take _mf0 ), innumerable combinations are possible, so that the load of the second harmonic (Z _L2f0 ) can be changed.

That is, according to the load-pull or source-pull measuring tuner 25 of the present invention, as shown in FIG. 2A, an equivalent circuit when one of the many metal pieces 27b is brought close to the center conductor 26 is obtained. As described above, this is the same as that shown in FIG. 5 (a). In FIG. 5, the load-pull measuring tuner 9 is a source-pull or load-pull measuring tuner 25, and 19 is a central conductor 26 of the load-pull or source-pull measuring tuner 25. In the corresponding transmission line, 20 is the capacitance component obtained by a part of the metal pieces 27c among the many metal pieces 27b, and 21 is the transmission line obtained by the transmission line 19 up to the portion where the capacitance component 20 is connected. It will be long. In the tuner 25 for measuring load pull or source pull of the present invention, the characteristic impedance Z ₀ of the transmission line 19 is usually set to 50Ω.

For example, a capacitance component 20 at a frequency f ₀ of a certain fundamental wave is represented by C1, and a transmission line length 21
Is 0.07λ (λ: wavelength), the load Z _{Lf0 at} the frequency f ₀ of the fundamental wave and the load Z at the frequency 2f ₀ of the second harmonic
_L2f0 is the load shown in FIGS. 9A and _9B , respectively.

On the other hand, as shown in FIG. 7 in a sectional view similar to FIG.
By bringing the set of metal pieces 27c and 27d close to the center conductor, the equivalent circuit of the load-pull or source-pull measuring tuner 25 of the present invention in this case has a two-stage configuration as shown in FIG. Alternatively, in the source pull measurement tuner 25, reference numeral 19 denotes a transmission line corresponding to the center conductor 26, and reference numeral 20a denotes a part of a plurality of metal pieces 27b.
In the capacitance component obtained by 27c, 20b is added to the capacitance component obtained by another metal piece 27d separated from some metal pieces 27c, and 21a is added to the capacitance component 20a. And the transmission line length obtained by the transmission line 19 between the portion to which the capacitance component 20b is connected and the transmission line 19 to the portion to which the capacitance component 20b is connected.
And the transmission line length obtained by In the tuner 25 for measuring load pull or source pull according to the present invention, the characteristic impedance Z ₀ of the transmission line 19 is usually 50
Set to Ω.

For example, when the load Z _Lf0 at the frequency f ₀ of a certain fundamental wave is adjusted to be the same as that of FIG. 2A, the capacitance component 20a is C1, the capacitance component 20b is C2, and the transmission line length 21a is L1. , Transmission line length
_Assuming that 21a is L2, the load Z _{Lf0 at} the fundamental wave frequency f _{0 and} the load Z _{L2f0 at} the second harmonic frequency 2f ₀ are the loads shown in FIGS. _{9C and 9D} , respectively.

As described above, according to the load-pull or source-pull measuring tuner 25 of the present invention, in the measuring method, the load on the fundamental wave and the load on the second harmonic are controlled by the combination of the plurality of movable metal pieces and the plurality of transmission lines. As a result, even when the load on the fundamental wave is fixed, the load on the second harmonic can be changed.

The two sets of metal pieces 27c and
In the case where 27d is brought close to the center conductor 26, the two metal pieces 27c and 27d are each one as shown in FIG. 7 if at least one metal piece is interposed therebetween. May be used, or a plurality of metal pieces may be used, and may be set in combination as appropriate according to a desired load.

Further, in addition to the two sets of metal pieces 27c and 27d which are separated from each other, by further using another set of metal pieces, the load on the fundamental wave and the second harmonic can be finely adjusted. Can be.

[0054]

As described above, according to the tuner for measuring source pull or load pull of the present invention, the tuner comprises a rod-shaped center conductor for transmitting high-frequency electric signals and a cylindrical ground conductor disposed around the center conductor. A part of the ground conductor along the axial direction is composed of a number of metal pieces movable in a direction perpendicular to the center conductor, and by moving these many pieces of metal in a direction perpendicular to the center conductor. Because a variable capacitance is formed between the center conductor and the ground conductor,
These multiple metal pieces can be arbitrarily combined and controlled independently, and can be scaled and measured at a desired position, so that the distance between the center conductor and the movable metal piece is different from that of a conventional tuner. The distance between the metal piece and the center conductor can be set smaller while preventing contact between the metal piece and the center conductor of the ground conductor, compared to the case where the Even if the center conductor has a bend or inclination, the measurement range can be widened by widening the variable range of capacitance, enabling measurement under a wide range of conditions, and load-pull or source-pull measurement with excellent measurement reproducibility. Tuners could be provided.

In scaling, since a large number of metal pieces are moved only in the direction perpendicular to the center conductor, the reproducibility of measurement can be improved.

Further, a wide range of measurement can be performed without producing a high-precision center conductor.

Further, according to the load-pull or source-pull measuring tuner of the present invention, in the measuring method, the fundamental wave can be reduced by a single-stage configuration of a combination of one movable metal piece and one transmission line like a conventional tuner. Compared to the case where the load and the load for the second harmonic are fixed to a set of values, the load for the fundamental wave and the two
A load for the harmonic can be configured, and as a result, the load for the second harmonic can be changed even when the load for the fundamental is fixed.

As described above, according to the present invention, there is provided a load-pull or source-pull measuring tuner capable of performing measurement under a wide range of conditions even when the center conductor has a bend or inclination, and having excellent measurement reproducibility. I was able to.

Further, according to the present invention, there is provided a method of measuring a load-pull or source-pull measurement tuner in which the load on the second harmonic is improved while the load on the second harmonic is variable while the load on the fundamental wave is fixed. I was able to.

[Brief description of the drawings]

FIG. 1 is an external perspective view showing an example of an embodiment of a load pull or source pull measurement tuner of the present invention.

FIGS. 2A to 2D are cross-sectional views each showing an example of the arrangement of a large number of metal pieces in a load-pull or source-pull measurement tuner of the present invention.

FIG. 3 is a schematic configuration diagram of a measurement system for load pull or source pull measurement.

FIG. 4A is an external perspective view of a conventional load-pull measurement tuner, and FIG. 4B is a cross-sectional view thereof.

5 (a) is an equivalent circuit diagram of a load-pull or source-pull measurement tuner, FIG. 5 (b) is a diagram showing a change in the load condition of Z _{L at} a certain frequency by the load-pull or source-pull measurement tuner on a Smith chart, and FIG. () Is an example of the load of Z _L shown on the Smith chart similar to (b).

FIGS. 6A to 6E are cross-sectional views each showing a positional relationship between a center conductor and a movable metal piece in a conventional load-pull measurement tuner.

FIG. 7 is a cross-sectional view showing an example of the arrangement of a large number of metal pieces in the load pull or source pull measurement tuner of the present invention.

8 is an equivalent circuit diagram for the arrangement example of FIG. 7 of the load pull or source pull measurement tuner of the present invention.

FIGS. 9 (a) and 9 (b) are diagrams showing a load Z _Lf0 at a certain fundamental frequency f ₀ by a conventional load-pull or source-pull measurement tuner on a Smith chart, and a diagram at a second harmonic frequency 2f ₀ . Load Z
FIG. 4 is a diagram showing _L2f0 displayed on a Smith chart. (C) and (d) are figures and 2 by load-pull or Sosupuru measurement tuner of the present invention, respectively, displaying the load Z _Lf0 at a fundamental frequency f ₀ in the Smith chart
The load Z _L2f0 at the frequency 2f ₀ of the frequency doubled diagrams displayed on the Smith chart.

[Explanation of symbols]

25 Tuner for measuring load-pull or source-pull 26 Central conductor 27 Ground conductor 27a External conductor 27b Metal pieces 27c, 27d Metal pieces (Two sets of metal pieces separated from each other)

Claims (2)

[Claims] 1. A load-pull or source-pull measuring tuner which is connected to an input side or an output side of a high-frequency transistor and evaluates electrical characteristics of the high-frequency transistor, comprising: a rod-shaped center conductor; And a part along the axial direction of the ground conductor is constituted by a plurality of metal pieces movable in a direction perpendicular to the center conductor. Tuner for load pull or source pull measurement. 2. A load for a fundamental wave is fixed by bringing two sets of metal pieces separated from each other out of the plurality of metal pieces close to the center conductor by the tuner for load pull or source pull measurement according to claim 1. A method for measuring a load-pull or source-pull tuner, wherein the load on the second harmonic is changed while changing the load.