JPH11334066A - Ink jet recording head and method of manufacturing the same - Google Patents

Abstract

(57) Abstract: The present invention relates to an ink jet recording head capable of performing high-definition and high-speed recording by reducing the size and density of a piezo element and increasing the resolution of a piezo displacement amount. It is an object of the present invention to provide a manufacturing method thereof. SOLUTION: An orifice plate 10 is provided with a quantitative orifice 12a for quantitatively measuring ink and a discharge orifice 12b for discharging a diluting liquid with an outlet portion adjacent thereto, and communicates with the quantitative orifice 12a and the discharge orifice 12b. Thus, an ink cavity 14a and a diluent cavity 14b are formed. A vibrating plate 18 made of an organic resin such as PI is formed on the orifice plate 10, and a single-plate type piezo element 20a for quantitative measurement is further provided on the vibrating plate 18 corresponding to the ink cavity 14a and the diluent cavity 14b. Further, the single-plate type piezo element 20b for ejection is directly formed without interposing an adhesive.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an ink jet recording head and a method for manufacturing the same.

[0002]

2. Description of the Related Art A conventional so-called on-demand type ink jet recording apparatus is used for a printer which discharges ink droplets from an orifice in accordance with a recording signal and records the recording on a recording medium such as paper or film. In recent years, since it is possible to reduce the cost, it is rapidly spreading. Various types of this on-demand type ink jet recording apparatus have been proposed. For example, a piezo element (piezo element)
A device that generates a pressure change in the liquid flow path by deformation of a device (piezoelectric element) and discharges fine droplets, and a device that further provides a pair of electrodes and deflects and discharges fine droplets by using such a device are known. Have been. Further, there is also an example in which bubbles are generated by rapidly generating heat from a heating element disposed in a liquid flow path, and fine droplets are discharged from a discharge orifice by the generation of the bubbles.

In recent years, especially in offices,
2. Description of the Related Art Document creation using a computer called desktop publishing has been actively performed, and recently, there has been an increasing demand to output not only characters and figures but also color natural images such as photographs together with characters and figures. In order to print such a high-quality natural image, it is important to reproduce halftones. In order to reproduce such a halftone, the gradation or the gradation is expressed by changing the diameter of the print dot by changing the voltage or pulse width applied to the piezo element or the heating element and controlling the size of the droplet to be ejected, For example, there is a type in which one pixel is constituted by a matrix composed of, for example, 4 × 4 dots without changing the dot diameter, and gradation is expressed in a matrix unit using a so-called dither method.

In an ink jet recording apparatus of the type in which minute droplets are ejected by the above-mentioned piezo element, a single-plate type piezo element called a Kaiser type, which is named a piezo element, is called a laminated piezo element. There is. The former stacked piezo element is excellent in frequency characteristics, maximum output, and the like, but has a disadvantage of being expensive.
On the other hand, the latter single-plate type piezo element called a Kaiser type has an advantage that the price can be reduced although the frequency characteristics and the maximum output are both inferior to the laminated piezo element.

[0005] Various manufacturing methods have been conventionally studied for the ink jet recording head using the single-plate type piezo element. Hereinafter, some of them will be exemplified.

(1) A single-plate piezo element manufactured by forming electrodes on both sides of a baked single-plate piezo is adhered to a diaphragm, and further divided by dicing into single-plate piezo elements corresponding to each cavity. Is the way. This manufacturing method will be described in more detail as follows.

First, a single-plate piezo having a size such that the vibration plate can be covered with one sheet, for example, a single-plate piezo used for a piezoelectric buzzer or the like is fired. Then, after a ground electrode and an upper electrode are formed on both surfaces of the single-plate piezo by Au (gold) evaporation or the like, a polarization process is performed to obtain piezoelectricity. Thus, a single-plate piezo element having a size corresponding to the diaphragm is manufactured.

Subsequently, the single-plate type piezo element is bonded to the diaphragm. For this bonding, an exfoliated adhesive is mainly used and cured at a temperature of 80 ° C. to 100 ° C. for about 30 minutes. Subsequently, the single-plate type piezo element bonded to the diaphragm via an adhesive is subjected to dicing using a processing machine generally called a dicer or a dicing machine. That is, a single-plate piezo element having a size corresponding to the diaphragm is cut at a predetermined pitch and separated into single-plate piezo elements having a size corresponding to each cavity.

The single-plate type piezo element formed in a portion where no cavity exists is generally left as it is without taking time and effort to peel off from the diaphragm.

(2) In this method, a single-plate piezo corresponding to each cavity is patterned by a printing method, followed by firing and polarization. This manufacturing method will be described in more detail as follows.

First, raw material powders such as PbO, ZrO ₂ , TiO ₂ in the case of PZT according to a predetermined composition formula
The raw material powders such as ₂ are prepared, and the prepared raw material powder is used to prevent the occurrence of deformation, cracking, etc. during the main firing.
Preliminary firing is performed at a temperature of 750 ° C to 950 ° C.

Subsequently, the pre-baked product is pulverized into a fine powder and mixed with a binder, and then, using a printing technique, the respective cavities corresponding to the cavities are formed on the diaphragm on which the ground electrode is formed. Pattern to size. Then, after performing patterning by this printing method, 1000 ° C. to 1 ° C.
The main firing is performed at a high temperature of 300 ° C. Thus,
A single-plate piezo corresponding to each cavity is formed on the diaphragm via a ground electrode.

Subsequently, after an upper electrode is formed on each of the single-plate piezos corresponding to each of the cavities, a polarization process is performed to form a single-plate piezo element. This polarization treatment is performed in an atmosphere at a temperature of 60 ° C to 120 ° C.
An electric field of ５5 kV / mm is applied. The time is at most about 30 minutes.

(3) This is a method in which a single-plate type piezo element having a size corresponding to each cavity is manufactured, and these single-plate type piezo elements are bonded to the diaphragm in correspondence with each cavity. This manufacturing method will be described in more detail as follows. In the same manner as in the above (1), the single-plate piezo is baked, a ground electrode and an upper electrode are formed on both surfaces of the single-plate piezo, and then a polarization process is performed to produce a single-plate piezo element. . Then, the single-plate type piezo element is cut into a size corresponding to each cavity. Subsequently, a single-plate type piezo element having a size corresponding to each cavity is bonded to a predetermined position on the vibration plate using an adhesive in the same manner as in the above (1).

[0015]

In the current recording technology, high definition and high speed are strongly required, and in accordance with this requirement, the size of the orifice of the ink jet recording head becomes minute and the orifice density becomes high. Orifices are being developed. In particular, in a carrier jet type ink jet recording head, since it is necessary to form a quantitative orifice in addition to the ejection orifice, further higher density is required. In addition, increasing the density of the orifice means increasing the density of the cavities, so that the dimensions allowed for the piezo elements corresponding to each cavity are reduced, and the piezo elements are inevitably reduced in size and increased in size. It is necessary to arrange the density.

From this point of view, of the above-mentioned conventional methods for manufacturing an ink jet recording head using a single-plate type piezo element, the manufacturing method shown in the above (3) involves processing the single-plate type piezo element to a smaller size. In addition, a complicated operation of bonding them to precise positions is required, and it is practically difficult to increase the orifice density. Therefore, this method was often used in early ink jet recording heads, but has recently become almost unused.

In the manufacturing method shown in the above (1), it is possible to reduce the size of the piezo element by setting the orifice pitch to 340 μm or less, but the bonding is performed in the same manner as in the manufacturing method shown in the above (3). Since a process is required, the variation in the amount of piezo displacement of the piezo element due to the variation in adhesion appears as a variation in density particularly in a carrier jet type ink jet recording head, which is a very serious problem. In addition to this, the thickness of the adhesive layer substantially increases the thickness of the diaphragm, which results in an increase in its rigidity, which cannot be ignored when speeding up in the future. In addition, since the piezo element contains harmful lead, there is a problem that a structure in which an unnecessary piezo element remains on the diaphragm is not preferable from the viewpoint of environmental protection, which has been regarded as important recently. is there.

In the manufacturing method shown in (2), the piezo element can be made smaller by narrowing the orifice pitch, as in the case of the manufacturing method shown in (1). After patterning of single-plate piezo by printing method,
It needs to be fired and polarized. In order to perform the firing / polarizing treatment, it is necessary to burn (remove) the organic binder at, for example, a temperature of 400 ° C. for 10 to 20 hours. After that, the sintering temperature must be raised to 1000 ° C. to 1300 ° C. for sintering. For this reason, as a material of the diaphragm, let alone a resin material resistant to high temperature represented by PI (polyimide) or the like, a material made of Ni (nickel) or SUS is used.
There is a problem that even a diaphragm made of (stainless steel) cannot be used in the above-described cooling process.

Actually, there seems to be an example in which the printing method is used by devising the composition of the single-plate piezo so as to enable a process with a lower firing temperature. The output is smaller than that of the laminated piezo element, and there is a problem that a diaphragm using a metal material having high rigidity inevitably reduces the displacement. Also here, especially when used for driving on the fixed amount side in the ink jet recording head of the carrier jet system, the diaphragm made of a metal material in which the change amount of the piezo displacement with respect to the voltage change applied to the single-plate type piezo element becomes small, This is very disadvantageous for realizing high gradation.

As described above, recording by the ink jet recording head must correspond to high definition and high speed, and high density of the orifice and miniaturization of the ink path including the cavity can be avoided. Absent. Increasing the density of the cavity leads to downsizing and increasing the density of the single-plate piezo element, and it is necessary to manufacture small single-plate piezo elements with high accuracy without variation. Further, a high resolution is required so that a predetermined piezo displacement can be obtained with high reproducibility for a predetermined voltage. In particular, in a carrier jet type ink jet recording head, since the in-dot gradation by mixing two liquids is characterized, the variation in the amount of piezo displacement becomes the variation in the density.
This need is acute.

Therefore, the present invention has been made in view of the above circumstances, and has been made to achieve high-definition and high-speed recording by reducing the size and density of a piezo element and increasing the resolution of a piezo displacement amount. It is an object of the present invention to provide an ink jet recording head capable of performing the above-mentioned and a method for manufacturing the same.

[0022]

The above object is achieved by the following ink jet recording head and a method of manufacturing the same according to the present invention. That is, the ink jet recording head according to claim 1 includes an ejection orifice formed in an orifice plate, a cavity communicating with the ejection orifice, a piezo element corresponding to the cavity, and an output of the piezo element in an ink in the cavity. And a diaphragm for transmitting ink to an object to be printed by discharging ink from a discharge orifice, wherein a piezo element is formed directly on the diaphragm.

Here, the term "piezo element" refers to an element in which electrodes are formed on both surfaces of a single-plate piezo so that piezoelectricity can be obtained. Further, "the piezo element is formed directly on the diaphragm" means that the piezo element is formed directly on the diaphragm without interposing, for example, an adhesive. This applies to the ink jet recording head according to each of the following claims.

As described above, in the ink jet recording head according to the first aspect, the piezo element in the ink jet recording head that discharges ink from the discharge orifice is formed directly on the vibration plate, and no adhesive is interposed therebetween. As a result, compared with the case where the piezo element is adhered to the diaphragm with an adhesive as in the conventional case, the thickness of the adhesive layer substantially increases the thickness of the diaphragm, resulting in increasing the rigidity thereof. Therefore, driving in a high-frequency region becomes possible, and high-speed inkjet recording is achieved.

According to a second aspect of the present invention, there is provided an ink jet recording head comprising: a discharge orifice and a fixed amount orifice formed in an orifice plate; first and second cavities respectively communicating with the discharge orifice and the fixed amount orifice; A piezo element corresponding to the first and second cavities; and a diaphragm for transmitting the output of these piezo elements to ink or a diluent in the first and second cavities. An ink jet recording head for discharging a mixed liquid with a liquid and flying the liquid onto an object to be printed, wherein a piezo element is formed directly on a diaphragm.

As described above, in the ink jet recording head according to the second aspect, the piezo element in the ink jet recording head for discharging the mixed liquid of the ink and the diluting liquid from the discharge orifice is formed directly on the diaphragm and adhered therebetween. As compared with the conventional case where the piezo element is adhered on the diaphragm by an adhesive due to the absence of the agent, the driving in the high frequency region is performed in the same manner as in the case of the ink jet recording head according to claim 1. And speeding up of inkjet recording is achieved. In addition to this, variations in the amount of piezo displacement caused by variations in adhesion are eliminated, and variations in density are prevented, so that the resolution of density is increased and higher definition of ink jet recording is achieved.

According to a third aspect of the present invention, there is provided an ink jet recording head according to the first or second aspect, wherein the diaphragm is made of an organic material. As compared with the case of, since the rigidity of the diaphragm becomes smaller, the amount of piezo displacement of the piezo element becomes larger, so that low power consumption is realized, and the resolution of the amount of piezo displacement of the piezo element becomes higher. The resolution of the density is increased, and higher definition of the ink jet recording is achieved.

In the ink jet recording head for discharging a mixed liquid of ink and diluent from the discharge orifice according to the second aspect of the present invention, the diluent is held in the first cavity communicating with the discharge orifice, and the fixed orifice is formed. Ink is held in the communicating second cavity, and after quantifying the ink from the quantitative orifice, a diluting liquid is discharged from the discharge orifice to fly a mixed liquid of the ink and the diluting liquid onto the printing target ( Normal,
In addition to a carrier jet type ink jet recording head), ink is held in a first cavity communicating with a discharge orifice, and a diluent is held in the second cavity communicating with a quantitative orifice. There is an ink jet recording head of a system in which the ink is ejected from an ejection orifice and a mixed liquid of the ink and the diluting liquid is ejected to an object to be printed after quantifying the amount. In the former method,
The latter method is excellent in the expressiveness of light-colored dots, and the latter method has an advantage that a sufficient ink density can be obtained for the shadow portion.

According to a sixth aspect of the present invention, there is provided a method of manufacturing an ink jet recording head, comprising: an ejection orifice formed in an orifice plate; a cavity communicating with the ejection orifice; a piezo element corresponding to the cavity; A diaphragm for transmitting an output to the ink in the cavity, and a method for manufacturing an ink jet recording head for discharging ink from a discharge orifice and flying it to an object to be printed, wherein the first electrode is provided on the vibration plate via a first electrode. After forming a single-plate piezo by ultra-fine particle deposition, a second electrode is formed on the single-plate piezo.

Thus, in the method of manufacturing an ink jet recording head according to the sixth aspect, when manufacturing an ink jet recording head for discharging ink from a discharge orifice, ultrafine particles are deposited on the diaphragm via the first electrode. By forming a single-plate piezo by the method and forming a second electrode thereon, the piezo element having the first and second electrodes formed on both surfaces of the single-plate piezo respectively has an adhesive on the diaphragm. Since it is formed directly without using it, the thickness of the adhesive layer is substantially increased and the rigidity of the diaphragm is increased compared to the conventional case where the piezo element is adhered to the diaphragm with an adhesive. Can be driven easily in a high frequency range, and an ink jet recording head that can achieve high speed ink jet recording can be easily manufactured. It is.

According to a seventh aspect of the present invention, there is provided a method for manufacturing an ink jet recording head, comprising: a discharge orifice and a fixed amount orifice formed in an orifice plate; and first and second cavities respectively communicating with the discharge orifice and the fixed amount orifice. A piezo element corresponding to the first and second cavities, and a diaphragm for transmitting the output of the piezo element to ink or diluent in the first and second cavities. A method of manufacturing an ink jet recording head that discharges a mixed liquid of ink and a diluting liquid and jets the mixed liquid to an object to be printed, after forming a single-plate piezo on a vibration plate through a first electrode by an ultrafine particle deposition method. The second electrode is formed on the single-plate piezo.

Thus, in the method of manufacturing an ink jet recording head according to the seventh aspect, when manufacturing an ink jet recording head for discharging a mixture of ink and a diluting liquid from a discharge orifice, the first liquid is placed on the diaphragm. A single-plate piezo is formed by an ultra-fine particle deposition method via an electrode, and a second electrode is formed thereon, whereby a piezo element having first and second electrodes formed on both surfaces of the single-plate piezo, respectively. 7. The method for manufacturing an ink jet recording head according to claim 6, wherein the piezo element is formed directly on the diaphragm without using an adhesive. As in the case of (1), driving in a high-frequency region becomes possible, and high-speed inkjet recording is achieved. In addition, variations in the amount of piezo displacement due to variations in adhesion are eliminated, and variations in density are prevented, so that the resolution of the density is increased and the inkjet recording head achieves higher definition of inkjet recording. Is easily produced.

According to a method of manufacturing an ink jet recording head according to claim 8, in the method of manufacturing an ink jet recording head according to claim 6 or 7, when forming a single-plate piezo by an ultrafine particle deposition method, By using a mask with the pattern of the opening as an opening, a single-plate piezo is selectively formed, so that only necessary piezo elements are formed. Since the useless piezo elements are not formed and left as they are, even when the ink jet recording head is discarded, the adverse effect on the environment caused by the harmful lead-containing piezo elements is suppressed to a minimum. In addition, since the single-plate piezo deposited on the mask can be collected and reused, it contributes to resource saving and effective use, and also reduces costs.

According to a ninth aspect of the present invention, in the method of manufacturing an ink jet recording head according to the sixth or seventh aspect, an organic material is used as a material of the diaphragm. Compared to the conventional case using a metal material as the plate material, the rigidity of the diaphragm is reduced, and the piezo displacement amount of the piezo element is increased, so that an ink jet recording head that achieves low power consumption can be easily manufactured. It is made. In addition, since the resolution of the piezo displacement amount of the piezo element is also increased, the resolution of the density is increased, and an ink jet recording head capable of achieving higher definition of the ink jet recording is easily manufactured.

[0035]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
An embodiment of the present invention will be described. First, a carrier jet type Kaiser type ink jet recording head according to an embodiment of the present invention will be described with reference to FIGS. Here, FIG. 1 is a schematic perspective view showing a carrier jet type Kaiser type ink jet recording head according to the present embodiment, and FIG. 2 is an enlarged view of a portion A of the carrier jet type Kaiser type ink jet recording head shown in FIG. It is a perspective view.

As shown in FIGS. 1 and 2, for example, P
Orifice plate 1 made of EI (polyetherimide)
0 is a metering orifice 12a for metering ink.
And a discharge orifice 12b for discharging the diluent,
The outlets are provided adjacent to each other. here,
The discharge orifice 12b is opened in a direction perpendicular to the bottom surface of the orifice plate 10, whereas the opening direction of the fixed amount orifice 12a is determined by the direction of the discharge orifice 12b.
Are inclined at an angle of about 30 ° with respect to the opening direction.

In the orifice plate 10, an ink cavity 14a for holding ink is formed in communication with the fixed amount orifice 12a, and a diluent cavity 14b for holding diluent is formed in communication with the discharge orifice 12b. Have been. Further, the ink cavity 14a
Supply chamber 16a for supplying ink to the ink supply chamber 16a and a diluent supply chamber 16b for supplying diluent to the diluent cavity 14b
Are formed respectively.

On the orifice plate 10, a diaphragm 1 made of an organic resin such as PI (polyimide) is provided.
8 are formed. Further, the ink cavity 14a
A single-plate type piezo element 20a for quantitative measurement is directly formed on the diaphragm 18 corresponding to the diluting solution cavity 14b without interposing an adhesive.
A single-plate type piezo element 20b for ejection is directly formed on 8 without an adhesive.

The single-plate type piezo elements 20a and 20b for quantifying and discharging are composed of a single-plate piezo, a ground electrode made of, for example, Au sandwiched between the single-plate piezo and the diaphragm 18, and a single-plate piezo element. An upper electrode made of, for example, Au formed on the upper surface of the piezo, and an appropriate voltage is applied to the ground electrode and the upper electrode provided on both surfaces of the single piezo, so that the upper electrode side of the single piezo is By contracting, a force is generated in a bending direction in which the ground electrode side, that is, the diaphragm 18 side is convex. And
The direction in which the longitudinal direction of the single-plate type piezo elements 20a and 20b for quantification and discharge contracts when voltage is applied (so-called d
31 directions).

As described above, in the Kaiser type ink jet recording head of the carrier jet type according to the present embodiment, the single-plate type piezo elements 20a and 20b for quantifying and discharging are provided with an adhesive on the diaphragm 18. Since the single-plate type piezo elements 20a and 20b for quantifying and discharging are combined with the diaphragm 18 without using an adhesive, the piezo elements are formed by an adhesive as in the related art. The thickness of the adhesive layer is prevented from substantially increasing the thickness of the diaphragm as compared with the case where it is adhered on the diaphragm, thereby preventing the rigidity thereof from being increased. In addition, since the thickness of the adhesive layer, which cannot be ignored, can be reduced to zero, driving in a high-frequency region becomes possible, and high-speed inkjet recording is achieved. In addition, since the variation in the amount of piezo displacement caused by the variation in the adhesion is eliminated and the variation in the density is prevented, the resolution of the density is increased, and the high-definition inkjet recording is achieved.

Moreover, since the diaphragm 18 is made of an organic resin such as PI, the rigidity of the diaphragm 18 is smaller than that of a conventional diaphragm using a metal material. Single-plate type piezo elements 20a, 20
Since the amount of piezo displacement b becomes large, low power consumption is realized. Further, since the resolution of the piezo displacement amount of the single-plate type piezo elements 20a and 20b for quantification and ejection also increases, the resolution of the density increases, and further higher definition of the ink jet recording is achieved.

Next, a method for manufacturing the Kaiser type ink jet recording head of the carrier jet type according to this embodiment will be described with reference to FIGS. 3 (a) to 3 (d) and FIG. Here, FIGS. 3A to 3D are process perspective views for describing a method of manufacturing the Kaiser type inkjet recording head of the carrier jet type according to the present embodiment, and FIG. 4 is a perspective view of FIG. FIG. 3 is a conceptual diagram for describing the steps shown in more detail.

First, although not shown, the orifice plate 10 made of PEI is subjected to excimer laser processing, injection molding, or machining to form the ink cavity 14.
a, diluent cavity 14b, ink supply chamber 16a,
And a diluent supply chamber 16b. afterwards,
The quantitative orifice 12a and the discharge orifice 12b are formed by excimer laser processing.

Subsequently, on the orifice plate 10, P
A diaphragm 18 made of an organic resin such as I is formed. Furthermore,
A ground electrode (not shown) made of, for example, Au, which constitutes the single-plate type piezo elements 20a and 20b for quantitative and discharge, is formed on the entire surface of the vibration plate 18.

Next, as shown in FIG. 3A, a mask material 22 made of, for example, PI is bonded on a ground electrode (not shown) formed on the entire surface of the diaphragm 18. Here, the thickness of the mask material 22 is 120 μm so that the thickness of a single-plate piezo to be formed later is 100 μm. In the present embodiment, PI is used as the mask material 22. However, any material other than PI can be used as long as it is a film-like material that can be ablated using an excimer laser in the next step. But it doesn't matter.

Next, as shown in FIG. 3 (b), the mask material 22 is ablated by using a mask image method using an excimer laser 24 as a light source, and the opening 26 of the pattern of the single-plate type piezo element is formed. To form In addition,
In this ablation process, since the ground electrode formed on the entire surface of the diaphragm 18 is made of Au, it is harder to process than the mask material 22 made of PI.
Since the ablation processing can control the processing depth in units of about 0.1 μm, the mask material 22 can be patterned without substantially damaging the underlying ground electrode.

Next, as shown in FIG. 3C and FIG. 4, a single-plate piezo 28 is formed by using an ultrafine particle deposition method. In this step, first, ultrafine particles to be a material are manufactured. That is, raw material powders are prepared according to a predetermined composition formula. For example, in the case of PZT, PbO, Z
rO ₂ , TO ₂ or the like is used. Then, the prepared raw material powder is subjected to main firing at a temperature of, for example, 1000 ° C. to 1300 ° C., and then pulverized with a ball made of zirconia ceramics having a diameter of about 1 mm by a ball mill or the like so that the average particle size is several tens nm to several tens of nm. Ultrafine powder with a uniform size of 100 nm. Here, a particularly important point is to use the main powder having a perovskite structure exhibiting piezoelectricity as the ultrafine powder.

The thus obtained ultrafine powder is mixed with an inert gas and injected through a fine nozzle 30 at a speed of several hundred m / sec. This method is usually called a gas deposition method. On the ground electrode formed on the entire surface of the diaphragm 18, the opening 26 of the pattern of the single-plate type piezo element is formed.
Since the mask material 22 formed with is bonded, the pattern of the mask material 22 is transferred onto the ground electrode,
Ink cavity 14a and diluent cavity 14
A single-plate piezo 28 having a thickness of 100 μm is formed at a desired position corresponding to b. And it has been confirmed that the single-plate piezo 28 thus formed by the ultrafine particle deposition method maintains the perovskite structure of the main powder used as a material.

At this time, the ultrafine particles sprayed onto the ground electrode at a high speed change the kinetic energy to heat energy, so that the bonding between the ground electrode and the ultrafine particles and between the ultrafine particles and the ultrafine particles is changed. It is thought to be promoted and deposited, but its detailed mechanism has not been elucidated at present.

The nozzle 30 used here has SU
S, Mo (molybdenum), zirconia ceramics, and the like are used. However, a material through which electricity flows is subjected to electrical discharge machining, and ceramics and the like are subjected to mechanical processing before main firing to perform nozzle hole processing. And then nozzle 3
0 is finished by liquid forming to smooth the inner surface.

Next, as shown in FIG. 3D, the mask material 22 is peeled off. Thereafter, although not shown, an upper electrode made of, for example, Au is formed on each of the single-plate piezos 28, and polarization processing is performed. In this way, the single-plate type piezo element 20a for quantification and the single-plate type piezo element 20b for ejection corresponding to the ink cavity 14a and the diluent cavity 14b are formed directly on the diaphragm 18.

At this time, since the single-plate piezo 28 formed by the ultrafine particle deposition method maintains the perovskite structure of the calcined powder, the upper electrode can be formed without performing the high-temperature treatment of the single-plate piezo 28. And polarization processing,
The single-plate type piezo element 20a for quantification and the single-plate type piezo element 20b for ejection can be used as actuators. In this way, the main part of the Kaiser type inkjet recording head of the carrier jet system is completed.

As described above, in the manufacturing method of the Kaiser type ink jet recording head of the carrier jet type according to the present embodiment, the single-plate type piezo elements 20a and 20b for the quantitative and the discharge are adhered on the diaphragm 18. Single-plate type piezo elements 20a, 20b formed directly without an intervening agent and used for quantitative and discharge without using an adhesive
And the diaphragm 18, the thickness of the adhesive layer is substantially increased as compared with the conventional case where the piezo element is adhered to the diaphragm with an adhesive, and the rigidity of the diaphragm is increased. In order to prevent the increase in the frequency, it is possible to reduce the thickness of the adhesive layer, which cannot be ignored when further increasing the frequency in the future, to zero. Speedup is achieved. In addition, since the variation in the amount of piezo displacement caused by the variation in the adhesion is eliminated and the variation in the density is prevented, the resolution of the density is increased, and the high-definition inkjet recording is achieved.

Further, since an organic resin such as PI is used for the material of the diaphragm 18, the rigidity of the diaphragm 18 is smaller than that of a conventional diaphragm using a metal material. And a single-plate type piezo element 20a for ejection,
Since the amount of piezo displacement of 20b is large, low power consumption is realized. Further, since the resolution of the piezo displacement amount of the single-plate type piezo elements 20a and 20b for quantification and ejection also increases, the resolution of the density increases, and further higher definition of the ink jet recording is achieved.

Next, a drive circuit of the Kaiser type ink jet recording head of the carrier jet system according to the present embodiment will be described with reference to FIG. Here, FIG. 5 is a block diagram showing a drive circuit of the Kaiser type inkjet recording head of the carrier jet system according to the present embodiment.

As shown in FIG. 5, the digital halftone data is supplied from another block to the serial / parallel conversion circuit 32, and the serial / parallel conversion circuit 32 controls the single-plate type piezo element 20a for quantification. The signals are sent to a control circuit 34 and a discharge unit control circuit 36 that controls the single-plate piezo element 20b for discharge.

The ink metering section control circuit 34 and the ejection section control circuit 36 provide an ink metering section 38 comprising a single-plate type piezo element 20a for quantification and an ejection section comprising a single-plate piezo element 20b for ejection. A predetermined control signal is sent to each of the control signals 40.

Further, a print trigger is output from another block to the timing control circuit 42, and the timing control circuit 42 sends the print trigger to the ink quantitative control circuit 34 and the ejection control circuit 3.
6 respectively.

If the digital halftone data sent from the serial / parallel conversion circuit 32 is equal to or smaller than a predetermined threshold value, the ink quantification unit control circuit 34 and the ejection control circuit 36 output a predetermined control signal to the ink quantification unit 38. And discharge section 4
It is not sent to 0, and the fixed amount of the ink and the discharge of the mixed liquid of the ink and the diluent are not performed.

When the digital halftone data sent from the serial / parallel conversion circuit 32 exceeds a predetermined threshold value and the print timing comes, the timing control circuit 42 detects a print trigger output from another block. At a predetermined timing, the control section 34 outputs an ink control section control signal and an ejection control signal to the ink control section control circuit 34 and the ejection control circuit 36, respectively. At this time,
The ink metering unit control circuit 34 and the ejection control circuit 36 provide the ink metering unit 38 and the ejection unit 40 with a single-plate type piezo element 20a for quantification and a single-plate type piezo element 20b for ejection, respectively.
A predetermined control signal for applying the drive voltage is transmitted. In this way, the quantitative determination of the ink and the ejection of the mixed liquid of the ink and the diluting liquid are performed.

Next, the operation of the carrier jet type Kaiser type ink jet recording head according to this embodiment will be described.
This will be described with reference to FIGS. Here, FIG. 6 is a timing chart of the application of the drive voltage to the single-plate piezo element of the Kaiser-type inkjet recording head of the carrier jet system according to the present embodiment. In FIG. 6, the horizontal axis represents time, and the vertical axis represents drive voltage to the single-plate type piezo elements for quantitative and discharge. The numbers in the figure represent time (unit: μsec).

1 and 2, ink is sent from an ink tank (not shown) to a supply chamber 16a through a supply pipe (not shown).
4a, and is filled into the ink cavity 14a and the metering orifice 12a. Further, the diluent is sent from a diluent tank (not shown) to a diluent supply chamber 16b through a supply pipe (not shown), and further supplied to a diluent cavity 14b. The discharge orifice 12b is filled.

Printing can be performed using the Kaiser type ink jet recording head of the carrier jet system as follows. That is, as shown in FIG. 6, first, at the time indicated by (A) in the figure, the driving voltages of the single-plate type piezo elements 20a and 20b for quantitative and discharge are both set to 0 [V].

Next, at the time shown by (B) in the figure, a driving voltage is applied to the single-plate type piezo element 20a for quantitative measurement, and the driving voltage is gradually increased, and the time shown by (D) in the figure is obtained. Up to 20 [V] over 50 [μsec]. Then, the single-plate type piezo element 20a for quantitative measurement is bent so that the diaphragm 18 side is convex, and presses the ink cavity 14a to reduce its volume. Therefore, at the time point shown by (C) in the figure between the time point shown by (B) in the figure and the time point shown by (D) in the figure, the ink is pushed out from the quantitative orifice 12a.

Then, this state is maintained for 50 [μsec] from the time point indicated by (D) in the figure to the time point indicated by (E) in the figure. Then, since the outlets of the fixed quantity orifice 12a and the discharge orifice 12b are adjacent to each other, at the time shown by (E) in the drawing, the ink pushed out of the fixed quantity orifice 12a and the outlet of the discharge orifice 12b. The diluent comes into contact with each other and becomes bound by surface tension.

Subsequently, the drive voltage of the single-plate type piezo element 20a for quantification is gradually lowered to the original value from the time point indicated by (E) in the figure. Then, since the single-plate type piezo element 20a for quantification attempts to return to a flat state, the volume of the ink cavity 14a increases, and the ink is supplied to the quantification orifice 1a.
2a begins to be drawn into.

Then, from the time point indicated by (F) in the figure, which is a time point later than the time point indicated by (E) in the figure, to (G) in the figure.
The drive voltage of the single-plate piezo element 20b for ejection is changed from 0 [V] to 24 [V] over 5 [μsec] until the time point indicated by.
Up to Then, the single-plate type piezo element 20b for ejection
Is bent so that the diaphragm 18 side is convex, and the diluent cavity 14
Press b to decrease its volume. As a result, at the point shown by (F) in the figure, the diluent
The ink is pushed out from 2b, and a part of the ink in contact with the ink starts to be pushed out together.

This state is maintained for 12 [μsec] from the time point indicated by (G) in the figure to the time point indicated by (I) in the figure. Then, at the time point shown by (H) in the figure between the time point shown by (G) in the figure and the time point shown by (I) in the figure, the diluting liquid is discharged together with the ink into the ejection orifice 12
b is further extruded. At this time, since the drive voltage of the single-plate type piezo element 20a for quantification continues to decrease, the ink is drawn into the quantification orifice 12a so as to leave a portion in contact with the diluent.

Next, the drive voltage of the single-plate piezo element 20b for discharging is gradually lowered from the time point (I) in the figure. Then, the single-plate type piezo element 20b for ejection starts to return flat, and the volume of the diluent cavity 14b increases. As a result, at the time point indicated by (J) in the figure, which is slightly later than the time point (I) in the figure, constriction starts to occur between the mixed liquid in which the ink and the diluting liquid are mixed and the diluting liquid. . At this time, the driving voltage of the single-plate type piezo element 20a for quantification returns to the original value of 0 [V], and this state is maintained thereafter.

At the time point (K) in the figure, which is later than the time point (J) in the figure, the mixture of the ink and the diluent is torn off from the diluent, and the discharge orifice 12b While the diluent is drawn into the discharge orifice 12b.

Further, at a time point indicated by (L) in the figure, which is a time point after the time point indicated by (K) in the figure, the driving voltage of the single-plate type piezo element 20b for ejection is changed to the original 0 [V]. Return to]. Here, from the time indicated by (I) in the figure, (L) in the figure
The time up to the point indicated by is 100 [μsec]. At this time, the mixed liquid continues to fly in the form of a sphere toward the recording material, and thereafter, is adhered to the recording material and recording is performed.

The ink is gradually filled into the quantitative orifice 12a by the capillary force from the time indicated by (J) in the figure to the time indicated by (L) in the figure. At the time point indicated by (), the filling is performed up to the tip of the quantitative orifice 12a. However, (L) in the figure
At the point indicated by, the tip of the ink slightly vibrates to form a swell.

At the time indicated by (M) in the figure after the time indicated by (L) in the figure, the diluent is filled into the discharge orifice 12b by capillary force like the ink. The tip portion vibrates slightly due to inertia to form a swell. At this point, the vibration of the ink has stopped. Further, at the time point indicated by (N) in the figure after the time point indicated by (M) in the figure, the vibration of the diluent also stops and returns to the standby state.

Here, the discharge cycle is set to 1 [msec].
c], that is, assuming that the frequency is 1 [kHz], this 1 [ms]
ec], the amount of the ink, the mixing of the ink and the diluent, and the ejection of the mixed droplets are performed. The maximum driving voltage of the single-plate piezo element 20b for discharging is set to 24 [V], and the maximum driving voltage of the single-plate piezo element 20a for quantification is set to 20 [V].

To perform printing, the above operation may be repeated. However, in order to express density gradation, it is necessary to change the ink density for each dot. That is, the driving voltage of the single-plate type piezo element 20a for quantification at the time of quantification is reduced,
It is necessary to reduce the amount of ink to be quantified and to form low density dots. The operation of the Kaiser-type inkjet recording head of the carrier jet type in this case will be described after the point indicated by (N) in the figure. That is, after the time indicated by (N) in the figure, the drive voltage is applied to the single-plate type piezo element 20a for quantification at the same timing as that after the time shown by (B) in the figure. Then, a drive voltage is applied to the single-plate piezo element 20b for ejection. However, in the above case, the single-plate type piezo element 2
The difference is that the drive voltage of 0a is 20 [V], whereas in this case it is as low as 8 [V].

As described above, at the same timing as in the above case, the single-plate type piezo elements 20 for quantitative and discharge are used.
By applying a drive voltage to the a and 20b and reducing the drive voltage of the single-plate piezo element 20a for quantification during quantification from 20 [V] in the above case to 8 [V],
The amount of ink quantified is reduced to form low density dots. Thus, the density gradation is expressed. The same effect can be obtained by increasing or decreasing the width of the drive pulse instead of increasing or decreasing the drive voltage of the single-plate type piezo element 20a for quantitative determination.

As described above, in the Kaiser type ink jet recording head of the carrier jet system according to the present embodiment, the fixed orifice 12 for extruding the ink is used.
a and the discharge orifice 12b for discharging the diluting liquid are separately provided, so that the ink and the diluting liquid do not come into contact with each other at the time of standby for discharging, and the two are reliably separated from each other. Also, in the mixed liquid discharging operation, unnecessary flow of the ink and the diluting liquid does not occur between the fixed amount orifice 12a and the discharging orifice 12b. Further, since the outlet of the fixed amount orifice 12a and the outlet of the discharge orifice 12b are formed adjacent to each other, when the ink is oozed from the fixed amount orifice 12a toward the discharge orifice 12b, the ink is discharged from the discharge orifice 12b. 12b is supplied stably.

Next, an ink jet recording apparatus equipped with a Kaiser type ink jet recording head of the carrier jet system according to this embodiment will be described with reference to FIGS. 7 and 8. FIG. Here, FIG. 7 is a schematic diagram showing a serial type inkjet recording apparatus equipped with a carrier jet type Kaiser type inkjet recording head according to the present embodiment, and FIG. 8 is a carrier jet type Kaiser according to the present embodiment. 1 is a schematic view showing a line type ink jet recording apparatus equipped with a liquid type ink jet recording head.

First, in the serial type ink jet recording apparatus, as shown in FIG. 7, a printing paper 44 as a printing material is pressed and held on a drum 48 by a paper pressing roller 46 provided in parallel with the drum axis direction. Have been. A feed screw 5 is provided on the outer periphery of the drum 48.
0 is provided in parallel with the drum axis direction. The feed screw 50 holds the Kaiser type inkjet recording head 52 of the carrier jet type according to the present embodiment. The Kaiser-type inkjet recording head 52 of the carrier jet system is adapted to move in the drum axis direction by the rotation of the feed screw 50 as indicated by the arrow in the drawing.

The drum 48 includes a pulley 54 and a belt 5
6, connected to a motor 60 via a pulley 58, and the rotation of the motor 60 causes the drum 48 to rotate. Further, a head drive circuit / head feed control circuit / drum rotation control circuit 62 as a drive control unit
Are respectively a carrier jet type Kaiser type ink jet recording head 52, a feed screw 50, and a motor 6
Connected to 0.

Now, when print data and a control signal are sent from another block to the head drive circuit / head feed control circuit / drum rotation control circuit 62, the head drive circuit and the control signal are sent to the head drive circuit based on the print data and the control signal. /
A predetermined drive signal is issued from the head feed control circuit / drum rotation control circuit 62 to drive the Kaiser type inkjet recording head 52 of the carrier jet system, the feed screw 50, and the motor 60, respectively. That is, the Kaiser-type inkjet recording head 52 of the carrier jet system prints on the printing paper 44 pressed and held on the drum 48 by the paper pressing roller 46, and the feed screw 5.
The rotation of the feed screw 50 causes the Kaiser-type inkjet recording head 5 of the carrier jet system to rotate.
2 moves in the drum axis direction.

When the Kaiser-type ink jet recording head 52 of the carrier jet system is moved and printing for one line is completed, the motor 60 rotates and the motor 6 rotates.
With the rotation of 0, the drum 48 rotates by one line. Then, the process proceeds to the printing of the next line by the Kaiser type inkjet recording head 52 of the carrier jet system. The Kaiser-type inkjet recording head 52 of the carrier jet system may be moved only in the same direction or in a reciprocating direction.

Next, in the line type ink jet recording apparatus, as shown in FIG. 8, a printing paper 44 as a printing material is pressed and held on a drum 48 by a paper pressing roller 46 provided in parallel with the drum axis direction. Have been. However, instead of the feed screw 50 and the carrier jet type Kaiser type ink jet recording head 52 shown in FIG. 7, a large number of carrier jet type Kaiser type ink jet recording heads are arranged on the outer periphery of the drum 48 in a line shape. Line head 64 is provided fixed in the drum axis direction.

As in the case shown in FIG. 7, the drum 48 is connected to a motor 60 via a pulley 54, a belt 56, and a pulley 58, so that the drum 48 rotates with the rotation of the motor 60. Has become. Further, a head drive circuit / drum rotation control circuit 66 as a drive control unit is connected to the line head 64 and the motor 60, respectively.

Now, print data and control signals from other blocks are transferred to the head drive circuit / drum rotation control circuit 66.
Is sent to the head drive circuit / drum rotation control circuit 6 based on the print data and the control signal.
A predetermined drive signal is issued from 6 to drive the line head 64 and the motor 60, respectively. That is, the line head 64 simultaneously prints one line on the printing paper 44 pressed and held on the drum 48 by the paper pressing roller 46. When the printing for one line is completed, the motor 60 rotates, and the rotation of the motor 60 causes the drum 48 to rotate by one line. Then, the process proceeds to the printing of the next line by the line head 64. In this case, a method of printing all lines at once, dividing the data into a plurality of blocks, or alternately printing every other line is also conceivable.

Next, a printing and control system of an ink jet recording apparatus equipped with a carrier jet type Kaiser type ink jet recording head according to this embodiment will be described with reference to FIG. Here, FIG. 9 is a block diagram showing a printing and control system of an ink jet recording apparatus equipped with a carrier jet type Kaiser type ink jet recording head according to the present embodiment.

As shown in FIG. 9, control signals such as print data and other operation section signals and external control signals are input to a signal processing control circuit 68. The print data input to the signal processing control circuit 68 is
The print order is adjusted, and the print order is sent to the head 72 via the head drive circuit 70. This head 7
A gradation signal and a discharge signal are also input to 2.

Note that the printing order differs depending on the configuration of the head 72 and the printing unit, and also has a relationship with the input order of print data. Therefore, the printing order is temporarily recorded in a memory 74 such as a line buffer memory or a one-screen memory as necessary. Sometimes it is taken out.

When the number of orifices is very large in the multi-head, an IC (integrated circuit) is mounted on the head 72 to reduce the number of wirings connected to the head 72. The signal processing control circuit 68 includes a correction circuit 76.
Are connected to perform gamma correction for adjusting print density, color correction for color printing, variation correction for each head, and the like. Generally, predetermined correction data is stored in the correction circuit 76 in the form of a ROM map, and is taken out according to external conditions such as an orifice number, a temperature, and an input signal.

The signal processing control circuit 68 is generally processed by software in the form of a CPU (Central Processing Unit) or DSP (Digital Signal Processing). To be sent to In the various control units 78, control such as driving of a motor for rotating and driving a drum and a feed screw, synchronization, cooling of a head, supply and discharge of print paper, and the like are performed.

[0091]

As described above, according to the ink jet recording head and the method of manufacturing the same of the present invention, the following effects can be obtained. That is, according to the ink jet recording head according to the first aspect, in the ink jet recording head that discharges ink from the discharge orifice, the piezo element is formed directly on the vibration plate, and no adhesive is interposed therebetween. Since it is possible to prevent the thickness of the adhesive layer from substantially increasing the thickness of the diaphragm and increasing the rigidity thereof, it is possible to drive in a high-frequency region and achieve high-speed inkjet recording. .

According to the ink jet recording head of the second aspect, in the ink jet recording head for discharging a mixture of ink and a diluting liquid from the discharge orifice, the piezo element is formed directly on the diaphragm, and The absence of the adhesive makes it possible to drive in a high-frequency region and achieve high-speed ink-jet recording, as well as variations in adhesion, as in the case of the ink-jet recording head according to claim 1. This eliminates variations in the amount of piezo displacement caused by the above, and prevents variations in the density, thereby increasing the resolution of the density and achieving high-definition inkjet recording.

According to the ink jet recording head of the third aspect, since the diaphragm is made of an organic material, the rigidity of the diaphragm is reduced, and the amount of piezo displacement of the piezo element is increased. Power consumption can be realized, and the resolution of the piezo displacement amount of the piezo element is increased. Therefore, the resolution of the density is increased, and high definition of the ink jet recording can be achieved.

According to the method of manufacturing an ink jet recording head according to the sixth aspect, when manufacturing an ink jet recording head for discharging ink from a discharge orifice, ultra fine particles are deposited on the diaphragm via the first electrode. By forming a single-plate piezo by the method and forming a second electrode thereon, the piezo element is formed directly on the diaphragm without using an adhesive, so that the thickness of the adhesive layer is substantially reduced. It is possible to easily manufacture an ink jet recording head which can be driven in a high frequency region and achieve high speed ink jet recording, since the thickness of the diaphragm is prevented from being increased to increase the rigidity of the diaphragm. be able to.

According to the method of manufacturing an ink jet recording head according to the seventh aspect, when manufacturing an ink jet recording head for discharging a mixed liquid of ink and a diluting liquid from a discharge orifice, a first liquid jet head is provided on a diaphragm. A single-plate piezo is formed by an ultra-fine particle deposition method through an electrode, and a second piezo is formed thereon.
Since the piezo element is formed directly on the diaphragm without using an adhesive by forming the electrodes described above, similar to the method of manufacturing an ink jet recording head according to claim 6, the piezo element is formed in a high frequency region. In addition to being able to drive and achieving high-speed ink jet recording, variations in the amount of piezo displacement due to variations in bonding are eliminated, and variations in density are prevented from occurring.
It is possible to easily manufacture an ink jet recording head in which the resolution of the density is increased and high definition of the ink jet recording is achieved.

According to the method of manufacturing an ink jet recording head according to the eighth aspect, when a single-plate piezo is formed by ultra-fine particle deposition, a single-plate piezo is formed by using a mask having a pattern of a piezo element as an opening. By selectively forming, only necessary piezo elements are formed, so that useless piezo elements are not formed and left unattended, so that even when the inkjet recording head is discarded, it is harmful. The adverse effect on the environment of the piezo element containing the lead can be minimized. In addition, since the single-plate piezo deposited on the mask can be collected and reused, it contributes to resource saving and effective use, and can reduce cost.

According to the method of manufacturing an ink jet recording head according to the ninth aspect, since the rigidity of the diaphragm is reduced by using an organic material as the material of the diaphragm, the amount of piezo displacement of the piezo element is increased. Therefore, low power consumption is realized, and the resolution of the piezo displacement of the piezo element is also increased, so that the resolution of the density is increased and the inkjet recording head that achieves high definition of the inkjet recording is easily manufactured. can do.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a Kaiser-type inkjet recording head of a carrier jet system according to an embodiment of the present invention.

FIG. 2 is a partially enlarged view of the Kaiser type inkjet recording head of the carrier jet type shown in FIG.

FIGS. 3A to 3D are process perspective views for explaining a method of manufacturing a carrier jet type Kaiser type ink jet recording head according to an embodiment of the present invention.

FIG. 4 is a conceptual diagram for explaining in more detail a manufacturing process of the Kaiser type inkjet recording head of the carrier jet type shown in FIG. 3 (c).

FIG. 5 is a block diagram illustrating a drive circuit of a Kaiser-type inkjet recording head of a carrier jet system according to an embodiment of the present invention.

FIG. 6 is a timing chart for applying a drive voltage to a single-plate piezo element of a Kaiser-type inkjet recording head of a carrier jet system according to an embodiment of the present invention.

FIG. 7 is a schematic diagram showing a serial type ink jet recording apparatus equipped with a Kaiser type ink jet recording head of a carrier jet type according to an embodiment of the present invention.

FIG. 8 is a schematic view showing a line type ink jet recording apparatus equipped with a Kaiser type ink jet recording head of a carrier jet system according to an embodiment of the present invention.

FIG. 9 is a block diagram showing a printing and control system of an ink jet recording apparatus equipped with a Kaiser type ink jet recording head of a carrier jet system according to an embodiment of the present invention.

[Explanation of symbols]

10: orifice plate, 12a: fixed amount orifice,
12b: discharge orifice, 14a: ink cavity, 14b: diluent cavity, 16a: ink supply chamber, 16b: diluent supply chamber, 18: diaphragm, 20a: single-plate type piezo element for quantification, 20b: discharge Single-plate type piezo element, 22 ... mask material, 24 ... excimer laser, 26
... Opening part, 28 ... Single-plate piezo, 30 ... Nozzle, 32 ... Serial / parallel conversion circuit, 34 ... Ink metering part control circuit, 36 ... Ejection part control circuit, 38 ... Ink metering part
... Discharge unit, 42 ... Timing control circuit, 44 ... Print paper, 46 ... Paper pressure roller, 48 ... Drum, 50 ... Feed screw, 52 ... Carrier jet type Kaiser type ink jet recording head, 54 ... Pulley, 56 ... Belt 58
... pulley, 60 ... motor, 62 ... head drive circuit /
Head feed control circuit / drum rotation control circuit, 64: line head, 66: head drive circuit / drum rotation control circuit, 68: signal processing control circuit, 70: head drive circuit, 72: head, 74: memory, 76: correction circuit,
78 various control units.

Claims (9)

[Claims] 1. A discharge orifice formed in an orifice plate, a cavity communicating with the discharge orifice, a piezo element corresponding to the cavity, and a diaphragm for transmitting an output of the piezo element to ink in the cavity. An ink jet recording head for ejecting ink from the ejection orifice and flying it to a printing object, wherein the piezo element is formed directly on the diaphragm. . 2. A discharge orifice and a fixed amount orifice formed in an orifice plate, and first and second communication ports respectively connected to the discharge orifice and the fixed amount orifice.
A cavity, a piezo element corresponding to the first and second cavities, and a diaphragm for transmitting the output of the piezo element to ink or diluent in the first and second cavities, An inkjet recording head for ejecting a mixture of ink and a diluent from the ejection orifice and flying the mixture onto an object to be printed, wherein the piezo element is formed directly on the diaphragm. Recording head. 3. The ink jet recording head according to claim 1, wherein the diaphragm is made of an organic material. 4. The ink jet recording head according to claim 2, wherein a diluent is held in the first cavity communicating with the discharge orifice, and ink is held in the second cavity communicating with the fixed amount orifice. An ink jet recording head, characterized in that after quantifying the ink from the quantification orifice, a diluting liquid is discharged from the discharge orifice, and a mixed liquid of the ink and the diluting liquid is blown to a printing target. 5. The ink jet recording head according to claim 2, wherein ink is held in the first cavity communicating with the ejection orifice, and diluent is held in the second cavity communicating with the fixed amount orifice. An ink jet recording head, characterized in that after a diluting liquid is quantified from the quantifying orifice, ink is ejected from the ejection orifice, and a mixed liquid of the ink and the diluting liquid is blown to an object to be printed. 6. A discharge orifice formed in an orifice plate, a cavity communicating with the discharge orifice, a piezo element corresponding to the cavity, and a diaphragm for transmitting an output of the piezo element to ink in the cavity. A method of manufacturing an ink jet recording head for discharging ink from the discharge orifice and flying the object to be printed, comprising: a single plate on the vibrating plate via a first electrode by an ultrafine particle deposition method A method for manufacturing an ink jet recording head, comprising forming a second electrode on the single-plate piezo after forming the piezo. 7. A discharge orifice and a fixed amount orifice formed in an orifice plate, and first and second communication ports respectively connected to the discharge orifice and the fixed amount orifice.
A cavity, a piezo element corresponding to the first and second cavities, and a diaphragm for transmitting the output of the piezo element to ink or diluent in the first and second cavities, What is claimed is: 1. A method for manufacturing an ink jet recording head for discharging a mixed liquid of an ink and a diluting liquid from an ejection orifice and flying the mixed liquid on an object to be printed, comprising: a first electrode on the diaphragm; A method of manufacturing an ink jet recording head, comprising: forming a single-plate piezo, and then forming a second electrode on the single-plate piezo. 8. The method for manufacturing an ink jet recording head according to claim 6, wherein, when forming a single-plate piezo by an ultrafine particle deposition method, using a mask having openings of the pattern of the piezo element.
A method for manufacturing an ink jet recording head, wherein the single-plate piezo is selectively formed. 9. The method of manufacturing an ink jet recording head according to claim 6, wherein an organic material is used as a material of the vibration plate.