JPH11316178A - Device and method for evaluating gas - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and method for evaluating a gas, capable of accurately evaluating an evolved gas from an object to be evaluated in the same situation as in an actual situation of gas generation at a low-cost, without necessity of processing the object to be evaluated. SOLUTION: A double tube consisting of an outer cylinder part 2 and an inner cylinder part 3 composes a chamber 1. The lower ends of the outer cylinder part 2 and the inner cylinder part 3 are opened, and the lower end of the inner cylinder part 3 is located below that of the outer cylinder part 2. When an evolved gas from the surface of a building material 4 is evaluated, the chamber 1 is directly disposed on the surface of the building material 4. An intake pipe 6 supplying clean air and an exhaust pipe 8 discharging air inside of the inner cylinder part 3 are installed on the upper side surface of the outer cylinder part 2 and on the upper part of the inner cylinder part 3 respectively, and their flow rates are adjusted by an intake valve 5 and by an exhaust valve 7 respectively.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas evaluation apparatus and a gas evaluation method for analyzing a gas generated from a material constituting a clean room or the like.

[0002]

2. Description of the Related Art Generally, in semiconductor manufacturing plants and other clean rooms, various materials are used, including building materials such as walls, floors, and ceilings. Conventionally, gases (organic gas and inorganic gas) generated from these materials have been one of the sources of chemical contamination in clean rooms.
It has been regarded as a problem. Therefore, a method of analyzing and evaluating the gas generated from each material has been studied so as to select a material that generates less such gas.

[0003] As a method of evaluating such a gas, a gas is generated from the material at an accelerated rate by setting an environment in which the material is decompressed and heated more than the environment in which the material is used, and the gas is collected and analyzed.・ Evaluation methods are often used. Among them, the static headspace method (Static Headspace) and the dynamic headspace method (Dynamic Headspace) are particularly adopted.

The static headspace method is a method in which a sample is stored in a closed container, the sample is heated together with the container, and gas volatilized from the sample is collected together with a gas phase in the closed container. According to this method, high-sensitivity analysis of low-boiling compounds can be easily performed.

[0005] The dynamic headspace method is a method in which gas generated from a sample is collected by various methods in general, in which a carrier gas consisting of an inert gas such as nitrogen or helium is used. It is. Also in this method, a sample may be stored in a container such as a desiccator or a chamber, and an acceleration test by heating may be performed. According to this dynamic headspace method, not only organic gas but also inorganic gas can be collected, and high-sensitivity analysis of high-boiling compounds can be performed, and gas can be concentrated when collected. Because it is possible, highly sensitive analysis is possible.

[0006]

However, the conventional gas evaluation method described above has the following problems. That is, when the material is evaluated after the construction, there is a problem that the material must be cut into a test body so that the material can be stored in the container. Therefore, there is a problem that the gas generated from the cut surface does not match the gas actually generated from the surface of the material, and accurate evaluation cannot be performed.

[0007] In each of the above methods, it is not usually possible to measure in the space where the material is actually used.
The actual gas generation situation could not be accurately evaluated. Further, there is a problem that the inside of the device needs to be made airtight with a seal or packing material or the like, and the influence of gas generated from the seal or packing material or the like must be considered.

Further, in a semiconductor manufacturing plant, it is necessary to carry out a wafer exposure experiment in order to observe the effect of gas generated from the material on the wafer. In each of the above methods, the wafer is stored in a container for storing the material. Could not perform such an experiment.

On the other hand, there is also known a test room method in which a material is not cut and stored in a container, but a gas is collected in a clean room unit, and a practical environmental influence is grasped.
However, in this method, although it is possible to perform the measurement on the actual site, there are problems that the cost is high and the evaluation for each material is impossible.

[0010] The present invention has been proposed to solve the problems of the prior art as described above.
The present invention provides a gas evaluation device and a gas evaluation method that do not require processing such as cutting of an object to be evaluated, are low-cost, and can accurately evaluate generated gas from a material in a state similar to an actual gas generation state. Is to do.

[0011]

According to the first aspect of the present invention,
In a gas evaluation apparatus for collecting and evaluating gas generated on the surface of an object to be evaluated, a chamber having one end opened and a gas collection chamber formed therein, and a supply of clean air into the chamber. Air means, exhaust means for exhausting air in the collection chamber, and flow rate means for adjusting the flow rate of clean air supplied by the air supply means and the flow rate of air exhausted by the exhaust means. It is characterized by:

According to the first aspect of the present invention, the following effects can be obtained. That is, the opening side of the chamber is set on the surface of the device to be evaluated, and clean air is supplied into the chamber. At this time, the flow rate adjusting means adjusts the flow rate of the clean air supplied from the air supply means to be larger than the flow rate of the air exhausted by the exhaust means. This allows
Part of the clean air leaks to the outside through a gap between the chamber and the surface of the device to be evaluated, whereby external air does not enter the chamber.

Therefore, the chamber can be installed on the surface of the object to be evaluated, and the gas generated from the surface of the object to be evaluated can be collected. Therefore, the generated gas can be evaluated in the same situation as the situation where the gas is actually produced. Further, gas can be collected at a place where the evaluation object is actually used.

Further, since the clean air leaks to the outside, the outside air does not enter and the inside of the chamber does not need to be airtight. Therefore, a sealing material or a packing material for fixing the chamber and the object to be evaluated is required. No need to provide. Therefore, it is not affected by the gas generated from the sealing material or the packing material.

According to a second aspect of the present invention, there is provided a gas evaluation apparatus for collecting and evaluating gas generated on the surface of an object to be evaluated, wherein the cylindrical outer cylinder has an open end and an inner side of the outer cylinder. A chamber in which a gas collecting chamber is formed in the inner cylinder portion, the chamber including a cylindrical inner cylinder portion having an open end on the opening side of the outer cylinder portion; Air supply means for supplying clean air to a space formed between the portion and the inner cylinder portion,
Exhaust means for exhausting air in the collection chamber, and flow rate adjusting means for adjusting the flow rate of clean air supplied by the air supply means and the flow rate of air exhausted by the exhaust means, A vent is formed at an opening end of the tubular portion to vent the clean air from the space between the outer tubular portion and the inner tubular portion to the inside of the collection chamber.

According to the second aspect of the present invention, the following effects can be obtained. That is, the opening sides of the outer tube and the inner tube are set on the surface of the device to be evaluated, and clean air is supplied to the space between the outer tube and the inner tube. At this time, the flow rate adjusting means adjusts the flow rate of the clean air supplied from the air supply means to be larger than the flow rate of the air exhausted by the exhaust means. Then, the clean air flows into the collection chamber from the space through the ventilation part formed on the opening side of the inner cylinder part. At this time, as described above, since the flow rate of the supplied clean air is larger than the flow rate of the exhausted air, a part of the clean air is supplied from a gap between the outer cylinder and the surface of the device to be evaluated. Leaks to the outside, so that no outside air enters the chamber.

The clean air flowing into the collection chamber passes near the surface of the object to be evaluated. At this time, in addition to the moving flow of the clean air passing near the surface of the object to be evaluated, the gas is generated from the object to be evaluated by diffusion due to the volume of the gas collecting chamber, and the gas is generated inside the inner cylinder by the exhaust means. Exhausted as air.

On the other hand, the supply of clean air by the air supply unit and the exhaust by the exhaust unit are stopped by the flow rate adjusting unit.
When allowed to stand for a certain period of time, gas is generated from the evaluation object and diffuses into the space inside the collection chamber, and the gas phase inside the evaluation object and the evaluation object are in a gas concentration equilibrium state. Thereafter, the gas in the above concentration equilibrium state can be collected by supplying the clean air by the air supply means and exhausting the air in the collection chamber by the exhaust means.

As described above, according to the present invention, a method for generating and collecting gas from a device to be evaluated by moving a flow and concentration diffusion by passing clean air, and a method for equilibrium concentration between a device to be evaluated and a gas phase are provided. Both a method of collecting gas in a state and a method of collecting gas in a state can be adopted.

Further, according to the present invention, the chamber can be installed on the surface of the object to be evaluated, and the gas generated from the surface of the object to be evaluated can be collected. Therefore, the generated gas can be evaluated in the same situation as the situation where the gas is actually produced. Further, gas can be collected at a place where the evaluation object is actually used.

Further, since the clean air leaks to the outside, the outside air does not enter, and the inside of the chamber does not need to be airtight. Therefore, a sealing material or a packing material for fixing the chamber and the object to be evaluated is required. No need to provide. Therefore, it is not affected by the gas generated from the sealing material or the packing material.

According to a third aspect of the present invention, in the gas evaluation device according to the second aspect, the ventilation portion is arranged such that an opening end of the inner cylindrical portion is axially inside an opening end of the outer cylindrical portion. It is characterized by being formed by positioning.

According to the third aspect of the present invention, since the open end of the inner cylindrical portion is located inside the open end of the outer cylindrical portion, when the chamber is set on the surface of the device to be evaluated, only the outer cylindrical portion is provided. Are in contact with the surface of the evaluation object, and the inner cylindrical portion does not contact the surface of the evaluation object. That is, a gap is formed between the opening end of the inner cylindrical portion and the surface of the device to be evaluated. Therefore, clean air flows into the collection chamber from the space between the inner cylinder and the outer cylinder through this gap.

According to a fourth aspect of the present invention, in the gas evaluation apparatus according to any one of the first to third aspects, the air supply means has an air supply pipe and the exhaust means has an exhaust pipe. The flow rate adjusting means includes an air supply valve for adjusting a flow rate of clean air flowing through the air supply pipe, and an exhaust valve for adjusting a flow rate of air flowing through the exhaust means.

According to the fourth aspect of the present invention, by controlling the air supply valve and the exhaust valve, the flow rate of the clean air and the flow rate of the exhausted air are adjusted, and the outer cylinder and the inner cylinder are adjusted. The pressure balance can be controlled. Further, by fully closing the air supply valve and the exhaust valve, it becomes possible to collect gas in a state where the gas concentration of the evaluation object and the gaseous phase is equilibrium.

According to a fifth aspect of the present invention, in the gas evaluating apparatus according to any one of the first to fourth aspects, the chamber is made of transparent glass. According to the fifth aspect of the present invention, since the surface of the device to be evaluated can be heated by installing a heating means such as a heater outside the chamber, it is necessary to heat from the back surface of the device to be evaluated as in the conventional case. There is no.

According to a sixth aspect of the present invention, there is provided a gas evaluation apparatus according to any one of the first to fifth aspects, wherein a heating means is incorporated in the collection chamber. According to a seventh aspect of the present invention, in the gas evaluation apparatus according to any one of the second to fifth aspects, a coating is applied to a surface of the inner cylindrical portion so that substances in the collection chamber do not adhere. It is characterized by: According to the inventions described in claims 6 and 7, it is possible to prevent, for example, generated gas from condensing and adhering to the surface of the chamber or the inner cylinder.

According to an eighth aspect of the present invention, there is provided a gas evaluation apparatus according to any one of the first to seventh aspects, further comprising a bogie on which the chamber, the air supply means, the exhaust means, and the flow rate adjustment means are mounted. The bogie has a support means for supporting the chamber so that the opening side of the chamber can freely change its direction, and an elevating means for supporting the chamber so as to be vertically movable. I have.

According to the eighth aspect of the present invention, the cart is moved, the chamber is moved up and down by the elevating means, and the direction of the chamber is changed by the supporting means, so that all directions and heights such as a wall surface, a ceiling surface and the like can be obtained. Can be evaluated. In addition, by automatically driving the cart, it is possible to efficiently evaluate a plurality of locations.

According to a ninth aspect of the present invention, in the first aspect of the present invention, infrared rays are used as a heat source,
An evaluation object heating means for heating the evaluation object to promote gas generation from the evaluation object is provided. According to a tenth aspect of the present invention, in the ninth aspect of the present invention, the evaluation object heating means comprises an infrared lamp. An eleventh aspect of the present invention is characterized in that, in the ninth aspect of the present invention, the evaluation object heating means comprises a radiation panel.

According to the ninth, tenth, or eleventh aspect, the following operation and effect can be obtained. That is, even when a low-gas-generating substance to be evaluated is used, or when the amount of gas generated by a conventional substance to be evaluated decreases over time, the collection time can be shortened. Also,
Since infrared rays are used as a heat source, there is no influence on the diffusion of the substance inside the object to be evaluated unlike the method of directly inputting thermal energy, such as a method of directly installing a hot plate below the object to be evaluated. Therefore, when verifying the degassing characteristics due to temperature in consideration of the situation where the object to be evaluated is actually installed, for example, when evaluating the gas generated from the object to be evaluated in a situation where there is a heating source in the room, etc. , Can respond. That is, it is possible to verify the degassing characteristics under the same conditions as when thermal energy is actually input.

The twelfth aspect of the present invention provides the ninth to the first aspects.
The invention according to any one of the first to fifth aspects, wherein the evaluation object heating means is incorporated in the chamber itself. According to a thirteenth aspect, in the invention according to any one of the ninth to eleventh aspects, the evaluation object heating means is provided inside the chamber.

The invention according to claim 14 is the invention according to claims 9 to 1
In the invention according to any one of the first to third aspects, the chamber is made of transparent glass, and the device to be evaluated is heated by:
It is characterized by being installed outside the chamber. According to the twelfth, thirteenth, or fourteenth aspect, it is possible to obtain the operational effects of the ninth, tenth, or eleventh aspects with a simple configuration.

According to the fifteenth aspect, there is provided the ninth to the first aspects.
5. The invention according to claim 4, further comprising cooling means for cooling air in the collection chamber exhausted from the exhaust means. According to the fifteenth aspect, by cooling the air exhausted from the exhaust means, it is possible to prevent a decrease in the collection rate due to a high temperature.

According to a sixteenth aspect of the present invention, there is provided a gas evaluation method for collecting and evaluating a gas generated on the surface of an object to be evaluated, comprising: a chamber having an opening at one end and a gas collecting chamber formed therein. Air supply means for supplying clean air into the chamber, exhaust means for exhausting air in the collection chamber, flow rate of clean air supplied by the air supply means, and flow rate of air exhausted by the exhaust means. Using a gas evaluation device having a flow rate adjusting means for adjusting a flow rate, an opening end side of the chamber is disposed so as to contact a surface of the object to be evaluated, and the air supply means is provided by the flow rate adjusting means. It is characterized in that the flow rate of the clean air supplied from is adjusted so as to be larger than the flow rate of the air exhausted by the exhaust means.

According to the sixteenth aspect, the following operation can be obtained. That is, the clean air sent into the collection chamber passes near the surface of the evaluation object. At this time, in addition to the moving flow of the clean air passing near the surface of the object to be evaluated, gas is generated from the object to be evaluated due to concentration diffusion, and the gas is exhausted as air inside the chamber by the exhaust means.

According to a seventeenth aspect of the present invention, in the gas evaluation method for collecting and evaluating gas generated on the surface of the object to be evaluated, a cylindrical outer cylindrical portion having one open end and an inner side of the outer cylindrical portion are provided. A chamber in which a gas collecting chamber is formed in the inner cylinder portion, the chamber including a cylindrical inner cylinder portion having an open end on the opening side of the outer cylinder portion; Air supply means for supplying clean air to a space formed between the portion and the inner cylinder portion,
Exhaust means for exhausting air in the collection chamber, and flow rate adjusting means for adjusting the flow rate of clean air supplied by the air supply means and the flow rate of air exhausted by the exhaust means, At the open end of the cylindrical portion, using a gas evaluation device in which a ventilation portion that vents the clean air from the space between the outer cylinder portion and the inner cylinder portion to the inside of the collection chamber is formed. The chamber is arranged so that the opening end side of the cylindrical portion is in contact with the surface of the object to be evaluated, and the flow rate of the clean air supplied from the air supply means is reduced by the flow rate adjusting means. Is adjusted so as to be larger than the flow rate, and the clean air is fed into the collection chamber by supplying clean air to a space formed between the outer cylindrical portion and the inner cylindrical portion by the air supply means. Collecting by the exhaust means It is characterized by evacuating the air in the.

According to the seventeenth aspect, the following operation can be obtained. That is, the clean air sent into the collection chamber passes near the surface of the evaluation object. At this time, in addition to the moving flow of the clean air passing near the surface of the object to be evaluated, gas is generated from the object to be evaluated due to concentration diffusion, and the gas is exhausted by the exhaust means as air inside the inner cylinder.

According to a still further aspect of the present invention, there is provided a gas evaluation method for collecting and evaluating gas generated on the surface of an object to be evaluated, comprising: a cylindrical outer cylindrical portion having an open end; A chamber in which a gas collecting chamber is formed in the inner cylinder portion, the chamber including a cylindrical inner cylinder portion having an open end on the opening side of the outer cylinder portion; Air supply means for supplying clean air to a space formed between the portion and the inner cylinder portion,
Exhaust means for exhausting air in the collection chamber, and flow rate adjusting means for adjusting the flow rate of clean air supplied by the air supply means and the flow rate of air exhausted by the exhaust means, At the opening end of the cylindrical portion, using a gas evaluation device in which a ventilation portion that vents the clean air from the space between the outer cylindrical portion and the inner cylindrical portion to the inside of the collection chamber is formed, The supply of the clean air by the air supply unit and the exhaust by the exhaust unit are stopped by the adjusting unit, and the chamber is arranged so that the opening end side of the outer cylindrical portion contacts the surface of the object to be evaluated. The gas generated from the surface of the object diffuses in the collection chamber, and the gas phase in the collection chamber and the object to be evaluated are allowed to stand until a gas concentration equilibrium state is established. By supplying the clean sky The fed into the collection chamber, and wherein evacuating the air in the collection chamber by the exhaust means.

According to the eighteenth aspect of the invention, when the supply of the clean air by the air supply means and the exhaustion by the exhaust means are stopped and the apparatus is allowed to stand for a certain period of time, gas is generated from the object to be evaluated and The gas diffuses into the space, and the gas phase and the object to be evaluated are in a gas concentration equilibrium state. Thereafter, the gas in the above-mentioned concentration equilibrium state can be collected by supplying clean air by the air supply means and exhausting the air inside the inner cylinder by the exhaust means.

[0041]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.

[1. Configuration] FIG. 1 is a sectional view showing a configuration of a gas evaluation device according to an embodiment of the present invention. As shown in FIG. 1, the gas evaluation device according to the present embodiment is a chamber 1 comprising a double pipe of a substantially cylindrical outer cylinder 2 and an inner cylinder 3.
It is composed of The outer tube portion 2 and the inner tube portion 3 are made of heat-resistant glass or quartz glass, and have lower ends opened. The outer cylinder 2 has a shape in which the center of the upper surface protrudes. Further, the inner cylindrical portion 3 has a wide space S1 on the inner side, and is provided with a certain space S2 between the inner cylindrical portion 3 and the outer cylindrical portion 2.

The chamber 1 is installed so that one open end thereof is in contact with the surface of the building material 4 which is the material to be evaluated, and only the lower end of the outer cylindrical portion 2 contacts the building material 4. The lower end of the inner cylindrical portion 3 does not contact, and has a predetermined gap with respect to the building material 4. Therefore, air can move between the space S1 and the space S2 through the gap. Further, as shown in FIG. 1, the chamber 1 is arranged on the surface of the building material 4 without using a sealing material or a packing material.

An air supply pipe 6 to which an air supply valve 5 is attached is provided on a side surface of the above-mentioned protruding portion of the outer cylindrical portion 2. The air supply pipe 6 allows clean air treated with activated carbon or the like to flow through the air supply pipe 6. The air is supplied into the space S2 (arrow A). Further, an exhaust pipe 8 to which an exhaust valve 7 is attached is connected to the upper part of the inner cylinder 3, and the air in the inner cylinder 3 is exhausted by the exhaust pipe 8 (arrow B), and is shown in the drawing. Not to be supplied to the collecting material.

With this configuration, the clean air supplied from the air supply pipe 6 leaks from the outer cylinder 2 to the outside by the difference between the air supply amount and the exhaust amount (arrow C), and the amount of the exhaust air is reduced to the inner cylinder portion 3. And building materials 4
And flows into the inner cylindrical portion 3 through the gap (arrow D).

The chamber 1 is supported by jigs 10a and 10b as shown in FIG. That is, when the chamber 1 is arranged on the wall surface in the clean room, the side surface of the chamber 1 is supported by the jig 10a as shown in FIG. 2A, and when it is arranged on the ceiling, it is shown in FIG. The upper part of the chamber 1 is supported by the jig 10b as described above.

Alternatively, using an apparatus as shown in FIG.
The gas may be collected by automatic operation or the like. That is, in the apparatus shown in FIG. 3, a pump 12 for supplying clean air via the chamber 1, the air supply pipe 6, and a collecting material 13 for collecting air exhausted from the exhaust pipe 8 are provided on the cart 11. And the like, which can be moved up and down by a lift 14. Also, chamber 1
A part of the outer periphery is held by a holding member 15, and the holding member 15 is rotatably supported by a support member 17 via a shaft 16. This allows the chamber 1 to rotate in the direction of the arrow E and be directed in each direction in the clean room.

[2. Operation and Effect] Next, the operation and effect of the present embodiment having the above-described configuration will be described. Here, the chamber 1 is installed on the surface of the building material to be evaluated depending on whether the chamber 1 is supported by the jig 10a or 10b shown in FIG. 2 or the apparatus shown in FIG. 3 is moved.

[Case of Use with Dynamic Headspace Method] First, the case of use with the dynamic headspace method will be described with reference to FIG. in this case,
The intake valve 5 and the exhaust valve 7 are adjusted and opened so that the relationship between the supply amount Q0 and the exhaust amount Q1 satisfies Q0> Q1,
Vent clean air. That is, by setting the supply air amount Q0 to be larger than the exhaust air amount Q1, the clean air leaks to the outside as shown by the arrow C, thereby preventing the outside air from entering the chamber 1. Then, clean air is supplied from the air supply pipe 6 as shown by an arrow A, and clean air is supplied into the inner cylinder portion 3 as shown by an arrow D through the space S2.
The air in the space S1 containing the gas generated from the building material 4 is exhausted from the exhaust pipe 8 as shown by the arrow B. At this time, the building material 4 may be heated by a heater or the like as in the case of using the static headspace method. This heating method is the same as the static head space method described later.

After a certain period of time, the gas is collected by a collecting material (not shown). At this time, in addition to the moving flow of the clean air passing near the surface of the building material 4, gas is generated from the building material 4 due to concentration diffusion, and the air inside the inner cylinder portion 3 containing the gas is exhausted from the exhaust pipe 8.

[Case of Use with Static Headspace Method] Next, a case of use with the static headspace method will be described with reference to FIG. First, the supply valve 5 and the exhaust valve 7 are all closed, and the chamber 1 is placed on the building material 4. Then, it is allowed to stand for a certain time.
At this time, as shown in FIG.
8 may be arranged near the chamber 1 to heat the inside of the chamber 1 by radiant heat.

During this time, the gas volatilized from the surface of the building material 4 diffuses into the space S1, and after a certain period of time, the gas concentration in the building material 4 and the gas phase in the space S1 is in a state of equilibrium. Thereafter, the air supply valve 5 and the exhaust valve 7 are opened, and clean air is supplied from the air supply pipe 6 and supplied into the inner cylinder 3 through the space S2. The air in the space S1 is exhausted by the exhaust pipe 8.
From the air, and collected by a collecting material (not shown).
The supply valve 5 and the exhaust valve 7 are adjusted so that the relationship between the supply amount Q0 from the supply pipe 6 and the displacement Q1 from the exhaust pipe 8 satisfies Q0> Q1.

[Effects of the Embodiment] As described above, according to the present embodiment, it is only necessary to install the chamber 1 on the surface of the building material, and therefore, it is possible to perform the measurement at the site where the building material is actually used. . Further, since the building material can be generated in the same state as the actual gas generation state without processing by cutting or the like, accurate evaluation can be performed. Further, since a wide space S1 is formed inside the inner cylinder portion 3 and the air supply valve 5 and the exhaust valve 7 can be fully closed to prevent the ventilation with the clean air, the dynamic head Not only the space method but also the static headspace method can be used.

Therefore, in the present embodiment, both high-sensitivity analysis of low-boiling compounds and high-sensitivity analysis of high-boiling compounds can be easily performed. That is, the evaluation method can be changed depending on the type of gas to be analyzed. Further, as a method for collecting the generated gas, both a solid collecting method and a liquid collecting method can be adopted. For example, activated carbon or a porous polymer is used as an adsorbent in the solid collecting method, and pure water or the like is used in the liquid collecting method.

Further, since airtightness inside the chamber 1 is not required, there is no need to attach a sealing material or a packing material, and it is not necessary to consider the influence of gas generated from the sealing material or the packing material. In addition, according to the shape of the building material, etc., if necessary, a sealing material
It is also possible to attach a packing material or the like.

Since the chamber 1 is made of glass,
Instead of heating the building material 4 itself from the back surface, the surface of the building material 4 can be heated from outside the chamber 1.
Furthermore, the inner cylinder 3 of the same chamber 1 installed on the building material 4
By placing the wafer in the space S1 in the interior, it is possible to perform an exposure experiment of the wafer with the gas generated from the building material 4.

Further, in the present embodiment, a gas evaluation experiment can be performed by a method similar to the conventional method by installing a test body inside the inner cylindrical portion 3. That is, by cutting a part of various materials in the clean room, etc., and installing the same in the inner cylinder part 3 as a test body, and using the above-mentioned static head space method or dynamic head space method, the same as the conventional method is achieved. Sampling becomes possible.

[3. Other Embodiments] The present invention is not limited to the above-described embodiments, and various embodiments as described below are possible. That is, chamber 1
Is not limited to the shape shown in FIG. 1 and may be a cube like a chamber 21 shown in FIG. 5, for example. Also in this case, the chamber 21 includes an outer cylinder 22 and an inner cylinder 23, and a space S3 is formed inside the inner cylinder 23 to such an extent that the chamber 21 can be used according to the static headspace method. A space S4 between the outer cylinder portion 22 and the inner cylinder portion 23
Are formed.

Further, in FIGS. 1 and 5, the inner cylindrical portion 3,
Although the lower end of 23 has a shape away from the building material 4,
It is made to contact the building material 4 in the same manner as the outer cylinders 2 and 22, and a plurality of notches are provided at the lower end thereof, and the clean air from the space S2 or S4 passes through the notch and enters the space S1 or S3. It is good also as a structure which flows in.

The chamber 1 is not limited to glass, but may be metal such as stainless steel. In that case, in order to reduce the influence of adsorption of generated gas, etc., the inner surface is subjected to electrolytic polishing, quartz lining, quartz lining and passivation treatment, fused silica coating, or fused silica and inert film coating And so on. When the building material 4 is heated when the chamber 1 is made of metal instead of glass, a heater 19 is installed on the back surface of the building material 4 as shown in FIG.

In order to prevent a substance contained in the air in the chamber 1 such as a condensed gas generated from adhering to the surface, a structure as shown in FIG. 7 or FIG. 8 may be adopted. That is, as shown in FIG. 7, the heater 30 may be incorporated in the flow path in which the air in the chamber 1 moves along the inner cylinder portion 3 and the exhaust pipe 8. Alternatively, as shown in FIG. 8, a coating 31 such as a quartz lining, a quartz lining and a passivation treatment, a fused silica coating, or a fused silica and an inert film coating is applied to the surface of the inner cylindrical portion 3. Is also good.

Further, when electric wires are installed on the surface of the building material 4, the shape of the chamber 1 is made as shown in FIG. Here, FIG. 9A is a sectional view of the chamber 1,
(B) is a front view. That is, the electric wire 3 is
A notch 33 corresponding to the shape 2 is formed. At this time, it is assumed that an interval equal to or greater than the height of the electric wire 32 is provided between the inner cylindrical portion 3 and the building material 4. Then, at the time of evaluation, the chamber 1 is put on the building material 4 so that the electric wire 32 fits into the cutout 13.

Further, the chamber is not necessarily limited to the above-described structure using the double structure of the outer cylinder and the inner cylinder, and the inside of the chamber is maintained at a positive pressure by the balance between supply and exhaust, so that the chamber can be protected from the outside. Any structure can be used as long as it can prevent the intrusion of air and collect gas generated from the surface of the building material. Further, the positions of the air supply port and the exhaust port are arbitrary, and are not particularly limited.

As a method of heating the building material 4, FIG.
0 to 12 may be employed. In this case, as a heat source, an infrared lamp or a radiation panel using electromagnetic waves in the near infrared region to the infrared region having a wavelength of 10 @ -6 to 10 @ -4 m is used. In these figures, the case where the chamber 1 is single is shown, but the present invention can also be applied to the chamber 1 having the above-mentioned double tube.

Although not shown, the chamber 1 in each figure is provided with an air supply pipe, and clean air treated with an inert gas such as N 2 or He or activated carbon is
It is supplied as a carrier gas. Similarly, an exhaust pipe (not shown) is provided, and the air in the chamber 1 is exhausted and supplied to a collecting section (not shown) having a collecting material.

In the example shown in FIG. 10, a heater 40 such as a radiant panel is incorporated in or bonded to the chamber 1 itself. In FIG. 1A, a chamber 1 is arranged on the surface of a building material 4. In FIG. 2B, the end of the building material 4 is cut so as to be in close contact with the inner wall of the chamber 1, and the building material 4 is disposed inside the chamber 1.
Further, in FIG. 3C, the appropriately cut building material 4 is placed inside the chamber 1 such as a desiccator.
The cut surface 4a of the building material 4 is covered with a covering material 41 such as an aluminum foil.

In the example shown in FIG. 11, an infrared lamp 50 is installed inside the chamber 1. in this case,
The chamber 1 is made of a material that does not adsorb gas molecules, such as glass, stainless steel, or aluminum. FIG.
11A, the chamber 1 is arranged on the surface of the building material 4 in FIG. 11A, and in FIG. 11B, the building material 4 cut so as to be in close contact with the inner wall of the chamber 1 is arranged in the chamber 1. In c), the appropriately cut building material 4 is placed inside the chamber 1. In this case, a radiation panel or the like may be provided instead of the infrared lamp 50.

Further, in the example shown in FIG. 12, an infrared lamp 50 is installed outside the chamber 1. in this case,
The chamber 1 is made of glass such as heat-resistant glass or quartz glass. Also, as in the example of FIGS. 10 and 11, FIG.
In (a), the chamber 1 is arranged on the surface of the building material 4,
In (b), the building material 4 cut so as to be in close contact with the inner wall of the chamber 1 is arranged in the chamber 1, and in (c), the appropriately cut building material 4 is arranged inside the chamber 1.
In this case, a radiation panel or the like may be provided instead of the infrared lamp 50.

In each of these cases, a cooling mechanism may be provided in the collecting section (not shown) by piping or the like.
That is, the chamber 1 discharged from an exhaust pipe (not shown)
The air inside is cooled by the cooling mechanism to near normal temperature until it is collected by the collection material of the collection unit. As described above, by cooling the heated air, it is possible to prevent the collection rate of the collection material from being lowered. In addition, when the trapping characteristics based on the temperature are known in advance, the evaluation may be performed based on the trapping characteristics. Therefore, the cooling mechanism may not be provided.

With the configuration shown in FIGS. 10 to 12, the following effects can be obtained. In other words, when using a low-gas-generating building material, or even when the amount of gas generation has decreased over time with conventional building materials,
The collection time can be reduced. In addition, since infrared rays are used as a heat source, there is no influence on the diffusion of substances inside the building material unlike a method of directly inputting thermal energy, such as a hot plate being directly installed below the building material. Therefore, when verifying the degassing characteristics by temperature in consideration of the situation where building materials are actually installed, for example, when evaluating the gas generated from building materials in a situation where there is a heating source in the room, it is necessary to respond. Can be. That is, it is possible to verify the degassing characteristics under the same conditions as when thermal energy is actually input.

The present invention is not limited to the analysis and evaluation of the generated gas of the material in the clean room, but may be used for the evaluation of the generated gas such as organic substances in other facilities.

[0072]

As described above, according to the present invention, processing such as cutting of a material is unnecessary because it can be directly arranged on a material, and low-cost, on-site measurement is possible.
The gas generated from the material can be accurately evaluated in the same situation as the actual gas generation situation. Therefore, it is possible to select a building material that generates a small amount of gas, and it is possible to easily carry out a follow-up survey of the gas generation by site measurement.

Further, according to the present invention, since the chamber only needs to be disposed directly on the surface of the material, the amount of gas generated per unit area and time of the material can be easily obtained. Generally, when designing a clean room, the surface area of each material is calculated. At this time, the amount of gas generated per unit area and time of the material can be grasped as described above. Of the filter can be predicted, and the installation plan of the filter to be installed in the clean room can be easily performed.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a configuration of a gas evaluation device according to a first embodiment of the present invention.

FIG. 2 is a view showing an example of jigs 10a and 10b supporting a chamber 1 in the embodiment.

FIG. 3 is a schematic side view showing an example of the entire configuration of the gas evaluation device in the embodiment.

FIG. 4 is a diagram showing an example of use of the gas evaluation device according to the embodiment.

FIG. 5 is a cross-sectional view showing a configuration of a gas evaluation device according to another embodiment of the present invention.

FIG. 6 is a diagram showing an example of use of a gas evaluation device according to another embodiment of the present invention.

FIG. 7 is a sectional view showing a configuration of a gas evaluation device according to another embodiment of the present invention.

FIG. 8 is a sectional view showing a configuration of a gas evaluation device according to another embodiment of the present invention.

FIGS. 9A and 9B are diagrams showing a configuration of a gas evaluation device according to another embodiment of the present invention, wherein FIG. 9A is a sectional view and FIG. 9B is a front view.

10A and 10B are diagrams showing a configuration of a gas evaluation device according to another embodiment of the present invention, wherein FIG. 10A is a diagram in which a chamber 1 is arranged on the surface of a building material 4, and FIG. And (c) shows the cut building material 4 in the chamber 1
It is the figure arranged inside.

11A and 11B are diagrams showing a configuration of a gas evaluation device according to another embodiment of the present invention, wherein FIG. 11A is a diagram in which a chamber 1 is arranged on the surface of a building material 4, and FIG. And (c) shows the cut building material 4 in the chamber 1
It is the figure arranged inside.

12A and 12B are diagrams showing a configuration of a gas evaluation device according to another embodiment of the present invention, wherein FIG. 12A is a diagram in which a chamber 1 is arranged on the surface of a building material 4, and FIG. And (c) shows the cut building material 4 in the chamber 1
It is the figure arranged inside.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Chamber 2 ... Outer cylinder part 3 ... Inner cylinder part 4 ... Building material 5 ... Air supply valve 6 ... Air supply pipe 7 ... Exhaust valve 8 ... Exhaust pipe 10a, 10b ... Jig 11 ... Truck 12 ... Pump 13 ... Collection material DESCRIPTION OF SYMBOLS 14 ... Lift 15 ... Grasping member 16 ... Shaft 17 ... Support member 40 ... Heater 50 ... Infrared lamp

Claims (18)

[Claims] 1. A gas evaluation apparatus for collecting and evaluating gas generated on the surface of an object to be evaluated, comprising: a chamber having an open end and a gas collection chamber formed therein; Air supply means for supplying air; exhaust means for exhausting air in the collection chamber; flow rate for adjusting the flow rate of clean air supplied by the air supply means and the flow rate of air exhausted by the exhaust means And a gas evaluation device. 2. A gas evaluation apparatus for collecting and evaluating gas generated on the surface of an object to be evaluated, comprising: a cylindrical outer cylinder having an open end; and a coaxial direction disposed inside the outer cylinder. A cylindrical inner cylindrical portion having an open end at the opening side of the outer cylindrical portion, and a chamber in which a gas collecting chamber is formed in the inner cylindrical portion; and the outer cylindrical portion and the inner cylindrical portion. An air supply unit for supplying clean air to a space formed between the air supply unit, an exhaust unit for exhausting air in the collection chamber, a flow rate of clean air supplied by the air supply unit, and exhaustion by the exhaust unit. Flow rate adjusting means for adjusting a flow rate of air to be supplied to the inside of the collection chamber from the space between the outer cylinder and the inner cylinder at the open end of the inner cylinder. A gas evaluation device, characterized in that a vent portion is formed. 3. The air vent according to claim 2, wherein the ventilation portion is formed such that an opening end of the inner cylinder portion is located axially inward of an opening end of the outer cylinder portion. Gas evaluation device. 4. The air supply means has an air supply pipe, the exhaust means has an exhaust pipe, and the flow rate adjustment means adjusts a flow rate of clean air flowing through the air supply pipe; 4. The gas evaluation device according to claim 1, further comprising an exhaust valve for adjusting a flow rate of air flowing through the exhaust unit. 5. The gas evaluation device according to claim 1, wherein the chamber is made of transparent glass. 6. The gas evaluation device according to claim 1, wherein a heating means is incorporated in the collection chamber. 7. The gas evaluation device according to claim 2, wherein a coating is applied to a surface of the inner cylindrical portion so that a substance in the collection chamber does not adhere. 8. A trolley equipped with the chamber, the air supply means, the exhaust means, and the flow rate adjusting means, wherein the trolley is configured such that an opening side of the chamber can freely change its direction. The gas evaluation apparatus according to claim 1, further comprising: a support unit configured to support the chamber, and a lifting unit configured to support the chamber so as to be movable up and down. 9. The apparatus according to claim 1, further comprising: an object heating means for heating the object to be evaluated by using infrared rays as a heat source to promote gas generation from the object to be evaluated. 2. The gas evaluation device according to claim 1. 10. The gas evaluation apparatus according to claim 9, wherein said evaluation object heating means comprises an infrared lamp. 11. The gas evaluation apparatus according to claim 9, wherein said evaluation object heating means comprises a radiation panel. 12. The gas evaluation apparatus according to claim 9, wherein the evaluation object heating means is incorporated in the chamber itself. 13. The gas evaluation apparatus according to claim 9, wherein the evaluation object heating means is installed inside the chamber. 14. The apparatus according to claim 9, wherein the chamber is made of transparent glass, and the evaluation object heating means is provided outside the chamber. Gas evaluation device. 15. The gas evaluation device according to claim 9, further comprising a cooling unit configured to cool air in the collection chamber exhausted from the exhaust unit. 16. A gas evaluation method for collecting and evaluating gas generated on the surface of an object to be evaluated, comprising: a chamber having an open end and a gas collection chamber formed therein; Air supply means for supplying air, exhaust means for exhausting air in the collection chamber, flow rate for adjusting the flow rate of clean air supplied by the air supply means and the flow rate of air exhausted by the exhaust means Using a gas evaluation device including an adjustment unit, disposing the clean air supplied from the air supply unit by the flow rate adjustment unit by arranging the opening end side of the chamber to be in contact with the surface of the object to be evaluated. A gas flow rate adjusted by the exhaust means to be greater than a flow rate of air exhausted by the exhaust means. 17. A gas evaluation method for collecting and evaluating gas generated on the surface of an object to be evaluated, comprising: a cylindrical outer cylindrical portion having one end opened; and a coaxial direction disposed inside the outer cylindrical portion. A cylindrical inner cylinder portion having an open end at the opening side of the outer cylinder portion, a chamber in which a gas collection chamber is formed in the inner cylinder portion, and the outer cylinder portion and the inner cylinder portion. An air supply unit for supplying clean air to a space formed between the air supply unit, an exhaust unit for exhausting air in the collection chamber, a flow rate of clean air supplied by the air supply unit, and exhaustion by the exhaust unit. Flow rate adjusting means for adjusting the flow rate of air to be supplied to the inside of the collection chamber from the space between the outer cylinder and the inner cylinder at the open end of the inner cylinder. Using a gas evaluation device provided with a vent portion to be formed, the opening end side of the outer cylindrical portion is the object to be evaluated. Arranging the chamber so as to be in contact with the surface, and adjusting the flow rate adjusting means such that the flow rate of the clean air supplied from the air supply means is larger than the flow rate of the air exhausted by the exhaust means, The clean air is fed into the collection chamber by supplying clean air to a space formed between the outer cylinder and the inner cylinder by the air supply means, and the air in the collection chamber is supplied by the exhaust means. A gas evaluation method characterized by exhausting gas. 18. A gas evaluation method for collecting and evaluating gas generated on the surface of an object to be evaluated, comprising: a cylindrical outer cylindrical portion having one end opened; and a coaxial direction disposed inside the outer cylindrical portion. A cylindrical inner cylinder portion having an open end at the opening side of the outer cylinder portion, a chamber in which a gas collection chamber is formed in the inner cylinder portion, and the outer cylinder portion and the inner cylinder portion. An air supply unit for supplying clean air to a space formed between the air supply unit, an exhaust unit for exhausting air in the collection chamber, a flow rate of clean air supplied by the air supply unit, and exhaustion by the exhaust unit. Flow rate adjusting means for adjusting the flow rate of air to be supplied to the inside of the collection chamber from the space between the outer cylinder and the inner cylinder at the open end of the inner cylinder. Using a gas evaluation device provided with a ventilation part to be formed, the air supply means is controlled by the flow rate adjusting means. Supply of the clean air and exhaust by the exhaust means are stopped, and the chamber is arranged so that the opening end side of the outer cylindrical portion is in contact with the surface of the evaluation object, and the gas generated from the surface of the evaluation object Is diffused in the collection chamber, and the gas phase in the collection chamber and the object to be evaluated are allowed to stand until a gas concentration equilibrium state is reached, and then the clean air is supplied by the air supply means. A gas evaluation method, wherein air is sent into the collection chamber, and the air in the collection chamber is exhausted by the exhaust means.