JPH11309877A5 - - Google Patents
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- Publication number
- JPH11309877A5 JPH11309877A5 JP1998120385A JP12038598A JPH11309877A5 JP H11309877 A5 JPH11309877 A5 JP H11309877A5 JP 1998120385 A JP1998120385 A JP 1998120385A JP 12038598 A JP12038598 A JP 12038598A JP H11309877 A5 JPH11309877 A5 JP H11309877A5
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- pressure generating
- ink
- reservoirs
- jet recording
- generating chambers
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Description
【００１３】
【課題を解決するための手段】
本発明の第１の態様は、インクを吐出する複数のノズル開口と、該ノズル開口にそれぞれ連通して少なくとも一列に並設された圧力発生室を画成する流路形成基板と、圧力発生室内にインク吐出のための圧力を発生する圧力発生手段とを具備するインクジェット式記録ヘッドにおいて、
前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通されると共に前記複数のリザーバのそれぞれに連通するもの毎に当該圧力発生室の長手方向の位置が異なるように設けられ、前記複数の圧力発生室の長手方向の一端部近傍と前記リザーバとを連通するインク供給通路を有することを特徴とするインクジェット式記録ヘッドにある。[0013]
[Means for solving the problem]
A first aspect of the present invention is an ink jet recording head comprising: a flow path forming substrate defining a plurality of nozzle openings for ejecting ink; pressure generating chambers that are connected to the nozzle openings and arranged in at least one row; and pressure generating means that generates pressure for ejecting ink within the pressure generating chambers,
The ink jet recording head is characterized in that it comprises a plurality of reservoirs which are provided at different positions in the thickness direction of the flow path forming substrate, stacked in the surface direction, and which supply ink to the pressure generating chambers, each of the pressure generating chambers being connected to one of the plurality of reservoirs and being provided so that the longitudinal position of the pressure generating chamber differs for each of the plurality of reservoirs which are connected to each of the plurality of reservoirs, and has an ink supply passage which connects the vicinity of one longitudinal end of the plurality of pressure generating chambers to the reservoir.
【００１４】
かかる第１の態様では、圧力発生室にインクを供給するリザーバを複数に分割し且つ厚さ方向に積層して形成したことにより、各圧力発生室当たりのリザーバ体積を増大すると共に、各リザーバの厚みを抑えて当該インク供給室内の気泡排出を容易にすることができる。そして、厚さ方向で圧力発生室に近いリザーバと、長手方向の内側に端部のある圧力発生室とを連通し、厚さ方向で遠いリザーバと長手方向外側に端部のある圧力発生室とを連通することにより、互いに干渉することなくインク供給のための通路を形成できる。 [0014]
In the first aspect, by dividing the reservoir that supplies ink to the pressure generating chamber into multiple parts and stacking them in the thickness direction, the reservoir volume per pressure generating chamber can be increased and the thickness of each reservoir can be reduced, making it easier to remove air bubbles from the ink supply chamber. Furthermore, by connecting the reservoir that is closest to the pressure generating chamber in the thickness direction to the pressure generating chamber that has its end on the inside in the longitudinal direction, and by connecting the reservoir that is farther away in the thickness direction to the pressure generating chamber that has its end on the outside in the longitudinal direction, it is possible to form passages for supplying ink without mutual interference.
【００１５】
本発明の第２の態様は、インクを吐出する複数のノズル開口と、該ノズル開口にそれぞれ連通して少なくとも一列に並設された圧力発生室を画成する流路形成基板と、圧力発生室内にインク吐出のための圧力を発生する圧力発生手段とを具備するインクジェット式記録ヘッドにおいて、前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通されると共に前記複数のリザーバのそれぞれに連通するもの毎に当該圧力発生室と長手方向の位置が異なるように設けられ、前記複数の圧力発生室の長手方向の一端部近傍と前記リザーバとを連通するインク供給通路を有し、前記圧力発生室の長手方向の他端部近傍には、前記ノズル開口に連通するインク吐出通路が連通していることを特徴とするインクジェット式記録ヘッドにある。[0015]
A second aspect of the present invention is an ink jet recording head comprising a flow path forming substrate which defines a plurality of nozzle openings for ejecting ink, pressure generating chambers which are connected to the nozzle openings and arranged in at least one row, and pressure generating means which generates pressure for ejecting ink within the pressure generating chambers, the ink jet recording head further comprising a plurality of reservoirs which are provided at different positions in the thickness direction of the flow path forming substrate so as to overlap each other in the surface direction and which supply ink to the pressure generating chambers, each of the pressure generating chambers being connected to one of the plurality of reservoirs and being arranged so that each of the pressure generating chambers which is connected to each of the plurality of reservoirs is located at a different position in the longitudinal direction from the pressure generating chamber, an ink supply passage which connects the reservoir with the vicinity of one end of the plurality of pressure generating chambers in the longitudinal direction is provided, and an ink ejection passage which connects to the nozzle opening is connected to the vicinity of the other end of the pressure generating chamber in the longitudinal direction .
【００１６】
かかる第２の態様では、圧力発生室にインクを供給するリザーバを複数に分割し且つ厚さ方向に積層して形成したことにより、各圧力発生室当たりのリザーバ体積を増大すると共に、各リザーバの厚みを抑えて当該インク供給室内の気泡排出を容易にすることができる。そして、厚さ方向で圧力発生室に近いリザーバと、長手方向の内側に端部のある圧力発生室とを連通し、厚さ方向で遠いリザーバと長手方向外側に端部のある圧力発生室とを連通することにより、互いに干渉することなくインク供給のための通路を形成できる。また、各圧力発生室には、その端部に連通するインク供給通路を介してリザーバからインクが供給される。 [0016]
In the second aspect, the reservoir that supplies ink to the pressure generating chambers is divided into multiple parts and stacked in the thickness direction, thereby increasing the reservoir volume per pressure generating chamber and reducing the thickness of each reservoir, making it easier to remove air bubbles from the ink supply chamber. Furthermore, by connecting the reservoir closest to the pressure generating chamber in the thickness direction with the pressure generating chamber whose end is on the inside in the longitudinal direction, and connecting the reservoir farthest in the thickness direction with the pressure generating chamber whose end is on the outside in the longitudinal direction, ink supply passages can be formed without interfering with each other. Furthermore, ink is supplied to each pressure generating chamber from the reservoir via an ink supply passage that communicates with the end of the pressure generating chamber.
【００１７】
本発明の第３の態様は、インクを吐出する複数のノズル開口と、該ノズル開口にそれぞれ連通して少なくとも一列に並設された圧力発生室を画成する流路形成基板と、圧力発生室内にインク吐出のための圧力を発生する圧力発生手段とを具備するインクジェット式記録ヘッドにおいて、前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通され、且つ前記リザーバは二つあり、前記複数の圧力発生室は並設方向に交互に異なる前記リザーバに連通し、前記圧力発生室の長手方向の他端部近傍には、前記ノズル開口に連通するインク吐出通路が連通し、前記圧力発生室の長手方向の他端部近傍には、前記ノズル開口に連通するインク吐出通路が連通していることを特徴とするインクジェット式記録ヘッドにある。[0017]
A third aspect of the present invention is an ink jet recording head comprising a flow path forming substrate which defines a plurality of nozzle orifices for ejecting ink, pressure generating chambers which are connected to the nozzle orifices and arranged in at least one row, and pressure generating means which generates pressure for ejecting ink within the pressure generating chambers, the ink jet recording head further comprising a plurality of reservoirs which are provided at different positions in the thickness direction of the flow path forming substrate so as to overlap in the surface direction and which supply ink to the pressure generating chambers, each of the pressure generating chambers being connected to one of the plurality of reservoirs, and there are two of these reservoirs, and the plurality of pressure generating chambers are connected to different reservoirs alternately in the juxtaposition direction, an ink ejection passage which communicates with the nozzle orifices is connected to the pressure generating chambers near the other end in the longitudinal direction, and an ink ejection passage which communicates with the nozzle orifices is connected to the pressure generating chambers near the other end in the longitudinal direction .
【００１８】
かかる第３の態様では、圧力発生室にインクを供給するリザーバを複数に分割し且つ厚さ方向に積層して形成したことにより、各圧力発生室当たりのリザーバ体積を増大すると共に、各リザーバの厚みを抑えて当該インク供給室内の気泡排出を容易にすることができる。そして、隣接する圧力発生室同士は異なるリザーバからインク供給を受ける。また、各圧力発生室には、その端部に連通するインク供給通路を介してリザーバからインクが供給される。 [0018]
In the third aspect, the reservoir that supplies ink to the pressure generating chambers is divided into multiple sections and stacked in the thickness direction, thereby increasing the reservoir volume per pressure generating chamber and reducing the thickness of each reservoir, making it easier to remove air bubbles from the ink supply chamber. Adjacent pressure generating chambers receive ink from different reservoirs. Each pressure generating chamber receives ink from the reservoir via an ink supply passage that communicates with its end.
【００１９】
本発明の第４の態様は、インクを吐出する複数のノズル開口と、該ノズル開口にそれぞれ連通して少なくとも一列に並設された圧力発生室を画成する流路形成基板と、圧力発生室内にインク吐出のための圧力を発生する圧力発生手段とを具備するインクジェット式記録ヘッドにおいて、前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通されると共に、前記複数のリザーバのそれぞれは、前記流路形成基板に順次積層される異なるインク室形成基板に画成され、当該インク室形成基板に接合されて前記リザーバの厚さ方向の少なくとも一面を仕切る仕切板には、前記ノズル開口からのインク吐出の際に前記リザーバ内に発生する圧力を吸収する圧力吸収手段が設けられていることを特徴とするインクジェット式記録ヘッドにある。[0019]
A fourth aspect of the present invention is an ink jet recording head comprising a flow path forming substrate which defines a plurality of nozzle openings for ejecting ink, pressure generating chambers which are connected to the nozzle openings and arranged in at least one row, and pressure generating means which generates pressure for ejecting ink within the pressure generating chambers, the ink jet recording head further comprising a plurality of reservoirs which are provided at different positions in the thickness direction of the flow path forming substrate so as to be overlapped in the surface direction and which supply ink to the pressure generating chambers, each of the pressure generating chambers being connected to one of the plurality of reservoirs, and each of the plurality of reservoirs being defined in a different ink chamber forming substrate which is sequentially laminated on the flow path forming substrate, and a partition plate which is joined to the ink chamber forming substrate and which partitions at least one surface of the reservoirs in the thickness direction is provided with pressure absorbing means which absorbs pressure generated within the reservoirs when ink is ejected from the nozzle openings .
【００２０】
かかる第４の態様では、圧力発生室にインクを供給するリザーバを複数に分割し且つ厚さ方向に積層して形成したことにより、各圧力発生室当たりのリザーバ体積を増大すると共に、各リザーバの厚みを抑えて当該インク供給室内の気泡排出を容易にすることができる。そして、インク室形成基板を複数枚積層することにより、複数のリザーバを容易に形成することができる。また、仕切板に設けられた圧力吸収手段により、リザーバにコンプライアンスを付与して、インク滴吐出のクロストークを防止する。 [0020]
In the fourth aspect, the reservoir that supplies ink to the pressure generating chamber is divided into multiple sections and stacked in the thickness direction, thereby increasing the reservoir volume per pressure generating chamber and reducing the thickness of each reservoir, making it easier to remove air bubbles from the ink supply chamber. Furthermore, stacking multiple ink chamber forming substrates makes it easy to form multiple reservoirs. Furthermore, the pressure absorbing means provided on the partition plate provides compliance to the reservoir, preventing crosstalk in the ejection of ink droplets.
【００２１】
本発明の第５の態様は、第１〜３の何れかの態様において、前記複数のリザーバのそれぞれは、前記流路形成基板に順次積層される異なるインク室形成基板に画成されることを特徴とするインクジェット式記録ヘッドにある。[0021]
A fifth aspect of the present invention is an ink jet recording head according to any one of the first to third aspects, characterized in that each of the plurality of reservoirs is defined in a different ink chamber forming substrate which is sequentially laminated on the flow path forming substrate.
【００２５】
本発明の第６の態様は、第５の態様において、前記圧力吸収手段は、前記仕切板の前記リザーバに対応する部分の少なくとも一部に設けられ且つ他の部分の厚さよりも薄く且つ前記リザーバとは反対側に中空部を有する薄肉部であることを特徴とするインクジェット式記録ヘッドにある。[0025]
A sixth aspect of the present invention is an ink jet recording head according to the fifth aspect, characterized in that the pressure absorbing means is a thin-walled portion that is provided in at least a part of the portion of the partition plate that corresponds to the reservoir, is thinner than the thickness of other portions, and has a hollow portion on the opposite side to the reservoir.
【００２６】
かかる第６の態様では、リザーバとは反対側に中空部を有する薄肉部によりリザーバにコンプライアンスが付与される。[0026]
In the sixth aspect, compliance is imparted to the reservoir by the thin-walled portion having a hollow portion on the side opposite to the reservoir.
【００２７】
本発明の第７の態様は、第１〜６の何れかの態様において、前記圧力発生手段は、前記圧力発生室の一方面に設けられた振動板上に配設された圧電振動子であることを特徴とするインクジェット式記録ヘッドにある。[0027]
A seventh aspect of the present invention is an ink jet recording head according to any one of the first to sixth aspects, characterized in that the pressure generating means is a piezoelectric vibrator disposed on a vibration plate provided on one side of the pressure generating chamber.
【００２８】
かかる第７の態様では、各圧電振動子の駆動によりインク滴を吐出することができる。[0028]
In the seventh aspect, ink droplets can be ejected by driving each piezoelectric vibrator.
【００２９】
本発明の第８の態様は、第７の態様において、前記流路形成基板がセラミックスで形成され、前記圧電振動子の各層がグリーンシート貼付又は印刷により形成されていることを特徴とするインクジェット式記録ヘッドにある。[0029]
An eighth aspect of the present invention is the ink jet recording head of the seventh aspect, characterized in that the flow path forming substrate is made of ceramics, and each layer of the piezoelectric vibrator is formed by attaching or printing a green sheet.
【００３０】
かかる第８の態様では、グリーンシートを積層して焼成することによりヘッドを容易に製造することができる。[0030]
In the eighth aspect, the head can be easily manufactured by stacking and firing the green sheets.
【００３１】
本発明の第９の態様は、第７の態様において、前記流路形成基板がシリコン単結晶基板からなり、前記圧力発生室が異方性エッチングにより形成され、前記圧電振動子の各層が薄膜及びリソグラフィ法により形成されたものであることを特徴とするインクジェット式記録ヘッドにある。[0031]
A ninth aspect of the present invention is the ink jet recording head of the seventh aspect, characterized in that the flow path forming substrate is made of a silicon single crystal substrate, the pressure generating chambers are formed by anisotropic etching, and each layer of the piezoelectric vibrator is formed by thin film and lithography.
【００３２】
かかる第９の態様では、高密度のノズル開口を有するインクジェット式記録ヘッドを大量に且つ比較的容易に製造することができる。[0032]
In the ninth aspect, ink jet recording heads having high density nozzle openings can be mass-produced relatively easily.
【００３３】
本発明の第１０の態様は、第１〜６の何れかの態様において、前記圧力発生手段は、前記圧力発生室内に設けられた発熱素子であることを特徴とするインクジェット式記録ヘッドにある。[0033]
A tenth aspect of the present invention is the ink jet recording head according to any one of the first to sixth aspects, characterized in that the pressure generating means is a heating element provided in the pressure generating chamber.
【００３４】
かかる第１０の態様では、各発熱素子を加熱することにより、インク滴を吐出することができる。[0034]
In the tenth aspect, ink droplets can be ejected by heating each heating element.
【００３５】
本発明の第１１の態様は、第１〜１０の何れかの態様のインクジェット式記録ヘッドを具備することを特徴とするインクジェット式記録装置にある。[0035]
An eleventh aspect of the present invention is an ink-jet recording apparatus comprising the ink-jet recording head of any one of the first to tenth aspects.
【００３６】
かかる第１１の態様では、インクの流速を低下させることなくインクの流量を増加させることのできるので、高密度化、多ノズル化、高周波数駆動等により、高速、高品質印刷可能なインクジェット式記録装置が実現される。[0036]
In the eleventh aspect, the ink flow rate can be increased without reducing the ink flow velocity, and therefore an ink jet recording apparatus capable of high speed, high quality printing can be realized by increasing the density, number of nozzles, high frequency driving, etc.
Claims (11)
前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通されると共に前記複数のリザーバのそれぞれに連通するもの毎に当該圧力発生室の長手方向の位置が異なるように設けられ、前記複数の圧力発生室の長手方向の一端部近傍と前記リザーバとを連通するインク供給通路を有することを特徴とするインクジェット式記録ヘッド。An ink jet recording head comprising: a flow path forming substrate defining a plurality of nozzle openings for ejecting ink; pressure generating chambers that are connected to the nozzle openings and arranged in at least one row; and pressure generating means that generates pressure for ejecting ink within the pressure generating chambers,
an ink jet recording head comprising a plurality of reservoirs provided at different positions in the thickness direction of the flow path forming substrate, stacked in a surface direction, and supplying ink to the pressure generating chambers, each of the pressure generating chambers being connected to one of the plurality of reservoirs and being provided such that the longitudinal position of the pressure generating chamber differs for each of the plurality of reservoirs that are connected to the respective pressure generating chambers, and having an ink supply passage that connects the vicinity of one longitudinal end of the plurality of pressure generating chambers to the reservoir .
前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通されると共に前記複数のリザーバのそれぞれに連通するもの毎に当該圧力発生室と長手方向の位置が異なるように設けられ、前記複数の圧力発生室の長手方向の一端部近傍と前記リザーバとを連通するインク供給通路を有し、前記圧力発生室の長手方向の他端部近傍には、前記ノズル開口に連通するインク吐出通路が連通していることを特徴とするインクジェット式記録ヘッド。 An ink jet recording head comprising: a flow path forming substrate defining a plurality of nozzle openings for ejecting ink; pressure generating chambers that are connected to the nozzle openings and arranged in at least one row; and pressure generating means that generates pressure for ejecting ink within the pressure generating chambers,
an ink jet recording head comprising: a plurality of reservoirs provided at different positions in the thickness direction of the flow path forming substrate, stacked on top of each other in the surface direction, and supplying ink to the pressure generating chambers; each of the pressure generating chambers is connected to one of the plurality of reservoirs, and is provided so that each of the pressure generating chambers is located at a different position in the longitudinal direction from the pressure generating chamber for each of the plurality of reservoirs that communicate with the pressure generating chamber; an ink supply passage connecting the vicinity of one end of the plurality of pressure generating chambers in the longitudinal direction with the reservoir; and an ink ejection passage connecting to the nozzle opening is connected to the vicinity of the other end of the pressure generating chamber in the longitudinal direction .
前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそ れぞれは、前記複数のリザーバの何れかと連通され、且つ前記リザーバは二つあり、前記複数の圧力発生室は並設方向に交互に異なる前記リザーバに連通し、前記圧力発生室の長手方向の他端部近傍には、前記ノズル開口に連通するインク吐出通路が連通し、前記圧力発生室の長手方向の他端部近傍には、前記ノズル開口に連通するインク吐出通路が連通していることを特徴とするインクジェット式記録ヘッド。 An ink jet recording head comprising: a flow path forming substrate defining a plurality of nozzle openings for ejecting ink; pressure generating chambers that are connected to the nozzle openings and arranged in at least one row; and pressure generating means that generates pressure for ejecting ink within the pressure generating chambers,
an ink jet recording head comprising: a plurality of reservoirs provided at different positions in the thickness direction of the flow path forming substrate, stacked in a surface direction, and supplying ink to the pressure generating chambers; each of the pressure generating chambers communicating with one of the plurality of reservoirs, and there are two of the reservoirs; the plurality of pressure generating chambers communicating with different reservoirs alternately in the juxtaposition direction; an ink ejection passage communicating with the nozzle opening communicates with the pressure generating chamber near the other end in the longitudinal direction; and an ink ejection passage communicating with the nozzle opening communicates with the pressure generating chamber near the other end in the longitudinal direction .
前記流路形成基板の厚さ方向の異なる位置に面方向に重なって設けられ且つ前記圧力発生室にインク供給を行う複数のリザーバを具備し、前記圧力発生室のそれぞれは、前記複数のリザーバの何れかと連通されると共に、前記複数のリザーバのそれぞれは、前記流路形成基板に順次積層される異なるインク室形成基板に画成され、当該インク室形成基板に接合されて前記リザーバの厚さ方向の少なくとも一面を仕切る仕切板には、前記ノズル開口からのインク吐出の際に前記リザーバ内に発生する圧力を吸収する圧力吸収手段が設けられていることを特徴とするインクジェット式記録ヘッド。an ink-jet recording head comprising a plurality of reservoirs provided in a plane stacked on top of each other at different positions in the thickness direction of the flow path forming substrate and supplying ink to the pressure generating chambers, each of the pressure generating chambers being connected to one of the plurality of reservoirs, each of the plurality of reservoirs being defined in a different ink chamber forming substrate that is sequentially stacked on the flow path forming substrate, and a partition plate that is joined to the ink chamber forming substrate and partitions at least one surface of the reservoirs in the thickness direction is provided with pressure absorbing means that absorbs pressure generated in the reservoirs when ink is ejected from the nozzle openings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12038598A JPH11309877A (en) | 1998-04-30 | 1998-04-30 | Ink jet recording head and ink jet recording apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12038598A JPH11309877A (en) | 1998-04-30 | 1998-04-30 | Ink jet recording head and ink jet recording apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11309877A JPH11309877A (en) | 1999-11-09 |
| JPH11309877A5 true JPH11309877A5 (en) | 2004-07-22 |
Family
ID=14784911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12038598A Withdrawn JPH11309877A (en) | 1998-04-30 | 1998-04-30 | Ink jet recording head and ink jet recording apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11309877A (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4748833B2 (en) * | 2000-06-22 | 2011-08-17 | パナソニック株式会社 | Ink jet head and ink jet recording apparatus |
| US6969146B2 (en) * | 2004-01-10 | 2005-11-29 | Xerox Corporation | Drop generating apparatus |
| JP4320596B2 (en) * | 2004-01-26 | 2009-08-26 | ブラザー工業株式会社 | Inkjet head |
| US7712885B2 (en) | 2005-10-31 | 2010-05-11 | Brother Kogyo Kabushiki Kaisha | Liquid-droplet jetting apparatus |
| JP5040263B2 (en) * | 2005-10-31 | 2012-10-03 | ブラザー工業株式会社 | Droplet ejector |
| JP4947259B2 (en) * | 2005-11-04 | 2012-06-06 | ブラザー工業株式会社 | Inkjet head |
| JP5738608B2 (en) * | 2011-01-26 | 2015-06-24 | 京セラ株式会社 | Ink jet head and recording apparatus |
| JP5782878B2 (en) | 2011-07-12 | 2015-09-24 | セイコーエプソン株式会社 | Liquid ejecting head and liquid ejecting apparatus |
| JP5962913B2 (en) | 2012-09-26 | 2016-08-03 | セイコーエプソン株式会社 | Liquid ejecting head and liquid ejecting apparatus |
| JP6024492B2 (en) * | 2013-02-01 | 2016-11-16 | セイコーエプソン株式会社 | Liquid ejecting head, liquid ejecting apparatus, and method of manufacturing liquid ejecting head |
| JP6152915B2 (en) * | 2016-06-27 | 2017-06-28 | セイコーエプソン株式会社 | Liquid ejecting head and liquid ejecting apparatus |
| JP7159847B2 (en) | 2018-12-20 | 2022-10-25 | セイコーエプソン株式会社 | Liquid ejection head and liquid ejection device |
-
1998
- 1998-04-30 JP JP12038598A patent/JPH11309877A/en not_active Withdrawn
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