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JPH11293408A - Iron-nickel series alloy thin sheet for electronic parts - Google Patents

Iron-nickel series alloy thin sheet for electronic parts

Info

Publication number
JPH11293408A
JPH11293408A JP10281298A JP10281298A JPH11293408A JP H11293408 A JPH11293408 A JP H11293408A JP 10281298 A JP10281298 A JP 10281298A JP 10281298 A JP10281298 A JP 10281298A JP H11293408 A JPH11293408 A JP H11293408A
Authority
JP
Japan
Prior art keywords
compound
less
alloy thin
present
press punching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10281298A
Other languages
Japanese (ja)
Inventor
Takeshi Hirabayashi
武 平林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP10281298A priority Critical patent/JPH11293408A/en
Publication of JPH11293408A publication Critical patent/JPH11293408A/en
Pending legal-status Critical Current

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  • Lead Frames For Integrated Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain an Fe-Ni series alloy thin sheet for electronic parts excellent in press punchability. SOLUTION: This alloy thin sheet is the one having a compsn. contg., by weight, 30 to 55% Ni (or 27 to 52% Ni, <=22% Co and 30%<=Ni+Co<=55%), <=0.02% C, <=1.5% Mn, <=0.3% Si, 0.03 to 0.5% Zr, and the balance substantially Fe with impurities, and in which Zr compds. of >=0.5 μm longest size are contained by 10,000 to 500000 pieces per mm<2> of the cross section perallel to the rolling direction and the thickness direction.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、プレス打抜き加工
性に優れ、リードフレーム等の電子部品材料として使用
するのに適したFe−Ni系合金薄板に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe-Ni alloy thin plate having excellent press punching workability and suitable for use as a material for electronic parts such as lead frames.

【0002】[0002]

【従来の技術】低熱膨張特性を持ち、加工性、耐食性に
優れるFe−Ni系合金は、電子部品用材料として広く
使用されている。例えば集積回路用素子のリードフレー
ムにはFe−42Ni(42合金)、Fe−29Ni−
17Co(コバール)が、また特に低熱膨張特性を利用
する部材にはFe−36Ni(インバー)、Fe−31
Ni−5Co(スーパーインバー)等のFe−Ni系合
金が使用されている。
2. Description of the Related Art Fe-Ni alloys having low thermal expansion characteristics and excellent workability and corrosion resistance are widely used as materials for electronic components. For example, Fe-42Ni (42 alloy), Fe-29Ni-
17Co (Kovar), and in particular, Fe-36Ni (Invar), Fe-31
An Fe-Ni-based alloy such as Ni-5Co (Super Invar) is used.

【0003】上述したようなFe−Ni系合金を電子部
品用途に適用する場合において、電子部品用Fe―Ni
系合金には、例えばプレス打抜き加工やフォトエッチン
グ加工によって微細な加工が施され、例えばリードフレ
ームにおいては、半導体装置の高集積化に伴う加工形状
の微細化、高精度化がいっそう強く求められている。
[0003] When the above-mentioned Fe-Ni alloy is applied to electronic parts, Fe-Ni alloys for electronic parts are used.
The system alloy is subjected to fine processing by, for example, press punching or photo-etching.For example, in the case of a lead frame, the finer processing shape and higher precision associated with the higher integration of semiconductor devices are more strongly required. I have.

【0004】[0004]

【発明が解決しようとする課題】Fe―Ni系合金にこ
のような微細なプレス打抜き加工を施す際に、材料の破
断性が劣ることに起因するバリやだれが発生する。従っ
て、薄板化した場合にはプレス打抜きにおける加工精度
を維持することが困難であった。このため電子部品用F
e−Ni系合金薄板に対して、従来の材料よりもプレス
打抜き加工精度に優れた材料が強く求められている。
When such a fine press punching process is performed on an Fe—Ni alloy, burrs or drooling are generated due to poor rupture properties of the material. Therefore, when the thickness is reduced, it is difficult to maintain the processing accuracy in press punching. For this reason, F
For e-Ni-based alloy thin plates, there is a strong demand for materials that are more excellent in press punching accuracy than conventional materials.

【0005】このような要求に対し、Fe−Ni系合金
薄板のプレス打抜き加工性の改良について多くの提案が
なされている。
[0005] In response to such demands, many proposals have been made on the improvement of press punching workability of Fe-Ni alloy thin plates.

【0006】Fe−Ni系合金のプレス打抜き性の改善
については、酸化物、炭化物、窒化物、硫化物等の非金
属介在物を分散分布させる提案(特公昭64−1109
8)、Sを含有させて硫化物を分散させる提案(特開昭
60−255954号)、Nbを添加して炭化物、窒化
物系の析出物を主として含有させる提案(特開平9−2
63891号)等がある。しかし、硫化物や酸化物は表
面欠陥やめっき不良の原因となるため、電子部品材料と
して使用するのに必ずしも好ましくない。また炭化物や
窒化物は非常に硬いため、プレス打抜き加工時に金型の
摩耗、破損が多くなる。
[0006] To improve the press punching property of Fe-Ni alloys, a proposal is made to disperse and distribute non-metallic inclusions such as oxides, carbides, nitrides and sulfides (Japanese Patent Publication No. 64-1109).
8), a proposal to disperse sulfide by containing S (Japanese Patent Application Laid-Open No. 60-255954), and a proposal to add Nb to mainly contain carbide and nitride-based precipitates (Japanese Patent Application Laid-Open No. 9-2).
No. 63891). However, sulfides and oxides cause surface defects and poor plating, and are not always preferable for use as electronic component materials. In addition, since carbides and nitrides are very hard, abrasion and breakage of the die during press punching are increased.

【0007】本発明は以上の点に鑑み、めっき性、低熱
膨張特性、その他要求される特性を害することなく、良
好なプレス打抜き性を備えた電子部品用Fe−Ni系合
金薄板を提供することを目的とする。
SUMMARY OF THE INVENTION In view of the above, the present invention provides an Fe-Ni alloy thin plate for electronic parts having good press punching properties without impairing plating properties, low thermal expansion properties, and other required properties. With the goal.

【0008】[0008]

【課題を解決するための手段】まず本発明者は、素材の
プレス打抜き加工性に及ぼす各種要因について調査を行
った。その結果、素地に含有した介在物や析出物は、そ
こが剪断加工時のクラック発生や伝播の起点となること
がわかった。従って、このような介在物や析出物を多く
含む材料は、剪断加工時にクラックが多く発生するの
で、素材の塑性変形が大きくなる前に破断が起こり、バ
リやだれを抑制することができ、良好なプレス打抜き性
が得られることがわかった。
First, the present inventor investigated various factors affecting the press punching workability of a material. As a result, it was found that inclusions and precipitates contained in the base material became a starting point of crack generation and propagation during shearing. Therefore, a material containing a large amount of such inclusions and precipitates has a large number of cracks during the shearing process, so that a break occurs before the plastic deformation of the material becomes large, and it is possible to suppress burrs and dripping, which is favorable. It was found that excellent press punching property was obtained.

【0009】しかし、前記のようにAl23やMnS等
の非金属介在物は、あまり多量に含有させると表面欠陥
やめっき不良の原因となり、電子部品材料としては好ま
しくない。
[0009] However, Al 2 O 3 and non-metallic inclusion such as MnS as described above are less cause a large amount the inclusion surface defects and defective plating, not preferable as materials for electronic components.

【0010】本発明者は、様々な介在物、析出物、晶出
物について、その形態を調査した。その結果、Fe−N
i合金にZrを添加した材料で析出あるいは晶出させる
ことができるZr化合物が、材料の破断性を高めるのに
形状、大きさとも最適な形態をとることがわかった。ま
た、Zr化合物はめっき性、低熱膨張特性等、電子部品
材料として必要な他の特性を殆ど害することが無いこと
を確認した。すなわち、Zr化合物を含有させること
で、他の特性を損なうこと無くプレス打抜き加工性が大
きく改善されるという効果を見出し、本発明に至った。
[0010] The present inventors have investigated the morphology of various inclusions, precipitates and crystallization. As a result, Fe-N
It has been found that a Zr compound that can be precipitated or crystallized from a material obtained by adding Zr to an i-alloy takes an optimal shape in both shape and size to enhance the breakability of the material. In addition, it was confirmed that the Zr compound hardly impaired other properties required as electronic component materials, such as plating properties and low thermal expansion properties. That is, the inventor has found that by including a Zr compound, the effect of significantly improving press punching workability without impairing other properties has been achieved, and the present invention has been achieved.

【0011】具体的には本発明は、重量%にて、Ni:
30〜55%(またはNi:27〜52%、Co22%
以下で、30%≦Co+Ni≦55%)、C:0.02
%以下、Mn:1.5%以下、Si:0.3%以下、Z
r:0.03〜0.5%、残部は不純物を除き実質的に
Feである組成を有し、最長径0.5μm以上のZr化
合物を、圧延方向および厚さ方向に平行な断面1平方ミ
リメートル当たり10000個〜500000個含有す
ることを特徴とする電子部品用Fe−Ni系合金薄板で
ある。
Specifically, the present invention relates to a method for preparing Ni:
30-55% (or Ni: 27-52%, Co22%
Below, 30% ≦ Co + Ni ≦ 55%), C: 0.02
%, Mn: 1.5% or less, Si: 0.3% or less, Z
r: 0.03 to 0.5%, with the balance being substantially Fe, excluding impurities, and a Zr compound having a longest diameter of 0.5 μm or more and a square of 1 square section parallel to the rolling direction and the thickness direction. It is a Fe-Ni-based alloy thin plate for an electronic component, which contains 10,000 to 500,000 pieces per millimeter.

【0012】本発明中のZr化合物とは、化合物粒子の
X線分析等によって定量される組成において、Zrが重
量%で20%以上であるものを指す。具体的にはZrと
Ni、Fe、Si等との化合物を主とするものであり、
多く含むと金型摩耗や表面欠陥の原因となる炭化物、窒
化物、炭窒化物、酸化物、硫化物は本発明のZr化合物
には含めない。但し炭化物、窒化物、炭窒化物、酸化
物、硫化物は、金型摩耗や表面欠陥への影響が少ない範
囲、すなわち最長径0.5μm以上の全化合物粒子数の
約2%まで、また粒径約5μmまでであれば、含有する
ことは構わない。本発明のZr化合物は鋼塊溶製時の冷
却条件を制御して生成させた晶出物、熱間加工後や冷間
加工工程の前または途中での析出熱処理によって生成さ
せた析出物のいずれをも指す。Zr化合物の個数や大き
さの調整は、これらの製造条件を制御することによって
達成される。例えば、溶融状態からの冷却において、凝
固開始から凝固完了を経て1100℃まで温度が低下す
るまでの平均冷却速度を4℃/以上となるように冷却条
件を制御することで、晶出物の均一分散が起こり、本発
明で規定した数量のZr化合物を含む材料が得られる。
The Zr compound in the present invention means a compound having a composition determined by X-ray analysis or the like of compound particles, wherein Zr is 20% or more by weight%. Specifically, it is mainly composed of a compound of Zr and Ni, Fe, Si or the like,
Carbides, nitrides, carbonitrides, oxides and sulfides which cause mold wear and surface defects when contained in large amounts are not included in the Zr compound of the present invention. However, carbides, nitrides, carbonitrides, oxides and sulfides are in a range that has little effect on mold wear and surface defects, that is, up to about 2% of the total number of compound particles having a longest diameter of 0.5 μm or more. It may be contained up to a diameter of about 5 μm. The Zr compound of the present invention may be any of a crystallized substance generated by controlling cooling conditions during ingot melting and a precipitate generated by a precipitation heat treatment after hot working or before or during a cold working step. Also refers to. Adjustment of the number and size of the Zr compound is achieved by controlling these manufacturing conditions. For example, in the cooling from the molten state, by controlling the cooling conditions such that the average cooling rate from the start of solidification to the completion of solidification until the temperature is reduced to 1100 ° C. becomes 4 ° C./or more, the uniformity of the crystallized product is obtained. Dispersion occurs, and a material containing the number of Zr compounds specified in the present invention is obtained.

【0013】[0013]

【発明の実施の形態】本発明の最大の特徴は、組織中に
Zr化合物を含有していることである。本発明材料に含
有されるZr化合物は、その形態や析出による材料の硬
化量からビッカース硬さ600HV以下と推察され、2
000HV以上もある炭化物や窒化物のように硬くはな
いので、プレス金型の摩耗が少ない。さらに、酸化物や
硫化物と異なり、めっき性の劣化も起こり難い。また低
熱膨張特性、曲げ加工性も殆ど劣化させない。そして、
粒子の粒径や分布が均一であるので、プレス打抜き加工
を施した場合に、この粒子が破断の起点となり、バリの
小さい極めて滑らかな破断面となる。
BEST MODE FOR CARRYING OUT THE INVENTION The greatest feature of the present invention is that a tissue contains a Zr compound. The Zr compound contained in the material of the present invention is assumed to have a Vickers hardness of 600 HV or less from the form and the hardening amount of the material due to precipitation.
Since it is not as hard as carbides and nitrides of 000 HV or more, wear of the press die is small. Further, unlike oxides and sulfides, plating properties are unlikely to deteriorate. In addition, low thermal expansion characteristics and bending workability hardly deteriorate. And
Since the particle size and distribution of the particles are uniform, when subjected to press punching, the particles serve as a starting point of fracture, resulting in an extremely smooth fracture surface with little burr.

【0014】以下に本発明の数値限定理由を述べる。Z
r化合物は、最長径が0.5μm未満ではプレス打抜き
加工性の向上の効果が小さい。本発明でZr化合物の大
きさを最長径で示したのは、Zr化合物は通常線状ある
いは板状の形態をしており、断面で観察したとき、大き
さを容易に表わすことができるからである。本発明にお
ける最長径とは、圧延方向および板厚方向に平行な断面
において観察される析出物または晶出物の、外接円の直
径の長さを表わす。最長径0.5μm未満のような小さ
な粒子は、剪断時の断面に現れ難いのでプレス打抜き加
工時の応力集中源となり難く、したがって破断の起点と
なり難い。このため、Zr化合物は、最長径が0.5μ
m以上であるものが有効である。
The reasons for limiting the numerical values of the present invention will be described below. Z
When the longest diameter of the r compound is less than 0.5 μm, the effect of improving press punching workability is small. The reason why the size of the Zr compound is indicated by the longest diameter in the present invention is that the Zr compound usually has a linear or plate-like shape, and when observed in a cross section, the size can be easily represented. is there. The longest diameter in the present invention refers to the length of the diameter of a circumcircle of a precipitate or a crystallized substance observed in a cross section parallel to the rolling direction and the thickness direction. Small particles having a longest diameter of less than 0.5 μm are unlikely to appear on the cross section at the time of shearing, so that they are less likely to be a source of stress concentration at the time of press punching, and are therefore less likely to be starting points of fracture. For this reason, the longest diameter of the Zr compound is 0.5 μm.
Those having m or more are effective.

【0015】また、最長径が0.5μm以上であるZr
化合物の含有量は、単位断面積あたりの個数を適当な範
囲内にする必要がある。化合物の粒子が10000個よ
り少ないと、プレス打抜き加工時の破断の起点が少ない
ため、バリの抑制が不十分となり、良好な微細加工性が
得られない。また500000個を越えると、めっき性
の劣化が起こる。具体的にはZr化合物は、薄板の圧延
方向および板厚方向に平行な断面上で、1平方ミリメー
トル当たり10000個〜500000個含有させる必
要がある。観察する断面を薄板の圧延方向および板厚方
向に平行な断面としたのは、この方向の断面に現われる
Zr化合物数が最も少なく、すなわちこの方向で前記の
個数の規定を満足していれば全ての方向の断面で良好な
微細加工性を保証できるためである。
Further, the Zr having a longest diameter of 0.5 μm or more is used.
It is necessary that the content of the compound is set so that the number per unit sectional area is within an appropriate range. If the number of particles of the compound is less than 10,000, the starting point of fracture during press punching is small, so that suppression of burrs becomes insufficient and good fine workability cannot be obtained. If the number exceeds 500,000, the plating property deteriorates. Specifically, it is necessary to contain 10,000 to 500,000 Zr compounds per square millimeter on a cross section parallel to the rolling direction and the thickness direction of the thin plate. The cross section to be observed was set to be a cross section parallel to the rolling direction and the thickness direction of the thin plate. The number of Zr compounds appearing in the cross section in this direction was the smallest, that is, if the above number was satisfied in this direction, all This is because good fine workability can be guaranteed in the cross section in the direction of.

【0016】Zrは、Fe−Ni系合金に前述した効果
を持つZr化合物を含有させるために必須であり、本発
明において最も重要な元素である。Zrの含有量は、
0.03%以下ではZr化合物の含有量が不十分となる
ためプレス打抜き性の向上効果は小さい。また0.5%
を超えると表面酸化が起こり易くなるため、めっき性が
劣化し、電子部品材料として不適となる。このため、Z
rの含有量は0.03〜0.5%に規定する。より望ま
しい範囲は0.1〜0.35%である。
Zr is indispensable for containing a Zr compound having the above-mentioned effect in the Fe—Ni alloy and is the most important element in the present invention. The content of Zr is
If the content is less than 0.03%, the content of the Zr compound becomes insufficient, so that the effect of improving the press punching property is small. 0.5%
If it exceeds 300, surface oxidation is likely to occur, so that the plating property is degraded and becomes unsuitable as an electronic component material. For this reason, Z
The content of r is regulated to 0.03 to 0.5%. A more desirable range is 0.1 to 0.35%.

【0017】Cは、0.02%を超えると、粒径5μm
を越えるような大きなZr炭化物が多く発生し本発明に
おけるZr化合物の生成を阻害するとともに、プレス打
抜き時の金型摩耗量が大きくなる。このためCは0.0
2%以下に規定する。0.01%以下であればより望ま
しい。このC量の制御によって炭化物の発生は殆ど無く
すことができ、一部発生しても粒径は5μm未満と小さ
く、粒径0.5μm以上の炭化物の個数は1平方ミリメ
ートル当たり500個以下と少ないため、金型寿命の劣
化は殆ど無い。
When the content of C exceeds 0.02%, the particle size is 5 μm.
A large amount of large Zr carbides exceeding the above range inhibits the formation of the Zr compound in the present invention, and increases the wear of the die during press punching. Therefore, C is 0.0
It is regulated to 2% or less. It is more desirable that the content be 0.01% or less. By controlling the amount of carbon, the generation of carbides can be almost eliminated, and even if a part of them is generated, the particle size is as small as less than 5 μm, and the number of carbides with a particle size of 0.5 μm or more is as small as 500 or less per square millimeter. Therefore, there is almost no deterioration of the mold life.

【0018】Siは脱酸剤として使用するが、Zrを添
加した場合には、0.3%を超えると、表面に濃化して
酸化層を生成し、めっき性を劣化させるので、0.3%
以下に規定する。Siは0.1%以下であればより望ま
しい。
Although Si is used as a deoxidizing agent, when Zr is added, if it exceeds 0.3%, it is concentrated on the surface to form an oxidized layer and deteriorate the plating property. %
It is specified below. More preferably, Si is 0.1% or less.

【0019】すなわち、Zr化合物を含有させ、C、S
i等の量を制御することによって、表面性状、めっき
性、低熱膨張特性、プレス金型寿命のいずれをも殆ど劣
化させることなく、プレス打抜き加工性の向上を達成で
きる。
That is, a Zr compound is contained, and C, S
By controlling the amount of i, etc., it is possible to achieve an improvement in press punching workability without substantially deteriorating any of the surface properties, plating properties, low thermal expansion characteristics, and press die life.

【0020】Mnは脱酸剤として使用するが、1.5%
を超えると熱膨張係数を増大させ、まためっき性を劣化
させるので、1.5%以下に規定する。Mnは0.5%
以下であればより望ましい。
Mn is used as a deoxidizing agent.
Exceeds 1.5%, the coefficient of thermal expansion is increased and the plating property is deteriorated. Mn is 0.5%
The following is more desirable.

【0021】Niの含有量は、その材料を用いて製造さ
れる電子部品の熱膨張係数を調整するものであり、その
36%付近で熱膨張係数を極小化する。しかし30%未
満または55%を超えると熱膨張係数が大きくなり過
ぎ、電子部品材料として不適となる。このため、Niの
含有量は30〜55%に規定する。
The content of Ni adjusts the coefficient of thermal expansion of an electronic component manufactured using the material, and minimizes the coefficient of thermal expansion near 36% of the electronic component. However, if it is less than 30% or more than 55%, the coefficient of thermal expansion becomes too large, making it unsuitable as an electronic component material. Therefore, the content of Ni is specified to be 30 to 55%.

【0022】Coは本発明では必須ではないが、その約
17%または約5%をNiと置換することによって熱膨
張係数を極小化するので、特に低熱膨張が要求される場
合には有効である。しかし22%を超えると熱膨張係数
が大きくなり過ぎ、電子部品材料として不適となる。こ
のため、Coを含有する場合、その含有量は22%以下
に規定する。Coを含有する場合は、熱膨張係数の点か
ら、Niはその一部をCoに置換できるので、Ni含有
量は27〜52%に規定する。また熱膨張係数はCoと
Niの含有量の合計によって決定されるので、CoとN
iの含有量は、30%≦Co+Ni≦55%に規定す
る。
Although Co is not essential in the present invention, its coefficient of thermal expansion is minimized by substituting about 17% or about 5% thereof with Ni, so that it is effective especially when low thermal expansion is required. . However, if it exceeds 22%, the coefficient of thermal expansion becomes too large, which makes it unsuitable as a material for electronic parts. Therefore, when Co is contained, its content is specified to be 22% or less. When Co is contained, Ni can be partially replaced with Co from the viewpoint of the coefficient of thermal expansion, so the Ni content is specified to be 27 to 52%. Also, since the coefficient of thermal expansion is determined by the total content of Co and Ni, Co and N
The content of i is defined as 30% ≦ Co + Ni ≦ 55%.

【0023】その他、S、O、Nはそれぞれ硫化物、酸
化物、窒化物をつくってめっき性またはプレス金型寿命
を劣化させるので、それぞれ0.005%以下に抑える
ことが望ましい。
In addition, S, O, and N form sulfides, oxides, and nitrides, respectively, and deteriorate the plating property or the life of the press die.

【0024】上述した方法により、他の特性を損なわず
にプレス打抜き加工性の極めて優れたFe−Ni系合金
薄板を得ることができる。
According to the above-described method, it is possible to obtain an Fe—Ni-based alloy sheet having extremely excellent press punching workability without impairing other characteristics.

【0025】[0025]

【実施例】以下、本発明を実施例により説明する。表1
に示す組成の合金を真空高周波誘導炉にて溶解、鋳造し
た後、鍛造と熱間圧延で厚さ4mmとし、表面のスケー
ル除去により厚さ3.5mmとした。さらに、冷間圧延
と軟化焼鈍を繰り返し、一部の試料には固溶化処理と時
効処理を施し、最終的に厚さ0.2mmの板材とした。
The present invention will be described below with reference to examples. Table 1
Was melted and cast in a vacuum high-frequency induction furnace and then forged and hot-rolled to a thickness of 4 mm, and the surface was scale-removed to a thickness of 3.5 mm. Further, cold rolling and soft annealing were repeated, and a part of the sample was subjected to a solution treatment and an aging treatment to finally obtain a sheet material having a thickness of 0.2 mm.

【0026】[0026]

【表1】 [Table 1]

【0027】これらのFe−Ni系合金薄板に含有され
るZr化合物の粒径および密度を以下の方法で測定し
た。すなわち、倍率5000倍の電子顕微鏡にて30視
野を観察し、確認された最長径0.5μm以上のZr化
合物の個数を1平方ミリメートル当たりに換算した個数
によって、本発明材料および比較材料を区別した。
The particle size and density of the Zr compound contained in these Fe—Ni alloy thin plates were measured by the following methods. That is, the material of the present invention and the comparative material were distinguished by observing 30 visual fields with an electron microscope having a magnification of 5000 times and converting the number of confirmed Zr compounds having a longest diameter of 0.5 μm or more per square millimeter. .

【0028】表2には、所定の大きさのZr化合物の個
数の他、本発明の効果を評価する項目として、粒径5μ
m以上の炭化物の有無、表面欠陥の有無、めっき性、プ
レス打抜き加工時のバリ高さを示した。
Table 2 shows, in addition to the number of Zr compounds having a predetermined size, items for evaluating the effect of the present invention, a particle diameter of 5 μm.
m, the presence or absence of carbides, the presence or absence of surface defects, the plating properties, and the burr height during press punching.

【0029】[0029]

【表2】 [Table 2]

【0030】5μm以上の炭化物の有無は、Zr化合物
数と同様に倍率5000倍の電子顕微鏡で30視野を観
察し、1個以上存在するものを有で示した。表面欠陥の
有無は板材の表裏5平方センチメートルを光学顕微鏡で
観察し、欠陥が確認されなかったものを無で示した。め
っき性は脱脂、酸処理後、厚さ0.5μmのCuストラ
イクめっきを施し、その上に厚さ3μmのAgめっきを
施した後、450℃で5分間大気中で加熱し、めっき膨
れの無いものを○、膨れの生じたものを×で評価した。
プレス打抜き加工時のバリは、金型のクリアランスを1
0μmに設定して直径1mmの円形孔を打抜いた部分の
バリの高さを測定した。
The presence or absence of carbides having a size of 5 μm or more was determined by observing 30 visual fields with an electron microscope with a magnification of 5000 times in the same manner as the number of Zr compounds, and the presence of one or more carbides was indicated. The presence or absence of surface defects was determined by observing the front and back surfaces of the plate material by 5 cm square using an optical microscope, and showing no defects without any defects. Plating properties: After degreasing and acid treatment, apply 0.5 μm thick Cu strike plating, then apply 3 μm thick Ag plating, and then heat at 450 ° C. for 5 minutes in air to prevent plating swelling The product was evaluated as ○, and the product with swelling was evaluated as ×.
Burrs at the time of press punching, the clearance of the mold 1
The height of the burr was measured at a portion where a circular hole having a diameter of 1 mm was punched by setting to 0 μm.

【0031】表1において、記号(A〜G)が本発明対
象合金、(H〜N)が比較合金である。表中において、
(A〜C)はそれぞれインバー、コバールおよび42合
金に、Zr化合物を含有させたものである。(C〜G)
および(K)、(L)は、42合金へのZrの含有量を
変えたものである。また、(H、I、J)は一般に用い
られるインバー、コバール、42合金であり、Zr化合
物を含有していない。比較材料(H、I、J)はZrを
含有しないか、あるいは含有量が少ないため、粒径0.
5μm以上のZr化合物を含有していない。
In Table 1, symbols (A to G) are alloys of the present invention, and (H to N) are comparative alloys. In the table,
(A to C) are obtained by adding a Zr compound to Invar, Kovar, and 42 alloy, respectively. (CG)
In addition, (K) and (L) are obtained by changing the content of Zr in the 42 alloy. (H, I, J) are commonly used Invar, Kovar, and 42 alloys and do not contain a Zr compound. The comparative materials (H, I, J) do not contain Zr or contain a small amount of Zr, so that the particle size is not larger than 0.1%.
Does not contain a Zr compound of 5 μm or more.

【0032】表中において、粒径0.5μm以上のZr
化合物を含有した本発明材料(A〜G)はいずれも、含
有しない比較材料(H、I、J)に比べてプレス打抜き
加工時のバリが極めて小さい。例えば通常のインバー
(H)に比較して、所定量のZr化合物を含有した
(A)のバリの高さは半分以下である。(B’、D’、
F’)はそれぞれ(B、D、F)に固溶化処理および析
出処理を施したものであるが、いずれも所定の大きさの
Zr化合物が極めて多くなり、バリがさらに改善されて
いる。(K)はZrの含有量が本発明の規定より少な
く、所定量のZr化合物を含有していない。このため、
バリの改善が不十分である。逆に(L)はZrの含有量
が本発明の規定より多いため、めっき性が劣化してい
る。(M)はSiの含有量が本発明の規定より高いた
め、めっき性が劣化している。(N)はCが本発明の規
定より高いため、直径5μm以上の炭化物が発生してお
り、プレス金型寿命の劣化が必至である。
In the table, Zr having a particle size of 0.5 μm or more
Each of the materials (A to G) of the present invention containing a compound has extremely small burrs at the time of press punching as compared with the comparative materials (H, I, J) not containing the compound. For example, the height of the burr of (A) containing a predetermined amount of the Zr compound is less than half that of the usual invar (H). (B ', D',
F ′) is obtained by subjecting (B, D, F) to a solution treatment and a precipitation treatment, respectively. In each case, the amount of the Zr compound having a predetermined size becomes extremely large, and burrs are further improved. (K) does not contain a predetermined amount of a Zr compound because the content of Zr is lower than the content of the present invention. For this reason,
Burr improvement is insufficient. Conversely, in (L), since the content of Zr is larger than that specified in the present invention, the plating property is deteriorated. (M) has poorer plating properties because the content of Si is higher than the specification of the present invention. In (N), since C is higher than the specification of the present invention, carbide having a diameter of 5 μm or more is generated, and the life of the press die is inevitably deteriorated.

【0033】本発明材料はいずれも従来材料と同等の良
好な表面性状、めっき性、低熱膨張特性を示すことか
ら、Zr化合物を含有させ、C、Siを制御することに
よって、これらの基本特性を損なうことなくプレス打抜
き性の向上を達成することが判る。
Since all of the materials of the present invention show good surface properties, plating properties and low thermal expansion properties equivalent to those of conventional materials, the basic properties can be improved by adding a Zr compound and controlling C and Si. It can be seen that the press punching property can be improved without any loss.

【0034】[0034]

【発明の効果】以上に述べたように、本発明の電子部品
用Fe−Ni系合金薄板であれば、表面性状、めっき
性、低熱膨張特性、金型寿命のいずれをも維持した上
で、優れたプレス打抜き加工性を提供することができ
る。したがって本発明の電子部品用Fe−Ni系合金薄
板は、リードフレーム等の電子部品材料の加工形状の微
細化、高精度化に対応が可能であり、工業上の効果は極
めて大きい。
As described above, the Fe—Ni-based alloy thin plate for electronic parts of the present invention can maintain all of the surface properties, plating properties, low thermal expansion properties, and mold life while maintaining the properties. Excellent press punching workability can be provided. Therefore, the Fe—Ni-based alloy thin plate for electronic components of the present invention can cope with finer and more precise processing of electronic component materials such as lead frames, and has an extremely large industrial effect.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 重量%にて、Ni:30〜55%、C:
0.02%以下、Mn:1.5%以下、Si:0.3%
以下、Zr:0.03〜0.5%、残部は不純物を除き
実質的にFeである組成を有し、最長径0.5μm以上
のZr化合物を、圧延方向および厚さ方向に平行な断面
1平方ミリメートル当たり10000個〜500000
個含有することを特徴とする電子部品用Fe−Ni系合
金薄板。
1. Ni: 30 to 55% by weight, C:
0.02% or less, Mn: 1.5% or less, Si: 0.3%
Hereinafter, a Zr compound having a composition of Zr: 0.03 to 0.5%, and the balance being substantially Fe excluding impurities, and a cross section parallel to the rolling direction and the thickness direction of a Zr compound having a longest diameter of 0.5 μm or more. 10,000 to 500,000 per square millimeter
Fe-Ni-based alloy thin sheets for electronic components, characterized in that they are contained.
【請求項2】 重量%にて、Ni:27〜52%、C
o:22%以下、 C:0.02%以下、Mn:1.5
%以下、Si:0.3%以下、Zr:0.03〜0.5
%、残部は不純物を除き実質的にFeである組成を有
し、CoとNiの含有量は30%≦Co+Ni≦55%
の関係を満足し、最長径0.5μm以上のZr化合物
を、圧延方向および厚さ方向に垂直な断面1平方ミリメ
ートル当たり10000個〜500000個含有するこ
とを特徴とする電子部品用Fe−Ni系合金薄板。
2. Ni: 27 to 52% by weight, C:
o: 22% or less, C: 0.02% or less, Mn: 1.5
% Or less, Si: 0.3% or less, Zr: 0.03 to 0.5
%, And the balance is substantially Fe except for impurities, and the content of Co and Ni is 30% ≦ Co + Ni ≦ 55%
Characterized in that the Fe-Ni-based alloy for electronic components contains 10,000 to 500,000 Zr compounds having a longest diameter of 0.5 μm or more per square millimeter perpendicular to the rolling direction and the thickness direction. Alloy sheet.
JP10281298A 1998-04-14 1998-04-14 Iron-nickel series alloy thin sheet for electronic parts Pending JPH11293408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10281298A JPH11293408A (en) 1998-04-14 1998-04-14 Iron-nickel series alloy thin sheet for electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10281298A JPH11293408A (en) 1998-04-14 1998-04-14 Iron-nickel series alloy thin sheet for electronic parts

Publications (1)

Publication Number Publication Date
JPH11293408A true JPH11293408A (en) 1999-10-26

Family

ID=14337462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10281298A Pending JPH11293408A (en) 1998-04-14 1998-04-14 Iron-nickel series alloy thin sheet for electronic parts

Country Status (1)

Country Link
JP (1) JPH11293408A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641169B2 (en) 2003-05-29 2010-01-05 Sumitomo Metal Industries, Ltd. Substrate for a stamper

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641169B2 (en) 2003-05-29 2010-01-05 Sumitomo Metal Industries, Ltd. Substrate for a stamper

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