JPH11280648A - Rotary compressor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain film which adheres well with a substrate by irradiating ions of structural element of film formed on top of substrate and conduct sputtering of outermost layer of substrate formed at time of nitriding, and also making, and also making a mixing layer which bonds structural element to the structural atoms of substrate in advance. SOLUTION: When forming a sliding part of rotational compressor, for example, a hard carbon film on the end or side surface of the vane which contacts and slides on the exterior surface of roller, atoms composing the film formed on top of the substrate or ions of structural atoms are irradiated in advance on the nitrided substrate (base) Then kinetic energy of ion is used to sputter the outermost layer of substrate formed at the time of nitriding, and the atoms forming the film, or the bond of the mixed layer between the structural elements and the structural atoms of the substrate is formed, and a hard carbon film is formed on the mixed layer. The substrate used can be Fe-type or Al-type, or sintered or compounded materials based on Fe or Al.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary compressor having a hard carbon-based coating formed thereon, and more particularly to a compressor component, a blade such as an electric shaver, a screen printing mask, a screen printing squeegee, and office automation (OA).
The present invention relates to functional parts such as equipment parts, other sliding parts, electronic devices such as solar cells, magnetic heads, and SAW devices, and semiconductors.

[0002]

2. Description of the Related Art Conventionally, a so-called nitriding treatment, in which a surface of a steel such as an Fe-based base material is hardened by infiltrating nitrogen into the steel, is sometimes performed. A specific method of the nitriding treatment is described on page 152 of "Machine and Metallic Materials for Young Engineers, written by Yajima et al., Maruzen Co., Ltd." The method is to clean the parts to be gas-nitrided, remove the oil, put them in a tightly closed nitriding box, and heat them to 500 ° C to 550 ° C for 50 to 100 hours while passing ammonia gas. A cured layer of about 0.3 mm is formed.

[0003]

However, in this method, a nitride (Fe ₂ N in the case of an Fe-based material) in which the material of the base material and nitrogen are bonded is generated on the outermost surface of the base material. When a hard carbon-based coating is formed on a base material, the adhesion between the base material and the hard carbon-based coating may decrease. Therefore,
An object of the present invention is to solve such a conventional problem and to form a hard carbon-based coating having excellent adhesion to a nitrided base material mainly on sliding parts of a rotary compressor. It is in.

Further, there are methods such as ion nitriding and radical nitriding in which the surface of a base material is nitrided by utilizing ions and radicals in plasma.

[0005]

The rotary compressor according to the present invention comprises:
When forming a hard carbon-based coating on a nitrided base material,
Irradiation of ions of constituent atoms or constituent molecules of the film formed on the base material in advance, and using the kinetic energy of the ions, sputters the outermost surface layer of the base material formed during the nitriding treatment. In addition, a mixed layer having a bond between a constituent atom of the coating or a constituent molecule and a constituent atom of the base material is formed, and a hard carbon-based coating is formed on the mixed layer.

[0006] The base material is characterized by Fe-based, Al-based, Cu-based ingots, or sintered or composite materials based on these.

The type of the ions is C, Si, Ti, Z
r, Ge, Ru, Mo, W.

Further, a rotary compressor according to the present invention has a roller attached to an eccentric portion of a rotating crankshaft, the roller having an outer peripheral surface, and a slide housing the roller and sliding in contact with the outer peripheral surface of the roller. A cylinder having a moving surface on the inner surface thereof, and a vane housed in a groove formed on the inner surface of the cylinder and having a tip portion which slides in contact with an outer peripheral surface of the roller, at least a tip portion or a side surface of the vane. Characterized in that the hard carbon-based coating is used for the portion.

A roller having an outer peripheral surface attached to an eccentric portion of a rotating crankshaft;
A cylinder having an inner surface having a sliding surface that slides in contact with the outer peripheral surface of the roller, and a vane housed in a groove formed in the inner surface of the cylinder and having a leading end portion that slides in contact with the outer peripheral surface of the roller. Wherein the hard carbon-based coating is used on the outer peripheral surface of the roller.

A roller having an outer peripheral surface attached to an eccentric portion of a rotating crankshaft;
A cylinder having an inner surface having a sliding surface that slides in contact with the outer peripheral surface of the roller, and a vane housed in a groove formed in the inner surface of the cylinder and having a leading end portion that slides in contact with the outer peripheral surface of the roller. Wherein the hard carbon-based coating is used on the inner surface of the groove of the cylinder.

[0011] An intermediate layer is formed between the hard carbon-based coating and the vane, the outer peripheral surface of the roller, or the inner surface of the groove of the cylinder.

The intermediate layer is made of Si, Ti, Zr, Ge, Ru, Mo,
It is characterized by being formed from W, an oxide thereof, a nitride thereof, or a carbide thereof.

The hard carbon-based coating is made of Si, N, Ta, Cr,
It is characterized by containing at least one additional element selected from the group consisting of F and B.

[0014] The hard carbon-based coating has a gradient of additive element concentration such that the concentration of the additive element in a portion near the surface of the hard carbon-based coating is higher than in a portion away from the surface. I do.

In the rotary compressor, as the refrigerating oil,
It is characterized by using a polyol ester or polyvinyl ether.

The hard carbon-based coating comprises a diamond coating, a mixed film of a diamond structure and an amorphous carbon structure, or an amorphous carbon coating.

[0017]

FIG. 1 is a schematic sectional view showing an example of an apparatus for forming a hard carbon-based film according to the present invention.

Referring to FIG. 1, a plasma generating chamber 4 is provided in vacuum chamber 8. One end of the waveguide 2 is attached to the plasma generation chamber 4, and the microwave supply means 1 is provided at the other end of the waveguide 2. The microwave generated by the microwave supply means 1
And through the microwave introduction window 3 to the plasma generation chamber 4. The plasma generation chamber 4 contains a discharge gas such as an argon (Ar) gas and methane (C) in the plasma generation chamber 4.
A gas introduction pipe 5 for introducing a raw material gas such as H ₄ ) and hydrogen (H ₂ ) is provided.

A plasma magnetic field generator 6 is provided around the plasma generation chamber 4. The high-frequency magnetic field generated by the microwaves and the magnetic field from the plasma magnetic field generator 6 act to generate a high-density
An ECR plasma is formed. A substrate holder 7 is provided in the vacuum chamber 8. In the present embodiment, a vane of a rotary compressor in which a Fe-based material is subjected to nitriding treatment is used as sample 10.

The carbon-based ions decomposed in the plasma generation chamber 4 are accelerated by the grid 9 and drawn out into the vacuum chamber 8. At this time, the acceleration energy of the ions is controlled by the magnitude of the voltage applied to the grid 9.

When the formation of the intermediate layer is necessary, it can be performed by a magnetron RF sputtering method or the like. The target is formed by sputtering a target with ions in argon plasma to form a film.Si, Ti, Zr, W, M
o, Ru, Ge, etc. are used.

When oxygen or nitrogen gas is introduced into the chamber simultaneously with sputtering, Si, Ti, Zr, W, Mo, R
It becomes possible to form a simple substance of u and Ge, or an oxide or nitride thereof.

Here, a schematic cross section of a rotary compressor on which the hard carbon-based coating of the present invention is formed is shown in FIG.

In FIG. 1, reference numeral 12 denotes a sealed container, reference numeral 20 denotes a crankshaft driven by an electric motor (not shown), reference numeral 30 denotes a roller attached to an eccentric portion of the crankshaft 20, and the roller 30 is made of monochromatic cast iron. I have.

Reference numeral 40 denotes a cylindrical cylinder housing the roller 30, and this cylinder 40 is made of cast iron. Numeral 50 is a cylinder groove provided for the vane 60 to reciprocate, and numeral 60 is a vane for partitioning the space inside the cylindrical cylinder 40 into a high-pressure section and a low-pressure section.
0 is made of high-speed tool steel (SKH51).

Reference numeral 70 denotes a spring for biasing the vane 60 toward the roller 30. Reference numeral 80 denotes a suction pipe for supplying the refrigerant into the cylindrical cylinder 40, and reference numeral 90 denotes a discharge pipe for discharging the refrigerant having the pressure and the temperature increased inside the cylindrical cylinder to the outside of the compressor. In addition, as the refrigerating oil of the rotary compressor of the present invention, a polyol ester or polyvinyl ether is preferably used.

The operation of the rotary compressor configured as described above will now be described.

The crankshaft 20 is driven by an electric motor, and a roller 30 attached to an eccentric portion of the crankshaft 20 is provided.
Rotates along the circumference in the cylindrical cylinder 40. Since the vane 60 is biased by the high-pressure gas and the spring 70, the vane 60 is constantly in contact with the outer peripheral surface of the roller 30 with the rotation of the roller 30, and the cylinder groove 50.
Reciprocate inside.

By continuously repeating this motion, the refrigerant sucked into the cylindrical cylinder 40 via the suction pipe 80 is compressed inside the cylindrical cylinder 40, and after the pressure and temperature rise, the refrigerant is discharged. It is discharged to the outside of the rotary compressor through the pipe 90.

An embodiment for forming a hard carbon-based coating will be described below. (Example 1) First, the inside of the vacuum chamber 8 is set to 10 ^-5 to 10 ^-7 Torr.
Exhaust. SiH ₄ gas 2.0 × 10 ^-4 T in plasma generation chamber 4
Orr was introduced, and silicon ions were implanted into the base material at an acceleration voltage of 1 kV. At this time, as a result of the ESCA analysis of the outermost surface, a bond between Si and N and a bond between Fe and Si were observed, and a conceptual diagram of this bond state is shown in FIG. As shown in the figure, a mixed layer of Fe ₂ N, SiN, and FeSi is formed on the outermost surface in a nitrogen diffusion layer formed in a base (base material).

Next, 5.7 × 1 Ar gas is introduced into the vacuum chamber 8.
By supplying 0 ^-4 Torr, Ar plasma is generated between the target 11 and the substrate holder 7, and the Si target is sputtered by ions in the plasma to form a Si intermediate layer.

Further, the process of forming the Si intermediate layer by the magnetron sputtering method is stopped, and 2.5 × 10 ⁻⁴ Torr of Ar gas and 3.0 × 10 ⁻⁴ Torr of CH ₄ gas are supplied into the plasma generation chamber 4 to generate plasma. A plasma of Ar and CH ₄ is generated in the chamber 4. Finally, the voltage applied to the grid 9 was set to 400 V to form a hard carbon-based coating.

Evaluation of the adhesion of the coating film thus prepared was carried out by using a Vickers indenter indentation test (load: 1 kg).
Was performed. Table 1 also shows the results of a film produced without implanting silicon ions as a comparative example. (Number of test samples: 50)

[0034]

【table 1】

As shown in Table 1, it is clear that the film of the present invention is clearly excellent also in adhesion. (Example 2) First, the inside of the vacuum chamber 8 is set to 10 ^-5 to 10 ^-7 Torr.
Exhaust. CH ₄ gas into the plasma generation chamber 4 2.0 × 10 ^-4 To
rr is introduced and carbon ions are accelerated to this base material at an acceleration voltage of 1k.
V injected into the base metal. At this time, as a result of the ESCA analysis of the outermost surface, the bonds of C and N and the bonds of Fe and C were observed, and FIG. 3 (b) shows a conceptual diagram of the bonding state. As shown in the figure, the outermost surface of the nitrogen diffusion layer formed in the base (base material) is Fe ₂ N,
A mixed layer of CN and FeC is formed.

Next, 5.7 × 1 Ar gas was introduced into the vacuum chamber 8.
By supplying 0 ^-4 Torr, Ar plasma is generated between the target 11 and the substrate holder 7, and the Si target is sputtered by ions in the plasma to form a Si intermediate layer.

Next, the process of forming the Si intermediate layer by the magnetron sputtering method was stopped, and 2.5 × 10 ⁻⁴ Torr of Ar gas and 3.0 × 10 ⁻⁴ Torr of CH ₄ gas were supplied into the plasma generation chamber 4. A plasma of Ar and CH ₄ is generated in the generation chamber 4. Finally, the voltage applied to the grid 9 was set to 400 V to form a hard carbon-based coating.

The adhesion of the coating film thus prepared was evaluated by an indentation test using a Vickers indenter (load: 1 kg).
Was performed. Table 2 also shows the results of a film formed without carbon ion implantation as a comparative example. (Number of test samples: 50)

[0039]

[Table 2]

As shown in Table 2, it can be seen that the film of the present invention is clearly excellent also in adhesion.

As described above, when a base material made of Fe is nitrided, Fe ₂ N or the like is generally formed on the outermost surface of the base material. For this reason, before forming the hard carbon-based coating on the base material, by changing a part of the Fe ₂ N layer to CN or SiN in advance, CN or SiN is formed between the base material and the hard carbon-based coating. It enhances the bonding strength between them and contributes to the improvement of adhesion.

In the above-described embodiment, the hard carbon-based coating is formed on the vane 60 of the rotary compressor. However, the present invention is not limited to this. The surface of the roller 30 which is a component (member) of the rotary compressor, or Experiments have confirmed that the same effect as the vane can be obtained even when a hard carbon-based coating is formed on the inner surface of the groove 50 of the cylinder.

[0043]

As is apparent from the above description, according to the present invention, when a hard carbon-based coating is formed on a nitrided base material, silicon ions or carbon ions are previously directed toward the base material. Irradiation and sputtering of the outermost surface layer of the base material formed during the nitriding treatment, and formation of silicon or a mixed layer having a bond of carbon and nitrogen to form a hard carbon layer on the base material with good adhesion. An effect that a system coating can be formed is exhibited.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing an example of an apparatus for forming a hard carbon-based film according to the present invention.

FIG. 2 is a schematic sectional view of a rotary compressor on which a hard carbon-based coating of the present invention is formed.

FIG. 3 is a conceptual diagram of a bonding state on a surface of a base material subjected to a nitriding treatment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Microwave supply means 2 ... Waveguide 3 ... Microwave introduction window 4 ... Plasma generation chamber 5 ... Gas introduction tube 6 ... Plasma magnetic field generator 7 ... Base holder 8 ... Vacuum chamber 9 ... Grid 10 ... Base 11 ... Target

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yoichi Domoto 2-5-5 Keihanhondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd.

Claims (12)

[Claims] When a hard carbon-based coating is formed on a nitrided base material, ions of constituent atoms or constituent molecules of the coating formed on the base material are irradiated in advance, and the kinetic energy of the ions is used. Then, while sputtering the outermost surface layer of the base material formed at the time of the nitriding treatment, to form a mixed layer having bonding between constituent atoms of the coating, or constituent molecules and constituent atoms of the base material, A rotary compressor, wherein a hard carbon-based coating is formed on the mixed layer. 2. The rotary compressor according to claim 1, wherein the base material is an Fe-based, Al-based, or Cu-based ingot, or a sintered or composite material based on these materials. 3. The type of the ions is C, Si, Ti, Zr, G
The rotary compressor according to claim 1, wherein the rotary compressor is e, Ru, Mo, or W. 4. A roller having an outer peripheral surface attached to an eccentric portion of a rotating crankshaft, and a cylinder accommodating the roller and having a sliding surface on the inner surface that slides in contact with the outer peripheral surface of the roller. A vane housed in a groove formed on the inner surface of the cylinder and having a leading end sliding in contact with the outer peripheral surface of the roller, wherein at least the leading end or the side surface of the vane is provided on the vane. A rotary compressor using the hard carbon-based coating described in any one of the above. 5. A roller having an outer peripheral surface attached to an eccentric portion of a rotating crankshaft, and a cylinder accommodating the roller and having an inner sliding surface which slides in contact with the outer peripheral surface of the roller. And a vane housed in a groove formed on the inner surface of the cylinder and having a leading end portion that slides in contact with the outer peripheral surface of the roller, wherein the outer peripheral surface of the roller is provided with a vane. A rotary compressor characterized by using the hard carbon-based coating described in the above. 6. A roller having an outer peripheral surface attached to an eccentric portion of a rotating crankshaft, and a cylinder accommodating the roller and having a sliding surface on the inner surface that slides in contact with the outer peripheral surface of the roller. A vane that is housed in a groove formed on the inner surface of the cylinder, and has a tip portion that slides in contact with the outer peripheral surface of the roller, wherein the inner surface of the groove of the cylinder is provided with the vane. A rotary compressor characterized by using the hard carbon-based coating described in the above. 7. The hard carbon-based coating, the vane,
5. An intermediate layer is formed between an outer peripheral surface of the roller and an inner surface of a groove of the cylinder.
7. The rotary compressor according to any one of claims 6 to 6. 8. The method according to claim 1, wherein the intermediate layer is made of Si, Ti, Zr, Ge, Ru,
The rotary compressor according to claim 7, wherein the rotary compressor is made of Mo, W, an oxide thereof, a nitride thereof, or a carbide thereof. 9. The method according to claim 9, wherein the hard carbon-based coating is made of Si, N, Ta, C
The rotary compressor according to any one of claims 4 to 8, comprising at least one additional element selected from the group consisting of r, F, and B. 10. The method according to claim 1, wherein the hard carbon-based coating has a gradient of the additive element concentration such that the concentration of the additive element in a portion near the surface of the hard carbon-based coating is higher than that in a portion away from the surface. The rotary compressor according to claim 9, wherein: 11. The rotary compressor according to claim 4, wherein a polyol ester or polyvinyl ether is used as the refrigeration oil. 12. The method according to claim 4, wherein the hard carbon-based coating is formed of a diamond coating, a mixed film of a diamond structure and an amorphous carbon structure, or an amorphous carbon coating. The rotary compressor according to any one of the above.