JPH11264832A - Probe or sample drive - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drive device for a probe or a sample having a thin drive device, capable of performing high-speed scanning, and having a small curvature of an obtained image plane. When a laminated piezoelectric element expands, a biaxial parallel spring is pushed in an X-axis direction, thereby deforming the biaxial parallel spring and displacing a position of a cantilever in an X-axis direction. When the laminated piezoelectric element 5 expands, the biaxial parallel spring 1
Is pushed in the Y-axis direction, whereby the biaxial parallel spring 1 is deformed and the position of the cantilever 10 is displaced in the Y-axis direction. When the multilayer piezoelectric element 6 expands, the vertical parallel spring 2 becomes X-
Pushed in the Y-plane direction, the vertical parallel spring 2 is deformed, and the position of the cantilever 10 is displaced in the Z-axis direction. None of the stacked piezoelectric elements is connected to the biaxial parallel spring 1 and the vertical parallel spring 2 but is in contact with them.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe or sample driving apparatus for three-dimensionally moving a probe or a sample in a scanning probe microscope or the like.

[0002]

2. Description of the Related Art In a scanning probe microscope, a probe is moved three-dimensionally relative to a sample. For example,
In an atomic force microscope or the like, which is one of the scanning probe microscopes, in order to measure the irregular shape of the sample surface on an atomic scale,
The probe is scanned in a plane parallel to the sample surface while keeping the distance between the sample surface and the probe constant. Therefore, it is necessary to move the probe in the Z direction, which is a direction perpendicular to the sample surface, and to perform in-plane scanning in the X and Y directions parallel to the sample surface.

Conventionally, a tube type driving device (G. Binni) has been used for driving a probe or a sample in a scanning probe microscope.
g and DPE Smith, Single-tube three dimensiona
l scanner for scanning tunneling microscopy, Rev.
Sci. Instrum. 57 (8) p 1688-1689, August 1986).

Further, in the conventional scanning probe microscope, a type in which the probe is fixed and the sample is scanned is generally used. However, since the size of the sample is limited such that a large sample cannot be scanned, the probe scanning is currently performed. Types have also become widely used.

FIG. 10 shows an example of a tube-type driving device which is a device for driving a probe of a conventional probe-scanning atomic force microscope. 10A is a perspective view of the tube-type driving device, and FIG. 10B is a diagram schematically illustrating an image obtained using the tube-type driving device. In this tube-type driving device 101, a ground electrode is provided on one of an inner surface and an outer surface of a piezoelectric body having a cylindrical shape such as a cylindrical shape, and a ground electrode is provided on the other surface. For example, it has a configuration in which four divided electrodes are provided. In the example shown in FIG. 10A, a cantilever 102 for an atomic force microscope as a probe, a light source 103 for detecting its deflection, and a detector 104 are arranged on the free end of the tube type driving device 101. I have. In the tube-type driving device 101, a cylindrical piezoelectric body is bent in a lateral direction by applying opposite voltages to the opposing divided electrodes, thereby performing scanning driving in the X direction or the Y direction. Driving in the Z direction is realized by applying the same offset voltage to each of the divided electrodes and causing the cylindrical piezoelectric body to expand and contract.

FIG. 11 shows an example of a tri-pot type driving device which is a device for driving a probe of a conventional probe scan type atomic force microscope. This tri-pot type driving device has three piezoelectric driving members 112a, 112b, 112
c, whereby the probe 111 is independently moved in the X, Y, and Z directions. That is,
This tri-pot type driving device has a box 114 composed of three flat plates 113a, 113b, 113c orthogonal to each other.
Is placed on one flat plate 113c of the box 114, and one end of each is fixed to the inner walls of the flat plates 113a and 113b via hinges 115a and 115b, and is perpendicular to the flat plates 113a and 113b. Stretchable 2
Piezoelectric driving members 112a and 112b and a flat plate 113c
A block 16 fixedly disposed at the intersection of the upper two piezoelectric driving members 112a and 112b, and a piezoelectric driving member 112 fixed on the block 16 vertically to a flat plate 113c.
and a probe 111 attached to the tip of the piezoelectric driving member 112c via a holder 117.
As the piezoelectric driving members 112a and 112b for the X and Y directions, a laminated piezoelectric body in which piezoelectric layers are accumulated in the expansion and contraction directions is used.

Further, as a probe driving device having no interference in three axial directions, there is known a probe driving device as disclosed in Japanese Patent Publication No. 2577423. In this configuration, another driving device is provided at the displacement end of the one-axis driving device in a direction perpendicular to the other driving device, and another driving device is provided at the displacement end in a direction perpendicular to the other two axes.

The measurement range of these probe scan type atomic force microscopes is limited to a narrow range. Therefore, when performing an inspection, it is important to observe the sample and the probe with an optical microscope in advance and to position the probe at the position where the sample exists in order to increase the measurement efficiency.

[0009]

However, FIG.
In the probe-scanning atomic force microscope using the conventional tube scanner shown in (a), the tube scanner has a vertically long structure, so it cannot be attached to the tip of the optical microscope. There is a problem that it is difficult to perform alignment by using such a method.

A probe 10 is provided at the end of the tube scanner.
Since the laser 103 and the detector 104 for detecting the force acting on the tube scanner 2 are attached, the vertical resonance frequency of the tube scanner becomes low.

[0011] When measuring irregularities on the surface of a sample using a probe-scanning atomic force microscope, the probe is driven by a tube scanner so as to keep the distance between the probe and the sample constant while moving along the surface of the sample. Move the probe. At this time, if the resonance frequency of the tube scanner is sufficiently higher than the drive frequency of the probe, a displacement with an amplitude proportional to the probe drive command and without a phase delay can be generated in the probe, and accurate measurement can be performed.

However, when the vertical resonance frequency of the tube scanner is low, unless the probe drive frequency is also low, the probe amplitude is not proportional to the probe drive command and a phase delay occurs. . Therefore, the conventional probe-scanning atomic force microscope using a tube scanner has a problem that the probe driving frequency must be lowered and the measurement speed cannot be increased.

As another problem, in the above-described conventional tube type driving device, scanning in the X and Y directions utilizes the deflection of the cylindrical piezoelectric body in the X and Y directions.
The probe or sample cannot be scanned flat in the X and Y planes, and the trajectory of the scan draws an arc as shown by an arrow 105. Therefore, there is also a problem that the obtained image is distorted as shown in FIG.

In the conventional tri-pot type driving device shown in FIG. 11, two piezoelectric driving members 112a and 112b for driving the probe in the X and Y axis directions are hinged.
It is fixed to the inner walls of the flat plates 113a and 113b via 15a and 115b. These hinges 115a, 115b
Is made of a material having low rigidity because it needs to be deformed in accordance with expansion and contraction of the piezoelectric driving members 112a and 112b.
Therefore, there is a problem that the mechanical resonance frequency in the X and Y axis directions is lowered, and the scanning speed in the X and Y directions cannot be increased for the same reason as described above.

In addition, since the entire structure is vertically long, it cannot be mounted on the tip of the optical microscope, and it is difficult to position the probe and the sample using the optical microscope.

Further, in a probe driving apparatus such as that described in Japanese Patent Publication No. 2577423, an inefficient configuration in which a single-axis driving apparatus drives two other driving apparatuses together is likely to occur, and the resonance of the driving apparatus is difficult. There is a problem that the frequency becomes extremely low and high-speed scanning is impossible.

The present invention has been made in view of such circumstances, and has a structure in which the driving device is thin enough to be attached to the tip of an optical microscope, and has a high mechanical resonance frequency of the driving device. It is an object of the present invention to provide a probe or sample driving device which can perform high-speed scanning at high speed and can scan a wide area in a state where the obtained image surface has a small curvature. A further object of the present invention is to provide a probe or sample driving device capable of reducing mechanical vibration applied to the probe or the sample and securing sufficient resolution.

[0018]

A first means for solving the above-mentioned problem is that a probe or a sample is moved in a two-dimensional plane by expansion and contraction of a first driving force generator and a second driving force generator. A probe or a sample driving device which is moved by means of a probe, and has a deformable portion which directly or indirectly abuts on the first driving force generator and the second driving force generator and deforms by expansion and contraction thereof. The deformation member has a fixed end that does not move due to the deformation, and a free end that moves by the deformation, and couples a probe or a sample to the free end of the displacement member to deform the displacement member. The probe or the sample is moved in a two-dimensional plane according to (1).

Here, "directly or indirectly abutting" means that the first driving force generating device or the second driving force generating device may directly contact the deformable member, This indicates that the contact may be made via another member such as a protrusion provided on the member.

For example, assuming that the first driving force generator applies a driving force in the X-axis direction and the second driving force generator applies a driving force in the Y-axis direction.
The movement of the probe or sample in the X-axis direction and the Y-axis direction is 1
This is done through the deformation of two common displacement members. That is, when the first driving force generator expands and contracts, the displacement member is deformed accordingly, and the probe or sample coupled to its free end moves in the X-axis direction. When the second driving force generator expands and contracts, the displacement member is deformed accordingly, and the probe or sample coupled to its free end moves in the Y-axis direction. For example, when one driving force generator expands, the deformable member is pressed and deformed, and when the driving force generator contracts, the deformable member returns to its original state by its own elastic force. If the two driving devices are driven simultaneously, the movement in the X-axis direction and the movement in the Y-axis direction can be performed simultaneously.

The first driving force generation device, the second driving force generation device, and the deformable member can be arranged so that their heights are reduced and they are located near the same plane. Therefore, the height of the component combining these does not increase. Therefore, it can be installed at the tip of the optical microscope.

The first driving force generator, the second driving force generator, and the deformable member can be made of a material having high rigidity as a whole, so that the mechanical resonance frequency increases. Therefore, high-speed scanning can be performed in the first direction and the second direction.

A second means for solving the above-mentioned problem is:
In the first means, the displacement member has a shape in which a frame is formed by bending and connecting at least four high bending rigid members to each other, and the high bending rigid members are connected to each other. Is a portion having a low bending stiffness, and the first driving force generation device and the second driving force generation device directly or indirectly contact two members near the fixed end, respectively. (Claim 2).

Here, "directly or indirectly abutting" means that the first driving force generating device or the second driving force generating device may directly contact the deformable member, This indicates that the contact may be made via another member such as a protrusion provided on the member.

In this means, at least four members having high bending stiffness forming the frame have high bending stiffness and therefore do not deform even under the force of the driving force generator. Therefore, when receiving the force of the driving force generator, the portion having low bending stiffness, which is the portion where the members having high bending stiffness are joined, is deformed, and the shape of the frame is deformed without deforming the members constituting the frame. Will do. Therefore, by applying a force from the first driving force generator or the second driving force generator to a member near the fixed end of the members having high rigidity, the shape of the frame is deformed and the free end moves. I do. Since the member having high rigidity to which the first driving force generator applies a force and the member having high rigidity to which the second driving force generating device applies a force are different members,
When each driving force generator expands and contracts, the direction of deformation of the frame is different, and the probe or sample coupled to the free end can be moved in another direction.

Further, by making the point where the force is applied from the first driving force generator or the second driving force generator close to the fixed end, the movement of the free end is enlarged by leverage. The probe or sample can be largely moved with a small driving amount.

A third means for solving the above-mentioned problem is as follows.
The first means or the second means, wherein the displacement member is:
The first driving force generation device and the second driving force generation device are formed symmetrically with respect to a straight line connecting the center of the fixed end and the center of the free end. The present position is a position symmetrical with respect to the straight line (claim 3).

According to this means, the movement of the probe or the sample caused by the expansion and contraction of the unit amount of the first driving force generating means and the movement of the probe or the sample caused by the expansion and contraction of the unit amount of the second driving force generating means The quantity can be the same.

A fourth means for solving the above-mentioned problem is:
In the second means or the third means, among the parts having low bending stiffness provided at the end of each of the four high-rigidity members, the bending stiffness of a portion closer to the fixed end is bent more than the other. It is characterized by high rigidity (claim 4).

According to this means, the deformation given to the displacement member by the first driving means or the second driving means is performed mainly on a portion near the fixed end having lower bending rigidity. Therefore, the interference between the moving direction of the free end of the deformable member caused by the expansion and contraction of the first driving means and the moving direction of the free end of the deformable member caused by the expansion and contraction of the second driving member is reduced. Therefore, for example, if the expansion and contraction direction of the first driving unit is set to the X direction and the expansion and contraction direction of the second driving unit is set to the Y direction, the driving in the X direction and the driving in the Y direction can be performed without interference.

A fifth means for solving the above problem is as follows.
Any one of the first means to the fourth means, wherein a third driving force generating device for moving a probe or a sample in a direction different from the direction in the two-dimensional plane by expansion and contraction is provided; Is moved three-dimensionally (claim 5).

According to this means, the probe or the sample is
The third driving force generating device is moved, for example, in the Z direction by expansion and contraction. Thus, the probe or the sample can be operated three-dimensionally.

Also, since the deformable member and each driving force generator are only in contact with each other and are not mechanically connected,
The mass of each driving force generator does not generate an inertial force for movement of the probe or material in the third direction. Therefore, the mechanical resonance point can be increased even in the movement in the third direction. Therefore, the probe or the material can be scanned at a high speed also in the third direction.

A sixth means for solving the above-mentioned problem is:
In any one of the first to fourth means, the displacement member (first displacement member) is supported by a second displacement member that displaces in a direction different from a direction in the two-dimensional plane. The second deformation member is displaced by expansion and contraction of the third driving force generation device (claim 6).

In this means, as described above, for example, the X-axis and the Y-axis in the XY plane are provided by the first displacement member.
The movement of the probe or material in the axial direction takes place. Then, the first displacement member is supported by the second displacement member, and the second displacement member is, for example, in the Z-axis direction different from that in the XY plane due to expansion and contraction of the third driving force generating device. Due to the displacement, the probe or the material can be moved three-dimensionally.

At this time, since only the probe or the material, its attached device (probe deformation detector, etc.) and the deformable member are moved by, for example, the Z-axis direction by the third driving force generating device, their masses are Is small, so that the resonance frequency of the mechanical vibration can be increased. Further, since the second displacement member can be formed of a material having high rigidity similarly to the first displacement member, the resonance frequency of the mechanical vibration can be increased. Therefore, for example, scanning in the Z-axis direction can be performed at high speed.

A seventh means for solving the above-mentioned problem is as follows.
In the sixth means, the second displacement member has a shape in which a substantially rectangular frame is formed by bending and connecting four members having high bending rigidity to each other, and the second displacement member has high bending rigidity. The portion to which the members are connected is a portion having a low bending rigidity, and the third driving force generating device directly connects one of the four members having a high bending rigidity to one member near the fixed end. Or it is characterized by being indirectly in contact (claim 7).

The term "directly or indirectly abutting" means that the abutment may be in direct abutment or may be in abutment with a projection or the like provided on the member. Also, a substantially rectangular shape means that the rectangle need not be a strict rectangle as long as the desired accuracy of movement is ensured (the same applies hereinafter).

According to this means, in the second deformable member, at least four members having high bending stiffness constituting the frame have high bending stiffness, and therefore do not deform even under the force of the driving force generator. Therefore, when receiving the force of the driving force generator, the portion having low bending rigidity, which is the portion to which the member having high bending rigidity is coupled, is deformed, and the shape of the frame is deformed without deforming the members constituting the frame. Will be. Therefore, by applying a force from the third driving force generator to a member close to the fixed end of the members having high rigidity, the shape of the frame is deformed and the free end moves.

Further, in this means, since a substantially rectangular shape is formed by the four members having high bending rigidity, it is possible to prevent interference between the movements in the X-axis direction and the Y-axis direction.

In this means, the position where the force is applied from the third driving force generating means is set to a position close to the fixed end, whereby the movement of the free end is enlarged by the principle of leverage, and the probe or the sample is largely moved. Can be. In addition, since the rigidity of the frame body as a whole is high, the mechanical resonance frequency increases, and scanning in the third direction can be performed at high speed.

Eighth means for solving the above-mentioned problem is:
The sixth means, wherein the second displacement member is the third displacement member.
And two thin members having a wide width in a direction in which a force is applied from the driving force generating device are connected to the first displacement member from two directions, respectively, and the third driving force is formed. A probe or a sample is moved in the third direction by twisting the two members in accordance with expansion and contraction of the generator (Claim 8).

In this means, the first displacement member is
Long in the direction in which the force is applied from the third driving force generator,
It is supported from two directions by two thin members. When the third driving force generator is extended, for example, the two members are pushed and twisted to move the probe or the sample in the third direction. When the third driving force generator is reduced, the two members return to their original state due to their elastic force. Thereby, the probe or the sample can be moved in the third direction.

A ninth means for solving the above-mentioned problem is:
In the above-mentioned eighth means, the second displacement member is provided with the first displacement member.
Are formed symmetrically with respect to a straight line connecting the center of the fixed end and the center of the free end, and that the point of action of the force of the third driving force generator is on the axis of symmetry. This is a feature (claim 9).

According to this means, since the two members constituting the second deformable member have the same amount of twist, the probe or the sample moves in the width direction of the two members. Therefore,
If the width direction is set as the Z-axis direction, the probe or the sample can be accurately moved in the Z direction by expansion and contraction of the third driving force generating device.

A tenth means for solving the above-mentioned problem is that a probe or a sample is moved in a two-dimensional plane by expansion and contraction of a first driving force generator and a second driving force generator. A probe or sample driving device that moves a probe or a sample in a third direction different from the direction in the two-dimensional plane by expansion and contraction of the driving force generating device,
A fixed end that does not move due to expansion and contraction of the first driving force generation device and the second driving force generation device; and a free end that moves due to expansion and contraction of the first driving force generation device and the second driving force generation device. A first displacement member having an end;
A second displacement having a fixed end installed at a free end of the displacing member and not moving due to expansion and contraction of the third driving force generator, and a free end moving by expansion and contraction of the third driving force generator. And the second displacement member is moved in a two-dimensional plane by deforming the first displacement member, and the second driving force is generated by the third driving force generator.
A probe or sample displaced in a direction different from the direction in the two-dimensional plane, and a probe or sample coupled to a free end of the second displacement member is moved in a three-dimensional space. Of the present invention (claim 10).

This means has a similar structure to the first means, but differs from the first means in that the probe or sample is not connected to the free end of the deformable member (first deformable member), and A second deformable member is provided. The function and effect of the first deformable member are the same as those described in the first means. In this means, since the second displacement member is installed at the free end of the first displacement member, the inertia force when driving the second displacement member is the probe or the sample and its accessories. (Such as a probe displacement detection mechanism). Therefore, the second
By driving the displacing member of the second direction by the third driving force generating device to perform scanning in the Z direction, the mechanical resonance point at the time of scanning in the Z direction is increased, and the scanning speed in the Z direction is increased. Can be. Further, interference between the movement in the XY direction and the movement in the Z direction can be completely eliminated.

Further, in this means, since the entire height can be reduced, it is possible to mount the probe on the tip of the optical microscope and perform positioning of the probe and the sample.

An eleventh means for solving the above-mentioned problems is the tenth means, wherein the second displacement member has a substantially rectangular shape by bending and connecting four members having high bending rigidity to each other. Has a shape in which a frame is formed,
The portion where the member having the high bending rigidity is connected is a portion having the low bending rigidity, and the third driving force generating device is closer to the fixed end among the four members having the high bending rigidity. The present invention is characterized by directly or indirectly contacting one member (claim 11).

The term “directly or indirectly abutting” means that the third driving force generating device may directly abut the member, or may contact the member via a protrusion or the like provided on the member. Indicates that it may be in contact.

According to this means, as described in the second means, at least four members having high bending stiffness constituting the frame have high bending stiffness, and thus receive the force of the driving force generator. Does not deform. Therefore, when receiving the force of the driving force generator, the portion having low bending rigidity, which is the portion to which the member having high bending rigidity is coupled, is deformed, and the shape of the frame is deformed without deforming the members constituting the frame. Will be. Therefore, by applying a force from the third driving force generator to one of the members having high rigidity, which is closer to the fixed end, the shape of the frame is deformed and the free end moves.

In the present means, since a substantially rectangular shape is formed by the four members having high bending rigidity, it is possible to prevent interference between movements in the X-axis direction and the Y-axis direction.

In this means, the force applied from the third driving force generating means is set to a position close to the fixed end, so that the movement of the free end is enlarged by the principle of leverage, and the probe or the sample is largely moved. Can be. In addition, since the rigidity of the frame body as a whole is high, the mechanical resonance frequency increases, and scanning in the third direction can be performed at high speed.

A twelfth means for solving the above-mentioned problem is the eleventh means, wherein the second displacement member is one of two rigid members connected to the fixed end. The third driving force generating device is provided between the protrusion having the protrusion on the inner side and the member having no protrusion among the two highly rigid members connected to the fixed end. (Claim 12).

In this means, when the third driving force generator is extended, the projection is pushed, so that a bending moment acts on the projection. Then, the protruding portion pushes the highly rigid member having the protruding portion outward by the component force. Therefore, it is the same as the case where the high-rigidity member having the projection is pushed outward by the third driving force generation device, and the four-deformation frame formed by the four high-rigidity members becomes the fourth deformation frame. A force is applied in a direction perpendicular to the direction of extension of the driving force generating device of No. 3 to deform the device. Therefore, the probe or the sample provided at the free end moves in a direction perpendicular to the extension direction of the third driving force generator.

Therefore, in this means, when it is desired to move the probe or the sample in the Z-axis direction, the extension / contraction direction of the third driving force generator can be placed on the XY plane. Therefore, the third driving force generator can also be placed on the XY plane, and the height in the Z-axis direction can be kept low.

A thirteenth means for solving the above-mentioned problems is any one of the second to ninth means, the eleventh means and the twelfth means, wherein
A reflection member is provided on a highly rigid member near the fixed end of the first displacement member, and a change in the reflection angle is detected by irradiating the reflection member with light to detect the change in the reflection angle.
(Claim 13).

In this means, the displacement of the displacement member (first displacement member) can be measured using a so-called optical lever method. Since only the reflecting member is attached to the displacement member (first displacement member) as the displacement measuring mechanism, the mass of the displacement member does not increase, and therefore the resonance frequency of the mechanical system does not decrease. . In addition, it is not necessary to increase the overall height, which is convenient for mounting on the tip of an optical microscope. The light source and the optical sensor are
It can be provided on a portion where the position does not change due to the displacement of the displacement member, such as a support table that supports the displacement member.

A fourteenth means for solving the above-mentioned problem is any one of the seventh means, the eleventh means and the twelfth means, wherein the rigidity is close to the fixed end of the second displacement member. A reflection member provided on a member having a high height, and a mechanism for measuring a displacement of the second displacement member by irradiating light to the reflection member and detecting a change in a reflection angle. Item 14).

In this means, the displacement of the second displacement member can be measured by using the optical lever method as in the thirteenth means. Since only the reflection member is attached to the second displacement member as the displacement measurement mechanism, the mass of the displacement member does not increase, and therefore the resonance frequency of the mechanical system does not decrease. The light source and the optical sensor can be provided in a portion where the position does not change due to the displacement of the displacement member, such as a support base that supports the displacement member.

As another means for solving the above-mentioned problems, in any one of the first to thirteenth means for driving a probe, the probe comprises: a cantilever having one end fixed; Has a probe provided at the other end thereof, and further includes a light projector that projects light to the cantilever and a reflected light from the cantilever, which is provided for detecting displacement of the lever by an optical lever method. In a device provided with a light receiver, a half mirror is provided on an optical path between the light emitter and the cantilever, and light reflected by the half mirror is received by a second light receiver, whereby the probe There is one characterized by having a mechanism for detecting a position.

In the present means, the projection light for detecting the displacement of the cantilever of the probe by the optical lever method is divided by a half mirror, and is divided into a second light beam different from the light receiver for detecting the displacement of the cantilever. And the position of the probe (for example, the position in the Z-axis direction) is detected.
Therefore, the light projector for detecting the probe position can be omitted.

Further, as a means for further solving the above-mentioned problem, there is a scanning probe microscope comprising any one of the first to fourteenth means or the other means.

According to this means, since the height is not high, it can be attached to the tip of the optical microscope, and the scanning speed can be increased.

[0065]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a probe driving device according to a first embodiment of the present invention. In FIG. 1, 1 is a biaxial parallel spring that is a first displacement member, 2 is a vertical parallel spring that is a second displacement member, 3 is a support base material,
Reference numerals 4, 5, and 6 denote laminated piezoelectric elements, each of which is a driving force generating device; 7, a light source for an optical lever; 8, a mirror; 9, a detector for an optical lever; 10, a cantilever; A light lever for light lever 12 is a detector for the light lever, and cantilever 10, light transmitter 11, and detector 1
2 is a part of the probe. Reference numeral 13 denotes a micrometer that supports the support substrate 3.

This embodiment has a biaxial parallel spring 1 which characterizes the probe driving device. The biaxial parallel spring is
It has a structure in which a metal plate, for example, a plate made of stainless steel, which is a metal having high rigidity, lightweight aluminum, or titanium, which is lightweight and rich in rigidity, is formed by, for example, a wire cutting method. The fixed end of the biaxial parallel spring 1 is supported by a free end of a vertical parallel spring 2 formed by the same material and method as described above, and the other end (fixed end) of the vertical parallel spring 2 is supported. It is fixed to the substrate 3.

The laminated piezoelectric elements 4, 5 and 6 for driving the biaxial parallel spring 1 and the vertical parallel spring 2 are sandwiched between the respective parallel springs and the support substrate 3. Three sets of light sources 7, mirrors 8, and detectors 9 for measuring the driving amounts of the respective parallel springs by the displacement of the piezoelectric elements 4, 5, 6 are fixed to the support substrate 3. As the light source 7, a semiconductor laser laser, an LED, or the like can be used. In the present embodiment, a semiconductor laser having higher directivity is used. At the tip (free end) of the biaxial parallel spring 1, a cantilever 10, which is a probe, a projector 11 and a detector 12 for detecting the deflection of the cantilever are adjusted in position and fixed. The support substrate 3 is supported by three micrometers 13.

When the multi-layer piezoelectric element 4 expands, the biaxial parallel spring 1 is pushed in the X-axis direction.
Is deformed, and the position of the cantilever 10 is displaced in the X-axis direction. When the laminated piezoelectric element 5 expands, the biaxial parallel spring 1 is pushed in the Y-axis direction, thereby deforming the biaxial parallel spring 1 and displacing the position of the cantilever 10 in the Y-axis direction. When the laminated piezoelectric element 6 expands, the vertical parallel spring 2 becomes XY.
Pushed in the in-plane direction, the vertical parallel spring 2 is deformed, and the position of the cantilever 10 is displaced in the Z-axis direction.
None of the stacked piezoelectric elements is connected to the biaxial parallel spring 1 and the vertical parallel spring 2 but is in contact with them. Therefore, when the size of the multilayer piezoelectric element is reduced, 2
The axial parallel spring 1 and the vertical parallel spring 2 return to their original positions by their own elastic force.

Next, the principle of driving the probe driving apparatus of the present invention in the horizontal direction (the direction of the XY plane) and the principle of detecting the driving amount will be described with reference to FIG. In the following drawings, the same reference numerals are given to constituent elements shown in the preceding drawings for describing the embodiments of the present invention, and description thereof will be omitted.

FIG. 2A is a conceptual perspective view of a biaxial parallel spring 1 which characterizes the probe driving device of the present invention, and does not show a piezoelectric element or an optical lever detection system. FIG.
It is the figure which looked at the axis parallel spring 1 from the upper part. In FIG. 2, 2
Reference numerals 1 to 24 denote four members having strong bending rigidity, and 25 to 2
Reference numeral 9 denotes a hinge portion having low bending rigidity provided at an end of the members 21 to 24. 30 is a fixed end of the biaxial parallel spring 1, 31 is a direction of a force generated by the laminated piezoelectric element,
Numeral 32 indicates a moving direction of the probe 10.

In the biaxial parallel spring 1, a frame is formed by four members 21 to 24 having high bending stiffness, and the frame has a shape in which one corner of a square is removed to form a pentagon. The cut corner is a fixed end, and the opposite corner is a free end, and the cantilever 10 is attached to the free end. Although not shown, one end of each of the stacked piezoelectric elements 4 and 5 for driving in the X direction and Y direction is in contact with members 24 and 23 which are close to the fixed ends of the above members.

In FIG. 2A, when a force 31 generated by the laminated piezoelectric element is applied in a direction perpendicular to the member 24 (X-axis direction), the two-axis parallel springs 1 The mechanical lever portions (members 21 to 24) rotate around the hinge portions 25 to 29, and deform to the shape of the two-dot chain line in the figure. At this time, the cantilever 10 provided at the tip of the biaxial parallel spring 1 is driven in the direction of arrow 32 in the figure. At this time, the member 23 is hardly displaced for the reason described later, the member 24 rotates about the hinge portion 29, the member 22 rotates about the hinge 27, and the member 21 is substantially parallel to the direction of the force 31. Deformation that moves to. Therefore, the cantilever 10 moves in the same direction as the direction of the force 31 (X-axis direction). Strictly speaking, cantilever 1
The movement locus of 0 draws a gentle arc, but can be regarded as a straight line because the displacement is very small.

Here, if the force generated by the laminated piezoelectric element is applied to the vicinity of the fixed end of the biaxial parallel spring, the lever end is largely displaced by the leverage principle. As a result, the driving amount of the cantilever 10 is reduced. Can be bigger.

Further, the force of the laminated piezoelectric element is applied to the member 2
When the cantilever 10 is applied from a direction perpendicular to Y (Y-axis direction), the cantilever 10 moves in the Y-axis direction for the same reason.

As described above, since the displacement members 21, 22, 23, and 24 are orthogonal to each other, the two-axis parallel spring 1, which is a displacement member, has a structure in which a force is applied to the members 23 and 24. In this case, there is no interference in the displacement of the cantilever 10. Therefore, such a parallel spring is called a biaxial parallel spring.

In particular, as shown in FIG.
The frame formed by ２４24 is substantially square, each side of the square is parallel to the X-axis or Y-axis, and the position where the force is applied in the X-axis direction and the Y-axis direction is symmetric with respect to the diagonal of the square With the position, the probe can be driven only in the X-axis direction in the stacked piezoelectric element for driving in the X-axis direction, and only in the Y-axis direction in the stacked piezoelectric element for driving in the Y-axis direction.
If the amount of movement of the laminated piezoelectric element for driving in the X-axis direction is the same as the amount of movement of the laminated piezoelectric element for driving in the Y-axis direction, the amount of movement of the probe can be the same.

In order to prevent interference between the ends in the X-axis direction and the Y-axis direction, the four members need not be substantially square, but a substantially rectangular shape is sufficient. However, to make the leverage the same, it is preferable that the leverage be substantially square.

Next, referring to FIG.
A method of measuring the driving amount of the axis parallel spring will be described. The mirror 8 is provided on the two members 23 and 24 closer to the support end (fixed end) 30 of the biaxial parallel spring 1 (the members provided on the member 23 are not shown), and are of a stacked type. When the members 23 and 24 rotate by the driving force of the piezoelectric element, the mirror 8 also tilts at the same time. Light 33 from a laser is incident on the mirror 8 and reflected light 34 is incident on a position sensor diode. The position sensor diode is, for example, a two-division photodiode, and can detect the movement of the center of gravity of the incident light by subtracting the amount of light incident on each light receiving surface. Machine lever 2
When the mirrors 3 and 24 are driven and the mirror 8 is tilted, the optical axis of the laser 28 reflected therefrom is tilted. Accordingly, the position of the laser spot incident on the position sensor moves, so that the driving amount of the biaxial parallel spring can be measured.

The principle of driving the two-axis parallel spring has been described with reference to FIG. 2. However, there are some restrictions on the design of the two-axis parallel spring so that the two-axis driving does not really interfere with each other. Referring to FIG. 3, a description will be given of the restriction and a method of solving the restriction. FIG. 3A shows a state in which a driving force 31 acts on the biaxial parallel spring 1. The driving force of the arrow 31 is the member 2
4, the driving force is transmitted to the other member 23 through the biaxial parallel spring. When the force transmitted to the member 23 is transmitted to the other Y (Y-axis driven) laminated piezoelectric element and the laminated piezoelectric element contracts, the driving trajectory of the tip of the biaxial parallel spring becomes as indicated by an arrow 32. It becomes an arc. That is, the driving in one axis direction interferes with the other axis, and a displacement as indicated by an arrow 35 occurs. In order to reduce this interference, it is necessary to prevent the driving force applied to one member 24 from being transmitted to the other member 23.

For the above reasons, as shown in FIG.
The hinges 28, 29 closer to the fixed end 30 of the members 23, 24 of the biaxial parallel spring 1 are
It is designed to have stronger elasticity than 7,30.
For this reason, most of the driving force applied to the member 24 is received by the hinge portion 29 closer to the fixed end 30 of the biaxial parallel spring 1.

With this design, when the force 31 is applied to the member 24, the member 23 is hardly displaced as shown in FIG.
A displacement of 0 is limited in the X-axis direction.

Next, the principle of driving the cantilever in the vertical direction and an example of a method of detecting the driving amount will be described with reference to FIG. In the embodiment shown in FIG.
Drives the cantilever 10 in the vertical direction (Z-axis direction). The vertical parallel spring 2 is composed of four members joined so as to form a substantially square shape, and hinge portions having low bending rigidity are formed at four corners thereof. do.

The vertical parallel spring 2 has a projection 36 on the upper surface of the upper member. When a driving force from the vertical driving piezoelectric element is applied to the projection 36 in the direction of arrow 37, the four members rotate around the hinge.
Therefore, the protrusion 36 also tilts in the direction of the arc arrow 38.
As a result, the free end of the vertical parallel spring 2 is displaced in the vertical direction. At this time, the trajectory of the free end of the vertical parallel spring 2 is actually a circular arc, but since the displacement is small compared to the length of the mechanical lever, it can be regarded as a straight line. Therefore, the biaxial parallel spring 1 fixed to the free end of the vertical parallel spring 2 and the cantilever 10 at the end thereof are linearly moved vertically (arrow 3).
9 directions) and there is no interference with other axes.

In this embodiment, the probe 10 is driven in the vertical direction by applying a force to the projection provided on one of the members constituting the substantially square shape in the horizontal direction. Therefore, the laminated piezoelectric element for driving in the Z-axis direction is
As shown in FIG. 1, it can be installed at a long position in the lateral direction. Therefore, the height of the entire apparatus does not increase, and the apparatus can be installed at the tip of the optical microscope.

In this embodiment, the vertical parallel spring 2 is formed by combining four members forming a substantially square shape, but is not particularly limited to a square shape and may be a rectangular shape.

The method of measuring the amount of displacement of the longitudinal parallel spring 2 in the longitudinal direction is in principle the same as the method of measuring displacement in the horizontal direction.
A mirror 8 is provided on the protrusion 36, and light 40 from a laser, which is a light source, is incident on the mirror 8;
The movement of the center of gravity of the laser light is measured by making the reflected light 41 incident on the position sensor diode. This is a value proportional to the driving amount of the vertical parallel spring.

Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a perspective view showing a probe driving device according to the second embodiment of the present invention. In FIG. 5, reference numerals 51 and 52 denote twisted plate portions corresponding to “two members having a wide width and a small thickness in a direction in which a force is applied from the third driving force generating device” according to claim 7. Reference numeral 53 denotes a rotational force transmitting unit that transmits the force of the laminated piezoelectric element 6 as a third driving force generator to the torsion plate, 54 denotes a piezoelectric element support, 55 denotes a half mirror, and 56 denotes a detector.

The difference between the second embodiment and the first embodiment is, first, the method of driving the cantilever in the vertical direction. In the first embodiment, the vertical parallel spring is used. However, in the present embodiment, the cantilever is driven in the vertical direction using a vertical rotation drive mechanism instead of the parallel spring. The vertical rotation drive mechanism includes torsion plate portions 51 and 52 having two degrees of freedom in the torsion direction, and one rotational force transmitting portion 53 that transmits an external force to the center of rotation of the torsion plate portions 51 and 52.

The torque transmitting section 53 is joined to the biaxial parallel spring 1. The torsion plate portions 51 and 52 are thin members having a wide width in the expansion and contraction direction of the laminated piezoelectric element 6 and are joined to the biaxial parallel spring 1 from two directions orthogonal to each other. .

When the laminated piezoelectric element 6 expands, the force acts on the point of action of the rotational force transmitting section 53. This force becomes a force to twist the torsion plate portions 51 and 52, and
When the torsion plates 51 and 52 are twisted, the two-axis parallel spring 1 rotates in the Z-axis direction. Therefore,
The cantilever 10 also moves in the Z-axis direction.

Another difference of the second embodiment from the first embodiment is a method of detecting the displacement of the cantilever in ten vertical directions (Z-axis direction). In the second embodiment, a new light source is not used as a light source for detecting the amount of driving in the vertical direction, and a laser 11 provided above the cantilever 10 for an atomic force microscope is used as a light source. A part of the light generated by the optical lever laser is reflected by the half mirror 55, and the position of the detector 56 is adjusted and fixed on the support substrate 3 and the detector 56 includes a position sensor diode.
Incident on Thus, the driving amount of the cantilever 10 in the vertical direction is measured.

A method for driving the cantilever and a method for detecting the amount of driving of the cantilever according to the second embodiment will be described with reference to FIG. FIG. 6A shows the same principle as in the first embodiment.
1 shows a state in which a cantilever 10 is driven in a horizontal direction by a two-axis parallel spring 1. FIG. 6B is a perspective view showing a method of driving the cantilever 10 in the vertical direction and a method of detecting the method according to the second embodiment. In FIG.
Reference numeral 57 denotes a force applied by the vertical driving laminated piezoelectric element, and reference numerals 58 and 59 denote light reflection directions by the half mirror 55.

When the driving force from the piezoelectric element acts on the rotational force transmitting portion 53 in the direction of arrow 57, the two torsion plate portions 5
1 and 52 each cause an inward twist. The twist causes the free end of the longitudinal rotation drive mechanism to tilt. As a result, the biaxial parallel spring 1 and the cantilever 10 fixed to the distal end are inclined in the state shown by the two-dot chain line, and are driven in the vertical direction. The trajectory of the drive is a circular arc, but since the drive amount is small, it can be approximated to a straight line.

The detection of the driving amount is performed as follows. A part of the laser beam from an optical lever laser (not shown) for detecting the deflection of the cantilever incident on the half mirror 55 is reflected by the half mirror 55 and reflected in the direction of the solid arrow 58. Here cantilever 1
When 0 is driven by the vertical rotation drive mechanism, the inclination of the half mirror 55 also changes. The optical axis of the laser reflected by the half mirror 55 moves in the direction of the dotted arrow 59. By detecting the movement with a detector using a position sensor diode, the driving amount of the cantilever 10 in the vertical direction can be measured.

Next, a method of driving the cantilever and a method of detecting the amount of driving of the cantilever according to the third embodiment of the present invention will be described with reference to FIG. FIG. 7 is a perspective view showing a probe driving device according to the third embodiment of the present invention. In FIG. 7, reference numeral 60 denotes a detector using a position sensor diode.

This embodiment differs from the first and second embodiments in the method of driving the cantilever 10 in the vertical direction. In the present embodiment, the vertical parallel spring 2 is used similarly to the first embodiment, but the difference from the first embodiment is that the vertical parallel spring 2 End).

That is, in the present embodiment, the biaxial parallel spring 1 is deformed by the laminated piezoelectric elements 4 and 5, and the longitudinal parallel spring 2 attached to its free end.
First, the XY axis position of (and the cantilever 10) is determined. Then, the displacement of the vertical parallel spring 2 determines the position of the cantilever 10 in the Z-axis direction.

Another difference of this embodiment from the first and second embodiments is a method of detecting the displacement of the cantilever 10 in the vertical direction. In the present embodiment,
As in the second embodiment, a new light source is not used as a light source for detecting the amount of vertical driving, and a laser 11 provided above the cantilever 10 for an atomic force microscope is used as a light source. However, the difference from the second embodiment is that the detector 60 for detecting the driving amount in the vertical direction is
This is a point provided on the side surface of the axis-parallel spring 1.

Next, the principle of driving the vertical parallel spring 2 used in the third embodiment will be described with reference to FIGS. FIG. 8 shows an example of an embodiment of a vertical parallel spring. 8, reference numerals 61 to 64 denote members having high flexural rigidity, reference numerals 65 to 68 denote hinge portions, and reference numerals 69 and 70 denote projection portions.

The vertical parallel spring 2 is formed by connecting members 61 to 64 so as to form a rectangular frame, and hinge portions 65 to 68 having low bending stiffness are formed at the four corner connection portions. I have. The member 61 and the member 63 have projections 69 and 70, respectively, and the laminated piezoelectric element 6 is sandwiched between the projections 69 and 70.

When the multi-layer piezoelectric element 6 extends in the direction of the arrow shown in (b), the vertical parallel spring 2 deforms as shown in (b), and the cantilever 10 provided at the displacement end thereof.
Are driven in the vertical direction.

FIG. 9 shows another embodiment of the vertical parallel spring, which is an embodiment corresponding to claim 11 of the present invention. In FIG. 9, 71 to 74 are members having high bending rigidity,
Reference numerals 75 to 78 denote hinge portions and 79 projections.

The vertical parallel spring 2 is formed by connecting members 71 to 74 so as to form a rectangular frame, and hinge portions 75 to 78 having low bending rigidity are formed at the four corners. I have. Each of the members 71 has a protrusion 79, and the multilayer piezoelectric element 6 is sandwiched between the protrusion 79 and the member 72.

When the multi-layer piezoelectric element 6 extends in the direction of the arrow shown in (b), the vertical parallel spring 2 is deformed as shown in (b), and the cantilever 10 provided at the displacement end thereof moves in the vertical direction. Driven.

This embodiment is characterized in that the laminated piezoelectric element is installed horizontally. That is,
When a large displacement is required in the vertical direction, a piezoelectric element having a large displacement is naturally used. In such a case, in the embodiment shown in FIG. 8, the height of the vertical parallel spring is increased, and it is difficult to attach the sample to the tip of the optical microscope to perform positioning of the sample and the cantilever. .

In the vertical parallel spring 2 shown in FIG. 9, the laminated piezoelectric element 6 is inserted in the horizontal direction, and the members constituting the surrounding vertical parallel spring 2 are driven in the horizontal direction. It converts the force into a longitudinal displacement. Therefore, FIG.
According to the embodiment shown in (1), it is not necessary to increase the height in the vertical direction, so that the optical microscope can be easily attached to the tip.

The method of detecting the drive amount of the cantilever in the vertical and horizontal directions in the third embodiment is the same as that in the first and second embodiments, and a description thereof will be omitted.

[0108]

As described above, according to the first aspect of the present invention, the probe or the sample is connected to the free end of the displacement member to deform the displacement member.
Since the probe or the sample is moved in the two-dimensional plane, the height as a whole can be reduced and the probe or the sample can be attached to the tip of the optical microscope.
Further, since the deformable member can be made of a material having high rigidity, high-speed scanning can be performed by increasing the mechanical resonance frequency. Further, since the deformable member and each driving force generator are only in contact with each other and are not mechanically connected, the mass of each driving force generator is reduced by the movement of the probe or the material in the third direction. On the other hand, no inertial force is generated, and also in this respect, high-speed scanning can be performed by increasing the mechanical resonance frequency.

According to the second aspect of the present invention, the probe or the sample can be moved in different directions by the first driving force generator and the second driving force generator through one deformation member. .

According to the third aspect of the present invention, the probe or sample moving amount caused by expansion and contraction of the unit amount of the first driving force generation means and the probe or sample movement amount generated by expansion and contraction of the unit amount of the second driving force generation means. The amount of movement of the sample can be made the same.

In the invention according to claim 4, the driving in the X direction and the driving in the Y direction can be performed without interference.

In the invention according to claim 5, the probe or the sample can be operated three-dimensionally. Also,
The mechanical resonance point can be increased for the movement in the third direction, and the probe or the material can be scanned at a high speed also in the third direction.

In the invention according to claim 6, by forming the second displacement member from a material having high rigidity, the resonance frequency of the mechanical vibration can be increased, and the scanning in the Z-axis direction can be performed at a high speed. Becomes possible.

Also in the invention according to claim 7, the second displacement member is made of a material having high rigidity, so that the resonance frequency of mechanical vibration can be increased, and scanning in the Z-axis direction can be performed at high speed. Becomes possible.

In the invention according to claim 8, the probe or the sample can be moved in the Z-axis direction with a simple configuration.

According to the ninth aspect of the present invention, the probe or the sample can be accurately moved in the Z direction by expansion and contraction of the third driving force generator.

According to the tenth aspect, the mechanical resonance point at the time of scanning in the Z direction is increased, and the scanning speed in the Z direction can be increased. Further, interference between the movement in the XY direction and the movement in the Z direction can be completely eliminated.

According to the eleventh aspect of the invention, by forming the frame with a material having high rigidity, the mechanical resonance frequency can be increased and the scanning speed can be increased.

According to the twelfth aspect of the present invention, the third driving force generator can also be placed on the XY plane, and the height in the Z-axis direction can be kept low.

According to the thirteenth and fourteenth aspects of the present invention, only the reflecting member is attached to the displacement member (first displacement member) as the displacement measuring mechanism. Does not increase, so that the resonance frequency of the mechanical system does not decrease.

[Brief description of the drawings]

FIG. 1 is a diagram showing a probe driving device according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating a driving principle of a probe driving device.

FIG. 3 is a diagram showing a constraint of a two-axis parallel spring and a method of eliminating the constraint.

FIG. 4 is a diagram illustrating a method of driving a cantilever in a vertical direction and detecting a driving amount.

FIG. 5 is a diagram showing a probe driving device according to a second embodiment of the present invention.

FIG. 6 is a diagram illustrating a method of driving a cantilever and a method of detecting a driving amount thereof.

FIG. 7 is a diagram showing a probe driving device according to a third embodiment of the present invention.

FIG. 8 is a diagram showing an example of an embodiment of a vertical parallel spring.

FIG. 9 is a view showing another example of the embodiment of the vertical parallel spring.

FIG. 10 is a diagram showing an example of a conventional tube-type driving device.

FIG. 11 is a diagram showing an example of a conventional tri-pot type driving device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Biaxial parallel spring, 2 ... Vertical parallel spring, 3 ... Support base material, 4-6 ... Laminated piezoelectric element, 7 ... Light source, 8 ... Mirror,
9 Detector, 10 Cantilever, 11 Projector,
12: detector, 13: micrometer, 21 to 24
… A member with strong bending rigidity, 25-29… hinge part, 30…
Fixed end of biaxial parallel spring, 31: direction of force generated by laminated piezoelectric element, 32: movement direction of cantilever, 3
3 incident light, 34 reflected light, 35 moving direction of member, 3
6: Projection, 37: Direction of driving force from vertical driving piezoelectric element, 38: Movement direction of projection, 39: Movement direction of cantilever, 40: Incident light, 41: Reflected light, 51, 52 ...
Torsional plate part, 53 ... rotational force transmitting part, 54 ... piezoelectric element support, 55 ... half mirror, 56 ... detector, 57 ... direction of force applied by the vertical driving laminated piezoelectric element,
58, 59: Reflection direction of light by a half mirror, 60: Detector, 61 to 64: Member having high bending rigidity, 65 to 6
8 Hinge, 69, 70 Projection, 71 to 74 High bending rigidity member, 75 to 78 Hinge, 79 Projection

Claims (14)

[Claims] 1. A probe or sample driving device for moving a probe or a sample in a two-dimensional plane by expansion and contraction of a first driving force generating device and a second driving force generating device, wherein the first driving force generating device A deformable member that directly or indirectly abuts the device and the second driving force generating device and deforms by expansion and contraction thereof, wherein the deformable member moves at a fixed end that does not move by the deformation, and moves by the deformation. A probe or sample coupled to a free end of the displacement member to deform the displacement member, thereby moving the probe or sample in a two-dimensional plane. Drive. 2. The probe or sample driving apparatus according to claim 1, wherein the displacement member has a shape in which a frame is formed by bending and connecting at least four members having high bending rigidity to each other. The portion where the members having high bending stiffness are connected to each other is a portion having low bending stiffness, and the first driving force generation device and the second driving force generation device are close to the fixed end. A driving device for a probe or a sample, which is in direct or indirect contact with two members, respectively. 3. The probe or sample driving device according to claim 1, wherein the displacement member is symmetrical with respect to a straight line connecting a center of the fixed end and a center of the free end. A probe formed, wherein a position at which the first driving force generation device and the second driving force generation device are in contact with the displacement member is a symmetric position with respect to the straight line. Sample drive. 4. The probe or sample driving device according to claim 2, wherein, among the parts having a low bending stiffness, a part closer to a fixed end has a bending stiffness that is lower than that of the other parts. A probe or sample driving device characterized by being expensive. 5. The method according to claim 1, wherein
3. A driving device for a probe or a sample according to item 3, wherein a third driving force generating device for moving the probe or the sample in a direction different from the direction in the two-dimensional plane by expansion and contraction is provided, and the probe or the sample is three-dimensionally moved. A driving device for a probe or a sample, wherein the driving device moves the probe or sample. 6. One of claims 1 to 5
Item 8. The probe or sample driving device according to item 1, wherein the displacement member (first displacement member) is supported by a second displacement member that is displaced in a direction different from a direction in the two-dimensional plane, The probe or sample driving device according to claim 2, wherein the second deformable member is displaced by expansion and contraction of the third driving force generating device. 7. The probe or sample driving device according to claim 6, wherein the second displacement member forms a substantially rectangular frame by bending and connecting four members having high bending rigidity to each other. The portion where the members having high bending stiffness are connected to each other is a portion having low bending stiffness, and the third driving force generating device is a portion of the four members having high bending stiffness. A probe or sample driving device, wherein the driving device is in direct or indirect contact with one member close to the fixed end. 8. The probe or sample driving device according to claim 6, wherein the second displacement member has a wide width in a direction in which a force is applied from the third driving force generator,
The two members having a small thickness are connected to the first displacement member from two directions, respectively, and the two members are twisted in accordance with expansion and contraction of the third driving force generator. A probe or sample driving device for moving a probe or a sample in the third direction. 9. The probe or sample driving device according to claim 8, wherein the second displacement member is a straight line connecting a center of a fixed end and a center of a free end of the first displacement member. A probe or a sample driving device, wherein the point of action of the force of the third driving force generator is on a symmetric axis. 10. A probe or a sample is moved in a two-dimensional plane by expansion and contraction of a first driving force generation device and a second driving force generation device, and a probe or a sample is moved by expansion and contraction of a third driving force generation device. In a probe or a sample driving device for moving a sample in a third direction different from the direction in the two-dimensional plane, the probe or the sample driving device does not move due to expansion and contraction of the first driving force generation device and the second driving force generation device. A first displacement member having a fixed end, a free end that moves by expansion and contraction of the first driving force generation device and the second driving force generation device, and a first displacement member installed at a free end of the first displacement member. A second displacement member having a fixed end that does not move due to expansion and contraction of the third driving force generation device, and a free end that moves by expansion and contraction of the third driving force generation device; Deform the displacement member of By doing so, the second
Moving the second displacement member in a two-dimensional plane, and displacing the second displacement member in a direction different from the direction in the two-dimensional plane by the third driving force generating device; A probe or sample driving device for moving a probe or a sample coupled to a free end in a three-dimensional space. 11. The drive device for a probe or a sample according to claim 10, wherein the second displacement member is formed by bending and connecting four members having high bending rigidity to each other to form a substantially rectangular frame. The portion where the high bending rigidity member is joined is a portion having low bending rigidity, and the third driving force generating device is a part of the four high bending rigidity members. A probe or sample driving device, wherein the driving device is in direct or indirect contact with one member close to the fixed end. 12. The probe or sample driving device according to claim 11, wherein the second displacement member is configured such that one of two rigid members connected to the fixed end projects inward. The third driving force generator is provided between the protrusion and a member having no protrusion among the two highly rigid members connected to the fixed end. A driving device for a probe or a sample, characterized in that: 13. The method according to claim 2, wherein the first and second embodiments are different from each other.
1. The probe or sample driving device according to claim 12, wherein a reflective member is provided on a member having high rigidity near a fixed end of the displacement member (first displacement member), A driving device for a probe or a sample, comprising a mechanism for measuring a displacement of the displacement member (first displacement member) by irradiating light to the reflection member and detecting a change in a reflection angle. 14. The driving device for a probe or a sample according to claim 7, wherein the second displacement member has a high rigidity close to a fixed end of the second displacement member. A probe or sample driving mechanism, wherein a reflection member is provided on the member, and a mechanism for measuring the displacement of the second displacement member is provided by irradiating the reflection member with light and detecting a change in the reflection angle. apparatus.