JPH11237437A - Multi-channel measurement device, multi-channel inspection device, and computer-readable recording medium recording multi-channel measurement program - Google Patents

Abstract

(57) [Summary] [Problem] To enable individual control for each channel. A control unit includes a plurality of condition setting units.
By outputting an individual condition setting command to the control unit 22, a plurality of inspection channels including a set of the condition setting units 21 and 22 and the measurement units 31 and 32 are independently controlled.
To this end, the control unit 40 includes a plurality of processes 41a, 41b,
An inspection program 41 comprising an inspection program 41c and process pointers 42a,
42b and 42c. And the process pointer 4
By recognizing the next process from 2a, 42b, and 42c and acquiring the contents of the next process from the inspection program 41, the condition setting command and the measurement content for each inspection channel are determined.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-channel measurement device, a multi-channel inspection device, and a computer-readable recording medium on which a multi-channel measurement program is recorded. The present invention relates to a multi-channel inspection apparatus with improved work efficiency at the time of inspection and a computer-readable recording medium that records a multi-channel measurement program with improved work efficiency at the time of measurement.

[0002]

2. Description of the Related Art In a manufacturing process of a circuit board or the like, various operation checks are performed before shipping a product (or before incorporating it into another product) in order to guarantee the quality of a completed product. Inspection of such a product is performed using a predetermined inspection device. When performing an inspection, a product to be inspected is connected to an inspection device, and a test signal or the like is input from the inspection device to confirm that desired characteristics are obtained. However, if such an inspection process takes a long time,
Production efficiency decreases.

Therefore, recently, in order to improve productivity, an inspection apparatus having a measurement function of a plurality of channels is used. In the multi-channel inspection device, a plurality of objects are inspected by one device, and the time required for the inspection process is reduced. This is conceived in order to shorten the time required for setting the object to the inspection device (jig) with respect to the time required for the actual inspection.

[0004]

However, the measurement function in the conventional multi-channel inspection apparatus cannot be controlled independently for each channel. Therefore, the inspection process for a plurality of objects must always proceed at the same time. Then, even if the inspection target of one channel is determined to be defective during the inspection, it is impossible to remove the defective target until all the inspections of the other channels are completed, so that wasteful time is wasted.

[0005] Further, in the case where a certain failure occurs in a certain channel of a portion (fixture) for connecting the object and the inspection apparatus, in the related art, the entire inspection apparatus must be stopped and repaired. However, there is a problem that manufacturing cannot be performed during that time.

The present invention has been made in view of the above points, and has as its object to provide a multi-channel measuring device that can be individually controlled for each channel. It is another object of the present invention to provide a multi-channel inspection apparatus capable of individually controlling each measurement channel.

Another object of the present invention is to provide a computer-readable recording medium on which a multi-channel measurement program that can be individually controlled for each test channel is recorded.

[0008]

According to the present invention, in order to solve the above problems, in a multi-channel measuring device having a plurality of channels for measurement, when a condition setting command is received,
For the measurement target, a plurality of condition setting units for setting the measurement conditions specified by the condition setting command are provided corresponding to the condition setting unit, and specific conditions are set for the measurement target. A plurality of measurement units for measuring the phenomena occurring as a result of the above, and by outputting the individual condition setting commands to the plurality of condition setting units, a plurality of sets of the condition setting unit and the measurement unit And a control unit for controlling each of the measurement channels independently of each other.

According to such a multi-channel measurement device, each of the plurality of measurement channels is independently controlled by the control unit. Therefore, it is possible to end the measurement processing of one measurement channel and continue the processing of another measurement channel.

According to the present invention, in order to solve the above problems, in a multi-channel inspection apparatus having a plurality of inspection channels for simultaneously inspecting a plurality of inspection objects, the inspection objects are electrically contacted. And a plurality of connecting portions for electrical connection to each of the connecting portions, and when a condition setting command is received, a condition to be given to the inspection object becomes the inspection condition specified by the condition setting command. A plurality of condition setting units for outputting an electric signal to the connection unit, and an electric signal which is electrically connected to each of the connection units and is output from the connected connection unit. By outputting the individual condition setting commands to a plurality of measuring units and the plurality of condition setting units, a plurality of inspection channels including a set of the condition setting unit and the measuring unit are allocated. Multichannel inspection apparatus is provided, characterized in that it comprises a control unit for controlling respective independently.

According to such a multi-channel inspection apparatus, each of the plurality of inspection channels is independently controlled by the control unit. Therefore, it is possible to end the inspection processing of one inspection channel and continue the processing of another inspection channel.

In the present invention, in order to solve the above-mentioned problem, when a condition setting command is received,
A plurality of measurement units each including a set of a condition setting unit that sets a measurement condition specified by the condition setting command and a measurement unit that measures a phenomenon that occurs as a result of setting a specific condition on a measurement target. In a computer-readable recording medium recording a measurement program for controlling the channel, holding a measurement program consisting of a plurality of steps, and a process pointer indicating a step in which each of the measurement channels is being executed, Control means for acquiring the content of the process indicated by the process pointer from the measurement program, determining the content of a condition setting command to be output to the condition setting unit, and independently controlling a plurality of measurement channels, Computer-readable recording medium recording a measurement program characterized by causing a computer to function as a computer It is provided.

When the computer executes the measurement program recorded on such a medium, the functions necessary for the control section of the multi-channel measurement apparatus of the present invention are realized by the computer.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram illustrating the principle of the present invention. The multi-channel inspection apparatus of the present invention includes a plurality of connection units 11 and
12, a plurality of condition setting units 21 and 22, a plurality of measuring units 3
1 and 32 and a control unit 40. Each element has the following functions.

The connecting portions 11 and 12 are for making electrical contact with the corresponding test objects 1 and 2. The condition setting units 21 and 22 are electrically connected to the connection units 11 and 12, respectively, and upon receiving a condition setting command from the control unit 40, the conditions to be given to the inspection objects 1 and 2 are the condition setting commands. Connection unit 1 so that the specified condition is satisfied
An electric signal is output to the first and second signals. Measuring unit 31,
Reference numeral 32 is electrically connected to each of the connection portions 11 and 12, and measures an electrical signal output from the connected connection portions 11 and 12.

The control unit 40 includes a plurality of condition setting units 21 and
By outputting an individual condition setting command to the plurality of test channels 2, a plurality of inspection channels composed of a set of the condition setting units 21 and 22 and the measurement units 31 and 32 are independently controlled. For this purpose, the control unit 40 includes a plurality of subdivided processes 41.
An inspection program 41 including a, 41b, and 41c, and process pointers 42a, 42b, and 42c indicating processes in which each inspection channel is being executed are held. Then, the process to be performed next is recognized from the contents of the process pointers 42 a, 42 b, and 42 c, and the content of the corresponding process is acquired from the inspection program 41. Depending on the acquired process, the content of the condition setting command output to the condition setting units 21 and 22,
The contents of the signals to be measured by the measuring units 31 and 32 are determined.
Thereby, a plurality of test channels can be individually controlled.

Note that the multi-channel measuring device of the present invention
The configuration is the same as that of the multi-channel inspection apparatus except for the connection parts 11 and 12. However, the processing content is not limited to the inspection of the target object, and performs various measurement processing.

Hereinafter, specific embodiments to which the present invention is applied will be described. Here, a description will be given of a substrate inspection apparatus of a tape recorder having a condition setting unit and a measurement unit of two channels.

FIG. 2 is a configuration diagram of a substrate inspection apparatus for a tape recorder. The board inspection apparatus 100 includes a measuring apparatus 1
10 and two fixture units 120 and 130.

The measuring apparatus 110 includes a control section 111 for controlling the entire apparatus, and two condition setting sections 1 for setting inspection conditions.
12, 114 and two measuring units 11 for measuring the inspection result
3,115.

The control unit 111 has a CPU (Central Process
ing Unit), a memory, an I / O (Input Output), and a display device. The memory stores a system program for operating the apparatus itself and an inspection program in which an inspection sequence different for each inspection target substrate is recorded. The former is stored in ROM (Read Only Memory), and the latter is stored in RAM (Random Acce
ss Memory) and can be rewritten by a user operation in accordance with the inspection object. Then, the control unit 111
When a start signal, which is a signal for instructing the start of an inspection, is input from the fixture units 120 and 130, the start signal is output according to a sequence programmed in the inspection program.
The fixture unit 12 that controls the condition setting units 112 and 114 and the measurement units 113 and 115 and transmits a start signal
Inspection of the inspection target substrates 210 and 220 connected to 0 and 130 is started.

The condition setting units 112 and 114 include the control unit 11
In accordance with a command from the control unit 1, the control unit controls relay drivers 112b and 114b for selecting signals to be extracted from the oscillators 112a and 114a and the inspection target substrates 210 and 220.

The oscillators 112a and 114a are connected to the corresponding fixture units 120 and 130, and output various test signals to the fixture units 120 and 130. The oscillation frequency and output amplitude of the test signal change according to the contents of the test program. The relay drivers 112b and 114b are
The control unit 111 is connected to a relay and an actuator control device (such as an electromagnetic valve) provided in the control unit 111 and controls the relay and the like according to a command from the control unit 111. This allows, for example,
Select one signal from line out, headphone out, and head output from the signals to be extracted from the inspection target substrates 210 and 220, or set the tape selector SW to NORMA.
A mechanism for switching between L and METAL can be realized.

The measuring units 113 and 115 are connected to the corresponding fixture units 120 and 130, and receive various signals output from the inspection target substrates 210 and 220 via the fixture units 120 and 130. And
It has a function of measuring an AC voltage, a DC voltage, a frequency, and the like of an electric signal extracted from the inspection target substrates 210 and 220. With these measurement functions, the electrical characteristics of the inspection target substrate are measured, and the pass / fail judgment is made by comparing the electric characteristics with a predetermined standard.

The fixture sections 120 and 130 have contact probes for making electrical contact with the substrates 210 and 220 to be inspected. By connecting the contact probes to the terminals of the substrates to be inspected 210 and 220, power is supplied to the substrates to be inspected 210 and 220 for operating the circuit, and input and output of inspection signals are performed.

Here, the condition setting unit 112 and the measuring unit 113 corresponding to the fixture unit 120 are referred to as “channel A”.
And The condition setting unit 114 and the measurement unit 115 corresponding to the fixture unit 130 are referred to as “channel B”.

Next, the configuration of the fixture units 120 and 130 will be described. In the following description, the configuration of the fixture unit 120 of “Channel A” will be described as an example, but the configuration of the fixture unit 120 of “Channel B” is the same.

FIG. 3 is a diagram showing a circuit example of the fixture unit 120. The central part of FIG.
The circles shown on both sides of the inspection target substrate 210 represent the contact probes 121a to 121m that make electrical contact with the inspection target substrate 210. The contact probe 121a is connected to a ground terminal (GN
Make electrical contact with D). Contact probe 121
b, 121c make electrical contact with the head terminals (HEAD +, HEAD-) of the substrate 210 to be inspected. The contact probes 121d and 121e are
Make electrical contact with 10 microphone terminals (MIC +, MIC-). The contact probes 121f and 121g make electrical contact with the power supply terminals (+ B, GND) of the inspection target substrate 210. Contact probes 121h, 121i
Is a speaker output terminal (SPOU) of the inspection target substrate 210.
Make electrical contact with T). Contact probe 121
j, 121k are LEDs (Light-E
Making electrical contact with terminals (LED, GND). The contact probes 121l and 121m make electrical contact with the motor power supply terminals (M +, M-) of the inspection target substrate 210.

The left jack (Slg IN) 1 in FIG.
The signal output from the oscillator 112a of the measuring device 110 is connected to 22. Jack (0UT) 1 on the right side of FIG.
23a and 123b are connected to the measuring unit 113 of the measuring device 110.

The jack 122 is connected to the reproducing head 124a via the relay Ry7, and further connected to the contact probes 121b and 121c via the relay Ry8. The jack 122 is connected to the relays Ry9 and Ry9.
Contact probes 121d and 121e via y10
It is connected to the.

The jack 123 has relays Ry1 to Ry6
Are connected to various signal output terminals and the like. That is, the contact probe 12 is connected via the relay Ry1.
1h, 121i, connected to an earphone jack 125 via a relay Ry2, and connected to contact probes 121j, 121k via a relay Ry3. Further, it is connected to the recording head 124b via the relay Ry4, and further connected to the contact probes 121b and 121c via the relay Ry8. Also, contact probes 121d, 121d are connected via relay Ry5.
e, connected to the contact probes 121l and 121m via the relay Ry6, and connected to the earphone jack 1
25, and the recording head 124b.

FIG. 4 is a circuit diagram of an input / output unit of a fixture unit for connecting to a relay driver and a control unit. The input / output terminal 126 of the fixture unit 120 includes
A plurality of terminals connected to a relay or the like are provided. In the figure, terminals indicated as "Ry-1" to "Ry-10" are coil portions 127a to 127 of relays Ry1 to Ry10, respectively.
7j. Also, “Ry-17” to
The terminals indicated as “Ry-21” are the electromagnetic valves 127k to
127o. The terminal labeled "START" in the figure is connected to the start switch 127p,
ESET ”is the reset switch 127q
It is connected to the. Here, the electromagnetic valves 127k to 12k
7o is an ON-OF of an actuator for mechanically switching switches mounted on the inspection target substrate 210.
F.

In the figure, "Ry-1" to "Ry-2"
Each terminal indicated by "4" is connected to the relay driver 112b of the measuring device 110, and is controlled by the relay driver 112b according to the inspection sequence. In the figure, "STA
The terminal indicated by “RT” is connected to the control unit 111, and when the start switch 127p is pressed, a start signal is sent to the control unit 111.

In the above-described substrate inspection apparatus 100 for a tape recorder, the control unit 111 of the measuring apparatus 110
Two sets of condition setting units 112 and 114 and measuring units 113 and 11
5 are controlled independently of each other,
Similarly, by separating 0 and 130 for each channel, efficiency of inspection and improvement of maintainability are improved. For this purpose, the following information is stored in the control unit 111.

FIG. 5 is a diagram showing information held by the control unit. The inspection program 111a is an area in which the inspection sequence of the inspection target substrate is described. Here, the condition setting units 112 and 114 and the measurement unit 1 for each inspection step
13 and 115 are described. The step sequences 111b and 111c are portions of the actual control program that has been subdivided, and receive the current values of the step pointers 111d and 111e and the values of the sequence pointers 111f and 111g as arguments from the main inspection program and respond accordingly. Performs hardware control.
These step sequences 111b and 111c are provided corresponding to “Channel A” and “Channel B”, respectively.

The step pointers 111d and 111e store the currently executed step numbers of the respective channels. Here, the step pointer 111d corresponding to “Channel A” is referred to as “Step Pointer A”, and the step pointer 111e corresponding to “Channel B” is referred to as “Step Pointer B”.

Similarly, the sequence pointers 111f, 1
11g stores the sequence number in the step of each channel. The sequence number is the order in which the operation in the step is subdivided. In this case, the operation is subdivided into five parts: "wait for start", "oscillator setting", "relay setting", "measurement", and "judgment". ing. By subdividing the operation in the step, an apparent multitask operation can be obtained. Here, the sequence pointer 111f corresponding to “Channel A” is defined as “Sequence Pointer A”, and the sequence pointer 111g corresponding to “Channel B” is defined as “Sequence Pointer B”.

FIG. 6 is a flowchart showing a control procedure of the measuring device. This flowchart will be described along with step numbers. At the start of the main program, “step pointer A”, “step pointer B”, “sequence pointer A”, and “sequence pointer B” are set to “0”, respectively, and “channel A”, “channel, B” Is waiting for a start signal. [S1] It is determined whether the value of the "step pointer A" is "0". If “0”, the process proceeds to step S2, and “0”
If not, the process proceeds to step S4. [S2] It is determined whether the start signal of "Channel A" is "ON". If the start signal is "ON", the process proceeds to step S3, and if it is "OFF", the process proceeds to step S4. [S3] The value of "step pointer A" is set to "1", and the value of "sequence pointer A" is set to "1". [S4] It is determined whether the value of the "step pointer B" is "0". If “0”, the process proceeds to step S5, and “0”
If not, the process proceeds to step S7. [S5] It is determined whether the start signal of "Channel B" is "ON". If the start signal is "ON", the process proceeds to step S6, and if it is "OFF", the process proceeds to step S7. [S6] The value of "step pointer B" is set to "1", and the value of "sequence pointer B" is set to "1". [S7] The processing of "channel A" is executed. What is executed at this time is the processing of the sequence indicated by “sequence pointer A” of the step number indicated by “step pointer A”. When the processing is completed, “1” is added to the value of “sequence pointer A”. [S8] The processing of "channel B" is executed. What is executed at this time is the processing of the sequence indicated by “sequence pointer B” at the step number indicated by “step pointer B”. When the processing is completed, “1” is added to the value of “sequence pointer B”. [S9] It is determined whether the value of "sequence pointer A" exceeds "4". If it exceeds "4", the process proceeds to step S10, and if it does not exceed "4", the process proceeds to step S10.
Proceed to 13. [S10] The value of "sequence pointer A" is set to "1", and "1" is added to the value of "step pointer A". [S11] The value of "step pointer A" is the end step (in this example, " It is determined whether or not it is equal to a value obtained by adding 1 to "STEP10"). If they are equal, the process proceeds to step S12, and if not, the process proceeds to step S13. [S12] Comprehensive determination of "channel A" is performed. After the determination is completed, the value of “step pointer A” and the value of “sequence pointer A” are set to “0”. [S13] It is determined whether the value of the "sequence pointer B" exceeds "4". If it exceeds "4", the process proceeds to step S14, and if it does not exceed "4", the process proceeds to step S1. [S14] The value of "sequence pointer B" is set to "1", and "1" is added to the value of "step pointer B". [S15] The value of "step pointer B" is one added to the end step. Determine if it is equal to the value. If they are equal, the process proceeds to step S16. If they are not equal, step S1 is performed.
Proceed to. [S16] Comprehensive determination of "channel B" is performed. After the end of the determination, the value of “step pointer B” and the value of “sequence pointer B” are set to “0”, and the process proceeds to step S1.

Here, if no start signal is input to both "Channel A" and "Channel B", steps S1, S2, S4, S5, S7, S8, S9, S13,
Following the loop of S1, no operation takes place.
If the start signal is input only on the “channel A” side, steps S1, S2, S3, S4, S5, S7, S
After following steps S8, S9, S13, and S1, steps S1,
In the loop of S4, S5, S7, S8, S9, S13, S1, the inspection program "STEP" of "Channel A"
1 ". "STEP1" sequence is "4"
If the value of "sequence pointer A" becomes "5", the process branches to step S10 by the conditional branch of step S9, and executes the check program of "STEP2".

If a "channel B" start signal is not input during this series of operations, no operation is performed on the "channel B side". When a start signal of “Channel B” is input while “Channel A” is executing the inspection program, “Channel B” starts inspection from “STEP 1” regardless of the operation of “Channel A”.

By processing according to such a procedure,
“Channel A” and “channel B” can be inspected independently of each other. Here, if the judgment is NG in a certain step of the inspection program, to terminate the inspection without executing the remaining steps, “4: Judgment” of “step sequence A” and “step sequence B” May be added to the program of (1) to forcibly change the "step pointer A" and the "step pointer B" to the final step when the result is NG.

The case of two channels has been described above. To apply this to three or more channels, the step sequence, step pointer, and sequence pointer of FIG. Steps S1, S2, S3, S of the program
It can be easily realized by expanding the portions of 7, S9, S10, S11, and S12 according to the number of channels.

Thus, when one of the plurality of inspection objects is determined to be defective during the inspection, the inspection can be stopped without affecting the other inspection object, so that unnecessary inspection time is reduced. Can be omitted. This is more effective as the percentage of defects increases.

In the case where a defect (such as poor contact due to exhaustion of a contact probe) occurs in one of the plurality of fixture parts during the inspection, it is necessary in the prior art to stop the entire apparatus for repair. According to the present apparatus, a fixture free of trouble can be inspected as before, and a decrease in production quantity due to repair can be minimized.

The processing functions of the control unit can be implemented by various computers. In that case,
The processing contents of the functions that the control unit should have are described in a program recorded on a computer-readable recording medium, and the above processing is realized by the computer by executing this program on the computer. Examples of the computer-readable recording medium include a magnetic recording device and a semiconductor memory. When distributing in the market, the program is stored in a portable recording medium such as a CD-ROM (Compact Disk Read Only Memory) or a floppy disk and distributed, or stored in a storage device of a computer connected via a network. You can transfer it to another computer via a network.
When the program is executed by the computer, the program is stored in a hard disk device or the like in the computer, and is loaded into the main memory and executed.

[0046]

As described above, in the multi-channel measurement device of the present invention, each of the plurality of measurement channels is controlled independently. The processing of only the portion in which is generated can be stopped, and the processing of other channels can be continued. As a result, when performing similar measurements in large quantities,
A decrease in work efficiency at the time of occurrence of a trouble can be minimized.

Further, according to the multi-channel inspection apparatus of the present invention, each of the plurality of inspection channels is independently controlled, so that a defect of the inspection object is found in some of the channels or trouble occurs. Even in the case of occurrence, processing of only the problem part can be stopped, and inspection processing of other channels can be continued. As a result, in inspection in a manufacturing process or the like, a decrease in productivity when a problem occurs can be minimized.

In a computer-readable recording medium on which the measurement program of the present invention is recorded, the computer can execute the recorded measurement program to control the plurality of measurement channels independently. It becomes possible.

[Brief description of the drawings]

FIG. 1 is a principle configuration diagram of the present invention.

FIG. 2 is a configuration diagram of a substrate inspection device of the tape recorder.

FIG. 3 is a diagram illustrating a circuit example of a fixture unit.

FIG. 4 is a circuit diagram of an input / output unit of a fixture unit for connecting to a relay driver and a control unit.

FIG. 5 is a diagram showing information held by a control unit.

FIG. 6 is a flowchart showing a control procedure of the measuring device.

[Explanation of symbols]

1, 2,... Inspection object, 11, 12,.
... condition setting part, 31, 32 ... measuring part, 40 ... control part, 4
1 ... Inspection program, 41a-41c ... Process, 42a-
42c: Process pointer

Claims (7)

[Claims] 1. A multi-channel measuring device having a plurality of channels for measurement, comprising: a plurality of condition setting units for setting a measurement condition specified by the condition setting command on a measurement object when a condition setting command is received; A plurality of measurement units provided corresponding to the condition setting unit and measuring a phenomenon that occurs as a result of setting a specific condition on the measurement target; and a plurality of the condition setting units. A control unit that independently controls a plurality of measurement channels each including a set of the condition setting unit and the measurement unit by outputting the condition setting command. apparatus. 2. The method according to claim 1, wherein the control unit holds a measurement program including a plurality of processes and a process pointer indicating a process executed in each of the measurement channels. Recognizing a step to be executed next, and acquiring the contents of the next step from the measurement program to determine the contents of the condition setting command to be output to the condition setting unit. Item 4. The multi-channel measurement device according to Item 1. 3. The control section terminates the measurement processing of the corresponding measurement channel when it is determined that the specific measurement channel is defective as a result of the quality determination of the measurement by the measurement section. Claim 1 characterized by the following:
A multi-channel measuring device as described. 4. A multi-channel inspection apparatus having a plurality of inspection channels for simultaneously inspecting a plurality of inspection objects, a plurality of connection portions for making electrical contact with the inspection object, and the connection portions Are electrically connected to each other, and upon receiving a condition setting command, so that the condition to be given to the inspection target is the inspection condition specified by the condition setting command,
A plurality of condition setting units that output electric signals to the connection unit; and a plurality of condition setting units that are electrically connected to the connection units and measure the electric signals output from the connected connection units. By individually outputting the condition setting commands to a plurality of the condition setting units, a plurality of inspection channels formed by a set of the condition setting unit and the measurement unit are independently controlled. A multi-channel inspection device, comprising: 5. The control unit holds an inspection program including a plurality of processes and a process pointer indicating a process executed in each of the inspection channels, and uses the process pointer to specify a specific one of the inspection channels. Recognizing a step to be executed next, and acquiring the contents of the next step from the measurement program to determine the contents of the condition setting command to be output to the condition setting unit. Item 5. A multi-channel inspection device according to item 4. 6. The control section, if the result of the quality determination of the measurement result by the measurement section is determined to be defective in a specific inspection channel, terminates the inspection processing of the corresponding inspection channel. 5. The method according to claim 4, wherein
A multi-channel inspection device as described. 7. When a condition setting command is received, a condition setting unit that sets a measurement condition specified by the condition setting command for a measurement target, and a specific condition is set for the measurement target. In a computer-readable recording medium recording a measurement program for controlling a plurality of measurement channels formed by a set with a measurement unit for measuring a phenomenon that occurs as a result, a measurement program including a plurality of steps; Holding a process pointer indicating a process in which each of the channels is being executed, and acquiring the content of the process indicated by the process pointer from the measurement program, thereby outputting the content of a condition setting command output to the condition setting unit. And a computer functioning as control means for independently controlling a plurality of measurement channels. Computer readable recording medium recording a measurement program.