JPH11228139A - Method for producing titanium-containing composite oxide powder - Google Patents
Method for producing titanium-containing composite oxide powderInfo
- Publication number
- JPH11228139A JPH11228139A JP2551198A JP2551198A JPH11228139A JP H11228139 A JPH11228139 A JP H11228139A JP 2551198 A JP2551198 A JP 2551198A JP 2551198 A JP2551198 A JP 2551198A JP H11228139 A JPH11228139 A JP H11228139A
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- Japan
- Prior art keywords
- composite oxide
- oxide powder
- emulsion
- titanium
- suspension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】
【課題】誘電体、圧電体として広く使用される、均質で
微細なチタン含有複合酸化物粉末を簡便なプロセスで安
価に製造できる方法を確立することを目的とする。
【解決手段】粒径100nm以下あるいは比表面積15m
2/g以上のチタニア粒子と金属塩を溶解した水溶液と
を混合して懸濁液とする懸濁液形成工程と、得られた懸
濁液に有機溶剤、分散剤を添加し該懸濁液をエマルジョ
ンとするエマルジョン形成工程と、得られたエマルジョ
ンを噴霧燃焼させて複合酸化物粉末とする燃焼工程と、
からなることを特徴とするチタン含有複合酸化物粉末の
製造方法。
(57) [Problem] To provide a method capable of inexpensively producing a homogeneous and fine titanium-containing composite oxide powder widely used as a dielectric or a piezoelectric by a simple process. The particle size is 100 nm or less or the specific surface area is 15 m.
2 / g or more of titania particles and an aqueous solution in which a metal salt is dissolved to form a suspension, and an organic solvent and a dispersant are added to the obtained suspension to form a suspension. An emulsion forming step of forming an emulsion, and a combustion step of spray-burning the obtained emulsion to form a composite oxide powder,
A method for producing a titanium-containing composite oxide powder, comprising:
Description
【0001】[0001]
【発明の属する技術分野】本発明は、均質で微細なチタ
ン含有複合酸化物粉末の製造方法に関する。[0001] The present invention relates to a method for producing a homogeneous and fine titanium-containing composite oxide powder.
【0002】[0002]
【従来の技術】チタン酸バリウム、チタン酸ストロンチ
ウム、チタン酸ジルコニウム、チタン酸鉛等のチタン含
有複合酸化物は、誘電性、圧電性等に優れていることか
ら、積層型コンデンサ、アクチュエータ等に広く利用さ
れている。近年のデバイス小型化の要求から積層体の厚
さは減少傾向にあり、それに伴い均質で微細な原料粉末
が求められている。2. Description of the Related Art Titanium-containing composite oxides such as barium titanate, strontium titanate, zirconium titanate, and lead titanate have excellent dielectric properties and piezoelectric properties, and are widely used in multilayer capacitors and actuators. It's being used. In recent years, the thickness of the laminate has been decreasing due to a demand for miniaturization of devices, and accordingly, a uniform and fine raw material powder has been required.
【0003】これらの要求に対して、ゾルゲル法(E.Wu
et al.,Mat.Res.Soc.Symp.Proc.,Vol.32,169-174(198
4))、水熱合成法(H.Kumazawa et al., J.Mat.Sci.,Vo
l.31,2599-2602(1996))、溶液法(M.Leoni et al.,J.M
at.Sci.lett.,Vol.15,1302-1304(1996))等による粉末
合成が検討されてきた。しかしながら、ゾルゲル法は高
価なアルコキシド原料を使用するため高コストであり、
水熱合成法、溶液法は仮焼、乾燥、解砕工程が必要なた
めプロセスが複雑であるといった問題がある。[0003] In response to these requirements, the sol-gel method (E. Wu
et al., Mat.Res.Soc.Symp.Proc., Vol. 32, 169-174 (198
4)), hydrothermal synthesis method (H. Kumazawa et al., J. Mat. Sci., Vo
l. 31, 2599-2602 (1996)), solution method (M. Leoni et al., JM
at. Sci. lett., Vol. 15, 1302-1304 (1996)) and the like have been studied. However, the sol-gel method is expensive because it uses expensive alkoxide raw materials,
The hydrothermal synthesis method and the solution method have a problem that the processes are complicated because calcination, drying, and crushing steps are required.
【0004】また特開平8−169715号公報には、
二酸化チタンの金属酸化物微粒子と、硝酸バリウムの金
属イオンを含む金属硝酸塩水溶液とを燃料(例えば水溶
性アミノ酸)と共に自己発火させ複合酸化物微粒子を合
成する方法が開示されている。上記に自己発火による複
合酸化物微粒子の形成方法では温度分布ができ易く、均
質な複合酸化物微粒子になりにくい。その結果、他の組
成の複合酸化物である第2相が析出し易い不具合があ
る。たとえば、上記の公報の図1に示されているBaT
iO3のX線回折パターンにも29゜付近にBa2TiO
4と考えられる第2相ピークが観察される。したがっ
て、自己発火法では均質の複合酸化物微粒子を得るのが
困難である。また、上記の公報では微粒子の形成が可能
としているが、具体的な微粒子径についての記載は原料
および生成物については言及されていない。Japanese Patent Application Laid-Open No. 8-169715 discloses that
There is disclosed a method of synthesizing composite oxide fine particles by self-igniting metal oxide fine particles of titanium dioxide and an aqueous metal nitrate solution containing metal ions of barium nitrate together with fuel (for example, a water-soluble amino acid). In the above-described method of forming composite oxide fine particles by self-ignition, a temperature distribution is easily formed, and it is difficult to obtain uniform composite oxide fine particles. As a result, there is a problem that the second phase, which is a composite oxide having another composition, tends to precipitate. For example, the BaT shown in FIG.
In the X-ray diffraction pattern of iO 3 , Ba 2 TiO
A second phase peak considered to be 4 is observed. Therefore, it is difficult to obtain homogeneous composite oxide fine particles by the self-ignition method. Further, although the above-mentioned publication allows formation of fine particles, it does not refer to raw materials and products as to specific particle diameters.
【0005】[0005]
【発明が解決しようとする課題】本願発明は、上記の事
情に鑑みてなされたもので、誘電体、圧電体として広く
使用される、均質で微細なチタン含有複合酸化物粉末を
簡便なプロセスで安価に製造できる方法を確立すること
を目的とする。DISCLOSURE OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a simple and convenient process for producing a uniform and fine titanium-containing composite oxide powder widely used as a dielectric or piezoelectric material. The purpose is to establish a method that can be manufactured at low cost.
【0006】[0006]
【課題を解決するための手段】本発明のチタン含有複合
酸化物粉末の製造方法は、粒径100nm以下あるいは比
表面積15m2/g以上のチタニア粒子と金属塩を溶解
した水溶液とを混合して懸濁液とする懸濁液形成工程
と、得られた懸濁液に有機溶剤、分散剤を添加し該懸濁
液をエマルジョンとするエマルジョン形成工程と、得ら
れたエマルジョンを噴霧燃焼させて複合酸化物粉末とす
る燃焼工程と、からなることを特徴とする。The method for producing a titanium-containing composite oxide powder of the present invention comprises mixing titania particles having a particle size of 100 nm or less or a specific surface area of 15 m 2 / g or more with an aqueous solution in which a metal salt is dissolved. A suspension formation step of forming a suspension, an emulsion formation step of adding an organic solvent and a dispersant to the obtained suspension to form the suspension into an emulsion, and spray-burning the obtained emulsion to form a composite And a combustion step for producing oxide powder.
【0007】前記金属塩はアルカリ土類元素の塩である
ことが望ましい。Preferably, the metal salt is a salt of an alkaline earth element.
【0008】[0008]
【発明の実施の形態】本発明のチタン含有複合酸化物粉
末の製造方法は、特定の範囲の粒径または比表面積を持
つチタニア粒子と金属塩の水溶液の懸濁液を、エマルジ
ョン化して該エマルジョンを噴霧燃焼させて、均質な微
粉末の複合酸化物粉末を得る工程とからなる。このエマ
ルジョン燃焼法では、チタニア粒子と金属塩の水溶液か
ら直接複合酸化物粉末が合成できる。したがって、ゾル
ゲル法のように高価なアルコキシド原料を必要とせず、
また、水熱合成法や溶液法のように乾燥、仮焼、粉砕等
の工程が不要となり、工程が簡略され低コストで製造す
ることができる。BEST MODE FOR CARRYING OUT THE INVENTION The method for producing a titanium-containing composite oxide powder according to the present invention comprises emulsifying a suspension of titania particles having a specific range of particle size or specific surface area and an aqueous solution of a metal salt to form the emulsion. By spray combustion to obtain a homogeneous fine powder composite oxide powder. In this emulsion combustion method, a composite oxide powder can be directly synthesized from an aqueous solution of titania particles and a metal salt. Therefore, it does not require expensive alkoxide raw materials as in the sol-gel method,
Further, unlike the hydrothermal synthesis method and the solution method, steps such as drying, calcination, and pulverization are not required, so that the steps are simplified and the production can be performed at low cost.
【0009】出発原料を粒径100nm以下のチタニア粒
子を使用できる。複合酸化物を形成するもう一方の金属
元素を溶解した水溶液がエマルジョンの水相としてチタ
ニア粒子と共に存在する。このため、エマルジョンを噴
霧燃焼させた時にもう一方の金属元素がチタニア粒子内
部まで拡散して均質な複合酸化物粉末の形成が可能とな
る。一方、チタニア粒子の粒径が100nmを超える場合
は、チタニア粒子の粒径が大きいため、エマルジョンを
噴霧燃焼させる時に他の金属元素がチタニア粒子内部ま
で充分に拡散せず、未反応のチタニアが残留あるいは第
2相が析出してしまい好ましくない。As the starting material, titania particles having a particle size of 100 nm or less can be used. An aqueous solution in which the other metal element forming the composite oxide is dissolved exists together with the titania particles as an aqueous phase of the emulsion. For this reason, when the emulsion is sprayed and burned, the other metal element diffuses into the titania particles, whereby a homogeneous composite oxide powder can be formed. On the other hand, when the particle size of the titania particles exceeds 100 nm, since the particle size of the titania particles is large, other metal elements do not sufficiently diffuse into the titania particles when the emulsion is spray-burned, and unreacted titania remains. Alternatively, the second phase is undesirably precipitated.
【0010】チタニア粒子の粒径が100nmを超えてい
てもチタニア粒子が多孔体のようにその比表面積が15
m2/g以上であれば、出発原料として使用できる。比
表面積が大きいためもう一方の金属元素は溶液調製段階
で多孔体の内部まで十分入り込むことが可能となる。こ
のため、エマルジョン燃焼時のチタニア粒子と金属元素
との拡散距離は短くなり、均質な複合酸化物粉末が形成
できる。Even if the particle size of the titania particles exceeds 100 nm, the titania particles have a specific surface area of 15
If it is at least m 2 / g, it can be used as a starting material. Since the specific surface area is large, the other metal element can sufficiently enter the inside of the porous body in the solution preparation stage. For this reason, the diffusion distance between the titania particles and the metal element during the emulsion combustion becomes shorter, and a homogeneous composite oxide powder can be formed.
【0011】本発明の出発原料のチタニア粒子の組成
は、チタンを含有する点以外は、特に限定されない。例
えば、チタン酸バリウム、チタン酸ストロンチウムとい
った2成分系の複合酸化物組成であっても良いし、第3
成分、第4成分が更に添加されたような組成であてもよ
い。また、チタニア粒子は、結晶質粒子でも非晶質粒子
でもよい。また、チタニア粒子は粉末形状のものを用い
てもよいし、水中に該粒子を分散させたゾル状のものを
用いても良い。The composition of the starting material titania particles of the present invention is not particularly limited, except that it contains titanium. For example, a binary composite oxide composition such as barium titanate and strontium titanate may be used.
The composition may be such that the component and the fourth component are further added. The titania particles may be either crystalline particles or amorphous particles. The titania particles may be in the form of a powder or in the form of a sol in which the particles are dispersed in water.
【0012】使用するもう一方の金属元素の塩の種類は
限定されない。金属硝酸塩、金属酢酸塩、水溶性の金属
塩であればよい。ただし、塩化物のような金属ハロゲン
化物はエマルジョン燃焼時に有害な有機ハロゲン化物を
生成する恐れがあるため注意する必要がある。本発明の
製造方法では、まずチタニア粒子と金属元素の塩の水溶
液とを混合して懸濁液を形成し、次いで得られた懸濁液
をエマルジョン化する。エマルジョン化は、通常のW/
O型のエマルジョンを形成する方法が適用できる。この
エマルジョンにチタニア粒子と金属元素塩の水溶液が閉
じこめられる。The kind of the other metal element salt to be used is not limited. Any metal nitrate, metal acetate, or water-soluble metal salt may be used. However, care must be taken because metal halides such as chlorides may form harmful organic halides when the emulsion is burned. In the production method of the present invention, first, titania particles and an aqueous solution of a salt of a metal element are mixed to form a suspension, and then the obtained suspension is emulsified. Emulsification is performed using the usual W /
A method of forming an O-type emulsion can be applied. An aqueous solution of titania particles and a metal element salt is confined in this emulsion.
【0013】このエマルジョン燃焼法では、形成された
W/O型エマルジョン中の一つの水滴が一つの反応場、
すなわち1つの生成粒子に対応する。このため水滴径が
10μmより大きいと、反応場が大きくなりすぎて不均
質になる可能性があり、また生成粒子が大きくなる可能
性があり好ましくない。エマルジョン形成で使用する有
機溶媒の種類は、特に限定されない。ヘキサン、オクタ
ン、ケロシン、ガソリン等、水溶液とW/O型エマルジ
ョンを作製可能な有機溶媒であればよい。In this emulsion combustion method, one water droplet in the formed W / O type emulsion forms one reaction field,
That is, it corresponds to one generated particle. For this reason, if the water droplet diameter is larger than 10 μm, the reaction field may be too large to be non-uniform, and the generated particles may be large, which is not preferable. The type of the organic solvent used for forming the emulsion is not particularly limited. Any organic solvent, such as hexane, octane, kerosene, gasoline, etc., that can produce an aqueous solution and a W / O emulsion may be used.
【0014】使用する分散剤の種類および添加量は特に
限定されない。カチオン性界面活性剤、アニオン性界面
活性剤、ノニオン性界面活性剤のいずれでもよく、水溶
液、有機溶媒の種類および必要とする水滴径に応じて、
分散剤の種類および添加量を変化させればよい。エマル
ジョンの燃焼工程では、エマルジョンを保持している有
機溶媒の燃焼によって複合酸化物化の反応を進行させる
ため、反応雰囲気中の二酸化炭素濃度は大気中と比較し
て非常に高い。このため、アルカリ土類元素は、このよ
うな雰囲気中では通常炭酸塩を形成し易いが、チタンと
の複合酸化物を形成する場合には炭酸塩を形成しない。
この原因は明らかでないが、アルカリ土類元素とチタニ
アの生成速度、および生成した複合酸化物の化学的安定
性と密接に関連していると考えられる。The type and amount of the dispersant used are not particularly limited. Cationic surfactants, anionic surfactants, nonionic surfactants may be used, depending on the type of aqueous solution, organic solvent and required water droplet diameter,
What is necessary is just to change the kind and addition amount of a dispersing agent. In the emulsion combustion step, the reaction of complex oxide formation proceeds by the combustion of the organic solvent holding the emulsion, so that the carbon dioxide concentration in the reaction atmosphere is much higher than that in the atmosphere. For this reason, the alkaline earth element usually easily forms a carbonate in such an atmosphere, but does not form a carbonate when forming a composite oxide with titanium.
Although the cause is not clear, it is thought that it is closely related to the production rates of alkaline earth elements and titania, and the chemical stability of the produced composite oxide.
【0015】エマルジョン燃焼時の燃焼温度は特に限定
されないが、700〜1200℃の範囲が望ましい。7
00℃未満では燃焼温度が低すぎて有機溶媒が完全に燃
焼せず残留する恐れがあり好ましくない。燃焼温度が1
200℃を超える場合は燃焼温度が高すぎて、生成した
粉末が凝集、焼結して粒成長してしまう恐れがあり好ま
しくない。[0015] The combustion temperature during the emulsion combustion is not particularly limited, but is preferably in the range of 700 to 1200 ° C. 7
If the temperature is lower than 00 ° C., the combustion temperature is too low, and the organic solvent may not completely burn and may remain, which is not preferable. Combustion temperature is 1
If the temperature exceeds 200 ° C., the combustion temperature is too high, and the generated powder may undesirably aggregate and sinter to grow grains.
【0016】燃焼雰囲気は特に限定しないが、酸素が充
分でないと不完全燃焼によって有機溶媒中の炭素成分が
残留する恐れがある。したがって、エマルジョン中の有
機溶媒が完全燃焼できる程度の酸素(空気)を供給する
ことが望ましい。The combustion atmosphere is not particularly limited. However, if oxygen is not sufficient, carbon components in the organic solvent may remain due to incomplete combustion. Therefore, it is desirable to supply oxygen (air) to such an extent that the organic solvent in the emulsion can be completely burned.
【0017】[0017]
【実施例】以下、実施例により具体的に説明する。 (実施例1) 懸濁液形成工程 市販チタニアゾル(石原テクノ製STS-01:チタニア粒径
7nm)と、市販の硝酸バリウムを脱イオン水に溶解させ
て作製した0.01〜0.3モル/Lの硝酸バリウム水
溶液を、チタンとバリウムのモル比がTi/Ba=1/
1となるように所定量ずつ混合して水相とした。The present invention will be specifically described below with reference to examples. (Example 1) Suspension forming step A commercially available titania sol (STS-01, manufactured by Ishihara Techno: titania particle diameter: 7 nm) and a commercially available barium nitrate dissolved in deionized water were used to prepare 0.01 to 0.3 mol / mol. L of barium nitrate aqueous solution, the molar ratio of titanium to barium is Ti / Ba = 1 /
A predetermined amount was mixed so as to be 1 to obtain an aqueous phase.
【0018】エマルジョン形成工程 有機溶媒には、市販のケロシンを用いた。分散剤として
は、太陽化学(株)製サンソフトNo.818Hをケロ
シンに対して5〜10重量%用いた。この分散剤入りの
ケロシンを油相とした。水相と油相の割合は、水相/油
相=40〜70/60〜30(容量%)となるように混
合した。混合溶液は、ホモジナイザを用いて1000〜
20000rpmの回転数で5〜30分間攪拌し、W/
O型エマルジョンを得た。なお、光学顕微鏡観察の結果
から、上記のエマルジョン中の水滴径は、約1〜2μm
であった。Emulsion formation step Commercial kerosene was used as the organic solvent. As the dispersant, sun soft No. manufactured by Taiyo Kagaku Co., Ltd. 818H was used in an amount of 5 to 10% by weight based on kerosene. The kerosene containing the dispersant was used as an oil phase. The water phase and the oil phase were mixed such that the ratio of water phase / oil phase = 40 to 70/60 to 30 (% by volume). The mixed solution is 1000-1000 using a homogenizer.
Stir at 20,000 rpm for 5 to 30 minutes,
An O-type emulsion was obtained. From the result of observation with an optical microscope, the water droplet diameter in the above emulsion was about 1 to 2 μm.
Met.
【0019】燃焼工程 上記で作製したW/O型エマルジョンを、特開平7−8
190号に記載のエマルジョン燃焼反応装置を用いてエ
マルジョンを噴霧状にして油相を燃焼させるとともに水
相に存在する金属イオンを酸化して複合酸化物粉末を形
成した。この合成条件は、噴霧されたエマルジョンの液
滴が完全燃焼し、かつ火炎温度が800〜1000℃の
一定温度になるように、エマルジョンの噴霧流量、空気
量(酸素量)などを制御した状態でおこなった。生成し
た粉末は反応管後部に設置したバグフィルターで回収し
た。Combustion Step The W / O emulsion prepared as described above is used in JP-A-7-8
Using an emulsion combustion reactor described in No. 190, the emulsion was sprayed, the oil phase was burned, and the metal ions present in the aqueous phase were oxidized to form a composite oxide powder. The synthesis conditions are such that the spray flow rate of the emulsion, the amount of air (oxygen amount), and the like are controlled so that the sprayed emulsion droplets are completely burned and the flame temperature is a constant temperature of 800 to 1000 ° C. I did it. The generated powder was collected by a bag filter installed at the rear of the reaction tube.
【0020】得られた複合酸化物粉末の結晶相を粉末X
線回折法により同定した。 (実施例2)チタン源としてチタニアゾルの代わりに市
販チタニア粉末(平均粒径100nm)を用いた他は、
実施例1と同様のプロセスで複合酸化物粉末を合成し、
この複合酸化物粉末の結晶相を同定した。 (比較例1)チタン源としてチタニアゾルの代わりに市
販チタニア粉末(平均粒径200nm、比表面積9m2
/g)の粉砕品を用いた他は、実施例1と同様のプロセ
スで粉末を合成し、合成粉末の結晶相を同定した。The crystal phase of the obtained composite oxide powder was changed to powder X
It was identified by the line diffraction method. (Example 2) A commercially available titania powder (average particle diameter: 100 nm) was used instead of titania sol as a titanium source.
A composite oxide powder was synthesized by the same process as in Example 1,
The crystal phase of this composite oxide powder was identified. Comparative Example 1 Commercially available titania powder (average particle diameter 200 nm, specific surface area 9 m 2 ) instead of titania sol as a titanium source
/ G) except that a ground product was used, a powder was synthesized by the same process as in Example 1, and the crystal phase of the synthesized powder was identified.
【0021】図1に、実施例1、実施例2、比較例1で
合成した粉末のX線回折パターンを示した。実施例1、
実施例2ではチタン酸バリウムの単相(図1中○印)が
得られたのに対して、比較例1では図1中に示す●△▲
印のチタン酸バリウム以外に未反応チタニア、バリウム
リッチな第2相(Ba2TiO4)等が観察され、チタン
酸バリウムは単相とならないことがわかる。また、実施
例1で合成した粉末をSEM観察したところ、生成物は
粒径数百nmで比較的粒径のそろった微細な球状粒子であ
った。 (実施例3)実施例1のチタニアゾルと混合する金属塩
水溶液を0.01〜2モル/Lのオキシ硝酸ジルコニウ
ム水溶液とし、チタンとジルコニウムのモル比がTi/
Zr=1/1となるように所定量ずつ混合して水相とし
た。それ以外は実施例1と同様のプロセスで複合酸化物
粉末を合成し、この複合酸化物粉末の結晶相を同定し
た。図2に、実施例3で合成した複合酸化物粉末のX線
回折パターンを示す。チタン酸ジルコニウムの単相が得
られていることが分かる。 (実施例4)実施例1のチタニアゾルと混合する金属塩
水溶液を0.01〜2モル/Lの硝酸ストロンチウム水
溶液とし、チタンとストロンチウムのモル比がTi/S
r=1/1となるように所定量ずつ混合して水相とし
た。それ以外は実施例1と同様のプロセスで複合酸化物
粉末を合成し、この複合酸化物合成粉末の結晶相を同定
した。図3に、実施例4で合成した粉末のX線回折パタ
ーンを示す。チタン酸ストロンチウムの単相が得られて
いることが分かる。 (実施例5)実施例1のチタニアゾルと混合する金属塩
水溶液を0.01〜2モル/Lの硝酸カルシウム水溶液
とし、チタンとカルシウムのモル比がTi/Ca=1/
1となるように所定量ずつ混合して水相とした。それ以
外は実施例1と同様のプロセスで複合酸化物粉末を合成
し、この複合酸化物粉末の結晶相を同定した。チタン酸
カルシウムの単相が得られていることが分かる。 (実施例6)実施例1のチタニアゾルと混合する金属塩
水溶液を実施例の硝酸バリウム水溶液および実施例3の
オキシ硝酸ジルコニウム水溶液とし、バリウム、チタ
ン、ジルコニウムのモル比がBa/Ti/Zr=1/
0.5/0.5となるように所定量ずつ混合して水相と
した。それ以外は実施例1と同様のプロセスで複合酸化
物粉末を合成し、この複合酸化物粉末の結晶相を同定し
た。所望のBa(Zr0.5Ti0.5)O3の単相が得られ
ていることを確認した。FIG. 1 shows the X-ray diffraction patterns of the powders synthesized in Example 1, Example 2, and Comparative Example 1. Example 1,
In Example 2, a single phase of barium titanate (indicated by a circle in FIG. 1) was obtained, whereas in Comparative Example 1, the solid phase shown in FIG.
In addition to the barium titanate marked, unreacted titania, a barium-rich second phase (Ba 2 TiO 4 ), and the like are observed, indicating that barium titanate does not become a single phase. Further, when the powder synthesized in Example 1 was observed by SEM, the product was fine spherical particles having a particle diameter of several hundred nm and a relatively uniform particle diameter. (Example 3) An aqueous metal salt solution to be mixed with the titania sol of Example 1 was an aqueous solution of zirconium oxynitrate of 0.01 to 2 mol / L, and the molar ratio of titanium to zirconium was Ti /
A predetermined amount was mixed so that Zr = 1/1 to obtain an aqueous phase. Otherwise, a composite oxide powder was synthesized by the same process as in Example 1, and the crystal phase of this composite oxide powder was identified. FIG. 2 shows an X-ray diffraction pattern of the composite oxide powder synthesized in Example 3. It can be seen that a single phase of zirconium titanate was obtained. (Example 4) A metal salt aqueous solution to be mixed with the titania sol of Example 1 was a 0.01 to 2 mol / L strontium nitrate aqueous solution, and the molar ratio of titanium to strontium was Ti / S
A predetermined amount was mixed so that r = 1/1 to obtain an aqueous phase. Otherwise, a composite oxide powder was synthesized by the same process as in Example 1, and the crystal phase of the composite oxide synthesized powder was identified. FIG. 3 shows an X-ray diffraction pattern of the powder synthesized in Example 4. It can be seen that a single phase of strontium titanate was obtained. (Example 5) An aqueous metal salt solution to be mixed with the titania sol of Example 1 was an aqueous solution of calcium nitrate of 0.01 to 2 mol / L, and the molar ratio of titanium to calcium was Ti / Ca = 1 /
A predetermined amount was mixed so as to be 1 to obtain an aqueous phase. Otherwise, a composite oxide powder was synthesized by the same process as in Example 1, and the crystal phase of this composite oxide powder was identified. It can be seen that a single phase of calcium titanate was obtained. (Example 6) The aqueous metal salt solution mixed with the titania sol of Example 1 was used as the aqueous barium nitrate solution of Example and the aqueous solution of zirconium oxynitrate of Example 3, and the molar ratio of barium, titanium, and zirconium was Ba / Ti / Zr = 1. /
A predetermined amount was mixed so as to be 0.5 / 0.5 to obtain an aqueous phase. Otherwise, a composite oxide powder was synthesized by the same process as in Example 1, and the crystal phase of this composite oxide powder was identified. It was confirmed that a desired single phase of Ba (Zr 0.5 Ti 0.5 ) O 3 was obtained.
【0022】[0022]
【発明の効果】本発明の製造方法では安定な酸化チタン
を原料とすることができる。しかも他の金属塩が溶液状
態でチタン粒子の周辺に存在し、燃焼により金属塩が即
座に酸化物となって酸化チタンに固溶するため、均一な
複合酸化物を粉末状で簡単に得ることができる。この際
酸化チタンの粒径または比表面積を特定することで、微
細で均一な複合酸化物粉末を低コスト且つ安全なプロセ
スで製造することができる。According to the production method of the present invention, stable titanium oxide can be used as a raw material. Moreover, since other metal salts are present in the solution state around the titanium particles, and the metal salts are immediately converted to oxides by the combustion and solid-dissolve in the titanium oxide, a uniform composite oxide can be easily obtained in powder form. Can be. At this time, by specifying the particle diameter or the specific surface area of the titanium oxide, a fine and uniform composite oxide powder can be produced by a low-cost and safe process.
【図1】実施例1、実施例2、比較例1で合成したチタ
ン酸バリウムのX電回折パターンである。FIG. 1 is an X-ray diffraction pattern of barium titanate synthesized in Example 1, Example 2, and Comparative Example 1.
【図2】実施例3で合成したチタン酸ジルコニウム粉末
のX線回折パターンである。FIG. 2 is an X-ray diffraction pattern of a zirconium titanate powder synthesized in Example 3.
【図3】実施例4で合成したチタン酸ストロンチウム粉
末のX線回折パターンである。FIG. 3 is an X-ray diffraction pattern of a strontium titanate powder synthesized in Example 4.
Claims (1)
2/g以上のチタニア粒子と金属塩を溶解した水溶液と
を混合して懸濁液とする懸濁液形成工程と、 得られた懸濁液に有機溶剤、分散剤を添加し該懸濁液を
エマルジョンとするエマルジョン形成工程と、 得られたエマルジョンを噴霧燃焼させて複合酸化物粉末
とする燃焼工程と、からなることを特徴とするチタン含
有複合酸化物粉末の製造方法。1. A particle diameter of 100 nm or less or a specific surface area of 15 m.
2 / g or more of titania particles and an aqueous solution in which a metal salt is dissolved to form a suspension, and a suspension is obtained by adding an organic solvent and a dispersant to the obtained suspension. A method for producing a titanium-containing composite oxide powder, comprising: an emulsion forming step of preparing a composite oxide powder by spray-burning the obtained emulsion to form a composite oxide powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2551198A JPH11228139A (en) | 1998-02-06 | 1998-02-06 | Method for producing titanium-containing composite oxide powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2551198A JPH11228139A (en) | 1998-02-06 | 1998-02-06 | Method for producing titanium-containing composite oxide powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11228139A true JPH11228139A (en) | 1999-08-24 |
Family
ID=12168097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2551198A Pending JPH11228139A (en) | 1998-02-06 | 1998-02-06 | Method for producing titanium-containing composite oxide powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11228139A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000035811A1 (en) * | 1998-12-11 | 2000-06-22 | Showa Denko K.K. | Perovskite type composite oxide containing titanium |
| KR20020096978A (en) * | 2001-06-19 | 2002-12-31 | 가부시키가이샤 무라타 세이사쿠쇼 | Barium titanate powder, method for manufacturing and evaluating the same, dielectric ceramic, and monolithic ceramic capacitor |
| US6893623B2 (en) * | 1998-12-11 | 2005-05-17 | Showa Denko Kabushiki Kaisha | Perovskite titanium-type composite oxide particle and production process thereof |
| US7030165B2 (en) | 1999-05-26 | 2006-04-18 | Showa Denko Kabushiki Kaisha | Perovskite titanium-type composite oxide particle and production process thereof |
| JP2006273697A (en) * | 2005-03-30 | 2006-10-12 | Ntn Corp | Oxide-based ceramic and method for manufacturing the same |
| JP2008522946A (en) * | 2004-12-13 | 2008-07-03 | トロノクス ピグメンツ ゲゼルシャフト ミット ベシュレンクテル ハフツング | Fine powder lead zirconate titanate, titanium zirconate hydrate, zirconium titanate and process for producing the same |
| JP2010030821A (en) * | 2008-07-28 | 2010-02-12 | Murata Mfg Co Ltd | Method for producing metal oxide ultrafine particles |
| JP2011520739A (en) * | 2007-11-15 | 2011-07-21 | ラトガーズ, ザ ステイト ユニバーシティ オブ ニュー ジャージー | Method for hot water liquid phase sintering of ceramic materials and products obtained thereby |
-
1998
- 1998-02-06 JP JP2551198A patent/JPH11228139A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000035811A1 (en) * | 1998-12-11 | 2000-06-22 | Showa Denko K.K. | Perovskite type composite oxide containing titanium |
| US6893623B2 (en) * | 1998-12-11 | 2005-05-17 | Showa Denko Kabushiki Kaisha | Perovskite titanium-type composite oxide particle and production process thereof |
| US7030165B2 (en) | 1999-05-26 | 2006-04-18 | Showa Denko Kabushiki Kaisha | Perovskite titanium-type composite oxide particle and production process thereof |
| US7091154B2 (en) | 1999-05-26 | 2006-08-15 | Showa Denko Kabushiki Kaisha | Perovskite titanium-type composite oxide particle and production process thereof |
| KR20020096978A (en) * | 2001-06-19 | 2002-12-31 | 가부시키가이샤 무라타 세이사쿠쇼 | Barium titanate powder, method for manufacturing and evaluating the same, dielectric ceramic, and monolithic ceramic capacitor |
| JP2008522946A (en) * | 2004-12-13 | 2008-07-03 | トロノクス ピグメンツ ゲゼルシャフト ミット ベシュレンクテル ハフツング | Fine powder lead zirconate titanate, titanium zirconate hydrate, zirconium titanate and process for producing the same |
| JP2006273697A (en) * | 2005-03-30 | 2006-10-12 | Ntn Corp | Oxide-based ceramic and method for manufacturing the same |
| JP2011520739A (en) * | 2007-11-15 | 2011-07-21 | ラトガーズ, ザ ステイト ユニバーシティ オブ ニュー ジャージー | Method for hot water liquid phase sintering of ceramic materials and products obtained thereby |
| KR20130127560A (en) * | 2007-11-15 | 2013-11-22 | 러트거즈,더스테이트유니버시티오브뉴저지 | Composition produced by hydrothermal liquid phase sintering of ceramic materials |
| JP2010030821A (en) * | 2008-07-28 | 2010-02-12 | Murata Mfg Co Ltd | Method for producing metal oxide ultrafine particles |
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