JPH1121601A - Multilayer porous body and method for producing the same - Google Patents
Multilayer porous body and method for producing the sameInfo
- Publication number
- JPH1121601A JPH1121601A JP18137297A JP18137297A JPH1121601A JP H1121601 A JPH1121601 A JP H1121601A JP 18137297 A JP18137297 A JP 18137297A JP 18137297 A JP18137297 A JP 18137297A JP H1121601 A JPH1121601 A JP H1121601A
- Authority
- JP
- Japan
- Prior art keywords
- porous
- sintered body
- sprayed film
- base
- pore diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Filtering Materials (AREA)
- Powder Metallurgy (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
(57)【要約】
【課題】ごみ焼却炉から発生する煤塵などの微細粒子の
濾過処理を、圧力損失を低く抑えながら効率的に行うこ
とができる多孔質材を提供する。
【解決手段】この多孔質材は、気孔径を調節された多孔
質金属焼結体を基体とし、該基体の表面に金属,セラミ
ックスまたはこれらの混合物からなる調節された気孔径
を有する比較的膜厚の薄い多孔質溶射膜が形成された複
層構造を有している。溶射膜に、粒子を濾過し得る気孔
径を有する気孔分布をもたせることにより、基体(肉厚
の大部分を占める)は気孔径の大きい気孔分布とするこ
とができ、この複層効果として、圧力損失の低い濾過処
理を行うことができ、目詰まりによる濾過機能の低下を
回復する逆洗効果も安定に維持される。(57) [Problem] To provide a porous material capable of efficiently filtering fine particles such as dust generated from a refuse incinerator while suppressing pressure loss. The porous material comprises a porous metal sintered body having a controlled pore size as a base, and a relatively membrane having a controlled pore size made of metal, ceramic or a mixture thereof on the surface of the base. It has a multilayer structure in which a thin porous sprayed film is formed. By providing the sprayed film with a pore distribution having a pore diameter capable of filtering particles, the substrate (occupying most of the wall thickness) can have a pore distribution with a large pore diameter. A filtration process with low loss can be performed, and a backwash effect for recovering a decrease in filtration function due to clogging is also stably maintained.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ごみ焼却炉から発
生する煤塵などの極微細粒子を濾去するフィルタ材等と
して有用な多孔質体およびその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a porous material useful as a filter material for filtering out ultrafine particles such as dust generated from a refuse incinerator and a method for producing the same.
【0002】[0002]
【従来の技術】金属粉末を焼結原料とし、熱間静水圧加
圧などの焼結処理における処理条件を調節することによ
り、多孔質の焼結体を得ることができる。この多孔質金
属焼結体はフィルタ材等として有用である。その気孔分
布は、焼結原料粉末の粒度,焼結処理条件などにより制
御することができ、また焼結原料材種の選択により、用
途・使用環境に応じた高温耐熱性,耐食性等をもたせる
ことができる(特開平8-218102号公報, 同8-218103号公
報, 同8-302404号公報)。上記多孔質金属焼結体を、例
えばごみ焼却炉の高温排ガスの除塵用フィルタとして適
用することにより、従来のガラスファイバ濾布等からな
るバグフィルタの欠点(耐熱性不足等)を解消し、耐用
寿命の向上・メンテナンスの改善、除塵効率の向上等の
効果を期待することができる。2. Description of the Related Art Porous sintered bodies can be obtained by using metal powder as a raw material for sintering and adjusting the sintering conditions such as hot isostatic pressing. This porous metal sintered body is useful as a filter material or the like. The pore distribution can be controlled by the particle size of the sintering raw material powder, sintering conditions, etc., and by selecting the type of sintering raw material, it is possible to provide high-temperature heat resistance, corrosion resistance, etc. according to the application and use environment. (Japanese Patent Application Laid-Open Nos. 8-218102, 8-218103, 8-302404). By applying the above porous metal sintered body as a filter for removing dust from high-temperature exhaust gas from a refuse incinerator, for example, the drawbacks (lack of heat resistance, etc.) of a conventional bag filter made of a glass fiber filter cloth or the like are eliminated, and the durability is improved. It is possible to expect effects such as improvement of service life, improvement of maintenance, and improvement of dust removal efficiency.
【0003】[0003]
【発明が解決しようとする課題】ごみ焼却炉から発生す
る排ガス中の煤煙粒子は極めて微細である。この除塵処
理に必要な多孔質焼結体の気孔径等は、焼結体の製造条
件(原料粉末の粒径,焼結処理温度・圧力等)により調
節することができるが、気孔径が小さくなると、除塵処
理における圧力損失が増大し、効率的な処理が困難とな
る。また気孔径が微細なほど、逆洗処理による濾過機能
の回復・再生の困難も増大する。本発明は、このような
問題を解決するものであり、気孔径の微細化に付随する
圧力損失の増大を抑制しつつ、微細粒子を効率的に濾過
処理することができるフィルタ材等として有用な多孔質
体およびその製造方法を提供する。The soot particles in the exhaust gas generated from a refuse incinerator are extremely fine. The pore size and the like of the porous sintered body required for this dust removal treatment can be adjusted by the manufacturing conditions of the sintered body (particle size of raw material powder, sintering temperature and pressure, etc.). If so, the pressure loss in the dust removal process increases, and it becomes difficult to carry out the process efficiently. In addition, as the pore diameter becomes finer, the difficulty in recovering and regenerating the filtration function by backwashing increases. The present invention is intended to solve such a problem, and is useful as a filter material or the like capable of efficiently filtering fine particles while suppressing an increase in pressure loss accompanying finer pore diameters. Provided is a porous body and a method for producing the same.
【0004】[0004]
【課題を解決するための手段】本発明の多孔質体は、気
孔径を調節された多孔質金属焼結体を基体とし、基体の
表面に金属,セラミックスまたはこれらの混合物からな
る調節された気孔径を有する多孔質溶射膜が形成された
複層構造を有することを特徴としている。The porous body of the present invention comprises a porous metal sintered body having a controlled pore size as a base, and a controlled porous material made of metal, ceramics or a mixture thereof on the surface of the base. It has a multilayer structure in which a porous sprayed film having a pore diameter is formed.
【0005】基体である多孔質金属焼結体の気孔径等
は、焼結条件(処理温度,圧力,原料粉末粒度等)によ
り調節され、基体(多孔質金属焼結体)の表面を被覆す
る多孔質溶射膜の気孔径は、溶射条件(噴射ガス圧力,
溶射距離,溶射粉末粒度,膜厚など)により調節され
る。溶射膜に、濾過しようとする被処理流体中の粒子径
に応じた気孔径をもたせることにより、フィルタ材とし
て必要な濾過性能が付与される。基体(フィルタ材の肉
厚の大部分を占める)は比較的粗大な気孔径を有する焼
結体であってよく、その平均気孔径を溶射膜のそれより
大きくすることにより、複層効果として濾過処理の圧力
損失を増大を抑制回避しつつ、所定の濾過効果を確保す
ることができる。[0005] The pore diameter and the like of the porous metal sintered body serving as a base are adjusted by sintering conditions (processing temperature, pressure, particle size of raw material powder, etc.) to cover the surface of the base (porous metal sintered body). The pore diameter of the porous sprayed film depends on the spraying conditions (injection gas pressure,
(Spraying distance, sprayed powder particle size, film thickness, etc.). By providing the sprayed film with a pore size corresponding to the particle size in the fluid to be filtered, filtration performance required as a filter material is imparted. The substrate (occupying most of the thickness of the filter material) may be a sintered body having a relatively coarse pore diameter, and by increasing the average pore diameter to be larger than that of the sprayed film, a filtration effect as a multilayer effect is obtained. A predetermined filtering effect can be ensured while suppressing and avoiding an increase in pressure loss in the treatment.
【0006】[0006]
【発明の実施の形態】本発明の複層多孔質体は、金属粉
末を焼結原料として基体である多孔質金属焼結体を形成
し、ついでその焼結体の表面に多孔質溶射膜を積層生成
する工程により製造される。 〔多孔質金属焼結体の製造〕この焼結処理は、熱間静水
圧加圧処理(HIP処理)を適用するのが好ましい。H
IP処理によれば、形状やサイズの如何に拘らず、均質
な多孔質焼結体を得ることができる。焼結原料粉末の材
種は、炭素鋼,耐食合金,耐熱合金,その他の各種金属
材種が、目的とする複層多孔質体の用途・要求される材
料特性に応じて適宜選択される。使用される粉末の粒径
は例えば約200 μm以下である。HIP処理は下記の低
温低圧HIP法またはカプセルフリーHIP法により首
尾よく達成される。BEST MODE FOR CARRYING OUT THE INVENTION The multilayer porous body of the present invention forms a porous metal sintered body as a base material using metal powder as a sintering raw material, and then forms a porous sprayed film on the surface of the sintered body. It is manufactured by a process of forming a laminate. [Production of Porous Metal Sintered Body] It is preferable to apply hot isostatic pressing (HIP) to this sintering process. H
According to the IP treatment, a homogeneous porous sintered body can be obtained regardless of the shape or size. As the material type of the sintering raw material powder, carbon steel, a corrosion-resistant alloy, a heat-resistant alloy, and other various metal materials are appropriately selected according to the intended use of the intended multilayer porous body and required material properties. The particle size of the powder used is, for example, less than about 200 μm. The HIP process is successfully achieved by the low temperature low pressure HIP method or capsule free HIP method described below.
【0007】低温低圧HIP法は、高緻密質の焼結製品
を製造する通常のHIP処理と異なって、焼結体をフィ
ルタ等に必要な多孔体(例えば、気孔率: 約20〜40%,
気孔径: 約200 μm以下)とするために低温低圧を適用
するのである。好ましくは、温度: 0.35〜0.85mpK 〔但
し,mpK は金属粉末の融点(絶対温度)〕、圧力: 5〜1
50 MPaに調整される。得られる多孔質焼結体は、所
望により、粒子間結合を強化するための熱処理(強化熱
処理)に付される。処理温度は、約0.6 〜0.95mpK の範
囲が適当であり、これにより焼結体の多孔性を損なわず
に、焼結体の機械強度を高めることができる。熱処理は
HIP装置内において、静水圧媒体の加圧作用を解除し
た状態で行うこともできる。[0007] The low-temperature low-pressure HIP method is different from the usual HIP processing for producing a high-density sintered product, in that a sintered body is formed into a porous body (for example, porosity: about 20 to 40%,
(Pore size: about 200 μm or less). Preferably, temperature: 0.35 to 0.85 mpK [where mpK is the melting point of metal powder (absolute temperature)], pressure: 5 to 1
It is adjusted to 50 MPa. The obtained porous sintered body is subjected to a heat treatment (strengthening heat treatment) for strengthening the interparticle bonding, if desired. The processing temperature is suitably in the range of about 0.6 to 0.95 mpK, whereby the mechanical strength of the sintered body can be increased without impairing the porosity of the sintered body. The heat treatment can be performed in the HIP device in a state where the pressurizing action of the hydrostatic medium is released.
【0008】他方、カプセルフリーHIP法を適用する
場合の圧粉体は、一軸プレス成形,冷間静水圧プレス成
形(CIP成形)等により形成されるが、均質性の点か
らCIP成形が好ましい。焼結体に多孔性とするための
圧粉体の相対密度は約95%以下であり、これは圧粉成
形圧等により調節される。HIP処理温度は約0.7 〜0.
95mpK (mpK は前記と同義),加圧力は約 5〜150 MP
aの範囲が適当である。この処理条件は高緻密質焼結体
を製造する通常のHIP処理とほぼ同じであるが、静水
圧媒体の圧力作用が、圧粉体の表面に作用すると同時
に、開気孔を介してその内部にも作用し、その効果とし
て多孔性を損なわずに機械強度等の高い焼結体に焼き上
げることができる。On the other hand, when the capsule-free HIP method is applied, the green compact is formed by uniaxial press molding, cold isostatic press molding (CIP molding) or the like, but CIP molding is preferred from the viewpoint of homogeneity. The relative density of the green compact for making the sintered body porous is about 95% or less, which is adjusted by the green compacting pressure or the like. The HIP processing temperature is about 0.7 to 0.
95mpK (mpK is the same as above), pressure is about 5 to 150MP
The range of a is appropriate. The processing conditions are almost the same as those of the normal HIP processing for producing a high-density sintered body, except that the pressure action of the hydrostatic medium acts on the surface of the green compact and at the same time, through the open pores. Also acts, and as an effect, it can be baked into a sintered body having high mechanical strength without losing the porosity.
【0009】〔多孔質溶射膜の形成〕上記多孔質金属焼
結体は、表面を均一に加工され、適宜の表面浄化処理
(脱脂洗浄など)に付された後、溶射を施される。溶射
は、金属,セラミックスまたはその混合物などを原料と
し、溶射ガンにより加熱溶滴として被処理体の表面に吹
き付け、その付着堆積層として膜体を形成するものであ
る。溶射材は、前記基体と同種または異種の各種金属・
合金、あるいはセラミックス粉末(アルミナ等の酸化物
系,炭化クロム, 炭化チタン等の炭化物系,窒化珪素,
窒化硼素等の窒化物系など)が適宜使用される。溶射法
は、火炎溶射,アーク溶射,プラズマ溶射等,公知の溶
射方式が溶射材の材種等に応じて適用される。[Formation of a Porous Thermal Sprayed Film] The porous metal sintered body is uniformly sprayed after the surface is uniformly processed and subjected to an appropriate surface cleaning treatment (eg, degreasing cleaning). In the thermal spraying, a metal, ceramics, a mixture thereof, or the like is used as a raw material, and is sprayed as a heated droplet by a thermal spray gun onto the surface of an object to be processed, thereby forming a film as an adhesion deposition layer. Thermal spray material is made of various metals or
Alloy or ceramic powder (oxide such as alumina, chromium carbide, carbide-based carbide titanium, silicon nitride,
A nitride based material such as boron nitride) is appropriately used. As the thermal spraying method, a known thermal spraying method such as flame thermal spraying, arc thermal spraying, or plasma thermal spraying is applied according to the kind of the thermal spraying material.
【0010】溶射膜の気孔径や気孔率等は、噴射圧力,
溶滴の温度,溶射距離,溶射材の供給速度など高低調節
により制御することができ、膜厚の調節も容易である。
一般に噴射圧が高いほど、形成される膜体は緻密化し、
多孔性を減ずるが、溶射距離や、溶滴温度、膜厚などに
依存し、また溶射材として粉末を使用する場合の粉末粒
径等によっても異なる。従って溶射条件は、目的とする
複層多孔質体に必要な溶射膜の気孔分布に応じて具体的
に設定される。[0010] The pore diameter and porosity of the sprayed film are determined by the injection pressure,
The temperature of the droplet, the spray distance, the supply speed of the spray material, and the like can be controlled by adjusting the height, and the film thickness can be easily adjusted.
In general, the higher the injection pressure, the denser the film formed,
Although the porosity is reduced, it depends on the spraying distance, the droplet temperature, the film thickness, and the like, and also differs depending on the powder particle size when powder is used as the spraying material. Therefore, the thermal spraying conditions are specifically set according to the pore distribution of the thermal spray coating required for the target multilayer porous body.
【0011】[0011]
〔1〕基体(多孔質金属焼結体)の製造 軟鋼製カプセル〔カプセル内面には予めシリカ粉末(平
均粒径10μm) のスラリーを塗布し乾燥して層厚約 3mm
のシリカ粉末層が形成されている)に、ステンレス鋼SU
S 316L粉末(粒径 200μm以下) を封入し、HIP処理
〔温度:650℃(0.56mpk),圧力: 100MPa, 処理時間: 2Hr
)に付す。上記カプセル内面のシリカ粉末層はHIP
処理過程における焼結原料とカプセルとの界面の拡散接
合を阻止し、カプセルから焼結体の取り出しを容易化す
る役目を有するものである。[1] Production of substrate (porous metal sintered body) Mild steel capsule [Slurry of silica powder (average particle size: 10 μm) is applied to the inner surface of the capsule in advance and dried to a layer thickness of about 3 mm.
A silica powder layer is formed), stainless steel SU
S 316L powder (particle size 200μm or less) is sealed and HIPed [Temperature: 650 ° C (0.56mpk), Pressure: 100MPa, Processing time: 2Hr
). The silica powder layer on the inner surface of the capsule is HIP
It has the role of preventing diffusion bonding at the interface between the sintering raw material and the capsule during the treatment process and facilitating removal of the sintered body from the capsule.
【0012】HIP処理後、静水加圧媒体の加圧作用を
解除し、同装置内で熱処理(温度:1150 ℃(0.86mpk),処
理時間:4Hr) を施す。熱処理後、カプセルから多孔質焼
結体を取り出し、外周面に付着残留したシリカ粉末をブ
ラシで除去する。 焼結体サイズ: 外径 114 mm, 肉厚: 1 mm, 管長 300m
m。 気孔分布: 気孔率 25 %,気孔径 200μm以下(平均気
孔径 70 μm)After the HIP treatment, the pressurizing action of the hydrostatic pressurizing medium is released, and a heat treatment (temperature: 1150 ° C. (0.86 mpk), treatment time: 4 hr) is performed in the same apparatus. After the heat treatment, the porous sintered body is taken out of the capsule, and the silica powder remaining on the outer peripheral surface is removed with a brush. Sintered body size: outer diameter 114 mm, wall thickness: 1 mm, tube length 300 m
m. Pore distribution: porosity 25%, pore size 200μm or less (average pore size 70μm)
【0013】〔2〕溶射膜の形成 溶射材として、(A) ステンレス鋼SUS 316L粉末(平均粒
径: 90μm)、またはアルミナセラミックス粉末(平均
粒径: 70μm)を使用し、前記多孔質焼結体(気孔率 2
5 %,気孔径 200μm以下)の外周面にプラズマ溶射を
適用して複層多孔質体(A) および(B) を得る。[2] Formation of Thermal Sprayed Film As the thermal spraying material, (A) stainless steel SUS 316L powder (average particle size: 90 μm) or alumina ceramic powder (average particle size: 70 μm) is used, and the porous sintered material is used. Body (porosity 2
Plasma spraying is applied to the outer peripheral surface (5%, pore size 200 μm or less) to obtain multilayer porous bodies (A) and (B).
【0014】 [0014]
【0015】〔比較例〕 多孔質金属焼結体(溶射膜なし) 形状: 外径114,肉厚1,管長300 (mm)(複層多孔質体A,
Bの基体と同一) 気孔率:15 %, 平均気孔径: 20μm(複層多孔質体Aの
溶射膜と同等)Comparative Example Porous metal sintered body (without sprayed film) Shape: outer diameter 114, wall thickness 1, tube length 300 (mm) (multilayer porous body A,
(Same as the substrate of B) Porosity: 15%, Average pore diameter: 20 μm (equivalent to the sprayed film of the multilayer porous body A)
【0016】〔3〕透過試験 供試体パイプの外側から中空孔側へ加圧空気を通過させ
る。通気速度を1.0m/min に設定して空気を通過さ
せるときの圧力損失(mm Aq )を測定し、表1に示す結
果を得た。発明例は、表面に形成された溶射膜により、
比較例の多孔質金属焼結体(溶射膜なし)と同等の微細
粒子濾去効果を有し、しかも圧力損失は多孔質金属焼結
体のそれより低く、濾過処理効果を高めることができ
る。[3] Permeation test Pressurized air is passed from the outside of the test sample pipe to the hollow hole side. The pressure loss (mm Aq) when passing air at a ventilation speed of 1.0 m / min was measured, and the results shown in Table 1 were obtained. The invention example is based on the sprayed film formed on the surface,
It has the same filtering effect of fine particles as the porous metal sintered body of the comparative example (without the sprayed film), and the pressure loss is lower than that of the porous metal sintered body, so that the filtering effect can be enhanced.
【0017】[0017]
【表1】 供試材 圧力損失(mm Aq) 複層多孔質体A (発明例) 20 複層多孔質体B (発明例) 35 多孔質金属焼結体(比較例) 50Table 1 Test material Pressure loss (mm Aq) Multi-layer porous body A (Invention example) 20 Multi-layer porous body B (Invention example) 35 Porous metal sintered body (Comparative example) 50
【0018】[0018]
【発明の効果】本発明の複層多孔質体は、複層構造の効
果により、圧力損失の増大を抑制回避しながら、微細粒
子を捕捉濾去することができ、例えばごみ焼却炉から発
生する排ガスの煤煙濾過用フィルタ材等として有用であ
る。微細な気孔の分布は表面の溶射膜だけであり、基体
は比較的孔径の大きい気孔分布を有するので、目詰まり
による濾過機能の低下を回復するための逆洗効率も高い
まま維持され、反復再使用も容易であり、長期に亘つて
効率的な濾過処理を行うことができる。According to the multilayer porous body of the present invention, fine particles can be trapped and filtered off while suppressing an increase in pressure loss by the effect of the multilayer structure. For example, it is generated from a refuse incinerator. It is useful as a filter material for exhaust gas soot filtration. The distribution of fine pores is only the sprayed film on the surface, and the substrate has a pore distribution with a relatively large pore size.Therefore, the backwashing efficiency for recovering the decrease in filtration function due to clogging is maintained at a high level, and repeated repetition is performed. It is easy to use and can perform efficient filtration for a long period of time.
フロントページの続き (72)発明者 船越 淳 大阪府枚方市中宮大池1丁目1番1号 株 式会社クボタ枚方製造所内 (72)発明者 元木 龍太郎 大阪府枚方市中宮大池1丁目1番1号 株 式会社クボタ枚方製造所内Continued on the front page (72) Atsushi Funakoshi 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Inside Kubota Hirakata Plant Co., Ltd. (72) Ryutaro Motoki 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Kubota Corporation Hirakata Factory
Claims (3)
基体とし、該基体の表面に金属,セラミックスまたはこ
れらの混合物からなる調節された気孔径を有する多孔質
溶射膜が形成されていることを特徴とする複層多孔質
体。1. A porous metal sintered body having a controlled pore diameter is used as a base, and a porous sprayed film having a controlled pore diameter made of metal, ceramics or a mixture thereof is formed on the surface of the base. A multi-layered porous body.
粒子を濾過する気孔径を有し、基体は溶射膜より大きい
平均気孔径を有することを特徴とするフィルタ材である
請求項1に記載の複層多孔質体。2. The filter material according to claim 1, wherein the pores of the porous sprayed film have a pore size for filtering particles in the fluid to be treated, and the substrate has an average pore size larger than the sprayed film. 2. The multilayer porous body according to 1.
気孔径を有する多孔質金属焼結体を基体とし、該基体の
表面に、金属もしくはセラミックス又はこれらの混合物
を溶射して、調節された気孔径を有する溶射膜を形成す
ることを特徴とする複層多孔質体の製造方法。3. A porous metal sintered body having a controlled pore diameter, which is a hot isostatic pressing sintered body, is used as a base, and metal, ceramics, or a mixture thereof is sprayed on the surface of the base. And forming a sprayed film having a controlled pore diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18137297A JPH1121601A (en) | 1997-07-07 | 1997-07-07 | Multilayer porous body and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18137297A JPH1121601A (en) | 1997-07-07 | 1997-07-07 | Multilayer porous body and method for producing the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1121601A true JPH1121601A (en) | 1999-01-26 |
Family
ID=16099585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18137297A Pending JPH1121601A (en) | 1997-07-07 | 1997-07-07 | Multilayer porous body and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1121601A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004521732A (en) * | 2001-01-19 | 2004-07-22 | ジーケイエヌ ジンテル メタルズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | A filter having a structure arranged in a grade order and a method for manufacturing the same. |
| JP2020168625A (en) * | 2015-02-13 | 2020-10-15 | インテグリス・インコーポレーテッド | Coatings to enhance the properties and performance of substrate articles and equipment |
-
1997
- 1997-07-07 JP JP18137297A patent/JPH1121601A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004521732A (en) * | 2001-01-19 | 2004-07-22 | ジーケイエヌ ジンテル メタルズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | A filter having a structure arranged in a grade order and a method for manufacturing the same. |
| JP2020168625A (en) * | 2015-02-13 | 2020-10-15 | インテグリス・インコーポレーテッド | Coatings to enhance the properties and performance of substrate articles and equipment |
| US12018382B2 (en) | 2015-02-13 | 2024-06-25 | Entegris, Inc. | Coatings for enhancement of properties and performance of substrate articles and apparatus |
| US12084778B2 (en) | 2015-02-13 | 2024-09-10 | Entegris, Inc. | Coatings for enhancement of properties and performance of substrate articles and apparatus |
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