JPH11194067A - Lens aligning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate eccentricity between the optical axes of a magnification variable optical system and a jig lens optical system, which are inserted between a lens frame to be tested and an image pickup device, and the optical axis of a lens to be tested and to highly precisely align the tested lens with the lens frame. SOLUTION: The lens frame 4, on which a lens to be tested 3 is installed, a fixed lens 5 fixed and aligned with the lens frame 3, a light source 1 for projecting inspection light, a jig lens optical system 8 which can be arranged on the optical path of inspection light, the image pickup means taking a spot image which is image-formed by permitting inspection light to pass through one of the lens 3, the fixed lens 5 and the jig lens optical system 8, a monitor 11 for displaying the image taken in by the image pickup means and an x-y stage 7 which finely moves the lens frame 3 or the jig lens optical system 8 in a direction vertical to the incident axis of inspection light are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens centering device for a lens used in a camera or a microscope.

[0002]

2. Description of the Related Art Generally, when a lens is mounted on a camera, a microscope, or the like, the lens is rarely directly mounted on a housing of the camera, a microscope, or the like, and a lens frame is used. In this case, the centered lens is fixed to the lens frame so that the optical axis of the lens coincides with the center axis of the lens frame, and then the lens frame is attached to a body of a camera, a microscope, or the like.

Conventionally, a lens centering device for centering a lens with respect to a lens frame is described in JP-A-8-35908. In this lens centering device, the inspection light from the light source passes through a collimator lens and becomes parallel light, and is applied to a lens (hereinafter, referred to as a test lens) attached to a lens frame (hereinafter, referred to as a test lens frame). Incident. The inspection light transmitted through the lens to be inspected passes through a variable magnification optical system that can arbitrarily adjust the magnification of the formed image, and is captured as a spot image of an arbitrary magnification by an imaging unit and input to an image processing apparatus. You. The result of the image processing is input to the computer, and x is mounted on the imaging means so that the spot image is located at the center of the imaging range.
-The motor of the y stage is driven by the computer.

The output signal from the image pickup means is divided into two parts, one of which is input to the image processing device, and the other is supplied to an output circuit of a light source so that the intensity of a spot image formed on the image pickup device becomes constant. Feedback will be given. The image processing apparatus can obtain the eccentric amount and eccentric direction of the test lens with respect to the test lens frame by performing image processing on the shape of the input spot image.

In another lens centering device,
A jig lens optical system is inserted between the lens to be inspected and the imaging means instead of the above-described variable magnification optical system. In particular, when the test lens has the characteristics of a concave lens optical system, if the jig lens optical system is not inserted, the light transmitted through the test lens is not diffused into a spot image, but is condensed and collected by the imaging means. In order to capture a spot image, a jig lens optical system is indispensable. In addition, since the jig lens optical system has the effect of increasing the amount of change in the shape of the spot image on the image sensor with respect to the amount of movement of the lens to be inspected (improving sensitivity) during alignment, the lens to be inspected is It is often used in a lens centering device, not only when it has the characteristics of a concave lens optical system.

[0006]

The lens centering apparatus using the variable magnification optical system described in the prior art makes it possible to adjust the magnification of the spot image by the variable magnification optical system, and to adjust the eccentricity of the lens to be measured. This is an excellent invention that can always take in a spot image even when is large. However, if the eccentricity between the variable magnification optical system and the test lens is not zero in the first place, accurate centering cannot be performed. For this reason, the optical performance of the test lens that was considered at the time of design cannot be satisfied, and the performance of a product equipped with the test lens may be reduced.

The above-mentioned jig lens optical system simulates the amount of change of the spot image when combined with the lens to be inspected in advance, and is designed so that the amount of change (sensitivity) of the spot image becomes largest. . Also, since the jig lens optical system is used by fitting it to the lens to be inspected, it is necessary to design such that even if there is some backlash in the fitting part, the influence on the spot image is minimized. Is a factor that impairs the degree of freedom.

Further, even if the jig lens optical system is designed by performing various simulations, when the centering is actually performed, the relative eccentricity between the jig lens optical system and the test lens is inevitable. May occur. In this case, if the centering is performed as it is without noticing the eccentricity, the centering of the test lens may be performed so as to offset the eccentricity generated between the jig lens optical system and the test lens. become. Therefore, the test lens which is decentered by the amount of the offset is completed. In addition, since the change of the spot image due to relative eccentricity is too large depending on the lens to be inspected, there is a problem that the change of the spot image when the alignment of the lens to be inspected is difficult to understand and the alignment cannot be performed. .

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and includes a variable magnification optical system, a jig lens optical system, and other optical systems inserted between a lens frame to be inspected and an image pickup means. Provided is a lens centering device that eliminates eccentricity between an optical axis of a system and an optical axis of a lens to be inspected and that can center the lens to be inspected with respect to a lens frame to be inspected with high accuracy. Aim.

[0010]

In order to achieve the above object, a lens centering apparatus according to a first aspect of the present invention includes a lens frame to be mounted on which a lens to be tested is mounted, and a lens centering device mounted on the lens frame to be tested. A fixed lens that is fixed in a fixed state, a light source for projecting inspection light, an insertion optical system that can be arranged on an optical path of the inspection light, and the inspection light is a lens to be inspected, a fixed lens, and an insertion optical system. Imaging means for capturing a spot image formed by transmitting through at least one of the optical systems; display means for displaying an image captured by the imaging means; and detecting the image based on the image displayed on the display means. Fine movement means for finely moving the lens frame or the insertion optical system in a direction perpendicular to the axis of incidence of the inspection light.

Further, a lens centering device according to a second invention is the lens centering device according to the first invention, wherein the insertion optical system is a variable magnification optical system.

Further, a lens centering device according to a third invention is the lens centering device according to the first invention, wherein the insertion optical system is a jig lens optical system on which a jig lens is mounted.

A lens centering apparatus according to a fourth aspect of the present invention is the lens centering apparatus according to the first, second or third aspect, wherein the fine movement means for finely moving the insertion optical system is xy.
The stage.

That is, the lens centering device according to the first aspect of the present invention includes a fixed lens fixed to the test lens frame in a centered state, the test lens mounted on the test lens frame, and the insertion optics. Projection light is projected from a light source to at least one of the systems. The inspection light is transmitted through at least one of the fixed lens, the lens to be inspected, and the insertion optical system to capture a spot image formed by the imaging unit, and the image of the spot image is displayed on the display unit. Based on the image of the spot image displayed on the display means, the lens frame to be inspected or the insertion optical system is finely moved by the fine movement means in a direction perpendicular to the incidence axis of the inspection light. Then, the test lens is centered with respect to the test lens frame.

Further, in the lens centering device according to the second invention, the insertion optical system is a variable magnification optical system.

Further, in the lens centering device according to the third invention, the insertion optical system is a jig lens optical system on which a jig lens is mounted.

A lens centering device according to a fourth aspect of the present invention is characterized in that x
-The insertion optical system is slightly moved on the y stage.

[0018]

[First Embodiment] A first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic diagram showing a lens centering device of the present embodiment.

The lens centering apparatus includes a light source 1 for projecting inspection light and a collimator lens 2 for converting the inspection light emitted from the light source 1 into parallel light. A test lens frame 4 on which the test lens 3 is mounted can be set on the optical path of the test light transmitted through the collimator lens 2. The fixed lens 5 is already adhered to the test lens frame 4 in a centered state, and the test lens 3 can be placed above the fixed lens 5 in an R-plane receiving state. . An alignment rod 6 as an adjusting means is provided obliquely above the lens frame 4 set on the optical path so as to advance and retreat with respect to the lens 3 mounted on the lens frame 4. The lens 3 to be inspected can be finely moved by an operator (not shown).

Below the lens frame 4 to be inspected, an xy stage 7 as fine movement means is provided so as to be movable in a direction perpendicular to the axis of incidence of the inspection light. A jig lens optical system 8 as an insertion optical system can be fixed on the xy stage 7. Can be mounted in the optical path. The jig lens optical system 8 is composed of a jig lens group centered and adhered to a jig lens frame 9.

Provided below the xy stage 7 is a CCD camera 10 serving as an image pickup means, and the inspection light emitted from the light source 1 emits only the fixed lens 5 and the fixed lens 5, the jig lens optical system 8 and the test object. After passing through the lens 3, the fixed lens 5, and the jig lens optical system 8, it is installed at a position where an image is formed. A monitor 11 as display means is connected to the CCD camera 10.

Next, the operation of the lens centering device will be described. (1) First, the jig lens optical system 8 is removed from the optical path of the inspection light, and the test lens 3 to be mounted for centering from the test lens frame 4 is not mounted. The inspection light emitted from the light source 1 is collimated by the collimator lens 2. The test lens frame 4 is set on the optical path of the parallel inspection light, and the test light enters the fixed lens 5 of the test lens frame 4. The inspection light transmitted through the fixed lens 5 is captured by the CCD camera 10 as a spot image and displayed on the monitor 11. By observing the shape of the spot image displayed on the monitor 11, it is confirmed that the optical axis of the fixed lens 5 and the incident axis of the inspection light are parallel, and the center position of the spot image is recorded.

(2) Next, the jig lens optical system 8 is fixed on the xy stage 7. Then, similarly to the above (1), the inspection light is made to enter the fixed lens 5. The inspection light transmitted through the fixed lens 5 is transmitted through the jig lens optical system 8, captured as a spot image, and displayed on the monitor 11. X− so that the center of the displayed spot image coincides with the center of the spot image by the fixed lens 5 obtained in (1) above.
The jig lens optical system 8 is finely moved by slightly moving the y stage 7 in the direction perpendicular to the incident axis of the inspection light, and the optical axis of the jig lens optical system 8 is fixed to the fixed lens 5 while observing the shape of the spot image. To the optical axis of

(3) In this state, the test lens 3 is placed on the test lens frame 4, and then the inspection light is made incident on the test lens 3 through the same optical path as in the above (2). The inspection light transmitted through the test lens 3 transmits through the fixed lens 5 and the jig lens optical system 8 and is captured as a spot image by the CCD camera 10. While observing the spot image displayed on the monitor 11, the operator adjusts the position of the lens 3 to be inspected using the alignment rod 6 so as not to cause on-axis coma aberration, and The test lens 3 is centered.

In the centering step, (1)
The centering of the test lens 3 can be performed by changing the order of setting the test lens frame 4 and the jig lens optical system 8 of (2). That is, first, the jig lens optical system 8 is set at the position of the lens frame 4 to be inspected, and the optical axis of the centered jig lens optical system 8 matches the center axis of the jig lens frame 9. Confirm. Next, the test lens frame 4 is set on the xy stage 7, and the test lens frame 4 is slightly moved by the xy stage 7 in a direction perpendicular to the axis of incidence of the inspection light, thereby fixing the test lens frame 4. The lens 5 and the jig lens optical system 8 are centered. After that, the above operation (3) is performed.

According to the present embodiment, the lens frame 4 to be inspected
After the eccentricity between the (fixed lens 5) and the jig lens optical system 8 is reduced to zero, the lens 3 to be measured can be centered. It can be performed with higher accuracy. Further, since there is no need to fit the test lens 3 and the jig lens optical system 8, the degree of freedom in designing the jig lens optical system 8 can be increased.

In this embodiment, the case where the jig lens optical system 8 is used as an insertion optical system disposed between the lens 3 to be inspected and the CCD camera 10 has been described. The same operation and effect can be obtained even when the variable magnification optical system is used as the insertion optical system. Furthermore, not only the jig lens optical system 8 and the variable magnification optical system but also any optical system can be used as long as it is an insertion optical system that can be arranged between the lens 3 to be inspected and the CCD camera 10. . In particular, when a variable magnification optical system is used,
The inspection light can be reliably captured as a spot image by the CCD camera 10. Further, in this embodiment, a CCD camera is used as an image pickup means.
It goes without saying that the same operation and effect can be obtained even when a camera using a sensor or the like as an image sensor is used.

[Second Embodiment] A second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a schematic diagram showing the lens centering device of the present embodiment.

The lens centering device includes a light source 21 for projecting inspection light and a collimator lens 22 for converting the inspection light emitted from the light source 21 into parallel light. A test lens frame 24 on which a test lens 23 is placed can be set on the optical path of the test light transmitted through the collimator lens 22. A fixed lens 25 is already adhered to the test lens frame 24 in a centered state, and the test lens 23 can be placed above the fixed lens 25 in an R-plane receiving state. The test lens frame 24 is rotatable around the optical axis of the fixed lens 25 by a test lens frame rotating mechanism 32 on the optical path. An alignment rod 26 as an adjusting means is provided obliquely above the test lens frame 24 set on the optical path so as to be able to advance and retreat with respect to the test lens 23 mounted on the test lens frame 24. The lens 23 can be finely moved by an operator (not shown).

An xy stage 27 as fine movement means is provided below the test lens frame 24 so as to be movable in a direction perpendicular to the incident axis of the inspection light. On the xy stage 27, a jig lens optical system 2 as an insertion optical system
8 can be fixed, and the xy stage 27
The jig lens optical system 28 can be placed in the optical path of the inspection light. This jig lens optical system 28
Is composed of a jig lens group which is centered and adhered to the jig lens frame 29, and is the light source 2 among the jig lens groups.
The lens away from 1 is particularly called a jig lens 28a.
The jig lens optical system 28 is moved by the jig lens frame rotating mechanism 33 together with the xy stage 27.
4 can be rotated about an axis parallel to the optical axis of the fixed lens 25.

A CCD camera 30 is provided below the xy stage 27, and the inspection light emitted from the light source 21 is fixed to only the fixed lens 25, the fixed lens 25, the jig lens optical system 28, and the test lens 23. It is installed at a position where an image is formed after passing through the lens 25 and the jig lens optical system 28.

A mirror 34 is arranged between the xy stage 27 and the CCD camera 30, and a reflection type eccentricity measuring device 36 is arranged at a position corresponding to the mirror 34 outside the optical path of the inspection light. I have. The mirror 34 is rotatably provided around a mirror rotation axis 35 disposed outside the optical path of the inspection light, and can be installed inside and outside the optical path of the inspection light. 25 and the optical path of the incident light to the jig lens 28a and the reflected light thereof;
The optical path of incident light from the light source 21 to the CCD camera 30 transmitted through the jig lens optical system 28 can be switched.

The CCD camera 30 is connected to a monitor 31 as display means, and the monitor 31 is connected to the reflection type eccentricity measuring device 36. The monitor 31
CC in the CCD camera 30 and the reflection type eccentricity measuring device 36
An image formed by D (not shown) is displayed, and its display screen can be switched.

Next, the operation of the lens centering device will be described. (1) First, the jig lens optical system 28 is removed from the optical path of the inspection light, and the lens 23 to be centered from the lens frame 24 is not mounted. With the test lens 23 not placed, the test lens frame 24 is set on the optical path of the inspection light. Next, laser light is emitted from the reflection type eccentricity measuring device 36, and the mirror 3 arranged in the optical path of the inspection light is irradiated.
The light is reflected at 4 and enters the fixed lens 25. At this time, the test lens frame 24 is rotated by the test lens frame rotating mechanism 32, and the fixed lens 2 adhered to the test lens frame 24 is rotated.
5 is rotated perpendicular to the laser beam. The laser beam reflected by the rotating fixed lens 25 is reflected again by the mirror 34, enters the reflection type eccentricity measuring device 36, forms an image by the CCD in the reflection type eccentricity measuring device 36, and is connected. Monitor 31
To display a spot image. Since the spot image is not rotating, it is confirmed that the rotation axis of the lens frame 24 to be inspected coincides with the optical axis of the fixed lens 25, and the center position of the spot image is recorded.

(2) Next, the jig lens optical system 28 is xy
It is fixed on the stage 27. Then, the jig lens optical system 28 is rotated by the jig lens frame rotation mechanism 33, and x
-Rotate the y-stage 27 and the jig lens 28a perpendicularly to the axis of incidence of the inspection light. A jig lens 28 rotating a laser beam from a reflection type eccentricity measuring device 36 via a mirror 34
The laser light that is incident on a and reflected by the jig lens 28a is incident on the reflection type eccentricity measuring device 36 via the mirror 34 in the same manner as in the above (1), and a spot image is displayed on the monitor 31. The xy stage 27 is finely moved in the direction perpendicular to the axis of the inspection light so that the spot image does not rotate and the center position is at the center of the spot image by the fixed lens 25 obtained in the above (1). Then, the jig lens optical system 28 is slightly moved, and the optical axis of the jig lens optical system 28 is aligned with the optical axis of the fixed lens 25. After the positioning of the jig lens optical system 28 is completed, the mirror 34 is rotated around the mirror rotation shaft 35 to be disposed outside the optical path of the inspection light so that the inspection light emitted from the light source 21 is not blocked.

(3) In this state, the test lens 23 is placed on the test lens frame 24. The inspection light emitted from the light source 21 is collimated by the collimator lens 22 and passes through the lens 23 and the fixed lens 25 in the lens frame 24. The inspection light transmitted through the fixed lens 25 is transmitted through the jig lens 28 and other jig lens groups in the jig lens optical system 28 and is captured as a spot image by the CCD camera 30. Will be displayed.
While observing the spot image displayed on the monitor 31, the operator adjusts the position of the lens 23 to be inspected using the alignment rod 26 so that no axial coma is generated, and The test lens 23 is centered.

In the centering step, (1)
The center of the test lens 23 can be adjusted by changing the order of setting the test lens frame 24 and the jig lens optical system 28 in (2). That is, first, the jig lens optical system 2
8 is set at the position of the test lens frame 24, and the optical axis of the centered jig lens optical system 28 is adjusted to the jig lens frame 29.
Make sure that it matches the center axis of. Next, the test lens frame 24 is set on the xy stage 27, and the test lens frame 42 is finely moved by the xy stage 27 in the direction perpendicular to the incident axis of the inspection light, thereby fixing the test lens frame 24. Lens 2
5 and the optical axis of the jig lens optical system 28 are aligned. afterwards,
Perform the above operation (3).

According to the present embodiment, the same effects as in the first embodiment can be obtained. In addition, the reflection type eccentricity measuring device 3
6 is used, more accurate centering can be performed by combining with centering by transmission of inspection light.

In this embodiment, the case where the jig lens optical system 28 is used as the insertion optical system disposed between the lens 23 to be inspected and the CCD camera 30 has been described.
The same operation and effect can be obtained even when the variable magnification optical system shown in the prior art is used as the insertion optical system. Furthermore, not limited to the jig lens optical system 28 and the variable magnification optical system,
The same operation and effect can be achieved by any optical system as long as it is an insertion optical system that can be arranged between the lens 23 to be inspected and the CCD camera 30. In particular, when a variable magnification optical system is used, the inspection light can be surely taken into the CCD camera 30 as a spot image. Further, in the present embodiment, a CCD camera is used as the imaging means,
It goes without saying that the same operation and effect can be obtained even if a camera using an OS sensor or the like as an image sensor is used.

The technical idea having the following configuration is derived from the above-described specific embodiment. (1) A light source for projecting inspection light onto a lens to be inspected, an imaging unit for capturing a spot image formed after the inspection light has passed through the lens to be inspected, and an image captured by the imaging unit for display. In a lens centering device consisting of a display device, a test lens frame on which a test lens is mounted, and an insertion optical system disposed between the test lens frame and the imaging device,
A lens centering device, comprising: fine movement means for finely moving the inspection light in a direction perpendicular to an incident axis thereof.

(2) The lens centering apparatus according to (1), wherein the insertion optical system is a variable magnification optical system.

(3) Additional note (1) wherein the insertion optical system is a jig lens optical system on which a jig lens is mounted.
3. The lens centering device according to item 1.

(4) A light source for projecting inspection light onto the lens to be inspected, imaging means for capturing a spot image formed after the inspection light has passed through the lens to be inspected, and an image captured by the imaging means In a lens centering device including a display device for displaying, a jig lens optical system, which is arranged between a lens to be inspected and an imaging unit and has a jig lens mounted thereon, is slightly moved in a direction perpendicular to an incident axis of inspection light. A lens centering device comprising an xy stage.

(5) A lens frame to be mounted on which the lens to be tested is mounted, a fixed lens fixed to the lens frame to be tested, and an optical axis of the fixed lens to the lens frame to be tested. A lens frame rotating mechanism for rotating around, a light source for projecting inspection light, an insertion optical system that can be arranged on the optical path of the inspection light, and a jig for rotating the insertion optical system around its optical axis. Component lens frame rotating mechanism, a reflection type eccentricity measuring device that irradiates a light beam to the fixed lens and the insertion optical system, and captures a spot image formed by reflection by the fixed lens and the insertion optical system, and the inspection light Imaging means for capturing a spot image formed by transmitting at least one of the test lens, fixed lens, and insertion optical system; and display means for displaying an image captured by the reflective eccentricity measuring device and the imaging means. , The display hand Based on the image displayed on the lens centering apparatus characterized by comprising a fine movement means for finely moving in a direction perpendicular to the axis of incidence of the inspection light the sample lens frame or the insertion optical system.

(6) A step of projecting inspection light from a light source onto a fixed lens fixed in a state of being centered on a lens frame to be inspected, and a spot image formed by transmitting the inspection light through the lens to be inspected and forming an image. Is captured by an image sensor, and based on the spot image, the incident axis of the inspection light and the optical axis of the fixed lens are made parallel, and an insertion optical system is arranged between the lens frame to be inspected and the image sensor. A spot image formed by transmitting the inspection light through the fixed lens and the insertion optical system and capturing the spot image with an image sensor, and moving the fixed lens or the insertion optical system with respect to the incident axis of the inspection light based on the spot image. Finely moving in the vertical direction to align the optical axis of the insertion optical system with the optical axis of the fixed lens; placing the test lens on the test lens frame; and Lens and insertion optics Capturing the transmitted and formed spot image by the imaging means, finely moving the lens to be inspected by the adjusting means based on the spot image, and centering the lens with respect to the lens frame to be inspected. Lens centering method.

(7) A step of projecting light rays from a reflection type eccentricity measuring device to a fixed lens fixed in a state where it is centered on the lens frame to be inspected, and the fixed lens is rotated by a lens frame rotating mechanism to be inspected. While rotating around the optical axis of the fixed lens, the spot image formed by the light beam reflected by the fixed lens is taken into a reflection type eccentricity measuring instrument, and based on this spot image, the rotation axis of the lens frame to be inspected and the fixed lens Checking the coincidence with the optical axis of the lens, arranging an insertion optical system below the lens frame to be inspected, projecting a light beam from the reflective eccentricity measuring device to the insertion optical system, While rotating the insertion optical system by a rotating mechanism, a spot image formed by imaging the light beam reflected by the insertion optical system is taken into a reflection type eccentricity measuring instrument, and the insertion optical system is finely moved based on the spot image, and inserted. Optical axis and front of optical system A step of combining the optical axis of the fixed lens, comprising the steps of placing the sample lens to said subject lens frame,
Projecting inspection light from a light source onto the lens to be inspected, the fixed lens and the insertion optical system, and imaging the spot image formed by transmitting the inspection light through the lens to be inspected, the fixed lens and the insertion optical system. Taking in, finely moving the lens to be inspected by the adjusting means based on the spot image, and centering the lens with respect to the lens frame to be inspected.

According to the lens centering device of the appendix (1),
Since the eccentricity between the test lens and the insertion optical system can be made zero, there is an effect that the test lens can be centered with higher accuracy. Further, since there is no need to fit the test lens and the insertion optical system, there is an effect that the degree of freedom in designing the insertion optical system can be increased.

Further, according to the lens centering device of the supplementary note (2), there is an effect that the spot image can be surely taken in by the imaging means.

Further, according to the lens centering device of the appendix (3), the amount of change in the shape of the spot image with respect to the moving amount of the test lens can be increased (sensitivity can be increased) when adjusting the center of the test lens. It works.

According to the lens centering device described in the appendix (4),
This provides an effect that the eccentricity between the test lens and the insertion optical system can be made zero.

According to the lens centering device described in Appendix (5),
The centering of the test lens and the insertion optical system by the reflection type eccentricity measuring instrument and the centering of the test lens by transmission of the inspection light can be combined, so that the center of the test lens with respect to the test lens frame is possible. Is performed more accurately.

According to the lens centering method described in Appendix (6), the eccentricity between the test lens and the insertion optical system can be reduced to zero, so that the test lens can be centered with higher accuracy. The effect that can be achieved. Further, since there is no need to fit the test lens and the insertion optical system, there is an effect that the degree of freedom in designing the insertion optical system can be increased.

According to the lens centering method of Appendix (7), after the centering of the lens frame to be inspected and the insertion optical system is performed based on the reflection type eccentricity measuring device, the inspection light is transmitted. Since the centering of the lens to be inspected can be combined,
There is an effect that the centering of the test lens with respect to the test lens frame can be performed more accurately.

[0054]

As described above, according to the lens centering apparatus of the first aspect of the present invention, the eccentricity between the lens frame to be inspected and the insertion optical system can be made zero, so that the lens to be inspected. The effect that the centering can be performed with higher precision is achieved. Further, since there is no need to fit the test lens and the insertion optical system, there is an effect that the degree of freedom in designing the insertion optical system can be increased.

Further, according to the lens centering device of the present invention according to the second aspect, there is an effect that the spot image can be surely captured by the imaging means.

Further, according to the lens centering device of the present invention, when the center of the lens to be inspected is adjusted, the amount of change in the shape of the spot image with respect to the amount of movement of the lens to be inspected is increased (sensitivity is increased). It has the effect of being able to.

According to the lens centering device of the present invention, there is an effect that the eccentricity between the lens frame to be inspected and the insertion optical system can be made zero.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment of the present invention.

FIG. 2 is a schematic diagram showing a second embodiment of the present invention.

[Explanation of symbols]

 1, 21 Light source 3, 23 Lens to be tested 4, 24 Lens frame to be tested 5, 25 Fixed lens 6, 26 Alignment rod 7, 27 XY stage 8, 28 Jig lens optical system 9, 29 Jig lens frame 10, 30 CCD camera 11, 31 monitor 32 lens frame rotating mechanism to be inspected 33 jig lens frame rotating mechanism 34 mirror 36 reflective eccentricity measuring instrument

Claims (4)

[Claims] 1. A test lens frame on which a test lens is mounted, a fixed lens fixed to the test lens frame in a centered state, a light source for projecting test light, and the test An insertion optical system that can be arranged on an optical path of light; an imaging unit that captures a spot image formed by transmitting the inspection light through at least one of the test lens, the fixed lens, and the insertion optical system; and the imaging unit. Display means for displaying the image captured at, and fine movement means for finely moving the lens frame to be inspected or the insertion optical system in a direction perpendicular to the axis of inspection light, based on the image displayed on the display means. And a lens centering device. 2. The lens centering device according to claim 1, wherein the insertion optical system is a variable magnification optical system. 3. The optical system according to claim 1, wherein the insertion optical system is a jig lens optical system on which a jig lens is mounted.
3. The lens centering device according to item 1. 4. The fine movement means for finely moving the insertion optical system is an xy stage.
4. The lens centering device according to 2 or 3.