JPH11185303A - Method for manufacturing optical disk and apparatus for manufacturing the same - Google Patents

Abstract

(57) [Problem] To provide a method and an apparatus for manufacturing an optical disk suitable for rapid and mass production. SOLUTION: The method includes a first step of forming grooves or pits on a film-like or sheet-like support base, and a second step of forming a reflective film material and / or a recording film material, and thereafter, An optical disk manufacturing method and apparatus for performing a third step of processing the support base into a predetermined disk shape.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a CD (compact disc), an MD (mini disc), and a CD-R.
The present invention relates to a method for manufacturing an optical disk such as a (compact disk-recordable) and an apparatus for manufacturing the same.

[0002]

2. Description of the Related Art Generally, CD, MD, CD-R, DVD
2. Description of the Related Art A process for manufacturing an optical disc such as a (digital video disc) includes two steps of a master disc manufacturing step (mastering step) and a disc forming step (replication step). In particular, in the latter disc-forming process, a large amount of optical discs are produced from the master produced in the master producing process.
In addition, rapid production is required.

Next, a conventional method for manufacturing an optical disk will be described. Hereinafter, the optical disk manufacturing method (manufacturing process) means a disk forming process (replication process) of the optical disk.

FIG. 12 shows a single-wafer manufacturing process of a recordable magneto-optical disk (mini-disk).

[0005] First, a molding machine 8 to which a stamper manufactured in a mastering process as a master disk is attached.
When a pellet-like polycarbonate is put into the mold 0 and the resultant is compression-molded, a disc substrate 81 for a mini-disc is produced (compression method). Here, grooves (or pits) are formed on the disk substrate 81.

Next, the disk substrate 81 is put into a sputtering film forming apparatus 86, and various thin films are formed. The sputtering film forming apparatus 86 is divided into at least the number of layers to be formed, and is configured to form a thin film one layer at a time in each film forming chamber. In general, the film forming method is a sputtering method, and magnetron sputtering cathodes 87, 88, 89, and 90 and a target not shown are attached to each film forming chamber.
A desired thin film is formed under each predetermined condition.

Generally, as shown in FIG. 13, a magneto-optical disk (MO) such as a mini disk is used.
k) is the disk substrate 16 (the disk substrate 81 in FIG. 12).
A) a first dielectric film (mainly a silicon nitride film) 4; a magneto-optical film (an alloy thin film containing TbFeCo as a main component) as a recording film 5; A second dielectric film (mainly a silicon nitride film) 6, a reflection film 7 (an alloy thin film containing aluminum as a main component, or a metal thin film made of aluminum or gold), and a protective layer 8 made of an ultraviolet curable resin or the like. It has a laminated structure 15 that is sequentially laminated.

Therefore, first, the sputtering film forming apparatus 8
In 6, a transparent dielectric thin film (first dielectric film 4) containing silicon nitride as a main component is formed in a first film forming chamber 82, and then TbFeCo is used as a main component in a second film forming chamber 83. Magneto-optical recording film (recording film 5) is formed, and then
In the third film forming chamber 84, a transparent dielectric thin film (second dielectric film 6) mainly containing silicon nitride is formed, and finally, in the fourth film forming chamber 85, an alloy thin film mainly containing aluminum is formed. Alternatively, a reflective film 8 made of a thin metal film of aluminum or gold is formed. Although not shown, the movement between the film forming chambers is performed for each disk by a single-wafer transfer system or the like.

Next, in order to increase the durability of the disk after film formation, a protective layer 8 is formed by a protective layer material application / curing step. In this step, first, an ultraviolet curable resin is applied by a spin coating method. This application
A UV curable resin as a material for a protective layer is dispensed with a dispenser 92.
From the disc 91 on the turntable 93 provided in the spin coater. After applying the ultraviolet curable resin, the resin is cured by irradiating ultraviolet rays to form the protective layer 8, and the laminated structure 15 of the minidisk is manufactured.

Thereafter, the product is manufactured through post-processes such as mounting of a clamping plate and assembly into a cartridge.

The above-described process flow is not limited to the mini-disc, and most optical discs are the same as the mini-disc except for the number of film-forming materials and the number of film-forming chambers, except for the following organic dye-coated type CD-R and the like. It is manufactured by almost the same process.

FIG. 14 shows a CD-R single-wafer manufacturing process.

In general, a CD-R is formed on a disk substrate 18 having a groove forming surface 19 as shown in FIG.
There is provided a laminated structure 17 in which a recording film 12 made of an organic dye, a thin film of an alloy mainly containing aluminum, a reflective film 13 made of an aluminum thin film or a gold thin film, and a protective film 14 are sequentially stacked.

Therefore, first, the CD-R molded by the molding machine 101 in the same manner as in the above-described mini disk manufacturing process.
An organic dye to be the recording film 12 is applied to the disk substrate 102 for use. This application is performed by, for example, a spin coating method, and is performed by dropping an organic dye from the dispenser 103 onto the disk substrate 102 on the turntable 104.

Next, using a sputtering film forming apparatus 105, an alloy thin film containing aluminum as a main component or a single metal thin film such as aluminum or gold is formed as the reflective film 13 by a sputtering method or a vapor deposition method. After the film formation, similarly to the mini-disc, an ultraviolet curable resin is applied by a spin coating method, and then, the ultraviolet curable resin is cured by irradiating ultraviolet rays to form a protective film 14, and the laminated film shown in FIG. CD-R1 having structure 17
09 is produced.

[0016]

As described above, in the conventional optical disk manufacturing process, grooves (guide grooves) and pits are formed for each disk substrate, and a reflective film and a recording film are formed. Therefore, only one substrate can be molded at a time, and the molding requires
It takes up to 7 seconds, and most of the subsequent steps (such as a film forming step) also flow through single-wafer processing.
Significant cost reduction due to mass production cannot be expected.

The present invention has been made in view of the above-mentioned conventional circumstances, and has as its object to provide a method of manufacturing an optical disk which is suitable for mass production and has excellent productivity, and an apparatus for manufacturing the same. It is in.

[0018]

That is, the present invention provides a first step of forming grooves or pits on a film- or sheet-like supporting base, and forming a reflective film material and / or a recording film material. And a third step of processing the support base into a predetermined disk shape.
The present invention relates to a method for manufacturing an optical disk (hereinafter, referred to as a manufacturing method of the present invention).

According to the production method of the present invention, grooves or pits are formed on a film-like or sheet-like support base, and a reflection film material and / or a recording film material are formed. Since the film-shaped or sheet-shaped support base is processed into a predetermined disk shape, a series of processing steps can be performed by transporting the film or sheet, and a large amount of optical disks can be rapidly produced. Workability and accuracy during film formation and processing can be improved.

According to the present invention, there is provided an apparatus capable of carrying out the manufacturing method of the present invention, wherein a first process section for forming grooves or pits on a film-like or sheet-like supporting base, a reflective film material and / or a recording medium are provided. An optical disc manufacturing apparatus (hereinafter, referred to as a “process”) having a second process unit for forming a film material and a third process unit for processing the support base into a predetermined disc shape.
It is referred to as the manufacturing apparatus of the present invention. ) Is also provided.

[0021]

FIG. 1 shows an example of an optical disk manufacturing process flow according to the present invention.

That is, in the manufacturing method of the present invention, a film-like or sheet-like support base is used, and (1) forming grooves or pits (corresponding to the first step) (2) reflection film And / or formation of a recording film (corresponding to the second step) (3) After forming the protective layer, (4) bonding step (5) punching step (corresponding to the third step) (6) An optical disc can be manufactured by performing a post-process.

Therefore, the manufacturing process of the optical disk according to the present invention involves the following steps.
Since a groove or pit forming process, a film forming process of a reflective film or a recording film, and a protective film forming process are performed, these process steps are performed by transporting the film- or sheet-shaped support base. This is a production process that can be implemented and can produce optical discs quickly and in large quantities and has excellent productivity.

In the manufacturing method and the manufacturing apparatus of the present invention,
After the second step, a step of attaching a film-like or sheet-like support (hereinafter, may be referred to as a support) for adjusting the thickness of the support base to the support base (a bonding step). It is desirable to have.

That is, for example, 200 μm
When a film or sheet of about m is used, the thickness of the supporting base must be appropriately increased in order to conform to the standard of the optical disk. Therefore, in this bonding step, a predetermined disc is formed by using a material (for example, a transparent plastic sheet) substantially equivalent to the material of the support base and adhering to the support base via, for example, an adhesive film. The thickness can be adjusted. Also,
At the same time, a disk substrate having excellent mechanical properties (rigidity, elasticity, etc.), optical properties (light transmittance, refractive index, etc.), thermal properties (heat resistance, etc.) can be obtained.

Alternatively, it is also possible to use a support base having a thickness for a hard disk and omit the bonding step. That is, the total thickness of the optical disc is
The support base having a predetermined thickness (for example, 1.2 mm for a CD or MD) may be used in advance.

Further, after the laminating step, the film- or sheet-shaped support base, which has been subjected to a predetermined process such as a groove or pit forming process and a reflective film or recording film forming process, is moved to a predetermined position. It is desirable to process it into a disk shape.

Further, in the manufacturing method and the manufacturing apparatus of the present invention, in the first step, an ultraviolet curable resin or a thermosetting resin is formed on the support base, and the ultraviolet curable resin or the thermosetting resin is, for example, A predetermined groove pattern or pit pattern can be transferred by a stamper or the like (2P method). Of course, other methods,
For example, a groove pattern or a pit pattern may be directly transferred to the support base, or a sheet or the like to which a predetermined groove pattern or pit pattern has been transferred may be fixed to the support base.

As the UV-curable resin, various UV-curable resins such as acrylic acid compounds, oligomers thereof, and vinyl compounds can be used. In addition, as the thermosetting resin, a thermosetting resin such as an ethylene glycol compound or an epoxy resin can be used.

In the second step, it is preferable to form a protective film after forming the reflective film material and / or the recording film material. However, the formation of the protective film is performed in the third step.
It may be performed at a stage before or after the process.

In the third step, it is desirable that the support base is processed into a predetermined disk shape by punching with a mold having a predetermined shape. However, other punching methods such as a laser cutter may be used.

In the manufacturing method of the present invention, it is preferable that the first step, the second step, and the third step are continuously performed.
The first process unit, the second process unit, and the third process unit may be configured to be continuously performed. By continuously performing each process (or process portion), productivity can be further improved, and further, transfer or the like at the time of rolling can be suppressed.

Next, a preferred embodiment based on the manufacturing method and the manufacturing apparatus of the present invention will be described.

[First Embodiment] FIGS. 2 to 5 show a series of manufacturing steps of a recordable mini-disc (MD).
2 shows a groove forming step, FIG. 3 shows a thin film forming step, FIG. 4 shows a protective layer forming step, and FIG. 5 shows a bonding step and a punching step. Next, this will be described in the order of each step.

First, in the groove forming step shown in FIG. 2, a polycarbonate film 22 having a thickness of, for example, 200 μm as a supporting substrate is removed from the polycarbonate film roll 21.
Is unwound in the direction of arrow A in the figure, and an ultraviolet curable resin 23 is applied onto the film 22 by a knife coater 24 so as to have a uniform thickness.

Next, the stamper 25 to which the master (not shown) produced in the mastering step is attached is pressed against the surface on which the ultraviolet curable resin 23 is applied. The stamper 25 moves with the film 22 for a certain time while being pressed. At this time, the groove pattern of the master is transferred to the ultraviolet curable resin applied on the film 22 by applying pressure by the pressure roller 26.

Next, the portion where the stamper 25 is pressed against the ultraviolet-curing resin applied on the polycarbonate film 22 is cured by irradiating ultraviolet rays from the back side of the film 22 with an ultraviolet irradiation lamp 27 for a predetermined time, thereby curing the groove pattern. Transfer to the resin on the film 22 is completed.

Then, the film 22 moves while the stamper 25 is pressed, and the film
The film 22 is peeled off from the stamper 25 by using 8. Thus, the groove forming surface 29 is formed on the surface of the polycarbonate film 22. Furthermore, by winding this, the polycarbonate film roll 30 in which the groove was formed is produced. Note that it is desirable to use a plurality of stampers 25, and the stampers 25 can be used repeatedly.

Next, FIG. 3 shows a process of forming various thin films. The polycarbonate film roll 30 on which the groove is formed is attached to the sputtering film forming apparatus 20, and the film 30a is unwound in the direction of arrow A in the figure so that the groove forming surface 29 becomes the surface on which the film is formed. Is wound around the main roll 39 which rotates.

The film forming section of the sputtering film forming apparatus 20 includes:
The number of layers of the thin film to be formed is divided by a partition plate 41, and in each of the film forming chambers, sputtering cathodes 35, 36, 37 and 38 to which a target (not shown) for forming a target film are attached. is set up.

In the process of manufacturing a recordable mini-disc according to the present embodiment, in the first film forming chamber 31, a transparent dielectric film containing silicon nitride as a main component is formed.
In No. 2, a magneto-optical recording film containing TbFeCo as a main component is
In the third film forming chamber 33, a transparent dielectric thin film mainly containing silicon nitride is formed, and in the fourth film forming chamber 34, a reflective film made of an aluminum alloy or a single metal mainly containing aluminum is formed.

The film formation is performed by adjusting film formation conditions (eg, pressure, temperature, sputtering power, etc.) for each film formation chamber so that the thickness of each layer becomes a predetermined thickness. The formed film is wound up to produce a formed polycarbonate film roll 40. This is the film forming step (thin film forming step). Next, the process proceeds to a protective layer forming step.

FIG. 4 shows a protective layer forming step. This protective layer is formed in order to prevent contamination and rust of the formed film.

First, an ultraviolet-curing resin 42 is applied to the film-forming surface of the polycarbonate film 40a on which various thin films have been formed by a knife coater 43 to a predetermined thickness. After the application, an ultraviolet irradiation lamp 44 is applied from the side on which the ultraviolet curing resin is applied.
UV light is applied to cure the applied UV-curable resin to form a protective film. After the formation of the protective film, this is wound up to produce the polycarbonate film roll 46 on which the protective film is formed.

Here, FIG. 6 shows the laminated structure manufactured in the steps up to here.

That is, in the groove forming step, the UV-curable resin layer 3 made of the UV-curable resin 23 is disposed on the supporting substrate 2 (polycarbonate film 22). Has a groove (not shown) formed by the above-described molding process.
Further, in the thin film forming step, a transparent dielectric film mainly composed of silicon nitride as the first dielectric thin film 4, a magneto-optical recording film mainly composed of TbFeCo as the recording film 5, a second dielectric film A transparent dielectric thin film mainly composed of silicon nitride as a body thin film 6 and a thin film mainly composed of aluminum as a reflection film 7 are sequentially laminated. A film 8 is formed.

By the way, the film manufactured in the steps up to this point has a thickness of 200 μm of the polycarbonate film 21 as a raw material and a total thickness of 30 μm of the thin film formed in each step.
It has a thickness of about m. That is, since the total thickness of the current optical disk (for example, a mini disk) is specified to be 1.2 mm, the following bonding process is performed.
The total thickness must be 1.2 mm. FIG. 5 shows the laminating step and the punching step for finally processing into a disk shape.

First, the polycarbonate film 54 unwound from the polycarbonate film roll 46 on which the protective film is formed in the direction of arrow A in the figure and the total thickness is 1.2 mm.
Film thickness adjusting polycarbonate sheet (a film-like or sheet-like support for adjusting the thickness of the supporting substrate) 52 and a bonding film roll 5
Pressure bonding is performed by a pressure roller 53 via a bonding film 51 coated with a pressing adhesive on both surfaces unwound from 0, and a film 54 and a sheet (support) 52 are bonded together.

Next, a hard film (or hard sheet) having a specified disk thickness in this bonding step
Is processed into a predetermined disk shape by using a punching die 55 (punching) to produce a mini disk 56 having a laminated structure 1 shown in FIG. The disc 56 manufactured here has substantially the same quality as the mini disc 15 shown in FIG. Then, the punched mini-disc 56 proceeds to post-processes such as mounting of a clamp and mounting of a cartridge, and a mini-disc as a product is manufactured.

FIG. 7 shows a laminated structure 1 of a recordable mini-disc produced through these series of steps. That is, the laminated structure on the supporting substrate 2 (FIG.
Is produced, and in the bonding step,
The support 9 is formed via an adhesive film layer not shown. As described above, the mini-disc having the laminated structure 1 has substantially the same characteristics and performance as those of the conventional mini-disc shown in FIG.

As described above, in the present embodiment, since the process of manufacturing a recordable mini-disc is performed using a film-like supporting substrate (polycarbonate film), a large number of mini-discs can be rapidly manufactured. It is a good and productive method. In addition, the workability of the film forming and bonding steps described above is improved, and the film forming property and processing accuracy are also improved, as compared with the case where processing is performed on individual disk substrates.

[Second Embodiment] Next, a method of manufacturing an organic dye-coated CD-R disc will be described with reference to FIGS.
Will be described with reference to FIG. FIG. 8 shows a recording layer forming step (organic dye coating step), and FIG. 9 shows a reflective film forming step.

First, similarly to the first embodiment, as shown in FIG. 2, grooves are formed on a polycarbonate film using an ultraviolet curable resin.

Next, as shown in FIG. 8, the polycarbonate film 60 on which the groove is formed is unwound in the direction of arrow A in the figure, and the knife-coater 62 is used on the surface (recording layer forming surface) 63 on which the groove is formed. The organic dye 61 is applied to a predetermined thickness. Subsequently, the organic dye 61 is dried through a dryer 65 to form a recording layer. By winding this, a polycarbonate film roll 64 having a recording layer formed thereon is produced.

Next, a reflection film forming step is performed. As the reflection film, an alloy thin film or a single metal thin film containing gold or aluminum as a main component is used, and this thin film is formed by, for example, a sputtering method. That is, as shown in FIG. 9, the polycarbonate film roll 64 on which the recording layer is formed is attached to the sputtering film forming apparatus 70, and the film 6 is formed so that the recording layer forming surface 66 becomes the surface on which the film is formed.
4a is wound around the main roll 67. A sputtering cathode 69 provided with a target (not shown) for forming a target film is provided in a film forming chamber 68 of the sputtering film forming apparatus 70.

This film formation is performed by adjusting the film formation conditions (pressure, temperature, sputtering power, etc.) and the film feeding speed so that the film thickness of the reflection film becomes a predetermined thickness. The film after film formation is wound up, and becomes a polycarbonate film roll 71 on which a reflection film is formed.

FIG. 10 shows the laminated structure manufactured in the steps up to here.

That is, in the groove forming step, an ultraviolet-curable resin layer 3 made of an ultraviolet-curable resin is disposed on the support base 2 (polycarbonate film 22).
Grooves (not shown) are formed on the surface 10 of the ultraviolet curable resin layer 3 by the above-described molding process. Further, in the recording layer forming step, a recording film 12 made of an organic dye 61 is formed, and in the reflecting film forming step, a reflective film 13 containing gold or aluminum as a main component is laminated. In the protective film forming step, a protective film 14 made of an ultraviolet curable resin is formed.

The steps after the film formation are the same as the case of the mini-disc shown in the first embodiment, the protective film forming step shown in FIG. 4, and the bonding and punching steps shown in FIG. After that, a CD-R disc is manufactured.

FIG. 11 shows a laminated structure 11 of a recordable CD-R disc manufactured through these series of steps.
That is, a laminated structure (see FIG. 10) on the support base 2 is produced before the protective film forming step, and the support 9 is formed in the bonding step via an adhesive film layer (not shown). Have been. C having this laminated structure 11
The DR disc has substantially the same characteristics and performance as the conventional CD-R shown in FIG.

Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to the above-described embodiments.

For example, the manufacturing method and manufacturing apparatus of the present invention are not limited to recordable mini-discs and CD-Rs,
D, CD-ROM, magneto-optical (MO) disk, phase change optical disk, DVD, etc., can be applied to all optical disk manufacturing methods.

Therefore, the laminated structure composed of the support base, the support, the recording film, the reflection film, the dielectric film, the ultraviolet curable resin layer, the protective layer, and the like is appropriately changed depending on the type of the optical disk. In addition, the material and the like are not limited to those described above.

For example, for a CD, a pit having a predetermined pattern is formed on a thin film (support base) made of polycarbonate or the like by, for example, stamping, and then a reflection film is formed by, for example, a sputtering method. After a protective film or the like is further formed, the thin film is obtained by processing the thin film into a predetermined disk shape.

In the first and second embodiments, polycarbonate is used as the supporting substrate (plastic film). However, polyethylene terephthalate (PET) and polyethylene naphthalate (PE) are used.
N), polystyrene and other optically transparent plastic films can be used. Alternatively, a sheet-like support substrate may be prepared instead of a film-like support base, and the sheet may be sequentially subjected to the above-described steps.

In the first and second embodiments, a polycarbonate film is used as a plastic sheet for adjusting the disk thickness (film or sheet-like support for adjusting the thickness of the support base). Although used, other optically transparent plastic films (or sheets) made of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polystyrene, or the like can be used.

Further, in the above-described embodiment, winding on a roll is shown for each step. However, the present invention is not limited to this, and at least two or more steps may be performed continuously without winding. Good.

That is, for example, as shown by the dashed line (1) in FIG. 2, the film on which the groove is formed in the groove forming step is not wound around the roll 30, and the dashed line (1) in FIG.
3 and 4, without winding the film on which the various thin films are formed in the thin film forming step, and leading to the protective film forming step as shown by the dashed line (2) in FIGS.
Furthermore, as shown by the dashed line (3) in FIGS. 4 and 5, by leading the protective film process to the bonding process and the punching process without winding, each of the above processes can be performed continuously.

In the first and second embodiments, a film-like substrate wound on a roll is used as a supporting substrate (starting material). A film may be manufactured and then subjected to the above-described steps. In addition, 20
Although a polycarbonate film having a thickness of 0 μm was used, the present invention is not limited to this. In particular, any transparent plastic film having a thickness of 1.2 mm or less may be used.

Next, in the groove forming step,
As a method of forming a groove on a plastic film, a so-called 2P method using an ultraviolet curable resin (Photo Po
The present invention is not limited to this, and a direct embossing method in which a stamper is directly pressed against a film may be applied. Or you may shape | mold directly with a polycarbonate etc. on a film. Further, a thermosetting resin may be used. Further, the method of applying the ultraviolet curable resin with a knife coater is applied, but other methods such as a roll coater may be used. Needless to say, pits may be formed instead of or together with the groove formation.

Next, in the film forming step, a sputtering method was used for forming various thin films. However, the present invention is not limited to this, and a vapor deposition method, a CVD (Chemical Vapor Deposition) method is used.
Other film formation methods such as the method may be applied. Further, at least two or more kinds of film forming methods may be mixed in one film forming machine including the sputtering method.

Further, in the first embodiment, the film forming chamber is divided into the total number of films to be formed in the film forming chamber. However, the present invention is not limited to this, and may be further divided. Further, the method of continuously forming a multilayer film in one film forming apparatus is applied, but film formation may be performed by separate devices at least one layer at a time.
Further, in the film forming apparatus, a method in which the film forming chamber is divided into the total number of films to be formed and the film (or sheet) is run and wound in one direction is applied. The number of films (or sheets) may be less than the number of films and the film (or sheet) may be reciprocated.

Further, a film containing silicon nitride as a main component is applied as the transparent dielectric film. For example, ZnS: SiO
Other suitable transparent dielectric films such as a dielectric film mainly composed of ₂ , a dielectric film mainly composed of SiC, and a dielectric film mainly composed of aluminum nitride (AlN) can be applied.

Further, as a recording layer (magneto-optical recording film), T
Although an alloy thin film containing bFeCo as a main component is used, other magneto-optical alloy thin films such as NdTbFe can be used. In addition to the magneto-optical alloy thin film, for example, GeSb
If a phase-change recording material containing Te or InSbTe as a main component is used, a phase-change optical disk (for example, a CD-R
W: compact disk rewritable).

Similarly, in the second embodiment, the recording layer was formed by applying an organic dye.
Various known materials can be used, and dyes may be used.

Next, in the protective layer forming step, the protective layer was formed by applying an ultraviolet curable resin and then irradiating it with ultraviolet light to cure the resin. A molecular film may be formed. Moreover, you may harden under the action of heat using a thermosetting resin. Further, the formation of the protective layer is incorporated into a film forming apparatus for forming a recording film and a reflective film, and after forming the recording film and the reflective film,
The protective layer may be formed continuously.

Although a knife coater is used as a method of applying the ultraviolet curable resin, other coating methods such as a roll coater may be used. Further, the protection layer is formed after the film formation step and before the bonding step, but may be performed after bonding or after punching.

Next, in the bonding step, in order to bond the film formed up to the protective film and the film for adjusting the disk thickness, a film with a pressure-sensitive adhesive which can be bonded by pressing was used. The present invention is not limited to this, and the adhesive may be cured by applying pressure while heating using a film coated with an adhesive that is bonded by heating. Alternatively, the surface of the film formed up to the protective film before bonding without using an adhesive film, on which the protective layer is not formed (that is, the surface of the support base on which no grooves or pits are formed), or a disk A method of applying a liquid adhesive to the bonding surface of the thickness adjusting plastic sheet may be used.

Further, the thickness of the disk is adjusted by a method of bonding the film formed up to the protective film and the film for adjusting the disk thickness, but the present invention is not limited to this.
A plastic film (or sheet), which is a starting material, may have a thickness corresponding to the disk thickness, and the bonding step may be omitted.

Further, in order to bond the film formed up to the protective film and the film for adjusting the disk thickness, a film with a pressure-sensitive adhesive which is bonded by pressing is used, but the present invention is not limited to this. A film in which an adhesive is applied in advance to a surface other than the groove forming surface of a plastic film as a supporting base may be used. Alternatively, a sheet to which an adhesive has been applied in advance may be used as the disk thickness adjusting sheet.

Although the thickness of the disk was adjusted by bonding the film formed up to the protective film to the film for adjusting the thickness of the disk, the present invention is not limited to this. And then
It may be bonded to a so-called mirror disk in which no grooves and pits have been formed in advance by a molding method or the like.

Next, in the punching step, a punching die was used to punch into a predetermined disk shape. However, the present invention is not limited to this, and another method such as a laser cutter may be used. . In addition, it is desirable to use a high-precision image processing and positioning device together in order to punch into a predetermined disk shape.

The punching may be performed for each film (or sheet). Alternatively, the films may be laminated and punched at once. In addition, the above-described series of steps may be performed in a state where the transport of the film (or sheet) is temporarily stopped in each step, or may be performed while the transport is being performed.

[0084]

According to the production method of the present invention, the first step of forming grooves or pits and the formation of a reflection film material and / or a recording film material are formed on a film or sheet support substrate. A second step, and thereafter, a third step of processing the support base into a predetermined disk shape is performed. Therefore, a series of processing steps can be performed by transporting a film or a sheet, and a large amount of optical disks can be quickly processed. And it can be easily produced.

The manufacturing apparatus of the present invention can implement the manufacturing method of the present invention with good reproducibility.

[Brief description of the drawings]

FIG. 1 is a process flow of manufacturing an optical disc according to the present invention.

FIG. 2 is a schematic diagram showing a groove forming step in producing the optical disc.

FIG. 3 is a schematic diagram showing a thin film forming step when manufacturing an optical disc.

FIG. 4 is a schematic diagram showing a protective film forming step when manufacturing an optical disc.

FIG. 5 is a schematic diagram showing a bonding step and a punching step in producing the optical disk.

FIG. 6 is a schematic sectional view showing a partially laminated structure of the magneto-optical disk.

FIG. 7 is a schematic sectional view showing a laminated structure of the manufactured magneto-optical disk.

FIG. 8 is a schematic diagram showing a recording layer forming step when another optical disk is manufactured.

FIG. 9 is a schematic diagram showing a reflection film forming step when another optical disk is manufactured.

FIG. 10 is a schematic sectional view showing a partially laminated structure of the CD-R.

FIG. 11 is a schematic sectional view showing a laminated structure of the manufactured CD-R.

FIG. 12 is a schematic view showing a single-wafer manufacturing process of a conventional magneto-optical disk (mini disk).

FIG. 13 is a schematic cross-sectional view showing a laminated structure of the magneto-optical disk manufactured by the manufacturing process.

FIG. 14 is a schematic diagram showing a conventional single-wafer CD-R manufacturing process.

FIG. 15 shows a CD- manufactured by the same manufacturing process.
It is a schematic sectional drawing which shows the laminated structure of R.

[Explanation of symbols]

1, 15: laminated structure of recordable mini-disc, 2: support base, 3: ultraviolet curable resin layer, 4: first dielectric film,
5, 12: recording film, 6: second dielectric film, 7, 13: reflection film, 8, 14: protective layer, 9: support, 10, 19: groove or pit forming surface, 11, 17: CD -R laminated structure, 20, 70, 86, 105 ... sputtering film forming apparatus, 21 ... polycarbonate film roll, 22 ...
Polycarbonate film, 23, 42 UV curable resin, 24, 43, 62 Knife coater, 25 Stamper, 26 Crimping roller, 27, 44 UV irradiation lamp, 28 Film peeling roller, 29 Groove forming surface, 30, 60: a polycarbonate film roll on which grooves are formed; 30a: a polycarbonate film on which grooves are formed; 31, 82: a first film forming chamber;
32, 83: second film forming chamber, 33, 84: third film forming chamber, 3
4, 85: fourth film forming chamber, 35, 36, 37, 38, 6
9, 87, 88, 89, 90, 106: sputtering cathode; 39, 67: main roll; 40: formed polycarbonate film roll; 40a: formed polycarbonate film; 41: partition plate;
Protective film forming surface, 46: polycarbonate film roll on which protective film is formed, 50: adhesive film roll, 5
DESCRIPTION OF SYMBOLS 1 ... Adhesive film, 52 ... Transparent plastic sheet for disk thickness adjustment (support), 53 ... Crimping roller, 54
... Polycarbonate film on which protective film is formed, 55
... punching die, 56 ... punched disc, 61
... an organic dye, 64 ... a polycarbonate film roll on which a recording layer is formed, 64a ... a polycarbonate film on which a recording layer is formed, 65 ... a dryer, 66 ... a recording layer forming surface, 68 ... a film forming chamber, 71 ... a reflective film Formed polycarbonate film roll, 80, 101 ... molding machine, 8
1, 102: disk substrate, 91: disk after film formation,
92, 103, 107: dispensers, 93, 10
4, 108: turntable, 94: mini disk, 1
09 ... CD-R

Claims (16)

[Claims] 1. A first step of forming grooves or pits on a film- or sheet-shaped support base, and a second step of forming a reflective film material and / or a recording film material, and thereafter A method for manufacturing an optical disk, comprising performing a third step of processing the support base into a predetermined disk shape. 2. The method for manufacturing an optical disk according to claim 1, further comprising, after the second step, a step of bonding a film-like or sheet-like support for adjusting the thickness of the support base to the support base. . 3. The method for manufacturing an optical disk according to claim 2, wherein after the step of bonding the support to the support base, the support is processed into a predetermined disk shape. 4. The method for manufacturing an optical disk according to claim 1, wherein said support base has a thickness for a hard disk. 5. The method according to claim 1, wherein in the first step, an ultraviolet curable resin or a thermosetting resin is formed on the support base, and a predetermined groove pattern or pit pattern is transferred to the ultraviolet curable resin or the thermosetting resin. 2. The method for manufacturing an optical disc according to item 1. 6. The method of manufacturing an optical disk according to claim 1, wherein in the second step, a protective film is formed after forming the reflective film material and / or the recording film material. 7. The method of manufacturing an optical disk according to claim 1, wherein, in the third step, the support base is processed into a predetermined disk shape by punching with a die having a predetermined shape. 8. The method for manufacturing an optical disk according to claim 1, wherein the first step, the second step, and the third step are continuously performed. 9. A first process unit for forming grooves or pits on a film- or sheet-shaped support substrate, a second process unit for forming a reflective film material and / or a recording film material, and the support substrate An optical disc manufacturing apparatus, comprising: a third process unit configured to process the optical disc into a predetermined disc shape. 10. The optical disk according to claim 9, further comprising a step for attaching a film-like or sheet-like support for adjusting the thickness of the support base to the support base, after the second step. Manufacturing equipment. 11. The optical disk manufacturing apparatus according to claim 10, further comprising a processing section for processing into a predetermined disk shape, subsequent to a processing section for bonding the support to the support base. 12. The apparatus for manufacturing an optical disk according to claim 9, wherein said support base is of a thickness for a hard disk. 13. In the first step, an ultraviolet curable resin or a thermosetting resin is formed on the support base, and a predetermined groove pattern or a pit pattern is transferred to the ultraviolet curable resin or the thermosetting resin. An optical disk manufacturing apparatus according to claim 9. 14. The optical disk manufacturing apparatus according to claim 9, wherein a protective film is formed after forming the reflective film material and / or the recording film material in the second process unit. 15. The optical disk manufacturing apparatus according to claim 9, wherein in the third step, the support base is processed into a predetermined disk shape by punching with a die having a predetermined shape. 16. The optical disk manufacturing apparatus according to claim 9, wherein the first process unit, the second process unit, and the third process unit are configured to be continuously performed.