JPH11166818A - Calibration method and calibration device for three-dimensional shape measuring device - Google Patents

Abstract

(57) [Summary] [Problem] To improve the accuracy of calibration. SOLUTION: An irradiation mechanism 110 for irradiating pattern light to a measurement target, and a camera 12 for imaging the measurement target.
0, and a calibration method of the three-dimensional shape measuring apparatus 100 including three calculation means 130 for calculating three-dimensional image data from the captured image.
2 is moved a plurality of times with a known movement amount, and each time the movement is performed, one plane 21 of the gauge 2 is irradiated with irradiation light to take an image, and the image is taken on a three-dimensional coordinate system indicated by each index 21. Camera parameters are obtained from the position coordinates and the position coordinates on the two-dimensional coordinate system of the captured image corresponding to the position coordinates, and the position coordinates on the three-dimensional coordinate system and the one-dimensional coordinate system for illuminating the position of these position coordinates The projector parameters are determined from the upper position coordinates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a calibration method and a calibration apparatus for a three-dimensional shape measuring device, and more particularly to a field or a robot vision generally called a robot vision for inspecting a three-dimensional shape of a product, measuring dimensions, positioning for assembly, and the like. The present invention relates to a calibration method and a calibration device for a three-dimensional shape measurement device used for a device for taking in the shape of a clay model of a wheeled vehicle, a motorcycle, or the like into a CAD.

[0002]

2. Description of the Related Art A general three-dimensional shape measuring method will be described with reference to FIG. In the time-series space coding method shown in FIG. 4, the space including the object to be measured is imaged by a camera, and stripe patterns of several irradiation lights having different phases and pitches are projected to code the space. The projection angle of the measurement space is obtained, and the three-dimensional position is measured based on the relationship with the position coordinates of the image captured by the camera.

For example, when coding a space into 256 spaces, a stripe pattern that divides the space into 2 ⁿ (n = 0, 1, 2, 3,...) Lines is sequentially illuminated and imaged (FIG. 4). (C)). For 256 = 2 ^8, 8th imaging is performed. At this time, the captured image is partitioned into 256 position coordinates, and at each coordinate position, 1
Record 0 in the dark area. Thus, a space code consisting of an eight-digit binary number is completed at each coordinate position. The light projection angle of the stripe pattern is known from the space code, the distance between the camera and the space corresponding to each position coordinate is calculated from the relationship between the position coordinates and the light projection angle, and three-dimensional measurement is performed (for example, “ Three-dimensional image measurement, Seiji Iguchi, Kosuke Sato, 1992, Shokodo ”).

Each of the three-dimensional measurement methods includes a projector that irradiates the object to be measured with light of a stripe pattern and a camera that performs image capturing. A camera coordinate system, a projector coordinate system, and a measurement object to be determined are provided. Three of the object's object coordinate systems exist in relation to each other. In the measurement, a camera coordinate system and a projector coordinate system are specified, and an object coordinate system is calculated based on these.

In general, a CCD camera is often used as a camera, and an image screen is detected by a planar CCD image sensor. Therefore, the camera coordinate system is expressed as X _c −Y _c
Is obtained by the two-dimensional coordinate system of When the relationship between the object coordinate system and the camera coordinate system is represented by a homogeneous coordinate system expression, it is represented by the following equation (1). Here, the matrix C for converting the object coordinate system into the camera coordinate system is called a camera parameter.

[0006]

(Equation 1)

On the other hand, projector, for determining the displacement of the one-dimensional direction, the resulting coordinate system is only one-dimensional X _p. When the relationship between the projector coordinate system and the object coordinate system is represented by a homogeneous coordinate system expression, it is represented by the following equation (2).
Here, a matrix P for transforming the object coordinate system into the projector coordinate system is called a projector parameter.

[0008]

(Equation 2)

By developing these parameters and organizing them simultaneously, the relationships of the following equations (3), (4) and (5) are obtained.

[0010]

(Equation 3)

Accordingly, if there is an inverse matrix to the matrix Q, the camera coordinate system (X _c, Y _c) and a projector coordinate system X _p object coordinate system from V = (X, Y, Z ) is determined. When the three-dimensional shape is measured by each of the above-described methods, it is necessary to obtain the camera parameters and the projector parameters in advance in order to obtain the matrix Q.

Each parameter can be calculated by measuring the distance and attitude between the camera and the projector, the focal length of the lens of the camera, etc., but it requires time and effort, and the accuracy is poor. There is a problem. Therefore, a method of measuring a reference cube B whose three-dimensional shape is a known reference as shown in FIG. 5A and specifying each parameter is usually employed. A scale-like index portion is uniformly attached to each side which is a boundary between the respective surfaces of the reference cube B.

In this method, first, a bright / dark image of the reference cube B is captured by a CCD camera and a coded image is captured by a spatial coding method by a slit projector. Then, the index portion is extracted by binarizing the light and dark image, and the indices obtained in a grid by virtually connecting the indices facing each other in the plane of each cube are defined as reference points (X _i , Y _i , Z _i ). (Fig. 3
(B)).

When calculating the camera parameters, the position coordinates of the reference point (known) on the object coordinate system and the pixel positions on the image sensor of the CCD camera on the captured image (position coordinates on the camera coordinate system) X _ci , Y _ci )) are stored in pairs.

The position coordinates (X) of the reference point on the object coordinate system
_i , Y _i , Z _i ) and position coordinates (X _ci , Y
_ci ), the following equations (6) and (7) obtained from the above equations (3) and (4) hold.

[0016]

(Equation 4)

In order to obtain a total of 12 unknowns of C ₁₁ ... C ₂₁ ... C _{34 in} the equations (6) and (7), at least six or more reference points that are not on the same plane are defined on the camera coordinate system. Need to detect points. From the above equations (6) and (7), when n reference points are imaged, the relationship between each of the reference points and the corresponding detection point on the camera coordinate system is C ₃₄ = 1, and the following equation (8) ).

[0018]

(Equation 5)

When each matrix of the equation (8) is represented as the above equation (9), the matrix C = [C ₁₁ ... C ₂₁ ... C ₃₃ ] ^T is obtained by the above equation (10) by the least square method. Can be

Further, when calculating the projector parameter stores a reference point on the object coordinate system _{(X i, Y i, Z} i) a projector coordinate X _pi corresponding thereto with a pair. The projector coordinates _Xpi are obtained from the code values of the spatially coded image. These points (X _i ,
Y _i , Z _i ) and the projector coordinates X _pi satisfy the following equation (11) obtained from the above equations (3) and (4).

[0021]

(Equation 6)

P in the above equation (11)₁₁~ P_{twenty four}A total of eight un
In order to find the known number, at least a few not on the same plane
And eight or more reference points and the corresponding projector
Mark X _piNeed to be detected. From the above equation (11), n
Reference point and the corresponding projector coordinate X_piRelationship with
The person in charge is P_{twenty four}= 1, as shown in the following equation (12).
You.

[0023]

(Equation 7)

When each matrix of the equation (12) is represented as the above equation (13), the matrix P = [P ₁₁ ... P ₂₃ ] ^T is obtained by the above equation (14) by the least square method.

The three-dimensional shape of the object to be measured is measured based on the camera parameters and the projector parameters thus obtained.

[0026]

However, the conventional calibration method for measuring a three-dimensional shape has the following disadvantages.

1. Requires a reference cube that has been subjected to high-precision three-dimensional processing, and its creation is not easy. 2. Since only three sides of the cube are in the field of view of the measuring instrument, it is not possible to use the points inside the cube as a reference, so a spatially biased reference point is used, which limits the accuracy of calibration. 3. When a light and dark image is input to a cube having a depth, a bias of illumination is generated for each surface. Therefore, it is extremely difficult to accurately extract all indices of the surface by image processing. 4. After extracting an index provided on a three-dimensional surface, it is difficult to perform image processing for identifying a position of the cube corresponding to the index. Although a linear shape is given to the index to reduce this, complicated processing such as thinning processing is required.

[0028]

SUMMARY OF THE INVENTION An object of the present invention is to provide a calibration method and a calibration apparatus for a three-dimensional shape measuring apparatus which can solve the inconveniences of the prior art and eliminate and calibrate the spatial deviation of the reference point and the illumination deviation at the time of imaging. The purpose is to provide.

[0029]

According to the first aspect of the present invention, there is provided an irradiation mechanism for irradiating an object to be measured with irradiation light having position coordinates in a fixed one-dimensional direction, and a measurement apparatus to which the irradiation light is applied. A method for calibrating a three-dimensional shape measuring apparatus, comprising: a camera that images an object; and a calculating unit that calculates three-dimensional image data of the measurement object from an image captured by the camera. Camera parameters indicating the relationship between the position coordinates of the camera coordinate system and the position coordinates of the actual object coordinate system of the object to be created, the position coordinates given by the irradiation light, and the actual object coordinate system of the object to be measured In a method of calibrating a three-dimensional shape measuring apparatus that specifies projector parameters indicating the relationship with the position coordinates by actual measurement, a game in which a plurality of indices are attached in a known arrangement on a smooth plane. Is positioned directly opposite the camera, the gauge is moved by a known amount of movement in a direction perpendicular to one plane, and each time the gauge is moved, one plane of the gauge is imaged by the camera, and the three-dimensional coordinates indicated by each index The camera parameters are obtained from the position coordinates on the system and the position coordinates on the two-dimensional coordinate system of the captured image corresponding to these position coordinates. Is used to obtain projector parameters from the position coordinates on the three-dimensional coordinate system indicated by and the position coordinates on the one-dimensional coordinate system for irradiating the positions of these position coordinates.

In the above configuration, before the measurement by the three-dimensional shape measuring device, the gauge is arranged within the imaging range of the camera. At this time, the gauge is arranged with its one plane facing the camera side, changes the position of the gauge multiple times with a known movement amount,
An image is taken by a camera for each position.

The plurality of reference points indicated by the respective indices of the gauge are arranged on a two-dimensional plane. When the gauge moves in the vertical direction of the plane, each of the reference points becomes three-dimensional. It will be deployed in space.
The plurality of reference points are distributed on the plane at known distance intervals and the movement amount is also known, so that the position coordinates on the three-dimensional coordinate system are known for all points before and after the movement. . This three-dimensional coordinate system is referred to as an object coordinate system.

All the reference points before and after the movement are imaged by the camera, and the position coordinates of a two-dimensional coordinate system (referred to as a camera coordinate system) on the imaging screen are attached to each of the reference points. Thus, based on the above-described equation (8), and when the number of captured reference points is large, the camera parameters are obtained by the least square method.

Each time the position of the gauge is changed a plurality of times by a known amount of movement, irradiation light is irradiated by the irradiation mechanism.
The irradiation light applied at this time is, for example, a one-dimensional position such as a striped pattern light irradiated a plurality of times to obtain a space code for each position or a slit light scanned in a certain direction. Any information can be obtained.

Each reference point in the object coordinate system is provided with position coordinates in a one-dimensional coordinate system (referred to as a projector coordinate system) for each reference point obtained by irradiation light. Thus, the projector parameters are obtained by the least squares method based on the above-described equation (12), and when the number of imaged points is large.

According to a second aspect of the present invention, there is provided an irradiation mechanism for irradiating irradiation light with position coordinates in a fixed one-dimensional direction to a measurement object, and a camera for imaging the measurement object irradiated with the irradiation light. And a calculating means for calculating three-dimensional image data of the object to be measured from an image picked up by the camera in a calibration device for a three-dimensional shape measuring device. And a holding means for movably holding the gauge in a direction perpendicular to one plane thereof, and an adjusting means provided on the holding means for adjusting the amount of movement of the gauge. I am taking it.

In the above-described structure, the gauge is moved by the adjusting means via the holding means, and the operation of the three-dimensional shape measuring apparatus is performed in the same manner as in the first aspect of the present invention.

[0037]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. In this embodiment, in order to calibrate the three-dimensional shape measuring device 100, the three-dimensional shape measuring device 100, a calibration device 10 for developing a reference point serving as a sample in the object coordinate shape, and operation control thereof are performed. 1 shows an automatic calibration system including a host computer 200 (FIG. 1).

The three-dimensional shape measuring apparatus 100 includes a projector 110 as an irradiation mechanism for irradiating irradiation light with position coordinates in a certain one-dimensional direction to a measurement object.
And a CCD camera 120 as a camera for capturing an image of the measurement object irradiated with the irradiation light, and an image processing board 130 as a calculation unit for calculating three-dimensional image data of the measurement object from an image captured by the camera 120. It has three-dimensional shape measurement by the time-series space coding method.

The projector 110 can irradiate stripe-shaped pattern light at different pitches.
Operation control such as designation of irradiation timing and pattern light pitch is performed by the host computer 200. Also,
The projector coordinate system, which is a one-dimensional coordinate system, is formed in the direction in which the stripes are arranged (the direction perpendicular to the pattern light).

The CCD camera 120 picks up an image using a CCD image sensor (not shown) provided therein. This CC
The D imaging sensor is composed of countless pixels arranged in a plane, and each pixel outputs a luminance signal according to the luminance of the received light. A camera coordinate system, which is a two-dimensional coordinate system, is formed corresponding to the plane of the CCD image sensor, and the position of each pixel corresponds to the position coordinates of the coordinate system.

The image processing board 130 includes the projector 1
10 and the CCD camera 120 are synchronized.
The three-dimensional shape data is calculated based on the output of the camera 120.

Next, the calibration device 10 of the three-dimensional shape measuring device
Will be described. The calibration device 10 holds a calibration two-dimensional gauge 2 having a plurality of indices 22 in a known arrangement on a smooth plane 21 and holds the gauge 2 movably in a direction perpendicular to the plane 21. A uniaxial numerical control table 3 as holding means and a uniaxial numerical control controller 4 provided in the uniaxial numerical control table 3 and adjusting the moving amount of the calibration two-dimensional gauge 2 are provided.

As shown in FIG. 1, the calibration two-dimensional gauge 2 has a plane 21 having a square shape.
It is held in the uniaxial numerical control table 3 so as to face the D camera 120 and the projector 110 (the optical axis of the objective lens of the CCD camera 120 is parallel to the normal of the plane 21). That is, thereby, the pattern light is radiated from the projector 110 to the one plane 21, the CCD camera 120 can capture a bright and dark image on the one plane 21, and the host computer 200 converts the three-dimensional coordinate data described later into an image. It can be obtained via the processing board 130.

The object coordinate system, which is a three-dimensional coordinate system, is set with reference to the calibration two-dimensional gauge 2. That is, in the calibration two-dimensional gauge 2 at the position shown in FIG. 1 (this position is the current position), as shown in FIG.
The axis is set in the horizontal right direction with the origin at the upper left corner of the plane 21, and the Y axis of the coordinate system is set vertically downward with the same angle in the plane 21 as the origin. As shown in FIG. 2B, the Z axis of the coordinate system is set to the opposite side of the CCD camera 120 along the normal direction of the plane 21 with the same angle of the plane 21 as the origin. ing.

Further, one plane 2 of the calibration two-dimensional gauge 2
The upper part 1 is colored white, and an index 22 which is a black point for determining the reference point 23 is attached thereon. The index 22 is shown in FIG.
As shown in (A), five are arranged at equal pitch p on four sides of a square with each side parallel to the X-axis and Y-axis. The indices on the sides facing each other correspond to the indices on the other side, respectively. As shown by the dotted line in FIG. Are connected by a straight line parallel to. The intersection of each straight line connecting the corresponding indices is the reference point 23. As for these reference points 23, 5 × 5 = 25 points are developed in a grid shape on one plane 21. Each index 21 is
In the object coordinate system described above, all are located on known position coordinates, and accordingly, the position coordinates of each reference point 23 are also known.

The one-axis numerical control table 3 includes a holding member 31 of the calibration two-dimensional gauge 2, a ball screw 32 engaged with the two-dimensional gauge 2 to feed the holding member 31 in the Z-axis direction, and a ball screw 32 which is numerically controlled by the one-axis numerical controller 4. And a stepping motor 33 driven under control.

The single-axis numerical controller 4 receives a numerical input of the feed amount in the Z direction from the host computer 200, and drives the stepping motor 33 with a corresponding drive amount.
And the calibration two-dimensional gauge 2 can be positioned at an arbitrary position in the Z direction. Usually, at the time of calibration, the one-axis numerical control table 3 stores the two-dimensional gauge 2 for calibration.
Is set parallel to the optical axis of the objective lens of the CCD camera 120, and the calibration two-dimensional gauge 2 is fed four times from the current position in the Z direction with a feed amount equal to the pitch p of the reference point 23. .

The host computer 200 controls the operation of the three-dimensional shape measuring device 100 and the calibrating device 10 and calculates the measurement information. All the operations of the automatic calibration system of the three-dimensional shape measuring apparatus shown in FIG. 3 are performed by a program previously input to the host computer 200.

FIG. 3 is a flowchart showing the operation of the present embodiment. Hereinafter, the three-dimensional shape measuring apparatus 10 which is performed based on this before the three-dimensional shape measurement of the present embodiment will be described.
The calibration operation of 0 will be described.

The variable step stored in the host computer 200 is initialized to 0 (step S1).

Then, the laser beam output from the projector 110 of the three-dimensional shape measuring apparatus 100 is continuously projected, and the image of each index provided on one plane of the calibration two-dimensional gauge 2 is read by the CCD camera 120. Obtain a captured light / dark image. Thus, the host computer 200 sets the secondary source coordinate system serving the camera coordinate system X _c -Y _c in the storage area (step S2).

Next, a gray code pattern (pattern light on a stripe) is sequentially emitted from the projector 110, and a spatially coded image is captured by the CCD camera 120. The host computer 200 obtains the spatial code from the captured image, thereby setting the projector coordinate system X _p serving one-dimensional coordinate system in a storage area (step S
3).

The captured light-dark image is binarized, and the center-of-gravity pixel (center) of each circular index 22 is obtained (step S4).

In the host computer 200, a virtual intersection of a straight line connecting the respective indices 22 facing each other is obtained by calculation as a real coordinate reference point 23 for calibration (step S).
5).

Then, in the storage area of the host computer, the position coordinates (X
_c− Y _c ) and the position coordinates X _p of the projector coordinate shape are stored as data in association with each other (step S6).

In the host computer 200, the steps are incremented (step S7), and the calibration two-dimensional gauge 2 is moved in the Z direction by a distance of the pitch p (step S7).
8).

It is confirmed whether or not the imaging of the two-dimensional calibration gauge 2 has been performed five times, that is, whether or not the movement in the Z-axis direction has been performed four times (step S9).
The operation from step 2 to step S8 is repeated. If it has reached, the above-described equations (8) to (8) are used based on the stored data.
Using (14), camera parameters and projector parameters are obtained and system parameters are calculated (step S10). Then, the calibration is completed.

As described above, in the present embodiment, since the calibration two-dimensional gauge 2 in which the index 22 is attached to only one smooth plane 21 is used, the high-precision three-dimensional processing as conventionally used is used. It is possible to eliminate the need for the reference cube to which the marking is applied, and to reduce the labor required for the creation of the reference cube.

In the conventional reference cube, only three faces facing the camera can be imaged. In this embodiment, the calibration two-dimensional gauge 2 having the reference point 23 is moved in the normal direction. Since it is possible to image substantially not only all points on the three-dimensional surface but also points inside the three-dimensional surface, it is possible to use a reference point that is not spatially biased, and to improve the accuracy of calibration. .

Further, in the conventional reference cube, the bias of illumination is generated for each surface to be imaged, but in this embodiment,
Since the one plane 21 of the calibration two-dimensional gauge 2 is always maintained in the same direction with respect to the camera 120, it is easy to accurately extract all the indices 22 on the one plane 21 by image processing.
Therefore, the reference point 23 can be recognized as a known position, and the accuracy of calibration can be further improved.

In the conventional reference cube, after imaging, an index provided on the three-dimensional surface is extracted, and then image processing for identifying which surface of the cube corresponds to which position is performed. However, in the present embodiment, a complicated image is used because all indices are attached on one plane, and the amount of movement of the calibration two-dimensional gauge 2 is easily recognized. The processing is unnecessary, and the memory of the host computer 200 required for the processing can be reduced and the processing time can be shortened.

In this embodiment, the host computer 200 is provided in addition to the calibrating device 10 of the three-dimensional shape measuring device to control the operation of each part, record data, and process data. The calibration device 10 of the measurement device may be provided with an operation control unit that performs each function of the host computer 200.

In this embodiment, a three-dimensional shape measuring apparatus 1 for measuring a three-dimensional shape based on a spatial coding method is used.
Although an example in which the calibration work is performed on 00 is shown, the calibration device 10 of the three-dimensional shape measurement device is not limited to this. For example, a measurement device that performs three-dimensional shape measurement by scanning one slit light It is also effective for measuring devices based on and other methods.

One plane 21 of the calibration two-dimensional gauge 2
The number and arrangement of the indices given above are not particularly limited as long as they are known. Similarly, the feed amount and feed count in the Z-axis direction are not particularly limited as long as they are known. It is desirable that the number of indexes and the number of times of feeding be increased within a range allowed in relation to the operation processing time.

[0065]

According to the present invention, since a gauge having an index on only one smooth plane is used, a reference cube which has been subjected to high-precision three-dimensional processing, which has been conventionally used, is not required. Creation can reduce work effort.

In the conventional reference cube, only three faces facing the camera can be imaged. However, in the present invention, the calibration two-dimensional gauge in which the reference point exists is moved in the normal direction, thereby substantially. In addition, since it is possible to image not only all points on the three-dimensional surface but also points inside the three-dimensional surface, it is possible to use a reference point which is not spatially biased, and to improve the accuracy of calibration.

Further, in the conventional reference cube, the bias of illumination is generated for each surface to be imaged, but in the present embodiment,
Since one plane of the gauge is always kept in the same direction with respect to the camera, it is easy to accurately extract all indices on one plane by image processing, so that the reference point can be recognized as a known position. The accuracy of the calibration can be further improved.

In the conventional reference cube, after imaging, an index provided on the three-dimensional surface is extracted, and then image processing for identifying which surface of the cube corresponds to which position is performed. However, the present invention eliminates the need for complicated image processing because all indices are attached on one plane and the amount of movement of the gauge is easy to recognize. When the arithmetic processing is performed by a computer or the like, it is possible to reduce the memory used and speed up the processing time.

Since the present invention is constructed and functions as described above, according to the present invention, it is possible to provide an unprecedented superior method and apparatus for calibrating a three-dimensional shape measuring apparatus.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention.

FIG. 2 shows the calibration two-dimensional gauge disclosed in FIG. 1, FIG. 2 (A) shows a front view, and FIG. 2 (B) shows a side view.

FIG. 3 is a flowchart showing the operation of the embodiment of the present invention.

FIG. 4A shows a method of measuring a three-dimensional shape by a spatial coding method, and FIG. 4A is a block diagram of the measuring method;
FIG. 4B is a diagram of the configuration of FIG. 4A viewed from above, and FIG. 4C is a diagram for explaining the correspondence between the pattern light and the space code.

FIG. 5A is a perspective view showing a reference cube used for calibration of a conventional three-dimensional shape measuring apparatus, and FIG.
(B) is an explanatory view showing virtual reference points formed on the surface.

[Explanation of symbols]

 2 Two-dimensional gauge for calibration 3 One-axis numerical control table (holding means) 4 One-axis numerical controller (adjusting means) 10 Calibration device for three-dimensional shape measuring device 21 One-plane 22 index 100 Three-dimensional shape measuring device 110 Projector (irradiation mechanism) 120 CCD camera (camera) 130 Image processing board (calculation means)

Claims (2)

[Claims] 1. An irradiation mechanism for irradiating irradiation light for assigning position coordinates to a measurement object in a fixed one-dimensional direction, a camera for imaging the measurement object irradiated with the irradiation light, Calculating means for calculating three-dimensional image data of the object to be measured from an image picked up by a camera, wherein the calculating means generates three-dimensional image data, and the position coordinates of a camera coordinate system. And a camera parameter indicating the relationship between the measurement object and the actual position coordinate of the object coordinate system, and indicating the relationship between the position coordinate given by the irradiation light and the actual position coordinate of the measurement object in the object coordinate system. In a calibration method for a three-dimensional shape measuring device that specifies projector parameters by actual measurement, a gauge provided with a plurality of indices in a known arrangement on a smooth plane is directly opposed to the camera. The gauge is moved a plurality of times in a direction perpendicular to the one plane with a known movement amount, and each time this movement is performed, one plane of the gauge is irradiated with irradiation light by the irradiation mechanism and the one plane is An image is taken by a camera, and the camera parameters are obtained from the position coordinates on the three-dimensional coordinate system indicated by the indices and the position coordinates on the two-dimensional coordinate system of the captured image corresponding to these position coordinates, and A calibration method for a three-dimensional shape measuring apparatus, characterized in that the projector parameters are obtained from position coordinates on a three-dimensional coordinate system represented by (1) and position coordinates on a one-dimensional coordinate system for irradiating the positions of these position coordinates. 2. An irradiation mechanism for irradiating irradiation light for assigning position coordinates to a measurement object in a fixed one-dimensional direction, a camera for imaging the measurement object irradiated with the irradiation light, A calibration device for a three-dimensional shape measurement device, comprising: a calculation unit configured to calculate three-dimensional image data of a measurement target from an image captured by a camera. , A holding means for movably holding the gauge in a direction perpendicular to a plane thereof, and an adjusting means provided on the holding means for adjusting a moving amount of the gauge. Calibration device for three-dimensional shape measurement equipment.