JPH11149977A - Method and apparatus for heating plate-like article - Google Patents

Abstract

(57) Abstract: Provided is a glass substrate heating apparatus for smoothly injecting a liquid crystal having viscosity into a glass substrate. SOLUTION: A plurality of aluminum flat plates 2 on which a plate-like article 1 to be heated is placed in close contact with a heater 4 embedded therein and having an inclined groove 5 formed on the inner surface side are arranged opposite to each other.
The flat aluminum articles 3 are fitted into the inclined grooves 5 of the two aluminum flat plates 3, and the heated plate-like article 1 is placed on the fitted aluminum flat plates 2 in close contact with each other. (3) A heating device capable of indirectly heating the heated plate-like article (1) by a heater (4) in (3).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating apparatus capable of uniformly loading a plurality of plate-like objects such as glass plates and ceramic plates in a vacuum or in an inert gas atmosphere and heating them uniformly. It is.

[0002]

2. Description of the Related Art Conventionally, in the heating of plate-like articles such as glass, generally, heating by a heater is widely performed. For example, a structure as shown in FIG. 8 in which several aluminum plates 41 in which several heaters 42 are embedded are fixed from both sides by a support plate 43 such as a stainless plate so as to be inclined with a slight gap. A method in which a plate-like object to be heated (not shown) is placed on each upper surface 44 of an aluminum plate 41 in which several heaters 42 are embedded by using a heating device, and the heater is heated, or a plurality of plate-like objects 45 to be heated. Itself, FIG.
As shown in FIG. 9A, a method is employed in which the support plate 43 is fixed from both sides in an inclined manner so as to have a slight gap, and the front and rear surfaces thereof are heated by a lamp heater 46 as shown in FIG. 9B. As shown in FIG. 10, as the lamp heater 46 in this method, a plurality of bars 47 to which the lamp heater 46 is attached are fixed at appropriate intervals at both ends thereof to a support frame 48.

[0003]

Of the conventional plate-like article heating methods, the former requires an aluminum plate in which a heater corresponding to the size of the plate-like article to be heated is buried, so that the temperature raising mechanism is required. Since the aluminum plate itself becomes very large, and an aluminum plate in which heaters are buried in accordance with the number of the plate-like articles to be heated must be prepared, there is a problem that it is extremely troublesome and expensive. Was.

In the latter method, since a plurality of plate-like articles to be heated set on the support plate are inclined from the front and rear sides by a lamp heater 46, the plurality of set plate-like articles are heated. It is difficult to uniformly transmit heat to the plate-like article to be heated, and the variation in temperature is large. Even when this is used in a vacuum chamber or a room in an inert gas atmosphere, there is a problem in that the variation in temperature is large.

In view of the above problems, the present invention makes it possible to uniformly heat a plurality of set plate-like articles to be heated with a temperature variation as small as possible even in a vacuum or an inert gas atmosphere. It is an object of the present invention to provide a heating method and a heating apparatus for a plate-like object that can be performed.

[0006]

Means for Solving the Problems That is, according to the present invention,
According to the first aspect of the present invention, there is provided a rectangular aluminum flat plate in which several heaters are buried in the length direction and several grooves are formed at required intervals in the length direction or the length direction on one side. Plates to be heated are placed on an aluminum flat plate which is detachably inserted into a plurality of grooves corresponding to both sheets so that the grooves formed on the one side face each other with the concave grooves facing each other at a required interval. And heating the plate-like article to be heated indirectly by heaters in the two opposed aluminum flat plates.

According to a second aspect of the present invention, there is provided a rectangular heater in which several heaters are buried in the longitudinal direction and several grooves are formed at required intervals in the longitudinal direction or the longitudinal direction on one side. Two aluminum flat plates are arranged facing each other at a required interval so that the several grooves formed on the one side face each other, and the aluminum flat plates are removably fitted respectively in the several grooves corresponding to both. After the heated plate-like article is closely mounted on the plurality of fitted aluminum flat plates, the heated plate-like article closely mounted on the aluminum flat plate is indirectly heated by heating the heater in the two opposed aluminum flat plates. The present invention is characterized by a heating device for a plate-shaped article.

According to a third aspect of the present invention, in the heating device according to the second aspect, several longitudinal grooves formed in two opposed aluminum flat plates embedded with the heater are inclined grooves. The invention according to claim 4 is characterized in that:
3. The heating device according to claim 2, wherein the plate-like article to be heated is closely mounted on an aluminum flat plate fitted into a concave groove of two opposed aluminum flat plates with embedded heaters, and then the heater is buried in the fitting direction of the aluminum flat plate. It is characterized in that heat shield plates are arranged on both end surfaces of an aluminum flat plate.

In short, the present invention relates to a method of manufacturing a plate-like article to be heated placed on a plurality of aluminum flat plates fitted between concave grooves formed so as to correspond to two aluminum flat plates having a heater embedded therein. Since the heating is performed by the heaters embedded inside the two aluminum flat plates holding the aluminum flat plates, the plate-like articles to be heated are placed on the aluminum plates embedded with the heaters and heated. Compared to conventional heating devices
The structure of the entire device is simple and inexpensive.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a heating device according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing one embodiment of a heating device according to the present invention.
Aluminum flat plate 2 on which plate 1 to be heated is placed in close contact
And aluminum flat plates 3, 3 for supporting the aluminum flat plate 2 from both sides. Several heaters, for example, sheath heaters 4, are embedded in the aluminum flat plates 3 and 3, respectively, and their terminal portions 4a are desired to the outside. A plurality of grooves 5 for fitting and supporting the aluminum flat plate 2 on which the plate-like article 1 to be heated is placed in close contact are formed on one side of the aluminum flat plates 3, that is, on the inner surfaces facing each other. They are formed at equal intervals with a required interval.

In FIG. 1, the concave groove 5 is formed so as to be vertically inclined at a required angle. Reference numeral 6 denotes a member provided below the aluminum flat plate 2 for engaging and fixing a lower end portion of the heated plate-like article 1 when the plate-like article 1 to be heated is closely mounted on the aluminum flat plate 2 fitted into the inclined concave groove 5. It is a stop.

The heating device A having such a structure is a plate-like article 1 to be heated which is closely mounted on an aluminum flat plate 2 and heated.
Depending on the type and use of this, it can be used in a tank in a vacuum or an inert gas atmosphere.

FIG. 2 is a perspective view of a heating apparatus B showing another embodiment of the present invention for heating the plate-like article 1 to be heated in a horizontal state, in which a heater (not shown) is embedded. In the aluminum flat plates 3a, 3a, there are formed concave grooves 5a in the longitudinal direction of the inner surfaces facing each other so that several grooves coincide with each other at a required interval. The aluminum flat plate 2a is horizontal (at right angles to the aluminum flat plates 3a and 3a)
It is inserted in. And this aluminum plate 2a
The plate-like article 1 to be heated is placed thereon.

As the aluminum flat plates 3 and 3a in which the heaters 4 are embedded in FIGS. 1 and 2, what is obtained by a conventionally known method may be used.
As shown in (a), a wooden frame 21 having a desired shape is formed as the aluminum flat plates 3 and 3a, and a heater,
For example, the sheathed heater 4 is set, and the terminal portion 4a faces the outside of the wooden frame 21 and is fixed, and the molten aluminum 22 is poured into the wooden frame 21 as shown in FIG. By removing the wooden frame 21 after the molten aluminum 22 has hardened, the heater-embedded aluminum plate shown in FIG. 3C is obtained.

Next, in order to heat the plate-like article 1 to be heated using the heating device A shown in FIG. 1, the aluminum flat plates 2-1 to 2-1 fitted into the concave grooves 5 of the aluminum flat plates 3, 3 are used.
2-7, a heated plate-like article 1 such as a glass plate, the lower end of which is locked by a locking member 6 provided below the front surface of the plate-like article 2-7.
Is placed. Thereafter, when a power supply plug is connected to the external terminals 4a of the heaters 4 in the aluminum flat plates 3 on both sides and the power is supplied, the aluminum flat plates 3 and 3 in which the heaters 4 are embedded are first heated, and the heat is released. The plate-like article 1 to be heated is transmitted by propagating to the aluminum flat plates 2-1 to 2-7 on which the article 1 is placed.

In the heating apparatus B shown in FIG. 2, the heated plate-like article 1 placed on the aluminum flat plates 2a (2a-1 to 2a-7) inserted between the aluminum flat plates 3a and 3a in a horizontal state is also provided. On the other hand, heating can be performed in the same manner as in the case of the heating device A in FIG.

FIG. 4 shows heater-embedded aluminum flat plates 3 and 3 on the upper and lower surfaces in the inserting direction of the inclined aluminum flat plate 2 on which the heated plate-like article 1 of the heating device A of FIG.
FIG. 5 shows a perspective view in which a heat shield plate 7 made of a stainless steel plate or the like is mounted on the flat plate. FIG. And a perspective view in which a heat shield plate 7a is attached to a heater embedded aluminum flat plate 3a, 3a on the rear surface.

When heating a plurality of articles at a time in heating the plate-like article to be heated by these heating devices, the heat shield plates 7 and 7a minimize heat dissipation to the outside of the heating apparatus. This is effective in minimizing the variation in heating temperature between the central portion and the end portion of one article, as well as the variation in heating temperature between the two. The heat shield plate is not shown in FIGS. 4 and 5 except when it is directly attached to the heater-embedded aluminum flat plates 3, 3 or 3a, 3a, or when it cannot be directly attached to the heater-embedded aluminum flat plates. A slight gap may be provided at the four corners of the aluminum flat plates 3, 3 and 3a, 3a by interposing a block of ceramics or the like.

The heated plate-like article 1 suitable for heating by the heating device of the present invention includes a glass plate used for injecting liquid crystal, a ceramic plate or a silicon wafer used for semiconductors.

In particular, in the case of liquid crystal injection, a liquid crystal is injected from a liquid crystal injection port into two glass plates which are adhered to each other with a sealant while leaving a liquid crystal injection port by spraying a spacer. In the case of a liquid crystal material having a high viscosity, it is necessary to lower the viscosity by heating the liquid crystal material in order to make the injection smooth. However, even if a liquid crystal material having a reduced viscosity is used, if the vicinity of the injection port of a cold glass plate is touched, the liquid crystal material cools down, making it difficult to perform smooth liquid crystal injection. Therefore, if the heating device A of the present invention as shown in FIG. 1 is incorporated in a liquid crystal injection line in a vacuum chamber, the liquid crystal injection operation can be performed efficiently.

[0021]

Next, the heating of a plate-like article to be heated by the heating apparatus of the present invention will be described in detail with reference to examples.

Example 1 A glass plate was used as a plate-like article to be heated by using the heating apparatus shown in FIG. 1 in which an aluminum plate 2 on which a plate-like article to be heated was placed was provided in an inclined manner in a vacuum and in an N ₂ gas atmosphere. Heating was performed as follows. As shown in FIG. 1, thirteen aluminum flat plates having a thickness of 5 mm are used as the aluminum flat plates 2 to be fitted in an inclined manner at intervals of 5 mm. 6 and mounted. FIG. 6 shows one aluminum plate 2 and the glass plate 1 thereon.
In FIG. 6A, three measurement points A, B, and C are determined in advance, and these three measurement points are set to 13 as shown in FIG.
Of the two aluminum plates 2, the second (2-2), 7
The three (2-7) and twelfth (2-12) aluminum flat plates and the glass plate above them were used, and thermocouples (not shown) were set in these places. The heater 4 in the flat plates 3 was energized to raise the temperature to a set temperature of 120 ° C. in 30 minutes. Then, the temperature at the nine locations was read by a thermocouple, and the average temperature difference was determined from the difference between the highest temperature and the lowest temperature. The results are shown in Table 1.

In the presence or absence of the heat shield in Table 1, the existence of the heat shield of (* 1) in Experiment No. 3 means that the aluminum flat plate 2 of FIG. 1 is inserted and supported as shown in FIG. Heating was performed by directly attaching heat shields 7 to the upper and lower surfaces of the aluminum flat plates 3 and 3 on both sides, respectively. Aluminum flat plate 3 on both sides of the heat shield plate on the upper surface of the heat shield plate,
Heating was performed by placing blocks and the like at the four corners of 3 and mounting them apart from the upper surfaces of the aluminum flat plates 3 and 3 on both sides of about 12 mm.

[0024]

[Table 1]

From Table 1 above, when heating was performed by the heating device A in an N ₂ gas atmosphere, no significant difference was observed in the temperature difference regardless of the presence or absence of the heat shield plates on the upper and lower surfaces. However, when heating is performed by the heating device A in a vacuum, ± 8.1 when the heat shield plate is not used in the glass plate.
Although there was a temperature difference of as much as ° C., when providing heat shield plates on the upper and lower surfaces,
The temperature difference was as good as ± 2.8 ° C. When the heat shield plate on the upper surface was separated from the aluminum flat plate 3, it was recognized that the temperature difference became large.

Example 2 The heater shown in FIG. 2 in which an aluminum flat plate 2a on which a plate-like article to be heated is placed was provided in a horizontal state was used in a vacuum and in an N ₂ gas atmosphere, and aluminum flat plates 3a and 3
aluminum flat plate 2 which is inserted into the concave groove 5a in a horizontal state.
As a, five aluminum flat plates having a thickness of 4 mm were used at intervals of 10 mm, and a glass plate 1 having a thickness of 2 mm was placed on each of the five aluminum flat plates. And about one aluminum flat plate 2a and the glass plate 1 on it,
In FIG. 7 (a), three measurement points are previously determined, and two of the five aluminum flat plates 2a are determined as shown in FIG. 7 (b). Eyes (2a-
2) A third aluminum plate (2a-3), a fifth aluminum plate (2a-5) and a glass plate above them, and a thermocouple (not shown) is set in these places. The heaters 4 in the aluminum flat plates 3a, 3a are energized to
The temperature was raised to the set temperature of 20 ° C. in 30 minutes. Then, when the average temperature difference by the thermocouple was obtained in the same manner as in Example 1, good results were obtained.

[0027]

As described above, according to the present invention, several heaters are buried inside, and the aluminum flat plate fitted into the opposite grooves of the two aluminum plates having the grooves formed therein is heated. The plate-like article is placed on the plate, and the plate-like article to be heated is heated by the heater in the aluminum flat plate facing the plate-like article, so that the heating operation can be easily performed. Further, by providing heat shield plates on both end surfaces in the fitting direction of the aluminum flat plate on which the plate-like article to be heated is mounted, uniform heating can be achieved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a heating device according to the present invention.

FIG. 2 is a perspective view showing another example of the heating device of the present invention.

FIG. 3 is an explanatory view showing an example of a manufacturing process of an aluminum flat plate embedded with a heater used in the present invention.

FIG. 4 is a perspective view showing a mode in which a heat shield plate is provided in the heating device of FIG. 1;

FIG. 5 is a perspective view showing a mode in which a heat shield plate is provided in the heating device of FIG. 2;

FIG. 6 is an explanatory view showing temperature measurement positions of an aluminum plate and a plate-like article heated by the heating device of FIGS. 1 and 4;

FIG. 7 is an explanatory diagram showing temperature measurement positions of an aluminum plate and a plate-like article heated by the heating device of FIG. 2;

FIG. 8 is a perspective view showing an example of a conventional heating device.

FIG. 9 is a perspective view showing another example of a conventional heating device.

FIG. 10 is an explanatory view showing an embodiment of a lamp heater used in the apparatus of FIG.

[Explanation of symbols]

 A, B Heating device 1 Heated plate-like article 2, 2a Aluminum flat plate 3, 3a Aluminum flat plate 4 Heater 5 Inclined concave groove 5a Concave groove 6 Locking member 7, 7a Heat shield plate

Claims (4)

[Claims] 1. A rectangular aluminum flat plate in which several heaters are buried in the length direction and several grooves are formed at required intervals in the length direction or the length direction on one side, A heated plate-like article is placed on an aluminum flat plate which is detachably fitted into several grooves corresponding to each other so that the grooves formed on one side face each other at a required interval so as to face each other. And heating the plate-like article to be heated indirectly by the heaters in the two opposed aluminum flat plates. 2. A rectangular aluminum flat plate in which several heaters are buried in the length direction and several grooves are formed at required intervals in the length direction or the length direction on one side, Several grooves formed on one side are arranged facing each other at a required interval so as to face each other, and an aluminum flat plate is removably fitted into each of the several grooves matching each other. After the plate-like article to be heated is closely mounted on the flat plate, the heated plate-like article closely mounted on the aluminum flat plate is indirectly heated by heating the heater in the two opposed aluminum flat plates. A heating device for a plate-like article. 3. The plate-like article according to claim 2, wherein a plurality of vertical grooves formed in two opposed aluminum flat plates embedded with the heater are inclined grooves. Heating equipment. 4. The heating device according to claim 2, wherein the plate-like article to be heated is placed in close contact with an aluminum flat plate fitted into a concave groove of two opposed aluminum flat plates embedded with heaters. A heating device for a plate-shaped article, wherein heat shield plates are arranged on both end surfaces of an aluminum flat plate embedded with a heater in a fitting direction.