JPH11110779A - Optical head - Google Patents
Optical headInfo
- Publication number
- JPH11110779A JPH11110779A JP9271457A JP27145797A JPH11110779A JP H11110779 A JPH11110779 A JP H11110779A JP 9271457 A JP9271457 A JP 9271457A JP 27145797 A JP27145797 A JP 27145797A JP H11110779 A JPH11110779 A JP H11110779A
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- optical head
- optical
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】
【課題】 小型で波長変動に対して安定な光学ヘッドを
実現する。
【解決手段】 上下面の間を光がジグザグに伝搬する光
伝搬路を設けた透明な基板と、光源と、光検出器と、集
光手段と、位置信号検出光学手段とを備えた光学ヘッド
において、前記基板の光ディスクへの光出射部を斜めに
きり欠き、前記ジグザグの光を偏向させて基板上下面に
垂直に出射させる構成にした。
(57) [Summary] [PROBLEMS] To realize an optical head that is small and stable against wavelength fluctuation. An optical head including a transparent substrate provided with a light propagation path through which light propagates between upper and lower surfaces in a zigzag manner, a light source, a photodetector, a light condensing means, and a position signal detecting optical means. In the above, the light emitting portion of the substrate to the optical disk is notched obliquely, and the zigzag light is deflected and emitted vertically to the upper and lower surfaces of the substrate.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、光ディスクの信号
読出しや磁気ディスクの光学的トラッキング等に使用さ
れる光学ヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical head used for reading out a signal from an optical disk and optically tracking a magnetic disk.
【0002】[0002]
【従来の技術】図14は、例えば尾上守夫監修:「光デ
ィスク技術」ラジオ技術社刊に示された従来の光学ヘッ
ドの構成図である。光源である半導体レーザ4から出力
されたレーザ光はカップリングレンズ11によって平行
光となり、ビームスプリッター7によって反射されて向
きを変え、対物レンズ3により光ディスク10上に集光
される。光ディスク10によって反射された光は、対物
レンズ3によって平行光となり、ビームスプリッター7
を通過して、集光レンズ、円筒レンズなどで構成された
位置信号検出光学手段9に入射し、検出器5上に集光さ
れる。このような従来の一般的な光学ヘッドでは、多数
の部品を高い精度で位置決めして組み立てる必要があ
り、組み立てが難しく小型・軽量化が困難である。2. Description of the Related Art FIG. 14 is a block diagram of a conventional optical head disclosed in, for example, "Optical Disc Technology", published by Radio Technology Co., supervised by Morio Onoe. The laser light output from the semiconductor laser 4 as a light source becomes parallel light by the coupling lens 11, is reflected by the beam splitter 7, changes its direction, and is focused on the optical disk 10 by the objective lens 3. The light reflected by the optical disk 10 is converted into parallel light by the objective lens 3,
Passes through the optical system and enters the position signal detecting optical means 9 composed of a condensing lens, a cylindrical lens, and the like, and is condensed on the detector 5. In such a conventional general optical head, it is necessary to position and assemble a large number of components with high accuracy, and it is difficult to assemble and to reduce the size and weight.
【0003】また、従来の一般的な光学ヘッドの、この
ような課題を緩和する光学ヘッドとして、素子を平板上
に集積化した図15に示すような平板集積型光学ヘッド
が提案されている(特開平4ー219640号公報)。
光源である半導体レーザから出力されたレーザ光は、ジ
グザグ状に光が伝搬する光伝搬路である基板1に導か
れ、基板上の集光手段3によりディスク10上に集光さ
れる。ディスク10により反射された光は、第2の集光
手段12を通り、位置信号検出光学手段9に入射し、光
検出器5に導かれる。ここで提案された光学ヘッドで
は、光伝搬路基板内で斜めに光を伝搬させるため、光源
から光伝搬路基板に入射する光、光伝搬路基板からディ
スクへ出射される光も、伝搬路基板に対して垂直ではな
く、斜めに入射され、斜めに出射される構成が基本とな
っている。このような配置では、ディスクに斜めに光が
あたるので、ディスクからの反射光を往路と同じ集光手
段に導くことが困難になるため、往路と復路それぞれに
ついて別々の光路を設ける必要があったり、光源や光検
出器を光伝搬路基板に対して傾けて設置しなければなら
ず配置が複雑になったりするなどの問題が生じる。Further, as a conventional general optical head which alleviates such a problem, there has been proposed a flat plate integrated type optical head as shown in FIG. 15 in which elements are integrated on a flat plate. JP-A-4-219640).
Laser light output from a semiconductor laser as a light source is guided to a substrate 1 which is a light propagation path through which light propagates in a zigzag shape, and is condensed on a disk 10 by a condensing means 3 on the substrate. The light reflected by the disk 10 passes through the second condensing unit 12, enters the position signal detecting optical unit 9, and is guided to the photodetector 5. In the optical head proposed here, since light propagates obliquely in the light transmission path substrate, light incident on the light transmission path substrate from the light source and light emitted from the light transmission path substrate to the disk are also transmitted through the light transmission path substrate. The incident light is not perpendicular to, but obliquely incident on, and is obliquely emitted. In such an arrangement, since light is obliquely applied to the disk, it is difficult to guide the reflected light from the disk to the same condensing means as the outward path, so that it is necessary to provide separate optical paths for the outward path and the return path. In addition, the light source and the photodetector must be installed to be inclined with respect to the light propagation path substrate, which causes a problem that the arrangement becomes complicated.
【0004】そのような問題点を回避する例として(特
開平4ー219640号公報、図16に示すように、基
板上に形成された集光手段3やカップリングレンズ11
に光を偏向させる機能も持たせた軸外し型の回折レンズ
を用いて、光伝搬路基板に対して垂直に光を入出射させ
る光学ヘッドの提案もなされているが、軸外し型のフレ
ネルレンズは光を集光させる効果と偏向させる効果の両
方を持つため、回折格子の周期が狭くなるなど設計・製
作が困難になるほか、回折により光を偏向するため、光
源のわずかな波長変動に対して回折角が敏感に変化する
ため、光学ヘッドとして安定性を欠くものになる可能性
があった。As an example of avoiding such a problem (Japanese Patent Laid-Open Publication No. Hei 4-219640, as shown in FIG. 16, the condensing means 3 and the coupling lens 11 formed on a substrate are used).
There has been proposed an optical head that uses an off-axis type diffractive lens that also has a function of deflecting light, and that allows light to enter and exit the light propagation path substrate perpendicularly, but an off-axis type Fresnel lens has been proposed. Has both the effect of condensing light and the effect of deflecting light, making it difficult to design and manufacture, such as narrowing the period of the diffraction grating.Because it deflects light by diffraction, it can respond to slight wavelength variations of the light source. As a result, the diffraction angle changes sensitively, so that the optical head may lack stability.
【0005】[0005]
【発明が解決しようとする課題】従来の平板集積型光学
ヘッドは、以上のように構成されていたので、光を斜め
に入・出射させるため構成が複雑になり、小型化・低価
格化が困難であったり、光を回折格子を用いて偏向させ
ているために安定性を欠いたりするなどの課題があっ
た。Since the conventional flat-plate integrated optical head is configured as described above, the structure for obliquely entering and exiting light becomes complicated, resulting in a reduction in size and cost. There have been problems such as difficulty or lack of stability because light is deflected using a diffraction grating.
【0006】本発明は、上記のような問題点を解消する
ためになされたもので、小型・低価格で、安定な光学ヘ
ッドを得ることを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to obtain a small, low-cost, and stable optical head.
【0007】[0007]
【課題を解決するための手段】本発明の第1の構成に係
る光学ヘッドは、上下面の間を光がジグザグに伝搬する
光伝搬路を設けた透明な基板と、光源と、光検出器と、
集光手段と、位置信号検出光学手段とを備えた光学ヘッ
ドにおいて、前記基板のディスクへの光出射部を斜めに
きり欠き、前記ジグザグの光を偏向させて基板上下面に
垂直に出射させるものである。According to a first aspect of the present invention, there is provided an optical head comprising: a transparent substrate having a light propagation path through which light propagates between upper and lower surfaces in a zigzag manner; a light source; When,
An optical head comprising a light condensing means and a position signal detecting optical means, wherein a light emitting portion of the substrate to the disk is obliquely notched, and the zigzag light is deflected and emitted perpendicular to the upper and lower surfaces of the substrate. It is.
【0008】また、本発明の第2の構成に係る光学ヘッ
ドは、上下面の間を光がジグザグに伝搬する光伝搬路を
設けた透明な基板と、光源と、光検出器と、集光手段
と、位置信号検出光学手段とを備えた光学ヘッドにおい
て、前記基板のディスクへの光出射部に対向する面を斜
めに切り欠き、該切り欠き部分に反射層を形成し、前記
ジグザグの光伝搬路の光を偏向させて反射し、該反射光
を基板上下面に垂直に出射させるものである。An optical head according to a second configuration of the present invention is a transparent substrate having a light propagation path through which light propagates between upper and lower surfaces in a zigzag manner, a light source, a photodetector, and a light collector. Means and a position signal detecting optical means, wherein the surface of the substrate facing the light emitting portion to the disc is notched obliquely, a reflection layer is formed in the notched portion, and the light of the zigzag is formed. The light in the propagation path is deflected and reflected, and the reflected light is emitted perpendicularly to the upper and lower surfaces of the substrate.
【0009】また、本発明の第3の構成に係る光学ヘッ
ドは、基板の上面または下面に光ビームの集光スポット
径を特定値に規定する回折格子からなるアパーチャを設
けたものである。An optical head according to a third configuration of the present invention is provided with an aperture made of a diffraction grating for defining a focused spot diameter of a light beam at a specific value on an upper surface or a lower surface of a substrate.
【0010】また、本発明の第4の構成に係る光学ヘッ
ドは、回折格子からなるアパーチャを前記基板の集光手
段と同じ面に設けたものである。In an optical head according to a fourth aspect of the present invention, an aperture made of a diffraction grating is provided on the same surface of the substrate as the light collecting means.
【0011】また、本発明の第5の構成に係る光学ヘッ
ドは、前記回折格子からなるアパーチャを前記位置信号
検出光学手段または集光手段と複合して一体に形成した
ものである。In an optical head according to a fifth aspect of the present invention, the aperture formed by the diffraction grating is formed integrally with the position signal detecting optical means or the light condensing means.
【0012】[0012]
実施の形態1.図1は本発明の実施の形態1である光学
ヘッドを上から見た平面図、図2は本発明の実施の形態
1である光学ヘッドを示す側面図、図3は本発明の実施
の形態1である光学ヘッドを下から見た平面図である。Embodiment 1 FIG. 1 is a plan view of an optical head according to a first embodiment of the present invention as viewed from above, FIG. 2 is a side view illustrating the optical head according to the first embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. FIG. 2 is a plan view of the optical head 1 as viewed from below.
【0013】図1、2、3において、1は基板、3は集
光手段、4は光源、5は光検出器、6は反射層、7はビ
ームスプリッター、8は斜面、9は位置信号検出光学手
段、10はディスクである。1, 2 and 3, 1 is a substrate, 3 is a light collecting means, 4 is a light source, 5 is a photodetector, 6 is a reflection layer, 7 is a beam splitter, 8 is a slope, and 9 is a position signal detector. The optical means 10 is a disk.
【0014】図1、図2、図3は本発明の実施の形態1
の光学ヘッドの基本構成と、光の伝搬、集光の様子を示
す。基板1として、例えば厚さ1.2mm、幅2mm、
長さ3mmの光学プラスチックを用いる。この基板自体
が上面と下面の反射を利用した光伝搬路となっている。
光源4の、例えば波長0.79μmの半導体レーザーか
ら垂直方向(z軸方向)に出射された光は、斜めにカッ
トされた入射面である斜面8aにより基板内で斜め方向
(例えば12.5゜)に屈折される。このビームは基板
上面に形成された位置信号検出光学手段9に入射する。
ここでは位置信号検出手段として例えば3ビーム法を用
いるとすると、位置信号検出光学手段は例えばビームを
3本に分離するための回折格子で、例えばピッチ13.
1μm深さ0.05μmの矩形型の回折格子である。位
置信号検出光学手段により3本のビームを得ることがで
きる。この3本のビームは下面に作られているビームス
プリッター7に入射し、0次反射光が上面に作られてい
る集光手段3に入射する。この集光手段は、例えばリソ
グラフィー技術によって作成されたフレネルレンズであ
る。この集光手段による反射光は下面の反射層で再び反
射されたのち、上面にカットされた斜面8bより垂直方
向(z軸方向)に出射し、基板上面より例えば2.3m
m離れたディスク10で焦点を結ぶ。ディスク面で反射
された光は再び斜面から素子に入射し、往路と逆向きの
光路をたどる。ビームスプリッターにて回折された1次
回折光は往路とは異なる方向へ回折し、上面の反射面で
反射されたビームが基板の外へ出射した後、光検出器5
に入射する。FIGS. 1, 2 and 3 show a first embodiment of the present invention.
1 shows the basic configuration of the optical head and how light is propagated and collected. As the substrate 1, for example, a thickness of 1.2 mm, a width of 2 mm,
An optical plastic having a length of 3 mm is used. The substrate itself is a light propagation path utilizing reflection on the upper and lower surfaces.
The light emitted from the light source 4 in the vertical direction (z-axis direction) from, for example, a semiconductor laser having a wavelength of 0.79 μm is obliquely cut (for example, 12.5 °) in the substrate by the oblique surface 8a which is an obliquely cut incident surface. ). This beam is incident on the position signal detecting optical means 9 formed on the upper surface of the substrate.
Here, assuming that, for example, a three-beam method is used as the position signal detecting means, the position signal detecting optical means is, for example, a diffraction grating for separating a beam into three beams.
This is a rectangular diffraction grating having a depth of 1 μm and a depth of 0.05 μm. Three beams can be obtained by the position signal detecting optical means. These three beams enter the beam splitter 7 formed on the lower surface, and the zero-order reflected light enters the condensing means 3 formed on the upper surface. This light collecting means is, for example, a Fresnel lens created by lithography technology. The light reflected by the light condensing means is reflected again by the reflection layer on the lower surface, and then exits in the vertical direction (z-axis direction) from the inclined surface 8b cut on the upper surface, for example, 2.3 m from the upper surface of the substrate.
Focus on the disk 10 m away. The light reflected by the disk surface again enters the element from the slope, and follows an optical path opposite to the outward path. The first-order diffracted light diffracted by the beam splitter is diffracted in a direction different from the outward path, and after the beam reflected by the reflection surface on the upper surface is emitted out of the substrate, the photodetector 5
Incident on.
【0015】ジグザグ状に光が伝搬する平板集積型光学
系によって厚みの薄い光学ヘッドを得るためには、両面
に光学素子が形成された基板をディスクと平行に設置す
る必要がある。基板をディスクと平行に設置した場合、
基板内を斜めに伝搬していた光が、ディスクに対して垂
直に出射されないと、ディスクからの反射光が往路と同
じ光路を伝搬できなくなり、復路用の別の光学系を用意
する必要が生じる。基板から、ディスクに垂直に光を出
射するためには、斜めに伝搬していた光の向きを変える
偏向素子が必要である。このための偏向素子として回折
格子を用い、この回折格子を集光素子と一体化して軸外
しフレネルレンズとして実現する方法などが提案されて
いた。しかし、回折格子は、入射光の波長により大きく
偏向方向が変化する特性を持っており、きわめて波長の
安定した光源を用いないと、偏向方向にずれが生じてし
まう。それに対し、屈折によって光を偏向するプリズム
状斜面は、波長に対する偏向方向の変化が回折格子より
も小さく、光源の波長変動に対して、安定な出射角を維
持することができるため、位置信号検出等の安定性が増
す。回折格子による偏向角度はおおよそ光の波長に比例
して変わるが、プリズムの場合は屈折率の波長分散に依
存するだめであり、はるかに小さい。In order to obtain a thin optical head by a flat plate integrated optical system in which light propagates in a zigzag manner, it is necessary to install substrates having optical elements formed on both sides in parallel with the disk. If the board is set parallel to the disc,
If the light propagating obliquely in the substrate is not emitted perpendicularly to the disk, the reflected light from the disk will not be able to propagate on the same optical path as the outward path, and it will be necessary to prepare another optical system for the return path . In order to emit light from the substrate perpendicular to the disk, a deflecting element that changes the direction of the light propagating obliquely is required. For this purpose, a method has been proposed in which a diffraction grating is used as a deflection element, and this diffraction grating is integrated with a light-collecting element to realize an off-axis Fresnel lens. However, the diffraction grating has a characteristic that the direction of deflection largely changes depending on the wavelength of the incident light, and unless a light source with extremely stable wavelength is used, a shift occurs in the direction of deflection. On the other hand, the prism-shaped inclined surface that deflects light by refraction has a smaller change in the deflection direction with respect to wavelength than the diffraction grating, and can maintain a stable emission angle with respect to the wavelength change of the light source. Etc. stability is increased. The angle of deflection by the diffraction grating changes approximately in proportion to the wavelength of light, but in the case of a prism, it depends on the wavelength dispersion of the refractive index and is much smaller.
【0016】また、図4のように斜面による屈折ではな
く、斜面による反射によって光を偏向する構成とすれ
ば、屈折による偏向方法ではわずかに残っていた波長変
動による角度ずれを完全になくすことも可能である。Further, if the light is deflected not by refraction by the inclined surface but by reflection by the inclined surface as shown in FIG. 4, it is possible to completely eliminate the angle deviation due to wavelength fluctuation which remains slightly in the deflection method by refraction. It is possible.
【0017】また、この実施の形態の光学ヘッドは、上
記のようにディスクからの反射光が往路と同じ光路を伝
搬するので、小型の光学ヘッドが構成できる。In the optical head according to this embodiment, since the reflected light from the disk propagates in the same optical path as the outward path as described above, a small optical head can be constructed.
【0018】実施の形態2.図5は本発明の実施の形態
2である光学ヘッドを上から見た平面図、図6は本発明
の実施の形態2である光学ヘッドを示す側面図、図7は
本発明の実施の形態2である光学ヘッドを下から見た平
面図である。Embodiment 2 FIG. 5 is a plan view of the optical head according to the second embodiment of the present invention as viewed from above, FIG. 6 is a side view illustrating the optical head according to the second embodiment of the present invention, and FIG. 7 is an embodiment of the present invention. FIG. 3 is a plan view of the optical head 2 as viewed from below.
【0019】図5、図6、図7において、1は基板、2
は回折格子で形成されるアパーチャ、3は集光手段、4
は光源、5は光検出器、6は反射層、7はビームスプリ
ッター、8は斜面、9は位置信号検出光学手段、10は
ディスクである。5, 6 and 7, 1 is a substrate, 2
Is an aperture formed by a diffraction grating, 3 is a light condensing means, 4
Is a light source, 5 is a photodetector, 6 is a reflection layer, 7 is a beam splitter, 8 is a slope, 9 is a position signal detecting optical means, and 10 is a disk.
【0020】図5、図6、図7は本発明の実施の形態2
の光学ヘッドの基本構成と、光の伝搬、集光の様子を示
す。基板内を光がジグザグに伝搬し、ディスクに反射さ
れて光検出器に戻る機能は、実施の形態2と同様である
が、基板下面にレーザビームの周囲の部分において入射
した光の必要有効径以外の部分を光伝搬路の有効領域の
外側に回折させる回折格子をアパーチャとして設け、レ
ーザビームの中央部だけがその後の光路を伝搬する。デ
ィスク面でのレーザビーム集光スポット径(強度が中心
部の1/е2 になる直径2ω)は、レンズによる集光角
θと光の波長λにより2ω=0.82λ/sinθと表
せる。位置信号の検出のためには、ディスクのトラック
ピッチに見合った集光スポット径を用いる必要があるた
め、集光角を規定するアパーチャを光路内に設ける必要
がある。平板集積型光学系において、アパーチャを形成
するには、部分的に反射膜を除去したり、光吸収膜を用
いる方法が考えられる。しかし、基板表面の反射膜や光
吸収膜を高い精度でアパーチャとして形成するために
は、露光によるパターニングやその後の膜の除去などの
プロセスを追加しなければならず、素子の製作工程が増
える。本発明では、回折格子によって不用な光を光路外
へ回折させることによりアパーチャを形成した。これに
より、他のビームスプリッタやフレネルレンズなどと同
様なプロセスを用い位置精度・形状精度の高いアパーチ
ャを形成することが可能であり、素子の製作が容易にな
る。本実施の形態ではアパーチャを基板の下面に設けた
が、上面に設けても同様の効果が得られる。FIGS. 5, 6, and 7 show a second embodiment of the present invention.
1 shows the basic configuration of the optical head and how light is propagated and collected. The function that light propagates in the substrate in a zigzag manner, is reflected by the disk, and returns to the photodetector is the same as that of the second embodiment, but the required effective diameter of the light incident on the lower surface of the substrate at the portion around the laser beam. A diffraction grating for diffracting the other part outside the effective area of the light propagation path is provided as an aperture, and only the central part of the laser beam propagates in the subsequent light path. Laser beam focusing spot diameter of the disk surface (1 / е becomes 2 diameter 2 [omega intensity center portion), expressed as 2ω = 0.82λ / sinθ by the wavelength λ of the converging angle θ and the light by the lens. In order to detect the position signal, it is necessary to use a focused spot diameter corresponding to the track pitch of the disk, and therefore, it is necessary to provide an aperture for defining the focused angle in the optical path. In the flat plate integrated optical system, in order to form the aperture, a method of partially removing the reflective film or using a light absorbing film can be considered. However, in order to form a reflective film or a light absorbing film on the substrate surface as an aperture with high precision, it is necessary to add a process such as patterning by exposure and subsequent removal of the film, and the number of steps for manufacturing an element increases. In the present invention, the aperture is formed by diffracting unnecessary light out of the optical path by the diffraction grating. As a result, it is possible to form an aperture with high positional accuracy and shape accuracy by using a process similar to that of another beam splitter, Fresnel lens, or the like, thereby facilitating the manufacture of the element. Although the aperture is provided on the lower surface of the substrate in the present embodiment, the same effect can be obtained by providing the aperture on the upper surface.
【0021】実施の形態3.図8は本発明の実施の形態
3である光学ヘッドを上から見た平面図、図9は本発明
の実施の形態3である光学ヘッドを示す側面図、図10
は本発明の実施の形態3である光学ヘッドを下から見た
平面図である。Embodiment 3 FIG. 8 is a plan view of the optical head according to the third embodiment of the present invention as viewed from above, FIG. 9 is a side view illustrating the optical head according to the third embodiment of the present invention, and FIG.
FIG. 9 is a plan view of the optical head according to the third embodiment of the present invention as viewed from below.
【0022】図8、9、10において、1は基板、2は
回折格子で形成されるアパーチャ、3は集光手段、4は
光源、5は光検出器、6は反射層、7はビームスプリッ
ター、8は斜面、9は位置信号検出光学手段、10はデ
ィスクである。8, 9 and 10, 1 is a substrate, 2 is an aperture formed by a diffraction grating, 3 is a light condensing means, 4 is a light source, 5 is a photodetector, 6 is a reflection layer, and 7 is a beam splitter. , 8 are slopes, 9 is position signal detecting optical means, and 10 is a disk.
【0023】図8、図9、図10は本発明の実施の形態
3の光学ヘッドの基本構成と、光の伝搬、集光の様子を
示す。基板として、例えば厚さ1.2mm、幅2mm、
長さ3mmの光学プラスチックを用いる。この基板自体
が上面と下面の反射を利用した光伝搬路となっている。
光源である例えば波長0.79μmの半導体レーザーか
ら垂直方向(z軸方向)に出射された光は、斜めにカッ
トされた入射面である斜面により基板内で斜め方向(例
えば12.5゜)に屈折される。このビームは基板上面
に形成された位置信号検出光学手段9に入射する。ここ
では、位置信号検出光学手段として例えば3ビーム法を
用いるとすると、位置信号検出光学手段は例えばビーム
を3本に分離するための回折格子で、例えばピッチ1
3.1μm深さ0.05μmの矩形型の回折格子であ
る。その外側の領域はアパーチャ回折格子で、例えばピ
ッチ1.5μm、深さ0.13μmとすると、このアパ
ーチャ回折格子に入射した光の必要有効径以外の部分を
光伝搬路の有効領域の外側へ回折させることができる。
このアパーチャ一体形成の位置信号検出光学手段により
ビーム径の定まった3本のビームを得ることができる。
この3本のビームは下面に作られているビームスプリッ
ター7に入射し、0次反射光が上面に作られている集光
手段3に入射する。この集光手段3は、例えばリソグラ
フィー技術によって作成されたフレネルレンズである。
このように集光手段をリソグラフィー技術によって作成
する場合には、前記アパーチャ回折格子も同一マスク上
のリソグラフィー技術で作成できるため両者の位置あわ
せが極めて精度良く、例えばサブミクロンのオーダーで
行うことができる。この集光手段による反射光は下面の
反射層6bで再び反射されたのち、上面にカットされた
斜面8bより垂直z軸方向に出射し、基板上面より例え
ば2.3mm離れたディスクで焦点を結ぶ。ディスク面
で反射された光は再び斜面から素子に入射し、往路と逆
向きの光路をたどる。ビームスプリッターにて回折され
た1次回折光は往路とは異なる方向に回折し、そこで反
射されたビームが基板の外へ出射した後、光検出器に入
射する。FIGS. 8, 9 and 10 show the basic structure of an optical head according to a third embodiment of the present invention and how light is propagated and collected. As a substrate, for example, a thickness of 1.2 mm, a width of 2 mm,
An optical plastic having a length of 3 mm is used. The substrate itself is a light propagation path utilizing reflection on the upper and lower surfaces.
Light emitted in the vertical direction (z-axis direction) from, for example, a semiconductor laser having a wavelength of 0.79 μm, which is a light source, is obliquely (eg, 12.5 °) in the substrate due to the obliquely cut incident surface. Refracted. This beam is incident on the position signal detecting optical means 9 formed on the upper surface of the substrate. Here, assuming that, for example, a three-beam method is used as the position signal detecting optical means, the position signal detecting optical means is, for example, a diffraction grating for separating a beam into three beams, for example, at a pitch of 1.
This is a rectangular diffraction grating having a depth of 3.1 μm and a depth of 0.05 μm. The outer region is an aperture diffraction grating. For example, if the pitch is 1.5 μm and the depth is 0.13 μm, a portion other than the required effective diameter of the light incident on the aperture diffraction grating is diffracted outside the effective region of the light propagation path. Can be done.
By this position signal detecting optical means integrally formed with the aperture, three beams having a fixed beam diameter can be obtained.
These three beams enter the beam splitter 7 formed on the lower surface, and the zero-order reflected light enters the condensing means 3 formed on the upper surface. The light collecting means 3 is, for example, a Fresnel lens created by a lithography technique.
When the condensing means is formed by lithography in this way, the aperture diffraction grating can also be formed by lithography on the same mask, so that both can be aligned with high accuracy, for example, on the order of submicron. . The light reflected by the light condensing means is reflected again by the reflection layer 6b on the lower surface, then exits in the vertical z-axis direction from the inclined surface 8b cut on the upper surface, and is focused on a disk 2.3 mm away from the upper surface of the substrate, for example. . The light reflected by the disk surface again enters the element from the slope, and follows an optical path opposite to the outward path. The first-order diffracted light diffracted by the beam splitter is diffracted in a direction different from the outward path, and the reflected beam exits the substrate and then enters the photodetector.
【0024】光路内におかれた集光手段3とアパーチャ
2の中心軸がずれていると、光軸が斜めになるためにデ
ィスク面にあたるレーザビームが、ディスクに対して垂
直でなく傾いてしまうことになる。ディスクにあたるレ
ーザビームが傾いていると、復路において反射光が光路
の有効領域の外に洩れ出てしまい、光量を損失したり、
位置信号にアンバランスがあらわれるなどの問題を生じ
る。そのため、アパーチャと集光手段は極めて高い精度
で相対的な位置決めがなされなければならない。アパー
チャと集光手段が基板の同じ面にあれば、どちらも回折
光学素子として実現した場合、回折パターン描画の際に
一括描画することによって極めて高い精度で位置決めで
きるが、双方が基板の異なる面に配置された場合、異な
る面の間での位置決めが難しくなる。このようにアパー
チャと集光手段を基板の同じ面に配置することにより、
相互の素子の位置決めが容易になり、製作が容易にな
る。If the central axes of the focusing means 3 and the aperture 2 in the optical path are displaced, the optical axis becomes oblique, so that the laser beam hitting the disk surface is inclined not perpendicularly to the disk. Will be. When the laser beam hitting the disc is tilted, the reflected light leaks out of the effective area of the optical path on the return path, and the light amount is lost,
Problems such as imbalance appearing in the position signal occur. Therefore, the aperture and the condensing means must be relatively positioned with extremely high precision. If the aperture and the condensing means are on the same surface of the substrate, if both are realized as diffractive optical elements, positioning can be performed with extremely high precision by drawing all at once when drawing a diffraction pattern, but both are positioned on different surfaces of the substrate. When arranged, positioning between different surfaces becomes difficult. By arranging the aperture and the light collecting means on the same surface of the substrate in this way,
The positioning of the mutual elements is facilitated and the fabrication is facilitated.
【0025】実施の形態4.図11は本発明の実施の形
態4である光学ヘッドを上から見た平面図、図12は本
発明の実施の形態4である光学ヘッドを示す側面図、図
13は本発明の実施の形態4である光学ヘッドを下から
見た平面図である。Embodiment 4 11 is a plan view of the optical head according to the fourth embodiment of the present invention as viewed from above, FIG. 12 is a side view illustrating the optical head according to the fourth embodiment of the present invention, and FIG. 13 is an embodiment of the present invention. FIG. 4 is a plan view of the optical head 4 as viewed from below.
【0026】図11、12、13において、1は基板、
2は回折格子で形成されるアパーチャ、3は集光手段、
4は光源、5は光検出器、6は反射層、7はビームスプ
リッター、8は斜面、9は位置信号検出光学手段、10
はディスクである。In FIGS. 11, 12, and 13, reference numeral 1 denotes a substrate;
2 is an aperture formed by a diffraction grating, 3 is a light collecting means,
4 is a light source, 5 is a photodetector, 6 is a reflective layer, 7 is a beam splitter, 8 is a slope, 9 is a position signal detecting optical means, 10
Is a disk.
【0027】図11、図12、図13は本発明の実施の
形態4の光学ヘッドの基本構成と、光の伝搬、集光の様
子を示す。基板として、例えば厚さ1.2mm、幅2m
m、長さ3mmの光学プラスチックを用いる。この基板
自体が上面と下面の反射を利用した光伝搬路となってい
る。光源である例えば波長0.79μmの半導体レーザ
ーから垂直方向(z軸方向)に出射された光は、斜めに
カットされた入射角である斜面により基板内で斜め方向
(例えば12.5゜)に屈折される。このビームは基板
上面に形成された位置信号検出光学手段9に入射する。
ここでは、位置信号検出手段として例えば3ビーム法を
用いるとすると、位置信号検出光学手段9は例えばビー
ムを3本に分離するための回折格子で、例えばピッチ1
3.1μm深さ0.05μmの矩形型の回折格子であ
る。この位置信号検出光学手段により3本のビームを得
ることができる。この3本のビームは下面に作られてい
るビームスプリッター7に入射し、0次反射光が上面に
作られているアパーチャ一体形成の集光手段3に入射す
る。この集光手段は、例えばリソグラフィー技術によっ
て作成されたフレネルレンズである。その外側の領域は
アパーチャ回折格子で、例えばピッチ1.5μm、深さ
0.13μmとすると、このアパーチャ回折格子に入射
した光の90%以上を光伝搬路の有効領域の外側へ回折
させることができる。このように集光手段をリソグラフ
ィー技術によって作成する場合には、前記アパーチャ回
折格子も同一マスク上のリソグラフィー技術で作成でき
るため両者の位置合わせが極めて精度良く、例えばサブ
ミクロンのオーダーで行うことができる。このアパーチ
ャ一体形成の集光手段による反射光は下面の反射層で再
び反射されたのち、上面にカットされた斜面より垂直z
軸方向に出射し、基板上面より例えば2.3mm離れた
ディスク面で焦点を結ぶ。ディスク面で反射された光は
再び斜面から素子に入射し、往路と逆向きの光路をたど
る。ビームスプリッターにて回折された1次回折光は往
路とは異なる方向に回折し、そこで反射されたビームが
基板の外へ出射した後、光検出器に入射する。FIGS. 11, 12 and 13 show the basic structure of an optical head according to a fourth embodiment of the present invention and how light is propagated and collected. As a substrate, for example, a thickness of 1.2 mm and a width of 2 m
m, an optical plastic having a length of 3 mm is used. The substrate itself is a light propagation path utilizing reflection on the upper and lower surfaces. Light emitted in the vertical direction (z-axis direction) from, for example, a semiconductor laser having a wavelength of 0.79 μm, which is a light source, is obliquely (eg, 12.5 °) in the substrate due to a slope having an obliquely cut incident angle. Refracted. This beam is incident on the position signal detecting optical means 9 formed on the upper surface of the substrate.
Here, assuming that, for example, a three-beam method is used as the position signal detecting means, the position signal detecting optical means 9 is, for example, a diffraction grating for separating a beam into three beams.
This is a rectangular diffraction grating having a depth of 3.1 μm and a depth of 0.05 μm. Three beams can be obtained by this position signal detecting optical means. These three beams are incident on a beam splitter 7 formed on the lower surface, and the zero-order reflected light is incident on the condensing means 3 formed on the upper surface and formed integrally with the aperture. This light collecting means is, for example, a Fresnel lens created by lithography technology. The outer region is an aperture diffraction grating. For example, if the pitch is 1.5 μm and the depth is 0.13 μm, 90% or more of the light incident on the aperture diffraction grating can be diffracted outside the effective region of the light propagation path. it can. When the condensing means is formed by lithography in this way, the aperture diffraction grating can also be formed by lithography on the same mask, so that the alignment between the two can be performed with high accuracy, for example, on the order of submicron. . The light reflected by the light-collecting means integrally formed with the aperture is reflected again by the reflection layer on the lower surface, and then perpendicularly to the slope cut on the upper surface.
The light is emitted in the axial direction and is focused on a disk surface, for example, 2.3 mm away from the upper surface of the substrate. The light reflected by the disk surface again enters the element from the slope, and follows an optical path opposite to the outward path. The first-order diffracted light diffracted by the beam splitter is diffracted in a direction different from the outward path, and the reflected beam exits the substrate and then enters the photodetector.
【0028】前記第2の構成による光学ヘッドのアパー
チャ回折格子は、不用な光を光路外へ回折させる素子で
あるので、他のフレネルレンズや3ビーム用回折格子の
ような、有効な光にのみ作用する光学素子と1つの面
に、一体化した素子として形成することができる。この
ように複数の素子を一体化して形成することにより、相
互の位置合わせが不用になったり、反射面を削減するこ
とができ、製作が容易になる。Since the aperture diffraction grating of the optical head according to the second configuration is an element for diffracting unnecessary light out of the optical path, only the effective light such as another Fresnel lens or diffraction grating for three beams is used. It can be formed as an integrated element on one side with the working optical element. By integrally forming a plurality of elements as described above, mutual alignment becomes unnecessary, the number of reflection surfaces can be reduced, and manufacturing becomes easy.
【0029】[0029]
【発明の効果】本発明の第1の構成である光学ヘッドに
よれば、上下面の間を光がジグザグに伝搬する光伝搬路
を設けた透明な基板と、光源と、光検出器と、集光手段
と、位置信号検出光学手段とを備えた光学ヘッドにおい
て、前記基板のディスクへの光出射部を斜めにきり欠
き、前記ジグザグの光を偏向させて基板上下面に垂直に
出射させるようにしたので、光源の波長変動に対して安
定な平板集積型光学ヘッドが実現できる。According to the optical head of the first structure of the present invention, a transparent substrate provided with a light propagation path through which light propagates between upper and lower surfaces in a zigzag manner, a light source, a photodetector, In an optical head provided with a light condensing means and a position signal detecting optical means, a light emitting portion of the substrate to the disk is notched obliquely so that the zigzag light is deflected and emitted perpendicular to the upper and lower surfaces of the substrate. Therefore, it is possible to realize a flat plate integrated optical head that is stable against wavelength fluctuations of the light source.
【0030】また、本発明の第2の構成である光学ヘッ
ドによれば、上下面の間を光がジグザグに伝搬する光伝
搬路を設けた透明な基板と、光源と、光検出器と、集光
手段と、位置信号検出光学手段とを備えた光学ヘッドに
おいて、前記基板のディスクへの光出射部に対向する面
を斜めに切り欠き、該切り欠き部分に反射層を形成し、
前記ジグザグの光伝搬路の光を偏向させて反射し、該反
射光を基板上下面に垂直に出射させる光源の波長変動に
対して安定な平板集積型光学ヘッドが実現できる。According to the optical head of the second configuration of the present invention, a transparent substrate provided with a light propagation path through which light propagates in a zigzag manner between the upper and lower surfaces, a light source, a photodetector, In the optical head including the light condensing means and the position signal detecting optical means, a surface of the substrate facing the light emitting portion to the disk is notched obliquely, and a reflection layer is formed on the notched portion,
A flat-plate integrated optical head that is stable against wavelength fluctuations of a light source that deflects and reflects the light in the zigzag light propagation path and emits the reflected light perpendicularly to the upper and lower surfaces of the substrate can be realized.
【0031】また、本発明の第3の構成である光学ヘッ
ドによれば、前記基板の上面または下面に光ビームの集
光スポット径を特定値に規定する回折格子からなるアパ
ーチャを設けたので、ディスク上の集光スポット径を規
定できる。Further, according to the optical head of the third configuration of the present invention, since the aperture made of the diffraction grating for defining the focused spot diameter of the light beam to a specific value is provided on the upper surface or the lower surface of the substrate, The diameter of the focused spot on the disk can be defined.
【0032】また、本発明の第4の構成である光学ヘッ
ドによれば、前記回折格子からなるアパーチャを前記基
板の集光手段と同じ面に設けたので、各素子の位置ずれ
が少なくなり、安定性の高い平板集積型光学ヘッドが実
現できる。Further, according to the optical head of the fourth configuration of the present invention, since the aperture composed of the diffraction grating is provided on the same surface as the light condensing means of the substrate, the displacement of each element is reduced. A highly stable flat plate integrated optical head can be realized.
【0033】また、本発明の第5の構成である光学ヘッ
ドによれば、前記回折格子からなるアパーチャを前記位
置信号検出光学手段または集光手段と複合して一体に形
成したので、アパーチャ回折格子と小型の平板集積型光
学ヘッドが実現できる。Further, according to the optical head having the fifth configuration of the present invention, since the aperture formed by the diffraction grating is formed integrally with the position signal detecting optical means or the condensing means, the aperture diffraction grating is formed. And a small flat-plate integrated optical head.
【図1】 本発明の実施の形態1である光学ヘッドを上
からみた平面図。FIG. 1 is a plan view of an optical head according to a first embodiment of the present invention as viewed from above.
【図2】 本発明の実施の形態1である光学ヘッドを示
す側面図。FIG. 2 is a side view showing the optical head according to the first embodiment of the present invention.
【図3】 本発明の実施の形態1である光学ヘッドを下
から見た平面図。FIG. 3 is a plan view of the optical head according to the first embodiment of the present invention as viewed from below.
【図4】 本発明の実施の形態1である他の光学ヘッド
を示す側面図。FIG. 4 is a side view showing another optical head according to the first embodiment of the present invention.
【図5】 本発明の実施の形態2である光学ヘッドを上
から見た平面図。FIG. 5 is a plan view of the optical head according to the second embodiment of the present invention as viewed from above.
【図6】 本発明の実施の形態2である光学ヘッドを示
す側面図。FIG. 6 is a side view showing an optical head according to a second embodiment of the present invention.
【図7】 本発明の実施の形態2である光学ヘッドを下
から見た平面図。FIG. 7 is a plan view of the optical head according to the second embodiment of the present invention as viewed from below.
【図8】 本発明の実施の形態3である光学ヘッドを上
から見た平面図。FIG. 8 is a plan view of the optical head according to the third embodiment of the present invention as viewed from above.
【図9】 本発明の実施の形態3である光学ヘッドを示
す側面図。FIG. 9 is a side view showing an optical head according to a third embodiment of the present invention.
【図10】 本発明の実施の形態3である光学ヘッドを
下から見た平面図。FIG. 10 is a plan view of the optical head according to the third embodiment of the present invention as viewed from below.
【図11】 本発明の実施の形態4である光学ヘッドを
上から見た平面図。FIG. 11 is a plan view of an optical head according to a fourth embodiment of the present invention as viewed from above.
【図12】 本発明の実施の形態4である光学ヘッドを
示す側面図。FIG. 12 is a side view showing an optical head according to a fourth embodiment of the present invention.
【図13】 本発明の実施の形態4である光学ヘッドを
下から見た平面図。FIG. 13 is a plan view of the optical head according to the fourth embodiment of the present invention as viewed from below.
【図14】 従来の光学ヘッドの構成図。FIG. 14 is a configuration diagram of a conventional optical head.
【図15】 従来の平板集積型光学ヘッドの構成図。FIG. 15 is a configuration diagram of a conventional flat plate integrated optical head.
【図16】 従来の平板集積型光学ヘッドの構成図。FIG. 16 is a configuration diagram of a conventional flat plate integrated optical head.
1 基板、2 アパーチャ、3 集光手段、4 光源、
5 光検出器、6 反射層、7 ビームスプリッター、
8 斜面、9 位置信号検出光学手段、10ディスク、
11 カップリングレンズ、12 第2の集光手段。1 substrate, 2 aperture, 3 focusing means, 4 light sources,
5 photodetector, 6 reflection layer, 7 beam splitter,
8 slope, 9 position signal detecting optical means, 10 discs,
11 coupling lens, 12 second focusing means.
Claims (5)
伝搬路を設けた透明な基板と、光源と、光検出器と、集
光手段と、位置信号検出光学手段とを備えた光学ヘッド
において、前記基板のディスクへの光出射部を斜めに切
り欠き、前記ジグザグの光伝搬路の光を偏向させて基板
上下面に垂直に出射させる光学ヘッド。1. An optical system comprising: a transparent substrate provided with a light propagation path through which light propagates between upper and lower surfaces in a zigzag manner; a light source; a photodetector; a condensing means; and a position signal detecting optical means. An optical head, wherein a light-emitting portion of the substrate to a disk is notched obliquely, and light in the zigzag light propagation path is deflected and emitted perpendicular to the upper and lower surfaces of the substrate.
伝搬路を設けた透明な基板と、光源と、光検出器と、集
光手段と、位置信号検出光学手段とを備えた光学ヘッド
において、前記基板のディスクへの光出射部に対向する
面を斜めに切り欠き、該切り欠き部分に反射層を形成
し、前記ジグザグの光伝搬路の光を偏向させて反射し、
該反射光を基板上下面に垂直に出射させる光学ヘッド。2. An optical system comprising: a transparent substrate provided with a light propagation path through which light propagates between upper and lower surfaces in a zigzag manner; a light source; a photodetector; a condensing means; and a position signal detecting optical means. In the head, the surface of the substrate facing the light emitting portion to the disk is notched obliquely, a reflective layer is formed in the notched portion, and the light in the zigzag light propagation path is deflected and reflected,
An optical head for emitting the reflected light vertically to the upper and lower surfaces of the substrate.
集光スポット径を特定値に規定する回折格子からなるア
パーチャを設けた請求項1または請求項2記載の光学ヘ
ッド。3. The optical head according to claim 1, wherein an aperture made of a diffraction grating for defining a focused spot diameter of the light beam to a specific value is provided on an upper surface or a lower surface of the substrate.
基板の集光手段と同じ面に設けた請求項3記載の光学ヘ
ッド。4. The optical head according to claim 3, wherein an aperture made of the diffraction grating is provided on the same surface of the substrate as the light collecting means.
位置信号検出手段または集光手段と複合して一体に形成
した光学ヘッド。5. An optical head in which an aperture made of the diffraction grating is formed integrally with the position signal detecting means or the condensing means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9271457A JPH11110779A (en) | 1997-10-03 | 1997-10-03 | Optical head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9271457A JPH11110779A (en) | 1997-10-03 | 1997-10-03 | Optical head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11110779A true JPH11110779A (en) | 1999-04-23 |
Family
ID=17500308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9271457A Pending JPH11110779A (en) | 1997-10-03 | 1997-10-03 | Optical head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11110779A (en) |
-
1997
- 1997-10-03 JP JP9271457A patent/JPH11110779A/en active Pending
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