JPH11114803A - Facing device for lapping surface plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To exhibit various correcting functions impossible in a linear motion mechanism by setting a cutting tool to slidingly move in the vertical direction being the parallel direction to a rotary shaft of a lapping machine, in a tip part of a rotary arm to make the circular arc motion. SOLUTION: A rotary arm 6 is installed on a rotary shaft 5, and a cutting tool 4 is installed in a tip part of this rotary arm 6. The rotary arm 6 is driven in turning by a driving motor part. Squareness of the rotary shaft 5 and a plane of a lap surface plate 3 is adjusted by a level adjusting mechanism 8. A tool post is arranged in the tip part of the rotary arm 6 through a slide mechanism to adjust a notch quantity. A notch quantity of the cutting tool 4 is adjusted by a micrometer. In this constitution, the cutting tool 4 is vertically moved, and the rotary arm 6 is rotated in the radial direction of the lap surface plate 3. A surface of the lap surface plate can be finely cut by adjusting rotational driving of the driving motor part and a notch depth of the cutting tool 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a facing device for forming flatness of a lapping plate in a lapping machine.

[0002]

2. Description of the Related Art Recently, the flatness of an object to be wrapped, such as a material for a Si-Wafer, a head material, a glass for a liquid crystal, or a crystal oscillator material, is required to be more and more precise. In addition, as represented by Si-Wafer and glass for liquid crystal, these surfaces show a tendency to increase in size, and the flatness management of the lapping plate is regarded as important. Heretofore, flatness correction of the surface plate has been performed using (1) a lap correction ring that relatively moves in a planetary motion on the lap surface plate. (2) Facing geometrically with a blade that moves straight in the radial direction of the lap platen. (3) Remove the lap plate from the lapping machine and process it with another machine. Such methods are used.

[0003]

The above-mentioned method (1) is the most versatile method, but when aiming for high accuracy, the delicate behavior unique to the machine such as thermal deformation is grasped. , A craftsman's know-how is needed. The method (2) is a method used for a soft material plate such as tin, lead, or copper used for diamond abrasive wrap. Since a high-precision linear motion function is required, an apparatus length several times or more than a stroke is required, and a mechanism having strong rigidity is expensive. The method (3) is applied to a small-diameter lapping machine, but a large-diameter machine requires a large-scale apparatus and is not practical. In this way, in the work of correcting the lap surface plate, a mechanism that can be handled by an amateur and that is inexpensive and can be used for a large and small diameter lap surface plate was expected. SUMMARY OF THE INVENTION It is an object of the present invention to provide a lapping surface facing device which can perform various correcting functions which cannot be achieved by a linear motion mechanism with a simple circular motion mechanism.

[0004]

The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described. In the first aspect, a turning arm 6 is attached to the rotating shaft 5, and a cutting tool 4 slidable on the tip of the rotating arm 6 in a vertical direction parallel to the rotating axis (Z axis) of the lapping machine 2. The rotary arm 6 moves in an arc by a drive device, and the rotating shaft 5 is attached to a base plate 9 having a level adjusting mechanism 8.

[0005] In claim 2, the wrapping machine 2
The axis (X axis) in the radial direction of the lap surface plate 3 and the axis (Y axis) passing through the center portion of the lap width of the lap surface plate 3 are installed at right angles, and the rotation axis 5 of the rotating arm 6 is Installed on the Y axis,
The horizontal level adjusting mechanism is installed so that the level can be adjusted in the X-axis and Y-axis directions, and the lap platen 3 can be cut by an arc movement.

According to claim 3, the wrapping machine 2
, With respect to the radial line ed of the lap surface plate 3,
A rotating arm 6 in a direction perpendicular to the rotating arm 6 is disposed.
Is rotated about a rotating shaft 5 erected on a flat portion of the main body of the lapping machine 2 outside the lapping plate 3, and a cutting arranged at a tip of a rotation arm 6 in a radial direction of the lapping plate 3. The tool 4 is rotated.

According to a fourth aspect of the present invention, the lapping surface facing device of the third aspect is provided with a lapping machine 2.
Is supported on a plane portion of the main body of the device through a level adjusting mechanism 8 composed of three level adjusters a, b, and c. The disk 3 is disposed on a line parallel to the radial line ed, and the level adjuster c is disposed on an extension of a line connecting the rotation axis 5 to the center point g of the radial line ed. is there.

According to a fifth aspect of the present invention, in the lapping surface facing device according to the fourth aspect, the level adjuster b is adjusted so that the value of the dial gauge 21 indicates a positive value at the portion e. When cutting the lap surface of
It is possible to form a shape in which the inner diameter of the lap surface plate 3 is concave.

According to a sixth aspect of the present invention, in the facing device for a lapping surface plate according to the fourth aspect, the level adjuster a is adjusted so that the d portion indicates a positive value, and the inner diameter portion of the lap surface plate 3 has a convex shape. The shape can be formed.

According to a seventh aspect of the present invention, in the lapping surface facing apparatus according to the fourth aspect, the level adjuster c is adjusted so that the f portion indicates a plus value, and the lap surface width on the lap surface plate 3 is adjusted. It is possible to form a shape having a concave central portion.

According to the eighth aspect of the present invention, in the lapping surface facing apparatus according to the fourth aspect, the level adjuster c is adjusted so that the f portion indicates a negative value, and the lap surface width center portion of the lap surface plate 3 is adjusted. Can be formed into a convex shape.

[0012]

Next, an embodiment of the present invention will be described. FIG. 1 is a plan view showing a state in which a facing device 1 of the present invention having a drive motor M as a vertical axis is mounted on a flat portion of a main body of a lapping machine 2, FIG. 2 is a side view of FIG. 1, and FIG. FIG. 4 is a plan view of the facing device 1 in which the portion 7 is arranged horizontally and driven by a worm wheel, FIG. 4 is also a side view of FIG. 3, FIG.
Is a side sectional view showing a state in which the reference plane plate 15 is disposed on the lapping plate 3 via the level adjuster 16, FIG. 7 is a plan view showing a level adjusting mechanism of the facing device 1, and FIG. FIG. 9 is a diagram showing the height adjustment, and FIG. 9 shows how the level adjusters a, b, and c constituting the level adjustment mechanism 8 are adjusted.
FIG. 10 is a side sectional view showing the lapping plate 3 cut into various shapes, and FIG.

A facing device according to an embodiment of the present invention will be described below with reference to FIGS.
The facing device 1 in the present embodiment is a device for processing a lap processing surface of a lap surface plate 3 on a lapping machine 2 into a highly accurate shape. In a normal lapping machine 2, a rotation shaft and a sun gear are arranged at the center, a fixed outer gear is arranged at a position on the outer periphery of the lap platen 3, and a planetary gear is provided between the sun gear and the outer gear. A planetary gear type jig N that rotates gears is arranged, and a lapping Si-Wafer or a liquid crystal glass is fixed to the planetary gear type jig N, and planetary rotation is performed.

The planetary rotating Si-Wafer
In some cases, the lapping plate 3 comes into contact with the glass for liquid crystal from the lower surface, and depending on the type of the lapping machine 2, the lapping platen 3 also comes into contact with the upper surface. Next, the overall configuration of the facing device 1 will be described with reference to FIGS. The facing device 1 is installed on a flat surface of a main body of a general-purpose lapping machine 2, and is configured to be able to minutely cut the surface of the lap surface 3 with a cutting bit 4 in synchronization with the rotation of the lap surface plate 3. . A rotating arm 6 is attached to the rotating shaft 5, and a cutting bit 4 that can be slid and adjusted in the vertical direction parallel to the rotating shaft (Z axis) of the lapping machine 2 is set at the tip of the rotating arm 6. The rotating arm 6 performs an arc movement by a driving device, and the rotating shaft 5 is attached to a base plate 9 having a level adjusting mechanism 8. Also, in the lapping plate facing device, the axis of the lapping plate 3 of the lapping machine 2 in the radial direction (X axis) and the axis passing through the center of the lap width of the lapping plate 3 (Y axis) are set at right angles. The rotation axis 5 of the rotating arm 6 is set on the Y axis, and the horizontal level adjustment mechanism is set on the X axis,
The lap surface plate 3 is installed so that the level can be adjusted in the Y-axis direction, and the lap surface plate 3 can be cut by an arc movement.

The facing device 1 includes a rotating shaft 5, a rotating arm 6 having a cutting bit 4 attached to a tip thereof, a driving motor unit 7 for rotating the rotating arm 6, and a lap fixed to the rotating shaft 5. It comprises a level adjustment mechanism 8 for adjusting the perpendicularity to the plane of the board 3 and a base plate 9. The base plate 9 is mounted on a flat portion of the main body of the lapping machine 2, and a bearing base 13 constituting the facing device 1 is mounted on the base plate 9 via a level adjustment mechanism 8.

The rotating shaft 5 and the drive unit base 11, which are essential parts of the facing apparatus 1 of the present invention, are mounted on a bearing base 13. The rotation of the rotating shaft 5 is controlled by the drive motor unit 7.
Is decelerated by an output pulley or sprocket 12 via a belt or chain 19 to an input pulley or sprocket 18 to rotate a worm gear on the axis of the input pulley or sprocket 18, and the worm gear causes the wheel 14 to rotate. By the rotation, the rotation shaft 5 integrally formed with the wheel 14 rotates.

The turning arm 6 is attached to the rotating shaft 5, and the tool rest 20 is provided at the tip of the turning arm 6 via a slide mechanism for adjusting the cutting amount. Is adjusted by the micrometer 10. Therefore, by the rotation control of the drive motor unit 7 and the adjustment of the cutting depth of the cutting tool 4, the surface of the lap surface plate 3 can be finely cut. Further, the tool rest 20 is configured to be rotatable and fixed 180 degrees vertically at the tip of the rotating arm 6. In the lapping machine 2, the lap surface plate 3 is not only on the lower surface but also on the upper surface. Is a mechanism capable of cutting the upper and lower lap surfaces 3.

Next, a method of geometrically arranging the facing device 1 and the lap surface plate 3 will be described with reference to FIGS. 6, 7, and 8. FIG. First, as shown in FIG. 6, the reference flat plate 15 is set on the lap platen 3 via the level adjuster 16. Next, using a dial gauge 17 or the like, the level adjuster 16 is adjusted to adjust the reference flat plate 15.
Is set to zero and a virtual reference plane is set. Next, in the facing device 1, level adjusters a, b, and c constituting the level adjusting mechanism 8 interposed between the base plate 9 and the bearing base 13, the rotating arm 6, the rotating shaft 5, and the wrap The lap surface width B of the surface plate 3 is arranged as shown in FIG. 7, and a dial gauge or the like is set on the blade mounting portion. Here, R: turning radius of the cutting blade, eg = dg
It is.

The procedure for adjusting the level of the lap surface plate 3 in the radial direction in FIG. 7 is as follows. At points d and e on the lap surface plate 3, the level adjusters a and b are first adjusted so that the positions of the tips of the cutting tools 4 are at the same level. Next, on the lap surface plate 3, the level is set so that the position f of the tip of the cutting tool 4 and the center position g of the two points e and g on the lap surface plate 3 are at the same level. Regulator c
To adjust. This state is the same level state of the level adjusters a, b, and c.

The level adjusters a, b,
By operating c, dial gauge 21 at points d, e, and f
Is set to 0, and the base plate 9 and the rotating main shaft are perpendicular to each other. This state is the basic position, whereby the shape of the lap surface plate 3 can be obtained as shown in FIG.

Next, from this basic posture, the level adjuster b is adjusted so that the value of the dial gauge 21 indicates a positive value at the point e, and the lap surface of the lap surface plate 3 is cut. A shape in which the inner diameter portion of (a) is concave can be formed. Similarly, if the level adjuster a is adjusted so that the d portion indicates a plus value, the convex shape in FIG. 9B is adjusted, and if the level adjuster c is adjusted so that the f portion indicates a plus value, the level adjuster a shown in FIG. By adjusting the level c so that the central portion of the lap surface width in (c) is a concave surface and adjusting the level c so that the f portion indicates a negative value, the shape in FIG. .

As described above, the amount of adjustment of the level adjuster c for obtaining a shape in which the central portion of the lap surface width is concave or convex is as follows:
The fine adjustment of the height of ΔHc can be obtained by inserting it into the following equation (1). The value of ΔHc is finely adjusted by the level adjuster c. In the lapping machine 2, the Si-Waf
Since the liquid crystal glass and the liquid crystal glass are fixed, this portion is arranged at a half position in FIG.
The cross sections of the er and the liquid crystal glass are configured to be concave or convex.

[0023]

(Equation 1)

[0024]

As described above, the present invention has the following advantages. First, since the cutting tool 4 can be moved up and down and the rotating arm 6 is rotated along the line ed in the radial direction of the lap surface plate 3, it is often used for a soft surface plate. The bottom of the groove of the deep groove surface plate can also be cut by selecting the tool. Secondly, according to the configuration of the facing device of the present invention, in addition to the complete planar processing, the surface shape that has been difficult with conventional devices and methods, that is, a concave surface,
Shapes such as a convex surface, a concave surface within the lap surface width, and a convex surface within the wrap surface width can be easily created in a short time.

Third, as described above, by forming a concave surface, a convex surface, a concave surface in the lap surface width, a convex surface in the lap surface width, or the like, the thermal deformation and abrasion of the surface plate due to the lap operation, and It is possible to create an ideal lap surface shape in consideration of a cross-sectional shape such that a liquid or the like at the time of processing easily falls and falls easily. Fourth, if the cutting tool 4 is replaced with a small grinding unit, it can be diverted to a surface processing machine for a hard material surface plate. Fifth, according to each means of the present invention, general workers can create or modify various shapes of the lap surface at low cost and efficiently.

Sixth, since it is not necessary to use a lap correction ring that relatively moves on a lap surface plate as in the prior art, it is possible to easily face the flatness. Seventh, in the case of a conventional facing device that geometrically faces with a cutting tool that moves straight in the radial direction of the lap surface plate as in the related art, the device is wide in a portion to be attached to the flat portion of the main body of the lapping machine 2. Although a flat surface is required and the structure protrudes from the lapping machine 2, the facing device 1 according to the present invention includes a rotating arm 6 that is perpendicular to the radial line of the lap surface plate 3.
, It can be mounted on the flat part of the main body of the wrapping machine 2, and the mounting does not require a place. Eighth, it is no longer necessary to remove the lapping plate from the lapping machine and process it with another machine as in the conventional apparatus. Ninth, wrapping machine 2
In the case of the planetary gear type jig N,
And the glass for liquid crystal are fixed, so that the portion is arranged at a half position of FIG.
In other words, the cross section of the glass for liquid crystal is formed in a concave or convex shape. As described above, the concave or convex Si
-Wafer and glass for liquid crystal can be easily wrapped, and lapping platen can be facing.

[Brief description of the drawings]

FIG. 1 is an overall plan view of a wrapping device according to an embodiment of the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a plan view of the facing unit.

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a side view of FIG. 3;

FIG. 6 is a side sectional view showing a state in which a reference flat plate 15 is disposed on a lap surface plate 3 via a level adjuster 16;

FIG. 7 is a view showing a method of setting a virtual reference plane.

FIG. 8 is a diagram illustrating a method of adjusting a level of a facing rotation axis.

FIG. 9 is a diagram illustrating a method of adjusting a level and a shape of a wrap surface.

FIG. 10 is a diagram showing a deep groove shape on a lap surface.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Facing device 2 Lapping machine 3 Lapping table 4 Cutting bite 5 Rotating shaft 6 Rotating arm 7 Drive motor part 8 Level adjustment mechanism 9 Base plate 10 Micrometer 11 Drive stand 12 Output pulley or sprocket 13 Bearing stand 14 Wheel gear 15 Reference Flat plate 16 Level adjuster 17 Dial gauge 18 Input pulley or sprocket 19 Belt or chain 20 Tool post 21 Dial gauge

Claims (8)

[Claims] 1. A rotating arm 6 is attached to a rotating shaft 5, and a cutting tool 4 slidable in a vertical direction parallel to the rotating axis (Z axis) of the lapping machine 2 is attached to the tip of the rotating arm 6. A lapping plate facing device, wherein the rotating arm 6 is set in a circular motion by a driving device, and the rotating shaft 5 is mounted on a base plate 9 having a level adjusting mechanism 8. 2. The lapping surface facing device according to claim 1, wherein the lapping surface of the lapping surface of the lapping surface is passed through an axis (X axis) of the lapping surface of the lapping surface. The vertical axis (Y axis) is set at a right angle, the rotary axis 5 of the rotary arm 6 is set on the Y axis, and the horizontal level adjustment mechanism is set so that the level can be adjusted in the X axis and Y axis directions. A lapping surface facing device, characterized in that the lapping surface 3 can be cut even by movement. 3. In the lapping machine 2, a turning arm 6 is arranged in a direction orthogonal to a line ed in the radial direction of the lapping plate 3, and the turning arm 6 is wrapped outside the lapping plate 3. The cutting tool 4 disposed at the tip of the rotating arm 6 is rotated in the radial direction of the lap platen 3 by rotating the rotary shaft 5 on the flat portion of the main body of the machine 2. Lapping plate facing device. 4. A lapping table facing device according to claim 3,
It is supported via a level adjusting mechanism 8 composed of three level adjusters a, b, c, and the level adjusters a, b in the level adjusting mechanism 8 are radial lines of the lap surface plate 3. and a level adjuster (c) disposed on an extension of a line connecting the rotation axis (5) and the center point (g) of the radial line (ed), and a level adjuster (c). Facing device. 5. The lapping surface facing device according to claim 4, wherein the level adjuster b is adjusted so that the value of the dial gauge 21 indicates a positive value at the part e, and the lapping surface of the lapping surface plate 3 is adjusted. A facing device for a lapping platen, wherein a shape in which the inner diameter portion of the lapping platen 3 is concave when cut is formed. 6. The facing device for a lapping plate according to claim 4, wherein the level adjuster a is adjusted so that the d portion indicates a positive value, and the inner diameter portion of the lapping plate 3 can form a convex shape. A lapping plate facing device. 7. The lapping surface facing device according to claim 4, wherein the level adjuster c is adjusted so that the f portion indicates a positive value, and the lap surface width center portion on the lap surface plate 3 is concave. A lapping plate facing device, characterized by being able to form the following shape. 8. The lapping surface facing device according to claim 4, wherein the level adjuster c is adjusted so that the f portion indicates a negative value, so that the lap surface width central portion of the lap surface plate 3 has a convex surface. A lapping platen facing device capable of forming a bent shape.