JPH11101838A - Liquid crystal display substrate mark adding device and liquid crystal display substrate inspection device - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To improve the efficiency of repair work and inspection by facilitating confirmation of defective parts and the like. SOLUTION: This is a substrate inspection apparatus for a liquid crystal display body, which turns on an LCD substrate 19, takes in a lighting display surface of the LCD substrate 19 into a television camera 4, and inspects whether or not there is a defect. The apparatus is provided with a mark adding device 17 for directly marking information such as the location of the found defect and the content of the defect on the surface of the LCD substrate 19. The mark adding device 17 is a mark adding device 28 for directly marking a mark representing information such as the position of a defective portion and the content of the defect on the surface of the LCD substrate 19.
And an XY moving device 29 that appropriately moves the mark adding device 28 in the XY directions while supporting it.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for adding a mark to a substrate for a liquid crystal display and a substrate inspection device for a liquid crystal display which can improve the inspection efficiency of a substrate for a liquid crystal display (hereinafter referred to as "LCD substrate"). About.

[0002]

2. Description of the Related Art In general, a substrate inspection apparatus 1 for a liquid crystal display body.
Is configured as shown in FIG. The substrate inspection apparatus 1 for a liquid crystal display mainly includes a loader unit 2, a measurement unit 3,
It comprises a television camera 4 and a tester unit 5.

The loader unit 2 takes out a plurality of LCD substrates stored in a cassette (not shown) one by one and transports them to the measuring unit 3, and stores the LCD substrates after the inspection is completed in the original cassette. .

The measuring section 3 includes a measuring stage 7 for supporting the LCD substrate placed on the upper side, and an XYZθ for supporting the measuring stage 7 and moving in the XYZθ direction to align the placed LCD substrate. And a stage 8.

The LCD substrate mounted on the measurement stage 7 is turned on, and the tester unit 5 determines whether the LCD substrate is good or not via the television camera 4 and stores the information. At this time, if a defective portion is found, the information is also stored at the same time.

[0006] The worker removes L from the inspection apparatus 1.
The defective portion of the CD substrate is visually reconfirmed based on the information stored in the tester unit 5, and if the defect can be repaired, the defective portion is repaired.

[0007]

However, in the conventional inspection apparatus 1 as described above, when a defect is found, the operator reconfirms the visual inspection after the inspection is completed. Is extremely small, it takes time to confirm the defective position. Therefore, there is a problem that workability at the time of restoration is poor.

The present invention has been made in view of the above-mentioned problems, and a liquid crystal display device which can easily reconfirm a defective portion, improves workability at the time of repair, and improves inspection efficiency. It is an object of the present invention to provide a mark adding device for a substrate for use and a substrate inspection device for a liquid crystal display.

[0009]

According to a first aspect of the present invention, there is provided a mark adding device connected to a liquid crystal display substrate inspection apparatus for inspecting the presence of a defect in a liquid crystal display substrate. When a defective portion is found by the substrate inspection apparatus, information such as the position of the defective portion and the content of the defect is directly marked on the surface of the liquid crystal display substrate.

With the above structure, when a defective portion is found in the liquid crystal display substrate inspection apparatus, the mark adding device writes information such as the defective position and the defective content on the surface of the liquid crystal display substrate based on the information. Since it is directly marked, the operator can easily confirm a defective position or the like after the completion of the inspection work. Thus, the operator easily specifies the position where the mark is added and performs a repair operation or the like.

The mark adding device according to the second invention is provided so as to be connected to a liquid crystal display substrate inspection device for inspecting the presence of a defect in the liquid crystal display substrate. When a spot is found, a mark adding device for directly marking a mark indicating information such as the position of the defective portion and the content of the defect on the surface of the liquid crystal display substrate, and the defect while supporting the mark adding device. And an XY moving device for appropriately moving in the XY directions based on information such as the position of the location and the content of the defect.

With the above arrangement, the XY moving device supports the mark adding device and moves it to the defective portion, and moves the mark adding device in the vicinity of the defective portion as needed, so that the mark adding device can be easily moved to the defective portion. And a mark can be reliably added.

According to a third aspect of the present invention, there is provided a substrate inspection apparatus for a liquid crystal display, which illuminates a substrate for a liquid crystal display, captures the lit display surface of the substrate into a camera, and inspects the presence or absence of a defect. Wherein a mark adding device is provided for directly marking information such as the position of a found defective part and the content of the defective on the surface of the liquid crystal display substrate.

According to the above configuration, when a defective portion is found, information such as a defective position and a defective content is directly marked on the surface of the liquid crystal display substrate by the mark adding device. Thus, after the inspection work is completed, the worker easily specifies the position where the mark is added and performs a repair work or the like.

According to a fourth aspect of the present invention, in the apparatus for inspecting a substrate for a liquid crystal display, the mark adding device directly marks a mark indicating information such as the position of a defective portion and the content of the defect on the surface of the substrate for a liquid crystal display. A mark adder and X while supporting the mark adder
An XY moving device for appropriately moving in the Y direction is provided.

With the above arrangement, the XY moving device supports the mark adding device and moves it to the defective portion, and also moves the mark adding device in the vicinity of the defective portion as needed to easily move the mark adding device to the defective portion. And a mark can be reliably added.

According to a fifth aspect of the present invention, there is provided a substrate inspection apparatus for a liquid crystal display, wherein the mark adding device is fixed to the main body, and a mark indicating information such as the position of a defective portion and the content of the defect is provided on the substrate for the liquid crystal display. It is characterized by comprising a mark adding device for directly marking the surface, and an XY moving device for appropriately moving the liquid crystal display substrate arranged in the XY direction as desired in the mark adding device.

With the above arrangement, the XY moving device supporting the substrate for the liquid crystal display moves the defective portion of the substrate for the liquid crystal display to the position of the tip of the mark adding device fixed to the main body. Further, the XY moving device moves the liquid crystal display substrate so that the tip of the mark adding device moves near the defective portion, and adds a mark to the defective portion.

According to this, similarly to the fourth aspect, the mark adding device can be easily moved to the defective portion, and the mark can be reliably added.

[0020]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a liquid crystal display substrate marking apparatus according to the present invention. In the present embodiment, a description will be given of a liquid crystal display substrate inspection apparatus incorporating a liquid crystal display substrate mark addition device. The overall configuration of the substrate inspection apparatus for a liquid crystal display according to the present embodiment is substantially the same as that of the conventional inspection apparatus, and therefore, the same portions are denoted by the same reference numerals and description thereof will be omitted.

The substrate inspection apparatus for a liquid crystal display of this embodiment comprises a loader section 2, a measuring section 11, a television camera 4, and a tester section 5. That is, the components other than the measuring unit 11 are the same as those of the conventional inspection device. The measuring unit 11 will be described with reference to FIGS.

The measuring section 11 mainly includes the stage base 1
2, an XYZθ stage 13, a measurement stage 14,
It is roughly composed of a base plate 15, a probe unit 16, a mark adding device 17, and an alignment camera 18.

The stage base 12 is a square plate, and is a base for supporting the XYZθ stage 13 and the like. X
Stage 13 is set on stage base 12. The XYZθ stage 13 is for moving and rotating the measurement stage 14 installed on the upper side in the front-rear, left-right, up-down directions.

The measurement stage 14 is an XYZθ stage 13
It is fixed to the upper surface of. This measurement stage 14
The probe unit 1 is moved in the front-rear, left-right, up-down directions and rotated by the XYZθ stage 13 so as to be described later.
The probe is accurately positioned with respect to the sixth probe 25. The measurement stage 14 supports the LCD substrate 19 on its upper surface. For this purpose, a suction means (not shown) for sucking and fixing the LCD substrate 19 is provided in the measurement stage 14.

The base plate 15 surrounds the support 2
0 and covers the upper side of the measurement stage 14 while being fixed to the stage base 12 side. This base plate 15 is formed in the same square shape as the stage base 12. At the center of the base plate 15, there is provided a working opening 21 for extending the probe unit 16 and the mark adding device 17 to the LCD substrate 19 on the measurement stage 14 and performing an inspection work.

The probe unit 16 includes an LCD board 19
This is a device for supplying power for inspection by contacting with the base plate 15 and is provided in contact with the upper surface of the base plate 15. The probe unit 16 includes a support plate 22 and a probe block 23 attached to an upper surface of the support plate 22. This support plate 22 is formed in a square shape. A work opening 24 similar to the work opening 21 of the base plate 15 is provided at the center of the support plate 22. The probe block 23 is connected to the LCD substrate 1
A probe 25 for supplying power by contacting the probe 9;
Is supported on the support plate 22 side in a state desired by the LCD substrate 19.

[0027] The mark adding device 17 is an LCD for inspection.
This is a device for adding a mark to a defective portion when a defect is found on the substrate 19. This mark adding device 17
Is a mark adder 28 for adding a mark to the LCD board 19 at a defective portion of the LCD board 19, and a mark adder 28
And an XY moving device 29 for moving the surface of the LCD substrate 19 in the XY directions while supporting the LCD substrate 19.

As shown in FIGS. 4 and 5, the mark adding device 28 mainly includes a Z-axis fine adjustment device 31, a bracket 32,
It comprises an ink tank 33 and a drive unit 34.

The Z-axis fine adjustment device 31 includes an XY movement device 29
This device is attached to the side to finely adjust the ink tank 33 and the like in the Z-axis direction (vertical direction). The Z-axis fine adjustment device 31 is configured by a screw mechanism, and finely adjusts the ink tank 33 and the like in the Z-axis direction by a Z-axis fine adjustment knob 32 provided at an upper portion.

The bracket 32 extends diagonally forward with its base end fixed to the Z-axis fine adjustment device 31.

The ink tank 33 stores the ink for the mark inside and pushes out the ink from the tip to make the LCD substrate 19
This is a device for adding a mark to a defective part. This ink tank 33 is attached to the tip of the bracket 32. The ink tank 33 has a thin rod-shaped fish line 35 inserted therein and is reciprocated to push out the ink inside from the tip.

The driving device 34 is a device for reciprocating the fish line 35 to push out the ink in the ink tank 33 from the tip. This driving device 34
The movable piston portion 36A is connected to the fish line 35 to directly reciprocate the fish line 35, and the movable piston portion 36A of the solenoid 36 is returned to the original position by reacting to the spring stopper 37A. Returning compression spring 37 and movable piston section 3
And an ink amount adjusting unit 38 for adjusting the movable range of 6A to adjust the amount of ink to be pushed out. The ink amount adjusting unit 38 abuts on the flat plate 39 attached to the base end of the movable piston unit 36A and the flat plate 39 while being supported by the bracket 32, thereby limiting the movable range of the movable piston unit 36A. And an ink amount adjusting screw 40 for adjusting the amount of ink pushed out from the ink tank 33.

The XY moving device 29 is a device for supporting the mark adding device 28 and moving it to a defective portion on the surface of the LCD substrate 19. The mark adding device 28 moved to the defective portion by the XY moving device 29 writes the position of the defective portion and, if necessary, the content of the defect on the surface of the LCD substrate 19 with ink. This XY moving device 29
Is composed of an X moving unit 43 and a Y moving unit 44, as shown in FIG.

The X moving section 43 has an X base 46 fixed to the support plate 22 of the probe unit 16 while being arranged in the X direction, and an X base rotatably supported by the X base 46.
An X slider 48 having a ball screw shaft 47, a nut portion locked in the X ball screw shaft 47 and moving in the X axis direction by rotating the X ball screw shaft 47, and an X base 4
6, an X motor 49 connected to the X ball screw shaft 47 and driving the X ball screw shaft 47 to rotate;
An X slider 48 is provided in parallel with the X ball screw shaft 47.
And an X rail 50 slidably supporting the X-ray.

The X slider 48 includes an X nut 52 screwed to the X ball screw shaft 47, an X slide guide 53 that slidably fits on the X rail 50 and supports the X slider 48 to slide in the X direction. A connection plate 54 for connecting the X nut 52 and the X slide guide 53 is provided. The X ball screw shaft 47 has a distal end and a proximal end rotatably supported, and has a proximal end connected to an X motor 49.
And a coupling 55 for coupling to

The Y moving section 44 is supported by a connecting plate 54 of an X slider 48 and slides in the X direction as a whole. Specifically, the Y moving portion 44 is composed of a Y base 56 arranged in the Y direction while being supported by the connecting plate 54 of the X slider 48, and a Y ball screw shaft 57 rotatably supported by the Y base 56. And this Y ball screw shaft 57
The Y slider 58 is provided at the base end of the Y base 56, and is connected to the Y ball screw shaft 57 so that the Y ball screw shaft 57 is connected to the Y ball screw shaft 57. It comprises a Y motor 59 that is driven to rotate, and a Y rail 60 that is disposed in parallel with the Y ball screw shaft 57 and supports the Y slider 58 so as to be slidable.

The Y slider 58 includes a Y nut 62 screwed to the Y ball screw shaft 57, a Y slide guide 63 that is slidably fitted to the Y rail 60 and supports the Y slider 58 to slide in the Y direction. A connecting plate 64 for connecting the Y nut 62 and the Y slide guide 63 is provided, and a mounting base 65 which is provided downward from an end of the connecting plate 64 and supports the mark adding device 28. Y
The ball screw shaft 57 has a distal end portion and a proximal end portion rotatably supported, and has a proximal end portion serving as a coupling 66 for coupling to the Y motor 59.

The solenoid 36, the X motor 49 and the Y motor 59 are connected to a control unit (not shown) in the measuring unit 11, respectively. The control unit drives the X motor 49 and the Y motor 59 based on the defect information taken in from the tester unit 5 to move the mark adder 28 to the defective position, and drives the solenoid 36 to perform LC control.
Marks, defective contents, and the like are written on the surface of the D substrate 19.

The alignment camera 18 is shown in FIGS.
As shown in FIG. 2, the camera is for accurately aligning the LCD substrate 19 mounted on the upper surface of the measurement stage 14 with the probe 25 of the probe block 23. The alignment camera 18 supports the support plate 2 of the probe unit 16.
Two units are provided at two positions (2).

[Operation] In the substrate inspection apparatus for a liquid crystal display constructed as described above, the LCD substrate 19 is operated as follows.
Inspection is performed. Note that the overall operation of the liquid crystal display substrate inspection apparatus of the present embodiment is the same as that of the conventional liquid crystal display substrate inspection apparatus 1. That is, the operation performed by the loader unit 2 (the LCD substrates housed in the cassette are taken out one by one and transported to the measuring unit 3 and the LCD substrate after the inspection is completed)
Operation of storing the substrate in its original position) and the TV camera 4
The operation performed by the tester unit 5 (the operation of turning on the LCD substrate to determine the quality) is the same as that of the conventional liquid crystal display substrate inspection apparatus 1.

The measuring section 11 of the present embodiment operates as follows.

The LCD substrate 19 transported to the measuring section 11 by the loader section 2 is placed on the measuring stage 14 and fixed by vacuum suction. L fixed to the measurement stage 14
The CD substrate 19 includes the alignment camera 18 and the XYZθ
The stage 13 allows accurate positioning. That is,
The LCD board 19 and the probe 25 of the probe block 23 are accurately aligned and brought into contact with each other.

Next, power is supplied to the probe 25 and LC
The D board 19 is turned on. Lit LCD board 19
Is inspected for defects by the television camera 4 and the tester unit 5. This information is stored in the tester unit 5.

When a defect is found on the LCD substrate 19 by this inspection, the control unit (not shown) operates the tester unit 5.
The mark adding device 17 is driven based on the information from.
Specifically, the X coordinate and the Y coordinate of the defective portion are detected, and the X motor 49 is driven according to the X coordinate, and the Y motor 59 is driven according to the Y coordinate.

The driving of the X motor 49 causes the Y moving section 44 to move.
Moves by a distance corresponding to the X coordinate, and the driving of the Y motor 59 causes the mark adding device 28 to move by a distance corresponding to the Y coordinate. Thereby, the ink tank 33 of the mark adding device 28
Is precisely aligned with the defective part.

Next, the solenoid 36 is driven, and the ink is pushed out from the ink tank 33 toward the defective portion.

At this time, the solenoid 36, the X motor 49
And the control of the Y motor 59 is different depending on the way of marking. In order to mark a defective portion, the mark motor 28 is moved to the defective portion under the control of the X motor 49 and the Y motor 59, and then the solenoid 36 is driven only once to eject one drop of ink. When encircling the defective portion with a circle, after moving the mark adding device 28 to the defective portion, the X motor 49 and the Y motor 59 are controlled so that the mark adding device 28 draws a circle around the defective portion. The mark adding device 28 is moved. At this time, the solenoid 36 is continuously driven to draw a circular dotted line. In addition, when a letter indicating the content of a defect is added, the X motor 49 and the Y motor 5
9 is moved so that the mark adding device 28 traces the character. At this time, the solenoid 36 is continuously driven to draw a character indicated by a dotted line.

After completion of the inspection, the operator moves the marked L
The CD substrate 19 is taken out, the defective portion is confirmed, and if the defective portion can be repaired, the defective portion is repaired. If the content of the defect is entered, repair work is performed according to the content.

[Effect] As described above, when a defective portion is found by the inspection, the mark adding device 17 indicates the defective portion and, if necessary, the content of the defect on the LCD substrate 19.
Since the data is directly written into the data, it is extremely easy to confirm the defective portion and the content of the defect during the repair work after the inspection, and the repair workability is greatly improved. As a result, the inspection time is significantly reduced, and the inspection efficiency is greatly improved.

[Modifications] (1) In the above-described embodiment, the mark adding device is provided with a mark adder 28 for directly marking a mark representing defect information on the surface of the LCD substrate 19, and the mark adder 28 is supported. And an XY moving device 29 for appropriately moving in the XY directions in a state in which the mark attaching device 28 is fixed.
The D substrate 19 may be appropriately moved in the XY directions. In this case, the mark adding device 28 is the probe unit 1
6 and directly fixed to the support plate 22. An XY moving device for appropriately moving the LCD substrate 19 desirably arranged in the mark adding device 28 in the XY directions includes XY moving devices.
Stage 13 is used. With this configuration, the same operation and effect as those of the above embodiment can be obtained.

(2) In the above embodiment, the moving means of the XY moving device 29 is constituted by a combination of a ball screw and a nut, but may be constituted by a combination of a pulley and a belt as shown in FIG. The XY moving device 71 includes an X moving unit 72 and a Y moving unit 73.

The X moving section 72 includes an X base 74 arranged in the X direction, an X motor 75 attached to the base end of the X base 74, a driving pulley 76 attached to the X motor 75, A driven pulley 77 attached to the tip of the X base 74, a driving belt 78 stretched between the driving pulley 76 and the driven pulley 77, and an X provided on the X base 74 along the longitudinal direction thereof. Rail 7
9 and slidably attached to the X rail 79 while supporting the Y moving unit 73 and fixed to the drive belt 78.
And an X-slider (not shown) that moves in the direction.

The Y moving section 73 is a Y base 81 arranged in the Y direction while being supported by the X slider of the X moving section 72.
A Y motor 82 attached to the base end of the Y base 81; a driving pulley 83 attached to the Y motor 82; a driven pulley 84 attached to the distal end of the Y base 81; 83 and driven pulley 84
And the Y-base 81
And a Y-rail 86 provided along the longitudinal direction of the Y-rail 86 while being slidably mounted on the Y-rail 86 while supporting the mark adding device 17 and fixed to a drive belt 85. 17 to Y
And a slider 87 that moves in the direction.

With the XY moving device 71 having the above configuration, the same operation and effect as those of the above embodiment can be obtained.

(3) Further, the X moving unit 4 of the above embodiment.
As shown in FIG. 8, instead of the XY moving device 29 including the 3 and the Y moving unit 44,
The XY moving device may be configured by a robot arm 93 including the second arm portion 92 that supports the mark adding device 17. Further, an XY moving device having another configuration may be used. As long as the XY movement device can support the mark adding device 17 and move to a defective portion, the same operation and effect as in the above-described embodiment can be obtained.

(4) In the above embodiment, ink is used as a mark to be added by the mark adding device 28 of the mark adding device 17 and the ink is extruded. However, the ink is extruded from the tip of the core impregnated with the ink. A writing instrument such as a pen for writing a mark by leaching the ink may be used. In this case, as a device for supporting the writing instrument and moving the surface of the LCD substrate 19 (a device corresponding to the XY moving device 29),
The X-moving unit, the Y-moving unit, and the Z-moving unit make it possible to move the writing implement up and down.

As the mark added by the mark adding device 17, the mark may be printed by a laser beam or directly damaged in addition to ink or the like. In addition, when describing the contents of the defect, the defect may be described by the mark adding device 17, but a small printing device may be used.

(5) In the above embodiment, the mark adding device 17 is attached to the probe unit 16.
The present invention is not limited to this, and may be another position of the liquid crystal display substrate inspection apparatus. For example, as shown in FIG. 9, a mark adding device 17 is provided in the loader section 96 of the liquid crystal display substrate inspection apparatus 95, and a mark is added to the LCD substrate returned from the measurement stage section 97 to the loader section 96. You may do so. In this case, the mark adding device 28 of the mark adding device 17 is connected to the loader unit 9.
Fixed to 6 side. XY for appropriately moving the LCD substrate 19 disposed facing the mark adding device 28 in the XY directions.
As the moving device, the LCD substrate transport unit 9 of the loader unit 96 is used.
8 is used. With this configuration, the same operation and effect as those of the above embodiment can be obtained.

In addition, one of the three cassette mounting portions 99 of the loader portion 96 is provided with a mark adding device (17).
May be provided.

(6) In the above embodiment, the case where the mark adding device 17 is built in the liquid crystal display substrate inspection device 95 has been described as an example. As a separate and separate device, it may be provided near the liquid crystal display substrate inspection device 95. In this case, the mark adding device is connected to the control unit of the liquid crystal display substrate inspecting device 95 so as to specify a defective portion. Further, as the XY moving device (XY moving device for moving the mark adding device to a defective portion on the surface of the LCD substrate 19) constituting the mark adding device, the LCD substrate 19 may be used even if the mark adding device is supported and moved. It may be configured to be supported and moved.

When the mark adding device is provided as a separate device from the liquid crystal display substrate inspection device 95, the mark addition device can be used for an existing liquid crystal display substrate inspection device. It is possible to provide a device excellent in performance.

[0062]

As described in detail above, according to the present invention,
The following effects are obtained.

When a defective portion is found by the inspection, the defective portion and, if necessary, the content of the defect are directly written on the liquid crystal display substrate by the mark adding device. At this time, it is easy to confirm the defective portion and the content of the defect, and the repair work is extremely easy. As a result, the inspection efficiency is greatly improved.

In particular, when the mark adding device is provided as a separate device, the mark adding device can be used for an existing substrate inspection device for a liquid crystal display, and an extremely versatile device is provided. can do.

[Brief description of the drawings]

FIG. 1 is a plan view showing a measuring section of a liquid crystal display substrate inspection apparatus according to the present invention.

FIG. 2 is a front view showing a conventional substrate inspection apparatus for a liquid crystal display.

FIG. 3 is a front view showing a measuring unit of the substrate inspection apparatus for a liquid crystal display according to the present invention.

FIG. 4 is a side view showing a mark adding device of the mark adding device of the present invention.

FIG. 5 is a perspective view showing a mark adding device of the mark adding device of the present invention.

FIG. 6 is a perspective view showing an XY moving device of the present invention.

FIG. 7 is a plan view showing a first modification.

FIG. 8 is a plan view showing a second modification.

FIG. 9 is a plan view showing a third modification.

[Description of Signs] 4: TV camera, 11: measuring unit, 17: mark adding device, 19: LCD board, 23: probe block, 2
5: probe, 28: mark adder, 29: XY moving device.

Claims (5)

[Claims] 1. A liquid crystal display substrate inspection apparatus for inspecting the presence or absence of a defect in a liquid crystal display substrate. The liquid crystal display substrate inspection apparatus detects a defect when the defect is found. A mark adding device for directly marking information such as a position of a place and a content of a defect on a surface of a liquid crystal display substrate. 2. A liquid crystal display substrate inspection apparatus for inspecting the presence or absence of a defect in a liquid crystal display substrate. The liquid crystal display substrate inspection apparatus is provided with a defect when a defect is found in the liquid crystal display substrate inspection apparatus. A mark adder for directly marking a mark indicating information such as the position of the location and the content of the defect on the surface of the substrate for a liquid crystal display; and information such as the position of the defective location and the content of the failure while supporting the mark adder. And an XY moving device for appropriately moving in the XY directions based on the mark. 3. A liquid crystal display substrate inspection apparatus for lighting a liquid crystal display substrate, taking the lit display surface into a camera, and inspecting the presence or absence of a defect, comprising the steps of: A substrate inspection apparatus for a liquid crystal display, comprising a mark adding device for directly marking information on the surface of the substrate for a liquid crystal display. 4. The liquid crystal display substrate inspection apparatus according to claim 3, wherein the mark addition device directly puts a mark representing information such as a position of a defective portion and a content of the defect on a surface of the liquid crystal display substrate. A substrate inspecting apparatus for a liquid crystal display, comprising: a mark adding device for marking; and an XY moving device for appropriately moving the mark adding device in the XY directions while supporting the mark adding device. 5. The substrate inspecting apparatus for a liquid crystal display according to claim 3, wherein the mark adding device is fixed to the main body side, and a mark indicating information such as a position of a defective portion and a content of the defect is used for the liquid crystal display. A mark adding device for directly marking the surface of the substrate; and an XY moving device for appropriately moving the liquid crystal display substrate arranged in the XY direction as desired in the mark adding device. Inspection equipment for liquid crystal display.