JPH11108476A - Cryostatic cooling device - Google Patents
Cryostatic cooling deviceInfo
- Publication number
- JPH11108476A JPH11108476A JP26959197A JP26959197A JPH11108476A JP H11108476 A JPH11108476 A JP H11108476A JP 26959197 A JP26959197 A JP 26959197A JP 26959197 A JP26959197 A JP 26959197A JP H11108476 A JPH11108476 A JP H11108476A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- pressure
- circuit
- cooling
- compressor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 28
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract 1
- 238000007710 freezing Methods 0.000 abstract 1
- 230000008014 freezing Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 11
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 9
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000005680 Thomson effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は極低温冷却装置に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryogenic cooling device.
【０００２】[0002]
【従来の技術】従来の極低温冷却装置として、（１）多
段のＧＭ冷凍機やスタ−リング冷凍機にＪＴ回路を組合
せた４Ｋ冷却システム、（２）クロ−ドサイクルにＪＴ
回路を組合せた冷却システム及び、（３）ＪＴ回路に 3
Ｈeを利用し、圧縮機と減圧調整機構を組合せた冷却シ
ステム（特願平８−２２８４３６）が知られている。上
記(１)のシステムは一般には液体ヘリウム温度(４.２
Ｋ）での冷却能力を発生させる装置であり、負圧運転機
構を有しても３Ｋレベルが限界であった。これは、ＪＴ
回路を循環する 4Ｈe(ヘリウム４）の１.８Ｋでの飽和
蒸気圧が１６.６mbarと非常に低いので、ＪＴ回路の低
圧側の圧力を、１６.６mbarにする排気用ポンプ装置が
必要になること、ＪＴ低圧系の圧力損失の許容値が嚴し
くなるためである。このため、装置が複雑となり、コス
トアップとなるという問題がある。2. Description of the Related Art As a conventional cryogenic cooling apparatus, (1) a 4K cooling system in which a JT circuit is combined with a multi-stage GM refrigerator or a staring refrigerator, and (2) a JT circuit for a load cycle.
Cooling system and combining circuit, 3 (3) JT circuit
A cooling system using He and combining a compressor and a pressure reduction mechanism (Japanese Patent Application No. 8-228436) is known. The system of the above (1) generally has a liquid helium temperature (4.2
K) is a device for generating the cooling capacity, and the 3K level is the limit even if it has a negative pressure operation mechanism. This is JT
Since the saturated vapor pressure of 4 He (helium 4) circulating in the circuit at 1.8 K is very low at 16.6 mbar, an exhaust pump device for reducing the pressure on the low pressure side of the JT circuit to 16.6 mbar is required. This is because the allowable value of the pressure loss of the JT low-pressure system becomes severe. For this reason, there is a problem that the apparatus becomes complicated and the cost increases.
【０００３】次に、(２)のクロ−ドサイクルにＪＴ回路
を組合せた冷却システムは、超流動ヘリウム温度を生成
させる冷却システムであるが、装置が複数段の排気用ポ
ンプ、複数段の圧縮機、複数個のＪＴバルブ及び５個以
上の熱交換器等で構成され、非常に複雑であるという欠
点がある。又装置構成の複雑さに伴ない信頼性が低下
し、取扱いが容易でなくなってくるという問題がある。[0003] A cooling system in which a JT circuit is combined with the load cycle of (2) is a cooling system for generating a superfluid helium temperature. The cooling system includes a multistage exhaust pump and a multistage compression. Machine, a plurality of JT valves, five or more heat exchangers, and the like. In addition, there is a problem that reliability is reduced due to the complexity of the device configuration, and handling becomes difficult.
【０００４】また、(３)の冷却システムは冷却能力を増
加させるためには圧縮機を並列に増加させる必要がある
ため、消費電力が大きくなるという問題がある。In the cooling system of (3), it is necessary to increase the number of compressors in parallel in order to increase the cooling capacity, so that there is a problem that power consumption increases.
【０００５】[0005]
（１） 装置構成が簡素で信頼性が高く、取扱いが容易
で、冷却温度が１.８Ｋ（超流動ヘリウム温度）域とな
る閉サイクル運転の極低温冷却装置を実現すること、
（２） 効率的なシステムを実現すること、を目的とす
る。(1) To realize a closed-cycle cryogenic cooling device with a simple device configuration, high reliability, easy handling, and a cooling temperature in the 1.8K (superfluid helium temperature) range;
(2) To achieve an efficient system.
【０００６】[0006]
（１） 予冷機としてＧＭ冷凍機２１を用い、これにＪ
Ｔ回路と組合せた冷凍機ユニットＡに、ＧＭ圧縮機ユニ
ットＢとＪＴ圧縮機ユニットＣとを管路２３，２４及び
管路２５，２６でそれぞれ接続し、ＪＴ回路の循環ガス
として 3Ｈeを、又予冷用のＧＭ冷凍機２１の循環ガス
として 4Ｈeを使用し、前記ＪＴ圧縮機ユニットＣは直
列に配置された１段の真空ポンプ９と１段の圧縮機本体
１及びＪＴ回路とＪＴ圧縮機ユニットＣとを接続する管
路２５と２６間に配設された１次圧力調整器６と２次圧
力調整器８とにより、ＪＴ回路の低圧側を負圧保持し、
かつＪＴ回路の高圧側を所定の吐出圧力に保持可能と
し、前記ＪＴ圧縮機ユニットＣの真空ポンプ９と圧縮機
本体１に圧縮比の高いスクロ−ル式を使用した。 （２） 冷却能力を増加させるためにはＪＴ流量を増や
す必要がある。この方法の１つとして圧縮機本体を並列
に台数を増やす方法もあるが、真空ポンプを圧縮機本体
と直列に配置して効率的（消費電力が少ない）とした。(1) A GM refrigerator 21 was used as a pre-cooler, and J
The GM compressor unit B and the JT compressor unit C are connected to the refrigerator unit A combined with the T circuit via lines 23 and 24 and the lines 25 and 26, respectively, and 3 He is used as a circulating gas for the JT circuit. In addition, 4 He is used as a circulating gas for the GM refrigerator 21 for pre-cooling, and the JT compressor unit C is composed of a single-stage vacuum pump 9 and a single-stage compressor body 1 and a JT circuit and a JT circuit arranged in series. The low pressure side of the JT circuit is maintained at a negative pressure by the primary pressure regulator 6 and the secondary pressure regulator 8 disposed between the pipelines 25 and 26 connecting the machine unit C,
The high pressure side of the JT circuit can be maintained at a predetermined discharge pressure, and a scroll type having a high compression ratio is used for the vacuum pump 9 and the compressor body 1 of the JT compressor unit C. (2) In order to increase the cooling capacity, it is necessary to increase the JT flow rate. As one of the methods, there is a method of increasing the number of compressor bodies in parallel, but a vacuum pump is arranged in series with the compressor body to make the compressor more efficient (low power consumption).
【０００７】[0007]
【発明の実施の形態】図１に基いて説明する。図１は本
発明の２Ｋレベルの冷凍装置のフロ−を示す。Ａは冷凍
機ユニット、Ｂは管路２３と２４で冷凍機ユニットＡを
構成する予冷用ＧＭ冷凍機２１と接続したＧＭ圧縮機ユ
ニット、そしてＣは管路２５と２６で同じくＪ−Ｔ回路
と接続したＪＴ圧縮機ユニットである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. FIG. 1 shows the flow of a 2K level refrigeration system of the present invention. A is a refrigerator unit, B is a GM compressor unit connected to the precooling GM refrigerator 21 constituting the refrigerator unit A through lines 23 and 24, and C is a J-T circuit through lines 25 and 26. The connected JT compressor unit.
【０００８】冷凍機ユニットＡとＧＭ圧縮機ユニットＢ
は従来型のものを使用する。冷凍機ユニットＡにおい
て、２１は予冷用ＧＭ（ギフォ−ド・マクマホン）冷凍
機である。ＧＭ圧縮機ユニットＢは、ＧＭ冷凍機専用の
圧縮機である。１１は１段熱負荷フランジ、１２は２段
熱負荷フランジである。１３は１段熱交換器、１４は２
段熱交換器、１５は３段熱交換器である。１６はＪ−Ｔ
弁、１７は７〜１５Ｋステ−ジ、１８は２Ｋステ−ジ、
１９は４０〜６０Ｋシ−ルド、２０は７〜１５Ｋシ−ル
ドである。これらは真空断熱容器２２内に収められてい
る。[0008] Refrigerator unit A and GM compressor unit B
Use the conventional type. In the refrigerator unit A, reference numeral 21 denotes a precooling GM (Gifford McMahon) refrigerator. The GM compressor unit B is a compressor dedicated to the GM refrigerator. 11 is a one-stage heat load flange, and 12 is a two-stage heat load flange. 13 is a one-stage heat exchanger, 14 is 2
The stage heat exchanger 15 is a three-stage heat exchanger. 16 is JT
Valve, 17 is 7-15K stage, 18 is 2K stage,
19 is a shield of 40-60K and 20 is a shield of 7-15K. These are housed in the vacuum insulation container 22.
【０００９】ＪＴ圧縮機ユニットＣは圧縮機本体１と真
空ポンプ９に吸込弁及び吐出弁のないスクロ−ル式を用
いている。２は油分離器、３は吸着器である。逆止弁
５、一次圧力調整器６、バッファタンク７、２次圧力調
整器８は管路２５と真空ポンプ９と圧縮機本体１間の管
路２６との間に配設されている。The JT compressor unit C uses a scroll type without a suction valve and a discharge valve for the compressor body 1 and the vacuum pump 9. 2 is an oil separator and 3 is an adsorber. The check valve 5, the primary pressure regulator 6, the buffer tank 7, and the secondary pressure regulator 8 are disposed between the pipe 25 and the pipe 26 between the vacuum pump 9 and the compressor body 1.
【００１０】従来は循環ガスは全て 4Ｈe（ヘリウム
４）であったが、本発明では、予冷用のＧＭ冷凍機２１
とＧＭ圧縮機ユニットＢは 4Ｈe（ヘリウム４）が循環
ガスであり、ＪＴ回路とＪＴ圧縮機ユニットＣは 3Ｈe
（ヘリウム３）を循環ガスとして用いている。Conventionally, the circulating gas is all 4 He (helium 4). However, in the present invention, the GM refrigerator 21 for precooling is used.
And GM compressor unit B have 4 He (helium 4) as circulating gas, and JT circuit and JT compressor unit C have 3 He
(Helium 3) is used as the circulating gas.
【００１１】以上の構成であって、作用は次の如くであ
る。運転前の 3Ｈeガス系内は高圧側、低圧側共に 3Ｈe
を所定の同じ圧力で封入してある。制御回路(図示しな
い）の運転スイッチをＯＮにすると、ＧＭ圧縮機ユニッ
トＢとＪＴ圧縮機ユニットＣの圧縮機本体１及び予冷用
ＧＭ冷凍機２１が起動する。With the above configuration, the operation is as follows. Before operation, the inside of the 3 He gas system is 3 He on both the high-pressure side and the low-pressure side.
Are sealed at the same predetermined pressure. When an operation switch of a control circuit (not shown) is turned on, the compressor main body 1 and the pre-cooling GM refrigerator 21 of the GM compressor unit B and the JT compressor unit C are started.
【００１２】ＧＭ圧縮機ユニットＢで約２０kg／cm2Ｇ
まで圧縮された 4Ｈe（ヘリウム４）ガスは、管路２３
を経て冷凍機ユニットＡの予冷用ＧＭ冷凍機２１へ流入
する。予冷用ＧＭ冷凍機２１へ流入した 4Ｈeは低温を
発生させ、１段熱負荷フランジ１１、２段熱負荷フラン
ジ１２を冷却して管路２４を経てＧＭ圧縮機ユニットＢ
内へ吸入される。Approximately 20 kg / cm 2 G with GM compressor unit B
4 He (helium 4) gas compressed to
And flows into the GM refrigerator 21 for precooling of the refrigerator unit A. The 4 He flowing into the precooling GM refrigerator 21 generates a low temperature, cools the first-stage heat load flange 11, the second-stage heat load flange 12, and passes through the pipe 24 to the GM compressor unit B.
Inhaled into.
【００１３】ＪＴ圧縮機ユニットＣ内の圧縮機本体１で
圧縮された 3Ｈe（ヘリウム３）ガスは、約５kg／cm2Ｇ
となり、油分離器２と吸着器３を通ってクリ−ンな 3Ｈ
eとなり、管路２５を経て冷凍機ユニットＡのＪＴ回路
へ流入する。The 3 He (helium 3) gas compressed by the compressor body 1 in the JT compressor unit C is about 5 kg / cm 2 G
And clean 3 H through the oil separator 2 and the adsorber 3.
The flow becomes e, and flows into the JT circuit of the refrigerator unit A via the pipe line 25.
【００１４】ＪＴ回路の 3Ｈeは１段熱交換器１３を通
って、１段熱負荷フランジ１１で冷却され、２段熱交換
器１４を通り、さらに２段熱負荷フランジ１２で冷却さ
れ、３段熱交換器１５、Ｊ−Ｔ弁１６を出たのち、０kg
／cm2Ｇ以下に膨張して２Ｋステ−ジ１８を冷却する。
２Ｋステ−ジ１８を冷却した低圧 3Ｈeは、３段熱交換
器１５、２段熱交換器１４、１段熱交換器１３を通っ
て、高圧で流入する 3Ｈeと熱交換して昇温し、ＪＴ圧
縮機ユニットＣの圧縮機本体１に管路２６を経て吸入さ
れる。 3 He of the JT circuit passes through the first-stage heat exchanger 13, is cooled by the first-stage heat load flange 11, passes through the two-stage heat exchanger 14, and is further cooled by the second-stage heat load flange 12, After leaving the stage heat exchanger 15 and J-T valve 16, 0 kg
The 2K stage 18 is cooled by expanding to less than / cm 2 G.
The low-pressure 3 He that has cooled the 2K stage 18 passes through the three-stage heat exchanger 15, the two-stage heat exchanger 14, and the one-stage heat exchanger 13, exchanges heat with the high-pressure 3 He, and raises the temperature. Then, it is sucked into the compressor main body 1 of the JT compressor unit C via the pipeline 26.
【００１５】その後の運転で、予冷用ＧＭ冷凍機２１の
１段，２段熱負荷フランジ１１，１２が冷却され、１
段，２段，３段熱交換器１３，１４，１５とＪ−Ｔ弁１
６のジュ−ルトムソン効果によって、２Ｋステ−ジ１８
は定常温度に冷却される。この時の定常温度はＪ−Ｔ弁
１６後の圧力に対する飽和温度となり、Ｊ−Ｔ弁１６後
の圧力を０kg／cm2Ｇ以下に減圧することによって、
３．２Ｋ以下の温度が得られる。たとえば、約−０.９k
g／cm2Ｇまで減圧すれば超流動ヘリウム温度（１．８
Ｋ）域の温度が得られる。In the subsequent operation, the first and second heat load flanges 11 and 12 of the precooling GM refrigerator 21 are cooled, and
Stage, two stage, three stage heat exchangers 13, 14, 15 and J-T valve 1
Due to the Joule Thomson effect of 6, the 2K stage 18
Is cooled to a steady temperature. At this time, the steady temperature becomes a saturation temperature with respect to the pressure after the J-T valve 16, and by reducing the pressure after the J-T valve 16 to 0 kg / cm 2 G or less,
Temperatures below 3.2K are obtained. For example, about -0.9k
g / cm 2 G, the superfluid helium temperature (1.8
The temperature in the K) range is obtained.
【００１６】ＪＴ圧縮機ユニットＣの圧力制御の作用
は、吸着器３の部分の 3Ｈeが６kg／cm2Ｇ以上になる
と、１次圧力調整器６が作動し、吐出 3Ｈeガスの一部
をバッファタンク７へ保持し、圧縮機本体１の吸入圧力
が低下すると、２次圧力調整器８が作動し、バッファタ
ンク７の 3Ｈeが供給される。The operation of the pressure control of the JT compressor unit C is such that when the 3 He in the adsorber 3 becomes 6 kg / cm 2 G or more, the primary pressure regulator 6 is activated and a part of the discharged 3 He gas is discharged. Is held in the buffer tank 7 and when the suction pressure of the compressor body 1 decreases, the secondary pressure regulator 8 operates and 3 He of the buffer tank 7 is supplied.
【００１７】この２次圧力調整器８を約１kg／cm2Ｇに
設定し、真空ポンプ９を所定の吸込圧力になるようＪＴ
弁開度によるＪＴ流量を調整すれば約３．２Ｋから約
１．５Ｋまでの任意の冷却温度を得ることができる。The secondary pressure regulator 8 is set at about 1 kg / cm 2 G, and the vacuum pump 9 is set to a predetermined suction pressure so as to attain a predetermined suction pressure.
By adjusting the JT flow rate according to the valve opening, an arbitrary cooling temperature from about 3.2K to about 1.5K can be obtained.
【００１８】また、別な吸込圧力設定方法として、ＪＴ
弁開度によるＪＴ流量に対し、所定の吸込圧力になるよ
うに、ＪＴ圧縮機ユニットＣの運転周波数をインバ−タ
で制御することもできる。As another suction pressure setting method, JT
The operating frequency of the JT compressor unit C can be controlled by an inverter so that a predetermined suction pressure is obtained with respect to the JT flow rate based on the valve opening.
【００１９】[0019]
【発明の効果】冷凍機ユニットＡ、ＧＭ圧縮機ユニット
Ｂ、ＪＴ圧縮機ユニットＣの組合せという簡単な構成か
らなる極低温冷却装置で、ＪＴ回路の循環ガスとして 3
Ｈe（ヘリウム３）を使用し、ＪＴ圧縮機ユニットＣに
真空ポンプと圧縮機本体をシリ−ズに設けて、超流動ヘ
リウム温度（１．８Ｋ）域まで冷却可能となった。特
に、ＪＴ圧縮機ユニットＣの圧力制御において、吸着器
３の所の 3Ｈeが６kg／cm2Ｇ以上になると、１次圧力調
整器６が作動し、吐出 3Ｈeガスの一部をバッファタン
ク７へ保持し、圧縮機本体１の吸入圧力が低下すると、
２次圧力調整器８が作動し、バッファタンク７の 3Ｈe
が供給されるようにし、この２次圧力調整器８を約１kg
／cm2Ｇに設定し、真空ポンプ９を所定の吸込圧力にな
るよう、ＪＴ弁開度によるＪＴ流量を調整することによ
り約３．２Ｋから約１．５Ｋまでの任意の冷却温度を容
易に、また、低消費電力にて得ることができるようにな
った。Refrigerator unit A according to the present invention, GM compressor unit B, and a cryogenic cooling apparatus comprising a simple structure of the combination of JT compressor unit C, 3 as circulating gas JT circuit
Using He (helium 3), a vacuum pump and a compressor body were provided in a series in the JT compressor unit C, and it was possible to cool to a superfluid helium temperature (1.8K) range. In particular, in the pressure control of the JT compressor unit C, when the 3 He at the adsorber 3 becomes 6 kg / cm 2 G or more, the primary pressure regulator 6 operates, and a part of the discharged 3 He gas is transferred to the buffer tank. 7 and when the suction pressure of the compressor body 1 decreases,
The secondary pressure regulator 8 is activated, and 3 He of the buffer tank 7 is
Is supplied, and the secondary pressure regulator 8 is set to about 1 kg.
/ Cm 2 G, and by adjusting the JT flow rate by the JT valve opening so that the vacuum pump 9 has a predetermined suction pressure, an arbitrary cooling temperature from about 3.2K to about 1.5K can be easily achieved. , And can be obtained with low power consumption.
【図１】本発明の 3Ｈe・ＳＴ方式による２Ｋ冷却装置
のフロ−図を示す。FIG. 1 shows a flow diagram of a 2K cooling device according to the present invention using the 3 He · ST method.
Ａ 冷凍機ユニット Ｂ ＧＭ圧縮機ユニ
ット Ｃ ＪＴ圧縮機ユニット １ 圧縮機本体 ２ 油分離器 ３ 吸着器 ４ 圧力計 ５ 逆止弁 ６ １次圧力調整器 ７ バッファタンク ８ ２次圧力調整器 ９ 真空ポンプ 10 圧力計 11 １段熱負荷フランジ 12 ２段熱負荷フラ
ンジ 13 １段熱交換器 14 ２段熱交換器 15 ３段熱交換器 16 Ｊ−Ｔ弁 17 ７〜１５Ｋステ−ジ 18 ２Ｋステ−ジ 19 ４０〜６０Ｋシ−ルド 20 ７〜１５Ｋシ−
ルド 21 予冷用ＧＭ冷凍機 22 真空断熱容器 23，24，25，26 管路A Refrigerator unit B GM compressor unit C JT compressor unit 1 Compressor body 2 Oil separator 3 Adsorber 4 Pressure gauge 5 Check valve 6 Primary pressure regulator 7 Buffer tank 8 Secondary pressure regulator 9 Vacuum pump 10 Pressure gauge 11 1st stage heat load flange 12 2nd stage heat load flange 13 1st stage heat exchanger 14 2nd stage heat exchanger 15 3rd stage heat exchanger 16 J-T valve 17 7-15K stage 18 2K stage 19 40-60K shield 20 7-15K shield
Field 21 GM refrigerator for precooling 22 Vacuum insulated container 23, 24, 25, 26 Pipe line
Claims (1)
れにＪＴ回路と組合せた冷凍機ユニット(Ａ)に、ＧＭ圧
縮機ユニット(Ｂ)とＪＴ圧縮機ユニット(Ｃ)とを管路(2
3，24)及び管路(25，26)でそれぞれ接続し、 ＪＴ回路の循環ガスとして 3Ｈeを、又予冷用のＧＭ冷
凍機(21)の循環ガスとして 4Ｈeを使用し、 前記ＪＴ圧縮機ユニット(Ｃ)は直列に配置された１段の
真空ポンプ(９)と１段の圧縮機本体(１)及びＪＴ回路と
ＪＴ圧縮機ユニット(Ｃ)とを接続する管路（25と26）間
に配設された１次圧力調整器(６)と２次圧力調整器(８)
とにより、ＪＴ回路の低圧側を負圧保持し、かつＪＴ回
路の高圧側を所定の吐出圧力に保持可能とし、 前記ＪＴ圧縮機ユニット(Ｃ)の真空ポンプ(９)と圧縮機
本体(１)に圧縮比の高いスクロ−ル式を使用したことを
特徴とする極低温冷却装置。A GM refrigerator (21) is used as a pre-cooler, and a GM compressor unit (B) and a JT compressor unit (C) are connected to a refrigerator unit (A) combined with a JT circuit. Road (2
3 and 24) and pipes (25 and 26), respectively, using 3 He as a circulating gas for the JT circuit and 4 He as a circulating gas for the GM refrigerator (21) for pre-cooling. The compressor unit (C) has a one-stage vacuum pump (9) and a one-stage compressor body (1) arranged in series, and a pipeline (25 and 26) connecting the JT circuit and the JT compressor unit (C). ) Primary pressure regulator (6) and secondary pressure regulator (8) disposed between
Thus, the low pressure side of the JT circuit can be maintained at a negative pressure, and the high pressure side of the JT circuit can be maintained at a predetermined discharge pressure. The vacuum pump (9) of the JT compressor unit (C) and the compressor body (1) ) A cryogenic cooling device characterized by using a scroll type with a high compression ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26959197A JPH11108476A (en) | 1997-10-02 | 1997-10-02 | Cryostatic cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26959197A JPH11108476A (en) | 1997-10-02 | 1997-10-02 | Cryostatic cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11108476A true JPH11108476A (en) | 1999-04-23 |
Family
ID=17474501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26959197A Pending JPH11108476A (en) | 1997-10-02 | 1997-10-02 | Cryostatic cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11108476A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333273A (en) * | 2006-06-14 | 2007-12-27 | Taiyo Nippon Sanso Corp | Dilution refrigerator |
| JP2013024554A (en) * | 2011-07-21 | 2013-02-04 | Coldedge Technologies Inc | Cryogen-free cooling system for electron paramagnetic resonance spectrometer |
| CN104236153A (en) * | 2013-06-09 | 2014-12-24 | 中国科学院理化技术研究所 | Small throttling refrigeration system with liquid helium temperature zone |
-
1997
- 1997-10-02 JP JP26959197A patent/JPH11108476A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333273A (en) * | 2006-06-14 | 2007-12-27 | Taiyo Nippon Sanso Corp | Dilution refrigerator |
| JP2013024554A (en) * | 2011-07-21 | 2013-02-04 | Coldedge Technologies Inc | Cryogen-free cooling system for electron paramagnetic resonance spectrometer |
| CN104236153A (en) * | 2013-06-09 | 2014-12-24 | 中国科学院理化技术研究所 | Small throttling refrigeration system with liquid helium temperature zone |
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