JPH108240A - Vacuum vapor deposition device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To evaporate a metallic film of a required thickness by evaporation on a band material by maintaining the evaporation of normal material vapor. SOLUTION: A shielding plate 1 is obliquely mounted below a molten metal surface 42 existing at the stationary level L1 in a crucible 51 to form a narrow dross shielding gap g2 between the inclined top end of this shielding plate 1 and the side wall of the crucible 51. A dross-passing gap g1 is formed between the inclined bottom end of the shielding plate 1 and the side wall of the crucible 51 and the device is provided with a lift 2 for lifting a melting furnace 54, therefore, even if the dross 41a gathers at the molten metal surface 42 existing at the stationary level L1 , the melting furnace 54 is lowered by a lifting device 2 to allow the molten metal 40 to pass the dross- passing gap g1 together with the dross 41a, by which the molten metal is lowered down to a refuge level L2 . Further, the molten metal surface 42 is risen again up to the stationary level L1 to shield the dross 41a with the inclined rear surface of the shielding plate 1. The dross 41a is then moved and gathered to the inclined top end, by which the dross 41a is moved and gathered to the inclined top end side. The gathering of the dross 41a to the molten metal surface 42 existing at the stationary level L1 is thereby prevented. The evaporation of the normal metal evaporation is thus maintained and the metal film of the required thickness is deposited by evaporation on the steel sheet.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum vapor deposition apparatus for vapor-depositing a metal film on a running material to be deposited in a substantially vacuum state.

[0002]

2. Description of the Related Art A conventional vacuum deposition apparatus will be described with reference to FIG. FIG. 12 shows a longitudinal section of a conventional vacuum evaporation apparatus.

In FIG. 12, reference numeral 51 denotes a crucible, and an induction heater 52 is mounted around the crucible 51, and the crucible 51 is housed in a vacuum chamber 61. The vacuum chamber 61 is provided with a steel strip carry-in path 63 and a steel strip take-out path 64. Further, a melting furnace 54 is provided below the outside of the vacuum chamber 61, and the melting furnace 54 is connected to the crucible 51 via a suction pipe 53 penetrating the vacuum chamber 61.

A heat insulation box 58 is provided with slits 58a through which a steel strip 50 passes, on the upper and lower surfaces of the heat insulation box 58, and a heater 59 is provided inside the heat insulation box 58. The heat insulation box 58 is provided inside the vacuum chamber 61.
Reference numeral 56 denotes a vapor deposition path. The vapor deposition path 56 is a traveling path of the steel strip 50 and is bifurcated so that the opening 56a is opposed to the vapor deposition path.
Further, the vapor deposition path 56 is connected to the crucible 51 via a shutter 57 and a supply pipe 55 penetrating the heat insulation box 58. An exhaust pipe 62 is connected to a vacuum suction device (not shown).

For example, while melting a metal such as Mg or Zn into a molten metal 40 by a melting furnace 54,
The inside of the vacuum chamber 8 is heated by the heater 59, and the inside of the vacuum chamber 61 is sucked from the exhaust pipe 62 to reduce the pressure to a substantially vacuum state of, for example, 10 ⁻³ torr. Due to the pressure difference between the inside and outside of the vacuum chamber 61, the molten metal 40 in the melting furnace
3 into the crucible 51, the molten metal 40 is heated to a required temperature by the induction heater 52 to evaporate the metal vapor 40a, and the metal vapor 4a is supplied from the supply pipe 55 and the shutter 57.
0a is supplied to the vapor deposition path 56 and discharged from both the openings 56a. And, the steel strip 5 having a lower temperature than the metal vapor 40a.
The steel strip 50 travels between the two openings through the steel strip carry-in path 63 and the slit 58a of the heat insulating box 58, and the metal vapor 40a is vapor-deposited on both sides of the steel strip 50 and is carried out from the steel strip take-out path 64.

[0006]

However, in the conventional vacuum vapor deposition apparatus, the dross 41a generated below the molten metal surface 42 in the molten metal 40 floats and gathers to form the molten metal surface 4.
Thus, the evaporation area of No. 2 was narrowed to prevent the evaporation of the metal vapor 40a. For this reason, the amount of metal vapor 40a supplied to the opening 56a of the vapor deposition path 56 and the amount of vapor deposition on the steel strip 50 are reduced, which may hinder the formation of the metal film.

[0007] Further, the conventional vacuum vapor deposition apparatus includes a crucible 51.
Since the molten metal in the crucible 51 is heated from the periphery of the outer wall by the induction heater 52 to evaporate the metal vapor 40a, most of the splash 41b is generated on the evaporation surface 42 near the inner wall of the crucible 51. , Metal vapor 4
The splash 41b passes through the supply path 55, the shutter 57, and the vapor deposition path 56 together with 0a, and is discharged from the opening 56a. For this reason, the openings 56a of both the vapor deposition paths 56
Between the steel strip 50 splash 41b running between
In some cases, the quality of the strip 50 was significantly reduced.

[0008]

According to a first aspect of the present invention, there is provided a vacuum evaporation apparatus comprising: a vacuum chamber having a metal evaporation tank provided therein; and a metal evaporation tank provided outside the vacuum chamber. A vacuum deposition apparatus in which a lower metal melting furnace is connected by a suction pipe, and a deposition chamber in which a material to be deposited travels is provided above the metal evaporation tank in the vacuum chamber. A shielding plate is inclined and mounted on the lower surface of the molten metal at a steady level, and a narrow dross shielding gap is formed between the inclined upper end of the shielding plate and the side wall of the metal evaporation tank. A dross passage gap is formed between the side wall of the metal evaporation tank and a molten metal surface elevating means for elevating and lowering the molten metal surface.

According to a second aspect of the present invention, there is provided a vacuum evaporation apparatus having a metal evaporation tank provided in a vacuum chamber and a molten metal in the metal evaporation tank being heated by an induction heater. A vacuum evaporation apparatus for heating and evaporating metal vapor from an evaporation surface and evaporating the vapor on a band to be evaporated, wherein a splash shielding plate for forming a required evaporation surface distance with an inner wall surface of the metal evaporation tank has a lower end. Is provided in a state of being immersed in the molten metal.

[0010] In order to solve the above-mentioned problem, the structure of a vacuum evaporation apparatus according to claim 3 of the present invention comprises a metal evaporation tank,
A metal vapor supply path connected above the metal vapor evaporation surface of the metal vaporization tank, and a band vapor deposition unit connected to the metal vapor supply path, a vacuum vapor deposition apparatus having a vacuum chamber built therein.
A dross receiving portion is provided at a lower portion of the metal vapor supply path, and a dross scooping plate is provided so as to rotate from a position where it is immersed in the molten metal in the metal evaporation tank to the dross receiving portion. .

According to a fourth aspect of the present invention, there is provided a vacuum evaporation apparatus comprising: a vacuum evaporation chamber provided with a metal evaporation tank; A vacuum evaporation apparatus in which a furnace is connected by a suction pipe, and a deposition chamber in which the material to be deposited travels is provided above the metal evaporation tank in the vacuum chamber; A shielding plate is attached to the lower surface of the metal at an angle, and a narrow dross shielding gap is formed between the inclined upper end of the shielding plate and the side wall of the metal evaporation tank,
A dross passage gap is formed between the inclined lower end of the shielding plate and the side wall of the metal evaporation tank, and a molten metal surface elevating means for elevating and lowering the molten metal surface is provided. A splash shield plate for forming a required evaporation surface distance is provided with its lower end immersed in the molten metal.

According to a fifth aspect of the present invention, there is provided a vacuum evaporation apparatus having a metal evaporation tank provided in a vacuum chamber, and a metal evaporation tank provided above a metal vapor evaporation surface of the metal evaporation tank. A vapor supply path is connected, the metal evaporation tank and the metal melting furnace below the vacuum chamber are connected by a suction pipe, and a vapor deposition chamber in which the material to be vaporized travels above the metal evaporation tank in the vacuum chamber. In the vacuum evaporation apparatus provided in the metal evaporation tank, a shielding plate is inclined and mounted on the lower surface of the molten metal at a steady level in the metal evaporation tank, and between the inclined upper end of the shielding plate and the side wall of the metal evaporation tank. While forming a narrow dross shielding gap, a dross passing gap is formed between the inclined lower end of the shielding plate and the side wall of the metal evaporation tank, and a molten metal surface elevating means for elevating and lowering the molten metal surface is provided. At the bottom of the steam supply channel Provided with a loss receiving portion, characterized in that the dross scoop up plate provided from a position immersed in the molten metal of the metal evaporating tank to rotate into the dross receptacle.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a vacuum deposition apparatus according to the present invention, the inside of a vacuum chamber is depressurized to a substantially vacuum, and a molten metal melted in a metal melting path is caused by a pressure difference between the inside and the outside of the vacuum chamber. To a metal evaporator tank. The metal vapor is evaporated from the molten metal by the metal evaporation tank, supplied to the vapor deposition chamber, and vapor-deposited on the traveling strip to form a required metal film.

When the dross collects on the molten metal surface in the metal evaporation tank and evaporates the metal vapor with the elapse of the evaporation time, the molten metal is passed through the dross passage gap and the dross shielding gap by the molten metal surface elevating means. Then, the molten metal surface is lowered from the steady level to the retreat level. When the molten metal surface is raised to the steady level again by the molten metal surface elevating means, most of the dross floating on the molten metal surface hits the lower surface of the shielding plate and gathers at the upper end of the slope, so that the dross cannot pass through. Shielded by In this way, most of the dross on the molten metal surface at steady levels is removed, maintaining normal metal vapor generation.

In the vacuum evaporation apparatus according to the second aspect, the inside of the vacuum chamber is reduced to a substantially vacuum, the molten metal in the metal evaporation tank is heated to a required temperature by an induction heater, and the metal vapor is evaporated from the evaporation surface. Then, a metal vapor is vapor-deposited on the strip running through the strip deposition section to form a required metal coating.

During the evaporation of the metal vapor, a splash is generated from the evaporation surface together with the metal vapor. In the method in which the molten metal in the metal evaporation tank is heated by an induction heater, most of the splash is formed on the inner wall of the metal evaporation tank. Since the splash is generated in the vicinity, the splash is shielded by the splash shielding plate. In this way, most of the splash evaporating with the metal vapor is removed to prevent adhesion to the strip.

In the vacuum vapor deposition apparatus according to the third aspect, the pressure in the vacuum chamber is reduced to substantially a vacuum, the dross scooping plate is immersed in the molten metal in the metal evaporation tank, and the metal vapor is discharged from the molten metal in the metal evaporation tank. The strip is evaporated and supplied to the strip evaporation section from the metal steam supply path, and the required strip is formed by depositing metal vapor on the running strip.

When the dross generated in the molten metal rises with the evaporation of the metal vapor and gathers on the evaporation surface of the metal vapor to prevent the evaporation of the metal vapor, the dross scooping plate immersed in the molten metal is turned upward. The dross is moved to scoop up the dross, and is rotated to the position above the dross receiver to drop the dross onto the dross receiver and transferred. In this manner, most of the dross generated and levitated in the molten metal and gathered on the metal vapor evaporation surface is removed to maintain normal evaporation of the metal vapor.

In the vacuum vapor deposition apparatus according to the fourth aspect, the degree of immersion at the lower end of the splash shielding plate can be adjusted by changing the molten metal surface by the molten metal surface raising / lowering means. Further, in the vacuum evaporation apparatus according to claim 5,
With the molten metal surface lowered by the molten metal surface elevating means below the lower rotation position of the scooping plate, rotate the scooping plate to the lower position, raise the molten metal surface by the molten metal surface elevating means, and then scoop. By rotating the take up plate,
Dross can be completely scooped.

[0020]

FIG. 1 is a longitudinal section of a vacuum evaporation apparatus according to a first embodiment of the present invention, FIG. 2 is an enlarged longitudinal section of a crucible and a melting furnace in FIG. 1, and FIGS. 2 is a vertical cross-section showing the lowering of the molten metal surface in 2 to the retreat level and the return to the steady level. The illustrated first embodiment corresponds to claim 1. Note that the same members and portions as those of the vacuum evaporation apparatus shown in FIG. 12 are denoted by the same reference numerals, and redundant description is omitted.

In FIGS. 1 and 2, reference numeral 51 denotes a crucible as a metal evaporating tank. An induction heater 52 is mounted around the crucible 51, and a lower end of the crucible 51 is immersed in a melting furnace 54 by suction. A tube 53 is mounted. Crucible 5
Below the molten metal surface 42 of the steady level L1 in _1, the shielding plate 1 is mounted in an inclined manner. Between the side walls of the inclined bottom and the crucible 51 of the shielding plate 1 is formed dross passage gap g _1, narrow dross shield gap g ₂ is formed between the side wall of the inclined upper and crucible 51 of the shielding plate 1 ing.

On the lower surface of the melting furnace 54, an elevating device 2 as a molten metal surface elevating means provided with an elevating cylinder 3 and a guide 4 is provided. The lifting device 2 by elevating the melting furnace 54, is adapted to move the molten metal surface 42 of the crucible 51 between the steady-state level L ₁ and a retracted level L _2. Adjusting means for adjusting the air pressure in the vacuum chamber 61 is provided as the molten metal surface elevating means, and the adjusting means adjusts the air pressure in the vacuum chamber 61 to adjust the molten metal surface 4.
2 may be moved.

The other structure is the same as that of the vacuum evaporation apparatus shown in FIG. When the degree of vacuum in the evaporating chamber changes in accordance with the opening and closing of the shutter 57, operation control, and the like, the molten metal surface 42 moves up and down. However, since the molten metal surface 42 is preferably constant, the gap in the longitudinal direction of the crucible 51 is increased. In addition, a thermocouple is provided, the level of the molten metal surface 42 is detected by a change in temperature, and the elevating device 2 is controlled by the detection signal to move the melting furnace 54 up and down so that the molten metal surface 42 is kept constant.

The operation of the above-described vacuum deposition apparatus will be described with reference to FIGS.

As shown in FIG. 1, the inside of the heat insulating box 58 is heated by the heater 59, it sucks the vacuum chamber 61 by the vacuum suction device (not shown) from the exhaust pipe 62, the inside of the vacuum chamber 61 for example 10 ^-3 torr The pressure is reduced to a substantially vacuum state. The molten metal 40 in the melting furnace 54 is moved from the suction pipe 53 to the crucible 5 by the pressure difference between the inside and the outside of the vacuum chamber 61.
Siphoning to a steady level L ₁ in 1, by heating the crucible 51 by induction heater 52 to evaporate the metal vapor 40a,
The metal vapor 40a is supplied from the supply pipe 55 and the shutter 57 to the forked vapor deposition path 56.

The steel strip 50 having a lower temperature than the metal vapor 40a is supplied to both the openings 56 for discharging the metal vapor 40a.
a, and the metal vapor 40a is deposited on the steel strip 50 to form a metal coating having a required thickness.

As shown in FIG. 2, the molten metal surface 42 at the steady level L ₁ in the crucible 51 with the elapse of the deposition time.
The dross 41a floats below and gathers to prevent evaporation of the metal vapor 40a. When evaporation of the metal vapor 40a is prevented, as shown in FIG. 3, it lowers the melting furnace 54 by the lifting device 2 to the molten metal surface 42 to the height of the retraction level L ₂ from a steady level L _1. Thus, the molten metal surface 42 on the steady-state level L ₁ passes through the dross passage gaps g ₁ and dross shield gap g _2, suction pipe molten metal surface 42 5
To the retracted level L ₂ of the 3 is lowered. At this time, dross 4
1a passes through the dross passage gap g _1.

[0028] Then, as shown in FIG. 4, when raising the melting furnace 54 again raise the molten metal surface 42 to a steady level L ₁ by the lifting device 2, the molten metal surface 42 dross shield gap g ₂ rises Only the molten metal 40 above is passed to shield the dross 41a. Therefore, most of the dross 41 a floating on the molten metal surface 42 is concentrated on the upper end side of the slope when the lower surface of the shield plate 1 is inclined. In this way,
Dross 4 floated on the molten metal surface 42 on the steady-state level L ₁
1a is mostly removed and the metal vapor 40
Maintain the evaporation of a.

[0029] In a vacuum vapor deposition apparatus described above, the shielding plate 1 below the molten metal surface 42 on the steady-state level L ₁ in the crucible 51
With an inclined by mounting, to form a narrow dross shield gap g ₂ between the side wall of the inclined upper and crucible 51 of the shielding plate 1,
Between the side wall of the inclined lower end crucible 51 of the shielding plate 1 to form a dross passage gap g _1, is provided with the lifting device 2 for raising and lowering the melting furnace 54, dross in the molten metal surface 42 on the steady-state level L ₁ even 41a is set, by the lifting device 2 to lower the melting furnace 54, molten metal 40 is lowered to the retracted level L ₂ is passed through the dross passage gap g ₁ with dross 41a, further, the molten metal surface 42 again is raised to steady-state level L ₁ dross 41a shielded by the inclined lower surface of the shielding plate 1, it can be collected by moving the dross 41a on the inclined upper side.

Therefore, the molten metal surface 4 at the steady level L ₁
This makes it possible to prevent the dross 41a from accumulating in the metal strip 2 and maintain a normal evaporation of the metal vapor 40a, thereby depositing a metal coating of a required thickness on the steel strip 50.

A second embodiment of the present invention will be described with reference to FIGS. FIG. 5 is a longitudinal section of a vacuum evaporation apparatus according to a second embodiment of the present invention, FIG. 6 is an enlarged longitudinal section of the crucible in FIG. 5, and FIG. 7 is a view taken along line VII-VII in FIG. Is shown. The illustrated second embodiment corresponds to claim 2. Note that the same members and parts as those of the conventional vacuum evaporation apparatus shown in FIG. 12 and the vacuum evaporation apparatus according to the first embodiment shown in FIGS. Omitted.

In the figure, a splash shield plate 5 for forming a required evaporation surface distance from the inner wall surface is provided in the crucible 51, and the splash shield plate 5 is interposed between the crucible 51 and the supply path 55 via the flange 6. Have been. The lower end of the splash shielding plate 5 is immersed in the molten metal 40 in the crucible 51.

The other structures are the same as those of the vacuum evaporation apparatus shown in FIG. 12 and the vacuum evaporation apparatus according to the first embodiment shown in FIGS. The operation of the above-described vacuum deposition apparatus will be described.

[0034] Similar to the first embodiment, the inside of the heat insulating box 58 is heated by the heater 59, the exhaust pipe 62 sucks the vacuum chamber 61 by the vacuum suction device (not shown) from the inside of the vacuum chamber 61, for example, 10 ^-3 The pressure is reduced to a substantially vacuum state of torr. The molten metal 40 in the melting furnace 54 is moved from the suction pipe 53 to the crucible 5 by the pressure difference between the inside and the outside of the vacuum chamber 61.
Siphoning to a steady level L ₁ in 1, by heating the crucible 51 by induction heater 52 to evaporate the metal vapor 40a,
The metal vapor 40a is supplied from the supply pipe 55 and the shutter 57 to the forked vapor deposition path 56.

Then, the steel strip 50 having a lower temperature than the metal vapor 40a is supplied to both the openings 56 for discharging the metal vapor 40a.
a, and the metal vapor 40a is deposited on the steel strip 50 to form a metal coating having a required thickness.

During the evaporation of the metal vapor 40a, a splash 41b is generated from the metal evaporation surface 42 together with the metal vapor 40a. The molten metal 40 in the crucible 51 is heated by an induction heater 52.
When heating is performed, most of the splash 41 b is generated near the inner wall of the crucible 51, so that the generated splash 41 b is shielded by the splash shielding plate 5. Thus, the metal vapor 4
Most of the splash 41b that evaporates together with 0a can be removed, and adhesion of the splash 41b to the strip 50 can be prevented.

In the above-described vacuum evaporation apparatus, the splash shielding plate 5 for forming a required evaporation surface distance from the inner wall surface of the crucible 51 is provided so that its lower end is immersed in the molten metal 40. Most of the splash 41 b generated in the above can be shielded by the splash shield plate 5. Therefore, most of the splash 41b generated in the crucible 51 is removed from the metal vapor 40a to prevent the splash 41b from adhering to the strip 50, and the quality of the strip 50 can be improved.

The generation of the splash 41b is not peculiar to induction heating. In the case of heating from the side of the crucible 51, the splash 41b is generated near the inner wall of the crucible 51.
1b occurs. As the heating means, an electric heater or the like is used in addition to the induction heater 52.

In the above-described vacuum vapor deposition apparatus, the melting furnace 54 can be moved up and down by the elevating device 2. By raising and lowering the melting furnace 54, the degree of immersion of the splash shield plate 5 in the molten metal 40 can be adjusted (claim 4).

A third embodiment of the present invention will be described with reference to FIGS. 8 is a longitudinal section of a vacuum evaporation apparatus according to the third embodiment of the present invention, FIG. 9 is an enlarged longitudinal section of the crucible and the scooping plate in FIG. 8, and FIG. 10 is a line XX in FIG. The visual state is shown. The illustrated third embodiment corresponds to claim 3. The same members and parts as those of the conventional vacuum evaporation apparatus shown in FIG. 12 and the vacuum evaporation apparatuses according to the first and second embodiments shown in FIGS. The description is omitted.

8 and 9, the supply pipe 15 is connected above the crucible 51, and the supply pipe 15 is disposed in the heat insulation box 58. Supply pipe 15 inside heat insulation box 58
The scooping plate rotation chamber 16 and the dross receiving portion 17
Is provided. Reference numeral 11 denotes a scooping plate. The scooping plate 11 rotates around a rotation shaft 14 rotatably supported by a bearing 18 that penetrates the scooping plate rotation chamber 16 and inside the scooping plate rotation chamber 16. Frame 12 fixed to a rotating shaft 14 so as to move
And a metal wire mesh 13 of, for example, a 2 mm mesh attached to the frame 12. Note that ceramics can be used instead of the metal wire mesh 13.

The other structures are the same as those of the vacuum evaporation apparatus shown in FIG. 12 and the vacuum evaporation apparatuses according to the first and second embodiments shown in FIGS. The operation of the above-described vacuum deposition apparatus will be described.

As shown in FIG. 8, the inside of the heat insulating box 58 is heated by the heater 59, it sucks the vacuum chamber 61 by the vacuum suction device (not shown) from the exhaust pipe 62, the inside of the vacuum chamber 61 for example 10 ^-3 torr The pressure is reduced to a substantially vacuum state. Then, the scooping plate 11 is turned down into the crucible 51 and lowered, and the molten metal 40 in the melting furnace 54 is drawn into the suction pipe 53 by the pressure difference between the inside and the outside of the vacuum chamber 61.
The metal vapor 40a is sucked up to the metal evaporation surface 42 in the crucible 51, heated by the induction heater 52 to evaporate the metal vapor 40a, and the scooping plate rotating chamber 16, the supply path 15, and the shutter 5
The metal vapor 40a is supplied to the vapor deposition path 56 which is divided into two from 7
Supply.

Then, the strip 50 having a temperature lower than that of the metal vapor 40a is introduced from the slit 58a, and is run between the two openings 56a discharging the metal vapor 40a.
A metal vapor 40a is deposited on the substrate to form a metal film having a required thickness.

As shown in FIG. 9, when the dross 41a generated in the molten metal 40 together with the evaporation of the metal vapor 40a gathers on the metal evaporation surface 42 and hinders the evaporation of the metal vapor 40a.
The scooping plate 11 immersed in the molten metal 40 is rotated upward to scoop the dross 41 a with the wire net 13. Further, the scooping plate 11 is rotated to a position above the dross receiving portion 17, and the dross 41a is dropped onto the dross receiving portion 17 and transferred.

In this way, most of the dross 41a gathered on the metal evaporation surface 42 of the molten metal 40 is removed, and normal evaporation of the metal vapor 40a is maintained. Dross 41
a is generated in a remarkably large amount at the start of the apparatus, and when the operation is shifted to the normal operation, the generation of the dross 41a is reduced.

In the above-described vacuum evaporation apparatus, the dross receiving portion 17 is provided below the supply path 15 and the scooping plate 1 is provided.
1 is provided so as to rotate from the position where it is immersed in the molten metal 40 in the crucible 51 to the dross receiving portion 17, so that the dross 41 a gathers on the metal evaporation surface 42 to reduce the evaporation area, and the evaporation amount of the metal vapor 40 a Even if is reduced, the scooping plate 11 immersed in the molten metal 40 in the crucible 51 can be rotated upward to scoop up the dross 41a and transfer it to the dross receiving portion 17. Therefore, it is possible to prevent the dross 41a from gathering on the metal evaporation surface 42, and it is possible to deposit a metal film of a required thickness on the steel strip 50 while maintaining normal evaporation of the metal vapor 40a.

In the above-described vacuum vapor deposition apparatus, the melting furnace 54 can be moved up and down by the elevating device 2. For this reason, the melting furnace 54 is lowered by the elevating device 2, and the scooping plate 11 is rotated to the lower position with the metal evaporation surface 42 being lower than the lower rotation position of the scooping plate 11. After raising the melting furnace 54 to raise the metal evaporation surface 42, the dross 41a can be completely scooped by rotating the scooping plate 11 upward (claim 5).

As shown in FIG. 11, the crucible 51 may be provided with both the shielding plate 1 and the splash shielding plate 5. Thereby, both the dross 41a and the splash 41b can be removed.

[0050]

According to the vacuum vapor deposition apparatus of the present invention, a shield plate is mounted obliquely below the molten metal surface at a steady level in the metal evaporation tank, and the inclined upper end of the shield plate and the side wall of the metal evaporation tank are connected. Since a narrow dross shielding gap is formed between the lower end of the shielding plate and a side wall of the metal evaporation tank, a dross passing gap is formed between the lower end of the shielding plate and the molten metal surface raising / lowering means. Even if the dross gathers, the molten metal is raised by the molten metal surface elevating means together with the dross through the dross passage gap and lowered to the evacuation level, and the molten metal surface is raised again to the steady level and the dross is shielded. The dross can be collected by moving the dross to the upper end of the slope by shielding it with the inclined lower surface. As a result, it becomes possible to prevent dross from accumulating on the molten metal surface at a steady level, and it is possible to deposit a metal film of a required thickness on a strip while maintaining normal evaporation of metal vapor. .

Further, in the vacuum vapor deposition apparatus of the present invention, the splash shielding plate for forming the required evaporation surface distance from the inner wall surface of the metal evaporation tank is provided so that its lower end is immersed in the molten metal 40. Splash is generated together with the metal vapor when the metal evaporates from the evaporation surface of the molten metal.However, in the method in which the inside of the metal evaporation tank is heated from the side by an induction heater etc., most of the splash occurs near the inner wall of the metal evaporation tank Therefore, the splash can be shielded by the splash shield plate. As a result, most of the splash generated in the metal evaporation tank is removed from the metal vapor to prevent the metal vapor from adhering to the strip, thereby improving the quality of the strip.

In the vacuum evaporation apparatus of the present invention, a dross receiving portion is provided below the metal vapor supply passage, and the dross scooping plate is rotated from a position where the dross scooping plate is immersed in the molten metal in the metal evaporating tank to the dross receiving portion. Even if the dross gathers on the metal evaporation surface and the evaporation area decreases, the amount of evaporation of metal vapor decreases, the dross scooping plate immersed in the molten metal in the metal evaporation tank is raised upward. , The dross can be scooped up and transferred to the dross receiving portion. As a result, it is possible to prevent dross from accumulating on the metal evaporation surface, and it is possible to deposit a metal film of a required thickness on the strip while maintaining normal evaporation of the metal vapor.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a vacuum evaporation apparatus according to a first embodiment of the present invention.

FIG. 2 is an enlarged longitudinal sectional view of a crucible and a melting furnace in FIG.

FIG. 3 is a longitudinal sectional view showing the lowering of a molten metal surface to a retreat level.

FIG. 4 is a longitudinal sectional view showing a return of a molten metal surface to a steady level.

FIG. 5 is a longitudinal sectional view of a vacuum evaporation apparatus according to a second embodiment of the present invention.

6 is an enlarged longitudinal sectional view of the crucible in FIG.

FIG. 7 is a view taken along line VII-VII in FIG. 6;

FIG. 8 is a longitudinal sectional view of a vacuum evaporation apparatus according to a third embodiment of the present invention.

9 is an enlarged longitudinal sectional view of the crucible and the scooping plate in FIG.

FIG. 10 is a view taken along line XX in FIG. 9;

FIG. 11 is a cross-sectional view illustrating another embodiment of a crucible.

FIG. 12 is a longitudinal sectional view of a conventional vacuum evaporation apparatus.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 shielding plate 2 lifting device 3 lifting cylinder 4 guide 5 splash shielding plate 6 flange 11 scooping plate 12 frame 13 wire mesh 14 rotation shaft 15 supply path 16 scooping plate rotation chamber 17 dross receiving part 18 bearing 40 molten metal 40a metal steam 41a dross 41b splash 42 induction melting metal surface 50 steel strip 51 the crucible 52 heater 53 melting furnace 55 feed pipe 57 the shutter 61 the suction tube 54 the vacuum chamber g ₁ dross passage gap g ₂ dross shield gap L ₁ constant level L ₂ saving level

Continued on the front page (72) Inventor Naohiko Matsuda 4-2-2 Kannonshinmachi, Nishi-ku, Hiroshima-shi, Hiroshima Inside the Hiroshima Research Laboratory, Mitsubishi Heavy Industries, Ltd. (72) Keiji Tanizaki 4-6-1 Kannonshinmachi, Nishi-ku, Hiroshima-shi, Hiroshima No. 22 Hiroshima Research Laboratory, Mitsubishi Heavy Industries, Ltd.

Claims (5)

[Claims] A vacuum chamber is provided with a metal evaporation tank, and the metal evaporation tank is connected to a metal melting furnace below the vacuum chamber by a suction pipe. A vacuum evaporation apparatus provided above the metal evaporation tank in the metal evaporation tank, wherein a shielding plate is inclinedly mounted on a lower surface of the molten metal at a steady level in the metal evaporation tank, and an inclined upper end of the shielding plate and the metal A molten metal surface that forms a narrow dross shielding gap between the side wall of the evaporation tank and a dross passage gap between the inclined lower end of the shielding plate and the side wall of the metal evaporation tank and raises and lowers the molten metal surface A vacuum evaporation apparatus comprising a lifting means. 2. A vacuum vapor deposition apparatus in which a metal evaporating tank is provided in a vacuum chamber, a molten metal in the metal evaporating tank is heated by an induction heater, and a metal vapor is evaporated from an evaporation surface to vapor-deposit on a strip to be vapor-deposited. A vacuum evaporation apparatus, wherein a splash shielding plate for forming a required evaporation surface distance with an inner wall surface of the metal evaporation tank is provided with a lower end immersed in the molten metal. 3. A vacuum in which a metal evaporation tank, a metal vapor supply path connected above a metal vapor evaporation surface of the metal evaporation tank, and a band material deposition section connected to the metal vapor supply path are provided in a vacuum chamber. In a vapor deposition apparatus, a dross receiving portion is provided at a lower portion of the metal vapor supply path, and a dross scooping plate is provided so as to rotate from a position where it is immersed in molten metal in the metal evaporation tank to the dross receiving portion. A vacuum deposition apparatus. 4. A vacuum evaporation chamber provided with a metal evaporation tank, the metal evaporation tank and a metal melting furnace located outside the vacuum chamber are connected by a suction pipe, and the evaporation chamber in which the material to be evaporated travels is formed in the vacuum chamber. A vacuum evaporation apparatus provided above the metal evaporation tank in the metal evaporation tank, wherein a shielding plate is inclinedly mounted on a lower surface of the molten metal at a steady level in the metal evaporation tank, and an inclined upper end of the shielding plate and the metal A molten metal surface that forms a narrow dross shielding gap between the side wall of the evaporation tank and a dross passage gap between the inclined lower end of the shielding plate and the side wall of the metal evaporation tank and raises and lowers the molten metal surface A vacuum evaporating apparatus, wherein the elevating means is provided, and a splash shield plate for forming a required evaporating surface distance with the inner wall surface of the metal evaporating tank is provided with its lower end immersed in the molten metal. 5. A vacuum chamber provided with a metal evaporation tank, a metal vapor supply passage connected above a metal vapor evaporation surface of the metal evaporation tank, and a metal melting furnace located outside the vacuum chamber and below the vacuum chamber. Are connected by a suction pipe, a vacuum deposition apparatus provided with a vapor deposition chamber in which the material to be vaporized travels above the metal evaporation tank in the vacuum chamber, wherein a steady level molten metal in the metal evaporation tank is provided. A shielding plate is inclinedly mounted on the lower surface to form a narrow dross shielding gap between the inclined upper end of the shielding plate and the side wall of the metal evaporation tank, and the inclined lower end of the shielding plate and the side wall of the metal evaporation tank. A molten metal surface elevating means for elevating and lowering the molten metal surface while forming a dross passing gap between the metal evaporation tank and a dross scooping plate provided at the lower portion of the metal vapor supply path. To the molten metal in the A vacuum vapor deposition device provided so as to rotate from a dipping position to the dross receiving portion.