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JPH10270836A - Solder plating method for spherule - Google Patents

Solder plating method for spherule

Info

Publication number
JPH10270836A
JPH10270836A JP9094958A JP9495897A JPH10270836A JP H10270836 A JPH10270836 A JP H10270836A JP 9094958 A JP9094958 A JP 9094958A JP 9495897 A JP9495897 A JP 9495897A JP H10270836 A JPH10270836 A JP H10270836A
Authority
JP
Japan
Prior art keywords
solder
plating
hydrogen
film
solder plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9094958A
Other languages
Japanese (ja)
Other versions
JP3837446B2 (en
Inventor
Masako Ikegami
雅子 池上
Fumiaki Kikui
文秋 菊井
Shigeki Hamada
隆樹 濱田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP09495897A priority Critical patent/JP3837446B2/en
Publication of JPH10270836A publication Critical patent/JPH10270836A/en
Application granted granted Critical
Publication of JP3837446B2 publication Critical patent/JP3837446B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3473Plating of solder

Landscapes

  • Wire Bonding (AREA)
  • Powder Metallurgy (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a solder plating method for spherules by which the amount of hydrogen gas stored in a solder plated film can be reduced by suppressing the occurrence of hydrogen itself during plating through a simple process. SOLUTION: When electroplating is performed by maintaining the total ion concentration at a high value of 20-50 g/l and the current density at a low value of 0.03-0.3 A/dm<2> , the occurrence of hydrogen can be suppressed and a solder film which is reduced in hydrogen content to <=0.05 ppm, particularly, <=0.03 ppm can be formed. When the spherules are coated with such a solder plated film, the occurrence of such a problem that the spherules come off and are scattered from a substrate or voids are formed in the film can be prevented.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、直径が0.1〜
1.0mm程度の微小球、特に金属球の外周面にハンダ
めっき被膜を設けるハンダめっき法の改良に係り、高イ
オン濃度のめっき液を用いて、極めて低い電流密度で電
気めっきを行い、微小球表面に所定厚みの水素含有量の
少ないハンダめっき被膜を設けた微小球のハンダめっき
に関する。
BACKGROUND OF THE INVENTION The present invention relates to a method for manufacturing
In connection with the improvement of the solder plating method of providing a solder plating film on the outer peripheral surface of a microsphere of about 1.0 mm, particularly a metal sphere, electroplating is performed at an extremely low current density using a plating solution having a high ion concentration. The present invention relates to soldering of microspheres having a predetermined thickness of a solder plating film having a small hydrogen content on the surface.

【0002】[0002]

【従来の技術】従来、BGA(Ball Grid A
rray)タイプの半導体パッケージのパンプ芯材とし
て用いられる微小球は、直径が0.1mm〜1.0mm
程度で、材質としては所定組成のハンダの他、最近で
は、電気特性や機械的特性を考慮して、コバール(Ni
−Co−Fe合金)、Cu、42Ni−Fe合金などの
金属球を芯材としてろう材を被覆したチップキャリアー
が提案(特開昭62−112355号)されている。
2. Description of the Related Art Conventionally, BGA (Ball Grid A)
The microsphere used as a pump core material of a (rray) type semiconductor package has a diameter of 0.1 mm to 1.0 mm.
In addition to solder having a predetermined composition, recently, Kovar (Ni) is used in consideration of electrical characteristics and mechanical characteristics.
-Co-Fe alloy), a chip carrier coated with a brazing material using metal spheres such as Cu and 42Ni-Fe alloy as a core material has been proposed (Japanese Patent Application Laid-Open No. 62-112355).

【0003】前記微小球の製造方法として、溶融金属を
所定温度の液体中に滴下し、溶融金属自体の表面張力に
て球形化してそのまま凝固するいわゆる液体中滴下方法
(特開平7−252510号)、金型によるフォーミン
グ等のいわゆる機械的塑性加工方法(特開平4−354
808号)、金属粒又は金属片を非酸化性雰囲気中で平
板上に載置して振動を加えながら加熱溶融してその表面
張力で球形化してそのまま凝固する振動加熱方法(特公
平2−50961号)などが提案されている。
As a method for producing the above-mentioned microspheres, a so-called liquid dropping method in which a molten metal is dropped into a liquid at a predetermined temperature, and the molten metal is formed into a sphere by the surface tension of the molten metal itself and solidified as it is (Japanese Patent Laid-Open No. 7-252510). , A so-called mechanical plastic working method such as forming with a die (Japanese Patent Laid-Open No. 4-354)
No. 808), a vibration heating method in which a metal particle or a metal piece is placed on a flat plate in a non-oxidizing atmosphere and heated and melted while applying vibration to form a sphere by its surface tension and solidify as it is (Japanese Patent Publication No. 2-50961). No.) has been proposed.

【0004】このように製造された微小球の外周面のろ
う材としては、要求される寸法精度や半導体パッケージ
とプリント基板との固着強度などにより適宜選定され
る。例えば、厚み5〜50μmの種々の組成からなるハ
ンダ(Pb−Sn系)が被覆され、必要に応じてNiな
どの下地層を形成することもある。
[0004] The brazing material for the outer peripheral surface of the microsphere manufactured as described above is appropriately selected depending on the required dimensional accuracy, the bonding strength between the semiconductor package and the printed board, and the like. For example, a solder (Pb-Sn-based) having a thickness of 5 to 50 μm and having various compositions is coated, and a base layer of Ni or the like may be formed as necessary.

【0005】通常のハンダめっき方法は、バレル方式を
用いる場合、イオン濃度が5〜13g/l、電流密度
0.5〜3.0A/dm2で行われる。(例えば、めっ
き教本電気鍍金研究会編、日刊工業新聞(1986年
刊、1996年第9版重版 P132〜P137)に記
されている。)
[0005] Method conventional solder plating, the case of using a barrel type, ion concentration 5~13g / l, performed at a current density 0.5~3.0A / dm 2. (For example, it is described in Plating Kyomoto Electroplating Research Society, edited by Nikkan Kogyo Shimbun (1986, ninth edition, reprinted from P132 to P137).)

【0006】[0006]

【発明が解決しようとする課題】このようにして外周面
にハンダめっき被膜を設けた微小球は、パッケージボー
ドに加熱溶着する際に、ハンダめっき被膜に膨れが生
じ、この膨れが破裂する際にボールが該基板から剥離飛
散する問題、あるいは加熱装着後のハンダめっき被膜内
にボイド(空隙)ができる問題があった。
The microspheres provided with the solder plating film on the outer peripheral surface in this way cause swelling of the solder plating film when being heated and welded to a package board. There has been a problem that the ball is peeled and scattered from the substrate, or a problem that voids (voids) are formed in the solder plating film after heating and mounting.

【0007】そのため従来は、パッケージボードの加熱
装着する前に、予め真空中または不活性ガス中で加熱し
て、脱ガス処理を行う必要があった。また、この処理を
行うとハンダが一部溶融してめっき被膜厚さが不均一に
なるという問題もあった。
Conventionally, therefore, it has been necessary to heat the package board in a vacuum or in an inert gas to perform a degassing process before mounting the package board by heating. Further, when this process is performed, there is a problem that the solder is partially melted and the coating thickness becomes uneven.

【0008】また、発明者らは、従来のこれらの問題に
ついて種々検討し、微小球のハンダめっき被膜中に吸蔵
される水素ガス量と相関関係があり、問題解決にはハン
ダめっき被膜中に吸蔵される水素ガス量を極力低減する
必要があることを知見し、ハンダめっき被膜中に吸蔵さ
れる水素ガス量を低減できるめっき方法として、めっき
浴に不活性ガスを導入してバブリングしながらめっきを
行う方法(特願平8−188834号)や、めっき浴槽
全体を減圧に保持する方法(特願平8−215429
号)を提案した。
Further, the present inventors have studied various conventional problems, and have a correlation with the amount of hydrogen gas occluded in the solder plating film of the microspheres. It is necessary to reduce the amount of hydrogen gas to be absorbed as much as possible, and as a plating method that can reduce the amount of hydrogen gas absorbed in the solder plating film, an inert gas is introduced into the plating bath and plating is performed while bubbling. (Japanese Patent Application No. 8-188834) or a method of maintaining the entire plating bath at reduced pressure (Japanese Patent Application No. 8-215429).
No.).

【0009】しかし、上記方法は、新たな処理工程を追
加する必要があったり、めっき反応時にいろいろな付帯
反応設備を取り付ける必要があり、作業性が劣るという
問題があった。
However, the above-mentioned method has a problem that it is necessary to add a new processing step or to install various incidental reaction equipment at the time of the plating reaction, resulting in poor workability.

【0010】この発明は、上述の問題に鑑み、工程が簡
単で、ハンダめっき被膜中に吸蔵される水素ガス量を低
減できる微小球のめっき方法の提供を目的としている。
In view of the above problems, an object of the present invention is to provide a method for plating microspheres, which has a simple process and can reduce the amount of hydrogen gas absorbed in a solder plating film.

【0011】[0011]

【課題を解決するための手段】発明者らは、めっき反応
を詳細に解析し、発生する水素ガスを除去するのではな
く、水素の発生そのものをめっき処理中で抑制する方法
について鋭意検討した結果、総イオン濃度を高濃度に
し、かつ低い電流密度で電気めっきを行うことにより、
水素の発生を抑制でき、水素量を0.05ppm以下、
特に0.03ppm以下に低減したハンダ被膜を生成で
きることを知見し、このめっき方法にて微小球、特に金
属球にハンダめっき被膜を設けると、前述した被膜の膨
れにて微小球が基板から剥離飛散する問題や被膜内にボ
イドができる問題を解消できることを確認し、この発明
を完成した。
Means for Solving the Problems The present inventors have analyzed the plating reaction in detail, and as a result of earnestly studying a method of suppressing the generation of hydrogen itself during the plating process instead of removing the generated hydrogen gas. By increasing the total ion concentration to a high concentration and performing electroplating at a low current density,
The generation of hydrogen can be suppressed, and the amount of hydrogen is 0.05 ppm or less,
In particular, it was found that a solder coating reduced to 0.03 ppm or less can be formed. When a solder plating coating is provided on microspheres, particularly metal spheres, by this plating method, the microspheres are separated and scattered from the substrate due to the swelling of the coating described above. It has been confirmed that the problem of the occurrence of voids and the problem of voids in the coating can be solved, and the present invention has been completed.

【0012】すなわち、この発明は、電気めっき法にて
微小球にハンダ被膜を生成する方法において、錫と鉛の
総イオン濃度が20〜50g/lのめっき液を用い、か
つ0.03〜0.3A/dm2の電流密度範囲で電気め
っきを行うことにより、ハンダ被膜中の水素量を0.0
5ppm以下に低減したことを特徴とする微小球のハン
ダめっき法である。
That is, the present invention provides a method for forming a solder coating on microspheres by electroplating, wherein a plating solution having a total ion concentration of tin and lead of 20 to 50 g / l is used, and By performing electroplating in a current density range of 3 A / dm 2, the amount of hydrogen in
This is a solder plating method for microspheres, which is reduced to 5 ppm or less.

【0013】[0013]

【発明の実施の形態】この発明によるめっき法は、めっ
き浴中の錫と鉛の合計イオン濃度を通常条件の5〜13
g/lよりも増加させて、20〜50g/lの高イオン
濃度のめっき液を用いることによって、錫−鉛析出電位
が貴な側へ移行することを利用し、かつ0.03〜0.
3A/dm2の低電流密度に設定することによって、ハ
ンダ(錫−鉛合金)の析出電位を水素の発生電位よりも
貴に保つことができ、水素の発生量を著しく抑制するこ
とができるものである。
BEST MODE FOR CARRYING OUT THE INVENTION The plating method according to the present invention is intended to reduce the total ion concentration of tin and lead in a plating bath to 5 to 13 of a normal condition.
g / l, and by using a plating solution having a high ion concentration of 20 to 50 g / l, utilizing the fact that the tin-lead deposition potential shifts to a noble side, and 0.03 to 0.1 g / l.
By setting a low current density of 3 A / dm 2 , the deposition potential of solder (tin-lead alloy) can be kept more noble than the generation potential of hydrogen, and the generation amount of hydrogen can be significantly suppressed. It is.

【0014】この発明において、めっき浴中の錫と鉛の
合計イオン濃度は、20g/l未満では水素発生電位よ
り貴な電位が得られ難く、水素の発生を伴い、また50
g/lを越えるとハンダ被膜組成(錫と鉛の比率)のコ
ントロールが難しくなるため、めっき浴のイオン濃度を
20〜50g/lに限定した。好ましい濃度範囲は25
〜35g/lである。
In the present invention, if the total ion concentration of tin and lead in the plating bath is less than 20 g / l, it is difficult to obtain a noble potential higher than the hydrogen generation potential.
If the amount exceeds g / l, it becomes difficult to control the composition of the solder coating (ratio of tin to lead), so the ion concentration of the plating bath was limited to 20 to 50 g / l. The preferred concentration range is 25
3535 g / l.

【0015】なお、めっき浴中の錫と鉛の合計イオン濃
度中の錫、鉛イオン濃度は、所望するハンダめっき組成
及びめっき条件によって異なるが、例えば錫60%、鉛
40%のハンダ被膜組成を得るためには、アルカノール
スルホン酸浴を用いて総イオン濃度を30g/l、0.
1A/dm2でめっきする場合、錫(Sn2+)イオン濃
度24〜27g/l、鉛(Pb2+)イオン濃度3〜6g
/lに調整することが好ましい。
The tin and lead ion concentrations in the total ion concentration of tin and lead in the plating bath vary depending on the desired solder plating composition and plating conditions. In order to obtain a total ion concentration of 30 g / l, 0.1 g using an alkanolsulfonic acid bath.
When plating at 1 A / dm 2 , tin (Sn 2+ ) ion concentration is 24-27 g / l and lead (Pb 2+ ) ion concentration is 3-6 g.
/ L is preferably adjusted.

【0016】また、陰極電流密度については、0.03
A/dm2未満では生産性が著しく悪くなる上、被膜表
面がザラつき良好なめっき被膜が得られない。また0.
3A/dm2を越えるとめっき反応時の水素発生量が増
大し、めっき被膜中の水素含有量が増大し目的とする製
品が得られない。従って、陰極電流密度を0.03〜
0.3A/dm2に限定した。さらに好ましい陰極電流
密度範囲は0.06〜0.15A/dm2である。
The cathode current density is 0.03
If it is less than A / dm 2 , the productivity will be remarkably deteriorated, and the film surface will be rough and a good plated film cannot be obtained. Also 0.
If it exceeds 3 A / dm 2 , the amount of hydrogen generated during the plating reaction increases, the hydrogen content in the plating film increases, and the desired product cannot be obtained. Therefore, the cathode current density is reduced from 0.03 to
It was limited to 0.3 A / dm 2 . A more preferable cathode current density range is 0.06 to 0.15 A / dm 2 .

【0017】この発明のめっきに使用するハンダめっき
液としては、アルカノールスルホン酸錫、アルカノール
スルホン酸鉛、フェノールスルホン酸錫、フェノールス
ルホン酸鉛などを含むめっき液を使用することができ、
電気めっき方法としては各種形状のバレル方式を用いる
ことができる。
As the solder plating solution used in the plating of the present invention, a plating solution containing tin alkanol sulfonate, lead alkanol sulfonate, tin phenol sulfonate, lead phenol sulfonate, or the like can be used.
As an electroplating method, various types of barrel systems can be used.

【0018】また、この発明において、微小球はCu、
ハンダなどの金属球のほかに、プラスチックス球に金属
被膜した球であっても同様にめっきすることができる。
In the present invention, the microspheres are Cu,
In addition to metal spheres such as solder, spheres formed by coating a plastic sphere with a metal can be similarly plated.

【0019】[0019]

【実施例】【Example】

実施例1 直径が0.6mmのCu線をプレスマシンによって定寸
切断し、直径D=0.6mm、長さL=0.64mmの
円柱状個片(L/D=1.07)としたCu個片を作製
し、これらを高級アルコールで脱脂した後、カーボン製
の平板状個片配置治具に形成されている穴内に振り込み
配置した後、水素雰囲気中で1150℃の電気炉内に2
0分配置して加熱溶融した後、25℃/分の冷却速度で
冷却して凝固させ直径0.7mmのCuボールを作製し
た。
Example 1 A Cu wire having a diameter of 0.6 mm was cut to a fixed size by a press machine to obtain a cylindrical piece (L / D = 1.07) having a diameter D = 0.6 mm and a length L = 0.64 mm. Cu pieces were prepared, degreased with a higher alcohol, placed in a hole formed in a carbon-made flat piece placing jig, placed in a hole, and then placed in an electric furnace at 1150 ° C. in a hydrogen atmosphere at 1150 ° C.
After heating and melting for 0 minute, it was cooled at a cooling rate of 25 ° C./min and solidified to produce a Cu ball having a diameter of 0.7 mm.

【0020】ハンダめっき浴として、錫(Sn2+) 2
5.2g/l、鉛(Pb2+) 4.8g/lを含んだア
ルカノールスルホン酸、半光沢剤を含むpH<1のめっ
き液を用い、浴温24℃にて電気めっきを開始した。電
気めっきは、水平バレルを用い、陰極電流密度0.06
A/dm2、陰極板としてSn/Pb=6/4にて電気
めっきを22時間めっきを行い、Cuボール外周面に膜
厚み37μmの共晶ハンダめっき層を被覆した。
As a solder plating bath, tin (Sn 2+ ) 2
Electroplating was started at a bath temperature of 24 ° C. using a plating solution of pH <1 containing an alkanolsulfonic acid containing 5.2 g / l and 4.8 g / l of lead (Pb 2+ ) and a semi-brightening agent. Electroplating uses a horizontal barrel and a cathode current density of 0.06
Electroplating was performed for 22 hours at A / dm 2 , Sn / Pb = 6/4 as a cathode plate, and the outer peripheral surface of the Cu ball was coated with a eutectic solder plating layer having a film thickness of 37 μm.

【0021】得られたこの発明によるハンダめっき層を
有するCuボールを、200℃、210℃、各10秒
間、各条件1000個を溶着した時の膨れ発生率及び基
板からの剥離飛散率を測定した。表1にその結果を示
す。また、TCD検出器法により、室温から600℃間
で温度を上昇させながら水素ガスの放出量を測定温度に
おけるピークごとに測定した。表2にその結果を示す。
The swelling rate and the rate of peeling and scattering from the substrate were measured when 1000 pieces of the Cu balls having the solder plating layer according to the present invention were welded at 200 ° C. and 210 ° C. for 10 seconds each for 1000 seconds. . Table 1 shows the results. Further, the amount of released hydrogen gas was measured for each peak at the measurement temperature while increasing the temperature from room temperature to 600 ° C. by the TCD detector method. Table 2 shows the results.

【0022】比較例1 実施例1と同様に作製したCuボールを用い、Sn2+
8.3g/l、Pb2+1.5g/l以外は実施例と同一
組成のめっき液を用い、実施例と同一条件でCuボール
外周面に膜厚み37μmの共晶ハンダめっき層を被覆し
た。その後、実施例1と同様に膨れ発生率、基板からの
剥離飛散率、水素ガス放出量をそれぞれ測定した。その
結果を表1,2に示す。
Comparative Example 1 Using Cu balls produced in the same manner as in Example 1, Sn 2+
A eutectic solder plating layer having a film thickness of 37 μm was coated on the outer peripheral surface of a Cu ball under the same conditions as in the example using a plating solution having the same composition as in the example except for 8.3 g / l and Pb 2+ 1.5 g / l. . Thereafter, in the same manner as in Example 1, the occurrence of blistering, the rate of separation and scattering from the substrate, and the amount of released hydrogen gas were measured. The results are shown in Tables 1 and 2.

【0023】[0023]

【表1】 [Table 1]

【0024】[0024]

【表2】 [Table 2]

【0025】[0025]

【発明の効果】この発明は、電気めっきにてハンダ被膜
を生成するにおいて、錫と鉛の総イオン濃度が20〜5
0g/lのめっき液を用い、かつ0.03〜0.3A/
dm2の極めて低い電流密度範囲で電気めっきを行うこ
とにより、ハンダめっき被膜中に吸蔵される水素量を
0.05ppm以下に低減できるもので、当該方法にて
微小球にハンダめっき被膜を設けると、実施例に明らか
なようにハンダめっき被膜を設けた微小球がパッケージ
ボードに加熱溶着した際に被膜の膨れが激減し、基板か
ら微小球が剥離飛散する問題が解消される。
According to the present invention, when a solder film is formed by electroplating, the total ion concentration of tin and lead is 20 to 5%.
0 g / l plating solution and 0.03 to 0.3 A /
By performing electroplating in an extremely low current density range of dm 2, the amount of hydrogen absorbed in the solder plating film can be reduced to 0.05 ppm or less. As is clear from the examples, when the microspheres provided with the solder plating film are heated and welded to the package board, the swelling of the coating is drastically reduced, and the problem that the microspheres peel off and scatter from the substrate is solved.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 電気めっき法にて微小球にハンダ被膜を
生成する方法において、錫と鉛の総イオン濃度が20〜
50g/lのめっき液を用い、かつ0.03〜0.3A
/dm2の電流密度範囲で電気めっきを行うことによ
り、ハンダ被膜中の水素量を0.05ppm以下に低減
した微小球のハンダめっき法。
1. A method of forming a solder coating on microspheres by electroplating, wherein the total ion concentration of tin and lead is 20 to
Using a plating solution of 50 g / l and 0.03 to 0.3 A
/ Dm 2 is a method for soldering microspheres in which the amount of hydrogen in a solder coating is reduced to 0.05 ppm or less by performing electroplating in a current density range of / dm 2 .
JP09495897A 1997-03-27 1997-03-27 Microsphere solder plating method Expired - Fee Related JP3837446B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09495897A JP3837446B2 (en) 1997-03-27 1997-03-27 Microsphere solder plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09495897A JP3837446B2 (en) 1997-03-27 1997-03-27 Microsphere solder plating method

Publications (2)

Publication Number Publication Date
JPH10270836A true JPH10270836A (en) 1998-10-09
JP3837446B2 JP3837446B2 (en) 2006-10-25

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002252141A (en) * 2001-02-26 2002-09-06 Hitachi Metals Ltd Electronic component
DE10340197B3 (en) * 2003-08-27 2004-09-23 Siemens Ag Process for electrochemical separation of metals from an electrolyte containing the metal ions to be separated and indium ions useful in separation of metal ions from electrolytes with decreased hydrogen build up at the electrodes
WO2007004581A1 (en) * 2005-06-30 2007-01-11 Nippon Mining & Metals Co., Ltd. Sn-PLATED COPPER ALLOY BAR HAVING EXCELLENT FATIGUE CHARACTERISTICS
US7265046B2 (en) 2002-09-27 2007-09-04 Neomax Material Co., Ltd. Method of making a solder ball
WO2021049437A1 (en) 2019-09-11 2021-03-18 株式会社新菱 Sn-bi-in-based low melting-point joining member, production method therefor, semiconductor electronic circuit, and mounting method therefor
WO2022050185A1 (en) 2020-09-04 2022-03-10 株式会社新菱 Low melting-point bonding member, method for producing same, semiconductor electronic circuit, and method for mounting said semiconductor electronic circuit
JP2022051945A (en) * 2015-03-03 2022-04-01 積水化学工業株式会社 Conductive particles, methods for manufacturing conductive particles, conductive materials and connecting structures

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002252141A (en) * 2001-02-26 2002-09-06 Hitachi Metals Ltd Electronic component
US7265046B2 (en) 2002-09-27 2007-09-04 Neomax Material Co., Ltd. Method of making a solder ball
DE10340197B3 (en) * 2003-08-27 2004-09-23 Siemens Ag Process for electrochemical separation of metals from an electrolyte containing the metal ions to be separated and indium ions useful in separation of metal ions from electrolytes with decreased hydrogen build up at the electrodes
WO2005021839A1 (en) * 2003-08-27 2005-03-10 Siemens Aktiengesellschaft Method for electrochemically depositing metals from an electrolyte
WO2007004581A1 (en) * 2005-06-30 2007-01-11 Nippon Mining & Metals Co., Ltd. Sn-PLATED COPPER ALLOY BAR HAVING EXCELLENT FATIGUE CHARACTERISTICS
US8182932B2 (en) 2005-06-30 2012-05-22 JP Nippon Mining & Metals Corporation Sn-plated copper alloy strip having improved fatigue characteristics
JP2022051945A (en) * 2015-03-03 2022-04-01 積水化学工業株式会社 Conductive particles, methods for manufacturing conductive particles, conductive materials and connecting structures
WO2021049437A1 (en) 2019-09-11 2021-03-18 株式会社新菱 Sn-bi-in-based low melting-point joining member, production method therefor, semiconductor electronic circuit, and mounting method therefor
WO2022050185A1 (en) 2020-09-04 2022-03-10 株式会社新菱 Low melting-point bonding member, method for producing same, semiconductor electronic circuit, and method for mounting said semiconductor electronic circuit

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