JPH0377345B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a floor structure in a clean room for manufacturing highly integrated circuits, for example, at an electronic component manufacturer.

(Conventional technology) Dust removal to maintain the cleanliness of industrial clean rooms is generally carried out using a method called a vertical laminar flow type. A double-bed structure system that allows air to flow out is known.

The area under the floor not only serves as an outlet for contaminated air, but also serves as pits for various equipment piping, special gas exhaust ducts, electrical wiring pits, etc.

In the conventional double floor structure, as shown in Fig. 2, a square (450 mm square or 600 mm square) floor plate 10 is supported by bundles 11 with a diameter of about 20 mm erected at the four corners. For example, as shown in Figure 3, support columns 20 are erected every 2 meters, and 2 joists are attached to these.
Place 1 and 22, assemble with earthquake-resistant brace 23,
A floorboard 24 was laid on top of it.

(Problem to be solved by the invention) However, with this structure, the pit area under the floor is very narrow, which limits the various ducts, piping, and wiring equipment that are important for the precision factory mentioned above, and makes maintenance work difficult. It was also extremely difficult.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a floor structure that increases the usage efficiency of floor suction pits in clean rooms, can flexibly respond to changes in production equipment, etc., and has earthquake-proof performance.

(Means for Solving the Problems) In the present invention, a plurality of concrete walls 1a are arranged at intervals on a floor slab 1 having a reinforced concrete structure, and a reinforced concrete floor portion 1b is horizontally formed at the upper end of the concrete wall. An opening is formed between the concrete walls in the reinforced concrete floor, and a joist 4,
A floor plate 2 covering the above-mentioned opening is constructed by spanning adjustment legs 5 and a floor plate 6. The adjustment legs 5 are erected on the joist 4, and the floorboard 6 is supported by the plurality of adjustment legs 5 above the joist.

(Function) Since the floor slab 2 is supported by the concrete wall 1a standing on the floor slab 1 and the reinforced concrete floor portion 1b, there is no need for conventional bundles or braces.

(Example) An example of the present invention will be described based on the drawings. 1st
As shown in the figure, an underfloor pit portion 1, which is a floor slab, has a reinforced concrete structure, and a plurality of concrete walls 1a, . . . are erected at intervals from this underfloor pit portion. A reinforced concrete floor section 1b is formed horizontally at the upper end of the concrete wall 1a, and the adjacent concrete floor sections 1b, 1b
A floor slab 2 is provided in the opening between the two to cover the opening.

The structure of the floor slab 2 is such that an H-shaped steel joist 4 is supported by angle members 3 fixed to the end face of the reinforced concrete floor 1b, and adjustment legs 5 for fine adjustment are provided on the top surface of this joist. , . . . are erected, and floor plates 6, . . . made of aluminum plates are supported by each adjusting leg.

Note that a cut edge 1d is attached to the upper edge of the reinforced concrete floor portion 1b, a drainer 1e is bored in the lower surface, and a drainer 3a is vertically provided on the lower surface of the angle member 3.

The distance between the concrete walls 1a is 3 to 6 meters, the width is 25 cm, and the concrete floor part 1
The thickness of b is 20 cm, and the distance from the bottom of the underfloor pit portion 1 to the top of the concrete floor is approximately 1.15 meters.

(Effects of the Invention) According to the present invention having the above configuration, a floor slab provided with a joist is passed through an opening between reinforced concrete floor sections formed in a concrete wall, and the floor slab is positioned below the floor slab. Since there is a space in the entire area of the floor slab where there are no bundles or braces, it is possible to lay long pipes, large diameter pipes, and thick ducts, increasing the efficiency of using the floor slab located below, and making it easier for production equipment. It can flexibly respond to changes such as
Since no braces are provided, the work becomes easier and maintenance work becomes easier, which is extremely effective in shortening the construction period and reducing construction costs. In addition, the concrete walls and reinforced concrete floor have high rigidity, making it resistant to earthquakes from both methods.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG.
3 and 3 are front views showing conventional examples, respectively. 1... Floor slab (underfloor pit part), 1a... Concrete wall, 1b... Reinforced concrete floor, 2... Floor slab, 3... Angle material, 4... Joist beam, 5... Adjustable leg,
6...Floorboard.

Claims (1)

[Claims] 1. A plurality of concrete walls are arranged at intervals on a floor slab of a reinforced concrete structure, a reinforced concrete floor is formed horizontally at the upper end of the concrete wall, and a reinforced concrete floor is formed between the concrete walls. An opening is formed, and a floorboard consisting of a joist, an adjustment leg, and a floorboard covering the opening is spanned over the opening, the adjustment leg is erected on the joist, and the floorboard is connected to the joist. A floor structure in a clean room characterized by being supported by a plurality of adjustable legs above a beam.