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JPH0355974B2 - - Google Patents

Info

Publication number
JPH0355974B2
JPH0355974B2 JP22838582A JP22838582A JPH0355974B2 JP H0355974 B2 JPH0355974 B2 JP H0355974B2 JP 22838582 A JP22838582 A JP 22838582A JP 22838582 A JP22838582 A JP 22838582A JP H0355974 B2 JPH0355974 B2 JP H0355974B2
Authority
JP
Japan
Prior art keywords
dry plate
hard dry
hard
stand
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22838582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59119355A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57228385A priority Critical patent/JPS59119355A/ja
Publication of JPS59119355A publication Critical patent/JPS59119355A/ja
Publication of JPH0355974B2 publication Critical patent/JPH0355974B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57228385A 1982-12-27 1982-12-27 露光装置 Granted JPS59119355A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57228385A JPS59119355A (ja) 1982-12-27 1982-12-27 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57228385A JPS59119355A (ja) 1982-12-27 1982-12-27 露光装置

Publications (2)

Publication Number Publication Date
JPS59119355A JPS59119355A (ja) 1984-07-10
JPH0355974B2 true JPH0355974B2 (fr) 1991-08-27

Family

ID=16875634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57228385A Granted JPS59119355A (ja) 1982-12-27 1982-12-27 露光装置

Country Status (1)

Country Link
JP (1) JPS59119355A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018087428A1 (fr) 2016-11-08 2018-05-17 Woodio Oy Articles comprimés et procédés de fabrication de ceux-ci
WO2020058579A1 (fr) 2018-09-21 2020-03-26 Woodio Oy Procédé de fabrication d'articles moulés

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018087428A1 (fr) 2016-11-08 2018-05-17 Woodio Oy Articles comprimés et procédés de fabrication de ceux-ci
WO2020058579A1 (fr) 2018-09-21 2020-03-26 Woodio Oy Procédé de fabrication d'articles moulés

Also Published As

Publication number Publication date
JPS59119355A (ja) 1984-07-10

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